JPH01112103A - Shape distortion inspecting device for discoid body - Google Patents

Abstract

PURPOSE:To inspect the shape and quality of the measured surface of a discoid component to be inspected with high accuracy by arranging an optical distance sensor rotatably opposite said component to be inspected and measuring the distance to the discoid component over the entire periphery. CONSTITUTION:A disk rotor 100 is mounted on the mount surface 11 of an inspection table 1. Then optical sensors 21 and 22 are rotated at intervals of a specific angle in order by a stepping motor 31 which is controlled by a control circuit 42. The optical distance sensors 21 and 22 detects their distances from measurement surfaces 104 and 105 of the flange part 101 of a disk rotor 100 at respective rotational positions and sends them to an input circuit part 41. The input circuit part 41 inputs those distance data to the control circuit part 42 through sample/hold circuits 412 and 412'. The control circuit part 42 measures the shape distortion according to sampling data.

Description

[Detailed description of the invention]

[Industrial Field of Application] The present invention relates to a shape distortion inspection device for inspecting a disc-shaped article, such as a disc rotor that is a component of an automobile brake system. [Prior Art] Conventionally, a disc rotor, which is a component of an automobile braking device, has been inspected for shape distortion after completing a predetermined processing process. This disc rotor has a shape in which a flange part and a boss part are integrated concentrically, with one end surface of the boss part serving as the reference surface for assembly, and one circular end face of the flange part and the opposite side opposite to this. It has a circular other end surface. In this shape distortion inspection, the distance between one end face of the boss part and one end face of the flange part, which are parallel to each other,
The unevenness of one end face and the other end face of the flange portion that are parallel to each other, and the deflection of the one end face and the other end face of the flange portion were inspected. In this shape distortion inspection process, the worker places the disc rotor on a surface plate so that one end face of the boss part is in contact with it, and measures the other end face of the flange part with a dial gauge while rotating the disc rotor. The process of removing the disc rotor from the surface plate had to be carried out in sequence.
No. 08 proposes a technique in which a touch sensor is brought into contact with, for example, one end face of a flange portion of the disc rotor while the disc rotor is rotated by a drive device, and the irregularities of the one end face are measured over the entire circumference. [Problems to be Solved by the Invention] However, the work in each of these steps is repetitive work, and in particular, the work of visual measurement of the disc rotor using the dial gauge requires concentration, which can lead to worker fatigue. There was a possibility that work efficiency and work accuracy would decrease. In the conventional technology, which rotates a disc rotor by a drive device and automatically measures the entire circumference of the surface to be measured (hereinafter referred to as the measurement surface) of the disc rotor, as a result of experiments, the measurement data is incorrect due to the vibration of the drive device. It was found that noise was mixed in and the inspection accuracy deteriorated significantly.d5
The causes of the vibration include mechanical precision and speed unevenness of the drive device, vibration of the inspection table due to the rotation of the drive device or disk-shaped article, or vibration of the measuring device (especially touch sensor) due to vibration of the inspection table. etc. are possible. SUMMARY OF THE INVENTION In view of the above problems, an object of the present invention is to provide an apparatus for measuring shape distortion of a disk-shaped article with high efficiency and high accuracy. [Means for Solving the Problems] The shape distortion inspection device of the present invention includes an inspection table having a mounting portion on which the disc-shaped article is placed in contact with a reference surface of the disc-shaped article;
a distance sensor that measures the displacement of a portion of the measurement surface with respect to the reference surface of a measurement surface that is substantially parallel to the reference surface of the disc-shaped article; and a distance sensor that measures the displacement of a portion of the measurement surface with respect to the reference surface; and a control unit that processes the output signal of the distance sensor and determines whether the shape of the measurement surface of the disc-shaped article is good or bad based on the amount of change in the measurement surface portion of the disc-shaped article. ing. The disc-shaped article is a member having a plurality of mutually parallel end faces, and is, for example, a hat-shaped disc rotor that is a part of an automobile brake system. The end surface constitutes a reference surface or a measurement surface. As explained above, this disc rotor has a shape in which seven flange portions and a boss portion are concentrically integrated. The inspection table is a fixed table having a flat mounting surface on which a disk-shaped article is placed. The distance sensor may be any sensor, such as a touch sensor or an optical distance sensor, as long as it can detect the position of a small area on the measurement surface of the disk-shaped article, particularly the displacement in a