JP7494624B2 - LIQUID DISCHARGE HEAD, LIQUID DISCHARGE UNIT, AND DEVICE FOR DISCHARGING LIQUID - Google Patents

Description

The present invention relates to a liquid ejection head, a liquid ejection unit, and a device for ejecting liquid.

As image forming devices such as printers, facsimiles, copiers, plotters, and combination machines thereof, liquid ejection recording type image forming devices using a recording head consisting of a liquid ejection head (inkjet head) that ejects ink droplets are known. For example, an inkjet recording device is known as such an image forming device.

A known liquid ejection head has a structure in which a flow path plate that forms a flow path and a nozzle plate that forms nozzles that communicate with the flow path are stacked together. For such liquid ejection heads, a technique is known in which a nozzle cover is provided to protect the outer peripheral surface of the head, including the outer peripheral surface of the nozzle plate, and the peripheral edge of the nozzle surface. In addition, the nozzle surface of the nozzle plate is often treated to be water-repellent to repel ink. However, when the water-repellent treatment is performed, it becomes difficult to join the nozzle cover to the nozzle surface, making joining the nozzle cover problematic.

Patent document 1 discloses that in order to bond a cover head (nozzle cover) to a nozzle plate that has been treated to be water-repellent, the water-repellent film is partially removed using a tape mask, and then a primer treatment is applied. According to patent document 1, by applying a primer treatment to the outer periphery of the ejection surface chip of the nozzle plate, the adhesive strength when attaching the cover head is increased, improving the reliability of the head.

However, in conventional technology, the water-repellent film on the nozzle surface is removed before the nozzle cover is attached, which creates problems with foreign matter being generated when the water-repellent film is removed, resulting in the foreign matter being mixed inside the head or at the joint with the nozzle cover. In addition, there is a problem with the water-repellent properties of the nozzle surface being reduced because the water-repellent film on the nozzle surface is removed. On the other hand, if the nozzle cover is attached directly to a nozzle surface with a water-repellent film, sufficient bonding strength cannot be obtained.

The present invention aims to provide a liquid ejection head that can bond a nozzle cover without removing the water-repellent film on the nozzle surface, and has a stronger bond than when the nozzle cover is bonded directly to the nozzle surface.

In order to solve the above problems, the liquid ejection head of the present invention comprises a nozzle plate having a water-repellent film formed on a nozzle surface having nozzles, a nozzle cover protecting at least a portion of the nozzle surface, an intermediate member arranged between the water-repellent film and the nozzle cover in the liquid ejection direction and joined to each of the water-repellent film and the nozzle cover , a first joining member joining the nozzle plate and the intermediate member, and a second joining member joining the intermediate member and the nozzle cover, wherein the second joining member covers a portion of the first joining member exposed on the surface .

According to the present invention, it is possible to bond the nozzle cover without removing the water-repellent film on the nozzle surface, and it is possible to provide a liquid ejection head with a stronger bond than when the nozzle cover is bonded directly to the nozzle surface.

1 is a schematic perspective view showing an example of a liquid ejection head according to the present invention. 1 is a schematic cross-sectional view showing an example of a liquid ejection head according to the present invention. 1 is an exploded perspective view showing an example of a liquid ejection head according to the present invention. This is a cross-sectional view taken along line AA in FIG. 1A is a plan view and FIG. 1B is a cross-sectional view illustrating an example of a nozzle plate. 1A is a plan view and FIG. 1B is a cross-sectional view showing an example of an intermediate plate. 1A is a plan view showing an example of a nozzle cover, and FIG. 1B is a side view showing the nozzle cover. FIG. 4 is a perspective view showing an example of a nozzle cover. FIG. 4 is a schematic cross-sectional view showing another example of a liquid ejection head according to the present invention. FIG. 4 is a schematic cross-sectional view showing another example of a liquid ejection head according to the present invention. FIG. 4 is a schematic cross-sectional view of another example of a liquid ejection head according to the present invention. FIG. 11 is another schematic cross-sectional view of another example of a liquid ejection head according to the present invention. FIG. 11 is a schematic perspective view of another example of a liquid ejection head according to the present invention. FIG. 4 is a schematic cross-sectional view of another example of a liquid ejection head according to the present invention. 1 is a schematic diagram of an example of a liquid ejection device according to the present invention. FIG. 2 is a schematic diagram of an example of a head unit. FIG. 1 is a block diagram illustrating an example of a liquid circulation device. FIG. 11 is a schematic diagram of another example of the device for discharging liquid according to the present invention. FIG. 11 is a schematic diagram of another example of the device for discharging liquid according to the present invention. 1 is a schematic diagram of an example of a liquid ejection unit according to the present invention. FIG. 11 is a schematic diagram of another example of the liquid ejection unit according to the present invention. FIG. 11 is a perspective view showing another example of a liquid ejecting device according to the present invention. FIG. 11 is a side view showing another example of the device for discharging liquid according to the present invention.

The liquid ejection head, liquid ejection unit, and liquid ejection device according to the present invention will be described below with reference to the drawings. Note that the present invention is not limited to the embodiments shown below, and can be modified within the scope of what a person skilled in the art can imagine, including other embodiments, additions, modifications, deletions, etc., and any aspect is within the scope of the present invention as long as it achieves the functions and effects of the present invention.

The liquid ejection head of the present invention is characterized by having a nozzle plate having a nozzle surface on which a water-repellent film is formed, a nozzle cover that protects at least a part of the nozzle surface, and an intermediate member that is disposed between the water-repellent film and the nozzle cover in the liquid ejection direction and that is bonded to both the water-repellent film and the nozzle cover.

First Embodiment
Fig. 1 is a perspective view of the main part of the liquid ejection head of this embodiment. Based on the coordinate axes of the three-dimensional orthogonal coordinate system shown in Fig. 1, the nozzle surface 20a in the liquid ejection head 1 of this embodiment is a surface parallel to the XY plane. However, in Fig. 1, the nozzles of the nozzle surface 20a are not shown, and the intermediate member and the nozzle cover are also not shown.

Figure 2 is a YZ cross-sectional view illustrating the internal structure of the liquid ejection head 1. Figure 3 is an exploded perspective view of the portion below the frame 7.

As described below, the liquid ejection head 1 has nozzle rows formed by arranging a plurality of nozzles 20 in two rows. Each of the nozzles 20 has an ink supply path that supplies ink (an example of liquid) to each of the nozzles 20.

The ink supply path, which is the flow path of the ink, is formed by a common liquid chamber and individual liquid chambers. The individual liquid chambers that supply ink to each of the nozzles 20 are formed by the nozzle plate 2, the chamber plate 3, and the diaphragm plate 4.

The ink supplied from the common liquid chamber to the individual liquid chambers reaches the pressure chamber 21 in the chamber plate 3 via the diaphragm plate 4. When the piezoelectric element 9 changes the volume of the pressure chamber 21 to generate a pressure fluctuation, this pressure fluctuation causes ink to be ejected from the nozzle 20 formed in the nozzle plate 2.

