JPH01111472A - Monomolecular film cumulation device and monomolecular film cumulation method using said device - Google Patents

Monomolecular film cumulation device and monomolecular film cumulation method using said device

Info

Publication number
JPH01111472A
JPH01111472A JP26966187A JP26966187A JPH01111472A JP H01111472 A JPH01111472 A JP H01111472A JP 26966187 A JP26966187 A JP 26966187A JP 26966187 A JP26966187 A JP 26966187A JP H01111472 A JPH01111472 A JP H01111472A
Authority
JP
Japan
Prior art keywords
film
roller
water tank
substrate
monomolecular film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP26966187A
Other languages
Japanese (ja)
Inventor
Yoshiko Mino
美濃 美子
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP26966187A priority Critical patent/JPH01111472A/en
Publication of JPH01111472A publication Critical patent/JPH01111472A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To cumulate continuously monomolecular films by providing a support section of a structure with a base retaining tool moving up and down and a roller-shaped revolving sample mounting section installed at the end of the support section. CONSTITUTION:A marking device is constituted of a water tank 1, a substance 4 forming films, a pressurizing section 5 to adjust the surface pressure when the film substance 4 is floated on the water tank 1 and a base retaining tool 7. A support section 7a of a structure moving up and down and a roller-shaped revolving sample mounting section 7b installed at the end of the support section 7a are provided on said retaining tool 7. Monomolecular films are cumulated continuously by setting a cylindrical or sheet-shaped base 6 on said roller-shaped sample mounting section 7b and revolving the base 6. Film layers can be selected and cumulated continuously in a short period of time easily.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は単分子膜累積装置およびそれを用いた単分子膜
累積方法に関するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a monolayer accumulation device and a monolayer accumulation method using the same.

従来の技術 最近、「分子エレクトロニクス」とか「バイオチップ」
などの言葉が聞かれるようになった、これには在来の電
子技術のなかで有機材料の単なる利用からさらに進めて
遺電子操作などの高度の生物工学的手法を活用したシ、
生体細胞を便って有機ICチップを作ろうという提案が
なされている背景がある。これらは究極として従来のエ
レクトロニクスを越える新技術を目指し、その骨子は個
々の分子や少数の分子の集合に電子素子の機能を持たせ
ることにある。タンパク質をはじめとする生体物質から
成る厚さ100A程度の有機物でできた薄い膜(有機薄
膜)がその素子の基本構造と考えられている。このよう
な素子をつくるには100人程鹿の分子レベルでの薄膜
を超微細構造を維持したままで形成する技術の確立が要
求されている。そのための有力な薄膜形成法として単分
子累積法、例えばラングミュア・プロジェット法(LB
法)が注目されている。
Conventional technology Recently, "molecular electronics" and "biochip"
This includes the use of advanced biotechnological methods such as electrochemical manipulation, which goes beyond the mere use of organic materials in conventional electronic technology.
There is a background in which proposals have been made to create organic IC chips using living cells. Ultimately, these technologies aim to be new technologies that go beyond conventional electronics, and the gist of these is to provide the functionality of electronic devices to individual molecules or collections of small numbers of molecules. The basic structure of the device is considered to be a thin organic film (organic thin film) with a thickness of about 100 A and made of biological materials such as proteins. To create such a device, it is necessary to establish a technology to form a thin film at the molecular level while maintaining its ultrafine structure. For this purpose, a single-molecule accumulation method is an effective method for forming thin films, such as the Langmuir-Prodgett method (LB
law) is attracting attention.

従来の単分子累積装置および単分子累積法すなわち単分
子膜累積法を第4図に示す。
A conventional single molecule accumulation device and single molecule accumulation method, ie, monolayer accumulation method, is shown in FIG.

単分子累積装置は水槽1と水温調整部2と純水3層と膜
物質4と前記膜物質を水槽に浮かべたときすなわち展開
させたときの表面圧を調整するバリア6と基板6および
基板保持具7から成る。
The single molecule accumulator includes a water tank 1, a water temperature adjustment section 2, three layers of pure water, a film material 4, a barrier 6 for adjusting the surface pressure when the film material is floated in the water tank, that is, when it is developed, a substrate 6, and a substrate holder. It consists of 7 ingredients.

単分子膜累積法を以下に説明する。The monolayer accumulation method will be explained below.