direction parallel to the axis of the measurement surface of the disk-shaped article. The drive device is a device that rotates the distance sensor around an axis perpendicular to the mounting surface of the inspection table, and is preferably a stepping motor or the like. The control unit is a device that processes the output signal of the distance sensor to determine the shape of the measurement surface of the disk-shaped article, and processes a plurality of pieces of measurement data obtained from the distance sensor after the drive device is stopped, and further processes the measurement data. It has the function of determining whether the shape of the measured surface of a disk-shaped article is good or bad from among the measured data. In addition, in order to further reduce the noise that enters the distance sensor due to the rotation of the drive device, the measurement data from the distance sensor is collected after a certain period of time has passed after the drive device has stopped, that is, after the vibrations of the distance sensor have sufficiently attenuated. Sampling is preferred. [Function] In this apparatus for inspecting the shape distortion of a disk-shaped article, the disk-shaped article is first set on the inspection table so that the reference surface of the disk-shaped article to be inspected comes into contact with the placement part of the inspection table, and then the drive device The distance sensor is rotated in a rotation plane that faces the measurement surface of the disc-shaped article and is parallel to the mounting surface. The distance sensor measures the displacement of the measurement surface of the disk-shaped article over the entire circumference of the measurement surface,
The control unit processes measurement data regarding the shape of the measurement surface obtained from the distance sensor, and determines whether the shape of the measurement surface is good or bad. [Example] An example of the apparatus for inspecting the shape distortion of a disk-shaped component according to the present invention is shown in FIG. 1 below. The shape distortion inspection apparatus of this embodiment includes an optical distance sensor ( distance sensor) 21.22, and an optical distance sensor 21.22 with the axis X perpendicular to the mounting surface 11 as the center of rotation.
a drive device 3 that rotates the optical distance sensor 21, 22;
and a control section 4 that processes the output signals of and determines the quality of the shape of one end surface (measurement surface) 104, 105 of the disc rotor 100. The disc rotor 100 has a shape in which a flange portion 101 and a boss portion 102 are concentrically integrated.
One end surface (reference surface) 103 of 02, one end surface of the flange portion (
measurement surface) 104 and the other end surface of the flange (measurement surface) 1
05. The inspection table 1 is a table on which the disk rotor 100 is placed so that the reference surface 103 of the disk rotor 100 is in contact with the placement surface 11. The optical distance sensor 21.22 is rotatably supported by a drive 3, which will be explained later. These optical distance sensors 21 and 22 each include a light transmitting system (not shown) consisting of a laser diode (LD) and a lens system, and a light receiving system (not shown) consisting of a semiconductor device detection element (PSD) and a lens system. ). In addition, L of the optical distance sensor 21.22
D (not shown) emits a laser beam to the measurement surface 104, 105 on the virtual straight line Y parallel to the axis X, and the PSD (not shown) of the optical distance sensor 21, 22 respectively The distance between the measurement surface 104.105 and the optical distance sensor 21.22 is measured by laser light reflected from the surface 104.105. The drive device 3 is a stepper fixed to the examination table 1 = 8
- The stepping motor 31 and the steel arm 33 attached to the rotating shaft 32 of the stepping motor 31 hum. The armrest 33 has a figure 8 shape, and the end 3 of the longer piece
4 is fixed to the rotating shaft 32. Optical distance sensors 21 and 22 are fixed at positions where two mutually parallel pieces of the armrest 33 intersect with the imaginary straight line Y so as to face each other. The control unit 4 includes an input circuit unit 41 that converts the output signals of the optical distance sensors 21 and 22 into digital signals in parallel, and receives the digital signals outputted from the input circuit unit 41 and outputs various control signals and signals that will be explained later. It consists of a control circuit unit 42 that outputs a discrimination signal and the like. The input circuit section 41 includes sense amplifiers 411.411' that amplify the output signals of the optical distance sensors 21.22 to predetermined magnitudes, and a predetermined amplification system that amplifies the output signals of the sense amplifiers 411.4.11' to predetermined magnitudes, which will be explained later. Sample and hold circuits 412 and 412' that sample and hold at timing, and sample and hold circuit 41
A/D converter 413.41 that A/D converts each sample hold signal output from 2.412'.
It consists of 3' and. The control circuit unit 42 is a microcomputer with a built-in I10 interface, one of its output terminals is connected to the stepping motor 31 via an output signal line 424, and the other output terminal is connected to a sample hold via an output signal line 421. It is connected to circuit 412.412-. The operation of this shape distortion inspection device will be explained based on the flowcharts of FIGS. 3 and 4. First, the disc rotor 100 is placed on the mounting surface 11 of the inspection table 1.
