JPH01120330U - - Google Patents
Info
- Publication number
- JPH01120330U JPH01120330U JP1507588U JP1507588U JPH01120330U JP H01120330 U JPH01120330 U JP H01120330U JP 1507588 U JP1507588 U JP 1507588U JP 1507588 U JP1507588 U JP 1507588U JP H01120330 U JPH01120330 U JP H01120330U
- Authority
- JP
- Japan
- Prior art keywords
- outer circumferential
- circumferential part
- quartz
- viewing window
- quartz disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Description
図面は本考案覗き窓部の一実施例の構成を示す
説明用簡略断面図である。
１…石英円板、２…押えフランジ、３…Ｏリン
グ、５…（ステンレス）チヤンバ、６…不透明石
英部、７…取付具（ネジ類）。
The drawing is a simplified sectional view for explaining the structure of one embodiment of the viewing window section of the present invention. 1... Quartz disk, 2... Holder flange, 3... O-ring, 5... (stainless steel) chamber, 6... Opaque quartz part, 7... Fixtures (screws).
Claims (1)
英円板１の外周部を押えフランジ２で押え、取付
具７により取付けてなる半導体製造装置の覗き窓
部において、石英円板１の外周部を不透明石英部
６とした半導体製造装置の覗き窓部。 In a viewing window section of a semiconductor manufacturing apparatus in which the outer circumferential part of the quartz disk 1 is held down by a holding flange 2 with an O-ring 3 interposed in a part of the chamber 5, and the outer circumferential part of the quartz disk 1 is attached by a fixture 7, the outer circumferential part of the quartz disk 1 is A viewing window portion of a semiconductor manufacturing device in which an opaque quartz portion 6 is formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1507588U JPH01120330U (en) | 1988-02-05 | 1988-02-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1507588U JPH01120330U (en) | 1988-02-05 | 1988-02-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01120330U true JPH01120330U (en) | 1989-08-15 |
Family
ID=31226812
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1507588U Pending JPH01120330U (en) | 1988-02-05 | 1988-02-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01120330U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008166653A (en) * | 2007-01-05 | 2008-07-17 | Hitachi Kokusai Electric Inc | Substrate processing apparatus |
-
1988
- 1988-02-05 JP JP1507588U patent/JPH01120330U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008166653A (en) * | 2007-01-05 | 2008-07-17 | Hitachi Kokusai Electric Inc | Substrate processing apparatus |