JPH01110433U - - Google Patents

Info

Publication number
JPH01110433U
JPH01110433U JP1988004154U JP415488U JPH01110433U JP H01110433 U JPH01110433 U JP H01110433U JP 1988004154 U JP1988004154 U JP 1988004154U JP 415488 U JP415488 U JP 415488U JP H01110433 U JPH01110433 U JP H01110433U
Authority
JP
Japan
Prior art keywords
view
rectangular hole
semiconductor
etching mask
anisotropic etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1988004154U
Other languages
English (en)
Japanese (ja)
Other versions
JPH079376Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988004154U priority Critical patent/JPH079376Y2/ja
Publication of JPH01110433U publication Critical patent/JPH01110433U/ja
Application granted granted Critical
Publication of JPH079376Y2 publication Critical patent/JPH079376Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP1988004154U 1988-01-19 1988-01-19 (100)面異方性エッチング加工マスク Expired - Lifetime JPH079376Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988004154U JPH079376Y2 (ja) 1988-01-19 1988-01-19 (100)面異方性エッチング加工マスク

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988004154U JPH079376Y2 (ja) 1988-01-19 1988-01-19 (100)面異方性エッチング加工マスク

Publications (2)

Publication Number Publication Date
JPH01110433U true JPH01110433U (US07122547-20061017-C00032.png) 1989-07-26
JPH079376Y2 JPH079376Y2 (ja) 1995-03-06

Family

ID=31206413

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988004154U Expired - Lifetime JPH079376Y2 (ja) 1988-01-19 1988-01-19 (100)面異方性エッチング加工マスク

Country Status (1)

Country Link
JP (1) JPH079376Y2 (US07122547-20061017-C00032.png)

Also Published As

Publication number Publication date
JPH079376Y2 (ja) 1995-03-06

Similar Documents

Publication Publication Date Title
JPS60125726U (ja) 化合物半導体ミラ−ウエハ
JPH01110433U (US07122547-20061017-C00032.png)
JPS6289141U (US07122547-20061017-C00032.png)
JPS62140621U (US07122547-20061017-C00032.png)
JPH02126145U (US07122547-20061017-C00032.png)
JPS6395564U (US07122547-20061017-C00032.png)
JPS6448001U (US07122547-20061017-C00032.png)
JPH0313735U (US07122547-20061017-C00032.png)
JPH0176061U (US07122547-20061017-C00032.png)
JPS61188957U (US07122547-20061017-C00032.png)
JPH0186211U (US07122547-20061017-C00032.png)
JPH02118913U (US07122547-20061017-C00032.png)
JPH0330349U (US07122547-20061017-C00032.png)
JPS61196541U (US07122547-20061017-C00032.png)
JPS6230343U (US07122547-20061017-C00032.png)
JPH031424U (US07122547-20061017-C00032.png)
JPH0423039U (US07122547-20061017-C00032.png)
JPS6351422U (US07122547-20061017-C00032.png)
JPH0340U (US07122547-20061017-C00032.png)
JPS62165372U (US07122547-20061017-C00032.png)
JPH01121632U (US07122547-20061017-C00032.png)
JPH02113379U (US07122547-20061017-C00032.png)
JPS6159302U (US07122547-20061017-C00032.png)
JPH0258034U (US07122547-20061017-C00032.png)
JPH01107139U (US07122547-20061017-C00032.png)