JP7500532B2 - Residue recovery device and residue recovery method - Google Patents

Description

The present invention relates to a residue collection device and a residue collection method for collecting foreign matter remaining on a measurement object after cleaning.

To measure the size and mass of foreign matter remaining on a cleaned object, a residue recovery unit is known that rinses the cleaned object with a cleaning solution and recovers the foreign matter in a filter ("Residue Recovery Unit" on page 14 of "General-purpose High-Efficiency Cleaning System JCC Series Jet Clean Center Series" catalog No. Q2426N provided by Sugino Machine Co., Ltd.).

The permissible limit (cleanliness standard) for the size and mass of foreign matter remaining on a measurement object after cleaning may be small. The inventors cleaned the measurement object using various cleaning methods and repeatedly measured the foreign matter remaining on the measurement object after cleaning using multiple methods. In addition, considering the possibility that foreign matter may be generated from the residue collection unit, the inventors repeatedly collected and measured the foreign matter remaining on the clean measurement object.

As a result, the inventors found that not all of the measured foreign matter originates from the object to be measured. Specifically, they found that foreign matter may enter the residue collection unit from the outside or may be generated inside the residue collection unit. If the cleanliness standard is low, the cleanliness standard may be easily exceeded by foreign matter entering the residue collection unit from the outside or generated inside the unit.
Therefore, an object of the present invention is to prevent foreign matter from entering the residue collection unit and preventing foreign matter from being generated from the residue collection unit.

The first aspect of the present invention is
A tank for storing a cleaning liquid;
A top cover that opens downward,
A ceiling opening and
A loading entrance located on the wall,
and a top cover having
a clean air generator disposed in the ceiling opening and configured to send clean air into the upper cover;
A shield that shields the entrance;
a sink having a drain outlet and disposed below the upper cover, the sink having a cross-section that decreases downward;
A filter paper mounting part having a funnel in which a measurement filter paper is mounted, the funnel being:
A spout connected to the outlet;
The exit,
A filter paper mounting portion having
a filtration pump having a first suction port connected to the outlet, for sucking the filtrate from the back surface of the measurement filter paper and returning it to the tank;
a cleaning pump having a discharge port for discharging the cleaning liquid stored in the tank;
a flush valve disposed on the exterior of the top cover;
A nozzle disposed in the upper cover and connected to the outlet through the flush valve,
A first filtration filter;
a nozzle connected downstream of the first filtration filter;
a nozzle having
A residue recovery device comprising:

A second aspect of the present invention is
Supplying clean air into a recovery chamber to increase the internal pressure in the recovery chamber above the ambient pressure;
The object to be measured is suspended in the collection chamber;
Pressurizing a cleaning liquid stored inside a closed tank, filtering the cleaning liquid that has passed through a cleaning valve, and spraying the cleaning liquid from a nozzle in the recovery chamber;
A jet of the cleaning liquid is sprayed onto the object to be measured,
The residue flowing out from the measurement object is filtered under reduced pressure;
The filtrate obtained by vacuum filtration is filtered and returned to the tank.
A method for recovering residue.

The cleaning liquid is, for example, a water-based cleaning liquid or an oil. The water-based cleaning liquid is, for example, a neutral cleaning liquid or a basic cleaning liquid. The oil is a hydrocarbon or a fluorine-based solvent. The oil may be a filtered mineral oil or a vegetable oil. The mineral oil is, for example, kerosene.

The residue collection device is preferably installed inside a clean booth or clean room. The top cover, the shield, and the sink form a collection chamber. The cleaning liquid sprayed from the nozzle collides with the object to be measured in the collection chamber and is collected from the sink onto a measurement filter paper. The filtrate is collected in a tank.

The nozzle is, for example, a direct-jet nozzle, a flat-jet nozzle, or a cone-jet nozzle. The nozzle does not have a valve or a trigger. Preferably, the nozzle does not have a handle. Preferably, the nozzle and the casing of the first filtration filter are integrally formed. Preferably, the first filtration filter can be removed from the casing. For example, the piping, valve, and nozzle are made of plastic. The nozzle tube is, for example, a coil tube. Preferably, the nozzle and coil tube are made of plastic.

The shield may be a curtain hung over the loading entrance. The shield may also be a door located at the loading entrance. The residue collection device may have a glove hole located in the top cover or door.
The top cover, sink and shield are conductive enough to allow any static electricity generated to be discharged through the floor or a ground wire.

The funnel may have a first filter paper stand disposed at the spout. The funnel may omit the foot (tube). The holding frame may have a frame body and a second filter paper stand. The second filter paper stand may be disposed above the frame body. The first filter paper stand and the second filter paper stand may be a mesh or a porous plate.
The first measurement filter paper is placed on the first filter paper stand. The second measurement filter paper is placed on the second filter paper stand. A holder frame may be disposed above each measurement filter paper. The filter holder frame connects the first measurement filter paper and the second measurement filter paper to the inlet of the mounting body.
The outlet of the funnel may be connected to a first suction port of a filtration pump.

The filtration pump may have a second outlet connected to the tank. In this case, the second filtration filter is disposed between the second outlet and the tank.

