JPH01112039U - - Google Patents

Info

Publication number
JPH01112039U
JPH01112039U JP586188U JP586188U JPH01112039U JP H01112039 U JPH01112039 U JP H01112039U JP 586188 U JP586188 U JP 586188U JP 586188 U JP586188 U JP 586188U JP H01112039 U JPH01112039 U JP H01112039U
Authority
JP
Japan
Prior art keywords
axis slider
axis
piston
guide rail
slider
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP586188U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0517876Y2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP586188U priority Critical patent/JPH0517876Y2/ja
Publication of JPH01112039U publication Critical patent/JPH01112039U/ja
Application granted granted Critical
Publication of JPH0517876Y2 publication Critical patent/JPH0517876Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Landscapes

  • Details Of Measuring And Other Instruments (AREA)
JP586188U 1988-01-22 1988-01-22 Expired - Lifetime JPH0517876Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP586188U JPH0517876Y2 (https=) 1988-01-22 1988-01-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP586188U JPH0517876Y2 (https=) 1988-01-22 1988-01-22

Publications (2)

Publication Number Publication Date
JPH01112039U true JPH01112039U (https=) 1989-07-27
JPH0517876Y2 JPH0517876Y2 (https=) 1993-05-13

Family

ID=31209603

Family Applications (1)

Application Number Title Priority Date Filing Date
JP586188U Expired - Lifetime JPH0517876Y2 (https=) 1988-01-22 1988-01-22

Country Status (1)

Country Link
JP (1) JPH0517876Y2 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007134729A (ja) * 2000-06-02 2007-05-31 Asml Netherlands Bv リソグラフィ投影装置、支持アセンブリ、およびデバイス製造方法
US7578228B2 (en) 2004-12-22 2009-08-25 Fanuc Ltd Air balance structure

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007134729A (ja) * 2000-06-02 2007-05-31 Asml Netherlands Bv リソグラフィ投影装置、支持アセンブリ、およびデバイス製造方法
US7578228B2 (en) 2004-12-22 2009-08-25 Fanuc Ltd Air balance structure

Also Published As

Publication number Publication date
JPH0517876Y2 (https=) 1993-05-13

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