JPH01112048U - - Google Patents

Info

Publication number
JPH01112048U
JPH01112048U JP586088U JP586088U JPH01112048U JP H01112048 U JPH01112048 U JP H01112048U JP 586088 U JP586088 U JP 586088U JP 586088 U JP586088 U JP 586088U JP H01112048 U JPH01112048 U JP H01112048U
Authority
JP
Japan
Prior art keywords
wafer
vacuum
sub
plate
mounting table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP586088U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0533012Y2 (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP586088U priority Critical patent/JPH0533012Y2/ja
Publication of JPH01112048U publication Critical patent/JPH01112048U/ja
Application granted granted Critical
Publication of JPH0533012Y2 publication Critical patent/JPH0533012Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP586088U 1988-01-22 1988-01-22 Expired - Lifetime JPH0533012Y2 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP586088U JPH0533012Y2 (zh) 1988-01-22 1988-01-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP586088U JPH0533012Y2 (zh) 1988-01-22 1988-01-22

Publications (2)

Publication Number Publication Date
JPH01112048U true JPH01112048U (zh) 1989-07-27
JPH0533012Y2 JPH0533012Y2 (zh) 1993-08-23

Family

ID=31209601

Family Applications (1)

Application Number Title Priority Date Filing Date
JP586088U Expired - Lifetime JPH0533012Y2 (zh) 1988-01-22 1988-01-22

Country Status (1)

Country Link
JP (1) JPH0533012Y2 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013098551A (ja) * 2011-10-27 2013-05-20 Asml Netherlands Bv リソグラフィ装置および基板ハンドリング方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013098551A (ja) * 2011-10-27 2013-05-20 Asml Netherlands Bv リソグラフィ装置および基板ハンドリング方法

Also Published As

Publication number Publication date
JPH0533012Y2 (zh) 1993-08-23

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