The configuration of the liquid ejection head 1 can be broadly divided into a flow path section and a drive section 8. The flow path section constitutes an ink supply path formed by a common liquid chamber and individual liquid chambers so that ink can reach the nozzle 20. The drive section 8 generates ejection energy that ejects ink from the nozzle 20, and pressurizes the pressure chamber 21.

The flow path section is composed of a nozzle plate 2, a chamber plate 3, a diaphragm plate 4, a damper plate 5 which is a damper component, and a filter plate 6.

The nozzle plate 2 has a nozzle 20.

The chamber plate 3, which is an example of a pressure chamber forming member, is laminated on the nozzle plate 2 and has a pressure chamber 21, a fluid resistor 22, and an introduction path 23. The introduction path 23 formed in the chamber plate 3 corresponds to an ink introduction space that introduces ink from the under-filter common liquid chamber 31 to the pressure chamber 21. The pressure chamber 21 supplies liquid to the nozzle 20.

The diaphragm plate 4, which is an example of a diaphragm forming member, is laminated on the chamber plate 3 and has a vibration plate 24 that changes the volume of the pressure chamber 21, an island 25, and a communication hole 26. Note that the diaphragm is not shown here.

The damper plate 5, which is an example of a damper forming member (also called a damper member), is laminated to the diaphragm plate 4 and forms the damper 27, the atmospheric open chamber 28, the atmospheric communication passage, and the second introduction passage 30.

The filter plate 6, which is an example of a filter forming member, is laminated to the damper plate 5. The filter plate 6 includes a filter 33.

A frame 7, which is an example of a frame member, is joined to the filter plate 6 to form a common liquid chamber. The upstream side (frame 7 side) of the filter 33 provided on the filter plate 6 is defined as an above-filter common liquid chamber 32. The downstream side (damper plate 5 side) of the filter 33 provided on the filter plate 6 is defined as a below-filter common liquid chamber 31. The common liquid chamber is divided into upper and lower parts by the filter 33 provided on the filter plate 6.

Figure 2 shows the liquid chamber forming member 14, which in this embodiment is composed of a chamber plate 3, a diaphragm plate 4, a damper plate 5, a filter plate 6, and a frame 7. It is preferable that the liquid chamber forming member 14 has these components, but it is not limited to a configuration that has all of these components, and some may be missing. For example, the filter plate 6 may be missing.

Next, the materials of each part will be described.
The nozzle plate 2 is a plate-shaped component made of, for example, stainless steel (SUS316) and in which the nozzles 20 are formed by press working. The surface from which the liquid is ejected is the nozzle surface, and as described later, a water-repellent film is formed on this nozzle surface.

The chamber plate 3 is also made of, for example, stainless steel (SUS316), and is a plate-shaped component in which the pressure chamber 21 through which the ink flows, the fluid resistor 22, and the introduction path 23 are formed by pressing.

The diaphragm plate 4 is a plate-shaped component made of, for example, nickel (Ni) or a nickel alloy (Ni alloy) and formed by electroforming. The vibration plate 24 formed on the diaphragm plate 4 becomes the wall of the pressure chamber 21. The vibration plate 24 changes the volume of the pressure chamber 21. In addition, the island 25 formed on the diaphragm plate 4 is located approximately in the center of the vibration plate 24, and efficiently propagates the displacement of the vibration plate 24.

The damper plate 5 is made of, for example, nickel (Ni) or a nickel alloy (Ni alloy) and is formed, for example, by electroforming. The growth direction of the electroformed part in the damper plate 5 is toward the nozzle 20. The thickness of the thin plate part of the damper plate 5 that acts as the damper 27 is, for example, about 2 to 4 μm. The thickness of the damper plate 5 around the part that acts as the damper 27 (the thickness of the part surrounding the damper 27) is, for example, about 7 to 20 μm.

The filter plate 6 is made of, for example, nickel (Ni) or a nickel alloy (Ni alloy) and is formed by electroforming. The thickness of the filter plate 6 is, for example, about 2 to 4 μm, and a large number of holes are formed in part of it. The diameter of these holes is about 60% to 90% of the nozzle diameter of the nozzle 20. The holes are arranged in a bale-like stack.

The frame 7 is made of, for example, stainless steel (SUS303). The common liquid chamber formed between the frame 7 and the filter plate 6 is formed by machining the relevant portion of the frame 7.

Next, the configuration of the drive unit 8 will be described. As shown in FIG. 2, the drive unit 8 includes a piezoelectric element 9 that generates pressure to deform the vibration plate 24, a base 10 that holds the piezoelectric element 9, and an FPC (Flexible Printed Circuits) 11 that includes a circuit that applies an electrical signal to the piezoelectric element 9.

The piezoelectric element 9 is made of lead zirconate titanate (PZT) and has vibrators that apply pressure to the vibration plate 24 by dicing, the number of which is at least twice the number of the nozzles 20 .
The base 10 is made of stainless steel (SU430) and is formed by machining.
The FPC 11 is a board made of polyimide and copper foil, and is provided with a driver IC 12 for selecting a drive channel.

Figure 4 is a cross-sectional view taken along line A-A in Figure 2. As shown in Figure 4, the driver IC 12 provided in the driving unit 8 is connected to the vibration plate 24 of the diaphragm plate 4, and each vibration plate 24 operates to apply pressure to the pressure chamber 21 under operational control from the driver IC 12. In other words, ink is ejected from the nozzle 20 when the driving unit 8 applies pressure to the pressure chamber 21 via the vibration plate 24.

The liquid ejection head of this embodiment has a nozzle plate with a water-repellent film formed on the nozzle surface having nozzles, a nozzle cover that protects at least a part of the nozzle surface, and an intermediate plate (intermediate member) that is disposed between the water-repellent film of the nozzle plate and the nozzle cover in the liquid ejection direction and is joined to both the water-repellent film of the nozzle plate and the nozzle cover.

In Figure 2, the water-repellent film of the nozzle plate 2 is not shown, but the bonding between the nozzle plate 2 and the intermediate plate 102 is shown, as well as the bonding between the intermediate plate 102 and the nozzle cover 101.

The intermediate plate 102 is bonded to the water-repellent surface of the nozzle plate 2 with an adhesive 104. The member that bonds the intermediate plate 102 and the nozzle plate 2 is also referred to as a first bonding member.
Moreover, the intermediate plate 102 is joined to at least a part of the nozzle cover 101 with an adhesive 103. The member that joins the intermediate plate 102 and the nozzle cover 101 is also referred to as a second joining member.

