JPH01114668U - - Google Patents
Info
- Publication number
- JPH01114668U JPH01114668U JP669988U JP669988U JPH01114668U JP H01114668 U JPH01114668 U JP H01114668U JP 669988 U JP669988 U JP 669988U JP 669988 U JP669988 U JP 669988U JP H01114668 U JPH01114668 U JP H01114668U
- Authority
- JP
- Japan
- Prior art keywords
- pole
- magnetic pole
- magnetic
- bent
- target surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims description 8
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP669988U JPH01114668U (no) | 1988-01-22 | 1988-01-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP669988U JPH01114668U (no) | 1988-01-22 | 1988-01-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01114668U true JPH01114668U (no) | 1989-08-02 |
Family
ID=31211083
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP669988U Pending JPH01114668U (no) | 1988-01-22 | 1988-01-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01114668U (no) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012012700A (ja) * | 2010-06-03 | 2012-01-19 | Canon Anelva Corp | 磁石ユニットおよびマグネトロンスパッタリング装置 |
-
1988
- 1988-01-22 JP JP669988U patent/JPH01114668U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012012700A (ja) * | 2010-06-03 | 2012-01-19 | Canon Anelva Corp | 磁石ユニットおよびマグネトロンスパッタリング装置 |