JPH01118820A - Optical matrix switch device - Google Patents

Abstract

PURPOSE:To perform switching with a low operating voltage without any polarization dependency by using the control optical switch of a front-stage optical matrix switch as a control optical switch for selecting the propagation path of one light beam and that of a rear stage as a control optical switch for selecting the propagation path of the other light beam. CONSTITUTION:The control optical switch 20 of the optical matrix switch 10 of the front stage is used as the control optical switch which selects one light propagation path and the control optical switch 20 of the optical matrix switch 24 of the rear stage is used as the control optical switch which selects the other light propagation path. Then the former and latter light beams are inputted to the matrix switch 10 of the front stage and inputted to the matrix switch 24 of the rear stage from the matrix switch 10 of the front stage through a deviation varying means 26 and then outputted to the optical circuit element of the rear stage from the optical matrix switch 24 of the rear stage. Consequently, the former and latter light beams are switched at the low operating voltage without any polarization dependency.

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention is directed to a polarization-independent optical matrix switch that electrically switches the transmission path of an optical signal.

(Prior Art) Optical matrix switches, which are constructed by providing waveguides and optical switches on a substrate, have advantages such as being able to be constructed in a compact size and operating voltage can be reduced, and research and development thereof is being actively conducted. ing.

This type of optical switch uses optical effects such as electro-optic effect and acousto-optic effect to switch signal light. Research is progressing. This optical switch is constructed using a ferroelectric crystal substrate having an electro-optic effect, such as a LiNbO3 substrate. Electric field (electric field) through the control electrode on the electro-optic crystal substrate
When applied, the refractive index of this substrate changes, so switching of signal light can be performed using the change in refractive index. Changes in the refractive index are closely related to the direction P of the electric field applied to the substrate and the vibration direction (polarization direction) Q of the electric field of the signal light. When the direction Q is a certain specific direction, the refractive index can be efficiently changed with a low operating voltage (the electro-optic effect becomes large). However, as the electric field direction P and polarization direction Q deviate from a specific direction, a larger operating voltage is required to change the refractive index, and the efficiency deteriorates (the electro-optic effect becomes smaller). For this reason, conventional optical switches that utilize the electro-optic effect are usually configured so that they can switch light only when input signal light has a specific polarization direction. Therefore, depending on the polarization direction of the input signal light, switching may or may not be performed, resulting in polarization dependence.

On the other hand, Reference 1 rJournal of Techno
loqy (Journal of Technology) J
Vol, LT-4, NO.

Optical switches that do not have polarization dependence are also being considered, such as the optical switch proposed in "II NOVEMBER 1986pp, 1717". In the optical switch of Document I, LiN having the above-mentioned properties is used as a substrate.
Using a bO3 substrate, it is configured to input signal light having a specific polarization direction and signal light having a polarization direction different from the specific polarization direction, and to perform switching between these two signal lights. Ta.

Furthermore, devices that are constructed using a compound semiconductor substrate such as GaAs or InP and that switch signal light by utilizing the electro-optic effect have also been proposed. However, conventionally proposed optical switches that utilize the electro-optic effect require an excessive operating voltage for light with a polarization direction different from a specific direction, making it virtually impossible to control the polarization. It was wave dependent. Therefore, in order to eliminate polarization dependence, a method has been proposed in which the refractive index of a compound semiconductor substrate is changed by current injection. In this optical switch, the optical switch is operated in a total reflection state or a transmission state by changing the refractive index of a current injection region, thereby switching signal light.

(Problem to be Solved by the Invention) However, in the conventional optical switch without polarization dependence as described above, the electro-optic effect is not limited to signal light having a specific polarization direction in which the electro-optic effect is large. In order to switch signal lights with different polarization directions where the polarization is small, the operating voltage is approximately 5 to 6 times higher than the operating voltage when switching only signal lights with a specific polarization direction. The problem was that it required

In addition, in optical switches that are not polarization-dependent and are constructed using compound semiconductor substrates, changes in the refractive index of the substrate are controlled by current injection, so the current consumption is lower than that of optical switches that utilize electro-optic effects. There are problems in that the number of optical switches increases and the operating speed of the optical switch becomes slow.

The first object of the invention of this application is to solve the above-mentioned problems of conventional optical switches constructed using ferroelectric crystal substrates, and to perform polarization-independent switching at a lower operating voltage. An object of the present invention is to provide an optical matrix switch device M.

The second invention of this application also aims to solve the above-mentioned problems of an optical switch constructed using a compound semiconductor substrate, and to provide a polarization-dependent optical switch that can reduce current consumption and increase operating speed. The purpose of the present invention is to provide an optical matrix switch device that has no optical characteristics.

(Means for solving the problem) In order to achieve this object, the first invention of this application is constructed using a ferroelectric crystal substrate, and two lights having polarization directions orthogonal to each other are inputted. A front-stage optical matrix switch configured using a ferroelectric crystal substrate and outputting two lights having mutually orthogonal polarization directions; connected in series, and bias changing means for changing the bias direction on the input surface of the subsequent optical matrix switch to a direction different from the polarization direction on the output surface of the preceding optical matrix switch, The controlled optical switch is a controlled optical switch that selects one of the light propagation paths, and the controlled optical switch of the subsequent optical matrix switch is a controlled optical switch that selects the other light propagation path.

Further, according to the optical matrix switch device of the second invention of this application, there is provided a front-stage optical matrix switch configured using a compound semiconductor crystal substrate and into which two lights having mutually orthogonal polarization directions are input, and a compound semiconductor. A rear-stage optical matrix switch configured using a crystal substrate and outputting two lights having polarization directions orthogonal to each other; and a rear-stage optical matrix switch in which these front-stage and rear-stage optical matrix switches are connected in series; The control optical switch of the preceding optical matrix switch is configured to change the direction of polarization at the input surface of the optical matrix switch to a direction different from the polarization direction of the output surface of the preceding optical matrix switch. The invention is characterized in that the control optical switch selects a path, and the control optical switch of the optical matrix switch in the subsequent stage is a control optical switch that selects the propagation path of the other light.

(Operation) According to the optical matrix switch device of the first invention having such a configuration, one light and the other light are inputted to the previous stage matrix switch, and are transmitted from the previous stage matrix switch to the latter stage through the bias changing means. The signal is input to the matrix switch, and output from the optical matrix switch at the subsequent stage to the optical circuit element at the next stage.

Therefore, with one light having a polarization direction such that switching can be performed with a lower operating voltage, and with the other light having a polarization direction such that switching requires a higher operating voltage, Even if the input light is input to the optical matrix switch in the previous stage, by changing the polarization direction using the polarization changing means, the polarization direction is changed so that switching can be performed at a lower operating voltage, and the other light is sent to the optical matrix switch in the latter stage. You can input it.

As a result, the optical matrix switch at the front stage selectively changes the propagation path of one light at a low operating voltage), and the optical matrix switch at the rear stage selects the propagation path of the other light at a low operating voltage. (selectively change).

Further, according to the optical matrix switch device of the second invention, one light and the other light are inputted to the previous stage matrix switch, and inputted from the previous stage matrix switch to the latter stage matrix switch via the bias changing means, Then, it is outputted from the optical matrix switch in the subsequent stage to the optical circuit element in the next stage.

