JPH01108955U - - Google Patents

Info

Publication number
JPH01108955U
JPH01108955U JP1988002701U JP270188U JPH01108955U JP H01108955 U JPH01108955 U JP H01108955U JP 1988002701 U JP1988002701 U JP 1988002701U JP 270188 U JP270188 U JP 270188U JP H01108955 U JPH01108955 U JP H01108955U
Authority
JP
Japan
Prior art keywords
interlayer insulating
polycrystalline silicon
insulating film
utility
intermediate layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1988002701U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988002701U priority Critical patent/JPH01108955U/ja
Publication of JPH01108955U publication Critical patent/JPH01108955U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Semiconductor Memories (AREA)
  • Non-Volatile Memory (AREA)
JP1988002701U 1988-01-13 1988-01-13 Pending JPH01108955U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988002701U JPH01108955U (enrdf_load_stackoverflow) 1988-01-13 1988-01-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988002701U JPH01108955U (enrdf_load_stackoverflow) 1988-01-13 1988-01-13

Publications (1)

Publication Number Publication Date
JPH01108955U true JPH01108955U (enrdf_load_stackoverflow) 1989-07-24

Family

ID=31203697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988002701U Pending JPH01108955U (enrdf_load_stackoverflow) 1988-01-13 1988-01-13

Country Status (1)

Country Link
JP (1) JPH01108955U (enrdf_load_stackoverflow)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5158077A (en) * 1974-11-18 1976-05-21 Matsushita Electric Ind Co Ltd mos gatahandotaisochino seizohoho
JPS5331983A (en) * 1976-09-06 1978-03-25 Nippon Telegr & Teleph Corp <Ntt> Production of semiconductor substrates
JPS54109761A (en) * 1978-02-17 1979-08-28 Toshiba Corp Manufacture of semiconductor device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5158077A (en) * 1974-11-18 1976-05-21 Matsushita Electric Ind Co Ltd mos gatahandotaisochino seizohoho
JPS5331983A (en) * 1976-09-06 1978-03-25 Nippon Telegr & Teleph Corp <Ntt> Production of semiconductor substrates
JPS54109761A (en) * 1978-02-17 1979-08-28 Toshiba Corp Manufacture of semiconductor device

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