The first suction port of the filtration pump may be connected to a tank to reduce the pressure inside the tank. In this case, the outlet and the tank are connected by a filtrate flow path. The second filtration filter may be disposed inside the filtrate flow path.
Preferably, the tank is closed.

The filter paper attachment section is
a cam shaft having a lead groove and fixed to the mounting body around the vertical axis;
a slider having a rotation shaft rotatably supported by the mounting body and extending around the vertical axis, and a contact holder, the slider rotating around a cam shaft;
A handle connected to the rotating shaft;
and a third contactor disposed between the lead groove and the contactor holding portion.
The slider may be rotated by a handle, and the third contact moves along the lead groove to move up and down along the cam shaft.

The residue collection device may include a hand washing nozzle, a hand washing valve, and a hand washing basin, which are arranged on the outside of the upper cover.
The hand-washing nozzle is disposed above the hand-washing stand. The hand-washing nozzle may be connected to the first outlet (outlet) via the hand-washing valve. The fourth filter may be disposed between the washing pump and the hand-washing valve. A branch may be provided from the first outlet of the washing pump and connected to the hand-washing valve and the washing valve, and the fourth filter may be disposed between the first outlet of the washing pump and the branch.

Desirably, the hand washing basin is disposed outside the collection chamber. Preferably, the hand washing basin is disposed below the sink. The hand washing basin has a second outlet. The hand washing basin collects the cleaning liquid ejected from the hand washing nozzle and ejects it from the second outlet. The residue collection device may include a hand washing basin suction pump and a third filtration filter. The hand washing basin suction pump has a second suction port and a third discharge port. The second suction port is connected to the second discharge port. The third discharge port is connected to the tank via the third filtration filter.
The residue collector may include a fourth filter disposed between the wash pump and the hand washing nozzle.

The residue collection device may include a hand washing pump and a fifth filter. The hand washing pump has a fourth outlet and a fourth suction port. The fourth outlet is connected to the hand washing nozzle. The fourth suction port is connected to the tank. The fifth filter is disposed between the hand washing pump and the hand washing nozzle.
The residue collection device may include a second foot switch that opens and closes the hand wash valve.
In addition, the residue collecting device may have a hand washing pump and a second foot switch, and may not have a hand washing valve. In this case, the second foot switch controls the activation and deactivation of the hand washing pump.

The measuring dish may be a wire cage made of braided wires.
Preferably, the flush valve, the hand-washing valve, the filtration pump, the washing pump, the hand-washing basin suction pump, the tank, the second filtration filter, the third filtration filter and the fourth filtration filter are disposed below the sink. Preferably, the drive switches for the flush valve and the hand-washing valve are disposed below the sink.

For example, filtration pumps, washing pumps, and hand-washing basin suction pumps are diaphragm pumps. Diaphragm pumps are made of, for example, plastic.

The residue collection device and residue collection method of the present invention can prevent foreign matter from entering the residue collection device from the outside and prevent foreign matter from being generated from the residue collection unit.

FIG. 1 is a front view of a residue recovery device according to a first embodiment; Pneumatic and hydraulic circuit diagram of the residue recovery device of embodiment 1 A combined cross-sectional view taken along line III-III in FIG. IV-IV line cross-sectional view of FIG. Cross-sectional view of line V-V in FIG. VI-VI line cross-sectional view of FIG. Cam curve of embodiment 1 FIG. 11 is a partially cut-away front view of a residue recovery device according to a second embodiment of the present invention; IX-IX line cross-sectional view of FIG. 7 XX line cross-sectional view of FIG. Cam curve of embodiment 2

(Embodiment 1)
1 and 2, the residue recovery device 10 of this embodiment has a recovery chamber 18, a filtration pump 65, a tank 69, a cleaning pump 71, a cleaning valve 75, a nozzle 79, and a coil tube (nozzle tube) 78. The recovery chamber 18 has an upper cover 12, a lower frame 11, an FFU (Fan Filter Unit, cleanliness generator) 13, a door (shield) 14, a sink 16, and a filter paper mounting section 35.

The residue collection device 10 may include a compressed air source 70, a second filtration filter 67, a fourth filtration filter 72, a foot switch 76, a hand wash valve 83, a hand wash nozzle 85, a hand wash base 86, a hand wash base suction pump 88, a third filtration filter 90, a foot switch 84, and a clamp 54.
Additionally, the residue collection device 10 may include a flow meter 73 , a restriction 77 , a restriction 89 , a restriction 66 , a restriction 74 , and a restriction 91 .

The upper cover 12 is a box-shaped cover that opens downward. The upper cover 12 has a ceiling opening 12a on the ceiling surface and a loading entrance 12b on the front surface. The upper cover 12 is supported by the lower frame 11. The lower frame 11 preferably has casters 11a. The upper cover 12 may be transparent. The upper cover 12 has a socket 68. The socket 68 is located above the upper cover 12, for example on the ceiling surface.

The FFU 13 is placed in the ceiling opening 12a. The FFU 13 has an air purification filter and a fan. The FFU 13 purifies the air taken in from the outside and blows it out into the recovery chamber 18.