まず単分子膜累積法において、均一に成膜するためには
不純物が混入しないように清浄な水槽1゜と清浄な純水
3が使用される。さらに水面を清浄にするためにアスピ
レータ(吸引ポンプ)8で水面上のゴミを吸引除去する
。そののち1分子中に親水基と疎水基をもつ有機分子を
クロロホルムなどの揮発生の非水系溶媒に溶かした膜物
質4を水槽1の内側に設置したバリア5によって囲まれ
ている水面に滴下、展開させる。溶媒が揮発したのちバ
リア5に囲まれた面積を縮めることによシバリア6内の
単分子に表面圧をかけ、固体膜4にする。バリア6によ
って常に一定で適当な表面圧をかけ固体膜に保った状態
で清浄な基板6を水面と垂直すなわち、前記固体膜4を
横切る方向に上下させることで単分子を基板6に累積す
ることができるのである。
First, in the monomolecular film accumulation method, in order to form a uniform film, a clean water tank 1° and clean pure water 3 are used to avoid contamination with impurities. Further, in order to clean the water surface, an aspirator (suction pump) 8 sucks and removes dirt on the water surface. After that, a membrane material 4 in which an organic molecule having a hydrophilic group and a hydrophobic group in one molecule is dissolved in a volatile non-aqueous solvent such as chloroform is dropped onto the water surface surrounded by a barrier 5 installed inside the aquarium 1. Let it unfold. After the solvent has evaporated, the area surrounded by the barrier 5 is reduced to apply surface pressure to the single molecules within the barrier 6, forming a solid film 4. Single molecules are accumulated on the substrate 6 by moving the clean substrate 6 up and down perpendicular to the water surface, that is, in a direction transverse to the solid film 4, while applying a constant and appropriate surface pressure to the solid film using the barrier 6. This is possible.

単分子膜にはさまざまな表面活性物質が成膜分子になり
得る。膜を構成する単分子層が全て同一なホモ膜ばかシ
でなく、水面上の単分子層を適宜取り換えることによっ
てムムBB・・・・・・、ムBAB・・・・・・のよう
なヘテロ膜を作ることもできる。さらには違う成膜分子
を何種か混合して多成分系単分子層を作り、混合膜を作
ることもできる。
Various surface-active substances can be used as molecules for forming a monolayer. Rather than homogeneous membranes in which the monolayers constituting the membrane are all the same, by appropriately replacing the monolayers on the water surface, we can create heterogeneous membranes such as MumuBB..., MuBAB... It is also possible to create a membrane. Furthermore, it is also possible to create a mixed film by mixing several types of different film-forming molecules to create a multicomponent monolayer.

発明が解決しようとする問題点 前記従来法によれば基板6は基板保持具7によってささ
えられ、一定表面圧の固体膜4を横切る方向に繰り返し
上下することで基板上に幾層もの固体膜すなわち単分子
膜を累積するようになっているが1基板に幾層も累積す
るとなると大変時間がかがシ、装置専有時間も長いこと
から非常に作業効率が悪く、量産性には不適である。ま
た従来の垂直挿入法すなわち前記固体膜に対して基板が
垂直に横切るようにして膜累積を行う方法においては基
板サイズが大きくなるに伴って水槽の深さを深くしなけ
ればならない。
Problems to be Solved by the Invention According to the conventional method, the substrate 6 is supported by the substrate holder 7 and is moved up and down repeatedly in a direction across the solid film 4 with a constant surface pressure, thereby forming many layers of solid films on the substrate. Although monomolecular films are accumulated, accumulating many layers on one substrate is very time consuming and requires a long time for exclusive use of the equipment, resulting in extremely poor work efficiency and is unsuitable for mass production. Furthermore, in the conventional vertical insertion method, ie, the method of film accumulation in which the substrate perpendicularly traverses the solid film, the depth of the water tank must be increased as the substrate size increases.

問題点を解決するための手段 本発明は、基板保持具が上下動する構造の支持部と、支
持部先端に設けたローラ状の回転する基板取付部とから
成膜、前記基板保持具が水槽の水面を二分し、前記ロー
ラ状基板取付部にセットした円筒状もしくはシート状の
基板に、前記ローラ状基板取付部を回転させることで連
続的に単分子膜を累積できるようにする。
Means for Solving the Problems The present invention provides a method for forming a film using a support part having a structure in which a substrate holder moves up and down, and a rotating roller-shaped substrate mounting part provided at the tip of the support part, and the substrate holder is installed in a water tank. The water surface is divided into two parts, and a monomolecular film can be continuously accumulated on a cylindrical or sheet-shaped substrate set in the roller-shaped substrate mounting part by rotating the roller-shaped substrate mounting part.

作用 前記基板取付具が水槽の水面を二分していることで二種
の膜物質を用いてムムBB・・・・・・ムBAB・・・
・・・のようなヘテロ膜をつくることができる。また、
3種(X、Y、Z)の膜構造を選択的につくることがで
きる。さらに基板が円筒状、シート状と大面積に累積膜
をつくることができる。シート状の場合にはローラに巻
きつけて膜累積したのち平板に戻して切断、分割するこ
とができる。
Function: Since the board mount divides the water surface of the aquarium into two, two types of membrane materials are used to create MumuBB...MuBAB...
It is possible to create a hetero membrane such as... Also,
Three types (X, Y, Z) of membrane structures can be selectively created. Furthermore, it is possible to form a cumulative film over a large area when the substrate is cylindrical or sheet-like. In the case of a sheet, it can be wound around a roller to accumulate a film, then returned to a flat plate and cut and divided.

