JPH01108199A - 分子線結晶成長装置 - Google Patents

分子線結晶成長装置

Info

Publication number
JPH01108199A
JPH01108199A JP26549187A JP26549187A JPH01108199A JP H01108199 A JPH01108199 A JP H01108199A JP 26549187 A JP26549187 A JP 26549187A JP 26549187 A JP26549187 A JP 26549187A JP H01108199 A JPH01108199 A JP H01108199A
Authority
JP
Japan
Prior art keywords
crystal growth
cooling water
cooling
shutter
growth chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP26549187A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0353276B2 (enExample
Inventor
Takeshi Igarashi
武司 五十嵐
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP26549187A priority Critical patent/JPH01108199A/ja
Publication of JPH01108199A publication Critical patent/JPH01108199A/ja
Publication of JPH0353276B2 publication Critical patent/JPH0353276B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP26549187A 1987-10-22 1987-10-22 分子線結晶成長装置 Granted JPH01108199A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26549187A JPH01108199A (ja) 1987-10-22 1987-10-22 分子線結晶成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26549187A JPH01108199A (ja) 1987-10-22 1987-10-22 分子線結晶成長装置

Publications (2)

Publication Number Publication Date
JPH01108199A true JPH01108199A (ja) 1989-04-25
JPH0353276B2 JPH0353276B2 (enExample) 1991-08-14

Family

ID=17417920

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26549187A Granted JPH01108199A (ja) 1987-10-22 1987-10-22 分子線結晶成長装置

Country Status (1)

Country Link
JP (1) JPH01108199A (enExample)

Also Published As

Publication number Publication date
JPH0353276B2 (enExample) 1991-08-14

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term