In conventional technology, the water-repellent film on the nozzle surface was removed before the nozzle cover was attached, which resulted in the problem of foreign matter being generated when the water-repellent film was removed and becoming mixed in with the inside of the head and the joint with the nozzle cover. In addition, there was a problem that the water-repellent properties of the nozzle surface were reduced because the water-repellent film on the nozzle surface was removed. On the other hand, if the nozzle cover was directly attached to the water-repellent film, sufficient bonding strength was not obtained, resulting in the nozzle cover coming off.

In contrast to this, according to this embodiment, by using the intermediate plate 102, the nozzle cover 101 can be joined to the nozzle plate 2 without removing the water-repellent film of the nozzle plate 2. This makes it possible to prevent foreign matter generated when removing the water-repellent film from entering the inside of the head or the joint with the nozzle cover. In addition, there is no need to remove the water-repellent film on the nozzle surface, and this makes it possible to prevent the water repellency of the nozzle surface from decreasing. In addition, it prevents other members from coming into contact with the nozzle surface due to wiping, etc.

In this embodiment, instead of directly bonding the nozzle cover to the nozzle plate having the water-repellent film, an intermediate plate is provided between the nozzle plate and the nozzle cover, and they are bonded to each other. Therefore, by changing the material and shape of the intermediate plate, the bonding strength of the nozzle cover can be improved compared to a configuration in which the nozzle cover is directly bonded to the nozzle plate. This makes it possible to bond the nozzle cover without removing the water-repellent film on the nozzle surface of the nozzle plate, as described above. As a result, the liquid ejection head of this embodiment can improve bonding reliability and ejection reliability.

Figure 5 shows a diagram for explaining the nozzle plate 2 in this embodiment. Figure 5(A) is a plan view of the nozzle plate 2 when viewed from the liquid ejection direction, and Figure 5(B) is a cross-sectional view taken along line B-B.

As shown in the figure, a water-repellent film 60 is formed on the side of the nozzle plate 2 from which liquid is ejected, i.e., the nozzle surface. The formation of the water-repellent film 60 prevents ink from adhering and makes it easier to clean the nozzle surface.

The method for forming the water-repellent film 60 can be selected as appropriate, for example, by immersing the film in a water-repellent treatment liquid or by performing a sputtering process.

When the water-repellent film 60 is formed on both the nozzle surface side of the nozzle plate 2 and the opposite side (the bonding surface of the chamber plate 3), the water-repellent film 60 formed on the opposite side of the nozzle surface is removed. This improves the bonding strength with the chamber plate 3. Examples of methods for removing the water-repellent film include blasting and plasma treatment.
The water-repellent film 60 formed on the nozzle surface can be selected appropriately, but in this embodiment it is formed on the entire surface of the nozzle surface.

The nozzle plate 2 etc. can be provided with a reference hole 41 and a reference long hole 42. This makes it possible to prevent misalignment during joining.

Figure 6 shows a diagram for explaining the intermediate plate 102 in this embodiment. Figure 6(A) is a plan view of the intermediate plate 102 when viewed from the liquid ejection direction, and Figure 6(B) is a cross-sectional view taken along line C-C.

As shown in FIG. 6A, the intermediate plate 102 has an opening 120 (also called a window) at a position that overlaps with the nozzle 20 of the nozzle plate 2 when viewed from the liquid ejection direction. This allows the nozzle plate 2 and the nozzle cover 101 to be joined together without impeding ejection from the nozzle 20.

The shape of the opening 120 in the intermediate plate 102 can be selected as appropriate. Multiple holes may be provided to correspond to the nozzles 20, and the shape is not limited to a closed hole as shown in the figure, but may be an open hole such as a notch. Any shape is acceptable as long as it does not impede ejection from the nozzles 20.

The size of the intermediate plate 102, i.e., the area when viewed from the liquid ejection direction, is not particularly limited and can be selected appropriately. It is usually smaller than the area of the nozzle plate 2, and preferably one size smaller than the nozzle plate 2.

The material of the intermediate plate 102 can be appropriately selected taking into consideration the configuration of the nozzle plate 2 and the nozzle cover 101. Examples of the material of the intermediate plate 102 include stainless steel and resin. Considering that the nozzle cover 101 will be joined to the nozzle plate 2, it is preferable that the material of the intermediate plate 102 and the material of the nozzle cover 101 are different. Furthermore, it is preferable that the material of the intermediate plate 102 is resin. In these cases, the joining strength of the nozzle cover 101 can be improved.

The thickness of the intermediate plate 102 can be selected as appropriate, but it is preferable that it is as thin as possible, for example, in the form of a film. Although not limited thereto, the thickness of the intermediate plate 102 is preferably, for example, 30 to 50 μm.

In consideration of the bonding with the nozzle plate 2 and the nozzle cover 101, it is preferable to select the surface roughness of the intermediate plate 102 appropriately to facilitate bonding. Although not limited thereto, it is preferable that the surface roughness of the intermediate plate 102 is, for example, Ra 0.4 to Ra 12.5.

Fig. 7 shows a diagram for explaining the nozzle cover 101 in this embodiment. Fig. 7(A) is a plan view of the nozzle cover 101 when viewed from the liquid ejection direction. Fig. 7(B) is a side view of the nozzle cover 101 when viewed from direction D in Fig. 7(A), and Fig. 7(C) is a side view of the nozzle cover 101 when viewed from direction E in Fig. 7(A).
FIG. 8 is a perspective view of the nozzle cover 101 in this embodiment.

As shown in FIG. 7A, the nozzle cover 101 has an opening 121 (also called a window) at a position that overlaps with the nozzle 20 of the nozzle plate 2 when viewed from the liquid ejection direction. This makes it possible to protect the nozzle plate 2 without impeding ejection from the nozzle 20.

As above, the shape of the opening 121 in the nozzle cover 101 can be selected as appropriate. Multiple holes may be provided to correspond to the nozzles 20, and the opening is not limited to a closed hole as shown in the figure, but may be an open hole such as a notch. Any shape may be used as long as it does not impede ejection from the nozzles 20.

When viewed from the liquid ejection direction, it is preferable that the area of the opening 121 of the nozzle cover 101 is smaller than the area of the opening 120 of the intermediate plate 102. In this case, the protective effect of the nozzle cover 101 can be improved, and it becomes easier to prevent ink from adhering to the intermediate plate 102.

The nozzle cover 101 may be made of, for example, stainless steel. The nozzle cover 101 may be processed by, for example, pressing. For example, it may be formed to match the shape of the frame 7.

The nozzle cover 101 protects at least a portion of the nozzle surface, and its shape can be selected as appropriate. In this embodiment, as shown in Figures 7(B), 7(C) and 8, it has a shape that extends from the surface of the nozzle plate 2 that faces the nozzle surface to the side of the nozzle plate 2. In this case, it has a shape that covers the intermediate plate 102 and the peripheral portion of the nozzle surface, preventing ink from adhering to the side.

The thickness of the nozzle cover 101 can be selected as appropriate, but it is preferable that it is as thin as possible. Although not limited, it is preferable that the thickness of the nozzle cover 101 is, for example, 50 to 200 μm.

