JPH01104038U - - Google Patents

Info

Publication number
JPH01104038U
JPH01104038U JP19799687U JP19799687U JPH01104038U JP H01104038 U JPH01104038 U JP H01104038U JP 19799687 U JP19799687 U JP 19799687U JP 19799687 U JP19799687 U JP 19799687U JP H01104038 U JPH01104038 U JP H01104038U
Authority
JP
Japan
Prior art keywords
tray
spring
wafer
semiconductor wafer
storage section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19799687U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19799687U priority Critical patent/JPH01104038U/ja
Publication of JPH01104038U publication Critical patent/JPH01104038U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP19799687U 1987-12-25 1987-12-25 Pending JPH01104038U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19799687U JPH01104038U (zh) 1987-12-25 1987-12-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19799687U JPH01104038U (zh) 1987-12-25 1987-12-25

Publications (1)

Publication Number Publication Date
JPH01104038U true JPH01104038U (zh) 1989-07-13

Family

ID=31488522

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19799687U Pending JPH01104038U (zh) 1987-12-25 1987-12-25

Country Status (1)

Country Link
JP (1) JPH01104038U (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991012631A1 (en) * 1990-02-19 1991-08-22 Purex Co., Ltd. Semiconductor wafer sample container and sample preparation method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991012631A1 (en) * 1990-02-19 1991-08-22 Purex Co., Ltd. Semiconductor wafer sample container and sample preparation method

Similar Documents

Publication Publication Date Title
JPH01104038U (zh)
JPS6394664U (zh)
JPS628960U (zh)
JPS62157086U (zh)
JPH01165649U (zh)
JPH01129065U (zh)
JPH0227859U (zh)
JPH0364206U (zh)
JPS6437040U (zh)
JPS61203556U (zh)
JPS6364068U (zh)
JPS63120726U (zh)
JPS6175134U (zh)
JPS6265845U (zh)
JPS6162882U (zh)
JPS625642U (zh)
JPH032630U (zh)
JPS6170937U (zh)
JPS5996827U (ja) 半導体ウエ−ハ収納容器
JPH02140852U (zh)
JPS62188460U (zh)
JPS63137933U (zh)
JPS61150781U (zh)
JPS62204351U (zh)
JPS6371527U (zh)