Disc rotor 10 so that reference surface 103 of
0 is placed on the inspection table 100. Note that it is preferable to perform the above-mentioned positioning so that the axis of the disc rotor 100 is in the same straight line as the axis X of the drive device 3. Next, when a starting switch (not shown) is turned on, the routine is started and the process proceeds to step 101. 5101, initialize registers, memory, etc.
Proceed to 8102. In 5102, the control circuit unit 42 sets stepping=1
0 = Send the series of drive pulse signals S1 shown in FIG. 2 to the motor 31 to drive the stepping motor 31 approximately 30 m5ec.
The optical distance sensors 21 and 22 are rotated by a rotation angle of 2 degrees and then stopped. After that, the process proceeds to 8103. Although the drive pulse signal S1 is illustrated in a simplified manner, it is actually a four-phase pulse signal, and rotates the stepping motor 31 only during the rotation period T1. The optical distance sensors 21, 22 are designed to rotate by a rotation angle of 2 degrees during one rotation period T1 of the stepping motor 31. 8103 is a subroutine that controls a timer that defines the stop period T2. In this subroutine, as shown in FIG.
Start the timer with 0 and proceed to 5111. Note that the control circuit section 42 does not generate the drive pulse signal S1 during the stop period T2. Note that in this embodiment, the rotation period T1 is approximately 30
m5ec, and the stop period T2 is set to 70m5ec. 81111- detects whether the timer has reached 70m5ec, and if timer X has reached 70m5ec, the timer
Proceed to 104, otherwise return to 5111. The delay of the routine by this timer is caused by the stepping motor 31.
This is done to damp the inertial movement of the rotation shaft 32 and the arm 33 after the rotation shaft 32 and arm 33 have stopped. 5104 , the optical distance sensors 21 , 22 each correspond to the measuring surface 10 of the flange 1° 1 of the disc rotor 100
The distance fill (in the Y direction) between 4.105 and itself is detected, and a displacement signal corresponding to the distance fill is transmitted to the input circuit section 41. The input circuit section 41 inputs the displacement signal to a sense amplifier 411.
．． The signal is amplified to a predetermined magnitude at 411', and the amplified signal is sent to sample and hold circuits 412 and 412'. Then, at the timing shown in FIG. 2, the sampling pulse s2 is sent to the sample and hold circuit 412.412-, and the output signal voltage of the sense amplifier 411.411= at this point is sampled and held. Note that the control circuit unit 42 outputs the sampling signal S2 1 m5ec before the end of the stop period work 2. Sample and hold signal S3 output from sample and hold circuit 412 and sample and hold circuit 412
The sample and hold signals 83' outputted from ' are converted into digital signals by A/D converters 413 and 413-, respectively, and then sent to the control circuit section 42. Note that the digital signal output from the A/D converter 413 is measurement data representing the distance between one measurement point on the measurement surface 104 of the disc rotor 100 and the optical distance sensor 21. Further, the digital signal outputted from the A/D converter 413' is measurement data representing the distance between one measurement point on the measurement surface 105 of the disc rotor 100 and the optical distance sensor 22. Therefore, if the difference between the digital signals output from the Δ/D converters 413 and 413' is detected, the distance between the one end surface 104 and the one end surface 105 of the flange portion 101 of the disc rotor 100 ( The thickness of the flange portion 101 can be measured. In 5105, it is determined whether the rotation angle of the optical distance sensor 21, 22 has reached 360 degrees. In addition, since the optical distance sensors 21 and 22 rotate by a rotation angle of 2 degrees in one rotation, the sampling pulse signal S
2, and when the sampling pulse signal S2 reaches 72, it is assumed that the rotation angle reaches 360 degrees. Then, if the rotation angle is 360 degrees or more (if the sampling pulse is 73 or more), the process proceeds to 8106, and if not, the process returns to 5102 to execute the next measurement data collection. In this way, the measurement surface 104 of the disc rotor 100
．． After storing each of the 72 pieces of measurement data M, . 5106 is measurement data M1 of measurement surface 104, measurement surface 1
From the measurement data M2 of 05, the thickness M of the flange portion 101
