JPH01113812U - - Google Patents
Info
- Publication number
- JPH01113812U JPH01113812U JP725288U JP725288U JPH01113812U JP H01113812 U JPH01113812 U JP H01113812U JP 725288 U JP725288 U JP 725288U JP 725288 U JP725288 U JP 725288U JP H01113812 U JPH01113812 U JP H01113812U
- Authority
- JP
- Japan
- Prior art keywords
- notch
- wafer
- thick
- pattern
- heavyweight
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000206 photolithography Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP725288U JPH01113812U ( ) | 1988-01-22 | 1988-01-22 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP725288U JPH01113812U ( ) | 1988-01-22 | 1988-01-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01113812U true JPH01113812U ( ) | 1989-07-31 |
Family
ID=31212107
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP725288U Pending JPH01113812U ( ) | 1988-01-22 | 1988-01-22 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01113812U ( ) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53144257A (en) * | 1977-05-23 | 1978-12-15 | Cho Lsi Gijutsu Kenkyu Kumiai | Method of producing wafer |
JPS5743410A (en) * | 1980-08-29 | 1982-03-11 | Fujitsu Ltd | Manufacture of semiconductor device |
-
1988
- 1988-01-22 JP JP725288U patent/JPH01113812U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53144257A (en) * | 1977-05-23 | 1978-12-15 | Cho Lsi Gijutsu Kenkyu Kumiai | Method of producing wafer |
JPS5743410A (en) * | 1980-08-29 | 1982-03-11 | Fujitsu Ltd | Manufacture of semiconductor device |