JPH01120680U

JPH01120680U -

Info

Publication number: JPH01120680U
Application number: JP1245688U
Authority: JP
Priority date: 1988-02-01
Filing date: 1988-02-01
Publication date: 1989-08-16

Description

[Brief explanation of the drawing]

第１図は、実施例に係るビーム電流密度分布表
示装置を示す概略図である。第２図は、ビーム電
流密度分布の一例を示す図である。第３図は、ビ
ーム受部の一例を示す縦断面図である。第４図は
、ビーム受部の他の例を示す一部切欠き平面図で
ある。２……荷電粒子ビーム、４……ビーム受部、８
，８ａ〜８ｅ……コレクタ電極、１０ａ〜１０ｅ
……スイツチ、１２……制御回路、１４……表示
装置、１６……Ｘ軸入力部、１８……Ｙ軸入力部
。 FIG. 1 is a schematic diagram showing a beam current density distribution display device according to an embodiment. FIG. 2 is a diagram showing an example of beam current density distribution. FIG. 3 is a longitudinal sectional view showing an example of the beam receiver. FIG. 4 is a partially cutaway plan view showing another example of the beam receiver. 2...Charged particle beam, 4...Beam receiver, 8
, 8a-8e...collector electrode, 10a-10e
...Switch, 12...Control circuit, 14...Display device, 16...X-axis input section, 18...Y-axis input section.

Claims

[Scope of utility model registration request]

It has a beam receiving section having a plurality of collector electrodes that receive the charged particle beam, and a first input section and a second input section, and has a position corresponding to a signal input to the former and a size of a signal input to the latter. a display device for displaying an image; a switch for selectively switching and connecting the plurality of collector electrodes to a second input section of the display device; and a switch for controlling switching of the switch and corresponding to the switching. a control circuit for supplying a position signal to a first input portion of the display device.