実施例 本発明の実施例について、第1図〜第3図を用いて以下
に説明する。本発明の基板保持具7は2木の上下動する
構造の支持部7aと前記2本の支持部にはさまれたよう
にローラ状を有する基板取付部7bとから成り、前記ロ
ーラ状基板取付部は回転する。前記ローラ状基板取付部
7bの周囲には例えばシート状の基板6がセットされて
いる。
Embodiment An embodiment of the present invention will be described below with reference to FIGS. 1 to 3. The substrate holder 7 of the present invention is composed of two supporting parts 7a having a vertically movable structure and a roller-shaped board mounting part 7b sandwiched between the two supporting parts. The part rotates. For example, a sheet-shaped substrate 6 is set around the roller-shaped substrate mounting portion 7b.

この様子を第1図aに示す。This situation is shown in FIG. 1a.

水槽1内の純水3はその表面が清浄に保たれた状態で前
記基板のセットされた基板保持具7を降下させ、前記純
水面を二分するような例えば基板取付部7bの回転軸が
水面とほぼ同位置になるように設置する。この様子を第
1図(b) K示す。
The surface of the pure water 3 in the water tank 1 is kept clean, and the substrate holder 7 on which the substrate is set is lowered so that, for example, the rotating shaft of the substrate mounting part 7b which divides the pure water surface into two is placed on the water surface. Install it so that it is approximately in the same position as the This situation is shown in FIG. 1(b).

次に膜層質4を水面に滴下、展開しその表面圧をバリア
5で調整し一定圧に保ちながら前記基板取付部7bを回
転させて連続的に膜層質すなわち単分子膜4の累積を行
う。このとき基板取付部7bの回転方向を一定にした場
合において、水面および膜層質を選択することにより異
なる膜を累積することができる。
Next, the membrane layer 4 is dropped onto the water surface, spread out, and the surface pressure is adjusted by the barrier 5, and while keeping the pressure constant, the substrate attachment part 7b is rotated to continuously accumulate the membrane layer, that is, the monomolecular film 4. conduct. At this time, when the direction of rotation of the substrate mounting portion 7b is kept constant, different films can be accumulated by selecting the water surface and film layer quality.

例えば水面ム側のみに膜物質4を展開させた場合にはX
型の、水面ム、B側共に膜物質4を展開させた場合には
Y型の、そして水面B側のみに膜物質4を展開させた場
合にはZ型の膜をそれぞれ累積することができる(第2
図)。
For example, if the membrane material 4 is developed only on the water surface side,
If the film material 4 is spread on both the water surface and the B side of the mold, a Y-shaped film can be accumulated, and when the film material 4 is spread only on the water surface B side, a Z-shaped film can be accumulated. (Second
figure).

このようにして累積したx、y、z型それぞれの膜層を
第3図に示す。
The x-, y-, and z-type film layers accumulated in this manner are shown in FIG.

さらには水面のム側、B側それぞれに異った膜層質を用
いることで人、B、ム、B・・・・・・、また回転方向
を変化させることでム、Bの組み合わせをかえることが
できる。
Furthermore, by using different film layer properties on the mu side and the B side of the water surface, the combination of man, B, mu, B, etc. can be changed by changing the direction of rotation. be able to.

なお本実施例では基板としてシート状のものを用いてい
るが円筒状のものでも良い。
In this embodiment, a sheet-shaped substrate is used as the substrate, but a cylindrical substrate may also be used.

発明の効果 本発明によれば従来の垂直挿入法に比べて基板サイズに
よって水槽の深さを変えなくてもよい。
Effects of the Invention According to the present invention, there is no need to change the depth of the water tank depending on the substrate size, compared to the conventional vertical insertion method.

