JP7844403B2 - センサ、センサシステム及び電子装置 - Google Patents

センサ、センサシステム及び電子装置

Info

Publication number
JP7844403B2
JP7844403B2 JP2023139067A JP2023139067A JP7844403B2 JP 7844403 B2 JP7844403 B2 JP 7844403B2 JP 2023139067 A JP2023139067 A JP 2023139067A JP 2023139067 A JP2023139067 A JP 2023139067A JP 7844403 B2 JP7844403 B2 JP 7844403B2
Authority
JP
Japan
Prior art keywords
region
width
opposing
annular portion
radial direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2023139067A
Other languages
English (en)
Japanese (ja)
Other versions
JP2025033378A5 (https=
JP2025033378A (ja
Inventor
大騎 小野
秀明 村瀬
史登 宮崎
泰 冨澤
桂 増西
健悟 内田
悦治 小川
史隆 石橋
純平 小川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP2023139067A priority Critical patent/JP7844403B2/ja
Priority to EP24178198.8A priority patent/EP4516723B1/en
Priority to US18/731,984 priority patent/US20250076047A1/en
Publication of JP2025033378A publication Critical patent/JP2025033378A/ja
Publication of JP2025033378A5 publication Critical patent/JP2025033378A5/ja
Application granted granted Critical
Publication of JP7844403B2 publication Critical patent/JP7844403B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/004—Angular deflection
    • B81B3/0045—Improve properties related to angular swinging, e.g. control resonance frequency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional [2D] vibrators, e.g. ring-shaped vibrators
    • G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional [2D] vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/0242—Gyroscopes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/04—Electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/056—Rotation in a plane parallel to the substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Pressure Sensors (AREA)
  • Gyroscopes (AREA)
JP2023139067A 2023-08-29 2023-08-29 センサ、センサシステム及び電子装置 Active JP7844403B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2023139067A JP7844403B2 (ja) 2023-08-29 2023-08-29 センサ、センサシステム及び電子装置
EP24178198.8A EP4516723B1 (en) 2023-08-29 2024-05-27 SENSOR, SENSOR SYSTEM AND ELECTRONIC DEVICE
US18/731,984 US20250076047A1 (en) 2023-08-29 2024-06-03 Sensor, sensor system, and electronic device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2023139067A JP7844403B2 (ja) 2023-08-29 2023-08-29 センサ、センサシステム及び電子装置

Publications (3)

Publication Number Publication Date
JP2025033378A JP2025033378A (ja) 2025-03-13
JP2025033378A5 JP2025033378A5 (https=) 2025-07-30
JP7844403B2 true JP7844403B2 (ja) 2026-04-13

Family

ID=91276895

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023139067A Active JP7844403B2 (ja) 2023-08-29 2023-08-29 センサ、センサシステム及び電子装置

Country Status (3)

Country Link
US (1) US20250076047A1 (https=)
EP (1) EP4516723B1 (https=)
JP (1) JP7844403B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7844404B2 (ja) * 2023-08-29 2026-04-13 株式会社東芝 センサ、センサシステム及び電子装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005535889A (ja) 2002-08-12 2005-11-24 ザ・ボーイング・カンパニー 内部径方向検知およびアクチュエーションを備える分離型平面ジャイロスコープ
JP2013253958A (ja) 2012-05-08 2013-12-19 Mitsubishi Precision Co Ltd バイアス補正機能を備えた振動型ジャイロ
US20150168146A1 (en) 2013-12-13 2015-06-18 Sensors In Motion Planar accelerometer with internal radial sensing and actuation
JP2022162641A (ja) 2021-04-13 2022-10-25 株式会社東芝 センサ及び電子装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7493814B2 (en) * 2006-12-22 2009-02-24 The Boeing Company Vibratory gyroscope with parasitic mode damping
CN104976995B (zh) * 2015-08-07 2018-05-25 中国人民解放军国防科学技术大学 变谐振环壁厚的嵌套环式mems振动陀螺

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005535889A (ja) 2002-08-12 2005-11-24 ザ・ボーイング・カンパニー 内部径方向検知およびアクチュエーションを備える分離型平面ジャイロスコープ
JP2013253958A (ja) 2012-05-08 2013-12-19 Mitsubishi Precision Co Ltd バイアス補正機能を備えた振動型ジャイロ
US20150168146A1 (en) 2013-12-13 2015-06-18 Sensors In Motion Planar accelerometer with internal radial sensing and actuation
JP2022162641A (ja) 2021-04-13 2022-10-25 株式会社東芝 センサ及び電子装置

Also Published As

Publication number Publication date
EP4516723A1 (en) 2025-03-05
EP4516723B1 (en) 2025-12-31
US20250076047A1 (en) 2025-03-06
JP2025033378A (ja) 2025-03-13

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