JPH01112048U - - Google Patents

Info

Publication number
JPH01112048U
JPH01112048U JP586088U JP586088U JPH01112048U JP H01112048 U JPH01112048 U JP H01112048U JP 586088 U JP586088 U JP 586088U JP 586088 U JP586088 U JP 586088U JP H01112048 U JPH01112048 U JP H01112048U
Authority
JP
Japan
Prior art keywords
wafer
vacuum
sub
plate
mounting table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP586088U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0533012Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP586088U priority Critical patent/JPH0533012Y2/ja
Publication of JPH01112048U publication Critical patent/JPH01112048U/ja
Application granted granted Critical
Publication of JPH0533012Y2 publication Critical patent/JPH0533012Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP586088U 1988-01-22 1988-01-22 Expired - Lifetime JPH0533012Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP586088U JPH0533012Y2 (enrdf_load_stackoverflow) 1988-01-22 1988-01-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP586088U JPH0533012Y2 (enrdf_load_stackoverflow) 1988-01-22 1988-01-22

Publications (2)

Publication Number Publication Date
JPH01112048U true JPH01112048U (enrdf_load_stackoverflow) 1989-07-27
JPH0533012Y2 JPH0533012Y2 (enrdf_load_stackoverflow) 1993-08-23

Family

ID=31209601

Family Applications (1)

Application Number Title Priority Date Filing Date
JP586088U Expired - Lifetime JPH0533012Y2 (enrdf_load_stackoverflow) 1988-01-22 1988-01-22

Country Status (1)

Country Link
JP (1) JPH0533012Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013098551A (ja) * 2011-10-27 2013-05-20 Asml Netherlands Bv リソグラフィ装置および基板ハンドリング方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013098551A (ja) * 2011-10-27 2013-05-20 Asml Netherlands Bv リソグラフィ装置および基板ハンドリング方法

Also Published As

Publication number Publication date
JPH0533012Y2 (enrdf_load_stackoverflow) 1993-08-23

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