l-M2 is determined for each of the 72 measurement points. Then proceed to 8107. In 5107, the measured data M1 is compared with a pre-stored reference value m1. Next, the measured data M2 is compared with a pre-stored reference value m2. Then, the thickness data M1-M2 is compared with a reference thickness value m3 stored in advance. Then, the absolute value of the variation of each data 1M1-m11.1M2-m21, l Ml-M
8 if 2-m3 l is within a predetermined range
If not, proceed to 5109. In addition,
The absolute value 1M1-m11 of the data variation is used to test the unevenness of the measurement surface 104, and the absolute value 1M2-m21 of the data variation is used to test the unevenness of the measurement surface 105. At 8108, the measurement surface 104 of the disc rotor 100
．． 105 and the thickness of the flange portion 101 are output from the control unit 42 to a CRT display (not shown), and this routine ends. 5109, the measurement surface 104 of the disc rotor 100
Alternatively, a signal indicating that the thickness of the measurement surface 105 or the flange portion 101 is defective is outputted from the control section 42 to the CRT display, and the routine is ended. According to the above explanation, one end surface 104, 105 of the flange portion 101 of the disc rotor 100 and the thickness between both surfaces were inspected. Note that it is of course possible to perform other data processing in 8106. For example, if the difference between two pieces of measurement data located at 180 degrees from each other on the measurement surface 104 is determined, the inclination (flare) of the measurement surface 104 can be detected from the difference. Then, in 8107, it may be determined whether this deviation is within a predetermined angle set in advance. In addition to the optical distance sensors 21 and 22, contact type, actuating transformer type, variable space type, and ultrasonic type distance sensors can also be used. Also sampling circuit 412.412
' may be placed on the control circuit section 42 side. Furthermore, the disc rotor 100 is turned over and the measurement surface 104 and the measurement surface 10 are
As long as distances 5 and 5 are measured sequentially, either one of the optical distance sensors 21 and 22 may be used. In addition, optical distance sensors 21 and 22
There is no need to arrange it on the virtual straight line in the Y direction. However, by arranging the optical distance sensor 21.22 on the virtual straight line in the Y direction, the A/D converter 413.4
By simply detecting the difference between the two types of digital signals output from 13', the thickness of the flange portion 101 can be directly detected, and the delay operation of either signal can be omitted. [Effects of the Invention] As explained above, the device for measuring shape distortion of a disc-shaped article according to the present invention has the following features:
Place a reference plane parallel to the measurement surface of the disc-shaped article on the placement surface of the inspection table, rotate the distance sensor parallel to the placement surface, and measure the distance between the distance sensor and the measurement surface as described above. Since measurements are made in the direction perpendicular to the surface, it is possible to easily measure the deflection of the measurement surface with respect to the reference surface, the roughness of the measurement surface, and the distance between two measurement surfaces parallel to the reference surface. Furthermore, since the rotating mass of the drive device that rotates the distance sensor can be significantly reduced compared to the conventional one, harmful imaging of the distance sensor can be reduced and measurement accuracy can be improved. Further, the drive device can be started and stopped quickly, and the mechanical rigidity of the drive device, inspection table, etc. can be reduced, and the device can be made smaller and lighter.

[Brief explanation of the drawing]

FIG. 1 is a schematic diagram of an embodiment of the shape distortion inspection device of the present invention. FIG. 2 is a signal waveform diagram of each part of the device shown in FIG. 1. FIG. 3 is a flowchart showing the operation of the control circuit section 42 of the apparatus shown in FIG. FIG. 4 shows step 810 of FIG.
3 is a flowchart of subroutine No. 3. FIG. 5 is a sectional view of the apparatus shown in FIG. 1 taken along the line A-/M. 1... Inspection table 21.22... Optical distance sensor (distance sensor) 3...