Therefore, even if one light is input to the optical matrix switch in the previous stage with a polarization direction in which switching can be controlled by the electro-optic effect, and the other light is input in a polarization direction in which switching cannot be substantially controlled by the electro-optic effect, the polarization will be The other light can be input to the subsequent matrix switch as the direction of the polarized light can be controlled by switching using the electro-optic effect via the polarizing changing means.

As a result, the optical matrix switch at the front stage selectively changes the propagation path of one light by switching it by electro-optic effect), and the optical matrix switch at the rear stage changes the propagation path of the other light by electro-optic effect. It can be selected (selectively changed) by switching.

That is, when configured using a compound semiconductor substrate, a switching operation without polarization dependence can be performed using the electro-optic effect.

(Embodiments) Hereinafter, embodiments of the present invention will be described with reference to the drawings. It should be noted that the drawings are only schematic illustrations to enable understanding of the present invention, and therefore, the dimensions, shapes, arrangement relationships, forming materials, configurations, and numerical conditions of each component are not limited to the illustrated examples. do not have.

First Invention> Two Fork Flows (Description of Overall Configuration) In the first embodiment, an example will be described in which the optical matrix switches at the front and rear stages are optical matrix switches with a duplex configuration. FIG. 1 is a perspective view schematically showing the configuration of the first embodiment.

In the same figure, 28 indicates an optical matrix switch device, and this optical matrix switch device 28 is a front-stage optical matrix switch (hereinafter simply referred to as a front-stage switch) 10 into which two lights having mutually orthogonal polarization directions are input.
, a rear-stage optical matrix switch 24 (hereinafter simply referred to as a rear-stage switch) from which two lights having polarization directions perpendicular to each other are output, and polarization changing means 26 . The bias changing means 26 connects the front switch 10 and the rear switch 24 in series, and also connects the front switch 10 and the rear switch 24 in series.
The direction of bias on the input surface of No. 4 is changed to a direction different from the direction of bias on the output surface of the pre-stage switch 10.

The front switch 10 and the rear switch 24 are constructed using a ferroelectric crystal substrate 12.

In this embodiment, in order to configure the front optical switch edge 10, for example, a two-cut LiNbO3 substrate is prepared as the substrate 12, and Ti is diffused into this substrate 12 to form four input/output waveguides 14, each of which Two controlled optical switches 20 are provided in each input/output waveguide 14. As the control switch 20, for example, an inverted ΔB directional coupling type 2×2 optical switch element is used.

The control switches 20 are then grouped into a first group I and a second group H. For this grouping, the first group is composed of four control switches 20 arranged in two rows and two columns, two each for the input and output waveguides 14 in the first and second rows, and further The second group (2) is composed of four control switches 20 arranged in two rows and two columns, two each for the input/output waveguides 14 in the third and fourth rows. The control switches 20 of the first group I and the control switches 20 of the second group H are connected in the same row of the first group I, as shown in FIG. switch 20 and second group H
Control switches 20 selected from each row so as not to overlap each other are connected in correspondence with one pair.

The pre-stage switch 10 of this embodiment includes a substrate 12 configured as described above, an input/output waveguide 14, a control switch 20, and a communication waveguide 22.

Note that the left end of the input/output waveguide 14 is designated by 16, and the right end is designated by 18.

Further, the rear switch 24 in this embodiment is the front switch 1.
0, and thus includes a substrate 12, an input/output waveguide 14, a control switch 20, and a communication waveguide 22 configured as described above.

In the optical matrix switch snowmaking of this embodiment, since the front switch 10 and the rear switch 24 are connected in series, the right end 18 of the input/output waveguide of the front switch 10 is connected in series.
and the left end 16 of the input/output waveguide of the rear switch 24,
The bias changing means 26 connects them in a one-to-one correspondence.゛Then, the left ends 161 and 1 of the input/output waveguides 14 in the first row and the second row in the front stage switch 10
62, as input ports of the optical matrix switch W28, and the first and second rows in the subsequent switch 24;
Right ends +81, + of the input/output waveguides 14 in the third and fourth rows
82.183 and 184, optical matrix switch equipment
This is the output port of a28. By setting the input/output ports in this manner, light input from the input port 161 or 162 can be selectively output from either the output port 183 or 184.

When using a 2-cut LiNb○3 substrate as the substrate 12, the substrate 12 has a bias direction perpendicular to the substrate surface of the substrate 12.
It is known that the electro-optic effect on M-mode light is the largest. Therefore, if the propagation paths of one and the other lights are selectively changed when they are in the 7M mode, the operating voltage can be lowered.

When one light is inputted to the front stage switch 10 in the 7M mode, the other light is inputted in the TE mode having a deflection direction parallel to the board surface of the substrate 12, and the other light is inputted to the rear stage switch 24. When inputting the light of 1 in 7M mode, it is sufficient to input one of the lights in TE mode.

In order to change the polarization direction of the light in this manner, a PANDA type polarization maintaining fiber, for example, is used as the polarization changing means 26.

Figure 2 (A) and CB) are front views showing the left and right end faces of the polarization maintaining fiber as a polarization changing means, and Figure 2 (A) is connected to the right end of the input/output waveguide of the front switch. The left end face of the polarization-maintaining fiber in the state shown in Figure 2 (
B) shows the right end surface of the polarization maintaining fiber connected to the left end of the input/output waveguide of the subsequent switch.

In these figures, S indicates the axis of the bias changing means 26,
On the left end surface 26a and the right end surface 26b, two white circles T and T2 are drawn in order to explain the twisted state of the shaft S, respectively, arranged in a line in the diametrical direction. Moreover, when the shaft S is not twisted, the end surfaces 26a and 26
When b is viewed from the direction along the axis S, the arrangement direction of the circle marks T1 and the arrangement direction of the circle marks T2 are drawn so as to match.

As described above, in order to change one light from the 1FrTM mode to the TE mode and the other light from the TE mode to the 7M mode, when the left end surface 26a and right end surface 26b in the connected state are viewed along the axis S, As shown in FIGS. 2(A) and 2(B), the connections may be made such that the axis S is twisted by 90' so that the arrangement directions of the circles T and T2 are orthogonal to each other.

(Explanation of the structure of the optical switch element) FIG. 3 is a diagram showing an example of the structure of an optical switch element suitable for use in the control optical switch of this embodiment. For example, the configuration of a 2×2 optical switch element 21 of an inverted Δβ directional coupling type is shown more specifically.

In the figure, 30 and 32 indicate input/output waveguides, and the left end of each waveguide 30.32 is connected to input ports 30a, 32a.
and the right end are output boats 30b and 32b.

The waveguides 30 and 32 are provided on the substrate 12 so as to be close to each other and parallel to each other in the optical coupling region 34 . The waveguides 30 and 32 are formed, for example, by diffusing Ti7a into the substrate 12. Roughly speaking, the control electrodes 36a and 36b, which are divided into two, for example, are sequentially connected to the waveguide 30 of the optical coupling region 34 from the input boat 30a side.
For example, control electrodes 38a and 38b, which are divided into two, are provided in the four waveguides 32 sequentially from the input boat 32a side.

