JP7530103B2 - Soft Actuator - Google Patents

Soft Actuator Download PDF

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JP7530103B2
JP7530103B2 JP2021029297A JP2021029297A JP7530103B2 JP 7530103 B2 JP7530103 B2 JP 7530103B2 JP 2021029297 A JP2021029297 A JP 2021029297A JP 2021029297 A JP2021029297 A JP 2021029297A JP 7530103 B2 JP7530103 B2 JP 7530103B2
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創太 清水
北斗 栗原
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Description

本発明は、ソフトアクチュエータに関するものである。 The present invention relates to a soft actuator.

近年、ロボティクス分野における遠隔操縦技術の需要が高まっており、例えば、特許文献１に示すような配管内移動装置や、特許文献２に示すような管内移動装置など、管内で構造体を遠隔操作によって移動させる様々な移動メカニズムが考えられている。 In recent years, there has been an increasing demand for remote control technology in the field of robotics, and various moving mechanisms have been devised for remotely moving structures within pipes, such as the in-pipe moving device shown in Patent Document 1 and the in-pipe moving device shown in Patent Document 2.

特許第６７１６８２４号公報Patent No. 6716824 特開２０２０－１３４７１４号公報JP 2020-134714 A

しかしながら、特許文献１や特許文献２では、いずれも車輪などを備えた移動装置（可動子）を、比較的、物理的強度が高い管状体（固定子）の筒内で移動させる構成であり、例えば、軟質なチューブ体の中空内で移動装置を移動させることは難しい。このため、移動装置である可動子を簡易な構成とし、物理的強度が高い管状体だけでなく、物理的強度が低い軟質なチューブ体など、種々の筒状体内で可動子を自由に移動させたり、或いは、単なる平面状のシート状体などでも可動子を自由に移動させることができる新たな移動メカニズムの開発が望まれている。 However, in both Patent Document 1 and Patent Document 2, a moving device (moving element) equipped with wheels or the like is configured to move within a tubular body (stator) that has a relatively high physical strength, and it is difficult to move the moving device within the hollow space of a soft tube body, for example. For this reason, there is a need to develop a new moving mechanism that has a simple configuration for the moving element (moving device) and can move the moving element freely within various cylindrical bodies, such as not only tubular bodies with high physical strength but also soft tube bodies with low physical strength, or can move the moving element freely even on a simple flat sheet-like body.

本発明は、上記事情に鑑みてなされたものであり、簡易な構成で、様々な固定子に対して可動子を自由に移動させることができるソフトアクチュエータを提供することを目的とする。 The present invention was made in consideration of the above circumstances, and aims to provide a soft actuator with a simple configuration that can freely move a movable element relative to various stators.

本発明のソフトアクチュエータは、電流に基づいて異なる極性に変更可能な極性可変素子が行列状に配置された固定子と、前記固定子と対向配置された曲折可能な可変素子を有し、前記可変素子の面に、極性が異なる磁極部が交互に配置された可動子と、を有し、前記可動子は、前記固定子における前記極性可変素子の極性の切り替えに応じて、前記可変素子が、前記固定子の面に接触及び非接触を繰り返して前記固定子の面に沿って移動し、前記固定子の面に沿って前記可動子を移動させるための基本構成となる、前記極性可変素子と前記磁極部の行列の数が異なる。 The soft actuator of the present invention has a stator in which polarity variable elements that can be changed to different polarities based on current are arranged in a matrix, and a mover having a bendable variable element arranged opposite the stator and having magnetic pole parts of different polarities arranged alternately on the surface of the variable element, and the mover has a basic configuration in which the variable element moves along the surface of the stator by repeatedly coming into and out of contact with the surface of the stator in response to switching of the polarity of the polarity variable element in the stator, and the number of rows and columns of the polarity variable elements and the magnetic pole parts are different.

本発明によれば、車輪や駆動装置などを可動子に設けることがなく、その分、簡易な構成とし得、固定子に極性可変素子を設けることで、様々な固定子に対して可動子を自由に移動させることができる。 According to the present invention, there is no need to provide wheels or a drive unit to the mover, and therefore the structure can be simplified. By providing a polarity variable element to the stator, the mover can be freely moved relative to various stators.

実施形態に係るソフトアクチュエータの全体構成を示す概略図である。1 is a schematic diagram showing an overall configuration of a soft actuator according to an embodiment. 実施形態に係る固定子及び可動子の構成を示す概略図である。FIG. 2 is a schematic diagram showing the configuration of a stator and a mover according to the embodiment. 軸方向に並んだ磁極部間の所定の可変部が交互に伸長及び短縮したときの可動子を示す概略図である。1 is a schematic diagram showing a mover when a predetermined variable portion between magnetic pole portions arranged in the axial direction is alternately expanded and contracted. FIG. 可動子が軸方向に伸縮したときの構成を示す概略図である。4A and 4B are schematic diagrams showing a configuration when a mover expands and contracts in an axial direction. 可動子が径方向に伸縮したときの構成を示す概略図である。10A and 10B are schematic diagrams showing a configuration when a mover expands and contracts in a radial direction. 固定子の極性可変素子の極性を変えて可動子を変形させたときの様子を示す概略図である。10 is a schematic diagram showing a state in which the polarity of the polarity variable element of the stator is changed to deform the mover. FIG. 並進動作第１パターン１、並進動作第１パターン２及び並進動作第１パターン３の状態を説明するための概略図である。1A to 1C are schematic diagrams for explaining states of a first translational motion pattern 1, a first translational motion pattern 2, and a first translational motion pattern 3. 並進動作第１パターン４及び並進動作第１パターン５の状態を説明するための概略図である。11 is a schematic diagram for explaining the states of a first translational movement pattern 4 and a first translational movement pattern 5. FIG. 並進動作第２パターン１、並進動作第２パターン２及び並進動作第２パターン３の状態を説明するための概略図である。11A to 11C are schematic diagrams for explaining states of a second translational motion pattern 1, a second translational motion pattern 2, and a second translational motion pattern 3. 並進動作第２パターン４、並進動作第２パターン５及び並進動作第２パターン６の状態を説明するための概略図である。13 is a schematic diagram for explaining states of a second translational motion pattern 4, a second translational motion pattern 5, and a second translational motion pattern 6. FIG. 並進動作第２パターン７、並進動作第２パターン８及び並進動作第２パターン９の状態を説明するための概略図である。11 is a schematic diagram for explaining the states of a second translational motion pattern 7, a second translational motion pattern 8, and a second translational motion pattern 9. FIG. 並進動作第３パターン１、並進動作第３パターン２及び並進動作第３パターン３の状態を説明するための概略図である。13 is a schematic diagram for explaining states of a third translational motion pattern 1, a third translational motion pattern 2, and a third translational motion pattern 3. FIG. 並進動作第３パターン４、並進動作第３パターン５及び並進動作第３パターン６の状態を説明するための概略図である。13 is a schematic diagram for explaining states of a third translational motion pattern 4, a third translational motion pattern 5, and a third translational motion pattern 6. FIG. 並進動作第３パターン７、並進動作第３パターン８及び並進動作第３パターン９の状態を説明するための概略図である。13 is a schematic diagram for explaining states of a third translational motion pattern 7, a third translational motion pattern 8, and a third translational motion pattern 9. FIG. 回転動作第１パターン１、回転動作第１パターン２及び回転動作第１パターン３の状態を説明するための概略図である。11A to 11C are schematic diagrams for explaining states of a first rotational operation pattern 1, a first rotational operation pattern 2, and a first rotational operation pattern 3. 回転動作第１パターン４及び回転動作第１パターン５の状態を説明するための概略図である。11A to 11C are schematic diagrams for explaining the states of a first rotational operation pattern 4 and a first rotational operation pattern 5. 回転動作第２パターン１、回転動作第２パターン２及び回転動作第２パターン３の状態を説明するための概略図である。11A to 11C are schematic diagrams for explaining states of second rotational operation pattern 1, second rotational operation pattern 2, and second rotational operation pattern 3. 回転動作第２パターン４、回転動作第２パターン５及び回転動作第２パターン６の状態を説明するための概略図である。13 is a schematic diagram for explaining the states of second rotational operation pattern 4, second rotational operation pattern 5, and second rotational operation pattern 6. FIG. 回転動作第２パターン７、回転動作第２パターン８及び回転動作第２パターン９の状態を説明するための概略図である。13 is a schematic diagram for explaining the states of second rotational operation pattern 7, second rotational operation pattern 8, and second rotational operation pattern 9. FIG. 回転動作第３パターン１、回転動作第３パターン２及び回転動作第３パターン３の状態を説明するための概略図である。11A to 11C are schematic diagrams for explaining states of a third rotational operation pattern 1, a third rotational operation pattern 2, and a third rotational operation pattern 3. 回転動作第３パターン４、回転動作第３パターン５及び回転動作第３パターン６の状態を説明するための概略図である。13A to 13C are schematic diagrams for explaining states of a third rotational operation pattern 4, a third rotational operation pattern 5, and a third rotational operation pattern 6. 回転動作第３パターン７、回転動作第３パターン８及び回転動作第３パターン９の状態を説明するための概略図である。13A to 13C are schematic diagrams for explaining the states of a third rotational operation pattern 7, a third rotational operation pattern 8, and a third rotational operation pattern 9. 並進回転動作第１パターン１、並進回転動作第１パターン２及び並進回転動作第１パターン３の状態を説明するための概略図である。11A to 11C are schematic diagrams for explaining states of a first translational-rotational motion pattern 1, a first translational-rotational motion pattern 2, and a first translational-rotational motion pattern 3. 並進回転動作第１パターン４及び並進回転動作第１パターン５の状態を説明するための概略図である。11A and 11B are schematic diagrams for explaining the states of a first translational-rotational motion pattern 4 and a first translational-rotational motion pattern 5. FIG. 並進回転動作第２パターン１、並進回転動作第２パターン２及び並進回転動作第２パターン３の状態を説明するための概略図である。13A to 13C are schematic diagrams for explaining states of a second translational-rotational motion pattern 1, a second translational-rotational motion pattern 2, and a second translational-rotational motion pattern 3. 並進回転動作第２パターン４、並進回転動作第２パターン５及び並進回転動作第２パターン６の状態を説明するための概略図である。13 is a schematic diagram for explaining the states of a second translational-rotational motion pattern 4, a second translational-rotational motion pattern 5, and a second translational-rotational motion pattern 6. FIG. 並進回転動作第２パターン７、並進回転動作第２パターン８及び並進回転動作第２パターン９の状態を説明するための概略図である。13 is a schematic diagram for explaining the states of a second translational-rotational motion pattern 7, a second translational-rotational motion pattern 8, and a second translational-rotational motion pattern 9. FIG. 並進回転動作第３パターン１、並進回転動作第３パターン２及び並進回転動作第３パターン３の状態を説明するための概略図である。13A to 13C are schematic diagrams for explaining states of a third translational-rotational motion pattern 1, a third translational-rotational motion pattern 2, and a third translational-rotational motion pattern 3. 並進回転動作第３パターン４、並進回転動作第３パターン５及び並進回転動作第３パターン６の状態を説明するための概略図である。13A to 13C are schematic diagrams for explaining states of a third translational-rotational motion pattern 4, a third translational-rotational motion pattern 5, and a third translational-rotational motion pattern 6. 並進回転動作第３パターン７、並進回転動作第３パターン８及び並進回転動作第３パターン９の状態を説明するための概略図である。13A to 13C are schematic diagrams for explaining states of a third translational-rotational motion pattern 7, a third translational-rotational motion pattern 8, and a third translational-rotational motion pattern 9. 並進回転動作第４パターン１、並進回転動作第４パターン２及び並進回転動作第４パターン３の状態を説明するための概略図である。13A to 13C are schematic diagrams for explaining states of a fourth translational-rotational motion pattern 1, a fourth translational-rotational motion pattern 2, and a fourth translational-rotational motion pattern 3. 並進回転動作第４パターン４、並進回転動作第４パターン５及び並進回転動作第４パターン６の状態を説明するための概略図である。13A to 13C are schematic diagrams for explaining states of a fourth translational-rotational motion pattern 4, a fourth translational-rotational motion pattern 5, and a fourth translational-rotational motion pattern 6. 並進回転動作第４パターン７、並進回転動作第４パターン８及び並進回転動作第４パターン９の状態を説明するための概略図である。13A to 13C are schematic diagrams for explaining states of a fourth translational-rotational motion pattern 7, a fourth translational-rotational motion pattern 8, and a fourth translational-rotational motion pattern 9. 並進回転動作第５パターン４、並進回転動作第５パターン５及び並進回転動作第５パターン６の状態を説明するための概略図である。13A to 13C are schematic diagrams for explaining the states of a fifth translational-rotational motion pattern 4, a fifth translational-rotational motion pattern 5, and a fifth translational-rotational motion pattern 6. 並進回転動作第５パターン７、並進回転動作第５パターン８及び並進回転動作第５パターン９の状態を説明するための概略図である。13A to 13C are schematic diagrams for explaining the states of a fifth translational-rotational motion pattern 7, a fifth translational-rotational motion pattern 8, and a fifth translational-rotational motion pattern 9. 並進回転動作第６パターン１、並進回転動作第６パターン２及び並進回転動作第６パターン３の状態を説明するための概略図である。13A to 13C are schematic diagrams for explaining states of a sixth translational-rotational motion pattern 1, a sixth translational-rotational motion pattern 2, and a sixth translational-rotational motion pattern 3. 並進回転動作第６パターン４、並進回転動作第６パターン５及び並進回転動作第６パターン６の状態を説明するための概略図である。13A to 13C are schematic diagrams for explaining states of a sixth translational-rotational motion pattern 4, a sixth translational-rotational motion pattern 5, and a sixth translational-rotational motion pattern 6. 並進回転動作第６パターン７、並進回転動作第６パターン８及び並進回転動作第６パターン９の状態を説明するための概略図である。13A to 13C are schematic diagrams for explaining states of a sixth translational-rotational motion pattern 7, a sixth translational-rotational motion pattern 8, and a sixth translational-rotational motion pattern 9. 並進回転動作第６パターン１０、並進回転動作第６パターン１１及び並進回転動作第６パターン１２の状態を説明するための概略図である。13 is a schematic diagram for explaining the states of a sixth translational-rotational motion pattern 10, a sixth translational-rotational motion pattern 11, and a sixth translational-rotational motion pattern 12. FIG. 並進回転動作第６パターン１３の状態を説明するための概略図である。FIG. 13 is a schematic diagram for explaining a state of a sixth translational-rotational movement pattern 13. 他の実施形態に係るソフトアクチュエータの全体構成を示す概略図である。FIG. 13 is a schematic diagram showing an overall configuration of a soft actuator according to another embodiment.

以下図面について本発明の一実施の形態を詳述する。以下の説明において、同一の構成要素には同一の符号を付し、重複する説明は省略する。 An embodiment of the present invention will be described in detail below with reference to the drawings. In the following description, the same components are given the same reference numerals and duplicate descriptions will be omitted.

（１）本実施形態に係るソフトアクチュエータの概略
図１及び図２Ａに示すように、本実施形態に係るソフトアクチュエータ１は、筒状の固定子２と、固定子２の筒内空間に配置される筒状の可動子３と、固定子２に接続された駆動部４と、を有する。ソフトアクチュエータ１は、固定子２の中心軸ＡＸ１と可動子３の中心軸ＡＸ２とが同軸上に配置されており、可動子３が固定子２の筒内空間を移動する。 1 and 2A , a soft actuator 1 according to this embodiment has a cylindrical stator 2, a cylindrical mover 3 disposed in the cylindrical space of the stator 2, and a driving unit 4 connected to the stator 2. In the soft actuator 1, a central axis AX1 of the stator 2 and a central axis AX2 of the mover 3 are disposed coaxially, and the mover 3 moves in the cylindrical space of the stator 2.

この場合、ソフトアクチュエータ１は、固定子２に設けた複数の極性可変素子２２に駆動部４からそれぞれ電流（励磁電流）が供給されることで、固定子２の表面におけるＮ極及びＳ極の極性パターンを極性可変素子２２によって変え、固定子２の筒内空間に配置された、磁極部３２を有する可動子３を、磁力によって変形させる。これにより、ソフトアクチュエータ１は、可動子３の外周面の所定位置が所定の周期で固定子２の内周面に接触及び非接触を繰り返して可動子３が尺取虫状に動作し、固定子２の筒内空間を可動子３が所定方向に移動する。 In this case, the soft actuator 1 changes the polarity pattern of the north and south poles on the surface of the stator 2 by the polarity variable elements 22 when a current (excitation current) is supplied from the drive unit 4 to each of the multiple polarity variable elements 22 provided on the stator 2, and the mover 3 having magnetic pole parts 32 arranged in the cylindrical space of the stator 2 is deformed by magnetic force. As a result, the soft actuator 1 causes a predetermined position on the outer circumferential surface of the mover 3 to repeatedly come into contact with and not come into contact with the inner circumferential surface of the stator 2 at a predetermined period, causing the mover 3 to operate like an inchworm, and the mover 3 moves in a predetermined direction within the cylindrical space of the stator 2.

固定子２は、例えば、ゴム等のような柔軟性のあるソフトな材料により形成された筒状体の固定子本体２１を有し、固定子本体２１の周面に、複数の極性可変素子２２が行列状に配置されている。極性可変素子２２は、例えば、励磁コイルなどでなり、駆動部４から所定の電流が供給され、Ｎ極素子２２ｎ又はＳ極素子２２ｓとなるよう励磁される。 The stator 2 has a cylindrical stator body 21 made of a flexible soft material such as rubber, and a plurality of polarity variable elements 22 are arranged in a matrix on the circumferential surface of the stator body 21. The polarity variable elements 22 are, for example, excitation coils, and are excited to become N pole elements 22n or S pole elements 22s when a predetermined current is supplied from the drive unit 4.

可動子３は、例えば、ゴムのような弾性部材や布や紐のような非弾性部材による薄膜、シート状部材などの軟質な材料により形成された、筒状の可変素子３１を有しており、可変素子３１の直径が固定子２の直径よりも小さく、固定子２の筒内空間に収容可能な構成を有する。なお、本実施形態では、主として、布などの柔軟な非弾性部材により可変素子３１を形成し、後述する磁極部３２間の距離が伸長及び短縮する（すなわち、隣接する磁極部３２が遠ざかり及び近づく）可変素子３１を適用した例について以下説明する。 The mover 3 has a cylindrical variable element 31 formed from a soft material such as a thin film or sheet-like material made of an elastic material such as rubber or a non-elastic material such as cloth or string, and the diameter of the variable element 31 is smaller than the diameter of the stator 2, so that it can be accommodated in the cylindrical space of the stator 2. Note that in this embodiment, the variable element 31 is mainly formed from a soft non-elastic material such as cloth, and an example in which the distance between the magnetic pole parts 32 described below expands and contracts (i.e., adjacent magnetic pole parts 32 move away and towards each other) is applied will be described below.

可変素子３１の周面には、チェッカーボード・パターンで、極性が異なる磁極部（以下、Ｎ極の磁極部をＮ極部３３ｎと称し、Ｓ極の磁極部をＳ極部３４ｓと称する）３２が交互に配置されている。なお、Ｎ極部３３ｎ及びＳ極部３４ｓは、例えば、永久磁石であり、例えば、シート状の永久磁石を可変素子３１の表面に貼着したり、又は、粉末状にした永久磁石を可変素子３１に混合するなどの手法により、可変素子３１に設けられ得る。 Magnetic poles 32 of different polarities (hereinafter, the magnetic poles of the north pole are referred to as the north pole parts 33n and the magnetic poles of the south poles are referred to as the south pole parts 34s) are alternately arranged in a checkerboard pattern on the circumferential surface of the variable element 31. The north pole parts 33n and the south pole parts 34s are, for example, permanent magnets, and can be provided on the variable element 31 by, for example, adhering a sheet-like permanent magnet to the surface of the variable element 31 or mixing a powdered permanent magnet into the variable element 31.

なお、本実施形態における、固定子２の極性可変素子２２と可動子３の磁極部３２の一例としては、例えば、四辺状に形成されているが、本発明はこれに限らず、円形状や五角形等の多角形状に形成してもよい。また、これら極性可変素子２２と磁極部３２との大きさは、同一の大きさに形成されていることが望ましい。ここで、極性可変素子２２と磁極部３２との大きさが同一とは、完全に同じである場合の他、極性可変素子２２の極性変化により磁極部３２を移動させることに鑑みて許容できる誤差程度（例えば、極性可変素子２２と磁極部３２の大きさの違いが±２５％以内）に大きさがずれた場合も含み得る。ただし、極性可変素子２２で発生する磁力の強さや、磁極部３２の磁力の強さによっても、極性可変素子２２の磁力により磁極部３２を移動させる際に与える影響が異なってくるため、必ずしも極性可変素子２２と磁極部３２との大きさが同一である必要はなく、後述する「（２）並進動作」、「（３）回転動作」及び「（４）並進回転動作」が実現できるのであれば、極性可変素子２２と磁極部３２との大きさや形状は特に限定されるものではない。 In this embodiment, the polarity variable element 22 of the stator 2 and the magnetic pole portion 32 of the movable element 3 are formed, for example, in a quadrilateral shape, but the present invention is not limited to this, and they may be formed in a polygonal shape such as a circle or a pentagon. It is also desirable that the polarity variable element 22 and the magnetic pole portion 32 are formed to be the same size. Here, the polarity variable element 22 and the magnetic pole portion 32 being the same size may include a case where they are completely the same, as well as a case where the polarity variable element 22 and the magnetic pole portion 32 are deviated in size by an allowable error level (for example, the difference in size between the polarity variable element 22 and the magnetic pole portion 32 is within ±25%) in consideration of the movement of the magnetic pole portion 32 by the polarity change of the polarity variable element 22. However, the effect of the magnetic force of the polarity variable element 22 when moving the magnetic pole portion 32 varies depending on the strength of the magnetic force generated by the polarity variable element 22 and the strength of the magnetic force of the magnetic pole portion 32. Therefore, the polarity variable element 22 and the magnetic pole portion 32 do not necessarily need to be the same size. As long as the "(2) translational motion," "(3) rotational motion," and "(4) translational rotational motion" described below can be realized, the size and shape of the polarity variable element 22 and the magnetic pole portion 32 are not particularly limited.

また、本実施形態に係る可動子３の可変素子３１は、図２Ａに示すように、Ｎ極部３３ｎとＳ極部３４ｓとの間に柔軟な可変部３５をそれぞれ有しており、Ｎ極部３３ｎ及びＳ極部３４ｓが設けられていない可変部３５の領域が曲折可能に構成されている。なお、可変素子３１を弾性部材とした場合には、可変部３５が伸縮可能に構成される。 As shown in FIG. 2A, the variable element 31 of the mover 3 according to this embodiment has flexible variable parts 35 between the N-pole part 33n and the S-pole part 34s, and the area of the variable part 35 where the N-pole part 33n and the S-pole part 34s are not provided is configured to be bendable. When the variable element 31 is made of an elastic material, the variable part 35 is configured to be expandable and contractible.

図２Ｂは、軸方向に並んだ磁極部３２間の所定の可変部３５が交互に伸長及び短縮したときの可動子３を示す概略図である。可動子３は、例えば、並進動作時（後述する）、周方向Ｃ１に並んだ磁極部３２毎に、それぞれ軸方向に沿って磁極部３２の間の可変部３５が伸長及び短縮することで尺取虫状に動作し、固定子２の内部空間を移動可能に構成されている。 Figure 2B is a schematic diagram showing the mover 3 when certain variable parts 35 between the magnetic pole parts 32 aligned in the axial direction are alternately expanded and contracted. For example, during translational motion (described later), the mover 3 is configured to move in the internal space of the stator 2 by expanding and contracting the variable parts 35 between the magnetic pole parts 32 along the axial direction for each of the magnetic pole parts 32 aligned in the circumferential direction C1, thereby moving like an inchworm.

ここで、図３は、可変素子３１を弾性部材とした場合に、可動子３が軸方向Ｘ１に伸長したときの構成を示す概略図である。例えば、可動子３においてＮ極部３３ｎ及びＳ極部３４ｓのいずれにも、固定子２から磁力を受けていないとき、図３の上段に示すように、Ｎ極部３３ｎ及びＳ極部３４ｓの間にある可変部３５は、所定の自然長を有する。 Here, FIG. 3 is a schematic diagram showing the configuration when the mover 3 is expanded in the axial direction X1 when the variable element 31 is an elastic member. For example, when neither the N-pole portion 33n nor the S-pole portion 34s of the mover 3 receives magnetic force from the stator 2, as shown in the upper part of FIG. 3, the variable portion 35 between the N-pole portion 33n and the S-pole portion 34s has a predetermined natural length.

可動子３は、例えば、固定子２のＳ極素子２２ｓからの磁力によりＮ極部３３ｎが当該Ｓ極素子２２ｓに引き寄せられた状態になると、当該Ｎ極部３３ｎがＳ極素子２２ｓの位置に仮固定される。この状態のまま、例えば、可動子３のＳ極部３４ｓから軸方向Ｘ１に所定距離離れた、固定子２の極性可変素子２２の極性がＮ極素子２２ｎになると、可動子３のＳ極部３３ｓが磁力により当該Ｎ極素子２２ｎに引き寄せられる。これにより、図３の下段に示すように、可動子３は、Ｎ極部３３ｎが固定子２のＳ極素子２２ｓに仮固定されていることから、Ｎ極部３３ｎとＳ極部３４ｓとの間の一方の可変部３５が伸長し、当該Ｓ極部３４ｓと隣接する他方の可変部３５が短縮する。これにより、可動子３は、Ｓ極部３４ｓが固定子２のＮ極素子２２ｎの位置にまで到達して、Ｓ極部３４ｓがＮ極素子２２ｎに仮固定される。 When the N-pole portion 33n of the mover 3 is attracted to the S-pole element 22s of the stator 2 by the magnetic force from the S-pole element 22s of the stator 2, the N-pole portion 33n is temporarily fixed to the position of the S-pole element 22s. In this state, for example, when the polarity of the polarity variable element 22 of the stator 2, which is a predetermined distance away from the S-pole portion 34s of the mover 3 in the axial direction X1, becomes the N-pole element 22n, the S-pole portion 33s of the mover 3 is attracted to the N-pole element 22n by the magnetic force. As a result, as shown in the lower part of Figure 3, since the N-pole portion 33n of the mover 3 is temporarily fixed to the S-pole element 22s of the stator 2, one variable portion 35 between the N-pole portion 33n and the S-pole portion 34s expands, and the other variable portion 35 adjacent to the S-pole portion 34s shortens. As a result, the south pole portion 34s of the mover 3 reaches the position of the north pole element 22n of the stator 2, and the south pole portion 34s is temporarily fixed to the north pole element 22n.

このように可変素子３１を弾性部材とした場合、可動子３では、可変部３５が伸長することで、可変部３５が自然長に戻ろうとする弾性力が働き、軸方向Ｘ１に沿って推進力が生じる。例えば、可動子３のＮ極部３３ｎを仮固定している固定子２のＳ極素子２２ｓが、Ｎ極素子２２ｎに切り替わることで、可動子３は、磁力によるＮ極部３３ｎの仮固定が解放され、伸長していた可変部３５が短縮して、当該Ｎ極部３３ｎがＳ極部３４ｓへと移動する。 When the variable element 31 is an elastic member in this way, as the variable portion 35 of the mover 3 expands, an elastic force acts on the variable portion 35 to return it to its natural length, generating a propulsive force along the axial direction X1. For example, when the S-pole element 22s of the stator 2, which temporarily fixes the N-pole portion 33n of the mover 3, switches to the N-pole element 22n, the temporary fixation of the N-pole portion 33n by the magnetic force of the mover 3 is released, the expanded variable portion 35 contracts, and the N-pole portion 33n moves to the S-pole portion 34s.

なお、可変素子３１を非弾性部材とした場合には、例えば、可動子３が軸方向Ｘ１に移動する際、Ｓ極部３４ｓと隣接する一方の、たるんだ可変部３５が軸方向Ｘ１に向けて伸長し、かつ、当該Ｓ極部３４ｓと隣接する一方の可変部３５がたるんで、当該Ｓ極部３４ｓの位置が自由に可変する。これにより、当該Ｓ極部３４ｓが固定子２のＮ極素子２２ｎの位置にまで到達し、Ｓ極部３４ｓがＮ極素子２２ｎに仮固定される。このように、可変素子３１が非弾性部材であってもＮ極部３３ｎ及びＳ極部３４ｓの間にある可変部３５が伸長及び短縮し、これらＮ極部３３ｎ及びＳ極部３４ｓの位置を軸方向Ｘ１において変化させることができる。 When the variable element 31 is an inelastic member, for example, when the mover 3 moves in the axial direction X1, one of the slack variable parts 35 adjacent to the S-pole portion 34s expands toward the axial direction X1, and one of the variable parts 35 adjacent to the S-pole portion 34s slackens, allowing the position of the S-pole portion 34s to freely change. As a result, the S-pole portion 34s reaches the position of the N-pole element 22n of the stator 2, and the S-pole portion 34s is temporarily fixed to the N-pole element 22n. In this way, even if the variable element 31 is an inelastic member, the variable part 35 between the N-pole portion 33n and the S-pole portion 34s expands and contracts, allowing the positions of the N-pole portion 33n and the S-pole portion 34s to change in the axial direction X1.

図４は、可動子３の周方向Ｃ１を直線的に展開した図であり、可変素子３１を弾性部材とした場合に、可動子３のＳ極部３４ｓが周方向Ｃ１にずれながら径方向Ｚ１に移動したときの構成を示す概略図である。可動子３は、例えば、Ｓ極部３４ｓと周方向Ｃ１にずれて対向配置された、固定子２の極性可変素子２２（図示せず）の極性が、Ｎ極素子２２ｎに切り替わると、Ｎ極素子２２ｎからの磁力によりＳ極部３４ｓが周方向Ｃ１にずれながら当該Ｎ極素子２２ｎに引き寄せられる。このとき、可動子３は、図４の点線で示すように、Ｓ極部３４の一方に隣接する可変部３５が伸長し、当該Ｓ極部３４ｓと隣接する他方の可変部３５が短縮して、当該Ｓ極部３４ｓが固定子２のＮ極素子２２ｎに引き寄せられ、Ｓ極部３４ｓがＮ極素子２２ｎに仮固定される。なお、図４では、可動子３のＮ極部３３ｎも、固定子２のＳ極素子２２ｓにより径方向Ｚ０に引き寄せられた状態を示しているが、可動子３のＳ極部３４ｓと同様に、周方向Ｃ１にずれながら径方向Ｚ０に移動し得る。 Figure 4 is a diagram showing the movable member 3 linearly developed in the circumferential direction C1, and is a schematic diagram showing the configuration when the S-pole portion 34s of the movable member 3 moves in the radial direction Z1 while shifting in the circumferential direction C1 when the variable element 31 is an elastic member. When the polarity of the polarity variable element 22 (not shown) of the stator 2, which is arranged opposite the S-pole portion 34s while shifting in the circumferential direction C1, is switched to the N-pole element 22n, the S-pole portion 34s is attracted to the N-pole element 22n while shifting in the circumferential direction C1 due to the magnetic force from the N-pole element 22n. At this time, as shown by the dotted line in Figure 4, the variable portion 35 adjacent to one side of the S-pole portion 34 of the movable member 3 expands, and the other variable portion 35 adjacent to the S-pole portion 34s shortens, so that the S-pole portion 34s is attracted to the N-pole element 22n of the stator 2, and the S-pole portion 34s is temporarily fixed to the N-pole element 22n. In addition, in FIG. 4, the N-pole portion 33n of the mover 3 is shown in a state where it is attracted in the radial direction Z0 by the S-pole element 22s of the stator 2, but like the S-pole portion 34s of the mover 3, it can move in the radial direction Z0 while shifting in the circumferential direction C1.

なお、可変素子３１を非弾性部材とした場合には、例えば、可動子３が周方向Ｃ１にずれながら径方向Ｚ１に移動する際、Ｓ極部３４ｓと隣接する一方の可変部３５が伸長し、かつ、当該Ｓ極部３４ｓと隣接する他方の可変部３５がたるんで、当該Ｓ極部３４ｓの位置が自由に可変する。これにより、当該Ｓ極部３４ｓが、当該Ｓ極部３４ｓの斜め方向に位置する、固定子２のＮ極素子２２ｎの位置にまで到達し、Ｓ極部３４ｓがＮ極素子２２ｎに仮固定される。 When the variable element 31 is an inelastic member, for example, when the mover 3 moves in the radial direction Z1 while shifting in the circumferential direction C1, one of the variable parts 35 adjacent to the S-pole portion 34s expands, and the other variable part 35 adjacent to the S-pole portion 34s sags, allowing the position of the S-pole portion 34s to freely change. As a result, the S-pole portion 34s reaches the position of the N-pole element 22n of the stator 2, which is located diagonally from the S-pole portion 34s, and the S-pole portion 34s is temporarily fixed to the N-pole element 22n.

次に、固定子２の極性可変素子２２の極性を変えて可動子３を変形させたときの様子を、図５を用いて説明する。なお、図５では、説明を簡単にするために、一例として、可動子３の周面において対角線上に４つの磁極部３２を設け、固定子２の周面において対角線上に６つの極性可変素子２２を設けた構成について以下説明する。可動子３の周面には、磁極部３２として、Ｓ極部３４ｓａ，３４ｓｃが対向する位置に設けられ、Ｎ極部３３ｎｂ，３３ｎｄが対向する位置に設けられており、Ｓ極部３４ｓａ、Ｎ極部３３ｎｂ、Ｓ極部３４ｓｃ、Ｎ極部３３ｎｄというように極性を交互に変えて磁極部３２が配置されている。 Next, the state when the mover 3 is deformed by changing the polarity of the polarity variable element 22 of the stator 2 will be described with reference to FIG. 5. In FIG. 5, for ease of explanation, an example will be described in which four magnetic pole portions 32 are provided diagonally on the circumferential surface of the mover 3, and six polarity variable elements 22 are provided diagonally on the circumferential surface of the stator 2. On the circumferential surface of the mover 3, S pole portions 34sa and 34sc are provided in opposing positions as magnetic pole portions 32, and N pole portions 33nb and 33nd are provided in opposing positions, and the magnetic pole portions 32 are arranged with alternating polarities, such as S pole portion 34sa, N pole portion 33nb, S pole portion 34sc, and N pole portion 33nd.

図５の５Ａ及び５Ｂは、後述する、「（３）回転動作」において説明する２相励磁の回転動作時における所定タイミングでの可動子３の状態を示す。なお、２相励磁の回転動作時における固定子２の極性可変素子２２の極性パターンの変化については「（３）回転動作」にて詳細に説明する。 Figures 5A and 5B show the state of the mover 3 at a given timing during the two-phase excitation rotational operation described in "(3) Rotational Operation" below. The change in the polarity pattern of the polarity variable element 22 of the stator 2 during the two-phase excitation rotational operation will be described in detail in "(3) Rotational Operation".

この場合、駆動部４は、固定子２に設けた６つの極性可変素子２２に配線を介して接続されているが、図５では構成を簡単にするため、駆動部４と各極性可変素子２２を接続する各配線は省略している。 In this case, the drive unit 4 is connected to the six polarity variable elements 22 provided on the stator 2 via wiring, but in Figure 5, to simplify the configuration, the wiring connecting the drive unit 4 and each polarity variable element 22 is omitted.

図５の５Ａは、駆動部４からの電流を基に、例えば、固定子２の６つの極性可変素子２２のうち、最上部の極性可変素子２２をＮ極素子２２ｎａとし、右上部の極性可変素子２２をＳ極素子２２ｓｂとし、右下部の極性可変素子２２を無極素子２２ｃとし、最下部の極性可変素子２２をＮ極素子２２ｎｄとし、左下部の極性可変素子２２をＳ極素子２２ｓｅとし、左上部の極性可変素子２２を無極素子２２ｆとした場合を示す。 Figure 5A shows a case where, for example, based on the current from the drive unit 4, of the six polarity variable elements 22 of the stator 2, the topmost polarity variable element 22 is an N-pole element 22na, the top right polarity variable element 22 is an S-pole element 22sb, the bottom right polarity variable element 22 is a non-pole element 22c, the bottommost polarity variable element 22 is an N-pole element 22nd, the bottom left polarity variable element 22 is an S-pole element 22se, and the top left polarity variable element 22 is a non-pole element 22f.

この場合、可動子３は、例えば、固定子２の隣接する最上部のＮ極素子２２ｎａ及び右上部のＳ極素子２２ｓｂにそれぞれＳ極部３４ｓａ及びＮ極部３３ｎｂが引き寄せられる。これにより、可動子３は、Ｓ極部３４ｓａ及びＮ極部３３ｎｂが近づき、Ｓ極部３４ｓａ及びＮ極部３３ｎｂ間の可変部３５が短縮する。また、可動子３は、右下部の無極素子２２ｃにはＮ極部３３ｎｂ及びＳ極部３４ｓｃが引き寄せられず、無極素子２２ｃの周方向に隣接する最下部のＮ極素子２２ｎｄにＳ極部３４ｓｃが引き寄せられる。これにより、可動子３は、Ｎ極部３３ｎｂ及びＳ極部３４ｓｃが遠ざかり、Ｎ極部３３ｎｂ及びＳ極部３４ｓｃ間の可変部３５が伸長する。 In this case, for example, the S pole portion 34sa and the N pole portion 33nb of the mover 3 are attracted to the adjacent N pole element 22na at the top of the stator 2 and the S pole element 22sb at the top right, respectively. As a result, the S pole portion 34sa and the N pole portion 33nb of the mover 3 approach each other, and the variable portion 35 between the S pole portion 34sa and the N pole portion 33nb is shortened. Also, the N pole portion 33nb and the S pole portion 34sc of the mover 3 are not attracted to the non-pole element 22c at the bottom right, and the S pole portion 34sc is attracted to the bottom N pole element 22nd adjacent to the non-pole element 22c in the circumferential direction. As a result, the N pole portion 33nb and the S pole portion 34sc of the mover 3 move away from each other, and the variable portion 35 between the N pole portion 33nb and the S pole portion 34sc is extended.

同様に、可動子３は、固定子２の隣接する最下部のＮ極素子２２ｎｄ及び左下部のＳ極素子２２ｓｅにそれぞれＳ極部３４ｓｃ及びＮ極部３３ｎｄが引き寄せられ、Ｓ極部３４ｓｃ及びＮ極部３３ｎｄ間の可変部３５が短縮する。また、可動子３は、左上部の無極素子２２ｆにはＮ極部３３ｎｄ及びＳ極部３４ｓａが引き寄せられず、無極素子２２ｆの周方向に隣接する最上部のＮ極素子２２ｎａにＳ極部３４ｓａが引き寄せられることにより、Ｎ極部３３ｎｄ及びＳ極部３４ｓａ間の可変部３５が伸長する。 Similarly, the S pole portion 34sc and the N pole portion 33nd of the mover 3 are attracted to the adjacent bottom N pole element 22nd and bottom left S pole element 22se of the stator 2, respectively, and the variable portion 35 between the S pole portion 34sc and the N pole portion 33nd is shortened. Also, the N pole portion 33nd and the S pole portion 34sa of the mover 3 are not attracted to the non-pole element 22f at the top left, and the S pole portion 34sa is attracted to the top N pole element 22na adjacent to the non-pole element 22f in the circumferential direction, so that the variable portion 35 between the N pole portion 33nd and the S pole portion 34sa is extended.

また、図５の５Ｂは、駆動部４からの電流を基に固定子２の極性可変素子２２の極性を変え、例えば、固定子２の極性可変素子２２の極性が、図５の５Ａの状態から時計回り方向に１つずれている状態のときの一例である。具体的には、最上部の極性可変素子２２を無極素子２２ａとし、右上部の極性可変素子２２をＮ極素子２２ｎｂとし、右下部の極性可変素子２２をＳ極素子２２ｓｃとし、最下部の極性可変素子２２を無極素子２２ｄとし、左下部の極性可変素子２２をＮ極素子２２ｎｅとし、左上部の極性可変素子２２をＳ極素子２２ｓｆとしたときの固定子２の構成を示す。 5B of FIG. 5 shows an example of a state in which the polarity of the polarity variable element 22 of the stator 2 is changed based on the current from the drive unit 4, for example, the polarity of the polarity variable element 22 of the stator 2 is shifted by one in the clockwise direction from the state of 5A of FIG. 5. Specifically, the configuration of the stator 2 is shown when the topmost polarity variable element 22 is a non-pole element 22a, the polarity variable element 22 in the upper right part is an N-pole element 22nb, the polarity variable element 22 in the lower right part is an S-pole element 22sc, the polarity variable element 22 in the lowermost part is a non-pole element 22d, the polarity variable element 22 in the lower left part is an N-pole element 22ne, and the polarity variable element 22 in the upper left part is an S-pole element 22sf.

ソフトアクチュエータ１では、固定子２における各極性可変素子２２の極性を所定順序及び所定タイミングで変えてゆくことで、図５の５Ａ及び５Ｂに示すように、可動子３のＳ極部３４ｓａ，３４ｓｃ及びＮ極部３３ｎｂ，３３ｎｄを回転させることができる。具体的には、固定子２の極性可変素子２２の極性を所定順序で変えてゆくことで、図５の５Ａに示すように、固定子２の最上部に位置していた可動子３のＳ極部３４ｓａを、図５の５Ｂに示すように、固定子２の右上部に回転により移動させることができ、図５の５Ａに示すように、固定子２の右上部に位置していた可動子３のＮ極部３３ｎｂを、図５の５Ｂに示すように、固定子２の右下部に回転して移動させることができる。同様に、図５の５Ａに示すように、固定子２の最下部に位置していた可動子３のＳ極部３４ｓｃを、図５の５Ｂに示すように、固定子２の左下部に回転により移動させることができ、図５の５Ａに示すように、固定子２の左下部に位置していた可動子３のＮ極部３３ｎｄを、図５の５Ｂに示すように、固定子２の左上部に回転して移動させることができる。 In the soft actuator 1, the polarity of each polarity variable element 22 in the stator 2 is changed in a predetermined order and at a predetermined timing, so that the S pole portion 34sa, 34sc and the N pole portion 33nb, 33nd of the mover 3 can be rotated as shown in 5A and 5B of FIG. 5. Specifically, by changing the polarity of the polarity variable element 22 of the stator 2 in a predetermined order, the S pole portion 34sa of the mover 3 located at the top of the stator 2 as shown in 5A of FIG. 5 can be rotated and moved to the upper right part of the stator 2 as shown in 5B of FIG. 5, and the N pole portion 33nb of the mover 3 located at the upper right part of the stator 2 as shown in 5A of FIG. 5 can be rotated and moved to the lower right part of the stator 2 as shown in 5B of FIG. 5. Similarly, as shown in FIG. 5A, the south pole portion 34sc of the mover 3, which was located at the bottom of the stator 2, can be moved by rotation to the bottom left of the stator 2, as shown in FIG. 5B, and the north pole portion 33nd of the mover 3, which was located at the bottom left of the stator 2, as shown in FIG. 5A, can be moved by rotation to the top left of the stator 2, as shown in FIG. 5B.

ソフトアクチュエータ１は、例えば、可動子３のＳ極部３４ｓａ、Ｎ極部３３ｎｂ、Ｓ極部３４ｓｃ、Ｎ極部３３ｎｄが周方向に移動することにより、Ｓ極部３４ｓａ及びＮ極部３３ｎｂ間は、Ｎ極部３３ｎｂ及びＳ極部３４ｓｃ間等の隣接する磁極部３２間の各可変部３５が変形し、磁極部３２間の距離がそれぞれ個別に伸長又は短縮することで、可動子３の所定位置が径方向に伸長又は収縮する。 In the soft actuator 1, for example, when the S pole portion 34sa, the N pole portion 33nb, the S pole portion 34sc, and the N pole portion 33nd of the mover 3 move in the circumferential direction, the variable portions 35 between adjacent magnetic pole portions 32, such as between the S pole portion 34sa and the N pole portion 33nb and between the N pole portion 33nb and the S pole portion 34sc, are deformed, and the distance between the magnetic pole portions 32 is individually expanded or contracted, so that a predetermined position of the mover 3 expands or contracts in the radial direction.