・Drive device 4...Control unit Patent applicant: Aisin High School 6 Co., Ltd. Agent
Patent attorney Hiroshi Okawa Procedure correction layer (voluntary) 1. Display of the case 1986 Patent Application No. 269877 2 Name of the invention Dimension inspection device for disk-shaped articles 3 Person making the amendment Relationship to the case Patent applicant Representative of Aisin Takaoka Co., Ltd., 1-Tenno, Takaoka Shinmachi, Toyota City, Aichi Prefecture Person: Shigeru Kimura 4, Agent: Kodama Building, 3-3-4 Meieki, Nakamura-ku, Nagoya, Aichi Prefecture 450 Description 1 Name of the invention Dimensional inspection device for disk-shaped articles 2 Claims (1) an inspection table having a mounting part on which the disc-shaped article is placed in contact with a reference surface of the disc-shaped article; and a measurement surface that is substantially parallel to the reference surface of the disc-shaped article; a distance sensor that measures the displacement of the part; a drive device that rotates the distance sensor around an axis perpendicular to the reference surface; and a drive device that processes the output signal of the distance sensor to measure the measurement surface of the disc-shaped article. A control section that determines the quality of the shape of the measurement surface based on the amount of change in the portion. (2) The drive device rotates intermittently, and the control unit processes the output signal of the distance sensor when the drive device is stopped to determine the shape of the measurement surface of the disc-shaped article. An apparatus for inspecting the dimensions of a disk-shaped article according to claim 1. (3) The dimension inspection device according to claim 1, wherein the distance sensor simultaneously measures portions of the two mutually parallel measuring surfaces of the disc-shaped article that are opposite to each other. 3. Detailed Description of the Invention Field of Industrial Application] The present invention relates to a dimensional inspection device for inspecting a disc-shaped article, such as a disc rotor that is a component of an automobile brake system. [Prior Art] Conventionally, a disc rotor, which is a component of an automobile braking device, has been inspected for shape distortion after being subjected to a predetermined process. This disc rotor has a shape in which a 7-flange part and a boss part are concentrically integrated, and one end surface of the boss part serves as an assembly reference surface, and one circular end face of the flange part and the opposite end face opposite thereto. It has a circular other end surface on the side. In this shape distortion inspection, the distance between one end face of the boss part and one end face of the flange part, which are parallel to each other,
The unevenness of one end face and the other end face of the flange portions parallel to each other, and the deflection of the one end face and the other end face of the seven flange portions were inspected. In this shape distortion inspection process, the worker places the disc rotor on a surface plate so that one end face of the boss part is in contact with it, and measures the other end face of the flange part with a dial gauge while rotating the disc rotor. process, the process of removing the disc rotor from the surface plate,
had to be executed sequentially. In addition, Utility Model Application No. 62-810 filed by the present applicant
No. 08 proposes a technique in which a touch sensor is brought into contact with, for example, one end face of a flange portion of the disc rotor while the disc rotor is rotated by a drive device, and the irregularities of the one end face are measured over the entire circumference. [Problems to be Solved by the Invention] However, the work in each of these steps is repetitive work, and in particular, the work of visually measuring the disc rotor using the dial gauge requires concentration of nerves, so that the worker may become fatigued. There was a possibility that work efficiency and work accuracy would decrease. In the conventional technology, which rotates a disk rotor by a drive device and automatically measures the entire circumference of the surface to be measured (hereinafter referred to as the measurement surface) of the disk rotor, as a result of experiments, the measurement data is incorrect due to the vibration of the drive device. It was found that noise was mixed in and the inspection accuracy was significantly deteriorated.The cause of the vibration is the mechanical accuracy and speed unevenness of the drive device, or the inspection table due to the rotation of the drive device or the disk-shaped article. vibration of the measuring device (particularly the touch sensor) due to the vibration of the inspection table, etc. In view of the above problems, the present invention provides an apparatus for measuring the dimensions of a disc-shaped article with high efficiency and high accuracy. [Means for Solving the Problems] The dimension inspection device of the present invention includes an inspection table having a mounting portion on which the disc-shaped article is placed in contact with a reference surface of the disc-shaped article; , a distance sensor for measuring the displacement of a portion of the measurement surface with respect to the reference surface of a measurement surface substantially parallel to the reference surface of the disc-shaped article; and a rotation center about an axis perpendicular to the mounting surface. A drive device that rotates the distance sensor; and a control unit that processes the output signal of the distance sensor and determines whether the shape of the measurement surface of the disc-shaped article is good or bad based on the amount of change in the measurement surface portion of the disc-shaped article. The disc-shaped article is a member having a plurality of mutually parallel end faces, and is, for example, a hat-shaped disc rotor that is a part of an automobile braking system. As explained above, this disc rotor has a shape in which seven flange parts and a boss part are concentrically integrated.The inspection table has a flat mounting surface on which a disc-shaped article is placed. The distance sensor, such as a touch sensor or an optical distance sensor, is capable of detecting the position of a small area on the measurement surface of a disk-shaped article, especially the displacement in a direction parallel to the axis of the measurement surface of the disk-shaped article. The drive device is a device that rotates the distance sensor around an axis perpendicular to the placement part of the examination table, and is preferably a stepping motor or the like. This is a device that processes output signals to determine the shape of the measurement surface of a disk-shaped article.It processes multiple pieces of measurement data obtained from the distance sensor after the drive device has stopped, and then calculates the shape of the disk-shaped object from between each of the processed measurement data. It has the function of determining whether the shape of the measurement surface of a shaped article is good or bad.In addition, in order to further reduce the noise that enters the distance sensor due to the rotation of the drive device, the distance sensor It is preferable to sample the measurement data from the distance sensor using a sliding door whose vibrations and the like are sufficiently attenuated. [Function] In this device for inspecting the dimensions of a disc-shaped article, the disc-shaped article is first set on the inspection table so that the reference surface of the disc-shaped article to be inspected comes into contact with the placement surface of the inspection table, and then the drive device is activated. The distance sensor is rotated in a rotation plane that faces the measurement surface of the disc-shaped article and is parallel to the mounting surface. The distance sensor measures the displacement of the measurement surface of the disk-shaped article over the entire circumference of the measurement surface, and the control unit processes the measurement data regarding the shape of the measurement surface obtained from the distance sensor to determine whether the shape of the measurement surface is good or bad. . [Example] Hereinafter, an example of the dimensional inspection device for disk-shaped parts of the present invention is shown in FIG. 1. The dimension inspection apparatus of this embodiment has an inspection table 1 and one end surface (reference surface) parallel to one end surface (reference surface) 103 of the disc rotor 100.
