JPH01113989U - - Google Patents

Info

Publication number
JPH01113989U
JPH01113989U JP818988U JP818988U JPH01113989U JP H01113989 U JPH01113989 U JP H01113989U JP 818988 U JP818988 U JP 818988U JP 818988 U JP818988 U JP 818988U JP H01113989 U JPH01113989 U JP H01113989U
Authority
JP
Japan
Prior art keywords
heater
bent portion
heater element
air heater
insulator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP818988U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0452955Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP818988U priority Critical patent/JPH0452955Y2/ja
Publication of JPH01113989U publication Critical patent/JPH01113989U/ja
Application granted granted Critical
Publication of JPH0452955Y2 publication Critical patent/JPH0452955Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Resistance Heating (AREA)
JP818988U 1988-01-27 1988-01-27 Expired JPH0452955Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP818988U JPH0452955Y2 (enrdf_load_stackoverflow) 1988-01-27 1988-01-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP818988U JPH0452955Y2 (enrdf_load_stackoverflow) 1988-01-27 1988-01-27

Publications (2)

Publication Number Publication Date
JPH01113989U true JPH01113989U (enrdf_load_stackoverflow) 1989-07-31
JPH0452955Y2 JPH0452955Y2 (enrdf_load_stackoverflow) 1992-12-11

Family

ID=31213845

Family Applications (1)

Application Number Title Priority Date Filing Date
JP818988U Expired JPH0452955Y2 (enrdf_load_stackoverflow) 1988-01-27 1988-01-27

Country Status (1)

Country Link
JP (1) JPH0452955Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011222257A (ja) * 2010-04-08 2011-11-04 Sumitomo Electric Ind Ltd ウェハ加熱用ヒータユニットおよびそれを搭載した半導体製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011222257A (ja) * 2010-04-08 2011-11-04 Sumitomo Electric Ind Ltd ウェハ加熱用ヒータユニットおよびそれを搭載した半導体製造装置

Also Published As

Publication number Publication date
JPH0452955Y2 (enrdf_load_stackoverflow) 1992-12-11

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