JPH01102496U - - Google Patents

Info

Publication number
JPH01102496U
JPH01102496U JP19745687U JP19745687U JPH01102496U JP H01102496 U JPH01102496 U JP H01102496U JP 19745687 U JP19745687 U JP 19745687U JP 19745687 U JP19745687 U JP 19745687U JP H01102496 U JPH01102496 U JP H01102496U
Authority
JP
Japan
Prior art keywords
valve
frequency
mechanical booster
open
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19745687U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19745687U priority Critical patent/JPH01102496U/ja
Publication of JPH01102496U publication Critical patent/JPH01102496U/ja
Pending legal-status Critical Current

Links

JP19745687U 1987-12-28 1987-12-28 Pending JPH01102496U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19745687U JPH01102496U (enrdf_load_stackoverflow) 1987-12-28 1987-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19745687U JPH01102496U (enrdf_load_stackoverflow) 1987-12-28 1987-12-28

Publications (1)

Publication Number Publication Date
JPH01102496U true JPH01102496U (enrdf_load_stackoverflow) 1989-07-11

Family

ID=31488006

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19745687U Pending JPH01102496U (enrdf_load_stackoverflow) 1987-12-28 1987-12-28

Country Status (1)

Country Link
JP (1) JPH01102496U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5963394A (ja) * 1982-10-04 1984-04-11 Tokuda Seisakusho Ltd 真空排気装置
JPS62265489A (ja) * 1986-05-13 1987-11-18 Kobe Steel Ltd スクリユ式真空ポンプの制御方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5963394A (ja) * 1982-10-04 1984-04-11 Tokuda Seisakusho Ltd 真空排気装置
JPS62265489A (ja) * 1986-05-13 1987-11-18 Kobe Steel Ltd スクリユ式真空ポンプの制御方法

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