JPH01103249U - - Google Patents
Info
- Publication number
- JPH01103249U JPH01103249U JP20023287U JP20023287U JPH01103249U JP H01103249 U JPH01103249 U JP H01103249U JP 20023287 U JP20023287 U JP 20023287U JP 20023287 U JP20023287 U JP 20023287U JP H01103249 U JPH01103249 U JP H01103249U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- chamber
- vacuum
- vacuum chamber
- sample introduction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20023287U JPH01103249U (OSRAM) | 1987-12-28 | 1987-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20023287U JPH01103249U (OSRAM) | 1987-12-28 | 1987-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01103249U true JPH01103249U (OSRAM) | 1989-07-12 |
Family
ID=31490650
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20023287U Pending JPH01103249U (OSRAM) | 1987-12-28 | 1987-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01103249U (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009238426A (ja) * | 2008-03-26 | 2009-10-15 | Jeol Ltd | 試料検査装置及び試料検査方法 |
-
1987
- 1987-12-28 JP JP20023287U patent/JPH01103249U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009238426A (ja) * | 2008-03-26 | 2009-10-15 | Jeol Ltd | 試料検査装置及び試料検査方法 |
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