このようにして、ソフトアクチュエータ１は、駆動部４からの電流を基に、固定子２の極性可変素子２２の極性パターンを変えることで、可動子３の外周面を固定子２の内周面に接触させたり、或いは、非接触とさせたりし、可動子３の外形を自由に変形させることができる。そして、ソフトアクチュエータ１では、このような可動子３の外周面が固定子２の内周面に接触する箇所を、軸方向Ｘ１に向けて順番にずらしたり、周方向Ｃ１に向けて順番にずらしたり、或いは、軸方向Ｘ１及び周方向Ｃ１に対して傾斜した斜め方向に向けて順番にずらしてゆくことで、所望の方向に可動子３を尺取虫状に動作させ、固定子２の筒内空間で可動子３を移動させることができる。 In this way, the soft actuator 1 can freely change the external shape of the mover 3 by changing the polarity pattern of the polarity variable element 22 of the stator 2 based on the current from the drive unit 4, thereby bringing the outer circumferential surface of the mover 3 into contact with or out of contact with the inner circumferential surface of the stator 2. In addition, in the soft actuator 1, the points at which the outer circumferential surface of the mover 3 comes into contact with the inner circumferential surface of the stator 2 can be shifted in sequence in the axial direction X1, in sequence in the circumferential direction C1, or in sequence in an oblique direction inclined relative to the axial direction X1 and the circumferential direction C1, thereby operating the mover 3 like an inchworm in the desired direction and moving the mover 3 in the cylindrical space of the stator 2.

（２）並進動作
以上のようにしてソフトアクチュエータ１は、固定子２の周面に行列状に配置された極性可変素子２２の極性パターンを制御することで、固定子２の筒内空間に設けた可動子３の外形を所望の形状に変形させてゆき、固定子２の筒内空間で軸方向Ｘ１に沿って可動子３を移動させることができる。以下、固定子２の筒内空間において軸方向Ｘ１に沿って移動する可動子３の並進動作について説明する。 (2) Translational Action As described above, the soft actuator 1 controls the polarity pattern of the polarity variable elements 22 arranged in a matrix on the circumferential surface of the stator 2, thereby deforming the outer shape of the mover 3 provided in the cylindrical space of the stator 2 into a desired shape, and can move the mover 3 along the axial direction X1 in the cylindrical space of the stator 2. Hereinafter, the translational action of the mover 3 moving along the axial direction X1 in the cylindrical space of the stator 2 will be described.

（２－１）並進動作第１パターン
図６及び図７は、固定子２の筒内空間において軸方向Ｘ１に沿って移動する可動子３の並進動作の第１パターン（並進動作第１パターン）を説明するための概略図である。図６及び図７では、固定子２において極性可変素子２２が行列状に配置された円筒形状の固定子本体２１を平面状に展開し、その一部領域を示した概略図を「固定子磁極配列」として図示している。また、図６及び図７では、可動子３において磁極部３２が行列状に配置された円筒形状の可変素子３１を平面状に展開し、その一部領域を示した概略図を「可動子磁極配列」として図示している。 (2-1) First Translational Movement Pattern Figures 6 and 7 are schematic diagrams for explaining a first translational movement pattern (first translational movement pattern) of the mover 3 moving along the axial direction X1 in the cylindrical space of the stator 2. In Figures 6 and 7, the cylindrical stator body 21 in which the polarity variable elements 22 are arranged in a matrix in the stator 2 is developed in a plane, and a schematic diagram showing a partial area thereof is illustrated as a "stator magnetic pole arrangement." In addition, in Figures 6 and 7, the cylindrical variable element 31 in which the magnetic pole parts 32 are arranged in a matrix in the mover 3 is developed in a plane, and a schematic diagram showing a partial area thereof is illustrated as a "mover magnetic pole arrangement."

ここでは、可動子磁極配列において、周方向Ｃ１に並んだＳ極部３４ｓ及びＮ極部３３ｎの対を第１領域ＭＲ１の磁極部３２とし、この第１領域ＭＲ１と軸方向Ｘ１に隣接し、かつ周方向Ｃ１に並んだＮ極部３３ｎ及びＳ極部３４ｓの対を第２領域ＭＲ２の磁極部３２と称し、これら第１領域ＭＲ１の磁極部３２（以下、単に第１領域ＭＲ１と称する）と、第２領域ＭＲ２の磁極部３２（以下、単に第２領域ＭＲ２と称する）とに着目して、２行２列に配置された４つの磁極部３２を軸方向Ｘ１に移動させる並進動作第１パターンについて説明する。 Here, in the mover magnetic pole arrangement, the pair of S pole portion 34s and N pole portion 33n aligned in the circumferential direction C1 is referred to as the magnetic pole portion 32 of the first region MR1, and the pair of N pole portion 33n and S pole portion 34s adjacent to this first region MR1 in the axial direction X1 and aligned in the circumferential direction C1 is referred to as the magnetic pole portion 32 of the second region MR2. Focusing on the magnetic pole portion 32 of the first region MR1 (hereinafter simply referred to as the first region MR1) and the magnetic pole portion 32 of the second region MR2 (hereinafter simply referred to as the second region MR2), a first translational motion pattern in which four magnetic pole portions 32 arranged in two rows and two columns are moved in the axial direction X1 will be described.

また、固定子磁極配列では、可動子３の第１領域ＭＲ１及び第２領域ＭＲ２(２行２列に配置された磁極部３２）の並進動作第１パターンを実現する極性可変素子２２が配置された領域（図中、固定子磁極配列において横点線間の領域）を注目領域ＥＲ１とし、以下、この注目領域ＥＲ１に着目して並進動作第１パターン時における極性パターンの変化について説明する。 In addition, in the stator magnetic pole arrangement, the area in which the polarity variable elements 22 that realize the first translational motion pattern of the first region MR1 and second region MR2 (magnetic pole parts 32 arranged in two rows and two columns) of the mover 3 are arranged (the area between the horizontal dotted lines in the stator magnetic pole arrangement in the figure) is set as the attention area ER1, and below, the change in the polarity pattern during the first translational motion pattern will be explained with a focus on this attention area ER1.

なお、固定子磁極配列の注目領域ＥＲ１は、３行２列に極性可変素子２２が配置された構成を基本構成とし、１行１列目の極性可変素子２２を極性可変素子Ｓ１１、１行２列目の極性可変素子２２を極性可変素子Ｓ１２、２行１列目の極性可変素子２２を極性可変素子Ｓ２１、２行２列目の極性可変素子２２を極性可変素子Ｓ２２、３行１列目の極性可変素子２２を極性可変素子Ｓ３１、３行２列目の極性可変素子２２を極性可変素子Ｓ３２として説明する。 The focus area ER1 of the stator pole arrangement has a basic configuration in which the polarity variable elements 22 are arranged in 3 rows and 2 columns, and the polarity variable element 22 in the 1st row and 1st column will be described as polarity variable element S11 , the polarity variable element 22 in the 1st row and 2nd column as polarity variable element S12 , the polarity variable element 22 in the 2nd row and 1st column as polarity variable element S21 , the polarity variable element 22 in the 2nd row and 2nd column as polarity variable element S22 , the polarity variable element 22 in the 3rd row and 1st column as polarity variable element S31 , and the polarity variable element 22 in the 3rd row and 2nd column as polarity variable element S32 .

並進動作第１パターンでは、チェッカーボード・パターン状に極性が異なる磁極部３２が２行２列に配置された４つの磁極部３２を軸方向Ｘ１に移動させる際の注目領域ＥＲ１（３行２列に配置した極性可変素子２２）での励磁方式が、当該注目領域ＥＲ１の極性可変素子２２のうち、移動方向(軸方向Ｘ１)に並ぶ所定の第１相と第２相と第３相のうちの２つの相だけを常に同時に励磁する２相励磁方式となっている。なお、ここでは、可動子３の動作説明を簡単にするために、２相励磁方式の並進動作第１パターンについて説明するが、本発明はこれに限らない。並進動作第１パターンでは、Ｎを２以上の正の数とした場合、Ｎ行Ｎ列に配置された磁極部３２を軸方向Ｘ１に移動させる際の基本構成（注目領域ＥＲ１であり、(Ｎ+１)行Ｎ列に極性可変素子２２を配置した構成）での励磁方式はＮ相励磁方式となる。 In the first translational motion pattern, the excitation method in the attention area ER1 (polarity variable elements 22 arranged in 3 rows and 2 columns) when moving four magnetic pole parts 32 arranged in 2 rows and 2 columns with different polarities in a checkerboard pattern in the axial direction X1 is a two-phase excitation method in which only two of the predetermined first phase, second phase, and third phase aligned in the moving direction (axial direction X1) of the polarity variable elements 22 in the attention area ER1 are always excited simultaneously. Note that here, in order to simplify the explanation of the operation of the mover 3, the first translational motion pattern of the two-phase excitation method will be described, but the present invention is not limited to this. In the first translational motion pattern, when N is a positive number equal to or greater than 2, the excitation method in the basic configuration (attention area ER1, configuration in which polarity variable elements 22 are arranged in (N+1) rows and N columns) when moving the magnetic pole parts 32 arranged in N rows and N columns in the axial direction X1 is the N-phase excitation method.

始めに、図６の並進動作第１パターン１に示すように、可動子３の第１領域ＭＲ１の移動方向に位置する、固定子２の１行目の極性可変素子Ｓ１１，Ｓ１２を、Ｎ極及びＳ極のいずれの極性も与えない状態（以下、無極性と称する）とする。そして、可動子３の第１領域ＭＲ１と対向する、固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２を、第１領域ＭＲ１と異なる極性として、可動子３の第１領域ＭＲ１を磁力により固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２に引き寄せる。これにより、可動子３の第１領域ＭＲ１部分を膨張（拡径）させ、可動子３の第１領域ＭＲ１を固定子２の内周面に接触させる（第１極性変更）。 First, as shown in the first translational motion pattern 1 in Fig. 6, the polarity variable elements S11 and S12 in the first row of the stator 2, which are located in the moving direction of the first region MR1 of the mover 3, are set to a state in which neither N nor S polarity is given (hereinafter referred to as non-polarity). Then, the polarity variable elements S21 and S22 in the second row of the stator 2, which face the first region MR1 of the mover 3, are set to a polarity different from that of the first region MR1, and the first region MR1 of the mover 3 is attracted to the polarity variable elements S21 and S22 in the second row of the stator 2 by magnetic force. This causes the first region MR1 of the mover 3 to expand (expand in diameter), and the first region MR1 of the mover 3 is brought into contact with the inner circumferential surface of the stator 2 (first polarity change).

なお、本実施形態では、この際、可動子３における第１領域ＭＲ１の移動方向にある隣接領域ＭＲ０の磁極部３２と、可動子３の第１領域ＭＲ１と、の間の可変部３５においてその間の距離が伸長している。なお、可変素子３１が弾性部材である場合には、このとき移動方向側への推進力が生じている。 In this embodiment, the distance between the magnetic pole portion 32 of the adjacent region MR0 in the direction of movement of the first region MR1 of the mover 3 and the first region MR1 of the mover 3 is increased in the variable portion 35 between the adjacent region MR0 and the first region MR1 of the mover 3. If the variable element 31 is an elastic member, a propulsive force is generated in the direction of movement.

また、可動子３の第２領域ＭＲ２と対向する、固定子２の３行目の極性可変素子Ｓ３１，Ｓ３２を、第２領域ＭＲ２と異なる極性として、可動子３の第２領域ＭＲ２を磁力により固定子２の３行目の極性可変素子Ｓ３１，Ｓ３２に引き寄せる。これにより、可動子３の第２領域ＭＲ２部分を膨張（拡径）させ、可動子３の第２領域ＭＲ２を固定子２の内周面に接触させる（第１極性変更）。 Furthermore, the polarity variable elements S31 , S32 in the third row of the stator 2, which face the second region MR2 of the mover 3, are set to a polarity different from that of the second region MR2, and the second region MR2 of the mover 3 is attracted by magnetic force to the polarity variable elements S31 , S32 in the third row of the stator 2. This causes the second region MR2 portion of the mover 3 to expand (expand in diameter), and the second region MR2 of the mover 3 is brought into contact with the inner circumferential surface of the stator 2 (first polarity change).

次に、図６の並進動作第１パターン２に示すように、固定子２において極性切り替え１を行い、可動子３の第１領域ＭＲ１と対向する、固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２を、第１領域ＭＲ１と同じ極性とし、磁力により可動子３の第１領域ＭＲ１を固定子２の２列目の極性可変素子Ｓ２１，Ｓ２２から引き離す。これにより、可動子３の第１領域ＭＲ１部分を収縮（縮径）させ、可動子３の第１領域ＭＲ１を固定子２の内周面と非接触にさせる。 6 , polarity switching 1 is performed in the stator 2, the polarity variable elements S21 and S22 in the second row of the stator 2 that face the first region MR1 of the mover 3 are set to the same polarity as the first region MR1, and the first region MR1 of the mover 3 is separated from the polarity variable elements S21 and S22 in the second row of the stator 2 by magnetic force. This causes the first region MR1 of the mover 3 to contract (reduced in diameter), and the first region MR1 of the mover 3 is brought out of contact with the inner circumferential surface of the stator 2.

次に、図６の並進動作第１パターン３に示すように、固定子２において極性切り替え２を行い、固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２を無極性とするとともに、可動子３の第１領域ＭＲ１の移動方向に位置する、固定子２の１行目の極性可変素子Ｓ１１，Ｓ１２を、第１領域ＭＲ１と異なる極性とする。 Next, as shown in the first translational operation pattern 3 in Figure 6, polarity switching 2 is performed on the stator 2, the polarity variable elements S21 , S22 in the second row of the stator 2 are made non-polar, and the polarity variable elements S11 , S12 in the first row of the stator 2, which are located in the movement direction of the first region MR1 of the movable element 3, are made to have a polarity different from that of the first region MR1.

これにより、可動子３の第１領域ＭＲ１は、固定子２の１行目の極性可変素子Ｓ１１，Ｓ１２に引き寄せられる磁力により、固定子２の１行目の極性可変素子Ｓ１１，Ｓ１２に引き寄せられ、軸方向Ｘ１に移動する。なお、可変素子３１が弾性部材である場合には、このとき移動方向側の可変部３５が伸長していたことによる移動方向側への復元力（推進力）によっても、可動子３の第１領域ＭＲ１が軸方向Ｘ１に移動する。これにより、可動子３の第１領域ＭＲ１部分を、固定子２の１行目の極性可変素子Ｓ１１，Ｓ１２部分で膨張（拡径）させて固定子２の内周面に接触させる（第２極性変更）。 As a result, the first region MR1 of the mover 3 is attracted to the polarity variable elements S11 , S12 in the first row of the stator 2 by the magnetic force that attracts them, and moves in the axial direction X1 . If the variable element 31 is an elastic member, the first region MR1 of the mover 3 also moves in the axial direction X1 due to a restoring force (propulsive force) toward the moving direction side caused by the extension of the variable part 35 on the moving direction side at this time. As a result, the first region MR1 portion of the mover 3 expands (expands in diameter) at the polarity variable elements S11 , S12 portion of the first row of the stator 2 and comes into contact with the inner circumferential surface of the stator 2 (second polarity change).

なお、可変素子３１が弾性部材である場合、可動子３では、第１領域ＭＲ１が軸方向Ｘ１に移動することで、第１領域ＭＲ１と第２領域ＭＲ２とが離れ、これら第１領域ＭＲ１と第２領域ＭＲ２との間の可変部３５が、移動方向である軸方向Ｘ１に伸長し、移動方向側への推進力が生じた状態になることが望ましい。 When the variable element 31 is an elastic member, it is desirable that, in the movable member 3, as the first region MR1 moves in the axial direction X1, the first region MR1 and the second region MR2 move apart, and the variable portion 35 between the first region MR1 and the second region MR2 extends in the axial direction X1, which is the direction of movement, generating a propulsive force in the direction of movement.

次に、図７の並進動作第１パターン４に示すように、固定子２において極性切り替え３を行い、固定子２の３行目の極性可変素子Ｓ３１，Ｓ３２を、可動子３の第２領域ＭＲ２と同じ極性とし、可動子３の第２領域ＭＲ２を、固定子２の３行目の極性可変素子Ｓ３１，Ｓ３２から引き離す。これにより、可動子３の第２領域ＭＲ２部分を収縮（縮径）させ、可動子３の第２領域ＭＲ２を固定子２の内周面と非接触にさせる。 7 , polarity switching 3 is performed in the stator 2, the polarity variable elements S31 and S32 in the third row of the stator 2 are set to the same polarity as the second region MR2 of the mover 3, and the second region MR2 of the mover 3 is separated from the polarity variable elements S31 and S32 in the third row of the stator 2. This causes the second region MR2 portion of the mover 3 to contract (reduced in diameter), and the second region MR2 of the mover 3 is brought out of contact with the inner circumferential surface of the stator 2.

次に、図７の並進動作第１パターン５に示すように、固定子２において極性切り替え４を行い、固定子２の３行目の極性可変素子Ｓ３１，Ｓ３２を無極性とし、可動子３の第２領域ＭＲ２の移動方向に位置する、固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２を、第２領域ＭＲ２と異なる極性とする。 Next, as shown in the first translational operation pattern 5 in Figure 7, polarity switching 4 is performed in the stator 2, the polarity variable elements S31 , S32 in the third row of the stator 2 are made non-polar, and the polarity variable elements S21 , S22 in the second row of the stator 2, which are located in the movement direction of the second region MR2 of the movable element 3, are made to have a polarity different from that of the second region MR2.

これにより、可動子３の第２領域ＭＲ２は、固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２に引き寄せられる磁力（可変素子３１が弾性部材である場合には、可動子３の可変部３５が伸長していたことによる移動方向側への復元力も）により、固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２に引き寄せられ、軸方向Ｘ１に移動する。これにより、可動子３の第２領域ＭＲ２部分を、固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２部分で膨張（拡径）させて固定子２の内周面に接触させる（第３極性変更）。 As a result, the second region MR2 of the mover 3 is attracted to the polarity variable elements S21 , S22 in the second row of the stator 2 by a magnetic force (and, if the variable element 31 is an elastic member, a restoring force in the direction of movement due to the extension of the variable part 35 of the mover 3) and moves in the axial direction X1. As a result, the second region MR2 portion of the mover 3 expands (increases in diameter) at the polarity variable elements S21 , S22 in the second row of the stator 2 and comes into contact with the inner circumferential surface of the stator 2 (third polarity change).

このようにして、ソフトアクチュエータ１は、固定子２の注目領域ＥＲ１毎にそれぞれ極性可変素子Ｓ１１，Ｓ１２，Ｓ２１，Ｓ２２，Ｓ３１，Ｓ３２の極性切り替えが行われることで、可動子３の第１領域ＭＲ１を軸方向Ｘ１に沿って移動させて固定子２の面に接触させた後、第２領域ＭＲ２を固定子２の面と非接触にして第１領域ＭＲ１に近づけるように軸方向Ｘ１に沿って移動させ、第２領域ＭＲ２を固定子２の面に接触させる。ソフトアクチュエータ１では、可動子３がこのような尺取虫状の動作を軸方向Ｘ１に沿って繰り返し行うことで、固定子２の面に沿って可動子３を軸方向Ｘ１に移動させてゆくことができる。 In this way, the soft actuator 1 switches the polarity of the polarity variable elements S11 , S12 , S21 , S22 , S31 , and S32 for each region of interest ER1 of the stator 2, and then moves the first region MR1 of the mover 3 along the axial direction X1 to contact the surface of the stator 2, and then moves the second region MR2 along the axial direction X1 so as to approach the first region MR1 without contacting the surface of the stator 2, and brings the second region MR2 into contact with the surface of the stator 2. In the soft actuator 1, the mover 3 repeats such an inchworm-like movement along the axial direction X1, so that the mover 3 can be moved along the surface of the stator 2 in the axial direction X1.

（２－２）並進動作第２パターン
次に、上述した並進動作第１パターンとは異なる、可動子３の並進動作の第２パターン（並進動作第２パターン）について説明する。図８、図９及び図１０は、固定子２の筒内空間において軸方向Ｘ１に移動する可動子３の並進動作第２パターンを説明するための概略図である。なお、固定子磁極配列、可動子磁極配列、注目領域ＥＲ１、極性可変素子Ｓ１１，Ｓ１２，Ｓ２１，Ｓ２２，Ｓ３１，Ｓ３２などについては上述した「（２－１）並進動作第１パターン」と同じであるため、ここではその説明は省略する。 (2-2) Second Translational Movement Pattern Next, a second translational movement pattern (second translational movement pattern) of the mover 3, which is different from the above-mentioned first translational movement pattern, will be described. Figures 8, 9, and 10 are schematic diagrams for explaining the second translational movement pattern of the mover 3 moving in the axial direction X1 in the cylinder space of the stator 2. Note that the stator magnetic pole arrangement, the mover magnetic pole arrangement, the attention area ER1, the polarity variable elements S11 , S12 , S21 , S22 , S31 , S32 , etc. are the same as those in the above-mentioned "(2-1) First Translational Movement Pattern", so that the description thereof will be omitted here.

並進動作第２パターンでは、チェッカーボード・パターン状に極性が異なる磁極部３２が２行２列に配置された４つの磁極部３２を軸方向Ｘ１に移動させる際の注目領域ＥＲ１での励磁方式が、当該注目領域ＥＲ１の極性可変素子２２のうち、移動方向(軸方向Ｘ１)に並ぶ所定の第１相と第２相と第３相のうちの２つの相だけを同時に励磁する２相励磁方式と、当該移動方向に並ぶ所定の第１相と第２相と第３相の３つの相を同時に励磁する３相励磁方式とが繰り返される２－３相励磁方式となっている。なお、ここでは、可動子３の動作説明を簡単にするために、２－３相励磁方式の並進動作第２パターンについて説明するが、本発明はこれに限らない。並進動作第２パターンでは、Ｎを２以上の正の数とした場合、Ｎ行Ｎ列に配置された磁極部３２を軸方向Ｘ１に移動させる際の基本構成（注目領域ＥＲ１であり、(Ｎ+１)行Ｎ列に極性可変素子２２を配置した構成）での励磁方式はＮ－（Ｎ＋１）相励磁方式となる(－は、Ｎ相励磁と（Ｎ+１）相励磁とを繰り返すことを示すハイフンである)。 In the second translational motion pattern, the excitation method in the attention area ER1 when moving four magnetic pole parts 32 arranged in two rows and two columns with different polarities in a checkerboard pattern in the axial direction X1 is a 2-3 phase excitation method in which a 2-phase excitation method is used to simultaneously excite only two of the predetermined first, second, and third phases that are aligned in the movement direction (axial direction X1) of the polarity variable elements 22 in the attention area ER1, and a 3-phase excitation method is used to simultaneously excite three of the predetermined first, second, and third phases that are aligned in the movement direction. Note that, in order to simplify the explanation of the operation of the mover 3, the second translational motion pattern of the 2-3 phase excitation method will be explained here, but the present invention is not limited to this. In the second translational motion pattern, where N is a positive number equal to or greater than 2, the excitation method in the basic configuration (attention area ER1, configuration in which polarity variable elements 22 are arranged in (N+1) rows and N columns) when moving magnetic pole portions 32 arranged in N rows and N columns in the axial direction X1 is the N-(N+1) phase excitation method (- is a hyphen indicating that N-phase excitation and (N+1) phase excitation are repeated).

図８の並進動作第２パターン１は、上述した図６の並進動作第１パターン１と同様の状態であり、固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２を、可動子３の第１領域ＭＲ１と異なる極性とし、固定子２の３行目の極性可変素子Ｓ３１，Ｓ３２を、可動子３の第２領域ＭＲ２と異なる極性として、可動子３の第１領域ＭＲ１及び第２領域ＭＲ２を磁力により膨張（拡径）させ、可動子３の第１領域ＭＲ１及び第２領域ＭＲ２を固定子２の内周面に接触させる（第１極性変更）。 The second translational motion pattern 1 in Figure 8 is in the same state as the first translational motion pattern 1 in Figure 6 described above, where the polarity variable elements S21 , S22 in the second row of the stator 2 are set to a polarity different from that of the first region MR1 of the mover 3, and the polarity variable elements S31 , S32 in the third row of the stator 2 are set to a polarity different from that of the second region MR2 of the mover 3, and the first region MR1 and second region MR2 of the mover 3 are expanded (increased in diameter) by magnetic force, and the first region MR1 and second region MR2 of the mover 3 are brought into contact with the inner surface of the stator 2 (first polarity change).

次に、図８の並進動作第２パターン２に示すように、固定子２において極性切り替え１を行い、可動子３の第１領域ＭＲ１と対向する、固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２を、第１領域ＭＲ１と同じ極性とし、磁力により可動子３の第１領域ＭＲ１を固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２から引き離す。これにより、可動子３の第１領域ＭＲ１部分を収縮（縮径）させ、可動子３の第１領域ＭＲ１を固定子２の内周面と非接触にさせる。 8 , polarity switching 1 is performed in the stator 2, the polarity variable elements S21 and S22 in the second row of the stator 2 that face the first region MR1 of the mover 3 are set to the same polarity as the first region MR1, and the first region MR1 of the mover 3 is separated from the polarity variable elements S21 and S22 in the second row of the stator 2 by magnetic force. This causes the first region MR1 of the mover 3 to contract (reduced in diameter), and the first region MR1 of the mover 3 is brought out of contact with the inner circumferential surface of the stator 2.

次に、図８の並進動作第２パターン３に示すように、固定子２において極性切り替え２を行い、可動子３の第１領域ＭＲ１の移動方向に位置する固定子２の１行目の極性可変素子Ｓ１１，Ｓ１２と、固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２と、の両方を可動子３の第１領域ＭＲ１と異なる極性とする。 Next, as shown in the second translational operation pattern 3 in Figure 8, polarity switching 2 is performed in the stator 2, and both the polarity variable elements S11 , S12 in the first row of the stator 2, which are located in the movement direction of the first region MR1 of the movable element 3, and the polarity variable elements S21 , S22 in the second row of the stator 2 are set to a polarity different from that of the first region MR1 of the movable element 3.

これにより、可動子３の第１領域ＭＲ１は、固定子２の１行目の極性可変素子Ｓ１１，Ｓ１２と、固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２との間に引き寄せられる磁力（可変素子３１が弾性部材の場合には、移動方向側の可変部３５が伸長していたことによる移動方向側への復元力（推進力）も）により、固定子２の１行目の極性可変素子Ｓ１１，Ｓ１２と、固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２とを跨いだ中間領域ＥＲ１０に引き寄せられる。このようにして、可動子３の第１領域ＭＲ１部分を、固定子２の中間領域ＥＲ１０部分まで移動させ、中間領域ＥＲ１０部分で膨張（拡径）させて固定子２の内周面に接触させる（第２極性変更）。 As a result, the first region MR1 of the mover 3 is attracted to an intermediate region ER10 that straddles the polarity variable elements S11 , S12 of the first row of the stator 2 and the polarity variable elements S21 , S22 of the second row of the stator 2 by a magnetic force (if the variable element 31 is an elastic member, a restoring force (propulsive force) in the direction of movement due to the extension of the variable part 35 on the direction of movement side) that is attracted between the polarity variable elements S11 , S12 of the first row of the stator 2 and the polarity variable elements S21 , S22 of the second row of the stator 2. In this way, the first region MR1 portion of the mover 3 is moved to the intermediate region ER10 portion of the stator 2 and expanded (diameter enlarged) in the intermediate region ER10 portion to come into contact with the inner circumferential surface of the stator 2 (second polarity change).

なお、可変素子３１が弾性部材である場合、可動子３では、第１領域ＭＲ１が軸方向Ｘ１に移動した際に、第１領域ＭＲ１と第２領域ＭＲ２との間を離して可変部３５を伸長させ、移動方向側への推進力が生じた状態にすることが望ましい。 When the variable element 31 is an elastic member, it is desirable that in the mover 3, when the first region MR1 moves in the axial direction X1, the first region MR1 and the second region MR2 are separated to extend the variable portion 35, generating a propulsive force in the direction of movement.

次に、図９の並進動作第２パターン４に示すように、固定子２において極性切り替え３を行い、固定子２の３行目の極性可変素子Ｓ３１，Ｓ３２を、可動子３の第２領域ＭＲ２と同じ極性とし、可動子３の第２領域ＭＲ２を、磁力によって固定子２の３行目の極性可変素子Ｓ３１，Ｓ３２から引き離す。これにより、可動子３の第２領域ＭＲ２部分を収縮（縮径）させ、可動子３の第２領域ＭＲ２を固定子２の内周面と非接触にさせる。 9 , polarity switching 3 is performed in the stator 2, the polarity variable elements S31 and S32 in the third row of the stator 2 are set to the same polarity as the second region MR2 of the mover 3, and the second region MR2 of the mover 3 is separated from the polarity variable elements S31 and S32 in the third row of the stator 2 by magnetic force. This causes the second region MR2 of the mover 3 to contract (reduced in diameter), and the second region MR2 of the mover 3 is brought out of contact with the inner circumferential surface of the stator 2.

次に、図９の並進動作第２パターン５に示すように、固定子２において極性切り替え４を行い、固定子２の３行目の極性可変素子Ｓ３１，Ｓ３２を無極性とし、可動子３の第２領域ＭＲ２の移動方向に位置する、固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２を、第２領域ＭＲ２と異なる極性とする。 Next, as shown in the second translational operation pattern 5 of Figure 9, polarity switching 4 is performed in the stator 2, the polarity variable elements S31 , S32 in the third row of the stator 2 are made non-polar, and the polarity variable elements S21 , S22 in the second row of the stator 2, which are located in the movement direction of the second region MR2 of the movable element 3, are made to have a polarity different from that of the second region MR2.

これにより、可動子３の第２領域ＭＲ２は、固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２側に磁力によって引き寄せられる。この際、可動子３では、第１領域ＭＲ１が固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２と一部領域に位置していることから、第２領域ＭＲ２が、固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２と、固定子２の３行目の極性可変素子Ｓ３１，Ｓ３２とを跨いだ中間領域ＥＲ１１に位置する。 As a result, the second region MR2 of the mover 3 is attracted by magnetic force toward the polarity variable elements S21 , S22 of the second row of the stator 2. At this time, in the mover 3, since the first region MR1 is located in a partial region including the polarity variable elements S21 , S22 of the second row of the stator 2, the second region MR2 is located in an intermediate region ER11 that straddles the polarity variable elements S21 , S22 of the second row of the stator 2 and the polarity variable elements S31 , S32 of the third row of the stator 2.

これにより、中間領域ＥＲ１１において、可動子３の第２領域ＭＲ２部分を、固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２の一部領域で膨張（拡径）させて固定子２の内周面に接触させる（第３極性変更）。なお、このとき、可動子３の第１領域ＭＲ１は、極性が同じ、固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２にも位置するが、極性が異なる、固定子２の１行目の極性可変素子Ｓ１１，Ｓ１２に引き寄せられているため、固定子２の内周面と接触した状態を維持する。 As a result, in the intermediate region ER11, the second region MR2 of the mover 3 expands (expands in diameter) in a portion of the polarity variable elements S21 , S22 in the second row of the stator 2 to contact the inner circumferential surface of the stator 2 (third polarity change). Note that at this time, the first region MR1 of the mover 3 is also located in the polarity variable elements S21 , S22 in the second row of the stator 2, which have the same polarity, but is attracted to the polarity variable elements S11 , S12 in the first row of the stator 2, which have different polarity, and therefore maintains a state of contact with the inner circumferential surface of the stator 2.

次に、図９の並進動作第２パターン６に示すように、固定子２において極性切り替え５を行い、可動子３の第１領域ＭＲ１の移動方向に位置する、固定子２の１行目の極性可変素子Ｓ１１，Ｓ１２を、可動子３の第１領域ＭＲ１と同じ極性とする。これにより、可動子３の第１領域ＭＲ１を、固定子２の１行目の極性可変素子Ｓ１１，Ｓ１２から引き離すことで、可動子３の第１領域ＭＲ１部分を収縮（縮径）させ、可動子３の第１領域ＭＲ１を固定子２の内周面と非接触にさせる。 9 , polarity switching 5 is performed in the stator 2, and the polarity variable elements S11, S12 in the first row of the stator 2, which are located in the moving direction of the first region MR1 of the mover 3, are set to the same polarity as the first region MR1 of the mover 3. As a result, the first region MR1 of the mover 3 is separated from the polarity variable elements S11 , S12 in the first row of the stator 2, causing the first region MR1 of the mover 3 to contract (reduced in diameter), and the first region MR1 of the mover 3 is brought out of contact with the inner circumferential surface of the stator 2.

次に、図１０の並進動作第２パターン７に示すように、固定子２において極性切り替え６を行い、固定子２の１行目の極性可変素子Ｓ１１，Ｓ１２を、可動子３の第１領域ＭＲ１と異なる極性とし、固定子２の３行目の極性可変素子Ｓ３１，Ｓ３２を、可動子３の第２領域ＭＲ２と異なる極性とする。 Next, as shown in the second translational operation pattern 7 in Figure 10, polarity switching 6 is performed in the stator 2, and the polarity variable elements S11 , S12 in the first row of the stator 2 are set to a polarity different from that of the first region MR1 of the mover 3, and the polarity variable elements S31 , S32 in the third row of the stator 2 are set to a polarity different from that of the second region MR2 of the mover 3.

これにより、可動子３の第２領域ＭＲ２は、固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２と、３行目の極性可変素子Ｓ３１，Ｓ３２と、を跨いだ中間領域ＥＲ１１で磁力により膨張（拡径）され、固定子２の内周面と接触する。また、可動子３の第１領域ＭＲ１は、磁力（可変素子３１が弾性部材の場合には、伸長していた可変部３５の移動方向側への復元力も）によって、固定子２の１行目の極性可変素子Ｓ１１，Ｓ１２に引き寄せられ、軸方向Ｘ１に移動する。これにより、可動子３の第１領域ＭＲ１部分を、固定子２の１行目の極性可変素子Ｓ１１，Ｓ１２部分で膨張（拡径）させて固定子２の内周面に接触させる。 As a result, the second region MR2 of the mover 3 is expanded (expanded in diameter) by the magnetic force in an intermediate region ER11 that straddles the polarity variable elements S21 , S22 of the second row of the stator 2 and the polarity variable elements S31 , S32 of the third row, and comes into contact with the inner circumferential surface of the stator 2. Also, the first region MR1 of the mover 3 is attracted to the polarity variable elements S11, S12 of the first row of the stator 2 by the magnetic force (and the restoring force of the extended variable part 35 in the moving direction side, if the variable element 31 is an elastic member), and moves in the axial direction X1. As a result, the first region MR1 portion of the mover 3 is expanded (expanded in diameter) in the polarity variable elements S11 , S12 of the first row of the stator 2 , and comes into contact with the inner circumferential surface of the stator 2.

次に、図１０の並進動作第２パターン８に示すように、固定子２において極性切り替え７を行い、固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２と、固定子２の３行目の極性可変素子Ｓ３１，Ｓ３２と、を可動子３の第２領域ＭＲ２と同じ極性とし、可動子３の第２領域ＭＲ２を、固定子２の中間領域ＥＲ１１から引き離す。これにより、可動子３の第２領域ＭＲ２部分を収縮（縮径）させ、可動子３の第２領域ＭＲ２を固定子２の内周面と非接触にさせる。 10 , polarity switching 7 is performed in the stator 2, the polarity variable elements S21 , S22 in the second row of the stator 2 and the polarity variable elements S31, S32 in the third row of the stator 2 are set to the same polarity as the second region MR2 of the mover 3, and the second region MR2 of the mover 3 is separated from the intermediate region ER11 of the stator 2. This causes the second region MR2 portion of the mover 3 to contract (reduced in diameter), and the second region MR2 of the mover 3 is brought out of contact with the inner circumferential surface of the stator 2.

次に、図１０の並進動作第２パターン９に示すように、固定子２において極性切り替え８を行い、固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２を、可動子３の第２領域ＭＲ２と異なる極性とし、固定子２の３行目の極性可変素子Ｓ３１，Ｓ３２を無極性とする。これにより、可動子３の第２領域ＭＲ２は、磁力（可変素子３１が弾性部材の場合には、伸長していた可変部３５の移動方向側への復元力も）によって、固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２に引き寄せられ、軸方向Ｘ１に移動する。このようにして、可動子３の第２領域ＭＲ２部分を、固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２部分まで移動させ、固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２で膨張（拡径）させて固定子２の内周面に接触させる。 Next, as shown in the second translational movement pattern 9 in Fig. 10, polarity switching 8 is performed in the stator 2, the polarity variable elements S21 and S22 in the second row of the stator 2 are made to have a polarity different from that of the second region MR2 of the mover 3, and the polarity variable elements S31 and S32 in the third row of the stator 2 are made to have no polarity. As a result, the second region MR2 of the mover 3 is attracted to the polarity variable elements S21 and S22 in the second row of the stator 2 by a magnetic force (and a restoring force toward the moving direction of the extended variable part 35 when the variable element 31 is an elastic member), and moves in the axial direction X1. In this way, the second region MR2 portion of the mover 3 is moved to the polarity variable elements S21 and S22 portion of the second row of the stator 2, and is expanded (expanded in diameter) by the polarity variable elements S21 and S22 in the second row of the stator 2 to contact the inner peripheral surface of the stator 2.

以上、ソフトアクチュエータ１では、固定子２の注目領域ＥＲ１毎にそれぞれ極性可変素子Ｓ１１，Ｓ１２，Ｓ２１，Ｓ２２，Ｓ３１，Ｓ３２の極性切り替えが行われることで、可動子３の第１領域ＭＲ１を軸方向Ｘ１に沿って移動させて固定子２の面に接触させた後に、第２領域ＭＲ２を固定子２の面と非接触にして第１領域ＭＲ１に近づけるように軸方向Ｘ１に沿って移動させ、第２領域ＭＲ２を固定子２の面に接触させる。これにより、ソフトアクチュエータ１では、可動子３が尺取虫状の動作を繰り返し行うことで、固定子２の面に沿って可動子３を軸方向Ｘ１に移動させてゆくことができる。 As described above, in the soft actuator 1, the polarity of the polarity variable elements S11 , S12 , S21 , S22 , S31 , and S32 is switched for each region of interest ER1 of the stator 2, whereby the first region MR1 of the mover 3 is moved along the axial direction X1 to contact the surface of the stator 2, and then the second region MR2 is moved along the axial direction X1 so as to approach the first region MR1 without contacting the surface of the stator 2, and the second region MR2 is brought into contact with the surface of the stator 2. As a result, in the soft actuator 1, the mover 3 repeats an inchworm-like motion, whereby the mover 3 can be moved in the axial direction X1 along the surface of the stator 2.

また、この並進動作第２パターンでは、可動子３の第１領域ＭＲ１及び第２領域ＭＲ２を軸方向Ｘ１へ移動させる移動量を並進動作第１パターンの半分にすることができる。 In addition, in this second translational motion pattern, the amount of movement of the first region MR1 and the second region MR2 of the mover 3 in the axial direction X1 can be reduced to half that of the first translational motion pattern.

（２－３）並進動作第３パターン
次に、上述した並進動作第１パターン及び並進動作第２パターンとは異なる、可動子３の並進動作の第３パターン（並進動作第３パターン）について説明する。図１１、図１２及び図１３は、固定子２の筒内空間において軸方向Ｘ１に移動する可動子３の並進動作第３パターンを説明するための概略図である。なお、固定子磁極配列、可動子磁極配列、注目領域ＥＲ１、極性可変素子Ｓ１１，Ｓ１２，Ｓ２１，Ｓ２２，Ｓ３１，Ｓ３２などについては上述した「（２－１）並進動作第１パターン」と同じであるため、ここではその説明は省略する。 (2-3) Third Translational Movement Pattern Next, a third translational movement pattern (third translational movement pattern) of the mover 3, which is different from the above-mentioned first and second translational movement patterns, will be described. Figures 11, 12, and 13 are schematic diagrams for explaining the third translational movement pattern of the mover 3 moving in the axial direction X1 in the cylinder space of the stator 2. Note that the stator magnetic pole arrangement, the mover magnetic pole arrangement, the attention area ER1, the polarity variable elements S11 , S12 , S21 , S22 , S31 , and S32 are the same as those in the above-mentioned "(2-1) First Translational Movement Pattern", and therefore will not be described here.

並進動作第３パターンでは、チェッカーボード・パターン状に極性が異なる磁極部３２が２行２列に配置された４つの磁極部３２を軸方向Ｘ１に移動させる際の注目領域ＥＲ１での励磁方式が、当該注目領域ＥＲ１の極性可変素子２２のうち、移動方向(軸方向Ｘ１)に並ぶ所定の第１相と第２相と第３相のうちの２つの相だけを同時に励磁する２相励磁方式と、当該移動方向に並ぶ所定の第１相と第２相と第３相の３つの相を同時に励磁する３相励磁方式とが繰り返される２－３相励磁方式となっている。なお、ここでは、可動子３の動作説明を簡単にするために、２－３相励磁方式の並進動作第３パターンについて説明するが、本発明はこれに限らない。並進動作第３パターンでは、Ｎを２以上の正の数とした場合、Ｎ行Ｎ列に配置された磁極部３２を軸方向Ｘ１に移動させる際の基本構成（注目領域ＥＲ１であり、(Ｎ+１)行Ｎ列に極性可変素子２２を配置した構成）での励磁方式はＮ－（Ｎ＋１）相励磁方式となる(－は、Ｎ相励磁と（Ｎ+１）相励磁とを繰り返すことを示すハイフンである)。 In the third translational motion pattern, the excitation method in the attention area ER1 when moving four magnetic pole parts 32 arranged in two rows and two columns with different polarities in a checkerboard pattern in the axial direction X1 is a 2-3 phase excitation method in which a 2-phase excitation method is used to simultaneously excite only two of the predetermined first, second, and third phases that are aligned in the movement direction (axial direction X1) of the polarity variable elements 22 in the attention area ER1, and a 3-phase excitation method is used to simultaneously excite three of the predetermined first, second, and third phases that are aligned in the movement direction. Note that, in order to simplify the explanation of the operation of the mover 3, the third translational motion pattern of the 2-3 phase excitation method will be explained here, but the present invention is not limited to this. In the third translational motion pattern, where N is a positive number equal to or greater than 2, the excitation method in the basic configuration (attention area ER1, configuration in which polarity variable elements 22 are arranged in (N+1) rows and N columns) when moving magnetic pole portions 32 arranged in N rows and N columns in the axial direction X1 is the N-(N+1) phase excitation method (- is a hyphen indicating that N-phase excitation and (N+1) phase excitation are repeated).

図１１の並進動作第３パターン１は、上述した図６の並進動作第１パターン１と同様の状態であり、固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２を、可動子３の第１領域ＭＲ１と異なる極性とし、固定子２の３行目の極性可変素子Ｓ３１，Ｓ３２を、可動子３の第２領域ＭＲ２と異なる極性として、可動子３の第１領域ＭＲ１及び第２領域ＭＲ２を磁力により膨張（拡径）させ、可動子３の第１領域ＭＲ１及び第２領域ＭＲ２を固定子２の内周面に接触させる（第１極性変更）。 The third translational motion pattern 1 in Figure 11 is in the same state as the first translational motion pattern 1 in Figure 6 described above, where the polarity variable elements S21 , S22 in the second row of the stator 2 are set to a polarity different from that of the first region MR1 of the mover 3, and the polarity variable elements S31 , S32 in the third row of the stator 2 are set to a polarity different from that of the second region MR2 of the mover 3, and the first region MR1 and second region MR2 of the mover 3 are expanded (increased in diameter) by magnetic force, and the first region MR1 and second region MR2 of the mover 3 are brought into contact with the inner surface of the stator 2 (first polarity change).

