JPH01113989U - - Google Patents
Info
- Publication number
- JPH01113989U JPH01113989U JP818988U JP818988U JPH01113989U JP H01113989 U JPH01113989 U JP H01113989U JP 818988 U JP818988 U JP 818988U JP 818988 U JP818988 U JP 818988U JP H01113989 U JPH01113989 U JP H01113989U
- Authority
- JP
- Japan
- Prior art keywords
- heater
- bent portion
- heater element
- air heater
- insulator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012212 insulator Substances 0.000 claims description 6
- 238000002485 combustion reaction Methods 0.000 claims 2
- 238000009413 insulation Methods 0.000 description 1
Landscapes
- Resistance Heating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP818988U JPH0452955Y2 (en:Method) | 1988-01-27 | 1988-01-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP818988U JPH0452955Y2 (en:Method) | 1988-01-27 | 1988-01-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01113989U true JPH01113989U (en:Method) | 1989-07-31 |
| JPH0452955Y2 JPH0452955Y2 (en:Method) | 1992-12-11 |
Family
ID=31213845
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP818988U Expired JPH0452955Y2 (en:Method) | 1988-01-27 | 1988-01-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0452955Y2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011222257A (ja) * | 2010-04-08 | 2011-11-04 | Sumitomo Electric Ind Ltd | ウェハ加熱用ヒータユニットおよびそれを搭載した半導体製造装置 |
-
1988
- 1988-01-27 JP JP818988U patent/JPH0452955Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011222257A (ja) * | 2010-04-08 | 2011-11-04 | Sumitomo Electric Ind Ltd | ウェハ加熱用ヒータユニットおよびそれを搭載した半導体製造装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0452955Y2 (en:Method) | 1992-12-11 |