JPH01110258U - - Google Patents
Info
- Publication number
- JPH01110258U JPH01110258U JP629988U JP629988U JPH01110258U JP H01110258 U JPH01110258 U JP H01110258U JP 629988 U JP629988 U JP 629988U JP 629988 U JP629988 U JP 629988U JP H01110258 U JPH01110258 U JP H01110258U
- Authority
- JP
- Japan
- Prior art keywords
- glass disk
- bottom groove
- disk
- circular opening
- pallet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 claims description 7
- 239000010409 thin film Substances 0.000 claims description 2
- 229910010293 ceramic material Inorganic materials 0.000 claims 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案に係る薄膜形成用パレツトの一
実施例を示す全体斜視図、第２図はそのデイスク
装着用円形開口部の周縁構造を示す説明図、第３
図は溝部分の拡大断面図、第４図は本考案の他の
実施例を示す斜視図、第５図は本考案の更に他の
実施例を示す斜視図である。また第６図は従来技
術の一例を示す断面図、第７図Ａ，Ｂはその温度
変化時のデイスク支持状態を示す説明図である。
１２……ガラスデイスク、１０，２０，３２，
４２……パレツト、２２，３６，４６……セラミ
ツクス材料、２４，３４，４４……円形開口部、
２６，４０，５０……下辺溝部、２８……上辺段
部、３８，４８……金属材料。
FIG. 1 is an overall perspective view showing one embodiment of a thin film forming pallet according to the present invention, FIG. 2 is an explanatory view showing the peripheral structure of a circular opening for mounting a disk, and FIG.
4 is a perspective view showing another embodiment of the present invention, and FIG. 5 is a perspective view showing still another embodiment of the present invention. Further, FIG. 6 is a sectional view showing an example of the prior art, and FIGS. 7A and 7B are explanatory views showing the disk support state when the temperature changes. 12...Glass disk, 10, 20, 32,
42...Pallet, 22,36,46...Ceramics material, 24,34,44...Circular opening,
26, 40, 50...lower side groove portion, 28...upper side stepped portion, 38, 48...metal material.
Claims (1)
周縁に、ガラスデイスクを支える断面ほぼＶ字型
の下辺溝部とガラスデイスクの倒れを防ぐ上辺段
部とを形成し、ガラスデイスクが自立した状態で
搬送可能なパレツトにおいて、少なくとも前記下
辺溝部の近傍はガラスデイスクの熱膨張係数とほ
ぼ等しい熱膨張係数を有するセラミツクス材料か
らなることを特徴とするガラスデイスクの薄膜形
成用パレツト。 At the periphery of the circular opening for attaching the glass disk, a bottom groove with an almost V-shaped cross section that supports the glass disk and an upper step to prevent the glass disk from falling over are formed, allowing the glass disk to be transported in an independent state. 1. A pallet for forming a thin film on a glass disk, characterized in that at least the vicinity of the bottom groove portion is made of a ceramic material having a coefficient of thermal expansion approximately equal to that of the glass disk.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP629988U JPH01110258U (en) | 1988-01-21 | 1988-01-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP629988U JPH01110258U (en) | 1988-01-21 | 1988-01-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01110258U true JPH01110258U (en) | 1989-07-25 |
Family
ID=31210402
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP629988U Pending JPH01110258U (en) | 1988-01-21 | 1988-01-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01110258U (en) |
-
1988
- 1988-01-21 JP JP629988U patent/JPH01110258U/ja active Pending
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