In consideration of the joining with the intermediate plate 102, it is preferable to appropriately select the surface roughness of the surface of the nozzle cover 101 that joins with the intermediate plate 102 to facilitate joining. Although not limited thereto, it is preferable that the surface roughness of the surface of the nozzle cover 101 that joins with the intermediate plate 102 is, for example, Ra 0.4 to Ra 12.5.

As described above, the intermediate plate 102 is bonded to the water-repellent surface of the nozzle plate 2 with an adhesive 104 (first bonding member). The intermediate plate 102 is also bonded to the nozzle cover 101 with an adhesive 103 (second bonding member). In this embodiment, it is preferable that the first bonding member and the second bonding member are made of different materials. For example, by using an adhesive as the first bonding member, it is possible to bond with a certain degree of strength to the surface that has been treated for water repellency. For example, a silicone adhesive or the like can be used as the adhesive, and for example, an epoxy adhesive or the like can be used as the adhesive.

Second Embodiment
Next, another embodiment of the liquid ejection head of the present invention will be described. Explanation of the same matters as those described above will be omitted. A cross-sectional view of the liquid ejection head of this embodiment is shown in Fig. 9. Fig. 9 is a cross-sectional view similar to Fig. 2.

In this embodiment, similar to the above embodiment, the nozzle plate 2 and the intermediate plate 102 are joined with an adhesive 104 (first joining member), and the intermediate plate 102 and the nozzle cover 101 are joined with an adhesive 103 (second joining member). Unlike the above embodiment, the adhesive 103 covers the portion where the adhesive 104 is exposed on the surface.

As shown in the figure, the adhesive 103 is provided so as to cover the intermediate plate 102, and the pressure sensitive adhesive 104 is not exposed. This allows the adhesive to prevent ink from entering even if the pressure sensitive adhesive has poor liquid contact resistance. In addition, the liquid contact resistance of the liquid ejection head is improved, allowing a variety of inks to be ejected.

Third Embodiment
Next, another embodiment of the liquid ejection head of the present invention will be described. Descriptions of the same matters as those described above will be omitted. A cross-sectional view of the liquid ejection head of this embodiment is shown in Fig. 10. Fig. 10 is a cross-sectional view similar to Fig. 2.

In this embodiment, as in the above embodiment, a frame 7 is provided on the nozzle plate 2 on the side opposite to the side to which the intermediate plate 102 is joined. Also, the nozzle cover 101 is shaped to extend from the surface facing the nozzle surface of the nozzle plate 2 to the side of the nozzle plate 2. Unlike the above embodiment, the nozzle cover 101 is joined to a part of the liquid chamber forming member 14.

As shown in the figure, the nozzle cover 101 is bonded to a portion of the side of the liquid chamber forming member 14 with adhesive 105. By bonding the nozzle cover 101 to both the intermediate plate 102 and the liquid chamber forming member 14, the nozzle cover 101 can be firmly fixed. This not only protects the head from a strong impact such as a paper jam, but also makes it difficult for the nozzle cover to come off the head.

In the illustrated example, the nozzle cover 101 is joined to the chamber plate 3, diaphragm plate 4, damper plate 5, filter plate 6 and frame 7, but this embodiment is not limited to this. It is sufficient that the nozzle cover 101 is joined to a part of the liquid chamber forming member 14, for example, to one selected from the chamber plate 3, diaphragm plate 4, damper plate 5, filter plate 6 and frame 7. Of the liquid chamber forming member 14, it is preferable that the nozzle cover 101 is joined to the frame 7, in which case the above-mentioned effect is improved.

(Basic configuration of head, liquid ejection unit, and liquid ejection device)
Next, the basic configuration of the liquid ejection head of this embodiment will be described. Fig. 11 is a cross-sectional explanatory diagram along a direction perpendicular to the nozzle arrangement direction of the liquid ejection head according to this embodiment (the longitudinal direction of the pressure chambers), and Fig. 12 is a cross-sectional explanatory diagram along the nozzle arrangement direction.
In this example, even if the components are the same as those described in the above embodiment, different reference numerals are used.

The liquid ejection head 100 of this embodiment is formed by laminating and bonding a nozzle plate 1, a flow path plate 2 which is an individual flow path member, and a vibration plate member 3 which serves as a wall member. It also includes a piezoelectric actuator 11 which displaces the vibration region (vibration plate) 30 of the vibration plate member 3, and a common flow path member 20 which also serves as a frame member for the head.

The nozzle plate 1 has multiple nozzles 4 that eject liquid.

The flow path plate 2 forms a number of pressure chambers 6 that communicate with a number of nozzles 4, individual supply flow paths 7 that are individual flow paths that communicate with each pressure chamber 6, and an intermediate supply flow path 8 that serves as a liquid introduction section that communicates with one or more (one in this embodiment) individual supply flow paths 7.

The vibration plate member 3 has a plurality of displaceable vibration plates (vibration regions) 30 that form the walls of the pressure chamber 6 of the flow path plate 2. Here, the vibration plate member 3 has a two-layer structure (not limited to this) and is composed of a first layer 3A that forms a thin portion from the flow path plate 2 side, and a second layer 3B that forms a thick portion.

The thin first layer 3A forms a deformable vibration region 30 in the area corresponding to the pressure chamber 6. Within the vibration region 30, the thick convex portion 30a is formed in the second layer 3B, which is bonded to the piezoelectric actuator 11.

A piezoelectric actuator 11 including an electromechanical conversion element is disposed on the opposite side of the vibration plate member 3 from the pressure chamber 6 as a driving means (actuator means, pressure generating means) that deforms the vibration region 30 of the vibration plate member 3.

This piezoelectric actuator 11 is formed by forming grooves by half-cut dicing in a piezoelectric member bonded onto a base member 13, and forming a required number of columnar piezoelectric elements 12 in a comb shape at specified intervals in the nozzle arrangement direction. The piezoelectric elements 12 are bonded to protruding portions 30a, which are thick portions formed in the vibration region 30 of the vibration plate member 3.

This piezoelectric element 12 is made by alternately stacking piezoelectric layers and internal electrodes, with the internal electrodes extending to the end faces and connected to external electrodes (end face electrodes), and flexible wiring members 15 are connected to the external electrodes.

The common flow path member 20 forms a common supply flow path 10 that connects to multiple pressure chambers 6. The common supply flow path 10 communicates with an intermediate supply flow path 8, which serves as a liquid introduction section, via an opening 9 provided in the vibration plate member 3, and communicates with the individual supply flow paths 7 via the intermediate supply flow path 8.

In this liquid ejection head 100, for example, by lowering the voltage applied to the piezoelectric element 12 from the reference potential (intermediate potential), the piezoelectric element 12 contracts, the vibration region 30 of the vibration plate member 3 is pulled, and the volume of the pressure chamber 6 expands, causing liquid to flow into the pressure chamber 6.