The door 14 is disposed at the entrance 12b. The door 14 is transparent. The door 14 is, for example, a double-leaf door. The door 14 has a pair of glove holes 15. The glove holes 15 are disposed below the door 14. The glove holes 15 may have a cylindrical portion 15a. The cylindrical portion 15a has a length of, for example, about 0.1 m. A worker can insert a gloved hand into the interior of the upper cover 12 through the glove holes 15. Note that gloves may be worn in the glove holes 15.

Referring also to FIG. 3, the sink 16 has a first outlet (outlet) 17. The sink 16 is disposed below the upper cover 12. The sink 16 is supported by the lower frame 11. The sink 16 is made of, for example, a stainless steel plate and is polished. The bottom surface of the sink 16 is inclined so that it becomes deeper toward the first outlet 17. The bottom surface of the sink 16 is inclined, for example, by 3 degrees to 15 degrees. The first outlet 17 has a flange 17a. A filter paper mounting part 35 is connected to the first outlet 17.

The top cover 12, sink 16, and door 14 are conductive enough to discharge static electricity generated through the lower frame 11. Preferably, the lower frame 11 is grounded. Also, preferably, the residue collection device 10 is installed on a metal floor or an electrostatically treated floor surface.

The filtration pump 65 is, for example, a compressed air-driven diaphragm pump. The filtration pump 65 is disposed outside the recovery chamber 18. For example, the filtration pump 65 is disposed in the lower frame 11. Preferably, the filtration pump 65 is disposed below the sink 16. The filtration pump 65 has a first suction port 65a and a second discharge port 65b. The first suction port 65a is connected to the filter paper mounting portion 35. The second discharge port 65b is connected to the tank 69 via the second filtration filter 67.

The tank 69 has a lid. Preferably, the tank 69 can be sealed. The tank 69 has, for example, a cylindrical shape. The tank 69 stores the cleaning liquid 3.
The tank 69 has an inlet at the top. Liquid from the filtration pump 65 and the hand-washing station suction pump 88 flows in through the inlet. The inlet is preferably located above the liquid level of the cleaning liquid 3.

The cleaning pump 71 is, for example, a compressed air-driven diaphragm pump. The cleaning pump 71 is disposed outside the recovery chamber 18. For example, the cleaning pump 71 is disposed on the lower frame 11. Preferably, the cleaning pump 71 is disposed below the sink 16. The cleaning pump 71 has a third suction port 71a and a first discharge port (discharge port) 71b. The third suction port 71a is connected to the bottom of the tank 69. The first discharge port 71b is connected to a nozzle 79 via a cleaning valve 75.

The hand washing basin 86 is disposed outside the collection chamber 18. For example, the hand washing basin 86 is disposed to the side of the lower frame 11 or the upper cover 12. The hand washing basin 86 has a second outlet 86a. The hand washing nozzle 85 is disposed above the hand washing basin 86. The hand washing nozzle 85 is connected to the first outlet 71b via the hand washing valve 83 and the throttle 89. The flow path from the first outlet 71b branches at the branch port 93. The first flow path is connected to the hand washing nozzle 85. The second flow path is connected to the nozzle 79.

The washbasin suction pump 88 is, for example, a compressed air-driven diaphragm pump. The washbasin suction pump 88 has a second suction port 88a and a third discharge port 88b. The second suction port 88a is connected to the second exhaust port 86a. The third discharge port 88b is connected to the tank 69 via a third filtration filter 90.

The fourth filtration filter 72 may be disposed between the branch port 93 and the first discharge port 71b. The fourth filtration filter 72 may be disposed between the branch port 93 and the hand washing valve 83.
The flow meter 73 is disposed between the branch port 93 and the nozzle 79. Preferably, the flow meter 73 is an integrating flow meter.

The nozzle 79 has an outlet 79a and a first filtration filter 79b. The nozzle 79 has a cylindrical casing. The first filtration filter 79b is disposed inside the casing. Preferably, the first filtration filter 79b is replaceable. The nozzle 79 is connected to the socket 68 by a coil tube 78 and is suspended within the upper cover 12. The nozzle 79 and the coil tube 78 are made of plastic.

The compressed air source 70 is, for example, an air compressor or a compressed air supply port. The compressed air supply port is connected to an air compressor installed outside the residue recovery device 10. The compressed air source 70 is connected to the filtration pump 65 via a throttle 66.
The compressed air source 70 is connected to the wash pump 71 via a throttle 74. The compressed air source 70 is connected to the hand sink suction pump 88 via a throttle 91.
The compressed air source 70 is connected to the flush valve 75 via a foot switch 76. The compressed air source 70 is connected to the hand wash valve 83 via a foot switch 84.

The flushing valve 75 and the hand washing valve 83 are disposed outside the recovery chamber 18. For example, the flushing valve 75 and the hand washing valve 83 are pneumatically driven two-way valves. For example, the foot switch 76 and the foot switch 84 are three-port flow path switching valves.
Preferably, the filtration pump 65, tank 69, cleaning pump 71, cleaning valve 75, second filtration filter 67, fourth filtration filter 72, foot switch 76, hand wash valve 83, hand wash basin suction pump 88, third filtration filter 90 and foot switch 84 are positioned below the sink 16.