The input/output waveguides 30.32 and control electrodes 36a mentioned above.

Optical switch element 2 comprising 36b, 38a, 38b
1, a voltage of positive (+) polarity is applied to the control electrodes 36a, 38b and a voltage of negative (-) polarity is applied to the control electrodes 38b, 38a, so that the voltage between the waveguides 30 and 32 of the optical coupling region 34 is By causing light to interact with each other (so-called inversion operation), light switching can be performed.

The optical switch element 21 has Cross and B signals for TM waves.
It operates in any state of ar state, and T
If the structure is configured so that it operates only in the Cr08S state for E waves, the connection with the input/output waveguides can be made as follows, for example, as shown in Figure 1. In both cases, the input port 32a and the output port 30b of the optical switch element 21 are connected to the input/output waveguide 14, and the output port 32b of the optical switch element 21 of the first group I is connected to the input/output waveguide 14, respectively. and the input port 30a of the optical switch element 21 of the second group H are connected. Note that the connection of the optical switch 21 can be changed arbitrarily and suitably depending on how this element 21 is configured to operate.

Figure 4 shows the above-mentioned Δβ directional coupling type optical switch element 2.
1 ((L/β.)-(ΔβL/TT) diagram), with L/β on the horizontal axis. and 80L/ on the vertical axis
It is shown by taking π (where, is the element length, β is the coupling length, ΔB is the propagation constant difference, and π is the circumference).

In the figure, the hatched area P surrounded by a solid line is TM
The optical switch element 21 is
It shows a region in which the device operates in an ar state with a crosstalk of -20 dB or less, which is desirable in practice. Also,
A hatched region Q surrounded by a solid line indicates a region in which the optical switch element 21 operates in a cross state with respect to TM waves, and operates with a crosstalk of less than -20 dB, which is practically desirable. 'Similarly, the hatching area day and S surrounded by the dashed line are T
It shows a region in which the optical switch element 21 operates in a Bar state and a Cross state with respect to E-mode light (TE wave), and operates with crosstalk of -20 dB or less, which is practically desirable.

In the inversion β directional coupling type optical switch element 21, when the absolute value of the voltage (operating voltage) applied to the control electrodes 36a, 36b, 38a, and 38b is increased or decreased, Δβ increases or decreases, and accordingly, ΔβL / T[ also increases or decreases.

Therefore, a large value of ΔβL/π means that a large operating voltage is required.

Therefore, for TM waves and TE waves, the optical switch element 20
Comparing the operating voltages required to operate in the Bar state, as can be understood from Figure 4, the T
It can be understood that the M wave requires a smaller operating voltage. Similarly, when operating in the Cross state, TM
It can be understood that waves require a smaller operating voltage.

When compared under the same operating voltage, the electro-optic effect for TM waves is larger than that for TE waves, and the refractive index change for TM waves is approximately 3.3 times the refractive index change for TE waves.

Therefore, even if the operating voltage is increased or decreased so that the operating state of the optical switch element 21 with respect to the TM wave changes from the Cross state to the Bar state or from the Bar state to the Cross state, the optical switch element 21 21
However, it is possible to substantially operate only in the Bar state with respect to TE waves. Alternatively, it can be made to operate only in the Cross state (see Fig. 5).
A) and (B) 9), The design conditions for the optical switch element 21 that operates in this way are:
This can be easily determined based on the operating condition diagram shown in FIG.

5(A) and CB) are partially enlarged views of the operating condition diagram shown in FIG. 4. In these figures, S□
, and S'Tε indicate the production error tolerance range; in the illustrated example, STE is, for example, a range above the design value (design value xo, 375), and S', , is a range above the design value (design value x0.5). It has become.

In addition, in the region between curves L1 and L2 shown by broken lines, the optical switch element 21 is in a cross state with respect to the TE wave, and operates so that the loss is 0.45 dB or less (that is, the crosstalk is 110 dB or less). Similarly, in the region between the curves M and M2 shown by broken lines, the optical switch element 21 is in a Bar state with respect to the TE wave, and the loss is 0.
This shows a region in which the crosstalk is 45 dB or less (that is, the crosstalk is 110 dB or less).

As shown in FIG. 5(A), for example, L
/u, is L/β. = 2, and L for the TE wave
/ρ. Assume that the optical switch element 21 is created so that the value of is in the range of STE shown in the figure.1 If it is created in this way, even if the operating voltage is increased or decreased to switch the operating state for TM waves, the optical switch element 21 The switch element 21 operates substantially only in the cross state with respect to the TE wave.

Also, for example, a TM wave (the corresponding L/β is L/β.=2
The optical switch element 21 is set so that the value of L/I2c for the TE wave falls within the range of S'TE shown in the figure.
If this is created, even if the operating voltage is increased or decreased, the optical switch element 21 will essentially operate only in the Bar state with respect to the TE wave.

In the optical switch element 21 created in this way,
As is clear from FIG. 5(A), so that the value of ΔβL/'TI is in the range of a=a' or bb',
It can be seen that when an operating voltage is applied, the device operates in a Bar state or a Cross state with respect to TM waves, and the crosstalk is approximately 120 dB or less.

Moreover, when such an operating voltage is applied, the device can be operated in a Bar state or a Cross state with respect to TE waves, and the crosstalk is approximately -10 dB or less. These crosstalk values are practically satisfactory.

Similarly, as shown in FIG. 5(B), for example, L/u for TM waves. is L/u,=2.7, and L/β for the TE wave. If the optical switch element 21 is fabricated so that the value of is in the range of SA or S', 6, then, as described above, an optical switch that operates with a practically satisfactory level of crosstalk can be obtained. Element 21 can be obtained.

As can be understood from these FIGS. 5(A) and CB), β/β for the TM wave. Even if the value of is changed from 2 to 2.7, the ranges of STε and S′, , hardly change.

This is, for example, L/β for TM waves. is 2-2.7
L/β for TE waves in the range of . is the range of SA, or S'1. This means that the optical switch element 21 that operates with practically satisfactory crosstalk can be manufactured with a high yield under mild manufacturing conditions that fall within the range of . Therefore, by using a directional coupling type optical switch element 21 as the control optical switch 20, for example, the pre-stage switch 1 having practical losstalk characteristics can be obtained.
0 and the subsequent stage switch 241Fr can be manufactured with good yield under moderate manufacturing conditions.

(Example of Operation) FIGS. 6A and 6B are explanatory diagrams of an example of the operation of this embodiment. In the following description, the control switch 20 is configured with an optical switch element 21, and the optical switch element 21 is
For M waves, use Bar or Cross depending on the operating voltage.
A case will be described in which the device is created so that it selectively operates in the cross state and operates only in the cross state for TE waves regardless of the operating voltage.

