JPH01101702U - - Google Patents
Info
- Publication number
- JPH01101702U JPH01101702U JP20088287U JP20088287U JPH01101702U JP H01101702 U JPH01101702 U JP H01101702U JP 20088287 U JP20088287 U JP 20088287U JP 20088287 U JP20088287 U JP 20088287U JP H01101702 U JPH01101702 U JP H01101702U
- Authority
- JP
- Japan
- Prior art keywords
- hollow member
- hollow
- grooved
- groove
- rotating shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000002093 peripheral effect Effects 0.000 claims 2
- 230000000694 effects Effects 0.000 claims 1
Landscapes
- Jigs For Machine Tools (AREA)
- Turning (AREA)
- Joints Allowing Movement (AREA)
- Sliding-Contact Bearings (AREA)
- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
Description
第１図は本考案の１実施例による弾性体シール
継手を用いた真空チヤツク付きスピンドルの一部
分裁断した側面図、第２図は第１図における実施
例の弾性体シール継手の拡大縦断面図、第３図は
本考案の他の実施例の拡大縦断面図である。
１……回転軸部、３……ハウジング、１１，１
６……動圧発生溝、１２……継手固定部材、１３
，１５……溝付き中空部材、１４……弾性体。
FIG. 1 is a partially cutaway side view of a spindle with a vacuum chuck using an elastic seal joint according to an embodiment of the present invention, FIG. 2 is an enlarged longitudinal sectional view of the elastic seal joint of the embodiment shown in FIG. FIG. 3 is an enlarged longitudinal sectional view of another embodiment of the present invention. 1...Rotating shaft portion, 3...Housing, 11,1
6...Dynamic pressure generating groove, 12...Joint fixing member, 13
, 15... Grooved hollow member, 14... Elastic body.
Claims (1)
周面または外周面に微小ラビリンス隙間を有して
装着される溝付き中空部材と、加圧または負圧気
体発生源に連結される継手固定部材と、前記溝付
き中空部材と前記固定部材とを連結する中空の弾
性体とを有し、前記溝付き中空部材は前記回転軸
部に対面する外周面または内周面に動圧効果を発
生させる溝加工が施されることを特徴とする中空
スピンドルのシール継手。 A hollow member with a groove is attached to the inner peripheral surface or outer peripheral surface of the shaft end of a rotating shaft portion having a through hole formed in the shaft center with a minute labyrinth gap, and is connected to a pressurized or negative pressure gas generation source. The grooved hollow member has a joint fixing member and a hollow elastic body that connects the grooved hollow member and the fixing member, and the grooved hollow member has a dynamic pressure effect on an outer circumferential surface or an inner circumferential surface facing the rotating shaft portion. A seal joint for a hollow spindle, which is characterized by being processed with a groove that generates.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20088287U JPH0630326Y2 (en) | 1987-12-28 | 1987-12-28 | Vacuum chuck spindle seal fitting |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20088287U JPH0630326Y2 (en) | 1987-12-28 | 1987-12-28 | Vacuum chuck spindle seal fitting |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01101702U true JPH01101702U (en) | 1989-07-10 |
| JPH0630326Y2 JPH0630326Y2 (en) | 1994-08-17 |
Family
ID=31491270
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20088287U Expired - Lifetime JPH0630326Y2 (en) | 1987-12-28 | 1987-12-28 | Vacuum chuck spindle seal fitting |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0630326Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0427773A (en) * | 1990-05-23 | 1992-01-30 | Ibiden Co Ltd | Plunger pump |
| JP2020069589A (en) * | 2018-10-31 | 2020-05-07 | ファナック株式会社 | Main spindle device |
-
1987
- 1987-12-28 JP JP20088287U patent/JPH0630326Y2/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0427773A (en) * | 1990-05-23 | 1992-01-30 | Ibiden Co Ltd | Plunger pump |
| JP2020069589A (en) * | 2018-10-31 | 2020-05-07 | ファナック株式会社 | Main spindle device |
| US10974357B2 (en) | 2018-10-31 | 2021-04-13 | Fanuc Corporation | Spindle device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0630326Y2 (en) | 1994-08-17 |