3 and 4 , the recovery chamber 18 may include a beam 21, a rotating table 22, a hanging tool 26, a wire 27, and a measurement dish 28. The beam 21 is disposed on the ceiling surface of the upper cover 12 in, for example, an X-shape when viewed from above.
The rotating table 22 is supported by the beam 21. The rotating table 22 has a case 23, a bearing 24, and a rotating shaft 25. The case 23 is hollow and cylindrical. The rotating shaft 25 is supported inside the case 23 via the bearing 24. The rotating shaft 25 protrudes downward from the case 23.

The suspender 26 is, for example, a rectangular frame, and is installed on the lower surface of the rotating shaft 25. The suspender 26 rotates together with the rotating shaft 25.
The measuring dish 28 is, for example, a thin wire cage. The measuring dish 28 is suspended from a suspender 26 by a wire 27. The measurement target 4 is placed on the upper surface of the measuring dish 28.

As shown in Figures 3, 5 and 6, the filter paper mounting section 35 has a mounting section body 36, a bearing 38, a camshaft 45, a slider 47, a ball (second contact) 48, a crankshaft (driving link) 39, a handle 40, a roller (first contact) 41, a support plate 49, a holding frame guide 50, a funnel 55 and a holding frame 56.

The mounting body 36 has a joint portion 36a and a cam frame 36f. The joint portion 36a has an inlet 36b, a flange 36c, and a connection surface 36d. The joint portion 36a is hollow and cylindrical. The joint portion 36a has the inlet 36b at an upper end and the connection surface 36d at a lower end.
The flange 36c is disposed around the inlet 36b. For example, the flange 36c is detachably fixed to the flange 17a by a clamp 54. The connection surface 36d is, for example, a flat surface. The connection surface 36d is connected to the holding frame 56.
The cam frame 36f is C-shaped in a front view and is fixed to the joint portion 36a. The cam frame 36f may have a bearing case 36g. The bearing case 36g supports the bearing 38 around the handle shaft 43. The handle shaft 43 extends in the horizontal direction. Preferably, the cam frame 36f is integral with the joint portion 36a.

The camshaft 45 is fixed to the cam frame 36f along the vertical axis 46. The camshaft 45 is cylindrical and has a cylindrical surface 45a and a lead groove 45b. The camshaft 45 has one or more (for example, two) lead grooves 45b. The lead groove 45b has a U-shaped cross section and is formed along the cylindrical surface 45a. The cam curve of the lead groove 45b is shown in FIG. 7. FIG. 7 shows the rotation angle θ (degrees) of the slider 47 relative to the lift amount h (mm) of the slider 47. Here, θ = 0 degrees corresponds to the mounting position 60, and θ = 90 degrees corresponds to the filtering position 59. When the lift amount h is from 0 to 60% to 80% of the maximum lift amount h0, the lift amount h and the rotation angle θ are proportional, and the rotation angle θ reaches 90 degrees. After that, the rotation angle θ is maintained at 90 degrees until the lift amount h reaches the maximum lift amount h0.

The slider 47 is arranged so that the camshaft 45 passes through the slider 47, with the camshaft 45 at the center. The slider 47 has a body 47a, a small diameter portion 47b, a ball holding hole (contactor support portion) 47c, a follow groove 47d, and an inner cylindrical surface 47f. The body 47a is cylindrical. The small diameter portion 47b is located below the body 47a. The inner cylindrical surface 47f slides with the cylindrical surface 45a in the vertical direction and the rotational direction. The ball holding hole 47c is arranged in the center of the inner cylindrical surface 47f. The ball 48 is held inside the ball holding hole 47c and rolls in the lead groove 45b as the slider 47 rotates. The follow groove 47d is arranged, for example, at the upper end of the body 47a. The follow groove 47d extends in the circumferential direction. The cross section of the follow groove 47d is rectangular.

The crankshaft 39 is supported by a bearing 38. The crankshaft 39 is disposed through the cam frame 36f. The handle 40 is fastened to one end of the crankshaft 39 outside the cam frame 36f. The crankshaft 39 rotates around a handle shaft 43. The crankshaft 39 supports a roller 41 on an axis offset by a distance 53 from the handle shaft 43. The distance 53 is equal to the maximum lift amount h0 of the slider 47. The roller 41 is disposed on the other end of the crankshaft 39 via a bearing 42. The roller 41 is cylindrical and disposed in the follow groove 47d. The roller 41 rolls in the follow groove 47d as the crankshaft 39 rotates.

The support plate 49 is a rectangular flat plate having a first hole 49a and a second hole 49b. The first hole 49a is attached to the small diameter portion 47b, and the support plate 49 is connected to the slider 47. The holding frame guide 50 extends upward from the upper surface of the support plate 49. For example, multiple (e.g., three) holding frame guides 50 are evenly arranged on a circumference centered on the second hole 49b.

