JPH01108955U - - Google Patents
Info
- Publication number
- JPH01108955U JPH01108955U JP1988002701U JP270188U JPH01108955U JP H01108955 U JPH01108955 U JP H01108955U JP 1988002701 U JP1988002701 U JP 1988002701U JP 270188 U JP270188 U JP 270188U JP H01108955 U JPH01108955 U JP H01108955U
- Authority
- JP
- Japan
- Prior art keywords
- interlayer insulating
- polycrystalline silicon
- insulating film
- utility
- intermediate layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Semiconductor Memories (AREA)
- Non-Volatile Memory (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988002701U JPH01108955U (enExample) | 1988-01-13 | 1988-01-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988002701U JPH01108955U (enExample) | 1988-01-13 | 1988-01-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01108955U true JPH01108955U (enExample) | 1989-07-24 |
Family
ID=31203697
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988002701U Pending JPH01108955U (enExample) | 1988-01-13 | 1988-01-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01108955U (enExample) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5158077A (en) * | 1974-11-18 | 1976-05-21 | Matsushita Electric Industrial Co Ltd | Mos gatahandotaisochino seizohoho |
| JPS5331983A (en) * | 1976-09-06 | 1978-03-25 | Nippon Telegr & Teleph Corp <Ntt> | Production of semiconductor substrates |
| JPS54109761A (en) * | 1978-02-17 | 1979-08-28 | Toshiba Corp | Manufacture of semiconductor device |
-
1988
- 1988-01-13 JP JP1988002701U patent/JPH01108955U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5158077A (en) * | 1974-11-18 | 1976-05-21 | Matsushita Electric Industrial Co Ltd | Mos gatahandotaisochino seizohoho |
| JPS5331983A (en) * | 1976-09-06 | 1978-03-25 | Nippon Telegr & Teleph Corp <Ntt> | Production of semiconductor substrates |
| JPS54109761A (en) * | 1978-02-17 | 1979-08-28 | Toshiba Corp | Manufacture of semiconductor device |