As shown in FIG. 6(A), for example, one light X and the other light Y are input from the input port 161, and the output port 1
When outputting from the input/output waveguide 141 in the first row to the input/output waveguide 141 in the third row, the propagation path of one of the lights from this input/output waveguide 143 to the third output waveguide 143 of the subsequent switch 24.
It is input to the input/output waveguide 143' in the row. One light X is converted from a TM wave to a TE wave by the polarization changing means 26 and is input to the input/output waveguide 143'.
3' and is output from the output port 183. On the other hand, the other light Y input as a TE wave to the front switch io does not have its propagation path controlled by the front switch 10 and travels straight through the input/output waveguide 141 to the first switch of the rear switch 24.
It is input to the row input/output waveguide 141'. The other light Y is converted from a TE wave to a TM wave by the polarization changing means 26 and is input to the post-stage switch 24. By controlling its propagation path by the control switch 20 of the post-stage switch 24, the input/output waveguide 141 ' to the input/output waveguide 143' and output from the output port 183.

Leakage light X is generated when one light X passes through the control switch 20 of the subsequent switch 24 as a TE wave.

and leakage light Y that occurs when the other light Y passes through the control switch 20 of the front switch 10 as a TE wave.

Both of these are small, and as shown in the figure, the leaked lights x1 and Y+ escape to the substrate 12 without being mixed into the input/output waveguides 143' and 143, so they do not pose a practical problem.

Moreover, as shown in FIG. 6(B), for example, the - direction light
and the other light Y! When inputting from the input port 161 and outputting from the output port 181, the propagation path of the light X is
The input/output waveguide 141 of the first row is caused to go straight by controlling the control switch 20 of the front stage switch 10,
This input/output waveguide 141 is input to the input/output waveguide 141' of the subsequent switch 24. One light X is converted from a TM wave to a TE wave by the polarization changing means 26 and input to the input/output waveguide 141', so the propagation path is not controlled by the subsequent optical switch 24 and the input/output waveguide 141' is input to the input/output waveguide 141'. It goes straight and is output from the output port 181. On the other hand, the other light Y, whose propagation path is not controlled by the front switch 10, travels straight through the input/output waveguide 141 and is input to the input/output waveguide 141' of the rear switch 24. The other light Y is converted from a TE wave to a TM wave by the polarization changing means 26 and is input to the subsequent switch 24. By controlling its propagation path by the control switch 20 of the subsequent switch 24, the input/output waveguide 141 ’ and go straight to output port 1.
It can be output from 81.

Leak light x1 that occurs when one light X passes through the control switch 20 of the rear switch 24 as a TE wave, and the other light Y passes through the control switch 20 of the front switch 1o as a TE wave.
The leakage light Y1 that occurs when passing through is small, and the leakage light x1 and Y escape to the substrate 12 without entering the input/output waveguides 141' and 143, as shown in the figure. Therefore, leakage light X and Y do not pose a problem in practice.
l occurs because the TE wave is not controlled by the control switch 20.

In the embodiment described above, the input/output waveguides 14 having the same row numbers of the front-stage switch 10 and the rear-stage switch 24, for example, the input/output waveguides 141 and 141', are connected in a one-to-one correspondence. The input/output waveguides 14 of the switches 10 and 24 with different row numbers may be connected in a one-to-one correspondence. By arbitrarily setting the operating state of the control switch 20 for
．． It is possible to selectively output from either the 183 or 184 output port.

11 (Description of overall configuration) In the second embodiment, an example will be described in which the optical matrix switches of the front stage and the rear stage are crossbar type optical matrix switches.

FIG. 7 is a plan view schematically showing the configuration of the second embodiment. Components corresponding to those of the first embodiment described above are designated by the same reference numerals, and detailed explanation thereof will be omitted.

In the figure, 40 indicates an optical matrix switch, and this optical matrix switch device 40 includes a crossbar-type front-stage optical matrix switch 42 and a rear-stage optical matrix switch 44, and these front-stage switches 42 and rear-stage switches 44 are connected in series. and bias changing means 26.

The front switch 42 and the rear switch 44 are constructed using the ferroelectric crystal substrate 12.

The front switch 42 includes a substrate 12, two input/output waveguides 46 in the row direction, and two input/output waveguides 46 in the column direction provided on the substrate 12.
It consists of a main input/output waveguide 48 and four control optical switches 20 provided at the intersections of these waveguides 46 and 48, respectively. The control switch elements 20 are arranged in two rows and two columns. Like the front switch 42, the rear switch 44 also includes a substrate 12, two input/output waveguides 46, two input/output waveguides 48, and four control switches 20. In the figure, the left and right ends of the input/output waveguide 46 are indicated by reference numerals 50 and 52, and the upper and lower ends of the input/output waveguide 48 are indicated by reference numerals 54 and 56.

In the latter stage switch 44, the upper end 5 of the output waveguide 48
4 and the control switch 20 of the first row.
8, a leakage light eliminating means 58, for example, a TE wave transmission type polarizing filter is provided. As the polarizing filter, one having various conventionally known structures may be used. Furthermore, as the leakage light eliminating means 58, mode filters with various conventionally known structures may be used.The leakage light eliminating means 58 may be disposed on any suitable propagation path that can eliminate leakage light.For example, TM wave A transmission type leakage light eliminating means 58 may be provided in the input/output waveguide 48 by disposing it between the upper end 54 of the output waveguide 48 and the control switch 20 in the first row in the pre-stage switch 42 .

In addition, the right end 52 of the input/output waveguide 46 of the front stage switch 42
and the left end 50 of the input/output waveguide 46 of the rear switch 44, so as to connect the input/output waveguide 46 of the same row number.
Connecting. These input/output waveguides 46 are connected to the bias changing means 2 with the axis S twisted by 90 degrees, as in the first embodiment.
6, and in the same way, the front switch 42
The upper end 54 of the input/output waveguide 48 of the switch 44 is connected to the upper end 54 of the input/output waveguide 48 of the subsequent switch 44 via the bias changing means 26 with the axis S twisted by 90 degrees. in this case,
Input/output waveguides 48 having the same column number are connected.

In this way, the front switch 42 and the rear switch 44
Connect in series.

In this embodiment, the input/output waveguide 46 of the pre-stage switch 42
The left end 50 is the input port 501, 502 of the optical matrix switch device 140, and the right end 52 of the input/output waveguide 46 of the subsequent switch 44 and the lower end 56 of the input/output waveguide 48 are the optical matrix switch device! f40 output port 521.
522.561.562.

In the second embodiment configured as described above, the same effects as in the first embodiment can be obtained.

(Example of Operation) FIG. 8 is an explanatory diagram of an example of the operation of this embodiment. In the following explanation, the control optical switch is configured with an optical switch element 21, and the optical switch element 21 selectively operates in the Bar or Cr0SS state for TM waves depending on the operating voltage, and for TE waves. For Cross, regardless of the operating voltage
We will explain the case where it is created so that it only works in the state.

As shown in FIG. 8, for example, when one light X and the other light Y are input from the input port 461 and output from the output port 482, the propagation path of one light X input as a TM wave is , the control switch 20 of the front stage switch 42
The input/output waveguide 4 of the first row is controlled by
61 to the input/output waveguide 482 in the second row, and input from this input/output waveguide 482 to the input/output waveguide 482' in the second row of the subsequent switch 44. One of the lights
Then, the propagation path is not controlled and the input/output waveguide 482'!
It goes straight and is output from the output port 562. On the other hand, T.E.
The other light Y inputted into the front switch 42r as a wave goes straight through the input/output waveguide 461 without controlling its propagation path in the front switch 42 and enters the input/output waveguide 461' of the first row of the rear switch 44. is input. The other light Y is converted from a TE wave to a TM wave by the polarization changing means 26 and is input to the post-stage switch 44. By controlling its propagation path by the control switch 20 of the post-stage switch 44, the input/output waveguide 461 ', 482' can be made to go straight and output from the output port 562.