Then, the voltage applied to the piezoelectric element 12 is increased to expand the piezoelectric element 12 in the stacking direction, and the vibration region 30 of the vibration plate member 3 is deformed in the direction toward the nozzle 4, contracting the volume of the pressure chamber 6, thereby pressurizing the liquid in the pressure chamber 6 and ejecting the liquid from the nozzle 4.

Figure 13 is a perspective view of a liquid ejection head in yet another embodiment, and Figure 14 is a cross-sectional explanatory diagram along a direction (longitudinal direction of the pressure chamber) perpendicular to the nozzle arrangement direction of the liquid ejection head in this embodiment. The liquid ejection head 100 of this embodiment is a circulation type liquid ejection head, in which a nozzle plate 1, a flow path plate 2, and a vibration plate member 3 as a wall member are laminated and bonded. It also includes a piezoelectric actuator 11 that displaces the vibration region (vibration plate) 30 of the vibration plate member 3, and a common flow path member 20 that also serves as a frame member for the head.

The flow path plate 2 forms a plurality of pressure chambers 6 each connected to a plurality of nozzles 4 via a nozzle communication passage 5, a plurality of individual supply flow paths 7 each connected to the plurality of pressure chambers 6 and also serving as a fluid resistance portion, and one or more intermediate supply flow paths 8 serving as a liquid introduction portion connected to two or more individual supply flow paths 7.

As in the previous embodiment, the individual supply flow path 7 includes two flow paths, a first flow path section 7A and a second flow path section 7B, which have a higher fluid resistance than the pressure chamber 6, and a third flow path section 7C, which is disposed between the first flow path section 7A and the second flow path section 7B and has a lower fluid resistance than the first flow path section 7A and the second flow path section 7B.

The flow path plate 2 is constructed by stacking multiple plate-like members 2A to 2E, but is not limited to this.

The flow path plate 2 also forms a plurality of individual recovery flow paths 57 along the surface direction of the flow path plate 2, each of which is connected to a plurality of pressure chambers 6 via a nozzle communication passage 5, and one or more intermediate recovery flow paths 58 that serve as liquid outlet sections that are connected to two or more individual recovery flow paths 57.

The individual recovery flow path 57 includes two flow paths, a first flow path section 57A and a second flow path section 57B, which have a higher fluid resistance than the pressure chamber 6, and a third flow path section 57C, which is disposed between the first flow path section 57A and the second flow path section 57B and has a lower fluid resistance than the first flow path section 57A and the second flow path section 57B. The individual recovery flow path 57 includes a flow path section 57D, which is downstream of the second flow path section 57B in the circulation direction, and has the same flow path width as the third flow path section 57C.

The common flow path member 20 forms a common supply flow path 10 and a common recovery flow path 50. In this embodiment, the common supply flow path 10 is composed of a flow path portion 10A that is aligned with the common recovery flow path 50 in the nozzle arrangement direction, and a flow path portion 10B that is not aligned with the common recovery flow path 50.

The common supply flow path 10 communicates with an intermediate supply flow path 8, which serves as a liquid introduction section, through an opening 9 provided in the vibration plate member 3, and communicates with individual supply flow paths 7 through the intermediate supply flow path 8. The common recovery flow path 50 communicates with an intermediate recovery flow path 58, which serves as a liquid discharge section, through an opening 59 provided in the vibration plate member 3, and communicates with individual recovery flow paths 57 through the intermediate recovery flow path 58.

In addition, the common supply flow path 10 is connected to the supply port 71, and the common recovery flow path 50 is connected to the recovery port 72.

The other layer configurations of the diaphragm member 3 and the configuration of the piezoelectric actuator 11 are the same as those in the above embodiment.

In this liquid ejection head 100, similarly to the above embodiment, the piezoelectric element 12 is expanded in the stacking direction, and the vibration area 30 of the vibration plate member 3 is deformed in a direction toward the nozzle 4 to contract the volume of the pressure chamber 6, thereby pressurizing the liquid in the pressure chamber 6 and ejecting the liquid from the nozzle 4.

In addition, liquid that is not ejected from the nozzle 4 passes through the nozzle 4 and is recovered from the individual recovery flow path 57 to the common recovery flow path 50, and is then resupplied from the common recovery flow path 50 to the common supply flow path 10 via an external circulation path. Even when liquid is not being ejected from the nozzle 4, liquid circulates from the common supply flow path 10 to the common recovery flow path 50 via the pressure chamber 6, and is then resupplied to the common supply flow path 10 via an external circulation path.

In this embodiment, too, a simple configuration can attenuate pressure fluctuations associated with liquid ejection and suppress propagation to the common supply flow path 10 and the common recovery flow path 50.

Next, a liquid ejection unit and a liquid ejection device according to the present invention will be described.
A liquid ejection unit of the present invention includes a liquid ejection head according to the present invention. The liquid ejection unit of the present invention preferably has a configuration in which the liquid ejection head is integrated with at least one of a head tank that stores liquid to be supplied to the liquid ejection head, a carriage that mounts the liquid ejection head, a supply mechanism that supplies liquid to the liquid ejection head, a maintenance and recovery mechanism that maintains and recovers the liquid ejection head, and a main scanning movement mechanism that moves the liquid ejection head in a main scanning direction.

The liquid ejection device according to the present invention includes the liquid ejection head according to the present invention or the liquid ejection unit according to the present invention.

An example of a device for ejecting liquid according to the present invention will be described with reference to Figures 15 and 16. Figure 15 is a schematic diagram of the device, and Figure 16 is a plan view of an example of a head unit of the device.

The printing device 500, which is a device for ejecting this liquid, includes an input means 501 for inputting the continuous body 510, a guide and conveyance means 503 for guiding and conveying the continuous body 510, such as continuous paper or sheet material, inputted from the input means 501, to the printing means 505, the printing means 505 for ejecting liquid onto the continuous body 510 to perform printing to form an image, a drying means 507 for drying the continuous body 510, and an ejection means 509 for ejecting the continuous body 510.

The continuous body 510 is sent out from the original winding roller 511 of the carrying-in means 501, guided and transported by the rollers of the carrying-in means 501, the guide and transport means 503, the drying means 507, and the carrying-out means 509, and then wound up by the winding roller 591 of the carrying-out means 509.

This continuous body 510 is transported on the transport guide member 559 in the printing means 505, facing the head unit 550 and the head unit 555, an image is formed by the liquid ejected from the head unit 550, and post-processing is performed with the processing liquid ejected from the head unit 555.

Here, the head unit 550 is arranged with, for example, full-line head arrays 551A, 551B, 551C, and 551D (hereinafter, when no distinction is made between colors, they will be referred to as "head array 551") for four colors from the upstream side in the transport direction.

Each head array 551 is a liquid ejection means, and ejects black K, cyan C, magenta M, and yellow Y liquid onto the transported continuum 510. Note that the types and number of colors are not limited to these.