次に、図１１の並進動作第３パターン２に示すように、固定子２において極性切り替え１を行い、可動子３の第１領域ＭＲ１と対向する、固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２を、第１領域ＭＲ１と同じ極性とし、磁力により可動子３の第１領域ＭＲ１を固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２から引き離す。これにより、可動子３の第１領域ＭＲ１部分を収縮（縮径）させ、可動子３の第１領域ＭＲ１を固定子２の内周面と非接触にさせる。 11 , polarity switching 1 is performed in the stator 2, the polarity variable elements S21 and S22 in the second row of the stator 2 that face the first region MR1 of the mover 3 are set to the same polarity as the first region MR1, and the first region MR1 of the mover 3 is separated from the polarity variable elements S21 and S22 in the second row of the stator 2 by magnetic force. This causes the first region MR1 of the mover 3 to contract (reduced in diameter), and the first region MR1 of the mover 3 is brought out of contact with the inner circumferential surface of the stator 2.

次に、図１１の並進動作第３パターン３に示すように、固定子２において極性切り替え２を行い、可動子３の第１領域ＭＲ１の移動方向に位置する固定子２の１行目の極性可変素子Ｓ１１，Ｓ１２と、固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２と、の両方を可動子３の第１領域ＭＲ１と異なる極性とする。 Next, as shown in the third translational operation pattern 3 in Figure 11, polarity switching 2 is performed in the stator 2, and both the polarity variable elements S11 , S12 in the first row of the stator 2, which are located in the movement direction of the first region MR1 of the movable element 3, and the polarity variable elements S21 , S22 in the second row of the stator 2 are set to a polarity different from that of the first region MR1 of the movable element 3.

これにより、可動子３の第１領域ＭＲ１は、固定子２の１行目の極性可変素子Ｓ１１，Ｓ１２と、固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２との間に引き寄せられる磁力（可変素子３１が弾性部材である場合には、移動方向側の可変部３５が伸長していたことによる移動方向側への復元力（推進力）も）により、固定子２の１行目の極性可変素子Ｓ１１，Ｓ１２と、固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２とを跨いだ中間領域ＥＲ１０に引き寄せられる。このようにして、可動子３の第１領域ＭＲ１部分を、固定子２の中間領域ＥＲ１０部分まで移動させ、中間領域ＥＲ１０部分で膨張（拡径）させて固定子２の内周面に接触させる（第２極性変更）。 As a result, the first region MR1 of the mover 3 is attracted to an intermediate region ER10 that straddles the polarity variable elements S11 , S12 of the first row of the stator 2 and the polarity variable elements S21 , S22 of the second row of the stator 2 by a magnetic force (if the variable element 31 is an elastic member, a restoring force (propulsive force) in the movement direction due to the extension of the variable part 35 on the movement direction side) that is attracted between the polarity variable elements S11 , S12 of the first row of the stator 2 and the polarity variable elements S21 , S22 of the second row of the stator 2. In this way, the first region MR1 portion of the mover 3 is moved to the intermediate region ER10 portion of the stator 2 and expanded (diameter enlarged) in the intermediate region ER10 portion to contact the inner circumferential surface of the stator 2 (second polarity change).

なお、可変素子３１を弾性部材とした場合、可動子３では、第１領域ＭＲ１が軸方向Ｘ１に移動した際に、第１領域ＭＲ１と第２領域ＭＲ２との間を離して可変部３５を伸長させ、移動方向側への推進力が生じた状態になることが望ましい。 When the variable element 31 is an elastic member, it is desirable that when the first region MR1 of the mover 3 moves in the axial direction X1, the first region MR1 and the second region MR2 are separated to extend the variable portion 35, generating a propulsive force in the direction of movement.

次に、図１２の並進動作第３パターン４に示すように、固定子２において極性切り替え３を行い、可動子３の第１領域ＭＲ１の移動方向に位置する固定子２の１行目の極性可変素子Ｓ１１，Ｓ１２と、固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２と、の両方を可動子３の第１領域ＭＲ１と同じ極性とする。 Next, as shown in the third translational operation pattern 4 in Figure 12, polarity switching 3 is performed in the stator 2, and both the polarity variable elements S11 , S12 in the first row of the stator 2, which are located in the movement direction of the first region MR1 of the movable element 3, and the polarity variable elements S21 , S22 in the second row of the stator 2 are set to the same polarity as the first region MR1 of the movable element 3.

これにより、可動子３の第１領域ＭＲ１を、固定子２の中間領域ＥＲ１０から引き離すことで、可動子３の第１領域ＭＲ１部分を収縮（縮径）させ、可動子３の第１領域ＭＲ１を固定子２の内周面と非接触にさせる。 As a result, the first region MR1 of the mover 3 is pulled away from the intermediate region ER10 of the stator 2, causing the first region MR1 portion of the mover 3 to contract (reduced in diameter), and causing the first region MR1 of the mover 3 to be out of contact with the inner surface of the stator 2.

次に、図１２の並進動作第３パターン５に示すように、固定子２において極性切り替え４を行い、可動子３の第１領域ＭＲ１の移動方向に位置する固定子２の１行目の極性可変素子Ｓ１１，Ｓ１２を、可動子３の第１領域ＭＲ１と異なる極性とし、固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２を無極性とする。 Next, as shown in the third translational operation pattern 5 in Figure 12, polarity switching 4 is performed on the stator 2, and the polarity variable elements S11 , S12 in the first row of the stator 2, which are located in the movement direction of the first region MR1 of the mover 3, are set to a polarity different from that of the first region MR1 of the mover 3, and the polarity variable elements S21 , S22 in the second row of the stator 2 are set to non-polar.

これにより、可動子３の第１領域ＭＲ１は、固定子２の１行目の極性可変素子Ｓ１１，Ｓ１２に磁力により引き寄せられ、可動子３の第１領域ＭＲ１部分を、固定子２の１行目の極性可変素子Ｓ１１，Ｓ１２まで移動させ、固定子２の１行目の極性可変素子Ｓ１１，Ｓ１２部分で膨張（拡径）させて固定子２の内周面に接触させる。 As a result, the first region MR1 of the mover 3 is attracted by magnetic force to the polarity variable elements S11 , S12 in the first row of the stator 2, causing the first region MR1 portion of the mover 3 to move to the polarity variable elements S11 , S12 in the first row of the stator 2 and expand (increase in diameter) at the polarity variable elements S11 , S12 portion in the first row of the stator 2 to come into contact with the inner surface of the stator 2.

また、可変素子３１が弾性部材でなる場合には、この際、可動子３の第１領域ＭＲ１と移動方向側に隣接した可変部３５が伸長していることにより生じる、移動方向側への推進力によっても、可動子３の第１領域ＭＲ１部分を、固定子２の１行目の極性可変素子Ｓ１１，Ｓ１２まで移動させる。 In addition, when the variable element 31 is made of an elastic material, the first region MR1 of the movable element 3 is also moved to the polarity variable elements S11, S12 in the first row of the stator 2 by a propulsive force in the direction of movement generated by the extension of the variable part 35 adjacent to the first region MR1 of the movable element 3 on the direction of movement.

次に、図１２の並進動作第３パターン６に示すように、固定子２において極性切り替え５を行い、可動子３の第２領域ＭＲ２が位置している、固定子２の３行目の極性可変素子Ｓ３１，Ｓ３２を、可動子３の第２領域ＭＲ２と同じ極性とし、可動子３の第２領域ＭＲ２を、固定子２の３行目の極性可変素子Ｓ３１，Ｓ３２から引き離す。これにより、可動子３の第２領域ＭＲ２部分を収縮（縮径）させ、可動子３の第２領域ＭＲ２を固定子２の内周面と非接触にさせる。 12 , polarity switching 5 is performed in the stator 2, and the polarity variable elements S31 and S32 in the third row of the stator 2, where the second region MR2 of the mover 3 is located, are set to the same polarity as the second region MR2 of the mover 3, and the second region MR2 of the mover 3 is separated from the polarity variable elements S31 and S32 in the third row of the stator 2. This causes the second region MR2 of the mover 3 to contract (reduced in diameter), and the second region MR2 of the mover 3 is brought out of contact with the inner circumferential surface of the stator 2.

次に、図１３の並進動作第３パターン７に示すように、固定子２において極性切り替え６を行い、可動子３の第２領域ＭＲ２の移動方向に位置する固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２と、固定子２の３行目の極性可変素子Ｓ３１，Ｓ３２と、を可動子３の第２領域ＭＲ２と異なる極性とする。 Next, as shown in the third translational operation pattern 7 in Figure 13, polarity switching 6 is performed in the stator 2, and the polarity variable elements S21 , S22 in the second row of the stator 2, which are located in the movement direction of the second region MR2 of the movable element 3, and the polarity variable elements S31 , S32 in the third row of the stator 2, are set to a polarity different from that of the second region MR2 of the movable element 3.

これにより、可動子３の第２領域ＭＲ２は、固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２と、固定子２の３行目の極性可変素子Ｓ３１，Ｓ３２と、を跨いだ中間領域ＥＲ１１に、磁力により引き寄せられる。可動子３の第２領域ＭＲ２は、固定子２の中間領域ＥＲ１１部分で膨張（拡径）し、固定子２の内周面に接触する（第３極性変更）。 As a result, the second region MR2 of the mover 3 is attracted by magnetic force to an intermediate region ER11 that straddles the polarity variable elements S21 , S22 in the second row of the stator 2 and the polarity variable elements S31 , S32 in the third row of the stator 2. The second region MR2 of the mover 3 expands (expands in diameter) in the intermediate region ER11 of the stator 2 and comes into contact with the inner circumferential surface of the stator 2 (third polarity change).

また、可変素子３１が弾性部材でなる場合には、この際、可動子３は、第１領域ＭＲ１と第２領域ＭＲ２との間の可変部３５が伸長していたことによる移動方向側への復元力（推進力）によっても、固定子２の中間領域ＥＲ１１に第２領域ＭＲ２を引き寄せ、第２領域ＭＲ２を軸方向Ｘ１に移動させる。 In addition, if the variable element 31 is made of an elastic material, the movable element 3 also attracts the second region MR2 to the intermediate region ER11 of the stator 2 due to the restoring force (propulsive force) in the direction of movement caused by the variable portion 35 between the first region MR1 and the second region MR2 being stretched, and moves the second region MR2 in the axial direction X1.

次に、図１３の並進動作第３パターン８に示すように、固定子２において極性切り替え７を行い、固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２と、固定子２の３行目の極性可変素子Ｓ３１，Ｓ３２と、を可動子３の第２領域ＭＲ２と同じ極性とし、可動子３の第２領域ＭＲ２を、固定子２の中間領域ＥＲ１１から引き離す。これにより、可動子３の第２領域ＭＲ２部分を収縮（縮径）させ、可動子３の第２領域ＭＲ２を固定子２の内周面と非接触にさせる。 13 , polarity switching 7 is performed in the stator 2, the polarity variable elements S21 , S22 in the second row of the stator 2 and the polarity variable elements S31, S32 in the third row of the stator 2 are set to the same polarity as the second region MR2 of the mover 3, and the second region MR2 of the mover 3 is separated from the intermediate region ER11 of the stator 2. This causes the second region MR2 portion of the mover 3 to contract (reduced in diameter), and the second region MR2 of the mover 3 is brought out of contact with the inner circumferential surface of the stator 2.

次に、図１３の並進動作第３パターン９に示すように、固定子２において極性切り替え８を行い、固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２を、可動子３の第２領域ＭＲ２と異なる極性とし、固定子２の３行目の極性可変素子Ｓ３１，Ｓ３２を無極性とする。これにより、可動子３の第２領域ＭＲ２は、固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２に磁力により引き寄せられ、軸方向Ｘ１に移動する。 13, polarity switching 8 is performed in the stator 2, so that the polarity variable elements S21 , S22 in the second row of the stator 2 are set to a polarity different from that of the second region MR2 of the mover 3, and the polarity variable elements S31 , S32 in the third row of the stator 2 are set to a non-polarity. As a result, the second region MR2 of the mover 3 is attracted by the magnetic force to the polarity variable elements S21 , S22 in the second row of the stator 2, and moves in the axial direction X1.

また、可変素子３１が弾性部材でなる場合には、この際、可動子３は、第１領域ＭＲ１と第２領域ＭＲ２との間の可変部３５が伸長していたことによる移動方向側への復元力（推進力）によっても、固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２に第２領域ＭＲ２を引き寄せ、第２領域ＭＲ２を軸方向Ｘ１に移動させる。 In addition, when the variable element 31 is made of an elastic material, in this case, the movable member 3 also attracts the second region MR2 to the polarity variable elements S21 , S22 in the second row of the stator 2 due to the restoring force (propulsive force) in the direction of movement caused by the extension of the variable part 35 between the first region MR1 and the second region MR2, and moves the second region MR2 in the axial direction X1.

このようにして、可動子３の第２領域ＭＲ２部分を、固定子２の２行目の極性可変素子Ｓ２１，Ｓ２２部分まで移動させて膨張（拡径）させ、固定子２の内周面に接触させる。 In this manner, the second region MR2 of the mover 3 is moved to the polarity variable elements S 21 and S 22 of the second row of the stator 2 and expanded (increased in diameter) to come into contact with the inner circumferential surface of the stator 2 .

以上、ソフトアクチュエータ１では、固定子２の注目領域ＥＲ１毎にそれぞれ極性可変素子Ｓ１１，Ｓ１２，Ｓ２１，Ｓ２２，Ｓ３１，Ｓ３２の極性切り替えが行われることで、可動子３の第１領域ＭＲ１を軸方向Ｘ１に沿って２段階で移動させて固定子２の面に接触させた後に、第２領域ＭＲ２を固定子２の面と非接触にして第１領域ＭＲ１に近づけるように軸方向Ｘ１に沿って２段階で移動させ、第２領域ＭＲ２を固定子２の面に接触させる。これにより、ソフトアクチュエータ１では、可動子３が尺取虫状の動作を繰り返し行い、固定子２の面に沿って可動子３を軸方向Ｘ１に移動させてゆくことができる。 As described above, in the soft actuator 1, the polarity of the polarity variable elements S11 , S12 , S21 , S22 , S31 , and S32 is switched for each region of interest ER1 of the stator 2, whereby the first region MR1 of the mover 3 is moved in two stages along the axial direction X1 to contact the surface of the stator 2, and then the second region MR2 is moved in two stages along the axial direction X1 so as to approach the first region MR1 without contacting the surface of the stator 2, and the second region MR2 is brought into contact with the surface of the stator 2. As a result, in the soft actuator 1, the mover 3 repeats an inchworm-like motion, and the mover 3 can be moved in the axial direction X1 along the surface of the stator 2.

また、この並進動作第３パターンでは、可動子３の第１領域ＭＲ１を２段階で軸方向Ｘ１へ移動させた後、第２領域ＭＲ２を２段階で軸方向Ｘ１へ移動させ、第１領域ＭＲ１及び第２領域ＭＲ２を段階的に小刻みに移動させてゆくことができる。すなわち、並進動作第３パターンは、上述したように、１ピッチ（１つの極性可変素子２２の領域単位）で伸長と短縮を繰り返す並進動作第１パターンや、ハーフピッチ（１つの極性可変素子２２の半領域単位）で伸長と短縮を繰り返す並進動作第２パターンと異なり、ハーフピッチで２回伸長した後、ハーフピッチで２回短縮する。 In addition, in this third translational motion pattern, the first region MR1 of the movable element 3 is moved in the axial direction X1 in two stages, and then the second region MR2 is moved in the axial direction X1 in two stages, so that the first region MR1 and the second region MR2 can be moved stepwise in small increments. That is, as described above, the third translational motion pattern extends twice by a half pitch and then contracts twice by a half pitch, unlike the first translational motion pattern in which extension and contraction are repeated in one pitch (area unit of one polarity variable element 22) and the second translational motion pattern in which extension and contraction are repeated in half pitches (half area unit of one polarity variable element 22).

さらに、可変素子３１が弾性部材でなる場合、この並進動作第３パターンでは、始めに可動子３の第１領域ＭＲ１を２段階で軸方向Ｘ１へ移動させることから、第１領域ＭＲ１及び第２領域ＭＲ２の間にある可変部３５を一段と伸長させることができるため、当該可変部３５による推進力により第２領域ＭＲ２を軸方向Ｘ１に一段と確実に移動させることができる。 Furthermore, when the variable element 31 is made of an elastic material, in this third translational motion pattern, the first region MR1 of the mover 3 is first moved in the axial direction X1 in two stages, so that the variable part 35 between the first region MR1 and the second region MR2 can be further extended, and the second region MR2 can be moved more reliably in the axial direction X1 by the driving force of the variable part 35.

（３）回転動作
ソフトアクチュエータ１は、固定子２の周面に行列状に配置された極性可変素子２２の極性パターンを制御することで、固定子２の筒内空間に設けた可動子３の外形を所望の形状に変形させてゆき、固定子２の筒内空間で周方向Ｃ１に沿って可動子３を移動させることができる。以下、固定子２の筒内空間において周方向Ｃ１に沿って移動する可動子３の回転動作について説明する。 (3) Rotational Operation The soft actuator 1 controls the polarity pattern of the polarity variable elements 22 arranged in a matrix on the circumferential surface of the stator 2 to deform the outer shape of the mover 3 provided in the cylindrical space of the stator 2 into a desired shape, and can move the mover 3 along the circumferential direction C1 in the cylindrical space of the stator 2. Hereinafter, the rotational operation of the mover 3 moving along the circumferential direction C1 in the cylindrical space of the stator 2 will be described.

（３－１）回転動作第１パターン
図１４及び図１５は、固定子２の筒内空間において周方向Ｃ１に沿って回転移動する可動子３の回転動作の第１パターン（回転動作第１パターン）を説明するための概略図である。図１４及び図１５では、可動子磁極配列において、軸方向Ｘ１に並んだＮ極部３３ｎ及びＳ極部３４ｓの対を第１領域ＭＣ１の磁極部３２とし、この第１領域ＭＣ１と周方向Ｃ１に隣接し、かつ軸方向Ｘ１に並んだＳ極部３４ｓ及びＮ極部３３ｎの対を第２領域ＭＣ２の磁極部３２と称し、これら第１領域ＭＣ１の磁極部３２（以下、単に第１領域ＭＣ１と称する）と、第２領域ＭＣ２の磁極部３２（以下、単に第２領域ＭＣ２と称する）とに着目して、２行２列に配置された４つの磁極部３２を周方向Ｃ１に移動させる回転動作第１パターンについて説明する。 (3-1) First Rotational Operation Pattern Figures 14 and 15 are schematic diagrams for explaining a first pattern (first rotational operation pattern) of the rotational operation of the mover 3 that rotates and moves along the circumferential direction C1 in the cylindrical space of the stator 2. In Figures 14 and 15, in the mover magnetic pole arrangement, a pair of N pole portion 33n and S pole portion 34s aligned in the axial direction X1 is referred to as the magnetic pole portion 32 of the first region MC1, and a pair of S pole portion 34s and N pole portion 33n adjacent to this first region MC1 in the circumferential direction C1 and aligned in the axial direction X1 is referred to as the magnetic pole portion 32 of the second region MC2. Focusing on the magnetic pole portion 32 of the first region MC1 (hereinafter simply referred to as the first region MC1) and the magnetic pole portion 32 of the second region MC2 (hereinafter simply referred to as the second region MC2), the first rotational operation pattern in which four magnetic pole portions 32 arranged in two rows and two columns are moved in the circumferential direction C1 will be described.

また、固定子磁極配列では、可動子３の第１領域ＭＣ１及び第２領域ＭＣ２の回転動作第１パターンを実現する極性可変素子２２が配置された領域（図中、固定子磁極配列において横点線間の領域）を注目領域ＥＲ２とし、以下、この３行３列に極性可変素子２２が配置された注目領域ＥＲ２に着目して回転動作第１パターン時における極性パターンの変化について説明する。 In addition, in the stator magnetic pole arrangement, the area in which the polarity variable elements 22 that realize the first rotational operation pattern of the first region MC1 and second region MC2 of the mover 3 are arranged (the area between the horizontal dotted lines in the stator magnetic pole arrangement in the figure) is designated as the attention area ER2, and below, the change in the polarity pattern during the first rotational operation pattern will be explained by focusing on this attention area ER2 in which the polarity variable elements 22 are arranged in three rows and three columns.

なお、固定子磁極配列の注目領域ＥＲ２は、３行３列に極性可変素子２２が配置された構成とし、移動方向の目標位置を基準として、１行１列目の極性可変素子２２を極性可変素子Ｓ１１、１行２列目の極性可変素子２２を極性可変素子Ｓ１２、１行３列目の極性可変素子２２を極性可変素子Ｓ１３、２行１列目の極性可変素子２２を極性可変素子Ｓ２１、２行２列目の極性可変素子２２を極性可変素子Ｓ２２、２行３列目の極性可変素子２２を極性可変素子Ｓ２３、３行１列目の極性可変素子２２を極性可変素子Ｓ３１、３行２列目の極性可変素子２２を極性可変素子Ｓ３２、３行３列目の極性可変素子２２を極性可変素子Ｓ３３として説明する。 The focus area ER2 of the stator pole arrangement is configured such that the polarity variable elements 22 are arranged in 3 rows and 3 columns, and with respect to the target position in the direction of movement as a reference, the polarity variable element 22 in the 1st row and 1st column will be described as polarity variable element S11 , the polarity variable element 22 in the 1st row and 2nd column will be described as polarity variable element S12 , the polarity variable element 22 in the 1st row and 3rd column will be described as polarity variable element S13 , the polarity variable element 22 in the 2nd row and 1st column will be described as polarity variable element S21 , the polarity variable element 22 in the 2nd row and 2nd column will be described as polarity variable element S22 , the polarity variable element 22 in the 2nd row and 3rd column will be described as polarity variable element S23 , the polarity variable element 22 in the 3rd row and 1st column will be described as polarity variable element S31 , the polarity variable element 22 in the 3rd row and 2nd column will be described as polarity variable element S32 , and the polarity variable element 22 in the 3rd row and 3rd column will be described as polarity variable element S33 .

因みに、３行目の極性可変素子Ｓ３１，Ｓ３２，Ｓ３３は、後述する、並進動作と回転動作を合わせた並進回転動作の説明時に用いるもので、回転動作においては、１行目の極性可変素子Ｓ１１，Ｓ１２，Ｓ１３と、２行目の極性可変素子Ｓ２１，Ｓ２２，Ｓ２３にのみ着目して以下説明する。すなわち、回転動作第１パターンにおいては、２行２列に配置された磁極部３２を周方向Ｃ１に移動させる基本構成は、２行３列の極性可変素子２２が配置された構成が基本構成となる。 Incidentally, the polarity variable elements S31 , S32 , and S33 in the third row are used when explaining a translational rotational operation that combines a translational operation and a rotational operation, which will be described later, and the rotational operation will be explained below by focusing only on the polarity variable elements S11 , S12 , and S13 in the first row and the polarity variable elements S21 , S22 , and S23 in the second row. That is, in the first rotational operation pattern, the basic configuration for moving the magnetic pole portions 32 arranged in two rows and two columns in the circumferential direction C1 is a configuration in which the polarity variable elements 22 are arranged in two rows and three columns.

回転動作第１パターンでは、チェッカーボード・パターン状に極性が異なる磁極部３２が２行２列に配置された４つの磁極部３２を周方向Ｃ１に移動させる際の注目領域ＥＲ２での励磁方式が、当該注目領域ＥＲ２の極性可変素子２２のうち、移動方向(周方向Ｃ１)に並ぶ所定の第１相と第２相と第３相のうちの２つの相だけを常に同時に励磁する２相励磁方式となっている。なお、ここでは、可動子３の動作説明を簡単にするために、２相励磁方式の回転動作第１パターンについて説明するが、本発明はこれに限らない。回転動作第１パターンでは、Ｎを２以上の正の数とした場合、Ｎ行Ｎ列に配置された磁極部３２を周方向Ｃ１に移動させる際の基本構成（Ｎ行（Ｎ+１）列に極性可変素子２２を配置した構成）での励磁方式はＮ相励磁方式となる。 In the first rotational operation pattern, the excitation method in the attention area ER2 when the four magnetic pole parts 32 arranged in two rows and two columns with different polarities in a checkerboard pattern are moved in the circumferential direction C1 is a two-phase excitation method in which only two of the polarity variable elements 22 in the attention area ER2, that is, a first phase, a second phase, and a third phase arranged in the moving direction (circumferential direction C1), are always excited simultaneously. Note that, in order to simplify the explanation of the operation of the mover 3, the first rotational operation pattern of the two-phase excitation method will be described here, but the present invention is not limited to this. In the first rotational operation pattern, when N is a positive number equal to or greater than 2, the excitation method in the basic configuration (the configuration in which the polarity variable elements 22 are arranged in N rows and (N+1) columns) when the magnetic pole parts 32 arranged in N rows and N columns are moved in the circumferential direction C1 is the N-phase excitation method.

始めに、図１４の回転動作第１パターン１に示すように、可動子３の第１領域ＭＣ１の移動方向に位置する、固定子２の１列目の極性可変素子Ｓ１１，Ｓ２１を、無極性とする。そして、可動子３の第１領域ＭＣ１と対向する、固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２を、第１領域ＭＣ１と異なる極性として、可動子３の第１領域ＭＣ１を磁力により固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２に引き寄せる。これにより、可動子３の第１領域ＭＣ１部分を膨張（拡径）させ、可動子３の第１領域ＭＣ１を固定子２の内周面に接触させる（第１極性変更）。 First, as shown in the first rotational operation pattern 1 in Fig. 14, the polarity variable elements S11 , S21 in the first row of the stator 2, which are located in the moving direction of the first region MC1 of the mover 3, are set to non-polar. Then, the polarity variable elements S12 , S22 in the second row of the stator 2, which face the first region MC1 of the mover 3, are set to a polarity different from that of the first region MC1, and the first region MC1 of the mover 3 is attracted to the polarity variable elements S12 , S22 in the second row of the stator 2 by magnetic force. This causes the first region MC1 of the mover 3 to expand (expand in diameter), and the first region MC1 of the mover 3 is brought into contact with the inner circumferential surface of the stator 2 (first polarity change).

また、可動子３の第２領域ＭＣ２と対向する、固定子２の３列目の極性可変素子Ｓ１３，Ｓ２３を、第２領域ＭＣ２と異なる極性として、可動子３の第２領域ＭＣ２を磁力により固定子２の３列目の極性可変素子Ｓ１３，Ｓ２３に引き寄せる。これにより、可動子３の第２領域ＭＣ２部分を膨張（拡径）させ、可動子３の第２領域ＭＣ２を固定子２の内周面に接触させる（第１極性変更）。 Furthermore, the polarity variable elements S13 , S23 in the third row of the stator 2, which face the second region MC2 of the mover 3, are set to a polarity different from that of the second region MC2, and the second region MC2 of the mover 3 is attracted by magnetic force to the polarity variable elements S13 , S23 in the third row of the stator 2. This causes the second region MC2 of the mover 3 to expand (expand in diameter), and the second region MC2 of the mover 3 to contact the inner circumferential surface of the stator 2 (first polarity change).

次に、図１４の回転動作第１パターン２に示すように、固定子２において極性切り替え１を行い、可動子３の第１領域ＭＣ１と対向する、固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２を、第１領域ＭＣ１と同じ極性とし、磁力により可動子３の第１領域ＭＣ１を、固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２から引き離す。これにより、可動子３の第１領域ＭＣ１部分を収縮（縮径）させ、可動子３の第１領域ＭＣ１を固定子２の内周面と非接触にさせる。 14 , polarity switching 1 is performed in the stator 2, the polarity variable elements S12 , S22 in the second row of the stator 2 that face the first region MC1 of the mover 3 are set to the same polarity as the first region MC1, and the first region MC1 of the mover 3 is separated from the polarity variable elements S12 , S22 in the second row of the stator 2 by magnetic force. This causes the first region MC1 of the mover 3 to contract (reduced in diameter), and the first region MC1 of the mover 3 is brought out of contact with the inner circumferential surface of the stator 2.

次に、図１４の回転動作第１パターン３に示すように、固定子２において極性切り替え２を行い、固定子２の２列目の極性可変素子Ｓ１１，Ｓ２２を無極性とするとともに、可動子３の第１領域ＭＣ１の移動方向に位置する、固定子２の１列目の極性可変素子Ｓ１１，Ｓ２１を、第１領域ＭＣ１と異なる極性とする。 Next, as shown in the first rotational operation pattern 3 in Figure 14, polarity switching 2 is performed on the stator 2, the polarity variable elements S11 , S22 in the second row of the stator 2 are made non-polar, and the polarity variable elements S11 , S21 in the first row of the stator 2, which are located in the movement direction of the first region MC1 of the movable element 3, are made to have a polarity different from that of the first region MC1.

これにより、可動子３の第１領域ＭＣ１は、固定子２の１列目の極性可変素子Ｓ１１，Ｓ２１に引き寄せられる磁力（可変素子３１が弾性部材である場合は、移動方向側の可変部３５が伸長していたことによる移動方向側への復元力（推進力）も）により、固定子２の１列目の極性可変素子Ｓ１１，Ｓ２１に引き寄せられ、周方向Ｃ１に移動する。これにより、可動子３の第１領域ＭＣ１部分を、固定子２の１列目の極性可変素子Ｓ１１，Ｓ２１部分で膨張させて固定子２の内周面に接触させる（第２極性変更）。 As a result, the first region MC1 of the mover 3 is attracted to the polarity variable elements S11 , S21 in the first row of the stator 2 by a magnetic force (and, if the variable elements 31 are elastic members, a restoring force (propulsive force) in the direction of movement due to the extension of the variable parts 35 on the direction of movement side) and moves in the circumferential direction C1. This causes the first region MC1 of the mover 3 to expand at the polarity variable elements S11 , S21 in the first row of the stator 2 and come into contact with the inner circumferential surface of the stator 2 (second polarity change).

なお、可変素子３１が弾性部材である場合、可動子３では、第１領域ＭＣ１が周方向Ｃ１に移動することで、第１領域ＭＣ１と第２領域ＭＣ２とが離れ、これら第１領域ＭＣ１と第２領域ＭＣ２との間の可変部３５が移動方向である周方向Ｃ１に伸長し、移動方向側への推進力が生じた状態になることが望ましい。 When the variable element 31 is an elastic member, it is desirable that, in the movable member 3, as the first region MC1 moves in the circumferential direction C1, the first region MC1 and the second region MC2 move apart, and the variable portion 35 between the first region MC1 and the second region MC2 stretches in the circumferential direction C1, which is the direction of movement, and a propulsive force is generated in the direction of movement.

次に、図１５の回転動作第１パターン４に示すように、固定子２において極性切り替え３を行い、固定子２の３列目の極性可変素子Ｓ１３，Ｓ２３を、可動子３の第２領域ＭＣ２と同じ極性とし、可動子３の第２領域ＭＣ２を、固定子２の３列目の極性可変素子Ｓ１３，Ｓ２３から引き離す。これにより、可動子３の第２領域ＭＣ２部分を収縮（縮径）させ、可動子３の第２領域ＭＣ２を固定子２の内周面と非接触にさせる。 15 , polarity switching 3 is performed in the stator 2, the polarity variable elements S13 , S23 in the third row of the stator 2 are made to have the same polarity as the second region MC2 of the mover 3, and the second region MC2 of the mover 3 is separated from the polarity variable elements S13 , S23 in the third row of the stator 2. This causes the second region MC2 of the mover 3 to contract (reduced in diameter), and the second region MC2 of the mover 3 is brought out of contact with the inner circumferential surface of the stator 2.

次に、図１５の回転動作第１パターン５に示すように、固定子２において極性切り替え４を行い、固定子２の３列目の極性可変素子Ｓ１３，Ｓ２３を無極性とし、可動子３の第２領域ＭＣ２の移動方向に位置する、固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２を、第２領域ＭＣ２と異なる極性とする。 Next, as shown in the first rotational operation pattern 5 of Figure 15, polarity switching 4 is performed in the stator 2, the polarity variable elements S13 , S23 in the third row of the stator 2 are made non-polar, and the polarity variable elements S12 , S22 in the second row of the stator 2, which are located in the movement direction of the second region MC2 of the movable element 3, are made to have a polarity different from that of the second region MC2.

これにより、可動子３の第２領域ＭＣ２は、固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２に引き寄せられる磁力（可変素子３１が弾性部材である場合は、可動子３の可変部３５が伸長していたことによる移動方向側への復元力も）により、固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２に引き寄せられ、周方向Ｃ１に移動する。可動子３の第２領域ＭＣ２部分は、固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２部分で膨張（拡径）し、固定子２の内周面に接触する（第３極性変更）。 As a result, the second region MC2 of the mover 3 is attracted to the polarity variable elements S12 , S22 in the second row of the stator 2 by a magnetic force (and, if the variable element 31 is an elastic member, a restoring force in the direction of movement due to the extension of the variable part 35 of the mover 3) and moves in the circumferential direction C1. The second region MC2 of the mover 3 expands (increases in diameter) in the polarity variable elements S12 , S22 in the second row of the stator 2 and comes into contact with the inner circumferential surface of the stator 2 (third polarity change).

このようにして、ソフトアクチュエータ１では、固定子２の注目領域ＥＲ２毎にそれぞれ極性可変素子Ｓ１１，Ｓ１２，Ｓ１３，Ｓ２１，Ｓ２２，Ｓ２３の極性切り替えが行われることで、可動子３の第１領域ＭＣ１を周方向Ｃ１に沿って移動させて固定子２の面に接触させた後に、第２領域ＭＣ２を固定子２の面と非接触にして第１領域ＭＣ１に近づけるように周方向Ｃ１に沿って移動させ、第２領域ＭＣ２を固定子２の面に接触させる。これにより、ソフトアクチュエータ１では、可動子３がこのような尺取虫状の動作を繰り返し行い、固定子２の面に沿って可動子３を周方向Ｃ１に移動（回転）させてゆくことができる。 In this way, in the soft actuator 1, the polarity of the polarity variable elements S11 , S12 , S13 , S21 , S22 , and S23 is switched for each region of interest ER2 of the stator 2, whereby the first region MC1 of the mover 3 is moved along the circumferential direction C1 and brought into contact with the surface of the stator 2, and then the second region MC2 is moved along the circumferential direction C1 so as to approach the first region MC1 without contacting the surface of the stator 2, and the second region MC2 is brought into contact with the surface of the stator 2. As a result, in the soft actuator 1, the mover 3 repeats such an inchworm-like operation, and the mover 3 can be moved (rotated) in the circumferential direction C1 along the surface of the stator 2.

（３－２）回転動作第２パターン
次に、上述した回転動作第１パターンとは異なる、可動子３の回転動作の第２パターン（回転動作第２パターン）について説明する。図１６、図１７及び図１８は、固定子２の筒内空間において周方向Ｃ１に回転する可動子３の回転動作第２パターンを説明するための概略図である。なお、固定子磁極配列、可動子磁極配列、注目領域ＥＲ２、極性可変素子Ｓ１１，Ｓ１２，Ｓ１３，Ｓ２１，Ｓ２２，Ｓ２３，Ｓ３１，Ｓ３２，Ｓ３３などについては上述した「（３－１）回転動作第１パターン」と同じであるため、ここではその説明は省略する。なお、回転動作第２パターンにおいても、２行２列に配置された磁極部３２を周方向Ｃ１に移動させる基本構成は、２行３列の極性可変素子２２が配置された構成が基本構成となる。 (3-2) Rotational Operation Second Pattern Next, a second pattern (rotational operation second pattern) of the rotational operation of the mover 3, which is different from the above-mentioned rotational operation first pattern, will be described. Figures 16, 17, and 18 are schematic diagrams for explaining the rotational operation second pattern of the mover 3 rotating in the circumferential direction C1 in the cylindrical space of the stator 2. Note that the stator magnetic pole arrangement, the mover magnetic pole arrangement, the attention area ER2, the polarity variable elements S 11 , S 12 , S 13 , S 21 , S 22 , S 23 , S 31 , S 32 , S 33 , etc. are the same as those in the above-mentioned "(3-1) Rotational Operation First Pattern", so their description will be omitted here. Note that, in the rotational operation second pattern, the basic configuration for moving the magnetic pole parts 32 arranged in two rows and two columns in the circumferential direction C1 is a configuration in which the polarity variable elements 22 are arranged in two rows and three columns.

回転動作第２パターンでは、チェッカーボード・パターン状に極性が異なる磁極部３２が２行２列に配置された４つの磁極部３２を周方向Ｃ１に移動させる際の注目領域ＥＲ２での励磁方式が、当該注目領域ＥＲ２の極性可変素子２２のうち、移動方向(周方向Ｃ１)に並ぶ所定の第１相と第２相と第３相のうちの２つの相だけを同時に励磁する２相励磁方式と、当該移動方向に並ぶ所定の第１相と第２相と第３相の３つの相を同時に励磁する３相励磁方式とが繰り返される２－３相励磁方式となっている。なお、ここでは、可動子３の動作説明を簡単にするために、２－３相励磁方式の回転動作第２パターンについて説明するが、本発明はこれに限らない。回転動作第２パターンでは、Ｎを２以上の正の数とした場合、Ｎ行Ｎ列に配置された磁極部３２を周方向Ｃ１に移動させる際の基本構成（Ｎ行（Ｎ+１）列に極性可変素子２２を配置した構成）での励磁方式はＮ－（Ｎ＋１）相励磁方式となる(－は、Ｎ相励磁と（Ｎ+１）相励磁とを繰り返すことを示すハイフンである)。 In the second rotational operation pattern, the excitation method in the attention area ER2 when moving the four magnetic pole parts 32 arranged in two rows and two columns with different polarities in a checkerboard pattern in the circumferential direction C1 is a 2-3 phase excitation method in which a 2-phase excitation method is used to simultaneously excite only two of the predetermined first, second, and third phases that are aligned in the moving direction (circumferential direction C1) of the polarity variable elements 22 in the attention area ER2, and a 3-phase excitation method is used to simultaneously excite the three predetermined first, second, and third phases that are aligned in the moving direction. Note that, in order to simplify the explanation of the operation of the mover 3, the second rotational operation pattern of the 2-3 phase excitation method will be explained here, but the present invention is not limited to this. In the second rotational operation pattern, when N is a positive number equal to or greater than 2, the excitation method in the basic configuration (configuration in which polarity variable elements 22 are arranged in N rows and (N+1) columns) when moving the magnetic pole portions 32 arranged in N rows and N columns in the circumferential direction C1 is the N-(N+1) phase excitation method (the - is a hyphen indicating that N-phase excitation and (N+1)-phase excitation are repeated).

図１６の回転動作第２パターン１は、上述した図１４の回転動作第１パターン１と同様の状態であり、固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２を、可動子３の第１領域ＭＣ１と異なる極性とし、固定子２の３列目の極性可変素子Ｓ１３，Ｓ２３を、可動子３の第２領域ＭＣ２と異なる極性として、可動子３の第１領域ＭＣ１及び第２領域ＭＣ２を、磁力により膨張（拡径）させて固定子２の内周面に接触させる（第１極性変更）。 The second rotational operation pattern 1 in Figure 16 is in the same state as the first rotational operation pattern 1 in Figure 14 described above, where the polarity variable elements S12 , S22 in the second row of the stator 2 have a polarity different from that of the first region MC1 of the movable member 3, and the polarity variable elements S13 , S23 in the third row of the stator 2 have a polarity different from that of the second region MC2 of the movable member 3, and the first region MC1 and second region MC2 of the movable member 3 are expanded (increased in diameter) by magnetic force to contact the inner surface of the stator 2 (first polarity change).

次に、図１６の回転動作第２パターン２に示すように、固定子２において極性切り替え１を行い、可動子３の第１領域ＭＣ１と対向する、固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２を、第１領域ＭＣ１と同じ極性とし、磁力により可動子３の第１領域ＭＣ１を固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２から引き離す。これにより、可動子３の第１領域ＭＣ１部分を収縮（縮径）させ、可動子３の第１領域ＭＣ１を固定子２の内周面と非接触にさせる。 16 , polarity switching 1 is performed in the stator 2, the polarity variable elements S12 , S22 in the second row of the stator 2 that face the first region MC1 of the mover 3 are set to the same polarity as the first region MC1, and the first region MC1 of the mover 3 is separated from the polarity variable elements S12 , S22 in the second row of the stator 2 by magnetic force. This causes the first region MC1 of the mover 3 to contract (reduced in diameter), and the first region MC1 of the mover 3 is brought out of contact with the inner circumferential surface of the stator 2.

次に、図１６の回転動作第２パターン３に示すように、固定子２において極性切り替え２を行い、可動子３の回転方向（周方向Ｃ１）に位置する、固定子２の１列目の極性可変素子Ｓ１１，Ｓ２１と、固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２と、を可動子３の第１領域ＭＣ１と異なる極性とする。 Next, as shown in the second rotational operation pattern 3 in Figure 16, polarity switching 2 is performed in the stator 2, and the polarity variable elements S11 , S21 in the first row of the stator 2 and the polarity variable elements S12 , S22 in the second row of the stator 2, which are located in the rotational direction (circumferential direction C1) of the movable member 3, are set to a polarity different from that of the first region MC1 of the movable member 3.

これにより、可動子３の第１領域ＭＣ１は、磁力（可変素子３１が弾性部材である場合には、移動方向側の可変部３５の復元力も）によって、固定子２の１列目の極性可変素子Ｓ１１，Ｓ２１と、固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２と、を跨いだ中間領域ＥＲ１２に引き寄せられる。このようにして、可動子３の第１領域ＭＣ１部分を、固定子２の中間領域ＥＲ１２部分まで移動させ、中間領域ＥＲ１２部分で膨張（拡径）させて固定子２の内周面に接触させる（第２極性変更）。 As a result, the first region MC1 of the mover 3 is attracted by the magnetic force (and the restoring force of the variable part 35 on the moving direction side if the variable element 31 is an elastic member) to the intermediate region ER12 that straddles the polarity variable elements S11 , S21 of the first row of the stator 2 and the polarity variable elements S12 , S22 of the second row of the stator 2. In this way, the first region MC1 of the mover 3 is moved to the intermediate region ER12 of the stator 2 and expanded (diameter enlarged) in the intermediate region ER12 to come into contact with the inner circumferential surface of the stator 2 (second polarity change).

なお、可変素子３１を弾性部材とした場合、可動子３では、第１領域ＭＣ１が周方向Ｃ１に移動した際に、第１領域ＭＣ１と第２領域ＭＣ２との間を離して可変部３５を伸長させ、移動方向側への推進力が生じた状態となることが望ましい。 When the variable element 31 is an elastic member, it is desirable that when the first region MC1 of the movable member 3 moves in the circumferential direction C1, the first region MC1 and the second region MC2 are separated to extend the variable portion 35, generating a propulsive force in the direction of movement.

次に、図１７の回転動作第２パターン４に示すように、固定子２において極性切り替え３を行い、固定子２の３列目の極性可変素子Ｓ１３，Ｓ２３を、可動子３の第２領域ＭＣ２と同じ極性とし、可動子３の第２領域ＭＣ２を、磁力により固定子２の３列目の極性可変素子Ｓ１３，Ｓ２３から引き離す。これにより、可動子３の第２領域ＭＣ２部分を収縮（縮径）させ、可動子３の第２領域ＭＣ２を固定子２の内周面と非接触にさせる。 17 , polarity switching 3 is performed in the stator 2, the polarity variable elements S13 , S23 in the third row of the stator 2 are made to have the same polarity as the second region MC2 of the mover 3, and the second region MC2 of the mover 3 is separated from the polarity variable elements S13 , S23 in the third row of the stator 2 by magnetic force. This causes the second region MC2 of the mover 3 to contract (reduced in diameter), and the second region MC2 of the mover 3 is brought out of contact with the inner circumferential surface of the stator 2.

次に、図１７の回転動作第２パターン５に示すように、固定子２において極性切り替え４を行い、固定子２の３列目の極性可変素子Ｓ１３，Ｓ２３を無極性とし、可動子３の第２領域ＭＣ２の回転方向に位置する、固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２を、第２領域ＭＣ２と異なる極性とする。 Next, as shown in the second rotational operation pattern 5 of Figure 17, polarity switching 4 is performed in the stator 2, the polarity variable elements S13 , S23 in the third row of the stator 2 are made non-polar, and the polarity variable elements S12 , S22 in the second row of the stator 2, which are located in the rotational direction of the second region MC2 of the movable member 3, are made to have a polarity different from that of the second region MC2.

