JPH01120325U - - Google Patents
Info
- Publication number
- JPH01120325U JPH01120325U JP1507688U JP1507688U JPH01120325U JP H01120325 U JPH01120325 U JP H01120325U JP 1507688 U JP1507688 U JP 1507688U JP 1507688 U JP1507688 U JP 1507688U JP H01120325 U JPH01120325 U JP H01120325U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- columns
- concave grooves
- shaped
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001105 regulatory effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1507688U JPH01120325U (enExample) | 1988-02-05 | 1988-02-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1507688U JPH01120325U (enExample) | 1988-02-05 | 1988-02-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01120325U true JPH01120325U (enExample) | 1989-08-15 |
Family
ID=31226814
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1507688U Pending JPH01120325U (enExample) | 1988-02-05 | 1988-02-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01120325U (enExample) |
-
1988
- 1988-02-05 JP JP1507688U patent/JPH01120325U/ja active Pending
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