The head array 551 is, for example, a liquid ejection head (also simply called a "head") 100 according to the present invention arranged in a staggered pattern on a base member 552, but is not limited to this.

Next, an example of a liquid circulation device will be described with reference to FIG. 17. FIG. 17 is a block diagram of the circulation device. Note that only one head is shown here, but when multiple heads are arranged, the supply side liquid path and the recovery side liquid path will be connected to the supply side and recovery side of the multiple heads, respectively, via a manifold or the like.

The liquid circulation device 600 is composed of a supply tank 601, a recovery tank 602, a main tank 603, a first liquid delivery pump 604, a second liquid delivery pump 605, a compressor 611, a regulator 612, a vacuum pump 621, a regulator 622, a supply side pressure sensor 631, and a recovery side pressure sensor 632.

Here, the compressor 611 and the vacuum pump 621 constitute a means for generating a pressure difference between the pressure in the supply tank 601 and the pressure in the recovery tank 602.

The supply side pressure sensor 631 is located between the supply tank 601 and the head 100, and is connected to a supply side liquid path connected to the supply port 71 of the head 100. The recovery side pressure sensor 632 is located between the head 100 and the recovery tank 602, and is connected to a recovery side liquid path connected to the recovery port 72 of the head 100.

One side of the recovery tank 602 is connected to the supply tank 601 via a first liquid delivery pump 604, and the other side of the recovery tank 602 is connected to the main tank 603 via a second liquid delivery pump 605.

As a result, liquid flows from the supply tank 601 through the supply port 71 into the head 100, is collected from the collection port 72 into the collection tank 602, and the first liquid supply pump 604 sends the liquid from the collection tank 602 to the supply tank 601, thereby forming a circulation path through which the liquid circulates.

Here, a compressor 611 is connected to the supply tank 601, and is controlled so that a specified positive pressure is detected by a supply side pressure sensor 631. On the other hand, a vacuum pump 621 is connected to the recovery tank 602, and is controlled so that a specified negative pressure is detected by a recovery side pressure sensor 632.

This allows liquid to circulate through the head 100 while maintaining a constant negative pressure at the meniscus.

In addition, when liquid is ejected from the nozzle 4 of the head 100, the amount of liquid in the supply tank 601 and the recovery tank 602 decreases. Therefore, the second liquid delivery pump 605 is used to replenish liquid from the main tank 603 to the recovery tank 602 as appropriate.

The timing of refilling the liquid from the main tank 603 to the recovery tank 602 can be controlled based on the detection results of a liquid level sensor installed in the recovery tank 602, such as refilling the liquid when the liquid level in the recovery tank 602 falls below a predetermined level.

Next, another example of a printing device as a device for ejecting liquid according to the present invention will be described with reference to Figures 18 and 19. Figure 18 is a plan view of the main parts of the device, and Figure 19 is a side view of the main parts of the device.

This printing device 500 is a serial type device, and the carriage 403 moves back and forth in the main scanning direction by the main scanning movement mechanism 493. The main scanning movement mechanism 493 includes a guide member 401, a main scanning motor 405, a timing belt 408, etc. The guide member 401 is hung between left and right side plates 491A, 491B and holds the carriage 403 movably. The carriage 403 is then moved back and forth in the main scanning direction by the main scanning motor 405 via the timing belt 408 hung between the drive pulley 406 and driven pulley 407.

This carriage 403 is equipped with a liquid ejection unit 440 that integrates the liquid ejection head 100 according to the present invention and a head tank 441. The liquid ejection head 100 of the liquid ejection unit 440 ejects liquid of each color, for example, yellow (Y), cyan (C), magenta (M), and black (K). The liquid ejection head 100 is mounted with a nozzle row consisting of multiple nozzles arranged in a sub-scanning direction perpendicular to the main scanning direction, and the ejection direction facing downward.

The liquid ejection head 100 is connected to the liquid circulation device 600 described above, and liquid of the required color is circulated and supplied.

This printing device 500 is equipped with a transport mechanism 495 for transporting paper 410. The transport mechanism 495 includes a transport belt 412, which is a transport means, and a sub-scanning motor 416 for driving the transport belt 412.

The conveyor belt 412 attracts the paper 410 and conveys it to a position facing the liquid ejection head 100. This conveyor belt 412 is an endless belt that is stretched between a conveyor roller 413 and a tension roller 414. The paper can be attracted by electrostatic attraction or air suction.

The conveyor belt 412 moves in a circular motion in the sub-scanning direction as the conveyor roller 413 is rotated and driven by the sub-scanning motor 416 via the timing belt 417 and timing pulley 418.

Furthermore, a maintenance and recovery mechanism 420 that maintains and recovers the liquid ejection head 100 is arranged on one side of the carriage 403 in the main scanning direction, beside the conveyor belt 412.

The maintenance and recovery mechanism 420 is composed of, for example, a cap member 421 that caps the nozzle surface (the surface on which the nozzles are formed) of the liquid ejection head 100, and a wiper member 422 that wipes the nozzle surface.

The main scanning movement mechanism 493, the maintenance recovery mechanism 420, and the transport mechanism 495 are attached to a housing that includes side plates 491A, 491B, and a back plate 491C.

In the printing device 500 configured in this manner, the paper 410 is fed onto the conveyor belt 412 and adsorbed thereto, and the paper 410 is conveyed in the sub-scanning direction by the circular movement of the conveyor belt 412.

Then, by moving the carriage 403 in the main scanning direction and driving the liquid ejection head 100 in response to an image signal, liquid is ejected onto the stationary paper 410 to form an image.

Next, another example of a liquid ejection unit according to the present invention will be described with reference to FIG. 20. FIG. 20 is a plan view of the main part of the unit.

The liquid ejection unit 440 is made up of the components that make up the device that ejects the liquid, including a housing portion made up of side plates 491A, 491B and a back plate 491C, a main scanning movement mechanism 493, a carriage 403, and a liquid ejection head 100.

It is also possible to configure a liquid ejection unit by further attaching the aforementioned maintenance and recovery mechanism 420 to, for example, the side plate 491B of this liquid ejection unit 440.

Next, another example of a liquid ejection unit according to the present invention will be described with reference to FIG. 21. FIG. 21 is a front view of the unit.

This liquid ejection unit 440 is composed of a liquid ejection head 100 to which a flow path part 444 is attached, and a tube 456 connected to the flow path part 444.

The flow path part 444 is disposed inside the cover 442. A head tank 441 may be included instead of the flow path part 444. A connector 443 is provided on the upper part of the flow path part 444 for electrical connection with the liquid ejection head 100.

