JPH01110431U - - Google Patents
Info
- Publication number
- JPH01110431U JPH01110431U JP478588U JP478588U JPH01110431U JP H01110431 U JPH01110431 U JP H01110431U JP 478588 U JP478588 U JP 478588U JP 478588 U JP478588 U JP 478588U JP H01110431 U JPH01110431 U JP H01110431U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- developing device
- vacuum
- positive
- wafer chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000011084 recovery Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP478588U JPH01110431U (enExample) | 1988-01-19 | 1988-01-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP478588U JPH01110431U (enExample) | 1988-01-19 | 1988-01-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01110431U true JPH01110431U (enExample) | 1989-07-26 |
Family
ID=31207605
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP478588U Pending JPH01110431U (enExample) | 1988-01-19 | 1988-01-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01110431U (enExample) |
-
1988
- 1988-01-19 JP JP478588U patent/JPH01110431U/ja active Pending