The funnel 55 has a spout 55a, an outlet 55c, a first filter paper base 55b, and a small diameter portion 55d. The small diameter portion 55d is inserted into the second hole 49b, and the funnel 55 is connected to the support plate 49. The first filter paper base 55b is placed on the spout 55a. The first filter paper base 55b is, for example, a porous plate or mesh. The first filter paper base 55b may be a flat plate with many holes. The measurement filter paper 1 is placed on the first filter paper base 55b. The outlet 55c is connected to the first suction port 65a. The funnel 55 does not need to have a foot (tubular portion).

The holding frame 56 is a hollow cylindrical frame having an upper surface 56a, a lower surface 56b, and a guide groove 56c (see FIG. 5). The holding frame 56 is disposed above the funnel 55. The holding frame 56 has an inner diameter that is substantially the same as the spout 55a. For example, the upper surface 56a and the lower surface 56b are flat surfaces. The upper surface 56a is connected to the connection surface 36d. The lower surface 56b contacts the spout 55a of the funnel 55, sandwiching the measurement filter paper 1. The holding frame 56 holds the measurement filter paper 1 from above by the weight of the holding frame 56. The guide groove 56c has a U-shaped cross section extending vertically, and is evenly disposed on the outer periphery of the holding frame 56. The guide groove 56c is guided by the holding frame guide 50 to hold the position of the holding frame 56.

The holding frame 56 may have a seal (not shown). The seal is, for example, an O-ring, and is disposed on the lower surface 56b. The seal provides a seal between the lower surface 56b and the spout 55a.

Preferably, multiple (in an embodiment, three) holding frames 56 are arranged in a stacked manner. In this case, the holding frame 56 has a second filter paper stand 56d. The second filter paper stand 56d is arranged along the upper surface 56a of the holding frame 56. The second measurement filter paper 2 is placed on the upper surface of the second filter paper stand 56d. The uppermost holding frame 56 does not need to be provided with the second filter paper stand 56d. The second measurement filter paper 2 has a larger retaining particle diameter than the first measurement filter paper 1.

When the support plate 49 is in the mounting position 60, the operator turns the handle 40 90 degrees clockwise. The slider 47 then rotates 90 degrees while ascending along the lead groove 45b, and then ascends to the filtering position 59. At the filtering position 59, the holding frame 56, the funnel 55, and the joint 36a come into close contact with each other, and the measurement filter paper 1 connects to the inlet 36b.
When the support plate 49 is in the filtering position 59, the operator turns the handle counterclockwise by 90 degrees. Then, the slider 47 descends once along the lead groove 45b, and then continues descending while rotating by 90 degrees until it reaches the mounting position 60.

The operation method will be explained below. First, the worker washes his/her hands and gloves at the hand washing station 86. Next, the worker opens the door 14 and places the measurement object 4 on the measurement dish 28 through the entrance 12b. When the support plate 49 is in the mounting position 60, the worker mounts the measurement filter paper 1 or measurement filter paper 2 on the first filter paper stand 55b or second filter paper stand 56d.

Then, the support plate 49 is rotated to the filtering position 59. The operator places his/her hand or glove in the recovery chamber 18 through the glove hole 15. The operator opens and closes the cleaning valve 75 using the foot switch 76. This causes the cleaning liquid 3 to be sprayed onto the measurement object 4 from the nozzle 79 facing the measurement object 4. At this time, the operator can freely rotate the measurement dish 28 using the turntable 22. Furthermore, the operator can measure the total amount of the sprayed cleaning liquid 3 using the flow meter 73.

Any foreign matter remaining in the measurement object 4 flows from the sink 16 to the filter paper mounting section 35 together with the cleaning liquid 3, and is captured by the measurement filter paper 1 or 2. The filtration pump 65 draws the filtrate from the outlet 55c, increasing the filtration speed. After the cleaning liquid 3 has been poured onto the measurement object 4, the operator rotates the support plate 49 to the mounting position 60. Finally, the operator removes the measurement filter paper 1 or 2 from the first filter paper stand 55b or the second filter paper stand 56d.

According to this embodiment, the FFU 13 sends clean air into the recovery chamber 18, increasing the pressure in the recovery chamber 18 above the surrounding environment. This makes it difficult for foreign matter to enter the recovery chamber 18 from outside.

The upper cover 12, sink 16, and door 14 discharge static electricity generated through the lower frame 11. Therefore, the measurement object 4 and foreign matter washed away from the measurement object 4 are less likely to adhere to the inside of the residue recovery device 10 due to static electricity. And, foreign matter adhering to the measurement object 4 is more likely to be recovered onto the measurement filter papers 1 and 2.

The inventors discovered that in the prior art residue collection devices, metal fragments were generated from inside the coolant gun.
The nozzle 79 of this embodiment does not have a cleaning valve 75 or a trigger inside, so foreign matter is unlikely to be generated from inside the nozzle 79. In addition, because the nozzle 79 has a smooth external shape, foreign matter is unlikely to adhere to the periphery of the nozzle 79. In this way, by keeping the nozzle 79 clean, foreign matter originating from the nozzle 79 is prevented from being collected on the measurement filter paper 1 or the measurement filter paper 2.

When the nozzle 79, cleaning valve 75, cleaning pump 71, etc. are made of plastic, no metal pieces are generated from the nozzle 79, cleaning valve 75, cleaning pump 71, etc. In mechanical parts, the foreign matter to be measured is often metal. By making the nozzle 79, cleaning valve 75, cleaning pump 71, etc. out of plastic, problematic foreign matter is not generated from the nozzle 79.