In the present application, the liquid to be ejected may have a viscosity and surface tension that allows it to be ejected from the head, and is not particularly limited, but it is preferable that the viscosity is 30 mPa·s or less at room temperature and pressure, or by heating or cooling. More specifically, the liquid may be a solution, suspension, emulsion, etc. that contains a solvent such as water or an organic solvent, a colorant such as a dye or pigment, a functionalizing material such as a polymerizable compound, a resin, or a surfactant, a biocompatible material such as DNA, amino acids, proteins, or calcium, an edible material such as a natural dye, etc., and these can be used for applications such as inkjet ink, surface treatment liquid, a liquid for forming a component of an electronic element or a light-emitting element, an electronic circuit resist pattern, a material liquid for three-dimensional modeling, etc.

The energy sources that generate the liquid include piezoelectric actuators (laminated piezoelectric elements and thin-film piezoelectric elements), thermal actuators that use electrothermal conversion elements such as heating resistors, and electrostatic actuators that consist of a vibration plate and an opposing electrode.

A "liquid ejection unit" is a liquid ejection head that is integrated with functional parts and mechanisms, and includes a collection of parts related to ejecting liquid. For example, a "liquid ejection unit" includes a combination of a liquid ejection head with at least one of the following components: a head tank, a carriage, a supply mechanism, a maintenance and recovery mechanism, a main scanning movement mechanism, and a liquid circulation device.

Here, integration includes, for example, the liquid ejection head, functional parts, and mechanism being fixed to each other by fastening, bonding, engagement, etc., and one being held movably relative to the other. The liquid ejection head, functional parts, and mechanism may also be configured to be detachable from each other.

For example, some liquid ejection units have a liquid ejection head and a head tank integrated together. In other cases, the liquid ejection head and head tank are integrated together by being connected to each other via a tube or the like. Here, a unit including a filter can be added between the head tank and the liquid ejection head of these liquid ejection units.

There are also liquid ejection units in which the liquid ejection head and carriage are integrated.

In some liquid ejection units, the liquid ejection head is movably held by a guide member that constitutes part of the scanning movement mechanism, and the liquid ejection head and the scanning movement mechanism are integrated. In other liquid ejection units, the liquid ejection head, carriage, and main scanning movement mechanism are integrated.

In some liquid ejection units, a cap member, which is part of the maintenance and recovery mechanism, is fixed to a carriage on which the liquid ejection head is attached, integrating the liquid ejection head, carriage, and maintenance and recovery mechanism.

In addition, some liquid ejection units have a tube connected to a head tank or a liquid ejection head to which a flow path component is attached, integrating the liquid ejection head with a supply mechanism. Liquid from a liquid storage source is supplied to the liquid ejection head via this tube.

The main scanning movement mechanism includes the guide member alone. The supply mechanism also includes the tube alone and the loading section alone.

"Devices that eject liquid" include devices that have a liquid ejection head or liquid ejection unit and eject liquid by driving the liquid ejection head. Devices that eject liquid include not only devices that can eject liquid onto objects to which the liquid can adhere, but also devices that eject liquid into air or liquid.

This "liquid ejecting device" can also include means for feeding, transporting, and discharging items onto which liquid can be attached, as well as pre-processing devices and post-processing devices.

For example, examples of "devices that eject liquid" include image forming devices that eject ink to form an image on paper, and three-dimensional modeling devices that eject modeling liquid onto a powder layer formed by layering powder to form a three-dimensional object.

In addition, a "liquid ejecting device" is not limited to devices that use ejected liquid to visualize meaningful images such as letters and figures. For example, it also includes devices that form patterns that have no meaning in themselves, and devices that create three-dimensional images.

The above phrase "something to which liquid can adhere" refers to something to which liquid can adhere at least temporarily, and to which the liquid adheres and sticks, or adheres and penetrates. Specific examples include media such as paper, recording paper, film, and cloth, electronic circuit boards, electronic components such as piezoelectric elements, powder layers, organ models, and testing cells, and unless otherwise specified, includes all things to which liquid can adhere.

The above-mentioned "materials to which liquid can adhere" include paper, thread, fiber, cloth, leather, metal, plastic, glass, wood, ceramics, and other materials to which liquid can adhere even temporarily.

In addition, the "liquid ejection device" may be a device in which a liquid ejection head and an object to which liquid can be attached move relatively, but is not limited to this. Specific examples include a serial type device in which the liquid ejection head moves, and a line type device in which the liquid ejection head does not move.

Other examples of "liquid ejecting devices" include treatment liquid application devices that eject treatment liquid onto paper to apply the treatment liquid to the surface of the paper for purposes such as modifying the surface of the paper, and spray granulation devices that spray a composition liquid in which raw materials are dispersed through a nozzle to granulate the raw material into fine particles.

In this application, the terms image formation, recording, printing, copying, printing, modeling, etc. are all synonymous.

Next, an inkjet recording device will be described as another example of a device that ejects liquid. The inkjet recording device of this embodiment is shown in Figures 22 and 23. Note that in this example, different reference numerals are used even for the same components as those described in the above embodiment.

Figure 22 is a schematic perspective view showing the inkjet recording device of this embodiment. Figure 23 is a side view showing the mechanism of the inkjet recording device of Figure 22. This inkjet recording device 54 houses a carriage 55 movable in the main scanning direction inside its main body, a recording head 58 consisting of an inkjet head implementing the present invention mounted on this carriage 55, and a printing mechanism 59 consisting of an ink cartridge 50 that supplies ink to this recording head.

A paper feed cassette (or paper feed tray) 61 capable of holding a large number of sheets of paper 60 can be attached to the lower part of the inkjet recording device main body 54 from the front side so that it can be inserted and removed freely. In addition, a manual feed tray 61 for manually feeding paper 60 can be opened and closed, and paper 60 fed from the paper feed cassette 61 or manual feed tray 62 is taken in, and after the required image is recorded by the printing mechanism 59, the paper is discharged to a paper discharge tray 63 attached to the rear side.

The printing mechanism 59 holds the carriage 55 slidably in the main scanning direction using a main guide rod 56 and a secondary guide rod 57, which are guide members that are horizontally mounted on left and right side panels (not shown).

A liquid ejection head 58 consisting of an inkjet head according to the present invention that ejects ink droplets of each color of yellow (Y), cyan (C), magenta (M), and black (Bk) is mounted on the carriage 55 with multiple ink ejection ports (nozzles) arranged in a direction intersecting the main scanning direction and the ink droplet ejection direction facing downward. The carriage 55 also has replaceable ink cartridges 50 mounted thereon for supplying ink of each color to the liquid ejection head 58.

The ink cartridge 50 has an air port at the top that communicates with the atmosphere, a supply port at the bottom that supplies ink to the inkjet head, and a porous body filled with ink inside, and the ink supplied to the inkjet head is maintained at a slight negative pressure by the capillary force of the porous body. Also, here, liquid ejection heads 58 of each color are used as the recording head, but a single head having nozzles that eject ink droplets (liquid droplets) of each color may also be used.

