JPH01118224U - - Google Patents

Info

Publication number
JPH01118224U
JPH01118224U JP1332288U JP1332288U JPH01118224U JP H01118224 U JPH01118224 U JP H01118224U JP 1332288 U JP1332288 U JP 1332288U JP 1332288 U JP1332288 U JP 1332288U JP H01118224 U JPH01118224 U JP H01118224U
Authority
JP
Japan
Prior art keywords
movable body
air bearing
hydrostatic air
stationary base
magnets
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1332288U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1332288U priority Critical patent/JPH01118224U/ja
Publication of JPH01118224U publication Critical patent/JPH01118224U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Magnetic Bearings And Hydrostatic Bearings (AREA)
JP1332288U 1988-02-02 1988-02-02 Pending JPH01118224U (US20100056889A1-20100304-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1332288U JPH01118224U (US20100056889A1-20100304-C00004.png) 1988-02-02 1988-02-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1332288U JPH01118224U (US20100056889A1-20100304-C00004.png) 1988-02-02 1988-02-02

Publications (1)

Publication Number Publication Date
JPH01118224U true JPH01118224U (US20100056889A1-20100304-C00004.png) 1989-08-10

Family

ID=31223529

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1332288U Pending JPH01118224U (US20100056889A1-20100304-C00004.png) 1988-02-02 1988-02-02

Country Status (1)

Country Link
JP (1) JPH01118224U (US20100056889A1-20100304-C00004.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11294456A (ja) * 1998-04-09 1999-10-26 Nippon Seiko Kk 静圧空気軸受直線案内装置
JP2003111352A (ja) * 2001-09-26 2003-04-11 Dainippon Screen Mfg Co Ltd 基板処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11294456A (ja) * 1998-04-09 1999-10-26 Nippon Seiko Kk 静圧空気軸受直線案内装置
JP2003111352A (ja) * 2001-09-26 2003-04-11 Dainippon Screen Mfg Co Ltd 基板処理装置

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