By locating the cleaning valve 75 outside the recovery chamber 18, foreign matter attached to the outside of the cleaning valve 75 or foreign matter generated outside the cleaning valve 75 is less likely to enter the recovery chamber 18. In addition, by locating the first filtration filter 79b upstream of the nozzle 79a, the cleaning liquid sprayed from the nozzle 79a is clean. Even if foreign matter is generated in the cleaning valve 75 or the cleaning pump 71, the cleaning liquid is filtered by the first filtration filter 79b.

The cleaning valve 75 and the hand washing valve 83 are disposed outside the collection chamber 18. This prevents foreign matter generated in the cleaning valve 75 and the hand washing valve 83, or foreign matter attached to the cleaning valve 75 and the hand washing valve 83, from being collected in the measurement filter paper 1 and the measurement filter paper 2.

In the conventional technology, the object to be measured 4 was placed on a measurement table placed on the sink table 16. Therefore, contact between the measurement table and the sink table 16 could scratch the sink table 16. Furthermore, foreign matter could accumulate in the scratches on the sink table 16. This could cause the foreign matter to flow out and be collected on the measurement filter paper. Furthermore, when changing the position or orientation of the object to be measured 4, the measurement table could scrape and scratch the sink table 16, or foreign matter could be generated. Furthermore, when a rotating table was placed on the sink table 16, foreign matter could be generated from within the rotating table and collected on the measurement filter paper.

The measuring dish 28 in this embodiment is a wire cage. Therefore, the object to be measured 4 and the measuring dish 28 are in point contact. Because the contact area is small and the contact point is round and gentle, burrs are less likely to fall off from the object to be measured 4 due to contact between the object to be measured 4 and the measuring dish 28. In addition, foreign matter is less likely to accumulate on the measuring dish 28.

The measuring dish 28 is suspended by a hoist 26 and a wire 27. Therefore, the measuring dish 28 does not come into contact with the sink 16. The measuring dish 28 also rotates smoothly on the rotating table 22. Therefore, the operator can easily change the position of the measuring dish 28 and the object to be measured 4. Furthermore, the generation of foreign matter due to the rotation of the measuring dish 28 is suppressed.

The measurement dish 28 is suspended from above and is made of wire. Therefore, when an operator rinses the measurement object 4, foreign matter that has flowed out from the measurement object 4 is unlikely to accumulate on the measurement dish 28. Therefore, foreign matter that has flowed out from the measurement object 4 is quickly collected on the measurement filter papers 1 and 2.

The filtration pump 65, tank 69, washing pump 71, washing valve 75, second filtration filter 67, fourth filtration filter 72, foot switch 76, hand washing valve 83, hand washing station suction pump 88, third filtration filter 90, and foot switch 84 are disposed below the recovery chamber 18. Therefore, foreign matter generated around these devices or foreign matter attached to these devices is prevented from entering the inside of the recovery chamber 18.
The cleaning liquid flowing into the tank 69 is filtered by the second filtration filter 67 and the third filtration filter 90. Therefore, the cleaning liquid in the tank 69 is kept clean.

When viewed from above, the mounting position 60 does not overlap with the discharge port 17. Therefore, the measurement filter paper can be easily attached and detached. The holding frame 56 has a second filter paper stand 56d. Therefore, by stacking the holding frames 56, multiple measurement filters 1 and 2 can be stacked to collect residues. By arranging the measurement filters from the top in order of the largest particle diameter retained, the residues can be collected by size. The holding frame 56 is placed on the measurement filters 1 and 2. Therefore, when the support plate 49 rotates to the filtration position 59 and the measurement filters 1 and 2 are connected to the inlet 36b, the measurement filters 1 and 2 do not shift or fold on the first filter paper stand 55b and the second filter paper stand 56d, and the measurement filters 1 and 2 are held in the position where the operator set them.

The filtration pump 65, the washing pump 71, the hand-washing basin suction pump 88, the washing valve 75, and the hand-washing valve 83 are driven by compressed air. The foot switch 76 and the foot switch 84 are flow path switching valves. Because the pump and valves are not electrically operated, it is possible to use the flammable washing liquid 3.

(Embodiment 2)
8 and 9, the residue collection device 100 of this embodiment has a collection chamber 118 and a filter paper mounting section 135. The collection chamber 118 has a curtain (shielding body) 114 and a sink 116. The other configurations of the residue collection device 100 are substantially the same as those of the residue collection device 10 of the first embodiment.

The curtain 114 is hung at the entrance 12b. For example, the curtain 114 has a slit extending in the vertical direction and is divided into multiple pieces. Preferably, the curtains 114 overlap each other in part. The curtain 114 does not need to have a glove hole 15. Preferably, the curtain 114 is made of a conductive plastic sheet.

