JPH01104026U - - Google Patents
Info
- Publication number
- JPH01104026U JPH01104026U JP19764087U JP19764087U JPH01104026U JP H01104026 U JPH01104026 U JP H01104026U JP 19764087 U JP19764087 U JP 19764087U JP 19764087 U JP19764087 U JP 19764087U JP H01104026 U JPH01104026 U JP H01104026U
- Authority
- JP
- Japan
- Prior art keywords
- etching
- solution
- potassium hydroxide
- semiconductor substrate
- silicon semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 2
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 claims 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims 1
- 239000007864 aqueous solution Substances 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- 239000000243 solution Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19764087U JPH01104026U (enrdf_load_stackoverflow) | 1987-12-28 | 1987-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19764087U JPH01104026U (enrdf_load_stackoverflow) | 1987-12-28 | 1987-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01104026U true JPH01104026U (enrdf_load_stackoverflow) | 1989-07-13 |
Family
ID=31488184
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19764087U Pending JPH01104026U (enrdf_load_stackoverflow) | 1987-12-28 | 1987-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01104026U (enrdf_load_stackoverflow) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS519512A (ja) * | 1974-07-12 | 1976-01-26 | Sanyo Electric Co | Gashingotaiikiatsushukuhoshiki |
-
1987
- 1987-12-28 JP JP19764087U patent/JPH01104026U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS519512A (ja) * | 1974-07-12 | 1976-01-26 | Sanyo Electric Co | Gashingotaiikiatsushukuhoshiki |