またシート状もしくは円筒状基板に連続的に膜累積がで
きる上、膜層を選択し容易で連続的かつ短時間で膜累積
ができる。さらに基板が大面積で処理できることから非
常に作業効率が良く、量産性に適した装置を提供するも
のである。
In addition, it is possible to continuously accumulate a film on a sheet-like or cylindrical substrate, and it is also possible to select a film layer and easily accumulate the film continuously and in a short time. Furthermore, since a large area of substrates can be processed, the present invention provides an apparatus that has very high working efficiency and is suitable for mass production.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図(a)は本発明の一実施例装置におけるローラ状
を有する基板保持具にシート状の基板をセットした状態
の斜視図、第1図(b)は前記基板保持具を水槽に挿入
した状態の断面図、第2図(a)〜(C)は同基板保持
具によって2分された水面に選択的に膜物質を展開し使
うことによって膜層の異なるものを累積する様子を示す
断面図、第3図(a)〜(C)は本実施例方法を用いて
累積した3種の膜層を示す断面図、第4図は従来装置を
示す構成図である。 1・・・・・・水槽、2・・・・・・水温調整部、3・
・・・・・純水、4・・・・・・膜物質、6・・・・・
・バリア、6・・・・・・基板、7・・・・・・基板保
持具。 代理人の氏名 弁理士 中 尾 敏 男 ほか1名l−
水 槽 3−耗水 霞 2 図 酢3図
FIG. 1(a) is a perspective view of a sheet-like substrate set on a roller-shaped substrate holder in an apparatus according to an embodiment of the present invention, and FIG. 1(b) is a perspective view of the substrate holder inserted into a water tank. The cross-sectional views in Figures 2 (a) to (C) show how different film layers are accumulated by selectively spreading and using the film material on the water surface divided into two by the same substrate holder. 3A to 3C are cross-sectional views showing three types of film layers accumulated using the method of this embodiment, and FIG. 4 is a configuration diagram showing a conventional device. 1... Water tank, 2... Water temperature adjustment section, 3.
...Pure water, 4...Membrane material, 6...
- Barrier, 6... substrate, 7... substrate holder. Name of agent: Patent attorney Toshio Nakao and one other person
Water tank 3 - water haze 2 figure vinegar 3 figure

Claims (3)

【特許請求の範囲】[Claims] (1)水槽と、膜を形成する物質と、前記膜物質を水槽
に浮かべたときの表面圧を調整するための加圧部と、基
板保持具とを有するとともに、前記保持具が上下動する
構造の支持部と、支持部の端部に設けたローラ状の回転
する試料取付部とを備えてなる単分子膜累積装置。
(1) It has a water tank, a substance that forms a film, a pressure unit for adjusting the surface pressure when the film material is floated in the water tank, and a substrate holder, and the holder moves up and down. A monomolecular film accumulation device comprising a structural support part and a rotating roller-shaped sample mounting part provided at an end of the support part.
(2)ローラ状試料取付部が前記水槽の水面を二分する
特許請求の範囲第1項記載の単分子膜累積装置。
(2) The monomolecular film accumulation device according to claim 1, wherein the roller-shaped sample mounting portion divides the water surface of the water tank into two.
(3)水槽と、膜を形成する物質と、前記膜物質を水槽
に浮かべたときの表面圧を調整するための加圧部と、基
板保持具とを備えるとともに、前記保持具が上下動する
構造の支持部と、支持部の端部に設けたローラ状の回転
する試料取付部とを有する単分子膜累積装置を用いて、
前記ローラ状試料取付部に円筒もしくはシート状の基板
をセットし、前記ローラを回転させることにより連続的
に単分子膜を累積する単分子膜累積方法。
(3) A water tank, a film-forming substance, a pressure unit for adjusting the surface pressure when the film material is floated in the water tank, and a substrate holder are provided, and the holder moves up and down. Using a monolayer accumulator having a structural support and a rotating roller-like sample attachment provided at the end of the support,
A monomolecular film accumulation method in which a cylindrical or sheet-like substrate is set on the roller-shaped sample attachment part, and a monomolecular film is continuously accumulated by rotating the roller.
JP26966187A 1987-10-26 1987-10-26 Monomolecular film cumulation device and monomolecular film cumulation method using said device Pending JPH01111472A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26966187A JPH01111472A (en) 1987-10-26 1987-10-26 Monomolecular film cumulation device and monomolecular film cumulation method using said device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26966187A JPH01111472A (en) 1987-10-26 1987-10-26 Monomolecular film cumulation device and monomolecular film cumulation method using said device

Publications (1)

Publication Number Publication Date
JPH01111472A true JPH01111472A (en) 1989-04-28

Family

ID=17475454

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26966187A Pending JPH01111472A (en) 1987-10-26 1987-10-26 Monomolecular film cumulation device and monomolecular film cumulation method using said device

Country Status (1)

Country Link
JP (1) JPH01111472A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006082038A (en) * 2004-09-17 2006-03-30 Hokkaido Univ Manufacturing method for thin-film laminated structure, thin-film laminated structure, function element, manufacturing method for function element, and manufacturing device of thin-film laminated structure and heterostructure

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006082038A (en) * 2004-09-17 2006-03-30 Hokkaido Univ Manufacturing method for thin-film laminated structure, thin-film laminated structure, function element, manufacturing method for function element, and manufacturing device of thin-film laminated structure and heterostructure

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