JPH01120330U - - Google Patents
Info
- Publication number
- JPH01120330U JPH01120330U JP1507588U JP1507588U JPH01120330U JP H01120330 U JPH01120330 U JP H01120330U JP 1507588 U JP1507588 U JP 1507588U JP 1507588 U JP1507588 U JP 1507588U JP H01120330 U JPH01120330 U JP H01120330U
- Authority
- JP
- Japan
- Prior art keywords
- outer circumferential
- circumferential part
- quartz
- viewing window
- quartz disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1507588U JPH01120330U (sv) | 1988-02-05 | 1988-02-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1507588U JPH01120330U (sv) | 1988-02-05 | 1988-02-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01120330U true JPH01120330U (sv) | 1989-08-15 |
Family
ID=31226812
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1507588U Pending JPH01120330U (sv) | 1988-02-05 | 1988-02-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01120330U (sv) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008166653A (ja) * | 2007-01-05 | 2008-07-17 | Hitachi Kokusai Electric Inc | 基板処理装置 |
-
1988
- 1988-02-05 JP JP1507588U patent/JPH01120330U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008166653A (ja) * | 2007-01-05 | 2008-07-17 | Hitachi Kokusai Electric Inc | 基板処理装置 |