JPH01114667U - - Google Patents
Info
- Publication number
- JPH01114667U JPH01114667U JP772288U JP772288U JPH01114667U JP H01114667 U JPH01114667 U JP H01114667U JP 772288 U JP772288 U JP 772288U JP 772288 U JP772288 U JP 772288U JP H01114667 U JPH01114667 U JP H01114667U
- Authority
- JP
- Japan
- Prior art keywords
- superconducting
- chamber
- producing
- anode
- cathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000843 powder Substances 0.000 claims description 3
- 239000000696 magnetic material Substances 0.000 claims description 2
- 238000004544 sputter deposition Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 2
- 239000000126 substance Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP772288U JPH01114667U (id) | 1988-01-26 | 1988-01-26 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP772288U JPH01114667U (id) | 1988-01-26 | 1988-01-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01114667U true JPH01114667U (id) | 1989-08-02 |
Family
ID=31212975
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP772288U Pending JPH01114667U (id) | 1988-01-26 | 1988-01-26 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01114667U (id) |
-
1988
- 1988-01-26 JP JP772288U patent/JPH01114667U/ja active Pending
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