Leakage light X is generated when one light X passes through the control switch 20 of the subsequent switch 44 as a TE wave.

and the other light Y fJ (TE wave)
Leakage light Y1 that occurs when passing through the control switch 20 of No. 2
Both are small. Also, leakage light Y.

However, the input/output waveguide 48L482 and the input/output waveguide 481
', 482', the leakage light eliminating means 58
Since only E waves are transmitted, leakage light Y converted to TM waves
1 is removed. The leaked light Y1 escapes to the substrate 12 via the leaked light eliminating means 58.

A connection between the front switch 42 and the rear switch 44,
By arbitrarily setting the operating state of the control switch 2o for TM waves and TE waves, the input port 501
．． The lights (input signals) X and Y input from 502 can be selectively output from any of the output ports 521.522.561.562.

In the third embodiment, an example will be explained in which the optical matrix switches at the front and rear stages are optical matrix switches with a simplified tree configuration. In this example, the patent application No. 61
One of the embodiments of the invention proposed in No. 267700 was applied to an optical matrix switch which is a component of this first invention.

FIG. 9 is a plan view schematically showing the configuration of the third embodiment. Components corresponding to those of the above-mentioned first and second embodiments are designated by the same reference numerals, and detailed explanation thereof will be omitted.

In the figure, reference numeral 60 indicates an optical matrix switch device, and this optical matrix switch device M60 includes a front-stage optical matrix switch 62 and a rear-stage optical matrix switch 64 having a simplified tree configuration, and a front-stage optical matrix switch 62 and a rear-stage optical matrix switch 64 having a simplified tree configuration.
and a bias changing means 26 that connects a subsequent switch 64 in series.
It consists of

The front switch 62 and the rear switch 64 are constructed using the ferroelectric crystal substrate 12.

The front switch 42 includes a substrate 12, a 1×2 input end control optical switch 66, a 2×1 output side control optical switch 68,
2x2 for connecting these switches 66 and 68
It has a tree configuration in which all output side optical switches 68 are connected to one input side optical switch 66 via a 2×2 optical switch 70. In order to configure this front-stage switch 62, for example, the above-mentioned inverted Δβ directional coupling type 2×2 optical switch element 2 is used.
1, 1×2 input end optical switch 66. Used as 2×1 output side optical switch 68 and 2×2 optical switch 70.

As also shown, in this embodiment switch 66.6
For example, these switches 66, 68, and 70 are arranged in 4 rows and 3 columns and connected as described below. That is, the input optical switches 66 in the first and second rows are connected to both the optical switches 70 in the first and second rows, and the input optical switches 66 in the third and fourth rows are similarly connected. Each of them is connected to both the optical switches 70 in the third and fourth rows. Then, the optical switches 70 in the 2nd and 4th rows are connected to both the output side optical switches 68 in the 1st and 3rd rows, respectively. Each of them is connected to both the output side optical switches 68 of the second row and the fourth row. These switches 66, 68, 70 are connected via waveguides 72.

The rear switch 64 is also operated in the same manner as the front switch 62,
The configuration includes a substrate 12 and optical switches 66, 68, and 70.

Roughly speaking, the front switch 62 and the rear switch 64 are connected via the bias changing means 26 so that, for example, the output optical switch 68 of the front switch 62 and the input optical switch 66 of the rear switch 64 having the same row number are connected. Connect in series. This connection is made via the bias changing means 26 with the axis S twisted by 90°.

The input side optical switches 66 of the front-stage switch 62 are each
Input port door of M60 41.742.743.744
On the 6th, the output side optical switch of the post-stage switch 64 is connected to the output port door 61.762.76 of the installation M60, respectively.
3.764.

Then, a 7M wave transmission type leakage light eliminating means 58 is provided on any suitable propagation path of the leakage light. In the illustrated example, the first
Between the row optical switch 20 and the third row optical switch 68,
Between the optical switch 20 in the second row and the optical switch 68 in the fourth row, the optical switch 20 in the third row and the optical switch 6 in the first row
8 and between the fourth row optical switch 20 and the second row optical switch 68. The leakage light eliminating means 58 does not necessarily need to be provided.

In the third embodiment configured as described above, the same effects as in the first embodiment can be obtained.

(Example of Operation) FIG. 10 is an explanatory diagram of an example of the operation of this embodiment. In the following explanation, for example, the optical switches 66, 68, and 70 configured using the optical switch element 21 selectively operate in the Bar or CrosS state depending on the operating voltage for TM waves, and operate in the Bar or CrosS state for TE waves. Cros regardless of operating voltage.
We will explain the case where it is created so that it operates only in the s state.

As shown in FIG. 10, for example, one light
When outputting from the optical switch 66 . of the pre-stage switch 62 , the propagation path of one of the lights
70, one of the lights
The signal is propagated from the input side optical switch 66 of the row to the output side optical switch 68 of the third row, and input from the output side optical switch 68 of the front stage switch 62 to the input side optical switch 66 of the third row of the rear stage switch 64. One light X is biased by polarization changing means 2
6 converts the TM wave into a TE wave and inputs it to the input side optical switch 66 of the subsequent stage switch 64, so the subsequent stage switch 64 does not control its propagation path and goes straight to the output side optical switch 681 of the third row. is input. Then, through this output port side optical switch 68, the output port door 6
Output from 3. On the other hand, as a TE wave, the front switch 6
The other light Y inputted into the first line 2 travels straight without having its propagation path controlled by the pre-stage switch 62, and is therefore inputted from the input side optical switch 66 of the first row to the output side optical switch 68 of the first row. Then, the signal is inputted from the output side optical switch 68 of this pre-stage switch 62 to the input side optical switch 66 of the first row of the cross-stage switch 64. The other light Y is polarization changing means 2
6 converts the TE wave into a TM wave and inputs it to the subsequent switch 64, so its propagation path is changed to the subsequent switch 6.
By controlling the optical switches 66 and 70 of No. 4, it is possible to input from the input optical switch 66 of the first row to the output optical switch 68 of the third row. The other light Y
is connected to the output port door 63 via this output side optical switch 68.
is output from.

Leakage light x 1 that occurs when one light passes through the optical switch 70 of the rear switch 64 as an E wave, and leakage that occurs when the other light passes through the optical switch 701Fr of the front switch 62 as an E wave. Light Y is T because the leakage light eliminating means only transmits TM waves.
Leakage light X and Yl, which are E waves, are removed.

The leaked lights X+ and Y+ are transmitted to the substrate 1 via the leaked light eliminating means 58.
Escape to 2. In addition, in the four propagation paths in the straight direction (for example, the propagation path from the input port door 41 to the output port door 61), leakage light mixes from one of the propagation paths in any two straight directions to the other propagation path. When attempting to do so, it must pass through two control optical switches, so there is very little leakage light, and therefore there is almost no crosstalk between any two of these propagation paths in the straight direction. .