これにより、可動子３の第２領域ＭＣ２は、固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２側に磁力（可変素子３１が弾性部材である場合には、可動子３の可変部３５が伸長していたことによる移動方向側への復元力（推進力）も）によって引き寄せられる。この際、可動子３では、第１領域ＭＣ１が固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２と一部領域に位置していることから、第２領域ＭＣ２が、固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２と、固定子２の３列目の極性可変素子Ｓ１３，Ｓ２３とを跨いだ中間領域ＥＲ１３に位置する。 As a result, the second region MC2 of the mover 3 is attracted by magnetic force ( and also by a restoring force (propulsive force) in the direction of movement caused by the extension of the variable part 35 of the mover 3, in the case where the variable element 31 is an elastic member) toward the polarity variable elements S12, S22 in the second row of the stator 2. At this time, since the first region MC1 of the mover 3 is located in a partial region including the polarity variable elements S12 , S22 in the second row of the stator 2, the second region MC2 is located in an intermediate region ER13 that straddles the polarity variable elements S12 , S22 in the second row of the stator 2 and the polarity variable elements S13 , S23 in the third row of the stator 2.

これにより、中間領域ＥＲ１３において、可動子３の第２領域ＭＣ２部分を、磁力によって固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２の一部領域で膨張（拡径）させて固定子２の内周面に接触させる（第３極性変更）。なお、このとき、可動子３の第１領域ＭＣ１は、極性が同じ、固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２にも位置するが、極性が異なる、固定子２の１列目の極性可変素子Ｓ１１，Ｓ１２にも引き寄せられているため、固定子２の内周面と接触した状態を維持する。 As a result, in the intermediate region ER13, the second region MC2 of the mover 3 is expanded (diameter enlarged) by the magnetic force in a partial region of the polarity variable elements S12 , S22 of the second row of the stator 2, and contacts the inner circumferential surface of the stator 2 (third polarity change). Note that at this time, the first region MC1 of the mover 3 is also located in the polarity variable elements S12 , S22 of the second row of the stator 2, which have the same polarity, but is also attracted to the polarity variable elements S11 , S12 of the first row of the stator 2, which have different polarity, and therefore maintains a state of contact with the inner circumferential surface of the stator 2.

次に、図１７の回転動作第２パターン６に示すように、固定子２において極性切り替え５を行い、可動子３の第１領域ＭＣ１の回転方向に位置する、固定子２の１列目の極性可変素子Ｓ１１，Ｓ２１を、可動子３の第１領域ＭＣ１と同じ極性とする。これにより、可動子３の第１領域ＭＣ１を、固定子２の１列目の極性可変素子Ｓ１１，Ｓ２１から引き離すことで、可動子３の第１領域ＭＣ１部分を収縮（縮径）させ、可動子３の第１領域ＭＣ１を固定子２の内周面と非接触にさせる。 17 , polarity switching 5 is performed in the stator 2, and the polarity variable elements S11, S21 in the first row of the stator 2, which are located in the rotational direction of the first region MC1 of the mover 3, are made to have the same polarity as the first region MC1 of the mover 3. As a result, the first region MC1 of the mover 3 is separated from the polarity variable elements S11 , S21 in the first row of the stator 2, causing the first region MC1 of the mover 3 to contract (reduced in diameter), and the first region MC1 of the mover 3 is brought out of contact with the inner circumferential surface of the stator 2.

次に、図１８の回転動作第２パターン７に示すように、固定子２において極性切り替え６を行い、固定子２の１列目の極性可変素子Ｓ１１，Ｓ２１を、可動子３の第１領域ＭＣ１と異なる極性とし、固定子２の３列目の極性可変素子Ｓ１３，Ｓ２３を、可動子３の第２領域ＭＣ２と異なる極性とする。 Next, as shown in the second rotational operation pattern 7 of Figure 18, polarity switching 6 is performed in the stator 2, and the polarity variable elements S11 , S21 in the first row of the stator 2 are set to a polarity different from that of the first region MC1 of the movable element 3, and the polarity variable elements S13 , S23 in the third row of the stator 2 are set to a polarity different from that of the second region MC2 of the movable element 3.

これにより、可動子３の第２領域ＭＣ２は、固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２と、３列目の極性可変素子Ｓ１３，Ｓ２３と、を跨いだ中間領域ＥＲ１３で磁力により膨張（拡径）され、固定子２の内周面と接触する。また、可動子３の第１領域ＭＣ１は、伸長していた可変部３５の移動方向側への磁力（可変素子３１が弾性部材である場合には、可動子３の可変部３５が伸長していたことによる移動方向側への復元力も）によって、固定子２の１列目の極性可変素子Ｓ１１，Ｓ２１に引き寄せられ、周方向Ｃ１に移動する。これにより、可動子３の第１領域ＭＣ１部分を、固定子２の１列目の極性可変素子Ｓ１１，Ｓ２１部分で膨張（拡径）させて固定子２の内周面に接触させる。 As a result, the second region MC2 of the mover 3 is expanded (expanded in diameter) by the magnetic force in an intermediate region ER13 that straddles the second row of polarity variable elements S12 , S22 and the third row of polarity variable elements S13 , S23 of the stator 2, and comes into contact with the inner peripheral surface of the stator 2. Also, the first region MC1 of the mover 3 is attracted to the polarity variable elements S11, S21 of the first row of the stator 2 by the magnetic force in the moving direction of the extended variable part 35 (if the variable element 31 is an elastic member, the restoring force in the moving direction due to the extension of the variable part 35 of the mover 3) and moves in the circumferential direction C1. As a result, the first region MC1 of the mover 3 is expanded (expanded in diameter) in the polarity variable elements S11 , S21 of the first row of the stator 2, and comes into contact with the inner peripheral surface of the stator 2.

次に、図１８の回転動作第２パターン８に示すように、固定子２において極性切り替え７を行い、固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２と、固定子２の３列目の極性可変素子Ｓ１３，Ｓ２３と、を可動子３の第２領域ＭＣ２と同じ極性とし、可動子３の第２領域ＭＣ２を、固定子２の中間領域ＥＲ１３から引き離す。これにより、可動子３の第２領域ＭＣ２部分を収縮（縮径）させ、可動子３の第２領域ＭＣ２を固定子２の内周面と非接触にさせる。 18 , polarity switching 7 is performed in the stator 2, the polarity variable elements S12 , S22 in the second row of the stator 2 and the polarity variable elements S13 , S23 in the third row of the stator 2 are set to the same polarity as the second region MC2 of the mover 3 , and the second region MC2 of the mover 3 is separated from the intermediate region ER13 of the stator 2. This causes the second region MC2 of the mover 3 to contract (reduced in diameter), and the second region MC2 of the mover 3 is brought out of contact with the inner circumferential surface of the stator 2.

次に、図１８の回転動作第２パターン９に示すように、固定子２において極性切り替え８を行い、固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２を、可動子３の第２領域ＭＣ２と異なる極性とし、固定子２の３列目の極性可変素子Ｓ１３，Ｓ２３を無極性とする。これにより、可動子３の第２領域ＭＣ２は、伸長していた可変部３５の移動方向側への磁力（可変素子３１が弾性部材である場合には、可動子３の可変部３５が伸長していたことによる移動方向側への復元力も）によって、固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２に引き寄せられ、周方向Ｃ１に移動する。このようにして、可動子３の第２領域ＭＣ２部分を、固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２部分まで移動させて、固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２で膨張（拡径）させ、固定子２の内周面に接触させる。 18, polarity switching 8 is performed in the stator 2, the polarity variable elements S12 , S22 in the second row of the stator 2 are set to a polarity different from that of the second region MC2 of the mover 3, and the polarity variable elements S13 , S23 in the third row of the stator 2 are set to a non-polarity. As a result, the second region MC2 of the mover 3 is attracted to the polarity variable elements S12, S22 in the second row of the stator 2 by the magnetic force in the moving direction of the extended variable part 35 (and the restoring force in the moving direction due to the extension of the variable part 35 of the mover 3 in the case where the variable element 31 is an elastic member), and moves in the circumferential direction C1. In this manner, the second region MC2 of the movable member 3 is moved to the portion of the polarity variable elements S12 , S22 in the second row of the stator 2, and is expanded (widened in diameter) by the polarity variable elements S12 , S22 in the second row of the stator 2, and is brought into contact with the inner circumferential surface of the stator 2.

以上、ソフトアクチュエータ１では、固定子２の注目領域ＥＲ２毎にそれぞれ極性可変素子Ｓ１１，Ｓ１２，Ｓ１３，Ｓ２１，Ｓ２２，Ｓ２３，Ｓ３１，Ｓ３２，Ｓ３３の極性切り替えが行われることで、可動子３の第１領域ＭＣ１を周方向Ｃ１に移動させて固定子２の面に接触させた後に、第２領域ＭＣ２を固定子２の面と非接触にして第１領域ＭＣ１に近づけるように周方向Ｃ１に移動させ、第２領域ＭＣ２を固定子２の面に接触させる。これにより、ソフトアクチュエータ１では、可動子３がこのような尺取虫状の動作を繰り返し行い、固定子２の面に沿って可動子３を周方向Ｃ１に移動（回転）させてゆくことができる。 As described above, in the soft actuator 1, the polarity of the polarity variable elements S11 , S12 , S13 , S21 , S22 , S23 , S31 , S32 , and S33 is switched for each region of interest ER2 of the stator 2, whereby the first region MC1 of the mover 3 is moved in the circumferential direction C1 and brought into contact with the surface of the stator 2, and then the second region MC2 is moved in the circumferential direction C1 so as to approach the first region MC1 without contacting the surface of the stator 2, and the second region MC2 is brought into contact with the surface of the stator 2. As a result, in the soft actuator 1, the mover 3 repeats such an inchworm-like operation, and the mover 3 can be moved (rotated) in the circumferential direction C1 along the surface of the stator 2.

また、この回転動作第２パターンでは、可動子３の第１領域ＭＣ１及び第２領域ＭＣ２を周方向Ｃ１へ移動させる移動量を回転動作第１パターンよりも小さくすることができる。 In addition, in this second rotational motion pattern, the amount of movement of the first region MC1 and the second region MC2 of the mover 3 in the circumferential direction C1 can be made smaller than in the first rotational motion pattern.

（３－３）回転動作第３パターン
次に、上述した回転動作第１パターン及び回転動作第２パターンとは異なる、可動子３の回転動作の第３パターン（回転動作第３パターン）について説明する。図１９、図２０及び図２１は、固定子２の筒内空間において周方向Ｃ１に移動する可動子３の回転動作第３パターンを説明するための概略図である。なお、固定子磁極配列、可動子磁極配列、注目領域ＥＲ２、極性可変素子Ｓ１１，Ｓ１２，Ｓ１３，Ｓ２１，Ｓ２２，Ｓ２３，Ｓ３１，Ｓ３２，Ｓ３３などについては上述した「（３－１）回転動作第１パターン」と同じであるため、ここではその説明は省略する。 (3-3) Rotational Operation Third Pattern Next, a third pattern (rotational operation third pattern) of the rotational operation of the mover 3, which is different from the above-mentioned rotational operation first pattern and rotational operation second pattern, will be described. Figures 19, 20, and 21 are schematic diagrams for explaining the rotational operation third pattern of the mover 3 moving in the circumferential direction C1 in the cylinder space of the stator 2. Note that the stator magnetic pole arrangement, the mover magnetic pole arrangement, the attention area ER2, the polarity variable elements S11 , S12 , S13 , S21 , S22 , S23 , S31 , S32 , S33 , etc. are the same as those in the above-mentioned "(3-1) Rotational Operation First Pattern", so their explanation will be omitted here.

回転動作第３パターンでは、チェッカーボード・パターン状に極性が異なる磁極部３２が２行２列に配置された４つの磁極部３２を周方向Ｃ１に移動させる際の注目領域ＥＲ２での励磁方式が、当該注目領域ＥＲ２の極性可変素子２２のうち、移動方向(周方向Ｃ１)に並ぶ所定の第１相と第２相と第３相のうちの２つの相だけを同時に励磁する２相励磁方式と、当該移動方向に並ぶ所定の第１相と第２相と第３相の３つの相を同時に励磁する３相励磁方式とが繰り返される２－３相励磁方式となっている。なお、ここでは、可動子３の動作説明を簡単にするために、２－３相励磁方式の回転動作第３パターンについて説明するが、本発明はこれに限らない。回転動作第３パターンでは、Ｎを２以上の正の数とした場合、Ｎ行Ｎ列に配置された磁極部３２を周方向Ｃ１に移動させる際の基本構成（Ｎ行（Ｎ+１）列に極性可変素子２２を配置した構成）での励磁方式はＮ－（Ｎ＋１）相励磁方式となる(－は、Ｎ相励磁と（Ｎ+１）相励磁とを繰り返すことを示すハイフンである)。 In the third rotational operation pattern, the excitation method in the attention area ER2 when moving the four magnetic pole parts 32 arranged in two rows and two columns with different polarities in a checkerboard pattern in the circumferential direction C1 is a 2-3 phase excitation method in which a 2-phase excitation method is used to simultaneously excite only two of the predetermined first, second, and third phases that are aligned in the moving direction (circumferential direction C1) of the polarity variable elements 22 in the attention area ER2, and a 3-phase excitation method is used to simultaneously excite the three predetermined first, second, and third phases that are aligned in the moving direction. Note that, in order to simplify the explanation of the operation of the mover 3, the third rotational operation pattern of the 2-3 phase excitation method will be explained here, but the present invention is not limited to this. In the third rotational operation pattern, when N is a positive number equal to or greater than 2, the excitation method in the basic configuration (configuration in which polarity variable elements 22 are arranged in N rows and (N+1) columns) when moving the magnetic pole portions 32 arranged in N rows and N columns in the circumferential direction C1 is the N-(N+1) phase excitation method (the - is a hyphen indicating that N-phase excitation and (N+1)-phase excitation are repeated).

図１９の回転動作第３パターン１は、上述した図１４の回転動作第１パターン１と同様の状態であり、固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２を、可動子３の第１領域ＭＣ１と異なる極性とし、固定子２の３列目の極性可変素子Ｓ１３，Ｓ２３を、可動子３の第２領域ＭＣ２と異なる極性として、可動子３の第１領域ＭＣ１及び第２領域ＭＣ２を、磁力により膨張（拡径）させて固定子２の内周面に接触させる（第１極性変更）。 The third rotational operation pattern 1 in Figure 19 is in the same state as the first rotational operation pattern 1 in Figure 14 described above, where the polarity variable elements S12 , S22 in the second row of the stator 2 have a polarity different from that of the first region MC1 of the movable member 3, and the polarity variable elements S13 , S23 in the third row of the stator 2 have a polarity different from that of the second region MC2 of the movable member 3, and the first region MC1 and second region MC2 of the movable member 3 are expanded (increased in diameter) by magnetic force to contact the inner surface of the stator 2 (first polarity change).

次に、図１９の回転動作第３パターン２に示すように、固定子２において極性切り替え１を行い、可動子３の第１領域ＭＣ１と対向する、固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２を、第１領域ＭＣ１と同じ極性とし、磁力により可動子３の第１領域ＭＣ１を固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２から引き離す。これにより、可動子３の第１領域ＭＣ１部分を収縮（縮径）させ、可動子３の第１領域ＭＣ１を固定子２の内周面と非接触にさせる。 19 , polarity switching 1 is performed in the stator 2, the polarity variable elements S12 , S22 in the second row of the stator 2 that face the first region MC1 of the mover 3 are set to the same polarity as the first region MC1, and the first region MC1 of the mover 3 is separated from the polarity variable elements S12 , S22 in the second row of the stator 2 by magnetic force. This causes the first region MC1 of the mover 3 to contract (reduced in diameter), and the first region MC1 of the mover 3 is brought out of contact with the inner circumferential surface of the stator 2.

次に、図１９の回転動作第３パターン３に示すように、固定子２において極性切り替え２を行い、可動子３の移動方向（周方向Ｃ１）に位置する、固定子２の１列目の極性可変素子Ｓ１１，Ｓ２１と、固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２と、を可動子３の第１領域ＭＣ１と異なる極性とする。 Next, as shown in the third rotational operation pattern 3 in Figure 19, polarity switching 2 is performed in the stator 2, and the polarity variable elements S11 , S21 in the first row of the stator 2 and the polarity variable elements S12 , S22 in the second row of the stator 2, which are located in the movement direction of the movable element 3 (circumferential direction C1), are set to a polarity different from that of the first region MC1 of the movable element 3.

これにより、可動子３の第１領域ＭＣ１は、磁力（可変素子３１が弾性部材である場合には、移動方向側の可変部３５の復元力も）によって、固定子２の１列目の極性可変素子Ｓ１１，Ｓ２１と、固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２と、を跨いだ中間領域ＥＲ１２に引き寄せられる。このようにして、可動子３の第１領域ＭＣ１部分を、固定子２の周方向Ｃ１側の中間領域ＥＲ１２部分まで移動させ、中間領域ＥＲ１２部分で膨張（拡径）させて固定子２の内周面に接触させる（第２極性変更）。 As a result, the first region MC1 of the mover 3 is attracted by a magnetic force (and by the restoring force of the variable part 35 on the moving direction side when the variable element 31 is an elastic member) to an intermediate region ER12 that straddles the polarity variable elements S11 , S21 of the first row of the stator 2 and the polarity variable elements S12 , S22 of the second row of the stator 2. In this way, the first region MC1 of the mover 3 is moved to the intermediate region ER12 on the circumferential direction C1 side of the stator 2, and is expanded (diameter enlarged) in the intermediate region ER12 to come into contact with the inner circumferential surface of the stator 2 (second polarity change).

なお、可変素子３１が弾性部材である場合、可動子３では、第１領域ＭＣ１が周方向Ｃ１に移動した際に、第１領域ＭＣ１と第２領域ＭＣ２との間を離して可変部３５を伸長させ、移動方向側への推進力が生じた状態になることが望ましい。 When the variable element 31 is an elastic member, it is desirable that when the first region MC1 of the movable member 3 moves in the circumferential direction C1, the first region MC1 and the second region MC2 are separated to extend the variable portion 35, generating a propulsive force in the direction of movement.

次に、図２０の回転動作第３パターン４に示すように、固定子２において極性切り替え３を行い、可動子３の第１領域ＭＣ１の回転方向に位置する固定子２の１列目の極性可変素子Ｓ１１，Ｓ２１と、固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２と、の両方を可動子３の第１領域ＭＣ１と同じ極性とする。 Next, as shown in the third rotational operation pattern 4 in Figure 20, polarity switching 3 is performed in the stator 2, and both the polarity variable elements S11 , S21 in the first row of the stator 2, which are located in the rotational direction of the first region MC1 of the movable member 3, and the polarity variable elements S12 , S22 in the second row of the stator 2 are set to the same polarity as the first region MC1 of the movable member 3.

これにより、可動子３の第１領域ＭＣ１を、固定子２の中間領域ＥＲ１２から引き離すことで、可動子３の第１領域ＭＣ１部分を収縮（縮径）させ、可動子３の第１領域ＭＣ１を固定子２の内周面と非接触にさせる。 As a result, the first region MC1 of the mover 3 is pulled away from the intermediate region ER12 of the stator 2, causing the first region MC1 of the mover 3 to shrink (reduced in diameter), and the first region MC1 of the mover 3 is brought out of contact with the inner circumferential surface of the stator 2.

次に、図２０の回転動作第３パターン５に示すように、固定子２において極性切り替え４を行い、可動子３の第１領域ＭＣ１の回転方向に位置する固定子２の１列目の極性可変素子Ｓ１１，Ｓ２１を、可動子３の第１領域ＭＣ１と異なる極性とし、固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２を無極性とする。 Next, as shown in the third rotational operation pattern 5 in Figure 20, polarity switching 4 is performed in the stator 2, and the polarity variable elements S11 , S21 in the first row of the stator 2, which are located in the rotational direction of the first region MC1 of the movable member 3, are set to a polarity different from that of the first region MC1 of the movable member 3, and the polarity variable elements S12 , S22 in the second row of the stator 2 are set to non-polar.

これにより、可動子３の第１領域ＭＣ１は、磁力によって、固定子２の１列目の極性可変素子Ｓ１１，Ｓ２１に引き寄せられ、可動子３の第１領域ＭＣ１部分を、固定子２の１列目の極性可変素子Ｓ１１，Ｓ２１まで移動させる。可動子３は、固定子２の１列目の極性可変素子Ｓ１１，Ｓ２１部分で膨張（拡径）させて固定子２の内周面に接触させる。 As a result, the first region MC1 of the mover 3 is attracted by the magnetic force to the polarity variable elements S11 , S21 in the first row of the stator 2, and the first region MC1 portion of the mover 3 moves to the polarity variable elements S11 , S21 in the first row of the stator 2. The mover 3 expands (increases in diameter) at the polarity variable elements S11 , S21 portion in the first row of the stator 2, and comes into contact with the inner circumferential surface of the stator 2.

また、可変素子３１が弾性部材である場合には、この際、可動子３の第１領域ＭＣ１と回転方向側に隣接した可変部３５が伸長していることにより生じる、回転方向側への推進力によっても、可動子３の第１領域ＭＣ１部分を、固定子２の１列目の極性可変素子Ｓ１１，Ｓ２１まで移動させるようにしてもよい。 Furthermore, in the case where the variable element 31 is an elastic material, the first region MC1 portion of the movable element 3 may also be moved to the polarity variable elements S11, S21 in the first row of the stator 2 by a propulsive force in the rotational direction generated by the extension of the variable portion 35 adjacent to the first region MC1 of the movable element 3 on the rotational direction side.

次に、図２０の回転動作第３パターン６に示すように、固定子２において極性切り替え５を行い、可動子３の第２領域ＭＣ２が位置している、固定子２の３列目の極性可変素子Ｓ１３，Ｓ２３を、可動子３の第２領域ＭＣ２と同じ極性とし、可動子３の第２領域ＭＣ２を、固定子２の３列目の極性可変素子Ｓ１３，Ｓ２３から引き離す。これにより、可動子３の第２領域ＭＣ２部分を収縮（縮径）させ、可動子３の第２領域ＭＣ２を固定子２の内周面と非接触にさせる。 20 , polarity switching 5 is performed in the stator 2, and the polarity variable elements S13 , S23 in the third row of the stator 2, where the second region MC2 of the mover 3 is located, are made to have the same polarity as the second region MC2 of the mover 3, and the second region MC2 of the mover 3 is separated from the polarity variable elements S13 , S23 in the third row of the stator 2. This causes the second region MC2 of the mover 3 to contract (reduced in diameter), and the second region MC2 of the mover 3 is brought out of contact with the inner circumferential surface of the stator 2.

次に、図２１の回転動作第３パターン７に示すように、固定子２において極性切り替え６を行い、可動子３の第２領域ＭＣ２の回転方向に位置する固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２と、固定子２の３列目の極性可変素子Ｓ１３，Ｓ２３と、を可動子３の第２領域ＭＣ２と異なる極性とする。 Next, as shown in the third rotational operation pattern 7 of Figure 21, polarity switching 6 is performed in the stator 2, and the polarity variable elements S12 , S22 in the second row of the stator 2, which are located in the rotational direction of the second region MC2 of the movable member 3, and the polarity variable elements S13 , S23 in the third row of the stator 2 are set to a polarity different from that of the second region MC2 of the movable member 3.

これにより、可動子３の第２領域ＭＣ２は、固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２と、固定子２の３列目の極性可変素子Ｓ１３，Ｓ２３と、を跨いだ中間領域ＥＲ１３に、磁力によって引き寄せられる。可動子３の第２領域ＭＣ２は、固定子２の中間領域ＥＲ１３部分で膨張（拡径）し、固定子２の内周面に接触する（第３極性変更）。 As a result, the second region MC2 of the mover 3 is attracted by magnetic force to an intermediate region ER13 that straddles the polarity variable elements S12 , S22 in the second row of the stator 2 and the polarity variable elements S13 , S23 in the third row of the stator 2. The second region MC2 of the mover 3 expands (expands in diameter) in the intermediate region ER13 of the stator 2 and comes into contact with the inner circumferential surface of the stator 2 (third polarity change).

また、この際、可動子３は、第１領域ＭＣ１と第２領域ＭＣ２との間の可変部３５が伸長していたことによる回転方向側への復元力（推進力）によっても、固定子２の中間領域ＥＲ１３に第２領域ＭＣ２が引き寄せられ、第２領域ＭＣ２を周方向Ｃ１に移動させる。 In addition, at this time, the second region MC2 of the mover 3 is attracted to the intermediate region ER13 of the stator 2 by a restoring force (propulsive force) in the rotational direction caused by the extension of the variable portion 35 between the first region MC1 and the second region MC2, causing the second region MC2 to move in the circumferential direction C1.

次に、図２１の回転動作第３パターン８に示すように、固定子２において極性切り替え７を行い、固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２と、固定子２の３列目の極性可変素子Ｓ１３，Ｓ２３と、を可動子３の第２領域ＭＣ２と同じ極性とし、可動子３の第２領域ＭＣ２を、固定子２の中間領域ＥＲ１３から引き離す。これにより、可動子３の第２領域ＭＣ２部分を収縮（縮径）させ、可動子３の第２領域ＭＣ２を固定子２の内周面と非接触にさせる。 21 , polarity switching 7 is performed in the stator 2, the polarity variable elements S12 , S22 in the second row of the stator 2 and the polarity variable elements S13 , S23 in the third row of the stator 2 are set to the same polarity as the second region MC2 of the mover 3, and the second region MC2 of the mover 3 is separated from the intermediate region ER13 of the stator 2. This causes the second region MC2 of the mover 3 to contract (reduced in diameter), and the second region MC2 of the mover 3 is brought out of contact with the inner circumferential surface of the stator 2.

次に、図２１の回転動作第３パターン９に示すように、固定子２において極性切り替え８を行い、固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２を、可動子３の第２領域ＭＲ２と異なる極性とし、固定子２の３列目の極性可変素子Ｓ１３，Ｓ２３を無極性とする。これにより、可動子３の第２領域ＭＣ２は、固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２に磁力により引き寄せられ、周方向Ｃ１に移動する。 21 , polarity switching 8 is performed in the stator 2 to set the polarity variable elements S12 , S22 in the second row of the stator 2 to a polarity different from that of the second region MR2 of the mover 3, and set the polarity variable elements S13 , S23 in the third row of the stator 2 to a non-polarity. As a result, the second region MC2 of the mover 3 is attracted by the magnetic force to the polarity variable elements S12 , S22 in the second row of the stator 2, and moves in the circumferential direction C1.

また、可変素子３１が弾性部材である場合には、この際、可動子３は、第１領域ＭＣ１と第２領域ＭＣ２との間の可変部３５が伸長していたことによる回転方向側への復元力（推進力）によっても、固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２に第２領域ＭＣ２が引き寄せられ、第２領域ＭＣ２を周方向Ｃ１に移動させる。 In addition, when the variable element 31 is an elastic material, in this case, the second region MC2 of the movable member 3 is attracted to the polarity variable elements S12 , S22 in the second row of the stator 2 by the restoring force (thrust force) in the rotational direction caused by the extension of the variable part 35 between the first region MC1 and the second region MC2, and moves the second region MC2 in the circumferential direction C1.

このようにして、可動子３の第２領域ＭＣ２部分を、固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２部分まで移動させ、固定子２の２列目の極性可変素子Ｓ１２，Ｓ２２部分で膨張（拡径）させて固定子２の内周面に接触させる。 In this manner, the second region MC2 of the movable member 3 is moved to the portion of the polarity variable elements S12 , S22 in the second row of the stator 2, and expanded (increased in diameter) at the portion of the polarity variable elements S12 , S22 in the second row of the stator 2 to come into contact with the inner circumferential surface of the stator 2.

以上、ソフトアクチュエータ１では、固定子２の注目領域ＥＲ２毎にそれぞれ極性可変素子Ｓ１１，Ｓ１２，Ｓ１３，Ｓ２１，Ｓ２２，Ｓ２３，Ｓ３１，Ｓ３２，Ｓ３３の極性切り替えが行われることで、可動子３の第１領域ＭＣ１を周方向Ｃ１に移動させて固定子２の面に接触させた後に、第２領域ＭＣ２を固定子２の面と非接触にして第１領域ＭＣ１に近づけるように周方向Ｃ１に移動させ、第２領域ＭＣ２を固定子２の面に接触させる。これにより、ソフトアクチュエータ１では、可動子３がこのような尺取虫状の動作を繰り返し行い、固定子２の面に沿って可動子３を周方向Ｃ１に回転させてゆくことができる。 As described above, in the soft actuator 1, the polarity of the polarity variable elements S11 , S12 , S13 , S21 , S22 , S23 , S31 , S32 , and S33 is switched for each region of interest ER2 of the stator 2, whereby the first region MC1 of the mover 3 is moved in the circumferential direction C1 and brought into contact with the surface of the stator 2, and then the second region MC2 is moved in the circumferential direction C1 so as to approach the first region MC1 without contacting the surface of the stator 2, and the second region MC2 is brought into contact with the surface of the stator 2. As a result, in the soft actuator 1, the mover 3 repeats such an inchworm-like operation, and the mover 3 can be rotated in the circumferential direction C1 along the surface of the stator 2.

また、この回転動作第３パターンでは、可動子３の第１領域ＭＣ１を２段階で周方向Ｃ１へ移動させた後、第２領域ＭＣ２を２段階で周方向Ｃ１へ移動させ、第１領域ＭＣ１及び第２領域ＭＣ２を段階的に小刻みに回転させてゆくことができる。すなわち、回転動作第３パターンは、上述したように、１ピッチ（１つの極性可変素子２２の領域単位）で伸長と短縮を繰り返す回転動作第１パターンや、ハーフピッチ（１つの極性可変素子２２の半領域単位）で伸長と短縮を繰り返す回転動作第２パターンと異なり、ハーフピッチで２回伸長した後、ハーフピッチで２回短縮する。 In addition, in this third rotational operation pattern, the first region MC1 of the movable element 3 is moved in the circumferential direction C1 in two stages, and then the second region MC2 is moved in the circumferential direction C1 in two stages, so that the first region MC1 and the second region MC2 can be rotated stepwise in small increments. That is, unlike the first rotational operation pattern in which expansion and contraction are repeated in one pitch (area unit of one polarity variable element 22) and the second rotational operation pattern in which expansion and contraction are repeated in half pitches (half area unit of one polarity variable element 22), as described above, the third rotational operation pattern expands twice in a half pitch and then contracts twice in a half pitch.

さらに、可変素子３１が弾性部材である場合、この回転動作第３パターンでは、始めに可動子３の第１領域ＭＣ１を２段階で周方向Ｃ１へ移動させることから、第１領域ＭＣ１及び第２領域ＭＣ２の間にある可変部３５を一段と伸長させることができるため、当該可変部３５による推進力により第２領域ＭＣ２を周方向Ｃ１に一段と確実に移動させることができる。 Furthermore, when the variable element 31 is an elastic member, in this third rotational operation pattern, the first region MC1 of the mover 3 is first moved in the circumferential direction C1 in two stages, so that the variable portion 35 between the first region MC1 and the second region MC2 can be further extended, and the second region MC2 can be moved more reliably in the circumferential direction C1 by the propulsive force of the variable portion 35.

（４）並進回転動作
ソフトアクチュエータ１は、固定子２の周面に行列状に配置された極性可変素子２２の極性パターンを制御することで、固定子２の筒内空間に設けた可動子３の外形を所望の形状に変形させてゆき、固定子２の筒内空間で、軸方向Ｘ１と周方向Ｃ１との両方向に対して傾斜した斜め方向に沿って可動子３を移動させることができる。以下、固定子２の筒内空間において斜め方向に沿って移動する可動子３の並進回転動作について説明する。 (4) Translational Rotational Action The soft actuator 1 controls the polarity pattern of the polarity variable elements 22 arranged in a matrix on the circumferential surface of the stator 2 to deform the outer shape of the mover 3 provided in the cylindrical space of the stator 2 into a desired shape, and can move the mover 3 along an oblique direction inclined with respect to both the axial direction X1 and the circumferential direction C1 in the cylindrical space of the stator 2. Hereinafter, the translational rotational action of the mover 3 moving along an oblique direction in the cylindrical space of the stator 2 will be described.

（４－１）並進回転動作第１パターン
図２２及び図２３は、固定子２の筒内空間において斜め方向に沿って並進回転移動する可動子３の並進回転動作の第１パターン（並進回転動作第１パターン）を説明するための概略図である。図２２及び図２３では、可動子磁極配列において、軸方向Ｘ１に並んだＮ極部３３ｎ及びＳ極部３４ｓの対を第１領域ＭＣ１の磁極部３２とし、この第１領域ＭＣ１と周方向Ｃ１に隣接し、かつ軸方向Ｘ１に並んだＳ極部３４ｓ及びＮ極部３３ｎの対を第２領域ＭＣ２の磁極部３２と称し、これら第１領域ＭＣ１の磁極部３２（以下、単に第１領域ＭＣ１と称する）と、第２領域ＭＣ２の磁極部３２（以下、単に第２領域ＭＣ２と称する）とに着目して、並進回転動作第１パターンについて説明する。 (4-1) First Translational Rotational Movement Pattern Figures 22 and 23 are schematic diagrams for explaining a first pattern (first translational rotational movement pattern) of the translational rotational movement of the mover 3 that moves translationally and rotationally along an oblique direction in the cylindrical space of the stator 2. In Figures 22 and 23, in the mover magnetic pole arrangement, a pair of N pole portion 33n and S pole portion 34s aligned in the axial direction X1 is referred to as the magnetic pole portion 32 of the first region MC1, and a pair of S pole portion 34s and N pole portion 33n adjacent to this first region MC1 in the circumferential direction C1 and aligned in the axial direction X1 is referred to as the magnetic pole portion 32 of the second region MC2, and the first translational rotational movement pattern will be explained with attention to the magnetic pole portion 32 of the first region MC1 (hereinafter simply referred to as the first region MC1) and the magnetic pole portion 32 of the second region MC2 (hereinafter simply referred to as the second region MC2).

また、固定子磁極配列では、可動子３の第１領域ＭＣ１及び第２領域ＭＣ２の並進回転動作第１パターンを実現する極性可変素子２２が配置された領域（図中、固定子磁極配列において横点線間の領域）を注目領域ＥＲ２とし、以下、この注目領域ＥＲ２に着目して並進回転動作第１パターン時における極性パターンの変化について説明する。 In addition, in the stator magnetic pole arrangement, the area in which the polarity variable element 22 that realizes the first pattern of translational rotational motion of the first region MC1 and the second region MC2 of the mover 3 is arranged (the area between the horizontal dotted lines in the stator magnetic pole arrangement in the figure) is designated as the attention area ER2, and below, the change in the polarity pattern during the first pattern of translational rotational motion will be explained with a focus on this attention area ER2.

なお、固定子磁極配列の注目領域ＥＲ２は、上述した「（３）回転動作」と同様に、３行３列に極性可変素子２２が配置された構成を基本構成とし、移動方向の目標位置を基準として、１行１列目の極性可変素子２２を極性可変素子Ｓ１１、１行２列目の極性可変素子２２を極性可変素子Ｓ１２、１行３列目の極性可変素子２２を極性可変素子Ｓ１３、２行１列目の極性可変素子２２を極性可変素子Ｓ２１、２行２列目の極性可変素子２２を極性可変素子Ｓ２２、２行３列目の極性可変素子２２を極性可変素子Ｓ２３、３行１列目の極性可変素子２２を極性可変素子Ｓ３１、３行２列目の極性可変素子２２を極性可変素子Ｓ３２、３行３列目の極性可変素子２２を極性可変素子Ｓ３３として説明する。 In addition, the focus area ER2 of the stator pole arrangement has a basic configuration in which the polarity variable elements 22 are arranged in 3 rows and 3 columns, as in the above-mentioned "(3) Rotational Operation", and with respect to the target position in the movement direction as a reference, the polarity variable element 22 in the 1st row, 1st column will be described as the polarity variable element S11 , the polarity variable element 22 in the 1st row, 2nd column will be described as the polarity variable element S12 , the polarity variable element 22 in the 1st row, 3rd column will be described as the polarity variable element S13 , the polarity variable element 22 in the 2nd row, 1st column will be described as the polarity variable element S21 , the polarity variable element 22 in the 2nd row, 2nd column will be described as the polarity variable element S22 , the polarity variable element 22 in the 2nd row, 3rd column will be described as the polarity variable element S23 , the polarity variable element 22 in the 3rd row, 1st column will be described as the polarity variable element S31 , the polarity variable element 22 in the 3rd row, 2nd column will be described as the polarity variable element S32 , and the polarity variable element 22 in the 3rd row, 3rd column will be described as the polarity variable element S33 .

並進回転動作第１パターンでは、チェッカーボード・パターン状に極性が異なる磁極部３２が２行２列に配置された４つの磁極部３２を斜め方向（軸方向Ｘ１と周方向Ｃ１との両方向に傾斜した斜め方向）に移動させる際の注目領域ＥＲ２での励磁方式が、当該注目領域ＥＲ２の極性可変素子２２のうち、軸方向Ｘ１及び周方向Ｃ１にそれぞれ並ぶ所定の第１相と第２相と第３相のうちの２つの相だけを励磁する２相励磁方式となっている。なお、ここでは、可動子３の動作説明を簡単にするために、２相励磁方式の並進回転動作第１パターンについて説明するが、本発明はこれに限らない。並進回転動作第１パターンでは、Ｎを２以上の正の数とした場合、Ｎ行Ｎ列に配置された磁極部３２を斜め方向に移動させる際の基本構成（注目領域ＥＲ２であり、（Ｎ+１）行（Ｎ+１）列に極性可変素子２２を配置した構成）での励磁方式はＮ相励磁方式（第１方式とも称する）となる。 In the first translational rotational motion pattern, the excitation method in the attention area ER2 when moving four magnetic pole parts 32 arranged in two rows and two columns with different polarities in a checkerboard pattern in a diagonal direction (diagonal directions inclined in both the axial direction X1 and the circumferential direction C1) is a two-phase excitation method that excites only two phases of the polarity-variable elements 22 in the attention area ER2, among the predetermined first phase, second phase, and third phase that are aligned in the axial direction X1 and the circumferential direction C1, respectively. Note that, in order to simplify the explanation of the operation of the mover 3, the first translational rotational motion pattern of the two-phase excitation method will be explained here, but the present invention is not limited to this. In the first translational rotational movement pattern, when N is a positive number equal to or greater than 2, the excitation method in the basic configuration (attention area ER2, configuration in which polarity variable elements 22 are arranged in (N+1) rows and (N+1) columns) when moving magnetic pole portions 32 arranged in N rows and N columns in a diagonal direction is the N-phase excitation method (also referred to as the first method).

始めに、図２２の並進回転動作第１パターン１に示すように、可動子３の第１領域ＭＣ１の移動方向に位置する、固定子２の１行１列目及び２行１列目の極性可変素子Ｓ１１，Ｓ２１を、無極性とする。そして、可動子３の第１領域ＭＣ１と対向する、固定子２の２行２列目及び３行２列目の極性可変素子Ｓ２２，Ｓ３２を、第１領域ＭＣ１と異なる極性として、可動子３の第１領域ＭＣ１を磁力により固定子２の２行２列目及び３行２列目の極性可変素子Ｓ２２，Ｓ３２に引き寄せる。これにより、可動子３の第１領域ＭＣ１部分を膨張（拡径）させ、可動子３の第１領域ＭＣ１を固定子２の内周面に接触させる（第１極性変更）。 First, as shown in the first translational rotational operation pattern 1 in Fig. 22, the polarity variable elements S11, S21 in the first row, first column and the second row, first column of the stator 2, which are located in the moving direction of the first region MC1 of the mover 3, are set to non-polar. Then, the polarity variable elements S22 , S32 in the second row, second column and the third row, second column of the stator 2, which face the first region MC1 of the mover 3, are set to a polarity different from that of the first region MC1, and the first region MC1 of the mover 3 is attracted to the polarity variable elements S22 , S32 in the second row, second column and the third row, second column of the stator 2 by magnetic force. This causes the first region MC1 of the mover 3 to expand (expand in diameter), and the first region MC1 of the mover 3 to contact the inner circumferential surface of the stator 2 (first polarity change).

また、可動子３の第２領域ＭＣ２と対向する、固定子２の２行３列目及び３行３列目の極性可変素子Ｓ２３，Ｓ３３を、第２領域ＭＣ２と異なる極性として、可動子３の第２領域ＭＣ２を磁力により固定子２の２行３列目及び３行３列目の極性可変素子Ｓ２３，Ｓ３３に引き寄せる。これにより、可動子３の第２領域ＭＣ２部分を膨張（拡径）させ、可動子３の第２領域ＭＣ２を固定子２の内周面に接触させる（第１極性変更）。 Furthermore, the polarity variable elements S23 , S33 in the second row, third column and the third row, third column of the stator 2, which face the second region MC2 of the mover 3, are set to a polarity different from that of the second region MC2, and the second region MC2 of the mover 3 is attracted by magnetic force to the polarity variable elements S23 , S33 in the second row, third column and the third row, third column of the stator 2. This causes the second region MC2 of the mover 3 to expand (expand in diameter), and the second region MC2 of the mover 3 to contact the inner circumferential surface of the stator 2 (first polarity change).

次に、図２２の並進回転動作第１パターン２に示すように、固定子２において極性切り替え１を行い、可動子３の第１領域ＭＣ１と対向する、固定子２の２行２列目及び３行２列目の極性可変素子Ｓ２２，Ｓ３２を、第１領域ＭＣ１と同じ極性とし、磁力により可動子３の第１領域ＭＣ１を固定子２の当該極性可変素子Ｓ２２，Ｓ３２から引き離す。これにより、可動子３の第１領域ＭＣ１部分を収縮（縮径）させ、可動子３の第１領域ＭＣ１を固定子２の内周面と非接触にさせる。 22 , polarity switching 1 is performed in the stator 2, the polarity variable elements S22, S32 in the second row, second column and the third row, second column of the stator 2, which face the first region MC1 of the mover 3, are set to the same polarity as the first region MC1, and the first region MC1 of the mover 3 is separated from the polarity variable elements S22, S32 of the stator 2 by magnetic force. This causes the first region MC1 of the mover 3 to contract (reduced in diameter), and the first region MC1 of the mover 3 is brought out of contact with the inner circumferential surface of the stator 2.

次に、図２２の並進回転動作第１パターン３に示すように、固定子２において極性切り替え２を行い、固定子２の２行２列目及び３行２列目の極性可変素子Ｓ２２，Ｓ３２を無極性とするとともに、可動子３の第１領域ＭＣ１の移動方向（ここでは、軸方向Ｘ１と周方向Ｃ１との両方向に対して傾斜した右斜め方向）に位置する、固定子２の１行１列目及び２行１列目の極性可変素子Ｓ１１，Ｓ２１を、第１領域ＭＣ１と異なる極性とする。 Next, as shown in the first translational rotation operation pattern 3 in Figure 22, polarity switching 2 is performed on the stator 2, and the polarity variable elements S22 , S32 in the second row, second column and the third row, second column of the stator 2 are made non-polar, and the polarity variable elements S11, S21 in the first row, first column and the second row, first column of the stator 2, which are located in the movement direction of the first region MC1 of the movable element 3 (here, a right diagonal direction inclined with respect to both the axial direction X1 and the circumferential direction C1 ), are made to have a polarity different from that of the first region MC1.