The sink 116 has a funnel portion 116a and a piping bag 116b. The funnel portion 116a has a conical cup arranged at the top and a first outlet 17 arranged at the bottom. The piping bag 116b is made of a sheet and has a bag shape with a triangular pointed bottom. A hole is provided in the bottom surface of the piping bag 116b. The piping bag 116b is suspended below the upper cover 12. The bottom of the piping bag 116b is inserted into the cup of the funnel portion 116a. The piping bag 116b is removable. Preferably, the piping bag 116b is made of conductive plastic. Preferably, the piping bag 116b is disposable.

As shown in Figures 9 and 10, the filter paper mounting part 135 has a mounting part body 136, a bearing 138, a cam shaft 145, a slider 147, a handle 140, a support plate 49, a funnel 155, a retaining frame 156, and a retaining frame 158.

The mounting body 136 has a joint portion 36a and a cam frame 136f. The cam frame 136f is C-shaped when viewed from the front and is fixed to the joint portion 36a. The cam frame 136f may have a bearing case 136g. The bearing case 136g supports the bearing 138 around the vertical shaft 46. Preferably, the cam frame 136f is integrally formed with the joint portion 136a.

The camshaft 145 is fixed to the cam frame 136f along the vertical axis 46. The camshaft 145 is cylindrical and has a cylindrical surface 145a and a lead groove 145b. The camshaft 145 extends from the lower end of the cam frame 136f to the center in the vertical direction and is not connected to the upper end. The camshaft 145 is formed with one or more (e.g., two) lead grooves 145b.
The lead groove 145b has a U-shaped cross section and is disposed along the cylindrical surface 145a. The cam curve of the lead groove 145b is shown in FIG. 11. FIG. 11 shows the lift amount h (mm) of the slider 147 with respect to the rotation angle θ (degrees) of the slider 147. Here, θ=0 degrees corresponds to the mounting position 60, and θ=90 degrees corresponds to the filtering position 59. In the range of the rotation angle θ (degrees) from 0 degrees to 60 degrees or 80 degrees, the lift amount h=0 mm. After that, in the range of the rotation angle θ up to 90 degrees, the lift amount h becomes proportional to the rotation angle θ (degrees), and the lift amount h reaches the maximum lift amount h0.

The slider 147 is disposed around the camshaft 145. The slider 47 has a body 147a, a small diameter portion 147b, a ball retaining hole (contact retaining portion) 147c, an inner cylindrical surface 147f, and a shaft portion 147g. The body 147a is cylindrical. The small diameter portion 147b is located below the body 147a. The inner cylindrical surface 147f is disposed from the bottom to the top of the body 147a. The inner cylindrical surface 147f slides with the cylindrical surface 145a in the vertical direction and the rotational direction. The ball retaining hole 147c is disposed in the center of the inner cylindrical surface 147f. The ball 48 is retained inside the ball retaining hole 147c and rolls in the lead groove 145b as the slider 147 turns. The shaft portion 147g is connected to the top of the body 147a and is supported by the bearing 138. The shaft portion 147g passes through the cam frame 136f and protrudes above the cam frame 136f. The handle 140 is disposed at the upper end of the shaft portion 147g. The handle 140 and the slider 147 move vertically along the lead groove 145b while rotating together around the vertical shaft 46.

As shown in FIG. 9, the funnel 155 has an outer frame portion 155d. The rest of the configuration of the funnel 155 is substantially the same as the funnel 55 of the first embodiment. The outer frame portion 155d protrudes from the upper surface of the funnel 155. The outer frame portion 155d is a hollow cylindrical frame disposed outside the spout 55a.

The holding frame 156 has an inner frame portion 156a, an outer frame portion 156b, and a second filter paper base 156d. The holding frame 156 does not have the guide groove 56c of the first embodiment. The other configuration of the holding frame 156 is substantially the same as that of the holding frame 56 of the first embodiment. The inner frame portion 156a is a hollow cylinder and protrudes downward from the bottom surface of the holding frame 156. The inner diameter of the inner frame portion 156a is equal to or larger than the inner diameter of the holding frame 156. The outer diameter of the inner frame portion 156a fits into the inner diameter of the outer frame portion 155d. The outer frame portion 156b protrudes upward from the top surface of the holding frame 156. The configuration of the outer frame portion 156b is substantially the same as that of the outer frame portion 155d. The second filter paper base 156d is installed facing the lower end of the outer frame portion 156b.

The holding frame 158 has an inner frame portion 156a, but does not have an outer frame portion 156b or a second filter paper base 156d. In other words, the upper surface of the holding frame 158 is flat. The rest of the configuration of the holding frame 158 is substantially the same as that of the holding frame 156. The holding frame 158 is disposed at the top of the holding frame 156.

When the support plate 49 is in the mounting position 60, the operator turns the handle 40 90 degrees counterclockwise from above. The slider 147 then turns 60 to 80 degrees along the lead groove 145b, and then rises while turning to reach the filtering position 59. At the filtering position 59, the holding frame 158, the holding frame 156, the funnel 155, and the joint part 36a come into close contact with one another, and the measurement filter paper 1 connects to the inlet 36b.
When the support plate 49 is in the filtering position 59, the operator rotates the handle 90 degrees clockwise from above. Then, the slider 147 rotates downward along the lead groove 145b, and then continues rotating to reach the mounting position 60.

