JPH01110256U - - Google Patents

Info

Publication number
JPH01110256U
JPH01110256U JP278888U JP278888U JPH01110256U JP H01110256 U JPH01110256 U JP H01110256U JP 278888 U JP278888 U JP 278888U JP 278888 U JP278888 U JP 278888U JP H01110256 U JPH01110256 U JP H01110256U
Authority
JP
Japan
Prior art keywords
crucible
thin film
support
spacer
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP278888U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0527485Y2 (US06826419-20041130-M00005.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP278888U priority Critical patent/JPH0527485Y2/ja
Publication of JPH01110256U publication Critical patent/JPH01110256U/ja
Application granted granted Critical
Publication of JPH0527485Y2 publication Critical patent/JPH0527485Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP278888U 1988-01-13 1988-01-13 Expired - Lifetime JPH0527485Y2 (US06826419-20041130-M00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP278888U JPH0527485Y2 (US06826419-20041130-M00005.png) 1988-01-13 1988-01-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP278888U JPH0527485Y2 (US06826419-20041130-M00005.png) 1988-01-13 1988-01-13

Publications (2)

Publication Number Publication Date
JPH01110256U true JPH01110256U (US06826419-20041130-M00005.png) 1989-07-25
JPH0527485Y2 JPH0527485Y2 (US06826419-20041130-M00005.png) 1993-07-13

Family

ID=31506636

Family Applications (1)

Application Number Title Priority Date Filing Date
JP278888U Expired - Lifetime JPH0527485Y2 (US06826419-20041130-M00005.png) 1988-01-13 1988-01-13

Country Status (1)

Country Link
JP (1) JPH0527485Y2 (US06826419-20041130-M00005.png)

Also Published As

Publication number Publication date
JPH0527485Y2 (US06826419-20041130-M00005.png) 1993-07-13

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