これにより、可動子３の第１領域ＭＣ１は、固定子２の１行１列目及び２行１列目の極性可変素子Ｓ１１，Ｓ２１に引き寄せられる磁力（可変素子３１が弾性部材である場合には、移動方向側の可変部３５が伸長していたことによる移動方向側への復元力（推進力）も）により、固定子２の当該極性可変素子Ｓ１１，Ｓ２１に引き寄せられ、斜め方向に移動する。これにより、可動子３の第１領域ＭＣ１部分を、固定子２の１行１列目及び２行１列目の極性可変素子Ｓ１１，Ｓ２１部分で膨張（拡径）させて固定子２の内周面に接触させる（第２極性変更）。 As a result, the first region MC1 of the mover 3 is attracted to the polarity variable elements S11 , S21 of the stator 2 by a magnetic force (and, if the variable element 31 is an elastic member, a restoring force (propulsion force) in the direction of movement caused by the extension of the variable part 35 on the direction of movement side) which attracts the polarity variable elements S11 , S21 of the stator 2 in the first row, first column and the second row, first column of the stator 2, and moves in a diagonal direction. As a result, the first region MC1 of the mover 3 expands (increases in diameter) at the polarity variable elements S11 , S21 of the first row, first column and the second row, first column of the stator 2, and comes into contact with the inner circumferential surface of the stator 2 (second polarity change).

可変素子３１が弾性部材である場合、可動子３では、第１領域ＭＣ１が周方向Ｃ１に移動することで、第１領域ＭＣ１と第２領域ＭＣ２とが離れ、これら第１領域ＭＣ１と第２領域ＭＣ２との間の可変部３５が移動方向である周方向Ｃ１に伸長し、移動方向側への推進力が生じた状態になることが望ましい。 When the variable element 31 is an elastic member, it is desirable that in the movable member 3, as the first region MC1 moves in the circumferential direction C1, the first region MC1 and the second region MC2 move apart, and the variable portion 35 between the first region MC1 and the second region MC2 stretches in the circumferential direction C1, which is the direction of movement, and a propulsive force is generated in the direction of movement.

次に、図２３の並進回転動作第１パターン４に示すように、固定子２において極性切り替え３を行い、固定子２の２行３列目及び３行３列目の極性可変素子Ｓ２３，Ｓ３３を、可動子３の第２領域ＭＣ２と同じ極性とし、可動子３の第２領域ＭＣ２を、固定子２の２行３列目及び３行３列目の極性可変素子Ｓ２３，Ｓ３３から引き離す。これにより、可動子３の第２領域ＭＣ２部分を収縮（縮径）させ、可動子３の第２領域ＭＣ２を固定子２の内周面と非接触にさせる。 23 , polarity switching 3 is performed in the stator 2 to set the polarity variable elements S23 , S33 in the second row, third column and the third row, third column of the stator 2 to the same polarity as the second region MC2 of the mover 3, and separate the second region MC2 of the mover 3 from the polarity variable elements S23 , S33 in the second row, third column and the third row, third column of the stator 2. This causes the second region MC2 of the mover 3 to contract (reduced in diameter), and the second region MC2 of the mover 3 to be out of contact with the inner circumferential surface of the stator 2.

次に、図２３の並進回転動作第１パターン５に示すように、固定子２において極性切り替え４を行い、固定子２の２行３列目及び３行３列目の極性可変素子Ｓ２３，Ｓ３３を無極性とし、可動子３の第２領域ＭＣ２の移動方向である斜め方向に位置する、固定子２の１行２列目及び２行２列目の極性可変素子Ｓ１２，Ｓ２２を、第２領域ＭＣ２と異なる極性とする。 Next, as shown in the first translational rotation operation pattern 5 of Figure 23, polarity switching 4 is performed on the stator 2, so that the polarity variable elements S23 , S33 in the second row, third column and the third row, third column of the stator 2 are made non-polar, and the polarity variable elements S12, S22 in the first row, second column and the second row, second column of the stator 2, which are located in the diagonal direction that is the movement direction of the second region MC2 of the movable element 3 , are made to have a polarity different from that of the second region MC2.

これにより、可動子３の第２領域ＭＣ２は、固定子２の１行２列目及び２行２列目の極性可変素子Ｓ１２，Ｓ２２に引き寄せられる磁力（可変素子３１が弾性部材である場合には、可動子３の可変部３５が伸長していたことによる移動方向側への復元力も）により、固定子２の当該極性可変素子Ｓ１２，Ｓ２２に引き寄せられ、斜め方向に移動する。そして、可動子３の第２領域ＭＣ２部分を、固定子２の１行２列目及び２行２列目の極性可変素子Ｓ１２，Ｓ２２部分で膨張（拡径）させて固定子２の内周面に接触させる（第３極性変更）。 As a result, the second region MC2 of the mover 3 is attracted to the polarity variable elements S12 , S22 of the stator 2 by a magnetic force (and, if the variable element 31 is an elastic member, a restoring force in the direction of movement due to the extension of the variable part 35 of the mover 3) that is attracted to the polarity variable elements S12 , S22 in the first row, second column and the second row, second column of the stator 2, and moves in a diagonal direction. Then, the second region MC2 of the mover 3 is expanded (increased in diameter) at the polarity variable elements S12 , S22 in the first row, second column and the second row, second column of the stator 2, and is brought into contact with the inner circumferential surface of the stator 2 (third polarity change).

このようにして、ソフトアクチュエータ１は、固定子２の注目領域ＥＲ２毎にそれぞれ極性可変素子Ｓ１１，Ｓ１２，Ｓ１３，Ｓ２１，Ｓ２２，Ｓ２３，Ｓ３１，Ｓ３２，Ｓ３３の極性切り替えが行われることで、可動子３の第１領域ＭＣ１を斜め方向に移動させて固定子２の面に接触させた後に、第２領域ＭＣ２を固定子２の面と非接触にして第１領域ＭＣ１に近づけるように斜め方向に移動させ、第２領域ＭＣ２を固定子２の面に接触させる。これにより、ソフトアクチュエータ１では、可動子３がこのような尺取虫状の動作を繰り返し行い、固定子２の面に沿って可動子３を斜め方向に向けて並進回転させてゆくことができる。 In this way, the soft actuator 1 switches the polarity of the polarity variable elements S11 , S12 , S13 , S21 , S22 , S23 , S31 , S32 , and S33 for each region of interest ER2 of the stator 2, and then moves the first region MC1 of the mover 3 in an oblique direction to contact the surface of the stator 2, and then moves the second region MC2 in an oblique direction so as to approach the first region MC1 without contacting the surface of the stator 2, and brings the second region MC2 into contact with the surface of the stator 2. As a result, in the soft actuator 1, the mover 3 repeats such an inchworm-like operation, and the mover 3 can be translated and rotated in an oblique direction along the surface of the stator 2.

（４－２）並進回転動作第２パターン
次に、上述した並進回転動作第１パターンとは異なる、可動子３の並進回転動作の第２パターン（並進回転動作第２パターン）について説明する。図２４、図２５及び図２６は、固定子２の筒内空間において斜め方向（ここでは、軸方向Ｘ１と周方向Ｃ１との両方向に対して傾斜した右斜め方向）に移動する可動子３の並進回転動作第２パターンを説明するための概略図である。なお、固定子磁極配列、可動子磁極配列、注目領域ＥＲ２、極性可変素子Ｓ１１，Ｓ１２，Ｓ１３，Ｓ２１，Ｓ２２，Ｓ２３，Ｓ３１，Ｓ３２，Ｓ３３などについては上述した「（４－１）並進回転動作第１パターン」と同じであるため、ここではその説明は省略する。 (4-2) Second Translational Rotational Movement Pattern Next, a second translational rotational movement pattern (second translational rotational movement pattern) of the mover 3, which is different from the first translational rotational movement pattern described above, will be described. Figures 24, 25, and 26 are schematic diagrams for explaining the second translational rotational movement pattern of the mover 3, which moves in an oblique direction (here, a right oblique direction inclined with respect to both the axial direction X1 and the circumferential direction C1) in the cylinder space of the stator 2. Note that the stator magnetic pole arrangement, the mover magnetic pole arrangement, the attention area ER2, the polarity variable elements S 11 , S 12 , S 13 , S 21 , S 22 , S 23 , S 31 , S 32 , S 33 , etc. are the same as those in the above-mentioned "(4-1) First Translational Rotational Movement Pattern", so their description will be omitted here.

並進回転動作第２パターンでは、チェッカーボード・パターン状に極性が異なる磁極部３２が２行２列に配置された４つの磁極部３２を斜め方向に移動させる際の注目領域ＥＲ２での励磁方式が、軸方向Ｘ１への移動時に２相励磁方式となっており、かつ、周方向Ｃ１への移動時に２－３相励磁方式となっている。すなわち、軸方向Ｘ１への移動時は、注目領域ＥＲ２の極性可変素子２２のうち、軸方向Ｘ１に並ぶ所定の第１相と第２相と第３相のうちの２つの相だけを同時に励磁する２相励磁方式となっている。周方向Ｃ１への移動時は、注目領域ＥＲ２の極性可変素子２２のうち、周方向Ｃ１に並ぶ所定の第１相と第２相と第３相のうちの２つの相だけを同時に励磁する２相励磁方式と、周方向Ｃ１に並ぶ所定の第１相と第２相と第３相の３つの相を同時に励磁する３相励磁方式とが繰り返される２－３相励磁方式となっている。 In the second translational rotational motion pattern, the excitation method in the attention area ER2 when the four magnetic pole parts 32 arranged in two rows and two columns with different polarities in a checkerboard pattern are moved diagonally is a two-phase excitation method when moving in the axial direction X1, and a two-phase excitation method when moving in the circumferential direction C1. That is, when moving in the axial direction X1, the two-phase excitation method is used to simultaneously excite only two of the predetermined first, second, and third phases aligned in the axial direction X1 among the polarity variable elements 22 in the attention area ER2. When moving in the circumferential direction C1, the two-phase excitation method is used to simultaneously excite only two of the predetermined first, second, and third phases aligned in the circumferential direction C1 among the polarity variable elements 22 in the attention area ER2, and a three-phase excitation method is used to simultaneously excite three of the predetermined first, second, and third phases aligned in the circumferential direction C1, which is repeated in a two-phase excitation method.

なお、ここでは、可動子３の動作説明を簡単にするために、軸方向Ｘ１への移動時に２相励磁方式とし周方向Ｃ１への移動時に２－３相励磁方式の並進回転動作第２パターンについて説明するが、本発明はこれに限らない。並進回転動作第２パターンでは、Ｎを２以上の正の数とした場合、Ｎ行Ｎ列に配置された磁極部３２を斜め方向に移動させる際の基本構成（（Ｎ+１）行（Ｎ+１）列に極性可変素子２２を配置した構成）での励磁方式は、軸方向Ｘ１への移動時にＮ相励磁方式となり、周方向Ｃ１への移動時にＮ相励磁方式と（Ｎ+１）相励磁方式とが繰り返されるＮ－（Ｎ＋１）相励磁方式（第２方式とも称する）となる(－は、Ｎ相励磁と（Ｎ+１）相励磁とを繰り返すことを示すハイフンである)。 In order to simplify the explanation of the operation of the mover 3, the second translational rotational operation pattern will be explained, in which the 2-phase excitation method is used when moving in the axial direction X1 and the 2-3-phase excitation method is used when moving in the circumferential direction C1, but the present invention is not limited to this. In the second translational rotational operation pattern, when N is a positive number of 2 or more, the excitation method in the basic configuration (configuration in which the polarity variable elements 22 are arranged in (N+1) rows and (N+1) columns) when moving the magnetic pole parts 32 arranged in N rows and N columns in a diagonal direction is the N-phase excitation method when moving in the axial direction X1, and the N-(N+1)-phase excitation method (also referred to as the second method) in which the N-phase excitation method and the (N+1)-phase excitation method are repeated when moving in the circumferential direction C1 (- is a hyphen indicating that the N-phase excitation and the (N+1)-phase excitation are repeated).

図２４の並進回転動作第２パターン１は、上述した図２２の並進回転動作第１パターン１と同様の状態であり、固定子２の２行２列目及び３行２列目の極性可変素子Ｓ２２，Ｓ３２を、可動子３の第１領域ＭＣ１と異なる極性とし、固定子２の２行３列目及び３行３列目の極性可変素子Ｓ２３，Ｓ３３を、第２領域ＭＣ２と異なる極性として、可動子３の第１領域ＭＣ１及び第２領域ＭＣ２を、磁力により膨張（拡径）させて固定子２の内周面に接触させる（第１極性変更）。 The second pattern 1 of translational rotation operation in Figure 24 is in the same state as the first pattern 1 of translational rotation operation in Figure 22 described above, where the polarity variable elements S22 , S32 in the second row, second column and the third row, second column of the stator 2 are set to a polarity different from that of the first region MC1 of the movable member 3, and the polarity variable elements S23 , S33 in the second row, third column and the third row, third column of the stator 2 are set to a polarity different from that of the second region MC2, and the first region MC1 and second region MC2 of the movable member 3 are expanded (increased in diameter) by magnetic force to contact the inner surface of the stator 2 (first polarity change).

次に、図２４の並進回転動作第２パターン２に示すように、固定子２において極性切り替え１を行い、可動子３の第１領域ＭＣ１と対向する、固定子２の２行２列目及び３行２列目の極性可変素子Ｓ２２，Ｓ３２を、第１領域ＭＣ１と同じ極性とし、磁力により可動子３の第１領域ＭＣ１を固定子２の当該極性可変素子Ｓ２２，Ｓ３２から引き離す。これにより、可動子３の第１領域ＭＣ１部分を収縮（縮径）させ、可動子３の第１領域ＭＣ１を固定子２の内周面と非接触にさせる。 24 , polarity switching 1 is performed in the stator 2, the polarity variable elements S22, S32 in the second row, second column and the third row, second column of the stator 2, which face the first region MC1 of the mover 3, are set to the same polarity as the first region MC1, and the first region MC1 of the mover 3 is separated from the polarity variable elements S22, S32 of the stator 2 by magnetic force. This causes the first region MC1 of the mover 3 to contract (reduced in diameter), and the first region MC1 of the mover 3 is brought out of contact with the inner circumferential surface of the stator 2.

次に、図２４の並進回転動作第２パターン３に示すように、固定子２において極性切り替え２を行い、固定子２の２行２列目の極性可変素子Ｓ２２を無極性とし、可動子３の第１領域ＭＣ１の移動方向に位置する、固定子２の１行１列目及び１行２列目の極性可変素子Ｓ１１，Ｓ１２と、固定子２の３行１列目及び３行２列目の極性可変素子Ｓ３１，Ｓ３２とを、第１領域ＭＣ１と異なる極性とする。 Next, as shown in the second translational rotation operation pattern 3 in Figure 24, polarity switching 2 is performed on the stator 2, the polarity variable element S22 in the second row, second column of the stator 2 is made non-polar, and the polarity variable elements S11 , S12 in the first row, first column and the first row, second column of the stator 2, and the polarity variable elements S31 , S32 in the third row, first column and the third row, second column of the stator 2, which are located in the movement direction of the first region MC1 of the movable element 3, are made to have a polarity different from that of the first region MC1.

これにより、可動子３の第１領域ＭＣ１における一方の磁極部３２（ここでは、Ｎ極部３３ｎ）は、磁力（可変素子３１が弾性部材である場合には、移動方向側の可変部３５が伸長していたことによる移動方向側への復元力（推進力）も）によって、固定子２の１行１列目及び１行２列目の極性可変素子Ｓ１１，Ｓ１２を跨いだ中間領域ＥＲ１５に引き寄せられ、可動子３の第１領域ＭＣ１における他方の磁極部３２（ここでは、Ｓ極部３４ｓ）も、固定子２の３行１列目及び３行２列目の極性可変素子Ｓ３１，Ｓ３２を跨いだ中間領域ＥＲ１６に引き寄せられる。 As a result, one of the magnetic pole portions 32 (here, the N-pole portion 33n) in the first region MC1 of the movable member 3 is attracted to an intermediate region ER15 straddling the polarity variable elements S11, S12 in the first row, first column and the second row, first column of the stator 2 by magnetic force (and, if the variable element 31 is an elastic member, also by a restoring force (propulsion force) in the direction of movement due to the extension of the variable portion 35 on the direction of movement side), and the other magnetic pole portion 32 (here, the S-pole portion 34s) in the first region MC1 of the movable member 3 is attracted to an intermediate region ER16 straddling the polarity variable elements S31 , S32 in the first row, first column and the second row, third column of the stator 2.

このようにして、可動子３の第１領域ＭＣ１部分を、斜め方向に位置する固定子２の中間領域ＥＲ１５，ＥＲ１６部分まで移動させ、中間領域ＥＲ１５，ＥＲ１６部分で膨張（拡径）させて固定子２の内周面に接触させる（第２極性変更）。 In this way, the first region MC1 of the mover 3 is moved to the intermediate regions ER15, ER16 of the stator 2 located diagonally, and expanded (diameter enlarged) in the intermediate regions ER15, ER16 to come into contact with the inner circumferential surface of the stator 2 (second polarity change).

なお、可変素子３１が弾性部材である場合、可動子３では、第１領域ＭＣ１が斜め方向に移動した際に、第１領域ＭＣ１と第２領域ＭＣ２との間を離して可変部３５を伸長させ、移動方向である斜め方向側への推進力が生じた状態になることが望ましい。 When the variable element 31 is an elastic member, it is desirable that when the first region MC1 of the movable element 3 moves in an oblique direction, the first region MC1 and the second region MC2 are separated and the variable portion 35 is extended, generating a propulsive force in the oblique direction, which is the direction of movement.

次に、図２５の並進回転動作第２パターン４に示すように、固定子２において極性切り替え３を行い、固定子２の２行３列目及び３行３列目の極性可変素子Ｓ２３，Ｓ３３を、可動子３の第２領域ＭＣ２と同じ極性とし、可動子３の第２領域ＭＣ２を、磁力により固定子２の２行３列目及び３行３列目の極性可変素子Ｓ２３，Ｓ３３から引き離す。これにより、可動子３の第２領域ＭＣ２部分を収縮（縮径）させ、可動子３の第２領域ＭＣ２を固定子２の内周面と非接触にさせる。 25 , polarity switching 3 is performed in the stator 2, the polarity variable elements S23 , S33 in the second row, third column and the third row, third column of the stator 2 are made to have the same polarity as the second region MC2 of the mover 3, and the second region MC2 of the mover 3 is separated from the polarity variable elements S23 , S33 in the second row, third column and the third row, third column of the stator 2 by magnetic force. This causes the second region MC2 of the mover 3 to contract (reduced in diameter), and the second region MC2 of the mover 3 is brought out of contact with the inner circumferential surface of the stator 2.

次に、図２５の並進回転動作第２パターン５に示すように、固定子２において極性切り替え４を行い、固定子２の２行３列目及び３行３列目の極性可変素子Ｓ２３，Ｓ３３を無極性とし、可動子３の第２領域ＭＣ２の移動方向に位置する、固定子２の１行２列目及び３行２列目の極性可変素子Ｓ１２，Ｓ３２を、第２領域ＭＣ２と異なる極性とする。 Next, as shown in the second translational rotation operation pattern 5 of Figure 25, polarity switching 4 is performed on the stator 2, so that the polarity variable elements S23 , S33 in the second row, third column and the third row, third column of the stator 2 are made non-polar, and the polarity variable elements S12 , S32 in the first row, second column and the third row, second column of the stator 2, which are located in the movement direction of the second region MC2 of the movable element 3, are made to have a polarity different from that of the second region MC2.

これにより、可動子３の第２領域ＭＣ２における一方の磁極部３２（ここでは、Ｓ極部３４ｓ）は、伸長していた可変部３５の移動方向側への復元力と磁力とによって、極性が異なる１行２列目の極性可変素子Ｓ１２に引き寄せられる。この際、固定子２の１行２列目の極性可変素子Ｓ１２の一部領域には、可動子３の第１領域ＭＣ１の一部領域が位置していることから、可動子３の第２領域ＭＣ２は、固定子２の１行２列目及び１行３列目の極性可変素子Ｓ１２，Ｓ１３を跨いだ中間領域ＥＲ１７に位置する。 As a result, one of the magnetic pole portions 32 (here, the S-pole portion 34s) in the second region MC2 of the mover 3 is attracted to the polarity variable element S12 in the first row and second column, which has a different polarity, by the magnetic force and the restoring force toward the moving direction of the extended variable portion 35. At this time, since a partial region of the first region MC1 of the mover 3 is located in a partial region of the polarity variable element S12 in the first row and second column of the stator 2, the second region MC2 of the mover 3 is located in an intermediate region ER17 that straddles the polarity variable elements S12 and S13 in the first row, second column and the first row, third column of the stator 2.

同様に、可動子３の第２領域ＭＣ２における他方の磁極部３２（ここでは、Ｎ極部３３ｎ）は、磁力（可変素子３１が弾性部材である場合には、可動子３の可変部３５が伸長していたことによる移動方向側への復元力も）によって、極性が異なる３行２列目の極性可変素子Ｓ３２に引き寄せられる。この際、固定子２の３行２列目の極性可変素子Ｓ３２の一部領域には、可動子３の第１領域ＭＣ１の一部領域が位置していることから、可動子３の第２領域ＭＣ２は、固定子２の３行２列目及び３行３列目の極性可変素子Ｓ３２，Ｓ３３を跨いだ中間領域ＥＲ１８に位置する。 Similarly, the other magnetic pole portion 32 (here, the N-pole portion 33n) in the second region MC2 of the mover 3 is attracted to the polarity variable element S32 in the 3rd row and 2nd column, which has a different polarity, by a magnetic force (and also by a restoring force in the moving direction caused by the extension of the variable portion 35 of the mover 3, if the variable element 31 is an elastic member). At this time, since a partial region of the first region MC1 of the mover 3 is located in a partial region of the polarity variable element S32 in the 3rd row and 2nd column of the stator 2, the second region MC2 of the mover 3 is located in an intermediate region ER18 that straddles the polarity variable elements S32 and S33 in the 3rd row and 2nd column and the 3rd row and 3rd column of the stator 2.

これにより、可動子３の第２領域ＭＣ２部分を、磁力によって固定子２の１行２列目及び３行２列目の極性可変素子Ｓ１２，Ｓ３２の一部領域でそれぞれ膨張（拡径）させて固定子２の内周面に接触させる（第３極性変更）。なお、このとき、可動子３の第１領域ＭＣ１は、極性が同じ、固定子２の１行２列目及び３行２列目の極性可変素子Ｓ１２，Ｓ３２にも位置するが、極性が異なる、固定子２の１行１列目及び３行１列目の極性可変素子Ｓ１１，Ｓ３１にも磁力により引き寄せられているため、固定子２の内周面と接触した状態を維持する。 As a result, the second region MC2 of the mover 3 is expanded (increased in diameter) by the magnetic force in a partial region of the polarity variable elements S12 , S32 in the first row, second column and the third row, second column of the stator 2, respectively, and brought into contact with the inner peripheral surface of the stator 2 (third polarity change). Note that at this time, the first region MC1 of the mover 3 is also located in the polarity variable elements S12 , S32 in the first row, second column and the third row, second column of the stator 2, which have the same polarity, but is also attracted by the magnetic force to the polarity variable elements S11 , S31 in the first row, first column and the third row, first column of the stator 2, which have different polarity, and therefore maintains a state of contact with the inner peripheral surface of the stator 2.

次に、図２５の並進回転動作第２パターン６に示すように、固定子２において極性切り替え５を行い、可動子３の第１領域ＭＣ１が位置する中間領域ＥＲ１５，ＥＲ１６内にある、固定子２の１行１列目及び３行１列目の極性可変素子Ｓ１１，Ｓ３１を、可動子３の第１領域ＭＣ１と同じ極性とする。また、極性切り替え５では、固定子２の１行２列目及び３行２列目の極性可変素子Ｓ１２，Ｓ３２を無極性とする。さらに、極性切り替え５では、可動子３の第２領域ＭＣ２が位置する中間領域ＥＲ１７，ＥＲ１８内にある、固定子２の１行３列目及び３行３列目の極性可変素子Ｓ１３，Ｓ３３を、可動子３の第２領域ＭＣ２と異なる極性とする。 25, polarity switching 5 is performed on the stator 2, and the polarity variable elements S11, S31 in the first row, first column and the third row, first column of the stator 2, which are located in the intermediate regions ER15, ER16 where the first region MC1 of the mover 3 is located, are set to the same polarity as the first region MC1 of the mover 3. Also, in polarity switching 5, the polarity variable elements S12 , S32 in the first row, second column and the third row, second column of the stator 2 are set to non-polar. Furthermore, in polarity switching 5, the polarity variable elements S13 , S33 in the first row, third column and the third row, third column of the stator 2, which are located in the intermediate regions ER17 , ER18 where the second region MC2 of the mover 3 is located, are set to a polarity different from that of the second region MC2 of the mover 3.

これにより、可動子３の第１領域ＭＣ１を、固定子２の１行１列目及び３行１列目の極性可変素子Ｓ１１，Ｓ３１の一部領域から引き離すことで、可動子３の第１領域ＭＣ１部分を収縮（縮径）させ、可動子３の第１領域ＭＣ１を固定子２の内周面と非接触にさせる。 As a result, the first region MC1 of the mover 3 is separated from a portion of the polarity variable elements S11 and S31 in the first row, first column and the third row, first column of the stator 2, thereby causing the first region MC1 of the mover 3 to shrink (reduced in diameter) and bringing the first region MC1 of the mover 3 out of contact with the inner surface of the stator 2.

また、可動子３の第２領域ＭＣ２を、固定子２の１行３列目及び３行３列目の極性可変素子Ｓ１３，Ｓ３３の一部領域に引き寄せ、可動子３の第２領域ＭＣ２部分を膨張（拡径）させ、可動子３の第２領域ＭＣ２を固定子２の内周面と接触させる。 In addition, the second region MC2 of the mover 3 is attracted to a portion of the polarity variable elements S13 and S33 in the first row, third column and the third row, third column of the stator 2, causing the second region MC2 of the mover 3 to expand (increase in diameter), and bringing the second region MC2 of the mover 3 into contact with the inner surface of the stator 2.

次に、図２６の並進回転動作第２パターン７に示すように、固定子２において極性切り替え６を行い、固定子２の１行２列目及び３行２列目の極性可変素子Ｓ１２，Ｓ３２を、可動子３の第２領域ＭＣ２と異なる極性とし、固定子２の１行１列目及び２行１列目の極性可変素子Ｓ１１，Ｓ２１を、可動子３の第１領域ＭＣ１と異なる極性とする。 Next, as shown in the second translational rotation operation pattern 7 of Figure 26, polarity switching 6 is performed in the stator 2, and the polarity variable elements S12 , S32 in the 1st row, 2nd column and the 3rd row, 2nd column of the stator 2 are set to have a polarity different from that of the second region MC2 of the mover 3, and the polarity variable elements S11 , S21 in the 1st row, 1st column and the 2nd row, 1st column of the stator 2 are set to have a polarity different from that of the first region MC1 of the mover 3.

これにより、可動子３の第２領域ＭＣ２は、固定子２の中間領域ＥＲ１７，ＥＲ１８で磁力により膨張（拡径）され、固定子２の内周面と接触する。また、可動子３の第１領域ＭＣ１は、磁力（可変素子３１が弾性部材である場合には、可動子３の可変部３５が伸長していたことによる移動方向側への復元力も）によって、固定子２の１行１列目及び２行１列目の極性可変素子Ｓ１１，Ｓ２１に引き寄せられ、右斜め方向に移動する。これにより、可動子３の第１領域ＭＣ１部分を、固定子２の１行１列目及び２行１列目の極性可変素子Ｓ１１，Ｓ２１部分で膨張（拡径）させて固定子２の内周面に接触させる。 As a result, the second region MC2 of the mover 3 is expanded (expanded in diameter) by the magnetic force in the intermediate regions ER17, ER18 of the stator 2, and comes into contact with the inner peripheral surface of the stator 2. Also, the first region MC1 of the mover 3 is attracted to the polarity variable elements S11, S21 in the first row, first column and the second row, first column of the stator 2 by the magnetic force (and the restoring force in the moving direction due to the extension of the variable part 35 of the mover 3, if the variable element 31 is an elastic member), and moves in a rightward diagonal direction. As a result, the first region MC1 of the mover 3 is expanded (expanded in diameter) in the polarity variable elements S11 , S21 in the first row, first column and the second row, first column of the stator 2, and comes into contact with the inner peripheral surface of the stator 2.

次に、図２６の並進回転動作第２パターン８に示すように、固定子２において極性切り替え７を行い、固定子２の１行２列目及び１行３列目の極性可変素子Ｓ１２，Ｓ１３と、固定子２の３行２列目及び３行３列目の極性可変素子Ｓ３２，Ｓ３３と、を可動子３の第２領域ＭＣ２と同じ極性とし、可動子３の第２領域ＭＣ２を、固定子２の中間領域ＥＲ１７，ＥＲ１８から引き離す。これにより、可動子３の第２領域ＭＣ２部分を収縮（縮径）させ、可動子３の第２領域ＭＣ２を固定子２の内周面と非接触にさせる。 26 , polarity switching 7 is performed in the stator 2 to set the polarity variable elements S12 , S13 in the 1st row, 2nd column and the 1st row, 3rd column of the stator 2 and the polarity variable elements S32, S33 in the 3rd row, 2nd column and the 3rd row, 3rd column of the stator 2 to the same polarity as the second region MC2 of the mover 3, and separate the second region MC2 of the mover 3 from the intermediate regions ER17, ER18 of the stator 2. This causes the second region MC2 of the mover 3 to contract (reduced in diameter), and the second region MC2 of the mover 3 is brought out of contact with the inner circumferential surface of the stator 2.

次に、図２６の回転動作第２パターン９に示すように、固定子２において極性切り替え８を行い、固定子２の１行２列目及び２行２列目の極性可変素子Ｓ１２，Ｓ２２を、可動子３の第２領域ＭＣ２と異なる極性とし、固定子２の１行３列目及び３行３列目の極性可変素子Ｓ１３，Ｓ３３を無極性とする。これにより、可動子３の第２領域ＭＣ２は、磁力（可変素子３１が弾性部材である場合には、可動子３の可変部３５が伸長していたことによる移動方向側への復元力も）によって、固定子２の１行２列目及び２行２列目の極性可変素子Ｓ１２，Ｓ２２に引き寄せられ、右斜め方向に移動する。このようにして、可動子３の第２領域ＭＣ２部分を、固定子２の１行２列目及び２行２列目の極性可変素子Ｓ１２，Ｓ２２部分まで移動させて、固定子２の１行２列目及び２行２列目の極性可変素子Ｓ１２，Ｓ２２で膨張（拡径）させ、固定子２の内周面に接触させる。 26, polarity switching 8 is performed in the stator 2, the polarity variable elements S12 , S22 in the first row, second column and the second row, second column of the stator 2 are set to a polarity different from that of the second region MC2 of the mover 3, and the polarity variable elements S13, S33 in the first row, third column and the third row, third column of the stator 2 are set to a non-polarity. As a result, the second region MC2 of the mover 3 is attracted to the polarity variable elements S12 , S22 in the first row, second column and the second row, second column of the stator 2 by a magnetic force (and a restoring force in the moving direction due to the extension of the variable part 35 of the mover 3 in the case where the variable element 31 is an elastic member), and moves in a right diagonal direction. In this manner, the second region MC2 portion of the movable member 3 is moved to the polarity variable elements S12 , S22 portions in the first row, second column and the second row, second column of the stator 2, and is expanded (increased in diameter) by the polarity variable elements S12 , S22 in the first row, second column and the second row, second column of the stator 2, and is brought into contact with the inner circumferential surface of the stator 2.

以上、ソフトアクチュエータ１では、固定子２の注目領域ＥＲ２毎にそれぞれ極性可変素子Ｓ１１，Ｓ１２，Ｓ１３，Ｓ２１，Ｓ２２，Ｓ２３，Ｓ３１，Ｓ３２，Ｓ３３の極性切り替えが行われることで、可動子３の第１領域ＭＣ１を斜め方向に移動させて固定子２の面に接触させた後に、第２領域ＭＣ２を固定子２の面と非接触にして第１領域ＭＣ１に近づけるように斜め方向に移動させ、第２領域ＭＣ２を固定子２の面に接触させる。これにより、ソフトアクチュエータ１では、可動子３がこのような尺取虫状の動作を繰り返し行い、固定子２の面に沿って可動子３を斜め方向に並進回転させてゆくことができる。 As described above, in the soft actuator 1, the polarity of the polarity variable elements S11 , S12 , S13 , S21 , S22 , S23 , S31 , S32 , and S33 is switched for each region of interest ER2 of the stator 2, whereby the first region MC1 of the mover 3 is moved in an oblique direction to contact the surface of the stator 2, and then the second region MC2 is moved in an oblique direction so as to approach the first region MC1 without contacting the surface of the stator 2, and the second region MC2 is brought into contact with the surface of the stator 2. As a result, in the soft actuator 1, the mover 3 repeats such an inchworm-like operation, and the mover 3 can be translated and rotated in an oblique direction along the surface of the stator 2.

また、この並進回転動作第２パターンでは、可動子３の第１領域ＭＣ１及び第２領域ＭＣ２を斜め方向へ移動させる移動量を並進回転動作第１パターンよりも小さくすることができる。 In addition, in this second translational-rotational motion pattern, the amount of diagonal movement of the first region MC1 and the second region MC2 of the mover 3 can be made smaller than in the first translational-rotational motion pattern.

（４－３）並進回転動作第３パターン
次に、上述した並進回転動作第１パターン及び並進回転動作第２パターンとは異なる、可動子３の並進回転動作の第３パターン（並進回転動作第３パターン）について説明する。図２７、図２８及び図２９は、固定子２の筒内空間において斜め方向（ここでは、軸方向Ｘ１と周方向Ｃ１との両方向に対して傾斜した右斜め方向）に移動する可動子３の並進回転動作第３パターンを説明するための概略図である。なお、固定子磁極配列、可動子磁極配列、注目領域ＥＲ２、極性可変素子Ｓ１１，Ｓ１２，Ｓ１３，Ｓ２１，Ｓ２２，Ｓ２３，Ｓ３１，Ｓ３２，Ｓ３３などについては上述した「（４－１）並進回転動作第１パターン」と同じであるため、ここではその説明は省略する。 (4-3) Third Translational Rotational Movement Pattern Next, a third translational rotational movement pattern (third translational rotational movement pattern) of the mover 3, which is different from the first translational rotational movement pattern and the second translational rotational movement pattern described above, will be described. Figures 27, 28, and 29 are schematic diagrams for explaining the third translational rotational movement pattern of the mover 3, which moves in an oblique direction (here, a right oblique direction inclined with respect to both the axial direction X1 and the circumferential direction C1) in the cylinder space of the stator 2. Note that the stator magnetic pole arrangement, the mover magnetic pole arrangement, the attention area ER2, the polarity variable elements S 11 , S 12 , S 13 , S 21 , S 22 , S 23 , S 31 , S 32 , S 33 , etc. are the same as those in the above-mentioned "(4-1) First Translational Rotational Movement Pattern", so their description will be omitted here.

並進回転動作第３パターンでは、チェッカーボード・パターン状に極性が異なる磁極部３２が２行２列に配置された４つの磁極部３２を斜め方向に移動させる際の注目領域ＥＲ２での励磁方式が、軸方向Ｘ１への移動時に２相励磁方式となっており、かつ、周方向Ｃ１への移動時に２－３相励磁方式となっている。すなわち、軸方向Ｘ１への移動時は、注目領域ＥＲ２の極性可変素子２２のうち、軸方向Ｘ１に並ぶ所定の第１相と第２相と第３相のうちの２つの相だけを同時に励磁する２相励磁方式となっている。周方向Ｃ１への移動時は、注目領域ＥＲ２の極性可変素子２２のうち、周方向Ｃ１に並ぶ所定の第１相と第２相と第３相のうちの２つの相だけを同時に励磁する２相励磁方式と、周方向Ｃ１に並ぶ所定の第１相と第２相と第３相の３つの相を同時に励磁する３相励磁方式とが繰り返される２－３相励磁方式となっている。 In the third translational rotational motion pattern, the excitation method in the attention area ER2 when the four magnetic pole parts 32 arranged in two rows and two columns with different polarities in a checkerboard pattern are moved diagonally is a two-phase excitation method when moving in the axial direction X1, and a two-phase excitation method when moving in the circumferential direction C1. That is, when moving in the axial direction X1, the two-phase excitation method is used to simultaneously excite only two of the predetermined first, second, and third phases aligned in the axial direction X1 among the polarity variable elements 22 in the attention area ER2. When moving in the circumferential direction C1, the two-phase excitation method is used to simultaneously excite only two of the predetermined first, second, and third phases aligned in the circumferential direction C1 among the polarity variable elements 22 in the attention area ER2, and a three-phase excitation method is used to simultaneously excite three of the predetermined first, second, and third phases aligned in the circumferential direction C1, in a two-phase excitation method that is repeated.

なお、ここでは、可動子３の動作説明を簡単にするために、軸方向Ｘ１への移動時に２相励磁方式とし、周方向Ｃ１への移動時に２－３相励磁方式とする並進回転動作第３パターンについて説明するが、本発明はこれに限らない。並進回転動作第３パターンでは、Ｎを２以上の正の数とした場合、Ｎ行Ｎ列に配置された磁極部３２を斜め方向に移動させる際の基本構成（（Ｎ+１）行（Ｎ+１）列に極性可変素子２２を配置した構成）での励磁方式は、軸方向Ｘ１への移動時にＮ相励磁方式となり、かつ、周方向Ｃ１への移動時にＮ相励磁方式と（Ｎ+１）相励磁方式とが繰り返されるＮ－（Ｎ＋１）相励磁方式（第２方式）となる(－は、Ｎ相励磁と（Ｎ+１）相励磁とを繰り返すことを示すハイフンである)。 Here, in order to simplify the explanation of the operation of the mover 3, a third translational rotational operation pattern will be explained in which a two-phase excitation method is used when moving in the axial direction X1, and a 2-3-phase excitation method is used when moving in the circumferential direction C1, but the present invention is not limited to this. In the third translational rotational operation pattern, when N is a positive number of 2 or more, the excitation method in the basic configuration (configuration in which polarity variable elements 22 are arranged in (N+1) rows and (N+1) columns) when moving the magnetic pole parts 32 arranged in N rows and N columns in a diagonal direction is the N-phase excitation method when moving in the axial direction X1, and the N-(N+1)-phase excitation method (second method) in which the N-phase excitation method and the (N+1)-phase excitation method are repeated when moving in the circumferential direction C1 (- is a hyphen indicating that the N-phase excitation and the (N+1)-phase excitation are repeated).

図２７の並進回転動作第３パターン１は、上述した図２２の並進回転動作第１パターン１と同様の状態であり、固定子２の２行２列目及び３行２列目の極性可変素子Ｓ２２，Ｓ３２を、可動子３の第１領域ＭＣ１と異なる極性とし、固定子２の２行３列目及び３行３列目の極性可変素子Ｓ２３，Ｓ３３を、第２領域ＭＣ２と異なる極性として、可動子３の第１領域ＭＣ１及び第２領域ＭＣ２を、磁力により膨張（拡径）させて固定子２の内周面に接触させる（第１極性変更）。 The third pattern 1 of translational rotation operation in Figure 27 is in the same state as the first pattern 1 of translational rotation operation in Figure 22 described above, where the polarity variable elements S22 , S32 in the second row, second column and the third row, second column of the stator 2 have a polarity different from that of the first region MC1 of the movable member 3, and the polarity variable elements S23 , S33 in the second row, third column and the third row, third column of the stator 2 have a polarity different from that of the second region MC2, and the first region MC1 and second region MC2 of the movable member 3 are expanded (increased in diameter) by magnetic force to contact the inner surface of the stator 2 (first polarity change).

次に、図２７の並進回転動作第３パターン２に示すように、固定子２において極性切り替え１を行い、可動子３の第１領域ＭＣ１と対向する、固定子２の２行２列目及び３行２列目の極性可変素子Ｓ２２，Ｓ３２を、第１領域ＭＣ１と同じ極性とし、磁力により可動子３の第１領域ＭＣ１を固定子２の当該極性可変素子Ｓ２２，Ｓ３２から引き離して、可動子３の第１領域ＭＣ１部分を収縮（縮径）させ、可動子３の第１領域ＭＣ１を固定子２の内周面と非接触にさせる。 Next, as shown in the third translational rotation operation pattern 2 in Figure 27, polarity switching 1 is performed in the stator 2, and the polarity variable elements S22 , S32 in the second row, second column and the third row, second column of the stator 2, which face the first region MC1 of the mover 3, are set to the same polarity as the first region MC1, and the first region MC1 of the mover 3 is pulled away from the polarity variable elements S22 , S32 of the stator 2 by magnetic force, causing the first region MC1 portion of the mover 3 to contract (reduced in diameter), and the first region MC1 of the mover 3 is brought out of contact with the inner surface of the stator 2.

次に、図２７の並進回転動作第３パターン３に示すように、固定子２において極性切り替え２を行い、固定子２の２行２列目の極性可変素子Ｓ２２を無極性とし、可動子３の第１領域ＭＣ１の移動方向に位置する、固定子２の１行１列目及び１行２列目の極性可変素子Ｓ１１，Ｓ１２と、固定子２の３行１列目及び３行２列目の極性可変素子Ｓ３１，Ｓ３２とを、第１領域ＭＣ１と異なる極性とする。 Next, as shown in the third translational rotation operation pattern 3 in Figure 27, polarity switching 2 is performed on the stator 2, the polarity variable element S22 in the second row, second column of the stator 2 is made non-polar, and the polarity variable elements S11 , S12 in the first row, first column and the first row, second column of the stator 2, and the polarity variable elements S31 , S32 in the third row, first column and the third row, second column of the stator 2, which are located in the movement direction of the first region MC1 of the movable element 3, are made to have a polarity different from that of the first region MC1.

これにより、可動子３の第１領域ＭＣ１における一方の磁極部３２（ここでは、Ｎ極部３３ｎ）は、磁力（可変素子３１が弾性部材である場合には、移動方向側の可変部３５が伸長していたことによる移動方向側への復元力（推進力）も）によって、固定子２の１行１列目及び１行２列目の極性可変素子Ｓ１１，Ｓ１２を跨いだ中間領域ＥＲ１５に引き寄せられ、可動子３の第１領域ＭＣ１における他方の磁極部３２（ここでは、Ｓ極部３４ｓ）も、固定子２の３行１列目及び３行２列目の極性可変素子Ｓ３１，Ｓ３２を跨いだ中間領域ＥＲ１６に引き寄せられる。 As a result, one of the magnetic pole portions 32 (here, the N-pole portion 33n) in the first region MC1 of the movable member 3 is attracted to an intermediate region ER15 straddling the polarity variable elements S11, S12 in the first row, first column and the second row, first column of the stator 2 by magnetic force (and, if the variable element 31 is an elastic member, also by a restoring force (propulsion force) in the direction of movement due to the extension of the variable portion 35 on the direction of movement side), and the other magnetic pole portion 32 (here, the S-pole portion 34s) in the first region MC1 of the movable member 3 is attracted to an intermediate region ER16 straddling the polarity variable elements S31 , S32 in the first row, first column and the second row, third column of the stator 2.

このようにして、可動子３の第１領域ＭＣ１部分を、斜め方向に位置する固定子２の中間領域ＥＲ１５，ＥＲ１６部分まで移動させ、中間領域ＥＲ１５，ＥＲ１６の一部領域で膨張（拡径）させて固定子２の内周面に接触させる（第２極性変更）。 In this way, the first region MC1 of the mover 3 is moved to the intermediate regions ER15, ER16 of the stator 2 located diagonally, and some of the intermediate regions ER15, ER16 are expanded (widened) to come into contact with the inner circumferential surface of the stator 2 (second polarity change).

なお、可変素子３１が弾性部材である場合、可動子３では、第１領域ＭＣ１が斜め方向に移動した際に、第１領域ＭＣ１と第２領域ＭＣ２との間を離して可変部３５を伸長させ、移動方向である斜め方向側への推進力が生じた状態になることが望ましい。 When the variable element 31 is an elastic member, it is desirable that when the first region MC1 of the movable element 3 moves in an oblique direction, the first region MC1 and the second region MC2 are separated and the variable portion 35 is extended, generating a propulsive force in the oblique direction, which is the direction of movement.