The carriage 55 has its rear side (downstream side in the paper transport direction) slidably fitted on a main guide rod 56, and its front side (upstream side in the paper transport direction) slidably mounted on a slave guide rod 57. In order to move the carriage 55 in the main scanning direction, a timing belt 67 is stretched between a drive pulley 65 and a slave pulley 66, which are driven and rotated by a main scanning motor 64, and this timing belt 67 is fixed to the carriage 55. The carriage 55 is driven back and forth by the forward and reverse rotation of the main scanning motor 64.

On the other hand, in order to transport the paper 60 set in the paper feed cassette 61 to the lower side of the head 58, there are provided a paper feed roller 68 and a friction pad 69 that separate and feed the paper 60 from the paper feed cassette 61, a guide member 70 that guides the paper 603, and a tip roller 72 that determines the feed angle of the paper 60 from a transport roller 71 that reverses and transports the fed paper 60. The transport roller 71 is rotated by a sub-scanning motor 73 via a gear train.

Then, a print receiving member 74 is provided as a paper guide member that guides the paper 60 sent from the transport roller 71 below the liquid ejection head 58 in accordance with the range of movement of the carriage 55 in the main scanning direction.

Downstream of the print receiving member 74 in the paper transport direction are a transport roller 75 and a spur 76 that are rotated to send the paper 60 in the paper discharge direction, and further provided are a paper discharge roller 77 and a spur 78 that send the paper 60 to the paper discharge tray 63, and guide members 79 and 80 that form the paper discharge path.

During recording, the carriage 55 is moved while driving the liquid ejection head 58 in response to an image signal, ejecting ink onto the stationary paper 60 to record one line, and then the paper 60 is transported a specified distance before recording the next line. Upon receiving a recording end signal or a signal indicating that the rear end of the paper 60 has reached the recording area, the recording operation ends and the paper 60 is ejected.

A recovery device 81 for recovering from ejection failures of the liquid ejection head 58 is disposed at a position outside the recording area on the right end side in the moving direction of the carriage 55. The recovery device 81 has a capping means, a suction means, and a cleaning means.

When the carriage 55 is waiting to print, it moves to the recovery device 81 side and the liquid ejection head 58 is capped by the capping means, and ejection failures caused by dried ink are prevented by keeping the ejection port moist. In addition, by ejecting ink that is not related to recording during recording, the ink viscosity of all ejection ports is kept constant, and stable ejection performance is maintained.

In the event of an ejection failure, the ejection port (nozzle) of the liquid ejection head 58 is sealed with a capping means, and air bubbles and the like are sucked out of the ejection port together with the ink by a suction means through a tube, and ink and debris adhering to the ejection port surface are removed by a cleaning means, and the ejection failure is restored. The sucked ink is also discharged into a waste ink tank installed at the bottom of the main body, and is absorbed and held in the ink absorber inside the waste ink tank.

In the above embodiment, the present invention is applied to an inkjet recording head, but it can also be applied to a liquid ejection head that ejects liquids other than ink, such as liquid resist for patterning.

(Reference symbols in Figs. 1 to 10)
REFERENCE SIGNS LIST 1 Liquid ejection head 2 Nozzle plate 3 Chamber plate 4 Diaphragm plate 5 Damper plate 6 Filter plate 7 Frame 8 Driving section 9 Piezoelectric element 10 Base 11 FPC
12 Driver IC
REFERENCE SIGNS LIST 14 Liquid chamber forming member 20 Nozzle 21 Pressure chamber 22 Fluid resistance 23 Introduction path 24 Vibration plate 25 Island 26 Communication hole 27 Damper 28 Atmospheric release chamber 30 Second introduction path 31 Common liquid chamber below filter 32 Common liquid chamber above filter 33 Filter 39 ACT opening 41 Reference hole 42 Reference elongated hole 101 Nozzle cover 102 Intermediate plate 103, 105 Adhesive 104 Pressure sensitive adhesive 120, 121 Opening

JP 2011-121218 A

Claims (15)

a nozzle plate having a nozzle surface on which a water-repellent film is formed;
a nozzle cover for protecting at least a portion of the nozzle surface;
an intermediate member that is disposed between the water-repellent film and the nozzle cover in the liquid ejection direction and that is joined to both the water-repellent film and the nozzle cover;
a first bonding member that bonds the nozzle plate and the intermediate member;
a second joining member that joins the intermediate member and the nozzle cover,
The liquid ejection head according to claim 1, wherein the second joining member covers a portion of the first joining member that is exposed on a surface thereof. The liquid ejection head according to claim 1, characterized in that the intermediate member has an opening at a position overlapping the nozzle when viewed from the liquid ejection direction. The liquid ejection head according to claim 1 or 2, characterized in that the nozzle cover has an opening at a position overlapping the nozzle when viewed from the liquid ejection direction. the intermediate member and the nozzle cover have openings at positions overlapping with the nozzles when viewed from a liquid ejection direction;
2. The liquid ejection head according to claim 1, wherein an area of the opening of the nozzle cover is smaller than an area of the opening of the intermediate member. The liquid ejection head according to any one of claims 1 to 4, characterized in that the intermediate member is made of a material different from the nozzle cover. The liquid ejection head according to any one of claims 1 to 5, characterized in that the intermediate member is made of resin. a liquid chamber forming member is provided on a side of the nozzle plate opposite to a side to which the intermediate member is joined;
A liquid ejection head as described in any one of claims 1 to 6, characterized in that the nozzle cover extends from a surface opposite the nozzle surface of the nozzle plate toward a side surface of the nozzle plate, and is joined to a portion of the liquid chamber forming member . 8. The liquid ejection head according to claim 7 , wherein the liquid chamber forming member includes a pressure chamber forming member that forms a pressure chamber that supplies liquid to the nozzle. 9. The liquid ejection head according to claim 7 , wherein the liquid chamber forming member includes a diaphragm forming member that forms a diaphragm. 10. The liquid ejection head according to claim 7 , wherein the liquid chamber forming member includes a damper forming member that forms a damper. 11. The liquid ejection head according to claim 7 , wherein the liquid chamber forming member includes a filter forming member that forms a filter. 12. The liquid ejection head according to claim 7 , wherein the liquid chamber forming member includes a frame member that forms a part of a common liquid chamber that supplies liquid to the individual liquid chambers that supply liquid to the nozzles. A liquid ejection unit comprising the liquid ejection head according to any one of claims 1 to 12 . The liquid ejection unit according to claim 13, characterized in that the liquid ejection head is integrated with at least one of a head tank that stores liquid to be supplied to the liquid ejection head, a carriage that mounts the liquid ejection head, a supply mechanism that supplies liquid to the liquid ejection head, a maintenance and recovery mechanism that maintains and recovers the liquid ejection head, and a main scanning movement mechanism that moves the liquid ejection head in a main scanning direction. 15. A liquid ejection device comprising: a liquid ejection head according to claim 1 ; or a liquid ejection unit according to claim 13 .

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