JPH01110048U

JPH01110048U -

Info

Publication number: JPH01110048U
Application number: JP558488U
Authority: JP
Priority date: 1988-01-19
Filing date: 1988-01-19
Publication date: 1989-07-25

Description

[Brief explanation of the drawing]

第１図は本考案の工具位置検知装置および微小
切り込み用切削装置に係る一実施例を示す概略構
成図、第２図は本実施例において微小切り込み量
を設定する際のプロセスを示すフローチヤート図
、第３図は本実施例における接触点検出信号の出
力状態を示すグラフ図、第４図ａ，ｂ，ｃ，ｄは
、溝入れ用剣型ダイヤモンド工具を用いてそれぞ
れの切り込み量を順に０．０５ｕｍ，０．１ｕｍ
，０．２ｕｍ，０．５ｕｍに設定し、本実施例に
より切削加工を行なつた場合の加工溝形状を示す
グラフ図、第５図は本実施例における切り込み量
の設定値と加工された溝の深さとの関係が示すグ
ラフ図、第６図は従来技術における微小切り込み
用工具を示す概略構成図である。１……溝部、２……シヤンク、３……工具取付
部、４……圧電素子としての第１圧電素子、５…
…工具台、６……圧力検知手段としての第２圧電
素子、７……信号処理手段としての接触点検出信
号処理回路、８……制御手段としての電源装置、
１０……制御手段としての制御用コンピユータ、
１３……ダイヤモンド工具。 Fig. 1 is a schematic configuration diagram showing an embodiment of the tool position detection device and micro-cutting cutting device of the present invention, and Fig. 2 is a flowchart showing the process for setting the micro-cutting amount in this embodiment. , FIG. 3 is a graph showing the output state of the contact point detection signal in this embodiment, and FIG. .05um, 0.1um
, 0.2um, and 0.5um, and a graph showing the shape of the machined groove when cutting is performed according to this example. Figure 5 shows the setting value of the depth of cut and the machined groove in this example. FIG. 6 is a graph showing the relationship between the depth and the depth, and FIG. 6 is a schematic configuration diagram showing a conventional micro-cutting tool. DESCRIPTION OF SYMBOLS 1...Groove part, 2...Shank, 3...Tool attachment part, 4...First piezoelectric element as a piezoelectric element, 5...
...tool stand, 6...second piezoelectric element as pressure detection means, 7...contact point detection signal processing circuit as signal processing means, 8...power supply device as control means,
10...control computer as control means,
13...Diamond tool.

Claims

[Claims for Utility Model Registration] (1) A pressure sensor installed at the rear of the cutting tool 13 in the cutting direction to detect the magnitude of the axial pressing force acting on the cutting edge of the tool 13 and output a detection signal thereof. and a signal processing means 7 that detects that the cutting edge of the tool 13 has come into contact with the workpiece based on the output signal of the pressure detection means 6 and outputs the detection signal. Tool position detection device. (2) A groove part 1 is provided in the axially intermediate part, and a shank 2 and a tool attachment part 3 are formed on both sides of the groove part 1, and the shank 2 and the tool attachment part 3 are sandwiched between the shank 2 and the tool attachment part 3 in the groove part 1. and a piezoelectric element 4 that presses the tool mounting part 3 in the cutting direction in accordance with an applied voltage, and the tool mounting part 3 includes a tool stand 5 having a parallel plate spring structure that can be bent in the cutting direction. , a tool position detection device according to claim 1 is attached to the axial tip end of the tool mounting portion 3 of the tool stand 5, and the piezoelectric element 4 is adjusted based on the output signal from the signal processing means 7 of the tool position detection device. 1. A cutting device for making minute cuts, characterized by comprising control means 8, 10 for controlling the voltage applied to the cutting device.