次に、図２８の並進回転動作第３パターン４に示すように、固定子２において極性切り替え３を行い、固定子２の１行１列目及び１行２列目の極性可変素子Ｓ１１，Ｓ１２と、固定子２の３行１列目及び３行２列目の極性可変素子Ｓ３１，Ｓ３２と、をそれぞれ可動子３の第１領域ＭＣ１と同じ極性とし、可動子３の第１領域ＭＣ１を、磁力により固定子２の中間領域ＥＲ１５，ＥＲ１６から引き離す。これにより、可動子３の第１領域ＭＣ１部分を収縮（縮径）させ、可動子３の第１領域ＭＣ１を固定子２の内周面と非接触にさせる。 28 , polarity switching 3 is performed in the stator 2, and the polarity variable elements S11 , S12 in the 1st row, 1st column and the 1st row, 2nd column of the stator 2 and the polarity variable elements S31 , S32 in the 3rd row, 1st column and the 3rd row, 2nd column of the stator 2 are respectively set to the same polarity as the first region MC1 of the mover 3, and the first region MC1 of the mover 3 is separated from the intermediate regions ER15, ER16 of the stator 2 by magnetic force. This causes the first region MC1 of the mover 3 to contract (reduced in diameter), and the first region MC1 of the mover 3 is brought out of contact with the inner circumferential surface of the stator 2.

次に、図２８の並進回転動作第３パターン５に示すように、固定子２において極性切り替え４を行い、固定子２の１行２列目、３行１列目及び３行２列目の極性可変素子Ｓ１２，Ｓ３１，Ｓ３２を無極性とし、可動子３の第１領域ＭＣ１の移動方向に位置する、固定子２の１行１列目及び２行１列目の極性可変素子Ｓ１１，Ｓ２１を、第１領域ＭＣ１と異なる極性とする。 Next, as shown in the third translational rotation operation pattern 5 of Figure 28, polarity switching 4 is performed on the stator 2, and the polarity variable elements S12 , S31 , and S32 in the first row, second column, the third row, first column, and the third row, second column of the stator 2 are made non-polar, and the polarity variable elements S11, S21 in the first row, first column, and the second row, first column of the stator 2, which are located in the movement direction of the first region MC1 of the movable element 3 , are made to have a polarity different from that of the first region MC1.

これにより、可動子３の第１領域ＭＣ１は、磁力によって、固定子２の１行１列目及び２行１列目の極性可変素子Ｓ１１，Ｓ２１に引き寄せられ、固定子２の１行１列目及び２行１列目の極性可変素子Ｓ１１，Ｓ２１まで移動する。可動子３は、固定子２の１行１列目及び２行１列目の極性可変素子Ｓ１１，Ｓ２１部分で膨張（拡径）して固定子２の内周面に接触する。 As a result, the first region MC1 of the mover 3 is attracted by the magnetic force to the polarity variable elements S11 , S21 in the first row, first column and the second row, first column of the stator 2 , and moves to the polarity variable elements S11 , S21 in the first row, first column and the second row, first column of the stator 2. The mover 3 expands (increases in diameter) at the polarity variable elements S11 , S21 in the first row, first column and the second row, first column of the stator 2, and comes into contact with the inner circumferential surface of the stator 2.

次に、図２８の並進回転動作第３パターン６に示すように、固定子２において極性切り替え５を行い、可動子３の第２領域ＭＣ２が位置している、固定子２の２行３列目及び３行３列目の極性可変素子Ｓ２３，Ｓ３３を、可動子３の第２領域ＭＣ２と同じ極性とし、可動子３の第２領域ＭＣ２を、固定子２の２行３列目及び３行３列目の極性可変素子Ｓ２３，Ｓ３３から引き離す。これにより、可動子３の第２領域ＭＣ２部分を収縮（縮径）させ、可動子３の第２領域ＭＣ２を固定子２の内周面と非接触にさせる。 28 , polarity switching 5 is performed in the stator 2, and the polarity variable elements S23, S33 in the second row, third column and the third row, third column of the stator 2, where the second region MC2 of the mover 3 is located, are set to the same polarity as the second region MC2 of the mover 3, and the second region MC2 of the mover 3 is separated from the polarity variable elements S23 , S33 in the second row, third column and the third row , third column of the stator 2. This causes the second region MC2 of the mover 3 to contract (reduced in diameter), and the second region MC2 of the mover 3 is brought out of contact with the inner circumferential surface of the stator 2.

次に、図２９の並進回転動作第３パターン７に示すように、固定子２において極性切り替え６を行い、固定子２の２行３列目の極性可変素子Ｓ２３を無極性とし、可動子３の第２領域ＭＣ２の移動方向に位置する、固定子２の１行２列目及び１行３列目の極性可変素子Ｓ１２，Ｓ１３と、固定子２の３行２列目及び３行３列目の極性可変素子Ｓ３２，Ｓ３３とを、第２領域ＭＣ２と異なる極性とする。 Next, as shown in the third translational rotation operation pattern 7 of Figure 29, polarity switching 6 is performed on the stator 2, the polarity variable element S23 in the second row, third column of the stator 2 is made non-polar, and the polarity variable elements S12 , S13 in the first row, second column and the first row, third column of the stator 2, and the polarity variable elements S32 , S33 in the third row, second column and the third row, third column of the stator 2, which are located in the movement direction of the second region MC2 of the movable element 3, are made to have a polarity different from that of the second region MC2.

これにより、可動子３の第２領域ＭＣ２における一方の磁極部３２（ここでは、Ｓ極部３４ｓ）は、磁力（可変素子３１が弾性部材である場合には、可動子３の可変部３５が伸長していたことによる移動方向側への復元力も）によって、固定子２の１行２列目及び１行３列目の極性可変素子Ｓ１２，Ｓ１３を跨いだ中間領域ＥＲ１７に引き寄せられ、可動子３の第２領域ＭＣ２における他方の磁極部３２（ここでは、Ｎ極部３３ｎ）も、固定子２の３行２列目及び３行３列目の極性可変素子Ｓ３２，Ｓ３３を跨いだ中間領域ＥＲ１８に引き寄せられる。 As a result, one of the magnetic pole portions 32 (here, the S-pole portion 34s) in the second region MC2 of the mover 3 is attracted to an intermediate region ER17 straddling the polarity variable elements S12, S13 in the first row, second column and the first row, third column of the stator 2 by magnetic force (if the variable element 31 is an elastic member, also by the restoring force in the direction of movement due to the extension of the variable portion 35 of the mover 3 ) , and the other magnetic pole portion 32 (here, the N-pole portion 33n) in the second region MC2 of the mover 3 is attracted to an intermediate region ER18 straddling the polarity variable elements S32 , S33 in the third row, second column and the third row, third column of the stator 2.

このようにして、可動子３の第２領域ＭＣ２部分を、斜め方向に位置する固定子２の中間領域ＥＲ１７，ＥＲ１８部分まで移動させ、中間領域ＥＲ１７，ＥＲ１８の一部領域で膨張（拡径）させて固定子２の内周面に接触させる（第３極性変更）。 In this way, the second region MC2 of the mover 3 is moved to the intermediate regions ER17 and ER18 of the stator 2 located diagonally, and some of the intermediate regions ER17 and ER18 are expanded (widened) to come into contact with the inner circumferential surface of the stator 2 (third polarity change).

次に、図２９の並進回転動作第３パターン８に示すように、固定子２において極性切り替え７を行い、固定子２の１行２列目及び１行３列目の極性可変素子Ｓ１２，Ｓ１３と、固定子２の３行２列目及び３行３列目の極性可変素子Ｓ３２，Ｓ３３と、を可動子３の第２領域ＭＣ２と同じ極性とし、可動子３の第２領域ＭＣ２を、固定子２の中間領域ＥＲ１７，ＥＲ１８から引き離す。これにより、可動子３の第２領域ＭＣ２部分を収縮（縮径）させ、可動子３の第２領域ＭＣ２を固定子２の内周面と非接触にさせる。 29 , polarity switching 7 is performed in the stator 2 to set the polarity variable elements S12 , S13 in the 1st row, 2nd column and the 1st row, 3rd column of the stator 2 and the polarity variable elements S32, S33 in the 3rd row, 2nd column and the 3rd row, 3rd column of the stator 2 to the same polarity as the second region MC2 of the mover 3, and separate the second region MC2 of the mover 3 from the intermediate regions ER17, ER18 of the stator 2. This causes the second region MC2 of the mover 3 to contract (reduced in diameter), and the second region MC2 of the mover 3 is brought out of contact with the inner circumferential surface of the stator 2.

次に、図２９の並進回転動作第３パターン９に示すように、固定子２において極性切り替え８を行い、固定子２の１行３列目、３行２列目及び３行３列目の極性可変素子Ｓ１３，Ｓ３２，Ｓ３３を無極性とし、可動子３の第２領域ＭＣ２の移動方向に位置する、固定子２の１行２列目及び２行２列目の極性可変素子Ｓ１２，Ｓ２２を、第２領域ＭＣ２と異なる極性とする。 Next, as shown in the third translational rotation operation pattern 9 in Figure 29, polarity switching 8 is performed on the stator 2, and the polarity variable elements S13 , S32 , and S33 in the first row, third column, the third row, second column, and the third row, third column of the stator 2 are made non-polar, and the polarity variable elements S12, S22 in the first row, second column, and the second row, second column of the stator 2, which are located in the movement direction of the second region MC2 of the movable element 3 , are made to have a polarity different from that of the second region MC2.

これにより、可動子３の第２領域ＭＣ２は、磁力（可変素子３１が弾性部材である場合には、可動子３の可変部３５が伸長していたことによる移動方向側への復元力も）によって、固定子２の１行２列目及び２行２列目の極性可変素子Ｓ１２，Ｓ２２に引き寄せられ、固定子２の１行２列目及び２行２列目の極性可変素子Ｓ１２，Ｓ２２まで移動する。可動子３は、固定子２の１行２列目及び２行２列目の極性可変素子Ｓ１２，Ｓ２２部分で膨張（拡径）して固定子２の内周面に接触する。 As a result, the second region MC2 of the mover 3 is attracted to the polarity variable elements S12, S22 in the first row, second column and the second row, second column of the stator 2 by magnetic force (and by the restoring force in the direction of movement due to the extension of the variable part 35 of the mover 3 if the variable element 31 is an elastic member), and moves to the polarity variable elements S12 , S22 in the first row, second column and the second row, second column of the stator 2. The mover 3 expands (increases in diameter) at the polarity variable elements S12 , S22 in the first row, second column and the second row, second column of the stator 2, and comes into contact with the inner peripheral surface of the stator 2.

以上、ソフトアクチュエータ１では、固定子２の注目領域ＥＲ２毎にそれぞれ極性可変素子Ｓ１１，Ｓ１２，Ｓ１３，Ｓ２１，Ｓ２２，Ｓ２３，Ｓ３１，Ｓ３２，Ｓ３３の極性切り替えが行われることで、可動子３の第１領域ＭＣ１を斜め方向に移動させて固定子２の面に接触させた後に、第２領域ＭＣ２を固定子２の面と非接触にして第１領域ＭＣ１に近づけるように斜め方向に移動させ、第２領域ＭＣ２を固定子２の面に接触させる。これにより、ソフトアクチュエータ１では、可動子３がこのような尺取虫状の動作を繰り返し行い、固定子２の面に沿って可動子３を斜め方向に並進回転させてゆくことができる。 As described above, in the soft actuator 1, the polarity of the polarity variable elements S11 , S12 , S13 , S21 , S22 , S23 , S31 , S32 , and S33 is switched for each region of interest ER2 of the stator 2, whereby the first region MC1 of the mover 3 is moved in an oblique direction to contact the surface of the stator 2, and then the second region MC2 is moved in an oblique direction so as to approach the first region MC1 without contacting the surface of the stator 2, and the second region MC2 is brought into contact with the surface of the stator 2. As a result, in the soft actuator 1, the mover 3 repeats such an inchworm-like operation, and the mover 3 can be translated and rotated in an oblique direction along the surface of the stator 2.

また、この並進回転動作第３パターンでは、可動子３の第１領域ＭＣ１を２段階で斜め方向へ移動させた後、第２領域ＭＣ２を２段階で斜め方向へ移動させ、第１領域ＭＣ１及び第２領域ＭＣ２を段階的に小刻みに回転させてゆくことができる。すなわち、並進回転動作第３パターンは、上述したように、１ピッチ（１つの極性可変素子２２の領域単位）で伸長と短縮を繰り返す並進回転動作第１パターンや、ハーフピッチ（１つの極性可変素子２２の半領域単位）で伸長と短縮を繰り返す並進回転動作第２パターンと異なり、ハーフピッチで２回伸長した後、ハーフピッチで２回短縮する。 In addition, in this third translational rotational motion pattern, the first region MC1 of the movable element 3 is moved diagonally in two stages, and then the second region MC2 is moved diagonally in two stages, allowing the first region MC1 and the second region MC2 to rotate stepwise in small increments. That is, unlike the first translational rotational motion pattern in which expansion and contraction are repeated in one pitch (the area unit of one polarity variable element 22) and the second translational rotational motion pattern in which expansion and contraction are repeated in half pitches (the half area unit of one polarity variable element 22), as described above, the third translational rotational motion pattern expands twice in a half pitch and then contracts twice in a half pitch.

可変素子３１が弾性部材である場合、この並進回転動作第３パターンでは、始めに可動子３の第１領域ＭＣ１を２段階で斜め方向へ移動させることから、第１領域ＭＣ１及び第２領域ＭＣ２の間にある可変部３５を一段と伸長させることができるため、当該可変部３５による推進力により第２領域ＭＣ２を斜め方向に一段と確実に移動させることができる。 When the variable element 31 is an elastic member, in this third translational rotational motion pattern, the first region MC1 of the movable element 3 is first moved diagonally in two stages, so that the variable portion 35 between the first region MC1 and the second region MC2 can be further extended, and the second region MC2 can be moved diagonally more reliably by the driving force of the variable portion 35.

（４－４）並進回転動作第４パターン
次に、上述した並進回転動作第１パターンから並進回転動作第３パターンとは異なる、可動子３の並進回転動作の第４パターン（並進回転動作第４パターン）について説明する。図３０、図３１及び図３２は、固定子２の筒内空間において斜め方向（ここでは、軸方向Ｘ１と周方向Ｃ１との両方向に対して傾斜した右斜め方向）に移動する可動子３の並進回転動作第４パターンを説明するための概略図である。なお、固定子磁極配列、可動子磁極配列、注目領域ＥＲ２、極性可変素子Ｓ１１，Ｓ１２，Ｓ１３，Ｓ２１，Ｓ２２，Ｓ２３，Ｓ３１，Ｓ３２，Ｓ３３などについては上述した「（４－１）並進回転動作第１パターン」と同じであるため、ここではその説明は省略する。 (4-4) Fourth Translational Rotational Movement Pattern Next, a fourth translational rotational movement pattern (fourth translational rotational movement pattern) of the mover 3, which is different from the above-mentioned first to third translational rotational movement patterns, will be described. Figures 30, 31, and 32 are schematic diagrams for explaining the fourth translational rotational movement pattern of the mover 3, which moves in an oblique direction (here, a right oblique direction inclined with respect to both the axial direction X1 and the circumferential direction C1) in the cylinder space of the stator 2. Note that the stator magnetic pole arrangement, the mover magnetic pole arrangement, the attention area ER2, the polarity variable elements S 11 , S 12 , S 13 , S 21 , S 22 , S 23 , S 31 , S 32 , S 33 , etc. are the same as those in the above-mentioned "(4-1) First Translational Rotational Movement Pattern", so their description will be omitted here.

並進回転動作第４パターンでは、チェッカーボード・パターン状に極性が異なる磁極部３２が２行２列に配置された４つの磁極部３２を斜め方向に移動させる際の注目領域ＥＲ２での励磁方式が、軸方向Ｘ１への移動時に２－３相励磁方式となっており、かつ、周方向Ｃ１への移動時に２相励磁方式となっている。すなわち、軸方向Ｘ１への移動時は、注目領域ＥＲ２の極性可変素子２２のうち、軸方向Ｘ１に並ぶ所定の第１相と第２相と第３相のうちの２つの相だけを同時に励磁する２相励磁方式と、軸方向Ｘ１に並ぶ所定の第１相と第２相と第３相の３つの相を同時に励磁する３相励磁方式とが繰り返される２－３相励磁方式となっている。周方向Ｃ１への移動時は、注目領域ＥＲ２の極性可変素子２２のうち、周方向Ｃ１に並ぶ所定の第１相と第２相と第３相のうちの２つの相だけを同時に励磁する２相励磁方式となっている。 In the fourth translational rotational motion pattern, the excitation method in the attention area ER2 when the four magnetic pole parts 32 arranged in two rows and two columns with different polarities in a checkerboard pattern are moved diagonally is a 2-3 phase excitation method when moving in the axial direction X1, and a 2-phase excitation method when moving in the circumferential direction C1. That is, when moving in the axial direction X1, the 2-phase excitation method in which only two of the predetermined first, second, and third phases aligned in the axial direction X1 are excited simultaneously among the polarity variable elements 22 in the attention area ER2, and a 3-phase excitation method in which the predetermined first, second, and third phases aligned in the axial direction X1 are excited simultaneously are repeated. When moving in the circumferential direction C1, the 2-phase excitation method in which only two of the predetermined first, second, and third phases aligned in the circumferential direction C1 are excited simultaneously among the polarity variable elements 22 in the attention area ER2 is used.

なお、ここでは、可動子３の動作説明を簡単にするために、軸方向Ｘ１への移動時に２－３相励磁方式とし周方向Ｃ１への移動時に２相励磁方式の並進回転動作第４パターンについて説明するが、本発明はこれに限らない。並進回転動作第４パターンでは、Ｎを２以上の正の数とした場合、Ｎ行Ｎ列に配置された磁極部３２を斜め方向に移動させる際の基本構成（（Ｎ+１）行（Ｎ+１）列に極性可変素子２２を配置した構成）での励磁方式は、軸方向Ｘ１への移動時にＮ相励磁方式と（Ｎ+１）相励磁方式とが繰り返されるＮ－（Ｎ＋１）相励磁方式となり、周方向Ｃ１への移動時にＮ相励磁方式（第３方式とも称する）となる(－は、Ｎ相励磁と（Ｎ+１）相励磁とを繰り返すことを示すハイフンである)。 In order to simplify the explanation of the operation of the mover 3, the fourth translational rotational operation pattern will be explained, in which the 2-3 phase excitation method is used when moving in the axial direction X1, and the 2 phase excitation method is used when moving in the circumferential direction C1, but the present invention is not limited to this. In the fourth translational rotational operation pattern, when N is a positive number of 2 or more, the excitation method in the basic configuration (configuration in which the polarity variable elements 22 are arranged in (N+1) rows and (N+1) columns) when moving the magnetic pole parts 32 arranged in N rows and N columns in a diagonal direction is an N-(N+1) phase excitation method in which the N phase excitation method and the (N+1) phase excitation method are repeated when moving in the axial direction X1, and the N phase excitation method (also referred to as the third method) is used when moving in the circumferential direction C1 (- is a hyphen indicating that N phase excitation and (N+1) phase excitation are repeated).

図３０の並進回転動作第４パターン１は、上述した図２２の並進回転動作第１パターン１と同様の状態であり、固定子２の２行２列目及び２行２列目の極性可変素子Ｓ２２，Ｓ２３を、可動子３の第１領域ＭＲ１と異なる極性とし、固定子２の３行２列目及び３行３列目の極性可変素子Ｓ３２，Ｓ３３を、第２領域ＭＲ２と異なる極性として、可動子３の第１領域ＭＲ１及び第２領域ＭＲ２を、磁力により膨張（拡径）させて固定子２の内周面に接触させる（第１極性変更）。 The fourth translational rotation operation pattern 1 in Figure 30 is in the same state as the first translational rotation operation pattern 1 in Figure 22 described above, where the polarity variable elements S22 , S23 in the second row, second column and the second row, second column of the stator 2 are set to a polarity different from that of the first region MR1 of the mover 3, and the polarity variable elements S32 , S33 in the third row, second column and the third row, third column of the stator 2 are set to a polarity different from that of the second region MR2, and the first region MR1 and the second region MR2 of the mover 3 are expanded (increased in diameter) by magnetic force to contact the inner surface of the stator 2 (first polarity change).

次に、図３０の並進回転動作第４パターン２に示すように、固定子２において極性切り替え１を行い、可動子３の第１領域ＭＲ１と対向する、固定子２の２行２列目及び２行３列目の極性可変素子Ｓ２２，Ｓ２３を、第１領域ＭＲ１と同じ極性とし、磁力により可動子３の第１領域ＭＲ１を固定子２の当該極性可変素子Ｓ２２，Ｓ２３から引き離して、可動子３の第１領域ＭＲ１部分を収縮（縮径）させ、可動子３の第１領域ＭＲ１を固定子２の内周面と非接触にさせる。 Next, as shown in the fourth translational rotation operation pattern 2 in Figure 30, polarity switching 1 is performed in the stator 2, and the polarity variable elements S22 , S23 in the second row, second column and the second row, third column of the stator 2, which face the first region MR1 of the mover 3, are set to the same polarity as the first region MR1, and the first region MR1 of the mover 3 is pulled away from the polarity variable elements S22 , S23 of the stator 2 by magnetic force, causing the first region MR1 portion of the mover 3 to contract (reduced in diameter), and the first region MR1 of the mover 3 is brought out of contact with the inner surface of the stator 2.

次に、図３０の並進回転動作第４パターン３に示すように、固定子２において極性切り替え２を行い、固定子２の２行２列目の極性可変素子Ｓ２２を無極性とし、可動子３の第１領域ＭＲ１の移動方向に位置する、固定子２の１行１列目及び２行１列目の極性可変素子Ｓ１１，Ｓ２１と、固定子２の１行３列目及び２行３列目の極性可変素子Ｓ１３，Ｓ２３とを、第１領域ＭＲ１と異なる極性とする。 Next, as shown in the fourth translational rotation operation pattern 3 in Figure 30, polarity switching 2 is performed on the stator 2, the polarity variable element S22 in the second row, second column of the stator 2 is made non-polar, and the polarity variable elements S11 , S21 in the first row, first column and the second row, first column of the stator 2, and the polarity variable elements S13 , S23 in the first row, third column and the second row, third column of the stator 2, which are located in the movement direction of the first region MR1 of the movable element 3, are made to have a polarity different from that of the first region MR1.

これにより、可動子３の第１領域ＭＲ１における一方の磁極部３２（ここでは、Ｎ極部３３ｎ）は、磁力（可変素子３１が弾性部材である場合には、移動方向側の可変部３５が伸長していたことによる移動方向側への復元力（推進力）も）によって、固定子２の１行１列目及び２行１列目の極性可変素子Ｓ１１，Ｓ２１を跨いだ中間領域ＥＲ２１に引き寄せられ、可動子３の第１領域ＭＲ１における他方の磁極部３２（ここでは、Ｓ極部３４ｓ）も、固定子２の１行３列目及び２行３列目の極性可変素子Ｓ１３，Ｓ２３を跨いだ中間領域ＥＲ２０に引き寄せられる。 As a result, one of the magnetic pole portions 32 (here, the N-pole portion 33n) in the first region MR1 of the movable member 3 is attracted to an intermediate region ER21 straddling the polarity variable elements S11, S21 in the first row, first column and the second row, first column of the stator 2 by magnetic force (and, if the variable element 31 is an elastic member, also by a restoring force (propulsion force) toward the movement direction due to the extension of the variable portion 35 on the movement direction side), and the other magnetic pole portion 32 (here, the S-pole portion 34s) in the first region MR1 of the movable member 3 is attracted to an intermediate region ER20 straddling the polarity variable elements S13 , S23 in the first row, third column and the second row, third column of the stator 2.

このようにして、可動子３の第１領域ＭＲ１部分を、斜め方向に位置する固定子２の中間領域ＥＲ２０，ＥＲ２１部分まで移動させ、中間領域ＥＲ２０，ＥＲ２１で膨張（拡径）させて固定子２の内周面に接触させる（第２極性変更）。 In this way, the first region MR1 of the mover 3 is moved to the intermediate regions ER20, ER21 of the stator 2 located diagonally, and expanded (diameter enlarged) in the intermediate regions ER20, ER21 to come into contact with the inner circumferential surface of the stator 2 (second polarity change).

なお、このとき、可動子３の第１領域ＭＲ１における一方の磁極部３２(Ｎ極部３３ｎ)は、固定子２の１行１列目、２行１列目、１行２列目及び２行２列目の極性可変素子Ｓ１１，Ｓ２１，Ｓ１２，Ｓ２２を跨るように配置される。また、可動子３の第２領域ＭＲ２における他方の磁極部３２(Ｓ極部３４ｓ)は、固定子２の１行２列目、２行２列目、１行３列目及び２行３列目の極性可変素子Ｓ１２，Ｓ２２，Ｓ１３，Ｓ２３を跨るように配置される。 At this time, one magnetic pole portion 32 (N-pole portion 33n) in the first region MR1 of the mover 3 is disposed so as to straddle the polarity variable elements S11 , S21 , S12 , and S22 in the first row, first column, second row, first column, first row, second column, and second row, second column of the stator 2. Meanwhile, the other magnetic pole portion 32 (S-pole portion 34s) in the second region MR2 of the mover 3 is disposed so as to straddle the polarity variable elements S12 , S22 , S13 , and S23 in the first row, second column, second row, first row, third column, and second row, third column of the stator 2.

第１領域ＭＲ１の一方のＮ極部３３ｎは、周方向Ｃ１における一端側半領域が、極性可変素子Ｓ１１，Ｓ２１を跨いだ中間領域ＥＲ２１に引き寄せられて接触し、また、第１領域ＭＲ１の他方のＳ極部３４ｓは、周方向Ｃ１における他端側半領域が、極性可変素子Ｓ１３，Ｓ２３を跨いだ中間領域ＥＲ２０に引き寄せられ接触する。 One N-pole portion 33n of the first region MR1 has one end half region in the circumferential direction C1 attracted to and in contact with an intermediate region ER21 that straddles the polarity variable elements S11 and S21 , and the other S-pole portion 34s of the first region MR1 has the other end half region in the circumferential direction C1 attracted to and in contact with an intermediate region ER20 that straddles the polarity variable elements S13 and S23 .

なお、可変素子３１が弾性部材である場合、可動子３では、第１領域ＭＲ１が斜め方向に移動した際に、第１領域ＭＲ１と第２領域ＭＲ２との間を離して可変部３５を伸長させ、移動方向である斜め方向側への推進力が生じた状態になることが望ましい。 When the variable element 31 is an elastic member, it is desirable that when the first region MR1 of the mover 3 moves in a diagonal direction, the first region MR1 and the second region MR2 are separated and the variable section 35 is extended, generating a propulsive force in the diagonal direction, which is the direction of movement.

次に、図３１の並進回転動作第４パターン４に示すように、固定子２において極性切り替え３を行い、固定子２の３行２列目及び３行３列目の極性可変素子Ｓ３２，Ｓ３３をそれぞれ可動子３の第２領域ＭＲ２と同じ極性とし、可動子３の第２領域ＭＲ２を、磁力により固定子２の極性可変素子Ｓ３２，Ｓ３３から引き離す。これにより、可動子３の第２領域ＭＲ２部分を収縮（縮径）させ、可動子３の第２領域ＭＲ２を固定子２の内周面と非接触にさせる。 31 , polarity switching 3 is performed in the stator 2, the polarity variable elements S32 , S33 in the 3rd row, 2nd column and the 3rd row, 3rd column of the stator 2 are respectively set to the same polarity as the second region MR2 of the mover 3, and the second region MR2 of the mover 3 is separated from the polarity variable elements S32 , S33 of the stator 2 by magnetic force. This causes the second region MR2 of the mover 3 to contract (reduced in diameter), and the second region MR2 of the mover 3 is brought out of contact with the inner circumferential surface of the stator 2.

次に、図３１の並進回転動作第４パターン５に示すように、固定子２において極性切り替え４を行い、可動子３の第２領域ＭＲ２が対向配置されていた、固定子２の３行２列目及び３行３列目の極性可変素子Ｓ３２，Ｓ３３を無極性とし、可動子３の第２領域ＭＲ２の移動方向に位置する、固定子２の２行１列目及び２行３列目の極性可変素子Ｓ２１，Ｓ２３を、第２領域ＭＲ２と異なる極性とする。 Next, as shown in the fourth translational rotation operation pattern 5 of Figure 31, polarity switching 4 is performed on the stator 2, and the polarity variable elements S32 , S33 in the third row, second column and the third row, third column of the stator 2, which were arranged opposite the second region MR2 of the mover 3, are made non-polar, and the polarity variable elements S21 , S23 in the second row, first column and the second row, third column of the stator 2, which are located in the movement direction of the second region MR2 of the mover 3, are made to have a polarity different from that of the second region MR2.

これにより、可動子３の第２領域ＭＲ２は、磁力（可変素子３１が弾性部材である場合には、可動子３の可変部３５が伸長していたことによる移動方向側への復元力も）によって、固定子２の２行１列目及び２行３列目の極性可変素子Ｓ２１，Ｓ２３に引き寄せられ、当該極性可変素子Ｓ２１，Ｓ２３の一部領域ＥＲ２３，ＥＲ２２まで移動し、第１領域ＭＲ１に近づいた状態となる。可動子３は、固定子２の２行１列目及び２行３列目の極性可変素子Ｓ２１，Ｓ２３の一部領域ＥＲ２３，ＥＲ２２で膨張（拡径）して固定子２の内周面に接触する。 As a result, the second region MR2 of the mover 3 is attracted to the polarity variable elements S21, S23 in the first and third columns of the second row of the stator 2 by magnetic force (and also by the restoring force in the direction of movement due to the expansion of the variable part 35 of the mover 3 if the variable element 31 is an elastic member), and moves to the partial regions ER23, ER22 of the polarity variable elements S21 , S23 , approaching the first region MR1. The mover 3 expands (increases in diameter) in the partial regions ER23 , ER22 of the polarity variable elements S21 , S23 in the first and third columns of the second row of the stator 2, and comes into contact with the inner circumferential surface of the stator 2.

なお、このとき、可動子３の第２領域ＭＲ２における一方の磁極部３２(ここでは、Ｓ極部３４ｓ)は、固定子２の２行１列目、３行１列目、２行２列目及び３行２列目の極性可変素子Ｓ２１，Ｓ３１，Ｓ２２，Ｓ３２を跨るように配置される。これにより、固定子２の２行１列目の極性可変素子Ｓ２１には、当該極性可変素子Ｓ２１と極性が同じ、可動子３の第１領域ＭＲ１における磁極部３２(Ｎ極部３３ｎ)の一部領域が配置されるとともに、当該極性可変素子Ｓ２１と極性が異なる、可動子３の第２領域ＭＲ２における磁極部３２（ここでは、Ｓ極部３４ｓ）の一部領域が配置される。 At this time, one of the magnetic pole portions 32 (here, the S-pole portion 34s) in the second region MR2 of the mover 3 is disposed so as to straddle the polarity variable elements S21 , S31 , S22 , S32 in the second row, first column, the third row, first column, the second row, second column, and the third row, second column of the stator 2. As a result, in the polarity variable element S21 in the second row, first column of the stator 2, a partial region of the magnetic pole portion 32 (N-pole portion 33n ) in the first region MR1 of the mover 3, which has the same polarity as the polarity variable element S21 , is disposed, and a partial region of the magnetic pole portion 32 (here, the S-pole portion 34s) in the second region MR2 of the mover 3, which has a polarity different from that of the polarity variable element S21 , is disposed.

可動子３の第１領域ＭＲ１におけるＮ極部３３ｎは、対向配置されている２行１列目の極性可変素子Ｓ２１の極性と同じであるものの、当該の極性可変素子Ｓ２１の上部に位置する１行１列目の極性可変素子Ｓ１１の極性と異なることから、当該極性可変素子Ｓ１１に引き寄せられた状態となり得る。 The N-pole portion 33n in the first region MR1 of the movable element 3 has the same polarity as the polarity variable element S21 in the second row and first column that is arranged opposite it, but has a different polarity from the polarity variable element S11 in the first row and first column that is located above the polarity variable element S21 , and therefore may be attracted to the polarity variable element S11 .

また、このとき、可動子３の第２領域ＭＲ２における他方の磁極部３２(ここでは、Ｎ極部３３ｎ)は、固定子２の２行２列目、３行２列目、２行３列目及び３行３列目の極性可変素子Ｓ２２，Ｓ３２，Ｓ２３，Ｓ３３を跨るように配置される。このように、固定子２の２行３列目の極性可変素子Ｓ２３には、当該極性可変素子Ｓ２３と極性が同じ、可動子３の第１領域ＭＲ１における磁極部３２(Ｓ極部３４ｓ)の一部領域が配置されるとともに、当該極性可変素子Ｓ２３と極性が異なる、可動子３の第２領域ＭＲ２における磁極部３２（Ｎ極部３３ｎ）の一部領域が配置される。 Also, at this time, the other magnetic pole portion 32 (here, N-pole portion 33n) in the second region MR2 of the mover 3 is arranged so as to straddle the polarity variable elements S22 , S32 , S23, S33 in the second row, second column, the third row, second column, the second row, third column , and the third row, third column of the stator 2. In this manner, in the polarity variable element S23 in the second row, third column of the stator 2, a partial region of the magnetic pole portion 32 (S-pole portion 34s) in the first region MR1 of the mover 3, which has the same polarity as the polarity variable element S23 , is arranged, and a partial region of the magnetic pole portion 32 (N-pole portion 33n) in the second region MR2 of the mover 3, which has a different polarity from the polarity variable element S23 , is arranged.

可動子３の第１領域ＭＲ１におけるＳ極部３４ｓは、対向配置されている２行３列目の極性可変素子Ｓ２３の極性と同じであるものの、当該の極性可変素子Ｓ２３の上部に位置する１行３列目の極性可変素子Ｓ１３の極性と異なることから、当該極性可変素子Ｓ１３に引き寄せられた状態となり得る。 The S-pole portion 34s in the first region MR1 of the movable element 3 has the same polarity as the polarity variable element S23 in the second row and third column that is arranged opposite it, but has a different polarity from the polarity variable element S13 in the first row and third column that is located above the polarity variable element S23 , and therefore may be attracted to the polarity variable element S13 .

次に、図３１の並進回転動作第４パターン６に示すように、固定子２において極性切り替え５を行い、可動子３の第１領域ＭＲ１の一部領域と第２領域ＭＲ２の一部領域とがそれぞれ位置している、固定子２の２行１列目及び２行３列目の極性可変素子Ｓ２１，Ｓ２３を無極性とする。また、並進回転動作第４パターン６では、極性切り替え５を行い、可動子３の第２領域ＭＲ２の一部領域が位置している、固定子２の３行１列目及び３行３列目の極性可変素子Ｓ３１，Ｓ３３を、可動子３の第２領域ＭＲ２と異なる極性とする。これにより、可動子３の第２領域ＭＲ２は、磁力によって固定子２の３行１列目及び３行３列目の極性可変素子Ｓ３１，Ｓ３３の一部領域ＥＲ２５，ＥＲ２４にそれぞれ引き寄せられ、当該極性可変素子Ｓ３１，Ｓ３３の一部領域ＥＲ２５，ＥＲ２４で膨張（拡径）して固定子２の内周面に接触する。 31 , polarity switching 5 is performed in the stator 2, and polarity variable elements S21, S23 in the second row, first column and the second row, third column of the stator 2, where a partial region of the first region MR1 and a partial region of the second region MR2 of the mover 3 are respectively located, are set to non-polar. Also, in the fourth translational rotational operation pattern 6, polarity switching 5 is performed, and polarity variable elements S31 , S33 in the third row, first column and the third row, third column of the stator 2, where a partial region of the second region MR2 of the mover 3 is located, are set to a polarity different from that of the second region MR2 of the mover 3. As a result, the second region MR2 of the movable member 3 is attracted by magnetic force to partial regions ER25, ER24 of the polarity variable elements S31 , S33 in the first column of the third row and the third column of the stator 2, respectively, and expands (increases in diameter) in the partial regions ER25, ER24 of the polarity variable elements S31 , S33 to come into contact with the inner surface of the stator 2.

また、並進回転動作第４パターン６では、極性切り替え５を行い、可動子３の第１領域ＭＲ１の一部領域が位置している、固定子２の１行１列目及び１行３列目の極性可変素子Ｓ１１，Ｓ１３を、可動子３の第１領域ＭＲ１と同じ極性とし、可動子３の第１領域ＭＲ１を、固定子２の１行１列目及び１行３列目の極性可変素子Ｓ１１，Ｓ１３から引き離す。これにより、可動子３の第１領域ＭＲ１部分を収縮（縮径）させ、可動子３の第１領域ＭＲ１を固定子２の内周面と非接触にさせる。 In addition, in the fourth translational rotation operation pattern 6, polarity switching 5 is performed to set the polarity variable elements S11, S13 in the first row, first column and the first row, third column of the stator 2, where a portion of the first region MR1 of the mover 3 is located, to the same polarity as the first region MR1 of the mover 3, and to separate the first region MR1 of the mover 3 from the polarity variable elements S11 , S13 in the first row, first column and the first row, third column of the stator 2. This causes the first region MR1 of the mover 3 to contract (reduced in diameter), and the first region MR1 of the mover 3 to be out of contact with the inner circumferential surface of the stator 2.

次に、図３２の並進回転動作第４パターン７に示すように、固定子２において極性切り替え６を行い、可動子３の第２領域ＭＲ２の一部領域が位置している、固定子２の２行１列目及び２行３列目の極性可変素子Ｓ２１，Ｓ２３を、可動子３の第２領域ＭＲ２と異なる極性とする。極性可変素子Ｓ３１，Ｓ３３の磁力により極性可変素子Ｓ３１，Ｓ３３の一部領域ＥＲ２５，ＥＲ２４に引き寄せられている可動子３の第２領域ＭＲ２は、磁力によって固定子２の２行１列目及び２行３列目の極性可変素子Ｓ２１，Ｓ２３の一部領域ＥＲ２７，ＥＲ２６にも引き寄せられ、膨張（拡径）して固定子２の内周面に接触する。 32 , polarity switching 6 is performed in the stator 2, and the polarity variable elements S21, S23 in the second row, first column and the second row, third column of the stator 2, where a partial region of the second region MR2 of the mover 3 is located, are made to have a polarity different from that of the second region MR2 of the mover 3. The second region MR2 of the mover 3, which is attracted to the partial regions ER25 , ER24 of the polarity variable elements S31 , S33 by the magnetic force of the polarity variable elements S31 , S33 , is also attracted by the magnetic force to the partial regions ER27, ER26 of the polarity variable elements S21 , S23 in the second row, first column and the second row, third column of the stator 2, and expands (increases in diameter) to come into contact with the inner circumferential surface of the stator 2.

また、この際、可動子３の第１領域ＭＲ１は、固定子２の２行１列目及び２行３列目の極性可変素子Ｓ２１，Ｓ２３とは極性が同じになることから、磁力によって極性可変素子Ｓ２１，Ｓ２３から引き離され、収縮（縮径）して固定子２の内周面から離れる。 In addition, at this time, since the first region MR1 of the movable member 3 has the same polarity as the polarity variable elements S21 , S23 in the first column of the second row and the third column of the second row of the stator 2, the first region MR1 of the movable member 3 is pulled away from the polarity variable elements S21 , S23 by the magnetic force, contracts (reduced in diameter), and moves away from the inner surface of the stator 2.

これに加えて、並進回転動作第４パターン７では、固定子２の極性切り替え６として、固定子２の１行３列目の極性可変素子Ｓ１３を無極性とし、可動子３の第１領域ＭＲ１の移動方向に位置する、固定子２の１行１列目及び１行２列目の極性可変素子Ｓ１１，Ｓ１２を、第１領域ＭＲ１と異なる極性とする。 In addition, in the fourth translational rotation operation pattern 7, the polarity switching 6 of the stator 2 is performed by making the polarity variable element S13 in the first row and third column of the stator 2 non-polar, and making the polarity variable elements S11 and S12 in the first row and first column and the second row of the stator 2, which are located in the movement direction of the first region MR1 of the movable element 3, have a polarity different from that of the first region MR1.

これにより、可動子３の第１領域ＭＲ１は、磁力（可変素子３１が弾性部材である場合には、移動方向側の可変部３５が伸長していたことによる移動方向側への復元力も）によって、固定子２の１行１列目及び１行２列目の極性可変素子Ｓ１１，Ｓ１２に引き寄せられる。可動子３の第１領域ＭＲ１は、斜め方向に位置する固定子２の極性可変素子Ｓ１１，Ｓ１２部分まで移動して第２領域ＭＲ２から遠ざかり、当該極性可変素子Ｓ１１，Ｓ１２で膨張（拡径）して固定子２の内周面に接触する（第３極性変更）。 As a result, the first region MR1 of the mover 3 is attracted by a magnetic force (and by a restoring force in the direction of movement caused by the extension of the variable part 35 on the direction of movement, if the variable element 31 is an elastic member) to the polarity variable elements S11 , S12 in the first row, first column and the first row, second column of the stator 2. The first region MR1 of the mover 3 moves to the polarity variable elements S11 , S12 of the stator 2 located in the diagonal direction, and moves away from the second region MR2, and expands (increases in diameter) at the polarity variable elements S11 , S12 and comes into contact with the inner circumferential surface of the stator 2 (third polarity change).

なお、可変素子３１が弾性部材である場合、可動子３では、第１領域ＭＲ１が斜め方向に移動した際に、第１領域ＭＲ１と第２領域ＭＲ２との間を離して可変部３５を伸長させることから、移動方向である斜め方向側への推進力が生じた状態になることが望ましい。 When the variable element 31 is an elastic member, it is desirable that when the first region MR1 of the mover 3 moves in a diagonal direction, the first region MR1 and the second region MR2 are separated and the variable section 35 is extended, generating a propulsive force in the diagonal direction, which is the direction of movement.

次に、図３２の並進回転動作第４パターン８に示すように、固定子２において極性切り替え７を行い、固定子２の２行１列目、３行１列目、２行３列目、及び３行３列目の極性可変素子Ｓ２１，Ｓ３１，Ｓ２３，Ｓ３３をそれぞれ可動子３の第２領域ＭＲ２と同じ極性とし、可動子３の第２領域ＭＲ２を、固定子２の極性可変素子Ｓ２１，Ｓ３１，Ｓ２３，Ｓ３３から引き離す。これにより、可動子３の第２領域ＭＲ２部分を収縮（縮径）させ、可動子３の第２領域ＭＲ２を固定子２の内周面と非接触にさせる。 32 , polarity switching 7 is performed in the stator 2, and the polarity variable elements S21, S31, S23, and S33 in the second row, first column, the third row, first column, the second row, third column, and the third row, third column of the stator 2 are respectively set to the same polarity as the second region MR2 of the mover 3, and the second region MR2 of the mover 3 is separated from the polarity variable elements S21 , S31 , S23 , and S33 of the stator 2. This causes the second region MR2 portion of the mover 3 to contract (reduced in diameter), and the second region MR2 of the mover 3 is brought out of contact with the inner circumferential surface of the stator 2.

次に、図３２の並進回転動作第４パターン９に示すように、固定子２において極性切り替え８を行い、固定子２の３行１列目、２行３列目及び３行３列目の極性可変素子Ｓ３１，Ｓ２３，Ｓ３３を無極性とし、可動子３の第２領域ＭＲ２の移動方向に位置する、固定子２の２行１列目及び２行２列目の極性可変素子Ｓ２１，Ｓ２２を、第２領域ＭＲ２と異なる極性とする。 Next, as shown in the fourth translational rotation operation pattern 9 in Figure 32, polarity switching 8 is performed on the stator 2, and the polarity variable elements S31 , S23 , and S33 in the 3rd row, 1st column, the 2nd row, 3rd column, and the 3rd row, 3rd column of the stator 2 are made non-polar, and the polarity variable elements S21 and S22 in the 2nd row, 1st column, and the 2nd row, 2nd column of the stator 2, which are located in the movement direction of the second region MR2 of the movable element 3 , are made to have a polarity different from that of the second region MR2.

