JPH01100359U - - Google Patents

Info

Publication number
JPH01100359U
JPH01100359U JP19678087U JP19678087U JPH01100359U JP H01100359 U JPH01100359 U JP H01100359U JP 19678087 U JP19678087 U JP 19678087U JP 19678087 U JP19678087 U JP 19678087U JP H01100359 U JPH01100359 U JP H01100359U
Authority
JP
Japan
Prior art keywords
electrode
charged particle
particle beam
beam device
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19678087U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0517797Y2 (US06373033-20020416-M00071.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19678087U priority Critical patent/JPH0517797Y2/ja
Publication of JPH01100359U publication Critical patent/JPH01100359U/ja
Application granted granted Critical
Publication of JPH0517797Y2 publication Critical patent/JPH0517797Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP19678087U 1987-12-25 1987-12-25 Expired - Lifetime JPH0517797Y2 (US06373033-20020416-M00071.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19678087U JPH0517797Y2 (US06373033-20020416-M00071.png) 1987-12-25 1987-12-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19678087U JPH0517797Y2 (US06373033-20020416-M00071.png) 1987-12-25 1987-12-25

Publications (2)

Publication Number Publication Date
JPH01100359U true JPH01100359U (US06373033-20020416-M00071.png) 1989-07-05
JPH0517797Y2 JPH0517797Y2 (US06373033-20020416-M00071.png) 1993-05-12

Family

ID=31487375

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19678087U Expired - Lifetime JPH0517797Y2 (US06373033-20020416-M00071.png) 1987-12-25 1987-12-25

Country Status (1)

Country Link
JP (1) JPH0517797Y2 (US06373033-20020416-M00071.png)

Also Published As

Publication number Publication date
JPH0517797Y2 (US06373033-20020416-M00071.png) 1993-05-12

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