An optical distance sensor (distance sensor) 21.22 that measures the distance between itself and the measurement surface 104, and a drive that rotates the optical distance sensor 21.22 around an axis X perpendicular to the mounting surface 11. The device 3 processes the output signals of the optical distance sensors 21 and 22 to detect one end surface (
and a control unit 4 that determines the quality of the shape of the measurement surface) 104 and 105. The disc rotor 100 has a shape in which a flange portion 101 and a boss portion 102 are concentrically integrated.
One end surface (reference surface) 103 of 02, one end surface of the flange portion (
measurement surface) 104 and the other end surface of the flange (measurement surface) 1
05. The inspection table 1 is a table on which the disk rotor 100 is placed so that the reference surface 103 of the disk rotor 100 is in contact with the placement surface 11. The optical distance sensor 21 , 22 is rotatably supported on the arm 33 of the drive device 3 . These optical distance sensors 2
1.22 is a light transmitting system (not shown) consisting of a laser diode (LD) and a lens system, and a light receiving system (not shown) consisting of a semiconductor device detection element (PSD) and a lens system, respectively.
It consists of. The LDs (not shown) of the optical distance sensors 21 and 22 are located on the measurement surface 104.
105, and the PSD (not shown) of the optical distance sensor 21.22 detects the measurement surface 104.105 and the optical distance sensor 21.22 by the laser light reflected from the measurement surface 104.105, respectively. It measures the distance between. The drive device 3 includes a stepping motor 31 fixed to the examination table 1 and a steel arm 33 attached to a rotating shaft 32 of the stepping motor 31. The arm 33 has a 5-shape, and the end 34 of its longer piece is fixed to the rotating shaft 32. The stepping motor 31 is rotated by a series of drive pulse signals $1 shown in FIG. The stepping motor 31 is rotated, and the stepping motor 31 is not rotated during the stop period 2. In this example, the rotation period T1 is approximately 30 m5.
ec, and the stop period T2 is set to 70 m5 ec. Optical distance sensors 2 are placed opposite to each other at positions where the two mutually parallel pieces of the armrest 33 intersect with the virtual straight line Y.
1.22 is fixed. The optical distance sensors 21 and 22 are designed to rotate at a rotation angle of 5 degrees during one rotation period T1 of the stepping motor 31. The control unit 4 outputs the output signals of the optical distance sensors 21 and 22 in parallel. an input circuit section/1.1 that converts the digital signal into a digital signal; and a control circuit section 42 that receives the digital signal outputted from the input circuit section 41 and outputs various control signals, discrimination signals, etc. that will be explained later. The input circuit section 41 includes sense amplifiers 411 and 411- which amplify the output signals of the optical distance sensors 21 and 22 to a predetermined magnitude, respectively, and a predetermined amplifier which amplifies the output signals of the sense amplifiers 411 and 411", which will be explained later. Sample and hold circuits 412 and 412- that sample and hold at timing, and sample and hold circuit 4
A/D converter 413.4 that converts the sample and hold signals output from 12.412' into A/D, respectively.