これにより、可動子３の第２領域ＭＲ２は、磁力（可変素子３１が弾性部材である場合には、可動子３の可変部３５が伸長していたことによる移動方向側への復元力も）によって、固定子２の２行１列目及び２行２列目の極性可変素子Ｓ２１，Ｓ２２に引き寄せられ、固定子２の２行１列目及び２行２列目の極性可変素子Ｓ２１，Ｓ２２まで移動する。可動子３は、固定子２の２行１列目及び２行２列目の極性可変素子Ｓ２１，Ｓ２２部分で膨張（拡径）して固定子２の内周面に接触する。 As a result, the second region MR2 of the mover 3 is attracted to the polarity variable elements S21, S22 in the first and second rows of the stator 2 by magnetic force (and by the restoring force in the direction of movement caused by the extension of the variable part 35 of the mover 3 if the variable element 31 is an elastic member) and moves to the polarity variable elements S21, S22 in the first and second rows of the stator 2. The mover 3 expands (increases in diameter) at the polarity variable elements S21 , S22 in the first and second rows of the stator 2 and comes into contact with the inner peripheral surface of the stator 2.

以上、ソフトアクチュエータ１では、固定子２の注目領域ＥＲ２毎にそれぞれ極性可変素子Ｓ１１，Ｓ１２，Ｓ１３，Ｓ２１，Ｓ２２，Ｓ２３，Ｓ３１，Ｓ３２，Ｓ３３の極性切り替えが行われることで、可動子３の第１領域ＭＲ１を斜め方向に移動させて固定子２の面に接触させた後に、第２領域ＭＲ２を固定子２の面と非接触にして第１領域ＭＣ１に近づけるように斜め方向に移動させ、第２領域ＭＲ２を固定子２の面に接触させる。これにより、ソフトアクチュエータ１では、可動子３がこのような尺取虫状の動作を繰り返し行い、固定子２の面に沿って可動子３を斜め方向に並進回転させてゆくことができる。 As described above, in the soft actuator 1, the polarity of the polarity variable elements S11 , S12 , S13 , S21 , S22 , S23 , S31 , S32 , and S33 is switched for each region of interest ER2 of the stator 2, whereby the first region MR1 of the mover 3 is moved in an oblique direction to contact the surface of the stator 2, and then the second region MR2 is moved in an oblique direction so as to approach the first region MC1 without contacting the surface of the stator 2, and the second region MR2 is brought into contact with the surface of the stator 2. As a result, in the soft actuator 1, the mover 3 repeats such an inchworm-like operation, and the mover 3 can be translated and rotated in an oblique direction along the surface of the stator 2.

（４－５）並進回転動作第５パターン
次に、上述した並進回転動作第１パターンから並進回転動作第４パターンとは異なる、可動子３の並進回転動作の第５パターン（並進回転動作第５パターン）について説明する。図３０、図３３及び図３４は、固定子２の筒内空間において斜め方向（ここでは、軸方向Ｘ１と周方向Ｃ１との両方向に対して傾斜した右斜め方向）に移動する可動子３の並進回転動作第５パターンを説明するための概略図である。なお、固定子磁極配列、可動子磁極配列、注目領域ＥＲ２、極性可変素子Ｓ１１，Ｓ１２，Ｓ１３，Ｓ２１，Ｓ２２，Ｓ２３，Ｓ３１，Ｓ３２，Ｓ３３などについては上述した「（４－１）並進回転動作第１パターン」と同じであるため、ここではその説明は省略する。 (4-5) Fifth Translational Rotational Movement Pattern Next, a fifth translational rotational movement pattern (fifth translational rotational movement pattern) of the mover 3, which is different from the above-mentioned first to fourth translational rotational movement patterns, will be described. Figures 30, 33, and 34 are schematic diagrams for explaining the fifth translational rotational movement pattern of the mover 3 moving in an oblique direction (here, a right oblique direction inclined with respect to both the axial direction X1 and the circumferential direction C1) in the cylinder space of the stator 2. Note that the stator magnetic pole arrangement, the mover magnetic pole arrangement, the attention area ER2, the polarity variable elements S 11 , S 12 , S 13 , S 21 , S 22 , S 23 , S 31 , S 32 , S 33 , etc. are the same as those in the above-mentioned "(4-1) First Translational Rotational Movement Pattern", so their description will be omitted here.

並進回転動作第５パターンでは、チェッカーボード・パターン状に極性が異なる磁極部３２が２行２列に配置された４つの磁極部３２を斜め方向に移動させる際の注目領域ＥＲ２での励磁方式が、軸方向Ｘ１への移動時に２－３相励磁方式となっており、かつ、周方向Ｃ１への移動時に２相励磁方式となっている。すなわち、軸方向Ｘ１への移動時は、注目領域ＥＲ２の極性可変素子２２のうち、軸方向Ｘ１に並ぶ所定の第１相と第２相と第３相のうちの２つの相だけを同時に励磁する２相励磁方式と、軸方向Ｘ１に並ぶ所定の第１相と第２相と第３相の３つの相を同時に励磁する３相励磁方式とが繰り返される２－３相励磁方式となっている。周方向Ｃ１への移動時は、注目領域ＥＲ２の極性可変素子２２のうち、周方向Ｃ１に並ぶ所定の第１相と第２相と第３相のうちの２つの相だけを同時に励磁する２相励磁方式となっている。 In the fifth translational rotational motion pattern, the excitation method in the attention area ER2 when the four magnetic pole parts 32 arranged in two rows and two columns with different polarities in a checkerboard pattern are moved diagonally is a 2-3 phase excitation method when moving in the axial direction X1, and a 2-phase excitation method when moving in the circumferential direction C1. That is, when moving in the axial direction X1, the 2-phase excitation method in which only two of the predetermined first, second, and third phases aligned in the axial direction X1 are excited simultaneously among the polarity variable elements 22 in the attention area ER2, and a 3-phase excitation method in which the predetermined first, second, and third phases aligned in the axial direction X1 are excited simultaneously are repeated. When moving in the circumferential direction C1, the 2-phase excitation method in which only two of the predetermined first, second, and third phases aligned in the circumferential direction C1 are excited simultaneously among the polarity variable elements 22 in the attention area ER2 is used.

なお、ここでは、可動子３の動作説明を簡単にするために、軸方向Ｘ１への移動時に２－３相励磁方式とし周方向Ｃ１への移動時に２相励磁方式の並進回転動作第５パターンについて説明するが、本発明はこれに限らない。並進回転動作第５パターンでは、Ｎを２以上の正の数とした場合、Ｎ行Ｎ列に配置された磁極部３２を斜め方向に移動させる際の基本構成（（Ｎ+１）行（Ｎ+１）列に極性可変素子２２を配置した構成）での励磁方式は、軸方向Ｘ１への移動時にＮ相励磁方式と（Ｎ+１）相励磁方式とが繰り返されるＮ－（Ｎ＋１）相励磁方式となり、周方向Ｃ１への移動時にＮ相励磁方式（第３方式とも称する）となる(－は、Ｎ相励磁と（Ｎ+１）相励磁とを繰り返すことを示すハイフンである)。 In order to simplify the explanation of the operation of the mover 3, the fifth translational rotational operation pattern will be explained, in which the 2-3 phase excitation method is used when moving in the axial direction X1, and the 2 phase excitation method is used when moving in the circumferential direction C1, but the present invention is not limited to this. In the fifth translational rotational operation pattern, when N is a positive number of 2 or more, the excitation method in the basic configuration (configuration in which the polarity variable elements 22 are arranged in (N+1) rows and (N+1) columns) when moving the magnetic pole parts 32 arranged in N rows and N columns in a diagonal direction is an N-(N+1) phase excitation method in which the N phase excitation method and the (N+1) phase excitation method are repeated when moving in the axial direction X1, and the N phase excitation method (also referred to as the third method) is used when moving in the circumferential direction C1 (- is a hyphen indicating that N phase excitation and (N+1) phase excitation are repeated).

この並進回転動作第５パターンでは、並進回転動作第５パターン１から並進回転動作第５パターン３までが、図３０において説明した並進回転動作第４パターン１から並進回転動作第４パターン３と同じであることから、ここではその説明は省略する。この場合、並進回転動作第５パターンは、並進回転動作第５パターン１から並進回転動作第５パターン３として、上述した図３０の並進回転動作第４パターン１から並進回転動作第４パターン３と同様の状態になった後、図３３に示すように、極性切り替え３が行われて並進回転動作第５パターン４の状態となる。 In this fifth translational rotation movement pattern, fifth translational rotation movement pattern 1 to fifth translational rotation movement pattern 3 are the same as fourth translational rotation movement pattern 1 to fourth translational rotation movement pattern 3 described in FIG. 30, so a description thereof will be omitted here. In this case, the fifth translational rotation movement pattern is in the same state as fourth translational rotation movement pattern 1 to fourth translational rotation movement pattern 3 in FIG. 30 described above, from fifth translational rotation movement pattern 1 to fifth translational rotation movement pattern 3, and then, as shown in FIG. 33, polarity switch 3 is performed and the state becomes fifth translational rotation movement pattern 4.

図３３の並進回転動作第５パターン４では、固定子２において極性切り替え３を行い、固定子２の１行１列目、２行１列目、１行３列目及び２行３列目の極性可変素子Ｓ１１，Ｓ２１，Ｓ１３，Ｓ２３をそれぞれ可動子３の第１領域ＭＲ１と同じ極性とし、可動子３の第１領域ＭＲ１を、磁力により固定子２の極性可変素子Ｓ１１，Ｓ２１，Ｓ１３，Ｓ２３から引き離す。これにより、可動子３の第１領域ＭＲ１部分を収縮（縮径）させ、可動子３の第１領域ＭＲ１を固定子２の内周面と非接触にさせる。 33, polarity switching 3 is performed in the stator 2, and the polarity variable elements S11, S21, S13, and S23 in the 1st row, 1st column, the 2nd row, 1st column, the 1st row, 3rd column, and the 2nd row , 3rd column of the stator 2 are respectively set to the same polarity as the first region MR1 of the mover 3, and the first region MR1 of the mover 3 is separated from the polarity variable elements S11 , S21 , S13 , and S23 of the stator 2 by magnetic force. This causes the first region MR1 of the mover 3 to contract ( reduced in diameter), and the first region MR1 of the mover 3 is brought out of contact with the inner circumferential surface of the stator 2.

次に、図３３の並進回転動作第５パターン５に示すように、固定子２において極性切り替え４を行い、可動子３の第１領域ＭＲ１が対向配置されていた、固定子２の２行１列目、１行３列目及び２行３列目の極性可変素子Ｓ２１，Ｓ１３，Ｓ２３を無極性とし、可動子３の第１領域ＭＲ１の移動方向に位置する、固定子２の１行１列目及び１行２列目の極性可変素子Ｓ１１，Ｓ１２を、第１領域ＭＲ１と異なる極性とする。 Next, as shown in the fifth translational rotation operation pattern 5 of Figure 33, polarity switching 4 is performed on the stator 2, and the polarity variable elements S21 , S13, and S23 in the second row, first column, the first row, third column, and the second row, third column of the stator 2, which are arranged opposite the first region MR1 of the mover 3, are made non-polar, and the polarity variable elements S11 , S12 in the first row, first column, and the first row, second column of the stator 2, which are located in the movement direction of the first region MR1 of the mover 3 , are made to have a polarity different from that of the first region MR1.

これにより、可動子３の第１領域ＭＲ１は、磁力によって、固定子２の１行１列目及び１行２列目の極性可変素子Ｓ１１，Ｓ１２に引き寄せられ、当該極性可変素子Ｓ１１，Ｓ１２まで移動する。可動子３は、固定子２の１行１列目及び１行２列目の極性可変素子Ｓ１１，Ｓ１２で膨張（拡径）して固定子２の内周面に接触する。 As a result, the first region MR1 of the mover 3 is attracted by the magnetic force to the polarity variable elements S11 , S12 in the first row, first column and the first row, second column of the stator 2, and moves to the polarity variable elements S11 , S12 . The mover 3 expands (increases in diameter) at the polarity variable elements S11 , S12 in the first row, first column and the first row, second column of the stator 2, and comes into contact with the inner circumferential surface of the stator 2.

なお、可変素子３１が弾性部材である場合、可動子３では、第１領域ＭＲ１が斜め方向に移動した際に、第１領域ＭＲ１と第２領域ＭＲ２との間を一段と離して可変部３５をさらに伸長させることから、移動方向である斜め方向側への推進力が一段と生じた状態になることが望ましい。 When the variable element 31 is an elastic member, it is desirable that when the first region MR1 of the movable member 3 moves in a diagonal direction, the distance between the first region MR1 and the second region MR2 is further increased, causing the variable portion 35 to extend further, resulting in an increased propulsive force being generated in the diagonal direction, which is the direction of movement.

次に、図３３の並進回転動作第５パターン６に示すように、固定子２において極性切り替え５を行い、可動子３の第２領域ＭＲ２が位置している、固定子２の３行２列目及び３行３列目の極性可変素子Ｓ３２，Ｓ３３を、可動子３の第２領域ＭＲ２と同じ極性とし、可動子３の第２領域ＭＲ２を、固定子２の３行２列目及び３行３列目の極性可変素子Ｓ３２，Ｓ３３から引き離す。これにより、可動子３の第２領域ＭＲ２は、収縮（縮径）し、可動子３の第２領域ＭＲ２を固定子２の内周面と非接触になる。 33 , polarity switching 5 is performed in the stator 2, and the polarity variable elements S32, S33 in the 3rd row, 2nd column and the 3rd row, 3rd column of the stator 2, where the second region MR2 of the mover 3 is located, are set to the same polarity as the second region MR2 of the mover 3, and the second region MR2 of the mover 3 is separated from the polarity variable elements S32 , S33 in the 3rd row, 2nd column and the 3rd row , 3rd column of the stator 2. As a result, the second region MR2 of the mover 3 contracts (reduced in diameter), and the second region MR2 of the mover 3 is no longer in contact with the inner circumferential surface of the stator 2.

次に、図３４の並進回転動作第５パターン７に示すように、固定子２において極性切り替え６を行い、可動子３の第２領域ＭＲ２が位置している、固定子２の３行２列目の極性可変素子Ｓ３２を無極性とし、可動子３の第２領域ＭＲ２の移動方向となる、固定子２の２行１列目、３行１列目、２行３列目及び３行３列目の極性可変素子Ｓ２１，Ｓ３１，Ｓ２３，Ｓ３３を、それぞれ第２領域ＭＲ２と異なる極性とする。 Next, as shown in the fifth translational rotation operation pattern 7 in Figure 34, polarity switching 6 is performed on the stator 2, and the polarity variable element S32 in the third row and second column of the stator 2, where the second region MR2 of the mover 3 is located, is made non-polar, and the polarity variable elements S21, S31, S23, and S33 in the second row and first column, the third row and first column, the second row and third column, and the third row and third column of the stator 2, which are in the movement direction of the second region MR2 of the mover 3, are each made to have a polarity different from that of the second region MR2.

これにより、可動子３の第２領域ＭＲ２は、磁力（可変素子３１が弾性部材である場合には、可動子３の可変部３５が伸長していたことによる移動方向側への復元力も）によって、固定子２の２行１列目及び３行１列目の極性可変素子Ｓ２１，Ｓ２３の中間領域ＥＲ３１と、２行３列目及び３行３列目の極性可変素子Ｓ２３，Ｓ３３の中間領域ＥＲ３０と、にそれぞれ引き寄せられる。 As a result, the second region MR2 of the movable element 3 is attracted by magnetic force (and, if the variable element 31 is an elastic material, by the restoring force in the direction of movement due to the extension of the variable part 35 of the movable element 3) to the intermediate region ER31 of the polarity variable elements S21 , S23 in the first column of the second row and the first column of the third row of the stator 2, and to the intermediate region ER30 of the polarity variable elements S23 , S33 in the third column of the second row and the third column of the third row.

これにより、可動子３の第２領域ＭＲ２における一方の磁極部３２(Ｓ極部３４ｓ)は、固定子２の２行１列目、３行１列目、２行２列目及び３行２列目の極性可変素子Ｓ２１，Ｓ３１，Ｓ２２，Ｓ３２を跨るように配置される。また、可動子３の第２領域ＭＲ２における他方の磁極部３２(Ｎ極部３３ｎ)は、固定子２の２行２列目、３行２列目、２行３列目及び３行３列目の極性可変素子Ｓ２２，Ｓ３２，Ｓ２３，Ｓ３３を跨るように配置される。 As a result, one magnetic pole portion 32 (S-pole portion 34s) in the second region MR2 of the mover 3 is arranged so as to straddle the polarity variable elements S21 , S31 , S22 , and S32 in the second row, first column, the third row, first column, the second row, second column, and the third row, second column of the stator 2. In addition, the other magnetic pole portion 32 (N-pole portion 33n) in the second region MR2 of the mover 3 is arranged so as to straddle the polarity variable elements S22 , S32 , S23 , and S33 in the second row, second column, the third row, second column, and the third row, third column of the stator 2.

このようにして、可動子３の第２領域ＭＲ２は、斜め方向に位置する第１領域ＭＲ１にハーフピッチ分だけ僅かに近づき、可動子３は、固定子２の極性可変素子Ｓ２１，Ｓ３１を跨いだ中間領域ＥＲ３１と、極性可変素子Ｓ２３，Ｓ３３を跨いだ中間領域ＥＲ３０とで膨張（拡径）して固定子２の内周面に接触する。 In this way, the second region MR2 of the mover 3 moves slightly closer to the first region MR1 located diagonally by half a pitch, and the mover 3 expands (increases in diameter) in the intermediate region ER31 spanning the polarity variable elements S21 and S31 of the stator 2, and in the intermediate region ER30 spanning the polarity variable elements S23 and S33 , and comes into contact with the inner surface of the stator 2.

次に、図３４の並進回転動作第５パターン８に示すように、固定子２において極性切り替え７を行い、可動子３の第２領域ＭＲ２が位置している、固定子２の２行１列目、３行１列目、２行３列目及び３行３列目の極性可変素子Ｓ２１，Ｓ３１，Ｓ２３，Ｓ３３を、それぞれ第２領域ＭＲ２と同じ極性とし、可動子３の第２領域ＭＲ２を、固定子２の極性可変素子Ｓ２１，Ｓ３１，Ｓ２３，Ｓ３３から引き離す。これにより、可動子３の第２領域ＭＲ２部分を収縮（縮径）させ、可動子３の第２領域ＭＲ２を固定子２の内周面と非接触にさせる。 34 , polarity switching 7 is performed in the stator 2, and the polarity variable elements S21, S31, S23, and S33 in the second row, first column, the third row, first column, the second row, third column, and the third row, third column of the stator 2, where the second region MR2 of the mover 3 is located, are set to the same polarity as the second region MR2, and the second region MR2 of the mover 3 is separated from the polarity variable elements S21, S31, S23, and S33 of the stator 2. This causes the second region MR2 portion of the mover 3 to contract (reduced in diameter), and the second region MR2 of the mover 3 is brought out of contact with the inner circumferential surface of the stator 2.

次に、図３４の並進回転動作第５パターン９に示すように、固定子２において極性切り替え８を行い、固定子２の３行１列目、２行３列目及び３行３列目の極性可変素子Ｓ３１，Ｓ２３，Ｓ３３を無極性とし、可動子３の第２領域ＭＲ２の移動方向に位置する、固定子２の２行１列目及び２行２列目の極性可変素子Ｓ２１，Ｓ２２を、第２領域ＭＲ２と異なる極性とする。 Next, as shown in the fifth translational rotation operation pattern 9 in Figure 34, polarity switching 8 is performed on the stator 2, so that the polarity variable elements S31 , S23 , and S33 in the third row, first column, the second row, third column, and the third row, third column of the stator 2 are made non-polar, and the polarity variable elements S21 and S22 in the second row, first column, and the second row, second column of the stator 2, which are located in the movement direction of the second region MR2 of the movable element 3, are made to have a polarity different from that of the second region MR2.

これにより、可動子３の第２領域ＭＲ２は、磁力（可変素子３１が弾性部材である場合には、可動子３の可変部３５が伸長していたことによる移動方向側への復元力も）によって、固定子２の２行１列目及び２行２列目の極性可変素子Ｓ２１，Ｓ２２に引き寄せられ、固定子２の２行１列目及び２行２列目の極性可変素子Ｓ２１，Ｓ２２まで移動する。可動子３は、固定子２の２行１列目及び２行２列目の極性可変素子Ｓ２１，Ｓ２２部分で膨張（拡径）して固定子２の内周面に接触する。 As a result, the second region MR2 of the mover 3 is attracted to the polarity variable elements S21, S22 in the first and second rows of the stator 2 by magnetic force (and by the restoring force in the direction of movement caused by the extension of the variable part 35 of the mover 3 if the variable element 31 is an elastic member) and moves to the polarity variable elements S21, S22 in the first and second rows of the stator 2. The mover 3 expands (increases in diameter) at the polarity variable elements S21 , S22 in the first and second rows of the stator 2 and comes into contact with the inner peripheral surface of the stator 2.

以上、ソフトアクチュエータ１では、固定子２の注目領域ＥＲ２毎にそれぞれ極性可変素子Ｓ１１，Ｓ１２，Ｓ１３，Ｓ２１，Ｓ２２，Ｓ２３，Ｓ３１，Ｓ３２，Ｓ３３の極性切り替えが行われることで、可動子３の第１領域ＭＲ１を斜め方向に移動させて固定子２の面に接触させた後に、第２領域ＭＲ２を固定子２の面と非接触にして第１領域ＭＲ１に近づけるように斜め方向に移動させ、第２領域ＭＲ２を固定子２の面に接触させる。これにより、ソフトアクチュエータ１では、可動子３がこのような尺取虫状の動作を繰り返し行い、固定子２の面に沿って可動子３を斜め方向に並進回転させてゆくことができる。 As described above, in the soft actuator 1, the polarity of the polarity variable elements S11 , S12 , S13 , S21 , S22 , S23 , S31 , S32 , and S33 is switched for each region of interest ER2 of the stator 2, whereby the first region MR1 of the mover 3 is moved in an oblique direction to contact the surface of the stator 2, and then the second region MR2 is moved in an oblique direction so as to approach the first region MR1 without contacting the surface of the stator 2, and the second region MR2 is brought into contact with the surface of the stator 2. As a result, in the soft actuator 1, the mover 3 repeats such an inchworm-like operation, and the mover 3 can be translated and rotated in an oblique direction along the surface of the stator 2.

また、この並進回転動作第５パターンでは、可動子３の第１領域ＭＲ１を２段階で斜め方向へ移動させた後、第２領域ＭＲ２を２段階で斜め方向へ移動させ、第１領域ＭＲ１及び第２領域ＭＲ２を段階的に小刻みに移動させてゆくことができる。すなわち、並進回転動作第５パターンは、上述したように、１ピッチ（１つの極性可変素子２２の領域単位）で伸長と短縮を繰り返す並進回転動作第１パターンや、ハーフピッチ（１つの極性可変素子２２の半領域単位）で伸長と短縮を繰り返す並進回転動作第２パターンと異なり、ハーフピッチで２回伸長した後、ハーフピッチで２回短縮する。 In addition, in this fifth translational rotational motion pattern, the first region MR1 of the movable element 3 is moved diagonally in two stages, and then the second region MR2 is moved diagonally in two stages, so that the first region MR1 and the second region MR2 can be moved stepwise in small increments. That is, unlike the first translational rotational motion pattern in which expansion and contraction are repeated in one pitch (the area unit of one polarity variable element 22) and the second translational rotational motion pattern in which expansion and contraction are repeated in half pitches (the half area unit of one polarity variable element 22), as described above, the fifth translational rotational motion pattern expands twice in a half pitch and then contracts twice in a half pitch.

さらに、可変素子３１が弾性部材である場合、この並進回転動作第５パターンでは、始めに可動子３の第１領域ＭＲ１を２段階で斜め方向へ移動させることから、第１領域ＭＲ１及び第２領域ＭＲ２の間にある可変部３５を一段と伸長させることができるため、当該可変部３５による推進力により第２領域ＭＲ２を斜め方向に一段と確実に移動させることができる。 Furthermore, when the variable element 31 is an elastic member, in this fifth translational rotational motion pattern, the first region MR1 of the mover 3 is first moved diagonally in two stages, so that the variable part 35 between the first region MR1 and the second region MR2 can be further extended, and the second region MR2 can be moved diagonally more reliably by the driving force of the variable part 35.

（４－６）並進回転動作第６パターン
次に、上述した並進回転動作第１パターンから並進回転動作第５パターンとは異なる、可動子３の並進回転動作の第６パターン（並進回転動作第６パターン）について説明する。図３５、図３６、図３７、図３８及び図３９は、固定子２の筒内空間において斜め方向（ここでは、軸方向Ｘ１と周方向Ｃ１との両方向に対して傾斜した右斜め方向）に移動する可動子３の並進回転動作第６パターンを説明するための概略図である。なお、固定子磁極配列、可動子磁極配列、注目領域ＥＲ２、極性可変素子Ｓ１１，Ｓ１２，Ｓ１３，Ｓ２１，Ｓ２２，Ｓ２３，Ｓ３１，Ｓ３２，Ｓ３３などについては上述した「（４－１）並進回転動作第１パターン」と同じであるため、ここではその説明は省略する。 (4-6) Sixth Translational Rotational Movement Pattern Next, a sixth translational rotational movement pattern (sixth translational rotational movement pattern) of the mover 3, which is different from the above-mentioned first to fifth translational rotational movement patterns, will be described. Figures 35, 36, 37, 38, and 39 are schematic diagrams for explaining the sixth translational rotational movement pattern of the mover 3 moving in an oblique direction (here, a right oblique direction inclined with respect to both the axial direction X1 and the circumferential direction C1) in the cylinder space of the stator 2. Note that the stator magnetic pole arrangement, the mover magnetic pole arrangement, the attention area ER2, the polarity variable elements S 11 , S 12 , S 13 , S 21 , S 22 , S 23 , S 31 , S 32 , S 33 , etc. are the same as those in the above-mentioned "(4-1) First Translational Rotational Movement Pattern", so their description will be omitted here.

並進回転動作第６パターンでは、チェッカーボード・パターン状に極性が異なる磁極部３２が２行２列に配置された４つの磁極部３２を斜め方向（軸方向Ｘ１と周方向Ｃ１との両方向に傾斜した斜め方向）に移動させる際の注目領域ＥＲ２での励磁方式が、当該注目領域ＥＲ２の極性可変素子２２のうち、軸方向Ｘ１及び周方向Ｃ１への移動時に所定の第１相と第２相と第３相とを励磁する３相励磁方式となっている。なお、ここでは、可動子３の動作説明を簡単にするために、３相励磁方式の並進回転動作第６パターンについて説明するが、本発明はこれに限らない。並進回転動作第６パターンでは、Ｎを２以上の正の数とした場合、Ｎ行Ｎ列に配置された磁極部３２を斜め方向に移動させる際の基本構成（注目領域ＥＲ２であり、（Ｎ+１）行（Ｎ+１）列に極性可変素子２２を配置した構成）での励磁方式は（Ｎ+１）相励磁方式（第４方式とも称する）となる。 In the sixth translational rotational motion pattern, the excitation method in the attention area ER2 when moving four magnetic pole parts 32 arranged in two rows and two columns with different polarities in a checkerboard pattern in a diagonal direction (diagonal directions inclined in both the axial direction X1 and the circumferential direction C1) is a three-phase excitation method in which a predetermined first phase, second phase, and third phase are excited among the polarity variable elements 22 in the attention area ER2 when moving in the axial direction X1 and the circumferential direction C1. Note that, in order to simplify the explanation of the operation of the mover 3, the sixth translational rotational motion pattern of the three-phase excitation method will be explained here, but the present invention is not limited to this. In the sixth translational rotational movement pattern, when N is a positive number equal to or greater than 2, the excitation method in the basic configuration (attention area ER2, configuration in which polarity variable elements 22 are arranged in (N+1) rows and (N+1) columns) when moving magnetic pole portions 32 arranged in N rows and N columns in a diagonal direction is the (N+1)-phase excitation method (also called the fourth method).

始めに、図３５の並進回転動作第６パターン１に示すように、可動子３の第１領域ＭＲ１と対向する、固定子２の２行２列目及び２行３列目の極性可変素子Ｓ２２，Ｓ２３を、第１領域ＭＲ１と異なる極性として、可動子３の第１領域ＭＲ１を磁力により固定子２の２行２列目及び２行３列目の極性可変素子Ｓ２２，Ｓ２３に引き寄せる。これにより、可動子３の第１領域ＭＲ１部分を膨張（拡径）させ、可動子３の第１領域ＭＲ１を固定子２の内周面に接触させる（第１極性変更）。 35, the polarity variable elements S22 , S23 in the second row, second column and the second row, third column of the stator 2, which face the first region MR1 of the mover 3, are set to a polarity different from that of the first region MR1, and the first region MR1 of the mover 3 is attracted by magnetic force to the polarity variable elements S22 , S23 in the second row, second column and the second row, third column of the stator 2. This causes the first region MR1 of the mover 3 to expand (expand in diameter), and the first region MR1 of the mover 3 is brought into contact with the inner circumferential surface of the stator 2 (first polarity change).

可動子３の第２領域ＭＲ２と対向する、固定子２の３行２列目及び３行３列目の極性可変素子Ｓ３２，Ｓ３３を、第２領域ＭＲ２と異なる極性として、可動子３の第２領域ＭＲ２を磁力により固定子２の３行２列目及び３行３列目の極性可変素子Ｓ３２，Ｓ３３に引き寄せる。これにより、可動子３の第２領域ＭＲ２部分を膨張（拡径）させ、可動子３の第２領域ＭＲ２を固定子２の内周面に接触させる（第１極性変更）。 The polarity variable elements S32 , S33 in the second row, third column and the third row, third column of the stator 2, which face the second region MR2 of the mover 3, are set to a polarity different from that of the second region MR2, and the second region MR2 of the mover 3 is attracted by magnetic force to the polarity variable elements S32 , S33 in the second row, third column and the third row, third column of the stator 2. This causes the second region MR2 of the mover 3 to expand (expand in diameter), and the second region MR2 of the mover 3 to contact the inner circumferential surface of the stator 2 (first polarity change).

また、固定子２の注目領域ＥＲ２内において、可動子３の第１領域ＭＲ１における一方のＮ極部３３ｎと隣接する、固定子２の１行１列目、２行１列目及び１行２列目の極性可変素子Ｓ１１，Ｓ２１，Ｓ１２は、当該第１領域ＭＲ１のＮ極部３３ｎと同じ極性とする。固定子２の注目領域ＥＲ２内において、可動子３の第１領域ＭＲ１における他方のＳ極部３４ｓと隣接する、固定子２の１行３列目の極性可変素子Ｓ１３は、当該第１領域ＭＲ１のＳ極部３４ｓと同じ極性とする。さらに、固定子２の注目領域ＥＲ２内において、可動子３の第２領域ＭＲ２における一方のＳ極部３４ｓと隣接する、固定子２の３行１列目の極性可変素子Ｓ３１は、当該第２領域ＭＲ２のＳ極部３４ｓと同じ極性とする。 In addition, in the region of interest ER2 of the stator 2, the polarity variable elements S11, S21, and S12 in the first row , first column, second row, first column, and first row , second column of the stator 2 adjacent to one N-pole portion 33n in the first region MR1 of the mover 3 have the same polarity as the N-pole portion 33n in the first region MR1. In the region of interest ER2 of the stator 2, the polarity variable element S13 in the first row, third column of the stator 2 adjacent to the other S-pole portion 34s in the first region MR1 of the mover 3 has the same polarity as the S-pole portion 34s in the first region MR1. In addition, in the region of interest ER2 of the stator 2, the polarity variable element S31 in the third row, first column of the stator 2 adjacent to one S-pole portion 34s in the second region MR2 of the mover 3 has the same polarity as the S-pole portion 34s in the second region MR2.

次に、図３５の並進回転動作第６パターン２に示すように、固定子２において極性切り替え１を行い、可動子３の第１領域ＭＲ１の一方の磁極部３２（Ｎ極部３３ｎ）と対向する、固定子２の２行２列目の極性可変素子Ｓ２２を、当該第１領域ＭＲ１の一方の磁極部３２と同じ極性とし、磁力により第１領域ＭＲ１の一方の磁極部３２を固定子２の当該極性可変素子Ｓ２２から引き離す。可動子３の第１領域ＭＲ１におけるＮ極部３３ｎを収縮（縮径）させ、当該第１領域ＭＲ１のＮ極部３３ｎを固定子２の内周面と非接触にさせる。 35 , polarity switch 1 is performed in the stator 2, the polarity variable element S22 in the second row and second column of the stator 2, which faces one magnetic pole portion 32 (N-pole portion 33n) of the first region MR1 of the mover 3, is set to the same polarity as one magnetic pole portion 32 of the first region MR1, and the one magnetic pole portion 32 of the first region MR1 is separated from the polarity variable element S22 of the stator 2 by magnetic force. The N-pole portion 33n in the first region MR1 of the mover 3 is contracted (reduced in diameter) so that the N-pole portion 33n of the first region MR1 is brought out of contact with the inner circumferential surface of the stator 2.

次に、図３５の並進回転動作第６パターン３に示すように、固定子２において極性切り替え２を行い、可動子３の第１領域ＭＲ１における一方の磁極部３２（Ｎ極部３３ｎ）の移動方向に位置する、固定子２の１行１列目、２行１列目、１行２列目及び２行２列目の極性可変素子Ｓ１１，Ｓ２１，Ｓ１２，Ｓ２２を、第１領域ＭＲ１のＮ極部３３ｎと異なる極性とする。 Next, as shown in the sixth translational rotation operation pattern 3 in Figure 35, polarity switching 2 is performed on the stator 2, and the polarity variable elements S11, S21, S12, and S22 in the first row, first column, second row, first column, and second row, second column of the stator 2, which are located in the movement direction of one of the magnetic pole portions 32 (N- pole portion 33n ) in the first region MR1 of the movable member 3, are set to have a polarity different from that of the N-pole portion 33n of the first region MR1.

これにより、可動子３の第１領域ＭＲ１における一方の磁極部３２（Ｎ極部３３ｎ）は、磁力（可変素子３１が弾性部材である場合には、移動方向側の可変部３５が伸長していたことによる移動方向側への復元力（推進力）も）によって、固定子２の１行１列目、２行１列目、１行２列目及び２行２列目の極性可変素子Ｓ１１，Ｓ２１，Ｓ１２，Ｓ２２を跨いだ中間領域ＥＲ３５に引き寄せられる。 As a result, one of the magnetic pole portions 32 (N-pole portion 33n) in the first region MR1 of the movable element 3 is attracted to an intermediate region ER35 straddling the polar variable elements S11, S21, S12, S22 in the first row, first column, second row, first column, and second row, second column of the stator 2 by magnetic force (and, if the variable element 31 is an elastic material, by a restoring force (propulsion force) toward the direction of movement due to the extension of the variable portion 35 on the direction of movement side).

このようにして、可動子３の第１領域ＭＲ１における一方の磁極部３２部分のみを、斜め方向に位置する固定子２の中間領域ＥＲ３５まで移動させ、当該中間領域ＥＲ３５で膨張（拡径）させて固定子２の内周面に接触させる（第２極性変更）。 In this way, only one of the magnetic pole portions 32 in the first region MR1 of the mover 3 is moved to the intermediate region ER35 of the stator 2 located in the diagonal direction, and is expanded (increased in diameter) in the intermediate region ER35 to come into contact with the inner circumferential surface of the stator 2 (second polarity change).

なお、可変素子３１が弾性部材である場合、可動子３では、第１領域ＭＲ１のＮ極部３３ｎが斜め方向に移動した際に、第１領域ＭＲ１のＮ極部３３ｎ及びＳ極部３４ｓとの間、第１領域ＭＲ１のＮ極部３３ｎと第２領域ＭＲ２との間、をそれぞれ離して可変部３５を伸長させ、移動方向である斜め方向側への推進力が生じた状態になることが望ましい。 When the variable element 31 is an elastic member, it is desirable that when the N-pole portion 33n of the first region MR1 of the mover 3 moves in an oblique direction, the N-pole portion 33n of the first region MR1 and the S-pole portion 34s, and the N-pole portion 33n of the first region MR1 and the second region MR2 are separated from each other, thereby extending the variable portion 35, and generating a propulsive force in the oblique direction, which is the direction of movement.

次に、図３６の並進回転動作第６パターン４に示すように、固定子２において極性切り替え３を行い、注目領域ＥＲ２内の全ての極性可変素子２２をＳ極とする。すなわち、可動子３の第１領域ＭＲ１における他方の磁極部３２（Ｓ極部３４ｓ）と、第２領域ＭＲ２における一方の磁極部３２（Ｓ極部３４ｓ）と、に対応する、固定子２の２行３列目及び３行２列目の極性可変素子Ｓ２３，Ｓ３２をそれぞれ可動子３の当該Ｓ極部３４ｓと同じ極性とする。 36, polarity switching 3 is performed on the stator 2, and all the polarity variable elements 22 in the region of interest ER2 are set to S poles. That is, the polarity variable elements S23 and S32 in the second row, third column and the third row, second column of the stator 2, which correspond to the other magnetic pole portion 32 (S pole portion 34s) in the first region MR1 of the mover 3 and one magnetic pole portion 32 (S pole portion 34s) in the second region MR2 , are set to the same polarity as the S pole portion 34s of the mover 3.

また、並進回転動作第６パターン４では、極性切り替え３を行い、可動子３の第１領域ＭＲ１における他方の磁極部３２（Ｓ極部３４ｓ）と、第２領域ＭＲ２における一方の磁極部３２（Ｓ極部３４ｓ）との移動方向に位置する、固定子２の１行３列目及び３行１列目の極性可変素子Ｓ１３，Ｓ３１をそれぞれ可動子３の当該Ｓ極部３４ｓと同じ極性とする。 In addition, in the sixth translational rotation operation pattern 4, polarity switching 3 is performed, and the polarity variable elements S13, S31 in the first row, third column and the third row, first column of the stator 2, which are located in the movement direction of the other magnetic pole portion 32 (S pole portion 34s) in the first region MR1 of the movable member 3 and one magnetic pole portion 32 (S pole portion 34s ) in the second region MR2, are each set to the same polarity as the S pole portion 34s of the movable member 3.

これにより、可動子３は、第１領域ＭＲ１及び第２領域ＭＲ２のＮ極部３３ｎが、磁力により固定子２の中間領域ＥＲ３５及び極性可変素子Ｓ３３に引き寄せられて膨張（拡径）し、固定子２の内周面と接触した状態になり、一方、第１領域ＭＲ１及び第２領域ＭＲ２のＳ極部３４ｓが、磁力により固定子２の極性可変素子Ｓ２３，Ｓ３２から引き離されて収縮（縮径）し、固定子２の内周面と非接触した状態になる。 As a result, the N-pole portions 33n of the first region MR1 and the second region MR2 of the mover 3 are attracted to the intermediate region ER35 and the polarity variable element S33 of the stator 2 by magnetic force, expanding (widening in diameter) and coming into contact with the inner surface of the stator 2, while the S-pole portions 34s of the first region MR1 and the second region MR2 are pulled away from the polarity variable elements S23 , S32 of the stator 2 by magnetic force, contracting (reducing in diameter) and coming out of contact with the inner surface of the stator 2.

次に、図３６の並進回転動作第６パターン５に示すように、固定子２において極性切り替え４を行い、可動子３の第１領域ＭＲ１における一方の磁極部３２（Ｎ極部３３ｎ）と、第２領域ＭＲ２における他方の磁極部３２（Ｎ極部３３ｎ）と接触している、固定子２の極性可変素子Ｓ１１，Ｓ３３以外の極性可変素子Ｓ２１，Ｓ３１，Ｓ１２，Ｓ３２，Ｓ２３，Ｓ１３，Ｓ２３を、可動子３の第１領域ＭＲ１における他方の磁極部３２（Ｓ極部３４ｓ）と、第２領域ＭＲ２における一方の磁極部３２（Ｓ極部３４ｓ）と異なる極性とする。 Next, as shown in the sixth translational rotation operation pattern 5 of Figure 36, polarity switching 4 is performed in the stator 2, and the polarity variable elements S21, S31, S12, S32, S23, S13, and S23 of the stator 2 other than the polarity variable elements S11 and S33 , which are in contact with one magnetic pole portion 32 (N pole portion 33n) in the first region MR1 of the movable member 3 and the other magnetic pole portion 32 (N pole portion 33n ) in the second region MR2 , are set to have a polarity different from the polarity of the other magnetic pole portion 32 (S pole portion 34s) in the first region MR1 of the movable member 3 and one magnetic pole portion 32 (S pole portion 34s) in the second region MR2.

これにより、可動子３の第２領域ＭＲ２における一方の磁極部３２（Ｓ極部３４ｓ）は、磁力（可変素子３１が弾性部材である場合には、可動子３の可変部３５が伸長していたことによる移動方向側への復元力も）によって、固定子２の２行１列目、３行１列目、２行２列目及び３行２列目の極性可変素子Ｓ２１，Ｓ３１，Ｓ２２，Ｓ３２に跨る中間領域ＥＲ３９に引き寄せられ、第１領域ＭＲ１における一方の磁極部３２（Ｎ極部３３ｎ）に近づいた状態となる。 As a result, one of the magnetic pole portions 32 (S pole portion 34s) in the second region MR2 of the movable member 3 is attracted to the intermediate region ER39 spanning the polar variable elements S21, S31, S22, and S32 in the first column of the second row, the first column of the third row, the second column of the second row, and the second column of the third row of the stator 2 by magnetic force (and, if the variable element 31 is an elastic member, the restoring force in the direction of movement due to the extension of the variable portion 35 of the movable member 3 ), and is brought into a state of approaching one of the magnetic pole portions 32 (N pole portion 33n) in the first region MR1.

また、可動子３の第１領域ＭＲ１における他方の磁極部３２（Ｓ極部３４ｓ）は、磁力（可変素子３１が弾性部材である場合には、可動子３の可変部３５が伸長していたことによる移動方向側への復元力も）によって、固定子２の１行２列目、２行２列目、１行３列目及び２行３列目の極性可変素子Ｓ１２，Ｓ２２，Ｓ１３，Ｓ２３に跨る中間領域ＥＲ３７に引き寄せられ、第１領域ＭＲ１における一方の磁極部３２（Ｎ極部３３ｎ）に近づいた状態となる。 In addition, the other magnetic pole portion 32 (S pole portion 34s) in the first region MR1 of the mover 3 is attracted to the intermediate region ER37 spanning the polarity variable elements S12, S22, S13, and S23 in the first row, second column, second row, second column, first row, third column, and second row, third column of the stator 2 by magnetic force (and, if the variable element 31 is an elastic member, by the restoring force in the direction of movement due to the extension of the variable portion 35 of the mover 3 ) , and is brought into a state of approaching one of the magnetic pole portions 32 (N pole portion 33n) in the first region MR1.

なお、このとき、第１領域ＭＲ１における一方の磁極部３２（Ｎ極部３３ｎ）は、定子２の１行１列目の極性可変素子Ｓ１１の一部領域ＥＲ３８に引き寄せられて膨張（拡径）し、固定子２の内周面に接触した状態を維持し得る。 At this time, one of the magnetic pole portions 32 (N-pole portion 33n) in the first region MR1 is attracted to a partial region ER38 of the polarity variable element S11 in the first row and first column of the stator 2, and expands (increases in diameter), and can maintain a state of contact with the inner surface of the stator 2.

なお、可変素子３１が弾性部材である場合、可動子３では、第２領域ＭＲ２の他方の磁極部３２（Ｎ極部３３ｎ）と第１領域ＭＲ１との間、第２領域ＭＲ２の他方の磁極部３２（Ｎ極部３３ｎ）と第２領域ＭＲ２の一方の磁極部３２（Ｓ極部３４ｓ）との間を離し、可変部３５を伸長させることから、当該可変部３５において移動方向である斜め方向側への推進力が生じた状態になることが望ましい。 When the variable element 31 is an elastic member, the movable member 3 separates the other magnetic pole portion 32 (N pole portion 33n) of the second region MR2 from the first region MR1, and the other magnetic pole portion 32 (N pole portion 33n) of the second region MR2 from one magnetic pole portion 32 (S pole portion 34s) of the second region MR2, and extends the variable portion 35, so that it is desirable that a propulsive force is generated in the variable portion 35 in the diagonal direction, which is the direction of movement.