A connection between the front switch 62 and the rear switch 64,
Control optical switch for TM waves and TE waves 66.68.
By setting the operation state of 70 as desired, the light (input signals) X and Yl8 input from the input port door 41.742.743.744, and the output port door 61
．． It is possible to selectively output from any of the output ports of 762, 763, and 764.

FIG. 11 is an explanatory diagram of a modification of the optical matrix switch at the front stage and the front stage in the third embodiment, and schematically shows the structure thereof.
One of the embodiments of the invention proposed in the above is applied to the front-stage and rear-stage optical matrix switches.

In the figure, 74 is an optical matrix switch;
It is constructed using a ferroelectric crystal substrate 12. This optical matrix switch 74 is used as a front-stage and a rear-stage optical matrix switch.

This optical matrix switch 74 includes a 1×2 input end control optical switch 76 provided on the input side of the switch 74 and a 2×1 output side control optical switch 78 provided on the output side, and a switch provided between these switches 76 and 78. 4x4 unit matrix control switch 80.

It has a tree configuration in which all output side optical switches 78 are connected to one input side optical switch 76 via a unit trix switch 80P8. The input-side optical switches 76 are connected to the input ports 82 of the SWITCHIA 4, and the output-side optical switches 78 are connected to the output ports 84 of the switch 74, respectively, so that seven arbitrarily selected input ports 8 are connected.
A light propagation path from 2 to all output ports 84 is formed.

The unit matrix switch 80 is similar to the 4×4 optical matrix switch 62, 64 shown in FIG. Two switches 80 constitute a group p. The input ports 82 constitute a group q of four ports each. Eight output-side optical switches 78 constitute one group r.

The propagation path of light input to one of the input ports 82 of group p is branched into two by the input side optical switch 76 and connected to two unit matrix switches 80 of group q, respectively. The propagation paths are branched into eight by the unit matrix switch 80, and the eight branched propagation paths are respectively connected to eight output ports 84 via the output side optical switch 78 of group r.

The optical matrix switch 74 of this embodiment has two groups p, two groups q, and one group rlFr.
By redundantly using the output side optical switches 78 of one set of group r, propagation paths from any input port of group p to eight output ports are formed.

The output ports of the optical matrix switch 74 used as a front-stage optical matrix switch are associated one-to-one with the input ports of the optical matrix switch 74 used as a rear-stage optical matrix switch, respectively, and connected via polarization means. Thus, the optical matrix switch device of the first invention may be constructed.

<Second Invention> Below, the configuration of Embodiment 1 of the second invention will be schematically explained with reference to FIG. 1 1Fr9.

The optical matrix switch device M28 of this embodiment includes a pre-stage switch 1 constructed using a compound semiconductor crystal substrate 12.
0, a stage switch 24 constructed using a compound semiconductor crystal substrate 12, and bias changing means 26.

For example, a GaAs substrate is prepared as the compound semiconductor crystal substrate 12, and a rich (Ridc+e)
A type of input/output waveguide 14 is formed, and two control optical switches 20 are provided for each input/output waveguide 14.

Then, the control switches 20% are grouped into a first group and a second group H, and the control switches 20 of the first group and the control switches 20 of the second group H are connected via a communication waveguide 22. As shown in the figure, the control switches 20 provided in the same row of the first group work and the control switches 20 selected one by one from each row of the second group ■ so as not to overlap, are matched one to one. and connect.

The front switch 10 includes a substrate 12, an input/output waveguide 14, a control switch 20, and a communication waveguide 22. Similarly to the front switch 10, the rear switch 24 also includes a substrate 12, an input/output waveguide 14, an optical switch element 20, and a connecting waveguide 22.
It consists of:

In the optical matrix switch device 128 of this embodiment, the right end 18 of the input/output waveguide of the front stage switch 10 and the left end 16 of the input/output waveguide of the rear stage switch 24 are arranged in a one-to-one relationship.
They are connected by the bias changing means 26 in correspondence with each other. Then, the input/output waveguide 1 in the front stage switch 10
The left ends 161 and 162 of the optical matrix switch 128 are the input ports of the optical matrix switch 128, and the right ends 183 and 184 of the input/output waveguide 14 provided in the subsequent switch 24 are the output ports of the optical matrix switch M28.

It is known that when a GaAs substrate is used as the substrate 12, the electro-optic effect on TE waves is greatest.

Therefore, one light is input to the front switch 10 in the tTE mode and the other light is input in the 1M mode.

The propagation path of one light can be selectively controlled by the control switch 20 of the front-stage switch 10. One of the lights is input to the subsequent switch 24 through the polarization changing means 261Fr in the 1M mode, and the other light is input through the polarization changing means 26 in the TE mode. The propagation path of the other light can be controlled by the control switch 20 of the post-stage switch 24. Therefore, when constructed using a compound semiconductor crystal substrate, a switching operation without polarization dependence can be performed using the electro-optic effect.

In this case, the control switches 20 of the front-stage switch 10 and the rear-stage switch 24 are designed to operate in either the Cross state or the Bar state for TE waves where the electro-optic effect is large, and the control switches 20 are arranged so that the electro-optic effect is small. It is created so that it operates only in either the Cross state or the Bar state for the TM wave. Here, the phrase "the electro-optic effect is small" includes the case where there is substantially no electro-optic effect. The operating conditions and manufacturing conditions of the control light switch/v switch may be changed arbitrarily and suitably depending on the substrate material.

The connection relationship of each component in the snow making 28 of this first embodiment is the same as that of the first embodiment of the first invention, and therefore the light propagation path in the device 128 is formed in the same manner as the first embodiment. has been done.

Although the configuration of the control optical switch does not matter, it is preferable to use an optical switch having a single-electrode type control electrode as the control optical switch.

East 11 Sex 2 Hereinafter, with reference to FIG. 7, the configuration of the second embodiment of the second invention will be schematically explained.

The optical matrix switch M40 of this second embodiment includes a front-stage switch 42 constructed using a compound semiconductor crystal substrate 12, a rear-stage switch 44 constructed using the compound semiconductor crystal substrate 12, and bias changing means 26. .

The front switch 42 includes a substrate 12, two input/output waveguides 46 in the row direction, and two input/output waveguides 46 in the column direction provided on the substrate 12.
It consists of a main input/output waveguide 48 and four control optical switches 20 provided at the intersections of these waveguides 46 and 48, and has a crossbar type configuration. Like the front switch 42, the rear switch 44 also has a crossbar-type configuration consisting of a substrate 12, two input/output waveguides 46, two input/output waveguides 48, and four control optical switches 20. . For example, a rich type waveguide is used as the waveguide.

In the latter stage switch 44, the upper end 5 of the output waveguide 48
4 and the control switch 20 of the first row.
8 is provided with a leakage light eliminating means 58, for example, a TM wave transmission type polarizing filter. Various conventionally known polarizing filters may be used, and various conventionally known mode filters may be used as the leakage light eliminating means 58. The leakage light eliminating means 58 may be placed at any suitable position on the light propagation path that can eliminate leakage light. For example, a TE wave transmission type leakage light eliminating means 58 may be provided in the input/output waveguide 48 between the upper end 54 of the output waveguide 48 in the front stage switch 42 and the control switch 20 in the first row.

