JPH01110267U - - Google Patents

Info

Publication number
JPH01110267U
JPH01110267U JP463988U JP463988U JPH01110267U JP H01110267 U JPH01110267 U JP H01110267U JP 463988 U JP463988 U JP 463988U JP 463988 U JP463988 U JP 463988U JP H01110267 U JPH01110267 U JP H01110267U
Authority
JP
Japan
Prior art keywords
substrate
holder
fixing
fixing plate
main body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP463988U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP463988U priority Critical patent/JPH01110267U/ja
Publication of JPH01110267U publication Critical patent/JPH01110267U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP463988U 1988-01-20 1988-01-20 Pending JPH01110267U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP463988U JPH01110267U (enrdf_load_stackoverflow) 1988-01-20 1988-01-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP463988U JPH01110267U (enrdf_load_stackoverflow) 1988-01-20 1988-01-20

Publications (1)

Publication Number Publication Date
JPH01110267U true JPH01110267U (enrdf_load_stackoverflow) 1989-07-25

Family

ID=31207327

Family Applications (1)

Application Number Title Priority Date Filing Date
JP463988U Pending JPH01110267U (enrdf_load_stackoverflow) 1988-01-20 1988-01-20

Country Status (1)

Country Link
JP (1) JPH01110267U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03120821A (ja) * 1989-09-29 1991-05-23 American Teleph & Telegr Co <Att> 集積回路デバイスの製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03120821A (ja) * 1989-09-29 1991-05-23 American Teleph & Telegr Co <Att> 集積回路デバイスの製造方法

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