JPH01105813U - - Google Patents

Info

Publication number
JPH01105813U
JPH01105813U JP74488U JP74488U JPH01105813U JP H01105813 U JPH01105813 U JP H01105813U JP 74488 U JP74488 U JP 74488U JP 74488 U JP74488 U JP 74488U JP H01105813 U JPH01105813 U JP H01105813U
Authority
JP
Japan
Prior art keywords
light
servo mechanism
measurement scale
condensing lens
reflected light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP74488U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP74488U priority Critical patent/JPH01105813U/ja
Publication of JPH01105813U publication Critical patent/JPH01105813U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Optical Transform (AREA)
JP74488U 1988-01-07 1988-01-07 Pending JPH01105813U (US06653308-20031125-C00197.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP74488U JPH01105813U (US06653308-20031125-C00197.png) 1988-01-07 1988-01-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP74488U JPH01105813U (US06653308-20031125-C00197.png) 1988-01-07 1988-01-07

Publications (1)

Publication Number Publication Date
JPH01105813U true JPH01105813U (US06653308-20031125-C00197.png) 1989-07-17

Family

ID=31200036

Family Applications (1)

Application Number Title Priority Date Filing Date
JP74488U Pending JPH01105813U (US06653308-20031125-C00197.png) 1988-01-07 1988-01-07

Country Status (1)

Country Link
JP (1) JPH01105813U (US06653308-20031125-C00197.png)

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