The front switch 42 and the rear switch 44 have an axis S of 90
They are connected in series through the bias changing means 261Fr in a twisted state.

Then, the left end 5 of the input/output waveguide 46 of the front stage switch 42
Input port 501 of optical matrix switch M40
．． 502, the right end 52 of the input/output waveguide 46 of the subsequent switch 44 and the lower end 56 of the input/output waveguide 48 are output ports 521, 522, 56 of the optical matrix switch H40.
It is set to 1.562.

By inputting one light into the front-stage switch 42 in TE mode and changing the other light into TE mode and inputting it into the rear-stage switch 44, the electro-optic effect can be utilized when constructed using a compound semiconductor crystal substrate. Switching operations without polarization dependence can be performed.

In this case, the optical switch elements 20 of the front-stage switch 42 and the rear-stage switch 44 are designed to operate in either the Cross state or the Bar state for the TE wave, which has a large electro-optic effect, and the optical switch elements 20 have a small electro-optic effect. It is created so that it operates only in either the Cross state or the Bar state for the TM wave. The operating conditions and manufacturing conditions of the optical switch element may be changed as desired depending on the substrate material.

The connections between the components in the device M40 of this second embodiment are the same as in the second embodiment of the first invention, and therefore the light propagation path in the device M40 is formed in the same manner as in the second embodiment. has been done.

Although the configuration of the control optical switch does not matter, it is preferable to use an optical switch having a single-electrode type control electrode as the control optical switch.

Hereinafter, with reference to FIG. 9, the configuration of the third embodiment of the second invention will be schematically explained.

The optical matrix switch device 60 of this third embodiment includes a front-stage switch 62 configured using a compound semiconductor crystal substrate 12, a rear-stage switch 64 configured using the compound semiconductor crystal substrate 12, and a bias changing means 26. Become. For example, a rich type waveguide is used as the waveguide.

The front switch 42 includes a substrate 12, a 1×2 input end control optical switch 66, a 2×1 output side control optical switch 68,
It is equipped with a 2×2 control optical switch 70 for connecting these elements 66 and 68, and all the output side optical switches 68 are connected to one input side optical switch 66 via the 2×2 optical switch 70. 0 with a tree configuration such that it is connected
For example, the above-mentioned inverted Δβ directional coupling type 2×2 optical switch element 21 may be used as a 1×2 input end optical switch 66, a 2×1 output end optical switch 68 and a 2×2 optical switch 70, or a single Optical switch 6 is an electrode type optical switch.
It may also be used as 6.68.70.

The rear switch 64 is also operated in the same manner as the front switch 62,
It has a tree configuration comprising a board 12, switches 66, 68 and 70.

The front switch 62 and the rear switch 64 have an axis S of 90
``They are connected in series via the bias changing means 26 in a twisted state.

Each of the input side optical switches 66 of the front stage switch 62 is equipped with a 1160 input port door 41.742.743.
744 and the output side optical switches 68 of the subsequent switch 64 are respectively connected to the output port doors 61.7 of the device 160.
Connected to 62.763.764.

In the case of the illustrated example, a TE wave transmission type leakage light eliminating means 58 is provided on any suitable propagation path of the leakage light.
The row optical switch 70 and the third row optical switch 68,
Between the second row optical switch 70 and the fourth row optical switch 68, the third row optical switch 70 and the first row optical switch 6
8 and in the darkness of the fourth row optical switch 70 and the second row optical switch 68.

By inputting one light into the front-stage switch 62 in TE mode and changing the other light into tTE mode and inputting it into the rear-stage switch 64, the electro-optic effect can be utilized when constructed using a compound semiconductor crystal substrate. Switching operation without polarization dependence can be performed.

In this case, the optical switches 66, 68, and 70 of the front-stage switch 62 and the rear-stage switch 64 are designed to operate in either the Cross state or the Bar state for TE waves, which have a large electro-optic effect, and are designed to operate in either the Cross state or Bar state. It is created so that it operates only in either the Cross state or the Bar state for TM waves, which have a small effect. The operating conditions and manufacturing conditions of the optical switch element may be changed as desired depending on the substrate material.

The connections between the components in the device 160 of this third embodiment are the same as in the third embodiment of the first invention, and therefore the light propagation path in the device 160 is formed in the same manner as in the third embodiment. has been done.

This third embodiment can also be modified in the same manner as the modification of the third embodiment of the first invention.

The present invention is not limited to the above-mentioned embodiments, and the configuration, forming material, arrangement position, numerical conditions, and other design conditions of each component can be changed as desired depending on the design.

For example, the substrate material has an optical effect, e.g. LiNbO
2. Other ferroelectric crystals, GaAs, and other semiconductor materials may also be used.

In addition, the configuration of the front-stage and return-stage optical matrix switches may use optical matrix switches of various configurations that have been proposed in the past. Typical configurations include, for example, a duplex configuration, a crossbar type, and a general type. There are traditional tree structures and simplified tree structures.

For example, in the case of a duplex configuration, n2 control optical switches of the first group are arranged in the own row and n column, and n2 control optical switches of the second group II are arranged in the n row and n column. and a pair of n control optical switches in the same row of the first group H and n control optical switches selected one by one from different columns of the second group H so as not to overlap. It is also possible to use an optical matrix switch with a configuration connected to 1.The control optical switches of the 1st group and the control optical switches of the 2nd group H connected in this way are all in one-to-one correspondence without duplication. connected.

Alternatively, in the case of a crossbar type configuration, for example, 0
The book is equipped with an input/output waveguide in the row direction, zero input/output waveguides in the column direction, and n2 control optical switches provided at the intersections of the input/output waveguides in the row direction and the column direction, respectively. An optical matrix switch may also be used.

Furthermore, the control optical switch may be composed of a single optical switch element or a plurality of optical switch elements, and the control optical switch may be configured such that the control optical switch is configured so that the light is directed in a polarized direction where the electro-optic effect is reduced. Bar state or Cro
It may be configured to operate only in one of the ss states, or it may be configured to function as a passive branch. Optical switch elements for constructing a controlled optical switch may have various configurations.
For example, a directional coupling type optical switch element or a total reflection type optical switch element may be used.

Further, the polarization changing means may be any suitable means capable of changing the polarization direction of the light.

Further, the leakage light eliminating means may or may not be provided. By providing the leakage light eliminating means, it is possible to make the crosstalk characteristics equivalent to those of an optical matrix switch having polarization dependence.

The optical matrix switch devices of the first and second inventions are suitable for use in polarization multiplexing (double) switching.

(Effects of the Invention) As is clear from the above description, according to the first invention of this application, one light is polarized in such a way that switching can be performed at a lower operating voltage; Even if the other light is input to the front matrix switch in a state where it has a polarization direction that requires a higher operating voltage for switching, by changing the polarization direction using the polarization changing means, the switching of the other light can be made more efficient. It can be input to the subsequent optical matrix switch in a state with a bias direction that can be performed at a low operating voltage.

