JPH01113191U - - Google Patents

Info

Publication number
JPH01113191U
JPH01113191U JP764788U JP764788U JPH01113191U JP H01113191 U JPH01113191 U JP H01113191U JP 764788 U JP764788 U JP 764788U JP 764788 U JP764788 U JP 764788U JP H01113191 U JPH01113191 U JP H01113191U
Authority
JP
Japan
Prior art keywords
stator
rotor
housing
circumferential surface
gap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP764788U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0640954Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP764788U priority Critical patent/JPH0640954Y2/ja
Publication of JPH01113191U publication Critical patent/JPH01113191U/ja
Application granted granted Critical
Publication of JPH0640954Y2 publication Critical patent/JPH0640954Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP764788U 1988-01-26 1988-01-26 ねじ溝真空ポンプ Expired - Lifetime JPH0640954Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP764788U JPH0640954Y2 (ja) 1988-01-26 1988-01-26 ねじ溝真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP764788U JPH0640954Y2 (ja) 1988-01-26 1988-01-26 ねじ溝真空ポンプ

Publications (2)

Publication Number Publication Date
JPH01113191U true JPH01113191U (US20070167544A1-20070719-C00007.png) 1989-07-31
JPH0640954Y2 JPH0640954Y2 (ja) 1994-10-26

Family

ID=31212835

Family Applications (1)

Application Number Title Priority Date Filing Date
JP764788U Expired - Lifetime JPH0640954Y2 (ja) 1988-01-26 1988-01-26 ねじ溝真空ポンプ

Country Status (1)

Country Link
JP (1) JPH0640954Y2 (US20070167544A1-20070719-C00007.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022075228A1 (ja) * 2020-10-09 2022-04-14 エドワーズ株式会社 真空ポンプ、および真空ポンプに備わる回転円筒体

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6926493B1 (en) * 1997-06-27 2005-08-09 Ebara Corporation Turbo-molecular pump
JP4218765B2 (ja) * 1997-06-27 2009-02-04 株式会社荏原製作所 ターボ分子ポンプ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022075228A1 (ja) * 2020-10-09 2022-04-14 エドワーズ株式会社 真空ポンプ、および真空ポンプに備わる回転円筒体

Also Published As

Publication number Publication date
JPH0640954Y2 (ja) 1994-10-26

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