JPH01105839U - - Google Patents
Info
- Publication number
- JPH01105839U JPH01105839U JP120788U JP120788U JPH01105839U JP H01105839 U JPH01105839 U JP H01105839U JP 120788 U JP120788 U JP 120788U JP 120788 U JP120788 U JP 120788U JP H01105839 U JPH01105839 U JP H01105839U
- Authority
- JP
- Japan
- Prior art keywords
- detection section
- pressure detection
- static pressure
- semiconductor silicon
- silicon substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 7
- 230000003068 static effect Effects 0.000 claims description 5
- 239000011521 glass Substances 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 2
- 239000002131 composite material Substances 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 4
- 229910052710 silicon Inorganic materials 0.000 claims 4
- 239000010703 silicon Substances 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP120788U JPH01105839U (uk) | 1988-01-11 | 1988-01-11 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP120788U JPH01105839U (uk) | 1988-01-11 | 1988-01-11 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01105839U true JPH01105839U (uk) | 1989-07-17 |
Family
ID=31200896
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP120788U Pending JPH01105839U (uk) | 1988-01-11 | 1988-01-11 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01105839U (uk) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63172514U (uk) * | 1987-04-27 | 1988-11-09 |
-
1988
- 1988-01-11 JP JP120788U patent/JPH01105839U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63172514U (uk) * | 1987-04-27 | 1988-11-09 |