Therefore, by controlling the propagation path of one light in the optical matrix switch in the previous stage and controlling the propagation path of the other light in the optical matrix switch in the latter stage, one and the other light can be controlled at a low operating voltage. Can be switched.

Further, according to the second invention of this application, one light is polarized in a direction in which switching can be controlled by the electro-optic effect, and the other light is polarized in a polarized direction in which switching cannot be controlled substantially by the electro-optic effect. Even if the light is input to the matrix switch, by changing the polarization direction using the polarization changing means, the other light can be input to the subsequent optical matrix switch in a polarization direction that can be controlled by switching using the electro-optic effect.

As a result, in the optical matrix switch at the front stage, the propagation path of one light can be switched and controlled by the electro-optic effect, and in the optical matrix switch at the rear stage, the propagation path of the other light can be controlled by the electro-optic effect. . Therefore, even when constructed using a compound semiconductor substrate, polarization-independent switching using the electro-optic effect can be performed. Since the electro-optic effect is utilized, it is possible to provide an optical matrix switch device which operates faster and consumes less current than an optical matrix switch device configured using a conventional current injection type optical switch.

[Brief explanation of the drawing]

Figure 1 shows the first embodiment of the first invention and the first embodiment of the second invention.
FIG. 2 (A) and (B) are explanatory diagrams of the bias changing means. FIG. 3 is an explanatory diagram of the configuration of the optical switch element. FIG. 4 is a diagram of the operating conditions of the optical switch element. , FIGS. 5(A) and (8) are partially enlarged diagrams of operating condition diagrams, FIGS. 6(A) and CB) are explanatory diagrams of operating examples of the first embodiment, and FIG. Second embodiment of the first invention and Example 2 of the second invention
FIG. 8 is an explanatory diagram of the operation example of the second embodiment. FIG. 9 is an explanatory diagram of the configuration of the third embodiment of the first invention and the third embodiment of the second invention. 11 is an explanatory diagram of an operation example of the third embodiment, and FIG. 11 is an explanatory diagram of the configuration of a modified example of the optical matrix switch in the third embodiment of the first invention and the third embodiment of the second invention. 10.42.62(,74) --- Front stage optical matrix switch 20.66.68.70.76.78 ---
Controlled optical switch 24.44.64 (,74) -, Later stage optical matrix switch 26 - Bias change means 28.40.60 - Optical matrix switch device. 10, front stage switch 22: communication waveguide 12, substrate
24: Post-stage switch 14, input/output waveguide
26: Bias change means 16 left end 2nd - optical matrix switch device 18, right end 161
．． 162: Input boat 20: Control switch 181
, 182.183.184 + Output port - Explanatory diagram of Example and Example 1 FIG. 1 (A) (B) 26a: Left end surface 26b: Right end surface FIG. 2 30. 32: Input/output waveguide 34: Bonding region 36a, 3
6b, 38a, 38b: Block diagram of control electrode optical switch element, Fig. 3, 8βL/n Operating condition diagram of optical switch element, Fig. 4 (A) Fig. 6, 40: Optical matrix switch device 50: Left end 42 :
Front stage switch 52: Right end 44: Back stage switch 54: Upper end 46. 48: Input/output waveguide 56: Lower end 58: Leakage light eliminating means Explanatory diagram of the second embodiment and embodiment 2 Figure 7 Operation example of the second embodiment Explanatory diagram of Fig. S 60: Optical matrix switch equipment M 66.68.7
0: Control switch 62: Front stage switch
741, 742, 743.744: Input port 4/later switch? 61.762.763,
764: Output door 2: Explanatory diagram of waveguide second embodiment and embodiment 3 FIG. 9 74: Optical matrix switch 76: Input side optical switch 78: Output side optical switch 80: Unit matrix switch 82: Input port 84: Modified example of output boat optical matrix switch Fig. 11 Display of case 1986 Patent Application No. 277939 2 Name of invention Optical matrix switch Soso 3 Relationship with the case of person making amendment Patent applicant address (〒-105 ) 1-7-12 Toranomon, Minato-ku, Tokyo Name (029) Oki Electric Industry Co., Ltd. Representative Komura Polarization 4 Agent 170 fl (988) 5563 Address 1-20-56 Higashiikebukuro, Toshima-ku, Tokyo Details subject to amendment Contents of amendment in Column 7 of Detailed Description of the Invention of the Book As attached, rof Techn on page 4, line 18 of the specification.
olo9y J% ff'of Lightwave
Corrected “Technoloqy A” and added “
Off Technology"Worai Bright Wave Technology 1 is corrected. (2), page 32, lines 6-7, “Late switch 44
The right end 52 of the input/output waveguide 46 and the input/output waveguide 48''
Correct it to be the input/output waveguide 48A of the r post-stage switch 44,
"Output port 521.522.561" in lines 8-9 of the same page
．． 562" is corrected to r output port 56L562 Jl. (3), ``Output port 521.'' on page 34, line 19.
522.561.562 J r output port 56L56
2, correct it as J. (4), same, page 47, line 18, “single electrode type” is replaced with “
Corrected to J for single-electrode type or inverted Δβ electrode type. (5), ``The right end 52 of the input/output waveguide 46 of the rear switch 44 and the input/output waveguide 4'' on page 49, lines 16-17 of the same publication.
8" is corrected as the input/output waveguide 480 of the r post-stage switch 44, and the [output port 521.522
．． 561.562''l[i'output port 561.562
Correct it to Jl. (6), same, page 50, line 20, “single electrode type” is replaced with “
Corrected to J for single-electrode type or inverted ΔB electrode type.

Claims (2)

[Claims] (1) A front-stage optical matrix switch configured using a ferroelectric crystal substrate and into which two lights with polarization directions orthogonal to each other are input; A rear-stage optical matrix switch that outputs two lights having different directions, and these front- and rear-stage optical matrix switches are connected in series, and the polarization direction at the input surface of the rear-stage optical matrix switch is set to the front-stage optical matrix. and a bias changing means for changing the polarization direction in a direction different from the polarization direction on the output surface of the switch, the control optical switch of the front-stage optical matrix switch is a control optical switch that selects one of the propagation paths of light, and the control optical switch of the rear-stage optical matrix switch An optical matrix switch device, characterized in that the control optical switch of the optical matrix switch is a control optical switch that selects the propagation path of the other light. (2) A front-stage optical matrix switch configured using a compound semiconductor crystal substrate and into which two lights having polarization directions perpendicular to each other are input; A rear-stage optical matrix switch that outputs two lights having the same characteristics as the front-stage optical matrix switch is connected in series with these front-stage and rear-stage optical matrix switches, and the direction of polarization at the input surface of the latter-stage optical matrix switch is set to that of the front-stage optical matrix switch. polarization changing means for changing the polarization direction in a direction different from the polarization direction on the output surface, the control optical switch of the front-stage optical matrix switch is a control optical switch that selects a propagation path of one of the lights, and the control optical switch of the front-stage optical matrix switch selects a propagation path of one light, An optical matrix switching device characterized in that the control optical switch of the switch is a control optical switch that selects the propagation path of the other light.