13-. The control circuit unit 42 is a microcomputer with a built-in I10 interface, and one of its output terminals is connected to the stepping motor 31 via an output signal line 424, and the drive pulse signal S1 shown in FIG. The drive pulse signal S1 is output only during the rotation period T1 of the stepping motor 31, and is not output during the stop period T2 of the stepping motor 31. The other output terminal is connected to the sample and hold circuits 412 and 412- through the output signal line 421, and samples the sampling signal S2 shown in FIG. The signal is sent to the bold circuit 412.412-, and the output signal voltage of the sense amplifier 411.411- at this point is sampled and held. . The operation of this dimension inspection apparatus will be explained based on the flowcharts of FIGS. 3 and 4. First, the disc rotor 100 is placed on the mounting surface 11 of the inspection table 1.
Disc rotor 10 so that reference surface 103 of
0 on the inspection table. Note that the disk rotor 100 is arranged so that its axis is in the same straight line as the axis X of the drive device 3. Next, when a starting switch (not shown) is turned on, the routine is started and the process proceeds to step 101. 5101, initialize registers, memory, etc.
Proceed to 5102. At 8102, the control circuit unit 42 sends a series of drive pulse signals S1 shown in FIG.
It is rotated by 0 m5ec, and the optical distance sensors 21 and 22 are rotated by a rotation angle of 5 degrees and then stopped. After that, the process proceeds to 8103. 8103 is a subroutine for controlling a timer that defines the stop period T2, and this subroutine is performed to damp the inertial motion of the rotating shaft 32 and arm 33 after the stepping motor 31 is stopped. In this subroutine, as shown in FIG.
Start the timer with 0 and proceed to 5111. In step 5111, it is detected whether the timer has reached 7 Qmsec, and if the timer X has reached 70m5ec, the process advances to step 5104; otherwise, the process returns to step 5111. 8104 , the optical distance sensors 21 , 22 each have a measuring surface 10 of the flange portion 101 of the disc rotor 100 .
A distance of 11 ft (in the Y direction) between 4.105 and itself is detected, and a corresponding displacement signal is transmitted to the input circuit section 41. The input circuit section 41 inputs the displacement signal to a sense amplifier 411.
．． 411- to a predetermined magnitude and sends the amplified signal to sample and hold circuits 412 and 412''. Among the amplified output voltages sent to sample and hold circuits 412 and 412', the output voltage from the control circuit 42 is The timing specified by the output sampling signal S2 is the sample hold signal S3 and the sample hold signal 83.
The sample-and-hold signal S3 outputted from the sample-and-hold circuit 412 and the sample-and-hold signal S3- outputted from the sample-and-hold circuit 412' are respectively sampled and held by the A/D converter 413.4.
After being converted into a digital signal at step 13', the control circuit section 42
sent to. The digital signal output from the A/D converter 413 is measurement data representing the distance between one measurement point on the measurement surface 104 of the disc rotor 100 and the optical distance sensor 21, and is output from the A/D converter 413'. The digital signal is transmitted to the measurement surface 105 of the disc rotor 100.
This is measurement data representing the distance between one measurement point above and the optical distance sensor 22. Therefore, A/D converter 413.
413', the distance 111 between the one end surface 104 and the one end surface 105 of the flange portion 101 of the disc rotor 100 can be determined.
# (thickness of flange portion 101 of disc rotor 100) can be measured. At 8105, it is determined whether the rotation angle of the optical distance sensor 21.22 has reached 360 degrees. In addition, since the optical distance sensors 21 and 22 rotate by a rotation angle of 5 degrees with one rotation of the stepping motor 31,
It is assumed that the rotation angle reaches 360 degrees when the sampling pulse signal S2 is counted and the sampling pulse signal $2 reaches 72 degrees. And the rotation angle is 360
If the sampling pulse is equal to or greater than 73 (if the sampling pulse is 73 or more), the process advances to 8106; otherwise, the process returns to 8102 to execute the next measurement data collection. In this way, the measurement surface 104 of the disc rotor 100
．． After storing each of the 72 measurement data M and M' of 105 in the memory of the control circuit section 42, the process proceeds to $106. 8106 is measurement data M1 of measurement surface 104, measurement surface 1
From the measurement data M2 of 05, the thickness M of the flange portion 101
l-M2 is determined for each of the 72 measurement points. Then proceed to 8107. At 8107, the measured data M1 is compared with a pre-stored reference value m1. Next, the measured data M2 is compared with a pre-stored reference value m2. Then, the thickness data M1-M2 is compared with a reference thickness value m3 stored in advance. Then, the absolute value of the variation of each data 1M1-m11.1M2-m21, l Ml-M
8 if 2-m3 l is within a predetermined range
If not, proceed to 5109. In addition,