According to this embodiment, the piping bag 116b, which occupies most of the sink 116, is removable. Therefore, when the piping bag 116b becomes dirty or damaged, it can be easily replaced. This prevents residue or dirt from adhering to the sink 116 and causing foreign matter from the sink 116 to be collected by the measurement filter papers 1 and 2. Preferably, the piping bag 116b is replaced after each use.

The present invention is not limited to the above-described embodiment, and various modifications are possible without departing from the gist of the present invention. All technical matters included in the technical ideas described in the claims are the subject of the present invention. The above-described embodiment shows a preferred example, but a person skilled in the art can realize various alternatives, modifications, variations, or improvements from the contents disclosed in this specification, and these are included in the technical scope described in the attached claims.

1 Measurement filter paper 10, 100 Residue collection device 12 Upper cover 13 FFU (clean air generator)
14 Door (shield)
114 Curtain (shielding)
16, 116 Sink 17 First outlet (outlet)
35, 135 Filter paper mounting section 65 Filtration pump 69 Tank 71 Cleaning pump 75 Cleaning valve 79 Nozzle

Claims (13)

A tank for storing a cleaning liquid;
A top cover that opens downward,
A ceiling opening and
A loading entrance located on the wall,
and a top cover having
a clean air generator disposed in the ceiling opening and configured to send clean air into the upper cover;
A shield that shields the entrance;
a sink having a drain outlet and disposed below the upper cover, the sink having a cross-section that decreases downward;
A filter paper mounting part having a funnel in which a measurement filter paper is mounted, the funnel being:
A spout connected to the outlet;
The exit,
A filter paper mounting portion having
a filtration pump having a first suction port connected to the outlet, for sucking the filtrate from the back surface of the measurement filter paper and returning it to the tank;
a cleaning pump having a discharge port for discharging the cleaning liquid stored in the tank;
a flush valve disposed on the exterior of the top cover;
A nozzle disposed in the upper cover and connected to the outlet via the flushing valve,
A first filtration filter;
a nozzle connected downstream of the first filtration filter;
a nozzle having
A residue recovery device comprising: a nozzle tube penetrating the upper cover and connecting between the cleaning valve and the first filtration filter;
The nozzle is suspended above the top cover by the nozzle tube.
2. The residue recovery device of claim 1. A rotating platform disposed on the upper cover;
A measurement plate suspended from the rotating table on which a measurement object is placed;
The residue recovery device according to claim 1 or 2, further comprising: Further comprising a second filter disposed between the outlet and the tank.
A residue recovery device according to any one of claims 1 to 3. Further comprising a foot switch for opening and closing the flush valve.
A residue recovery device according to any one of claims 1 to 4. The sink is
A funnel portion having the outlet and connected to the filter paper mounting portion;
A piping bag removably installed between the funnel and the upper cover;
The residue recovery device according to any one of claims 1 to 5, comprising: The piping bag is made of a sheet of conductive plastic.
7. A residue recovery device according to claim 6. The filter paper mounting section is
a mounting body having an inlet connected to the outlet;
a support plate spaced from the outlet, the support plate pivoting about a vertical axis between a mounting position and a filtering position to support the funnel;
A holding frame for holding the measurement filter paper;
having
When the support plate is in the mounted position, the spout does not overlap the inlet when viewed from above;
When the support plate is in the filtering position, the spout is connected to the inlet.
A residue recovery device according to any one of claims 1 to 7. the support plate rises from the mounting position toward the filtering position, and when the support plate is in the filtering position, the holding frame comes into close contact with the inlet.
9. A residue recovery device according to claim 8. The filter paper mounting section is
a cam shaft having a lead groove and fixed to the mounting body around the vertical axis;
a slider having a follower groove and a contact holder, the slider having the cam shaft passing therethrough and rotating about the cam shaft;
a driving link having a first contactor disposed on the mounting body and in contact with the follower groove;
a second contactor disposed between the lead groove and the contactor holding portion;
having
The slider is driven in a vertical direction by the movement of the driving link, and rotates around the cam shaft by the movement of the second contact along the lead groove.
Residue recovery device according to claim 8 or 9. The slider is hollow cylindrical,
The follower groove extends in a circumferential direction on an outer periphery of the slider,
the driving link is a crankshaft disposed on the mounting body so as to be rotatable around a handle shaft extending horizontally,
The first contact is a roller that is disposed apart from the handle shaft and rotates parallel to the handle shaft.
11. A residue recovery device according to claim 10. The lead groove has a U-shaped cross section and is disposed on the outer circumferential surface of the camshaft.
The second contact is a ball.
Residue recovery device according to claim 10 or 11. Supplying clean air into a recovery chamber to increase the internal pressure in the recovery chamber above the ambient pressure;
The object to be measured is suspended in the collection chamber;
Pressurizing a cleaning liquid stored inside a closed tank, filtering the cleaning liquid that has passed through a cleaning valve, and spraying the cleaning liquid from a nozzle in the recovery chamber;
A jet of the cleaning liquid is sprayed onto the object to be measured,
The residue flowing out from the measurement object is filtered under reduced pressure;
The filtrate obtained by vacuum filtration is filtered and returned to the tank.
Residue recovery methods.

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