次に、図３６の並進回転動作第６パターン６に示すように、固定子２において極性切り替え５を行い、第２領域ＭＲ２の他方の磁極部３２（Ｎ極部３３ｎ）が位置している、固定子２の３行３列目の極性可変素子Ｓ３３を、当該第２領域ＭＲ２の他方の磁極部３２（Ｎ極部３３ｎ）と同じ極性とする。これにより、可動子３の第２領域ＭＲ２における他方の磁極部３２（Ｎ極部３３ｎ）は、固定子２の極性可変素子Ｓ３３から引き離されて収縮（縮径）し、固定子２の内周面と非接触になる。 36, polarity switching 5 is performed in the stator 2, and the polarity variable element S33 in the third row and third column of the stator 2, where the other magnetic pole portion 32 (N-pole portion 33n) of the second region MR2 is located, is set to the same polarity as the other magnetic pole portion 32 (N-pole portion 33n) of the second region MR2. As a result, the other magnetic pole portion 32 (N-pole portion 33n) of the mover 3 in the second region MR2 is pulled away from the polarity variable element S33 of the stator 2 and contracts (reduced in diameter), and comes out of contact with the inner circumferential surface of the stator 2.

次に、図３７の並進回転動作第６パターン７に示すように、固定子２において極性切り替え６を行い、可動子３の第２領域ＭＲ２における他方の磁極部３２（Ｎ極部３３ｎ）の移動方向に位置する、固定子２の２行２列目、３行２列目、２行３列目及び３行３列目の極性可変素子Ｓ２２，Ｓ３２，Ｓ２３，Ｓ３３を、第２領域ＭＲ２における他方の磁極部３２（Ｎ極部３３ｎ）と異なる極性とする。 Next, as shown in the sixth translational rotation operation pattern 7 of Figure 37, polarity switching 6 is performed in the stator 2, and the polarity variable elements S22, S32, S23, and S33 in the second row, second column, third row, second column, and third row, third column of the stator 2, which are located in the movement direction of the other magnetic pole portion 32 (N pole portion 33n ) in the second region MR2 of the movable member 3, are set to have a polarity different from that of the other magnetic pole portion 32 (N pole portion 33n) in the second region MR2.

これにより、可動子３の第２領域ＭＲ２における他方の磁極部３２（Ｎ極部３３ｎ）は、磁力（可変素子３１が弾性部材である場合には、可動子３の可変部３５が伸長していたことによる移動方向側への復元力も）によって、固定子２の２行２列目、３行２列目、２行３列目及び３行３列目の極性可変素子Ｓ２２，Ｓ３２，Ｓ２３，Ｓ３３を跨る中間領域ＥＲ４３に引き寄せられる。可動子３の第２領域ＭＲ２における他方の磁極部３２（Ｎ極部３３ｎ）は、固定子２の中間領域ＥＲ４３部分で膨張（拡径）して固定子２の内周面に接触する。 As a result, the other magnetic pole portion 32 (N-pole portion 33n) in the second region MR2 of the mover 3 is attracted to an intermediate region ER43 spanning the polarity variable elements S22, S32, S23, and S33 in the second row, second column, the third row, second column, the second row, third column, and the third row, third column of the stator 2 by a magnetic force (and a restoring force in the movement direction due to the extension of the variable portion 35 of the mover 3 if the variable element 31 is an elastic member). The other magnetic pole portion 32 (N - pole portion 33n ) in the second region MR2 of the mover 3 expands (increases in diameter) in the intermediate region ER43 of the stator 2 and comes into contact with the inner circumferential surface of the stator 2.

なお、このとき、可動子３の第１領域ＭＲ１における一方の磁極部３２（Ｎ極部３３ｎ）は、固定子２の２行２列目の極性可変素子Ｓ２２が当該磁極部３２と異なる極性に変わることで、当該極性可変素子Ｓ２２の一部領域ＥＲ４１にも引き寄せられて膨張（拡径）し、固定子２の内周面に接触する。また、可動子３の第１領域ＭＲ１における他方の磁極部３２（Ｓ極部３４ｓ）は、固定子２の２行２列目及び２行３列目の極性可変素子Ｓ２２，Ｓ２３が当該磁極部３２と同じ極性に変わることで、固定子２の１行２列目及び１行３列目の極性可変素子Ｓ１２，Ｓ１３を跨る中間領域ＥＲ４２部分に引き寄せられて膨張（拡径）し、固定子２の内周面に接触する。さらに、可動子３の第２領域ＭＲ２における一方の磁極部３２（Ｓ極部３４ｓ）は、固定子２の２行２列目及び３行２列目の極性可変素子Ｓ２２，Ｓ３２が当該磁極部３２と同じ極性に変わることで、固定子２の２行１列目及び３行１列目の極性可変素子Ｓ２１，Ｓ３１を跨る中間領域ＥＲ４０部分に引き寄せられて膨張（拡径）し、固定子２の内周面に接触する。 At this time, one of the magnetic pole portions 32 (N-pole portion 33n) in the first region MR1 of the mover 3 is attracted to a partial region ER41 of the polarity variable element S22 because the polarity variable element S22 in the second row, second column of the stator 2 changes to a polarity different from that of the magnetic pole portion 32 , and expands (expands in diameter) and comes into contact with the inner circumferential surface of the stator 2. Also, the other magnetic pole portion 32 (S-pole portion 34s) in the first region MR1 of the mover 3 is attracted to an intermediate region ER42 straddling the polarity variable elements S12 , S13 in the first row, second column and first row, third column of the stator 2 because the polarity variable elements S22 , S23 in the second row, second column and second row, third column of the stator 2 change to the same polarity as the magnetic pole portion 32, and expands (expands in diameter) and comes into contact with the inner circumferential surface of the stator 2. Furthermore, as the polarity variable elements S22 , S32 in the second row, second column and the third row, second column of the stator 2 change to the same polarity as the magnetic pole portion 32, one of the magnetic pole portions 32 (S pole portion 34s ) in the second region MR2 of the mover 3 is attracted to the intermediate region ER40 spanning the polarity variable elements S21 , S31 in the second row, first column and the third row, first column of the stator 2, and expands (increases in diameter) and comes into contact with the inner surface of the stator 2.

次に、図３７の並進回転動作第６パターン８に示すように、固定子２において極性切り替え７を行い、可動子３の第１領域ＭＲ１における一方の磁極部３２（Ｎ極部３３ｎ）が位置する、固定子２の２行２列目の極性可変素子Ｓ２２と、当該磁極部３２の移動方向に位置する、固定子２の１行１列目の極性可変素子Ｓ１１と、を当該磁極部３２と同じ極性とする。これにより、可動子３の第１領域ＭＲ１における一方の磁極部３２（Ｎ極部３３ｎ）は、固定子２の極性可変素子Ｓ１１，Ｓ２２から引き離されて収縮（縮径）し、固定子２の内周面と非接触になる。 37 , polarity switching 7 is performed in the stator 2, and the polarity variable element S22 in the second row, second column of the stator 2, where one magnetic pole portion 32 (N-pole portion 33n) in the first region MR1 of the mover 3 is located, and the polarity variable element S11 in the first row, first column of the stator 2, where the one magnetic pole portion 32 (N-pole portion 33n) in the first region MR1 of the mover 3 is located, are set to the same polarity as the magnetic pole portion 32. As a result, the one magnetic pole portion 32 (N-pole portion 33n) in the first region MR1 of the mover 3 is pulled away from the polarity variable elements S11 , S22 of the stator 2 and contracts (reduced in diameter), and comes out of contact with the inner circumferential surface of the stator 2.

なお、このとき、可動子３の第１領域ＭＲ１における他方の磁極部３２（Ｓ極部３４ｓ）と、可動子３の第２領域ＭＲ２における一方の磁極部３２（Ｓ極部３４ｓ）は、固定子２の２行２列目の極性可変素子Ｓ２２が当該磁極部３２と異なる極性に変わることで、当該極性可変素子Ｓ２２の一部領域ＥＲ４５にも引き寄せられて膨張（拡径）し、固定子２の内周面に接触する。また、可動子３の第２領域ＭＲ２における他方の磁極部３２（Ｎ極部３３ｎ）は、固定子２の２行２列目の極性可変素子Ｓ２２が当該磁極部３２と同じ極性に変わることで、当該極性可変素子Ｓ２２から離れて収縮（縮径）し、固定子２の極性可変素子Ｓ２２部分の内周面と非接触となる。 At this time, the other magnetic pole portion 32 (S-pole portion 34s) in the first region MR1 of the mover 3 and one magnetic pole portion 32 (S-pole portion 34s) in the second region MR2 of the mover 3 are also attracted to a partial region ER45 of the polarity variable element S22 by the polarity variable element S22 in the second row and second column of the stator 2 changing to a polarity different from that of the magnetic pole portion 32, and expand (increase in diameter), and come into contact with the inner circumferential surface of the stator 2. Also, the other magnetic pole portion 32 (N-pole portion 33n) in the second region MR2 of the mover 3 is moved away from the polarity variable element S22 by the polarity variable element S22 in the second row and second column of the stator 2 changing to the same polarity as that of the magnetic pole portion 32, and contracts (reduced in diameter), and comes out of contact with the inner circumferential surface of the polarity variable element S22 portion of the stator 2.

次に、図３７の並進回転動作第６パターン９に示すように、固定子２において極性切り替え８を行い、可動子３の第１領域ＭＲ１における一方の磁極部３２（Ｎ極部３３ｎ）の移動方向（斜め方向）に位置する、固定子２の１行１列目の極性可変素子Ｓ１１を、当該磁極部３２と異なる極性とする。 Next, as shown in the sixth translational rotation operation pattern 9 in Figure 37, polarity switching 8 is performed in the stator 2, and the polarity-variable element S11 in the first row and first column of the stator 2, which is located in the movement direction (diagonal direction) of one of the magnetic pole portions 32 (N-pole portion 33n) in the first region MR1 of the movable member 3, is set to a polarity different from that of the magnetic pole portion 32.

これにより、可動子３の第１領域ＭＲ１における一方の磁極部３２（Ｎ極部３３ｎ）は、磁力によって、固定子２の１行１列目の極性可変素子Ｓ１１に引き寄せられる。これにより、可動子３の第１領域ＭＲ１における一方の磁極部３２（Ｎ極部３３ｎ）は、固定子２の極性可変素子Ｓ１１部分で膨張（拡径）して固定子２の内周面に接触する。 As a result, one of the magnetic pole portions 32 (N-pole portion 33n) in the first region MR1 of the mover 3 is attracted by magnetic force to the polarity variable element S11 in the first row and first column of the stator 2. As a result, the one of the magnetic pole portions 32 (N-pole portion 33n) in the first region MR1 of the mover 3 expands (increases in diameter) at the polarity variable element S11 portion of the stator 2 and comes into contact with the inner circumferential surface of the stator 2.

なお、可変素子３１が弾性部材である場合、可動子３では、第１領域ＭＲ１のＮ極部３３ｎが斜め方向に移動した際に、第１領域ＭＲ１のＮ極部３３ｎ及びＳ極部３４ｓとの間、第１領域ＭＲ１のＮ極部３３ｎと第２領域ＭＲ２との間、をそれぞれ離して可変部３５を伸長させ、移動方向である斜め方向側への推進力が生じた状態になることが望ましい。 When the variable element 31 is an elastic member, it is desirable that when the N-pole portion 33n of the first region MR1 of the mover 3 moves in an oblique direction, the N-pole portion 33n of the first region MR1 and the S-pole portion 34s, and the N-pole portion 33n of the first region MR1 and the second region MR2 are separated from each other, thereby extending the variable portion 35, and generating a propulsive force in the oblique direction, which is the direction of movement.

次に、図３８の並進回転動作第６パターン１０に示すように、固定子２において極性切り替え９を行い、注目領域ＥＲ２内の全ての極性可変素子２２をＳ極とする。すなわち、可動子３の第１領域ＭＲ１における他方の磁極部３２（Ｓ極部３４ｓ）と、第２領域ＭＲ２における一方の磁極部３２（Ｓ極部３４ｓ）と、に対応する、固定子２の２行１列目、３行１列目、１行２列目、２行２列目及び１行３列目の極性可変素子Ｓ２１，Ｓ３１，Ｓ１２，Ｓ２２，Ｓ１３をそれぞれ可動子３の当該Ｓ極部３４ｓと同じ極性とする。これにより、可動子３は、第１領域ＭＲ１における他方の磁極部３２（Ｓ極部３４ｓ）と、第２領域ＭＲ２における一方の磁極部３２（Ｓ極部３４ｓ）とが、磁力により固定子２の極性可変素子Ｓ２１，Ｓ３１，Ｓ１２，Ｓ２２，Ｓ１３から引き離されて収縮（縮径）し、固定子２の内周面と非接触した状態になる。 38, polarity switching 9 is performed in the stator 2, and all the polarity variable elements 22 in the region of interest ER2 are set to S poles. That is, the polarity variable elements S21, S31, S12, S22, S13 in the second row and first column, the third row and first column, the first row and second column, the second row and second column, and the first row and third column of the stator 2, which correspond to the other magnetic pole portion 32 (S pole portion 34s) in the first region MR1 of the mover 3 and one magnetic pole portion 32 (S pole portion 34s ) in the second region MR2, are set to the same polarity as the S pole portion 34s of the mover 3. As a result, the other magnetic pole portion 32 (S pole portion 34s) in the first region MR1 and one magnetic pole portion 32 (S pole portion 34s) in the second region MR2 are pulled away from the polarity variable elements S21 , S31 , S12 , S22 , and S13 of the stator 2 by magnetic force, contracting (reducing in diameter) and becoming non-contact with the inner surface of the stator 2.

次に、図３８の並進回転動作第６パターン１１に示すように、固定子２において極性切り替え１０を行い、可動子３の第１領域ＭＲ１における他方の磁極部３２（Ｓ極部３４ｓ）と、第２領域ＭＲ２における一方の磁極部３２（Ｓ極部３４ｓ）との移動方向に位置する、固定子２の２行１列目及び１行２列目の極性可変素子Ｓ２１，Ｓ１２を、可動子３の第１領域ＭＲ１における他方の磁極部３２（Ｓ極部３４ｓ）と、第２領域ＭＲ２における一方の磁極部３２（Ｓ極部３４ｓ）と異なる極性とする。 Next, as shown in the sixth translational rotation operation pattern 11 in Figure 38, polarity switching 10 is performed in the stator 2, and the polarity variable elements S21, S12 in the second row, first column and the first row, second column of the stator 2, which are located in the movement direction of the other magnetic pole portion 32 (S pole portion 34s) in the first region MR1 of the movable member 3 and one magnetic pole portion 32 (S pole portion 34s) in the second region MR2, are set to have a polarity different from that of the other magnetic pole portion 32 (S pole portion 34s) in the first region MR1 of the movable member 3 and one magnetic pole portion 32 (S pole portion 34s) in the second region MR2.

これにより、可動子３の第１領域ＭＲ１における他方の磁極部３２（Ｓ極部３４ｓ）と、第２領域ＭＲ２における一方の磁極部３２（Ｓ極部３４ｓ）は、磁力（可変素子３１が弾性部材である場合には、可動子３の可変部３５が伸長していたことによる移動方向側への復元力も）によって、固定子２の２行１列目及び１行２列目の極性可変素子Ｓ２１，Ｓ１２に引き寄せられ、第１領域ＭＲ１における一方の磁極部３２（Ｎ極部３３ｎ）に近づいた状態となる。 As a result, the other magnetic pole portion 32 (S pole portion 34s) in the first region MR1 of the movable member 3 and one of the magnetic pole portions 32 (S pole portion 34s) in the second region MR2 are attracted to the polarity variable elements S21, S12 in the second row, first column and the first row, second column of the stator 2 by magnetic force (and, if the variable element 31 is an elastic material, also by the restoring force in the direction of movement due to the extension of the variable portion 35 of the movable member 3 ) , and are brought into a state of approaching the one of the magnetic pole portions 32 (N pole portion 33n) in the first region MR1.

次に、図３８の並進回転動作第６パターン１２に示すように、固定子２において極性切り替え１１を行い、第２領域ＭＲ２の他方の磁極部３２（Ｎ極部３３ｎ）が位置している、固定子２の２行２列目、３行２列目、２行３列目及び３行３列目の極性可変素子Ｓ２２，Ｓ３２，Ｓ２３，Ｓ３３を、当該第２領域ＭＲ２の他方の磁極部３２（Ｎ極部３３ｎ）と同じ極性とする。これにより、可動子３の第２領域ＭＲ２における他方の磁極部３２（Ｎ極部３３ｎ）は、固定子２の極性可変素子Ｓ２２，Ｓ３２，Ｓ２３，Ｓ３３を跨る中間領域から引き離されて収縮（縮径）し、固定子２の内周面と非接触になる。 38, polarity switching 11 is performed in the stator 2, and the polarity variable elements S22, S32, S23, and S33 in the second row, second column, the third row, second column, and the third row, third column of the stator 2, where the other magnetic pole portion 32 (N-pole portion 33n ) of the second region MR2 is located, are set to the same polarity as the other magnetic pole portion 32 (N-pole portion 33n ) of the second region MR2. As a result , the other magnetic pole portion 32 (N-pole portion 33n) of the second region MR2 of the mover 3 is pulled away from the intermediate region spanning the polarity variable elements S22 , S32 , S23 , and S33 of the stator 2, contracts (reduced in diameter), and comes out of contact with the inner circumferential surface of the stator 2.

次に、図３９の並進回転動作第６パターン１３に示すように、固定子２において極性切り替え１２を行い、可動子３の第２領域ＭＲ２における他方の磁極部３２（Ｎ極部３３ｎ）の移動方向に位置する、固定子２の２行２列目の極性可変素子Ｓ２２を、第２領域ＭＲ２における他方の磁極部３２（Ｎ極部３３ｎ）と異なる極性とする。 Next, as shown in the sixth translational rotation operation pattern 13 of Figure 39, polarity switching 12 is performed in the stator 2, and the polarity-variable element S22 in the second row and second column of the stator 2, which is located in the movement direction of the other magnetic pole portion 32 (N-pole portion 33n) in the second region MR2 of the movable member 3, is set to a polarity different from that of the other magnetic pole portion 32 (N-pole portion 33n) in the second region MR2.

これにより、可動子３の第２領域ＭＲ２における他方の磁極部３２（Ｎ極部３３ｎ）は、磁力（可変素子３１が弾性部材である場合には、可動子３の可変部３５が伸長していたことによる移動方向側への復元力も）によって、固定子２の２行２列目の極性可変素子Ｓ２２に引き寄せられる。可動子３の第２領域ＭＲ２における他方の磁極部３２（Ｎ極部３３ｎ）は、固定子２の極性可変素子Ｓ２２部分で膨張（拡径）して固定子２の内周面に接触する。 As a result, the other magnetic pole portion 32 (N-pole portion 33n) in the second region MR2 of the mover 3 is attracted to the polarity variable element S22 in the second row and second column of the stator 2 by magnetic force (and by a restoring force in the movement direction caused by the extension of the variable portion 35 of the mover 3, if the variable element 31 is an elastic member). The other magnetic pole portion 32 (N-pole portion 33n) in the second region MR2 of the mover 3 expands (increases in diameter) at the polarity variable element S22 portion of the stator 2 and comes into contact with the inner circumferential surface of the stator 2.

以上、ソフトアクチュエータ１では、固定子２の注目領域ＥＲ２毎にそれぞれ極性可変素子Ｓ１１，Ｓ１２，Ｓ１３，Ｓ２１，Ｓ２２，Ｓ２３，Ｓ３１，Ｓ３２，Ｓ３３の極性切り替えが行われることで、可動子３の第１領域ＭＲ１の一方の磁極部３２（Ｎ極部３３ｎ）を斜め方向に移動させて固定子２の面に接触させた後に、第１領域ＭＲ１の他方の磁極部３２（Ｓ極部３４ｓ）と、第２領域ＭＲ２の一方の磁極部３２（Ｓ極部３４ｓ）とを固定子２の面と非接触にして、第１領域ＭＲ１の一方の磁極部３２（Ｎ極部３３ｎ）に近づけるように斜め方向に移動させる。さらに、ソフトアクチュエータ１では、第２領域ＭＲ２の他方の磁極部３２（Ｎ極部３３ｎ）を固定子２の面と非接触にして、第１領域ＭＲ１の一方の磁極部３２（Ｎ極部３３ｎ）に近づけるように斜め方向に移動させる。これにより、ソフトアクチュエータ１では、可動子３がこのような尺取虫状の動作を繰り返し行い、固定子２の面に沿って可動子３を斜め方向に並進回転させてゆくことができる。 As described above, in the soft actuator 1, the polarity of the polarity-variable elements S11 , S12 , S13 , S21 , S22 , S23 , S31 , S32 , and S33 is switched for each focus region ER2 of the stator 2, so that one of the magnetic pole portions 32 (N-pole portion 33n) of the first region MR1 of the mover 3 is moved diagonally to contact the surface of the stator 2, and then the other magnetic pole portion 32 (S-pole portion 34s) of the first region MR1 and one of the magnetic pole portions 32 (S-pole portion 34s) of the second region MR2 are brought out of contact with the surface of the stator 2 and moved diagonally toward the one of the magnetic pole portions 32 (N-pole portion 33n) of the first region MR1. Furthermore, in the soft actuator 1, the other magnetic pole portion 32 (N-pole portion 33n) in the second region MR2 is moved in an oblique direction so as to approach one magnetic pole portion 32 (N-pole portion 33n) in the first region MR1 without being in contact with the surface of the stator 2. As a result, in the soft actuator 1, the mover 3 repeats such an inchworm-like movement, and the mover 3 can be translated and rotated in an oblique direction along the surface of the stator 2.

（５）作用及び効果
以上の構成において、ソフトアクチュエータ１では、電流に基づいて異なる極性に変更可能な極性可変素子２２が行列状に配置された固定子２と、固定子２と対向配置された曲折可能な可変素子３１を有した可動子３とを備える。可動子３は、可変素子３１の面に、極性が異なる磁極部３２が交互に配置されており、固定子２における極性可変素子２２の極性の切り替えに応じて、可変素子３１が、固定子２の面に接触及び非接触を繰り返して固定子２の面に沿って移動する。従って、ソフトアクチュエータ１では、車輪や駆動装置などを可動子３に設けることがなく、その分、簡易な構成とし得、固定子２に極性可変素子２２を設けることで、様々な固定子２に対して可動子３を自由に移動させることができる。 (5) Actions and Effects In the above configuration, the soft actuator 1 includes a stator 2 in which the polarity variable elements 22 that can be changed to different polarities based on a current are arranged in a matrix, and a mover 3 having a bendable variable element 31 arranged opposite the stator 2. The mover 3 has magnetic pole portions 32 of different polarities arranged alternately on the surface of the variable element 31, and the variable element 31 moves along the surface of the stator 2 by repeatedly coming into and out of contact with the surface of the stator 2 in response to switching of the polarity of the polarity variable elements 22 in the stator 2. Therefore, in the soft actuator 1, wheels, a driving device, etc. are not provided on the mover 3, and the configuration can be simplified accordingly, and by providing the polarity variable elements 22 on the stator 2, the mover 3 can be freely moved relative to various stators 2.

また、本実施形態に係る可動子３は、固定子２の面方向内における軸方向Ｘ１（一方向）、面方向内で軸方向Ｘ１と直交する周方向Ｃ１（他方向）、及び、面方向内で軸方向Ｘ１と周方向Ｃ１との両方向に対して傾斜した斜め方向のうち、少なくともいずれかの方向に伸長と収縮（縮径）とを繰り返すことによって、固定子２の表面に沿って尺取虫状に移動することができる。 The mover 3 according to this embodiment can move like an inchworm along the surface of the stator 2 by repeatedly expanding and contracting (reducing its diameter) in at least one of the following directions: the axial direction X1 (one direction) in the plane direction of the stator 2, the circumferential direction C1 (the other direction) perpendicular to the axial direction X1 in the plane direction, and the diagonal direction inclined with respect to both the axial direction X1 and the circumferential direction C1 in the plane direction.

本実施形態に係る固定子２は、可動子３の第１領域ＭＲ１（ＭＣ１）の磁極部３２と、第１領域ＭＲ１（ＭＣ１）と隣接した第２領域ＭＲ２（ＭＣ２）の磁極部３２と、を極性可変素子２２の極性を変えて固定子２に接触させる（第１極性変更）。 In the stator 2 according to this embodiment, the magnetic pole portion 32 of the first region MR1 (MC1) of the mover 3 and the magnetic pole portion 32 of the second region MR2 (MC2) adjacent to the first region MR1 (MC1) are brought into contact with the stator 2 by changing the polarity of the polarity variable element 22 (first polarity change).

また、固定子２は、可動子３の第２領域ＭＲ２（ＭＣ２）の磁極部３２を固定子２に接触させたまま、可動子３の第１領域ＭＲ１（ＭＣ１）の磁極部３２が接触している位置の極性可変素子２２と、可動子３の移動方向に位置する極性可変素子２２の極性と、を変え、当該移動方向に位置する極性可変素子２２に第１領域ＭＲ１（ＭＣ１）の磁極部３２を引き寄せて、当該移動方向に位置する、極性を変えた極性可変素子２２の位置に、第１領域ＭＲ１（ＭＣ１）の磁極部３２を接触させる（第２極性変更）。 The stator 2 also changes the polarity of the polarity variable element 22 located in the moving direction of the mover 3 with the polarity variable element 22 at the position where the magnetic pole portion 32 of the second region MR2 (MC2) of the mover 3 is in contact with the stator 2, and attracts the magnetic pole portion 32 of the first region MR1 (MC1) to the polarity variable element 22 located in the moving direction, and brings the magnetic pole portion 32 of the first region MR1 (MC1) into contact with the position of the polarity variable element 22 with the changed polarity located in the moving direction (second polarity change).

さらに、固定子２は、可動子３の第１領域ＭＲ１（ＭＣ１）の磁極部３２を固定子２の新たな位置に接触させたまま、可動子３の第２領域ＭＲ２（ＭＣ２）の磁極部３２が接触している位置の極性可変素子２２と、可動子３の移動方向に位置する極性可変素子２２の極性と、を変え、当該移動方向に位置する極性可変素子２２に、第２領域ＭＲ２（ＭＣ２）の磁極部３２を引き寄せて、当該移動方向に位置する、極性を変えた極性可変素子２２の位置に、第２領域ＭＲ２（ＭＣ２）の磁極部３２を接触させる（第３極性変更）。 Furthermore, while keeping the magnetic pole portion 32 of the first region MR1 (MC1) of the mover 3 in contact with the new position of the stator 2, the stator 2 changes the polarity of the polarity variable element 22 located in the moving direction of the mover 3 with the polarity variable element 22 at the position where the magnetic pole portion 32 of the second region MR2 (MC2) of the mover 3 is in contact, and attracts the magnetic pole portion 32 of the second region MR2 (MC2) to the polarity variable element 22 located in the moving direction, and brings the magnetic pole portion 32 of the second region MR2 (MC2) into contact with the position of the polarity variable element 22 with the changed polarity located in the moving direction (third polarity change).

これにより、ソフトアクチュエータ１では、可動子３を固定子２の面に接触及び非接触を繰り返えさせて固定子２の面に沿って移動させることができる。 As a result, in the soft actuator 1, the mover 3 can be moved along the surface of the stator 2 by repeatedly coming into and out of contact with the surface of the stator 2.

（６）他の実施形態
なお、本発明は、本実施形態に限定されるものではなく、本発明の要旨の範囲内で種々の変形実施が可能であり、例えば、上述した実施形態においては、筒状体の固定子２と、固定子２の筒内空間に配置した、筒状の可動子３とを適用したが、本発明はこれに限らない。例えば、他の実施形態におけるソフトアクチュエータとしては、図４０に示すように、シート状の固定子８２とシート状の可動子８３とを有するソフトアクチュエータ８０であってもよい。 (6) Other embodiments The present invention is not limited to this embodiment, and various modifications are possible within the scope of the present invention, and for example, the above-mentioned embodiment applies a cylindrical stator 2 and a cylindrical mover 3 disposed in the cylindrical space of the stator 2, but the present invention is not limited to this. For example, a soft actuator in another embodiment may be a soft actuator 80 having a sheet-shaped stator 82 and a sheet-shaped mover 83, as shown in FIG.

この場合、ソフトアクチュエータ８０の固定子８２は、シート状体でなる固定子本体８２１を有し、固定子本体８２１の表面に複数の極性可変素子２２が行列状に配置されている。また、可動子８３は、シート状部材などの軟質な材料により形成されたシート状体の可変素子８３１を有しており、可変素子８３１の面に、チェッカーボード・パターンで、極性が異なる磁極部（Ｎ極部３３ｎ、Ｓ極部３４ｓ）３２が交互に配置され、Ｎ極部３３ｎとＳ極部３４ｓとの間に可変部３５をそれぞれ有する。 In this case, the stator 82 of the soft actuator 80 has a stator body 821 made of a sheet-like body, and a plurality of polarity variable elements 22 are arranged in a matrix on the surface of the stator body 821. The mover 83 has a sheet-like variable element 831 made of a soft material such as a sheet-like member, and magnetic pole parts (N pole part 33n, S pole part 34s) 32 with different polarities are alternately arranged in a checkerboard pattern on the surface of the variable element 831, and a variable part 35 is provided between each of the N pole part 33n and the S pole part 34s.

ソフトアクチュエータ８０では、固定子８２における極性可変素子２２の極性の切り替えに応じて、可動子８３が、固定子８２の面に接触及び非接触を繰り返して固定子８２の平面に沿って移動する。具体的には、固定子８２の面方向内における一方向Ｘ２、当該面方向内で一方向Ｘ２と直交する他方向Ｙ２、及び、面方向内で一方向Ｘ２と他方向Ｙ２との両方向に対して傾斜した斜め方向のうち、少なくともいずれかの方向に、可動子８３が伸長と収縮（縮径）とを繰り返し、固定子８２の表面に沿って尺取虫状に移動する。 In the soft actuator 80, the mover 83 moves along the plane of the stator 82 by repeatedly coming into and out of contact with the surface of the stator 82 in response to switching of the polarity of the polarity variable element 22 in the stator 82. Specifically, the mover 83 repeatedly expands and contracts (reduced in diameter) in at least one of the following directions: one direction X2 within the plane direction of the stator 82, another direction Y2 perpendicular to the one direction X2 within the plane direction, and an oblique direction inclined relative to both the one direction X2 and the other direction Y2 within the plane direction, and moves like an inchworm along the surface of the stator 82.

また、他のソフトアクチュエータとしては、筒状体の固定子２にシート状の可動子８３を組み合わせたソフトアクチュエータでもよく、シート状の固定子８２に、筒状又は柱状の可動子３を組み合わせたソフトアクチュエータであってもよい。 Other soft actuators may be soft actuators in which a cylindrical stator 2 is combined with a sheet-shaped mover 83, or soft actuators in which a sheet-shaped stator 82 is combined with a cylindrical or columnar mover 3.

また、上述した実施形態においては、可動子３の第１領域ＭＲ１（ＭＣ１）及び第２領域ＭＲ２（ＭＣ２）を尺取虫状に動作させて固定子２の内周面（面）に沿って可動子３を移動させる動作例として、上述したように、「（２）並進動作」、「（３）回転動作」及び「（４）並進回転動作」について説明したが、本発明はこれに限らない。例えば、上述した「（２）並進動作」、「（３）回転動作」及び「（４）並進回転動作」を組み合わせた動作としてもよい。また、「（４）並進回転動作」においては、可動子３の並進回転動作を説明するために、軸方向Ｘ１に磁極部３２が並んだ第１領域ＭＣ１と第２領域ＭＣ２を適用して説明したが、本発明はこれに限らず、周方向Ｃ１に磁極部３２が並んだ第１領域ＭＲ１と第２領域ＭＲ２を適用して説明できることは言うまでもない。 In the above-mentioned embodiment, the first region MR1 (MC1) and the second region MR2 (MC2) of the mover 3 are moved in an inchworm-like manner to move the mover 3 along the inner circumferential surface (face) of the stator 2. As an example, the above-mentioned "(2) translational motion", "(3) rotational motion" and "(4) translational rotational motion" have been described, but the present invention is not limited thereto. For example, the above-mentioned "(2) translational motion", "(3) rotational motion" and "(4) translational rotational motion" may be combined. In addition, in the "(4) translational rotational motion", the first region MC1 and the second region MC2 in which the magnetic pole parts 32 are aligned in the axial direction X1 have been described to explain the translational rotational motion of the mover 3. However, the present invention is not limited thereto, and it goes without saying that the present invention can be described by applying the first region MR1 and the second region MR2 in which the magnetic pole parts 32 are aligned in the circumferential direction C1.

１，８０ ソフトアクチュエータ
２，８２ 固定子
３，８３ 可動子
２２ 極性可変素子
２２ｎ Ｎ極素子（極性可変素子）
２２ｓ Ｓ極素子（極性可変素子）
３２ 磁極部
３３ｎ Ｎ極部（磁極部）
３４ｓ Ｓ極部（磁極部）

 1, 80 Soft actuator 2, 82 Stator 3, 83 Movable element 22 Polarity variable element 22n N-pole element (polarity variable element)
22s S pole element (polarity variable element)
32 Magnetic pole part 33n N pole part (magnetic pole part)
34s S pole part (magnetic pole part)

Claims (11)

電流に基づいて異なる極性に変更可能な極性可変素子が行列状に配置された固定子と、
前記固定子と対向配置された曲折可能な可変素子を有し、前記可変素子の面に、極性が異なる磁極部が交互に配置された可動子と、
を有し、
前記可動子は、前記固定子における前記極性可変素子の極性の切り替えに応じて、前記可変素子が、前記固定子の面に接触及び非接触を繰り返して前記固定子の面に沿って移動し、
前記固定子の面に沿って前記可動子を移動させるための基本構成となる、前記極性可変素子と前記磁極部の行列の数が異なる、
ソフトアクチュエータ。 A stator in which polarity variable elements that can be changed to different polarities based on a current are arranged in a matrix form;
a movable element having a bendable variable element disposed opposite to the stator, the variable element having magnetic pole portions with different polarities disposed alternately on a surface thereof;
having
the movable element moves along a surface of the stator by repeatedly coming into and out of contact with the surface of the stator in response to switching of the polarity of the polarity variable element in the stator;
The number of rows and columns of the polarity variable elements and the magnetic pole parts, which are basic components for moving the mover along the surface of the stator, are different.
Soft actuator. 前記可動子は、前記可変素子が、非弾性部材、又は、伸縮自在な弾性部材でなる、
請求項１に記載のソフトアクチュエータ。 The movable element is made of a non-elastic material or a stretchable elastic material.
The soft actuator of claim 1 . 前記可動子は、外周面を有した筒状又は柱状に形成され、前記外周面が前記固定子の面に接触及び非接触を繰り返して前記固定子の面に沿って移動する、
請求項１又は２に記載のソフトアクチュエータ。 The mover is formed in a cylindrical or columnar shape having an outer circumferential surface, and the outer circumferential surface moves along the surface of the stator while repeatedly coming into and out of contact with the surface of the stator.
The soft actuator according to claim 1 or 2. 前記可動子は、シート状に形成され、表面が前記固定子の面に接触及び非接触を繰り返して前記固定子の面に沿って移動する、
請求項１又は２に記載のソフトアクチュエータ。 The mover is formed in a sheet shape, and the surface of the mover moves along the surface of the stator while repeatedly coming into and out of contact with the surface of the stator.
The soft actuator according to claim 1 or 2. 前記固定子は、筒状体である、
請求項１～４のいずれか１項に記載のソフトアクチュエータ。 The stator is a cylindrical body.
The soft actuator according to any one of claims 1 to 4. 前記可動子は、前記固定子の軸方向、前記固定子の周方向、及び、前記軸方向と前記周方向との両方向に対して傾斜した斜め方向のうち、少なくともいずれかの方向に、隣接する前記磁極部の間の距離が伸長と短縮とを繰り返し、前記固定子の内周面に沿って前記固定子の筒内空間を尺取虫状に移動する、
請求項５に記載のソフトアクチュエータ。 the distance between adjacent magnetic pole portions of the movable member repeats expansion and contraction in at least one of the axial direction of the stator, the circumferential direction of the stator, and the oblique direction inclined with respect to both the axial direction and the circumferential direction, and the movable member moves in an inchworm-like manner in the space inside the cylinder of the stator along the inner circumferential surface of the stator.
The soft actuator of claim 5 . 前記固定子は、
前記可動子を前記軸方向と前記周方向とに移動させる際の励磁方式が、Ｎ相励磁方式、又は、Ｎ－（Ｎ+１）相励磁方式であり、
前記可動子を前記斜め方向に移動させる際の励磁方式が、前記軸方向及び前記周方向への移動時がＮ相励磁の第１方式、前記軸方向への移動時がＮ相励磁で前記周方向への移動時がＮ－（Ｎ+１）相励磁の第２方式、前記軸方向への移動時がＮ－（Ｎ+１）相励磁で前記周方向への移動時がＮ相励磁の第３方式、及び、前記軸方向及び前記周方向への移動時が（Ｎ+１）相励磁の第４方式、のうち、いずれかである、
（前記Ｎは２以上の正の数であり、前記－は、Ｎ相励磁と（Ｎ+１）相励磁とを繰り返すことを示すハイフンである）
請求項６に記載のソフトアクチュエータ。 The stator includes:
an excitation method for moving the mover in the axial direction and the circumferential direction is an N-phase excitation method or an N-(N+1)-phase excitation method;
an excitation method for moving the mover in the oblique direction is any one of a first method of N-phase excitation during movement in the axial direction and the circumferential direction, a second method of N-phase excitation during movement in the axial direction and N-(N+1)-phase excitation during movement in the circumferential direction, a third method of N-(N+1)-phase excitation during movement in the axial direction and N-phase excitation during movement in the circumferential direction, and a fourth method of (N+1)-phase excitation during movement in the axial direction and the circumferential direction;
(The N is a positive number of 2 or more, and the - is a hyphen indicating that N-phase excitation and (N+1)-phase excitation are repeated.)
The soft actuator of claim 6. 前記固定子は、シート状体である、
請求項１～４のいずれか１項に記載のソフトアクチュエータ。 The stator is a sheet-like body.
The soft actuator according to any one of claims 1 to 4. 前記可動子は、前記固定子の面方向内における一方向、前記面方向内で前記一方向と直交する他方向、及び、前記面方向内で前記一方向と前記他方向との両方向に対して傾斜した斜め方向のうち、少なくともいずれかの方向に、隣接する前記磁極部の間の距離が伸長と短縮とを繰り返し、前記固定子の表面に沿って尺取虫状に移動する、
請求項８に記載のソフトアクチュエータ。 the mover moves like an inchworm along the surface of the stator, with the distance between adjacent magnetic pole portions repeatedly expanding and contracting in at least one of the following directions: one direction in a plane direction of the stator, another direction perpendicular to the one direction in the plane direction, and an oblique direction inclined with respect to both the one direction and the other direction in the plane direction;
The soft actuator of claim 8. 前記固定子は、
前記可動子を前記一方向と前記他方向とに移動させる際の励磁方式が、Ｎ相励磁方式、又は、Ｎ－（Ｎ+１）相励磁方式であり、
前記可動子を前記斜め方向に移動させる際の励磁方式が、前記一方向及び前記他方向への移動時がＮ相励磁の第１方式、前記一方向への移動時がＮ相励磁で前記他方向への移動時がＮ－（Ｎ+１）相励磁の第２方式、前記一方向への移動時がＮ－（Ｎ+１）相励磁で前記他方向への移動時がＮ相励磁の第３方式、及び、前記一方向及び前記他方向への移動時が（Ｎ+１）相励磁の第４方式、のうち、いずれかである、
（前記Ｎは２以上の正の数であり、前記－は、Ｎ相励磁と（Ｎ+１）相励磁とを繰り返すことを示すハイフンである）
請求項９に記載のソフトアクチュエータ。 The stator includes:
an excitation method for moving the mover in the one direction and the other direction is an N-phase excitation method or an N-(N+1)-phase excitation method;
an excitation method for moving the mover in the oblique direction is any one of a first method of N-phase excitation when moving in the one direction and the other direction, a second method of N-phase excitation when moving in the one direction and N-(N+1)-phase excitation when moving in the other direction, a third method of N-(N+1)-phase excitation when moving in the one direction and N-phase excitation when moving in the other direction, and a fourth method of (N+1)-phase excitation when moving in the one direction and the other direction;
(The N is a positive number of 2 or more, and the - is a hyphen indicating that N-phase excitation and (N+1)-phase excitation are repeated.)
The soft actuator of claim 9. 前記固定子では、
前記可動子の第１領域の前記磁極部と、前記第１領域と隣接した第２領域の前記磁極部と、を前記極性可変素子の極性を変えて前記固定子に接触させる第１極性変更と、
前記第２領域の前記磁極部を前記固定子に接触させたまま、前記第１領域の前記磁極部が接触している位置の前記極性可変素子と、前記可動子の移動方向に位置する前記極性可変素子の極性と、を変え、前記移動方向に位置する前記極性可変素子に前記第１領域の前記磁極部を引き寄せて、前記移動方向に位置する、極性を変えた前記極性可変素子の新たな位置に、前記第１領域の前記磁極部を接触させる第２極性変更と、
前記第１領域の前記磁極部を前記固定子の前記新たな位置に接触させたまま、前記第２領域の前記磁極部が接触している位置の前記極性可変素子と、前記可動子の移動方向に位置する前記極性可変素子の極性と、を変え、前記移動方向に位置する前記極性可変素子に前記第２領域の前記磁極部を引き寄せて、前記移動方向に位置する、極性を変えた前記極性可変素子の位置に、前記第２領域の前記磁極部を接触させる第３極性変更と、
が行われる、
請求項１～１０のいずれか１項に記載のソフトアクチュエータ。 In the stator,
a first polarity change for changing the polarity of the polarity variable element to bring the magnetic pole portion in the first region of the mover and the magnetic pole portion in the second region adjacent to the first region into contact with the stator;
a second polarity change in which, while keeping the magnetic pole portion of the second region in contact with the stator, the polarity of the polarity variable element at the position where the magnetic pole portion of the first region is in contact with the stator and the polarity of the polarity variable element located in the moving direction of the mover are changed, and the magnetic pole portion of the first region is attracted to the polarity variable element located in the moving direction, and the magnetic pole portion of the first region is brought into contact with a new position of the polarity variable element with the changed polarity located in the moving direction;
a third polarity change in which, while keeping the magnetic pole portion of the first region in contact with the new position of the stator, the polarity of the polarity variable element at the position where the magnetic pole portion of the second region is in contact with the polarity variable element located in the moving direction of the mover is changed, and the magnetic pole portion of the second region is attracted to the polarity variable element located in the moving direction, and the magnetic pole portion of the second region is brought into contact with the position of the polarity variable element with the changed polarity located in the moving direction;
will be carried out,
The soft actuator according to any one of claims 1 to 10.
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007124893A (en) 2006-11-14 2007-05-17 Seikoh Giken Co Ltd Rotary driving method and driver
US20100289359A1 (en) 2009-01-27 2010-11-18 Massachusetts Institute Of Technology Electropermanent Magnet-based Motors
JP2018019477A (en) 2016-07-26 2018-02-01 Thk株式会社 Actuator
DE102017206390A1 (en) 2017-04-13 2018-10-18 Robert Bosch Gmbh Component of an electrical machine, in particular rotor or stator

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007124893A (en) 2006-11-14 2007-05-17 Seikoh Giken Co Ltd Rotary driving method and driver
US20100289359A1 (en) 2009-01-27 2010-11-18 Massachusetts Institute Of Technology Electropermanent Magnet-based Motors
JP2018019477A (en) 2016-07-26 2018-02-01 Thk株式会社 Actuator
DE102017206390A1 (en) 2017-04-13 2018-10-18 Robert Bosch Gmbh Component of an electrical machine, in particular rotor or stator

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