The absolute value IM1-m11 of the data variation is used to test the unevenness of the measurement surface 104, and the absolute value IM2-m21 of the data variation is used to test the unevenness of the measurement surface 105. At 8108, the measurement surface 104 of the disc rotor 100
．． 105 and the thickness of the flange portion 101 are output from the control unit 42 to a CRT display (not shown), and this routine ends. 5109, the measurement surface 104 of the disc rotor 100
Alternatively, a signal indicating that the thickness of the measurement surface 105 or the flange portion 101 is defective is outputted from the control section 42 to the CRT display, and the routine is ended. According to the above explanation, one end surface 104, 105 of the flange portion 101 of the disc rotor 100 and the thickness between both surfaces were inspected. Of course, it is possible to perform other data processing at ``as''+06.For example, if the difference between two pieces of measurement data located 180 degrees apart from each other on the measurement surface 104 is determined, the difference can be used to determine the measurement surface. 104 can be detected. Then, it may be determined in 5107 whether this deflection is within a predetermined angle set in advance.In addition to the optical distance sensors 21 and 22, a contact type or a Actuation transformer type, variable capacity type, and ultrasonic type can also be used. Also, sampling circuit 412.412
' may be placed on the control circuit section 42 side. Furthermore, the disc rotor 100 is turned over and the measurement surface 104 and the measurement surface 10 are
As long as distances 5 and 5 are measured sequentially, either one of the optical distance sensors 21 and 22 may be used. In addition, optical distance sensors 21 and 22
There is no need to arrange it on the virtual straight line in the Y direction. However, by arranging the optical distance sensor 21.22 on the virtual straight line in the Y direction, the Δ/D converter 413.4
By simply detecting the difference between the two types of digital signals output from 13', the thickness of the flange portion 101 can be directly detected, and the delay operation of either signal can be omitted. [Effects of the Invention] As explained above, the size inspection device for a disk-shaped article of the present invention inspects a reference plane parallel to the measurement surface of the disk-shaped article in order to measure the shape of the measurement surface of the disk-shaped article. Place the distance sensor on the mounting surface of the stand, rotate the distance sensor parallel to the mounting surface,
Since the distance between the distance sensor and the measurement surface is measured in a direction perpendicular to the above-mentioned installation surface, there is no deviation of the measurement surface with respect to the reference surface, roughness of the measurement surface, and distance between two measurement surfaces parallel to the reference surface. of,
Easy to measure. Furthermore, since the rotating mass of the drive device that rotates the distance sensor can be significantly reduced compared to the conventional one, harmful vibrations of the distance sensor can be reduced and measurement accuracy can be improved. Furthermore, the drive device can be started and stopped quickly, and the mechanical rigidity of the drive device, inspection table, etc. can be reduced, and the device can be made smaller and lighter.

[Brief explanation of the drawing]

FIG. 1 is a schematic diagram of an embodiment of the dimension inspection apparatus of the present invention. FIG. 2 is a signal waveform diagram of each part of the device shown in FIG. 1. FIG. 3 is a flowchart showing the operation of the control circuit section 42 of the apparatus shown in FIG. Figure 4 shows step 5103 in Figure 3.
2 is a flowchart of a subroutine. Figure 5 is the first
FIG. 3 is a cross-sectional view of the device shown in the figure, taken along the line 81/M. 1... Inspection table 21.22... Optical distance sensor (distance sensor) 3...
・Drive device 4...Control unit Patent applicant Aisin Takaoka Co., Ltd. Agent
Bench expert Hiroshi Okawa

Claims (3)

[Claims] (1) an inspection table having a mounting part on which the disc-shaped article is placed in contact with a reference surface of the disc-shaped article; and a measurement surface substantially parallel to the reference surface of the disc-shaped article relative to the reference surface. a distance sensor that measures the displacement of a portion of the measurement surface; a drive device that rotates the distance sensor around an axis perpendicular to the reference surface; An apparatus for inspecting shape distortion of a disk-shaped article, comprising: a control section that determines whether the shape of the measurement surface is good or bad based on the amount of change in the portion of the measurement surface. (2) The drive device rotates intermittently, and the control unit processes the output signal of the distance sensor when the drive device is stopped to determine the shape of the measurement surface of the disc-shaped article. An apparatus for inspecting shape distortion of a disc-shaped article according to claim 1. (3) The shape distortion inspection device according to claim 1, wherein the distance sensor simultaneously measures portions of the two mutually parallel measuring surfaces of the disc-shaped article that are opposite to each other.