JP7464897B2 - Dcブロックおよびこれを用いたプラズマ発生装置 - Google Patents
Dcブロックおよびこれを用いたプラズマ発生装置 Download PDFInfo
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- JP7464897B2 JP7464897B2 JP2023506423A JP2023506423A JP7464897B2 JP 7464897 B2 JP7464897 B2 JP 7464897B2 JP 2023506423 A JP2023506423 A JP 2023506423A JP 2023506423 A JP2023506423 A JP 2023506423A JP 7464897 B2 JP7464897 B2 JP 7464897B2
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- frequency power
- high frequency
- power transmission
- plasma
- block
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- 230000005540 biological transmission Effects 0.000 claims description 67
- 239000004020 conductor Substances 0.000 claims description 58
- 238000010586 diagram Methods 0.000 description 15
- 238000011144 upstream manufacturing Methods 0.000 description 12
- 230000008878 coupling Effects 0.000 description 6
- 238000010168 coupling process Methods 0.000 description 6
- 238000005859 coupling reaction Methods 0.000 description 6
- 230000001133 acceleration Effects 0.000 description 4
- 238000009413 insulation Methods 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 239000003380 propellant Substances 0.000 description 3
- 235000015842 Hesperis Nutrition 0.000 description 2
- 235000012633 Iberis amara Nutrition 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- RECVMTHOQWMYFX-UHFFFAOYSA-N oxygen(1+) dihydride Chemical compound [OH2+] RECVMTHOQWMYFX-UHFFFAOYSA-N 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/20—Frequency-selective devices, e.g. filters
- H01P1/201—Filters for transverse electromagnetic waves
- H01P1/203—Strip line filters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/20—Frequency-selective devices, e.g. filters
- H01P1/2007—Filtering devices for biasing networks or DC returns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/20—Frequency-selective devices, e.g. filters
- H01P1/201—Filters for transverse electromagnetic waves
- H01P1/203—Strip line filters
- H01P1/20327—Electromagnetic interstage coupling
- H01P1/20336—Comb or interdigital filters
- H01P1/20345—Multilayer filters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/20—Frequency-selective devices, e.g. filters
- H01P1/201—Filters for transverse electromagnetic waves
- H01P1/203—Strip line filters
- H01P1/20327—Electromagnetic interstage coupling
- H01P1/20354—Non-comb or non-interdigital filters
- H01P1/20381—Special shape resonators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P5/00—Coupling devices of the waveguide type
- H01P5/02—Coupling devices of the waveguide type with invariable factor of coupling
- H01P5/022—Transitions between lines of the same kind and shape, but with different dimensions
- H01P5/028—Transitions between lines of the same kind and shape, but with different dimensions between strip lines
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q13/00—Waveguide horns or mouths; Slot antennas; Leaky-waveguide antennas; Equivalent structures causing radiation along the transmission path of a guided wave
- H01Q13/08—Radiating ends of two-conductor microwave transmission lines, e.g. of coaxial lines, of microstrip lines
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q21/00—Antenna arrays or systems
- H01Q21/0006—Particular feeding systems
- H01Q21/0075—Stripline fed arrays
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
- H05H1/461—Microwave discharges
- H05H1/463—Microwave discharges using antennas or applicators
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
- H05H1/4645—Radiofrequency discharges
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
Description
2 高周波電力源
3 高電圧直流電力源
4,4’ DCブロック
5,6 同軸線路
7 直流電源
8a,8b 配線
9a,9b,9c 抵抗
11 プラズマ発生用アンテナ
12 磁石
13 壁面
14 アクセルグリッド
101,102 マイクロストリップライン
103 絶縁シート
111,121 高周波電力伝送用アンテナ(配線導体層)
112,122 誘電体層
113,123 接地導体層
114,124 貫通穴
115 配線パターン
Claims (7)
- 2つのマイクロストリップライン上にそれぞれ形成された2つの高周波電力伝送用アンテナを、絶縁シートを挟んで対向配置させ、
上記高周波電力伝送用アンテナは、高周波電力を伝送する同軸線路の内部導体に接続される給電線を有し、
上記マイクロストリップラインには、上記高周波電力伝送用アンテナと、上記同軸線路の内部導体に接続されたプラズマ発生用アンテナに直流電圧を印加するための電圧印加用回路とを電気的に接続するための配線パターンが形成されている
ことを特徴とするDCブロック。 - 上記マイクロストリップラインは、上記高周波電力伝送用アンテナが形成された配線導体層と、上記高周波電力伝送用アンテナが形成されていない接地導体層と、上記配線導体層と上記接地導体層との間に挟まれた誘電体層とから成る層構造を有し、
上記2つのマイクロストリップラインの上記配線導体層どうしが上記絶縁シートを挟んで向き合い、上記2つのマイクロストリップラインの上記接地導体層が上記絶縁シートから離間するように、上記2つのマイクロストリップラインを対向配置させた
ことを特徴とする請求項1に記載のDCブロック。 - 上記2つの高周波電力伝送用アンテナの少なくとも一方は、一部に切り欠きを有するオープンリング形状であり、
上記2つの高周波電力伝送用アンテナを非対称の形状としたことを特徴とする請求項1または2に記載のDCブロック。 - 上記2つの高周波電力伝送用アンテナの両方が一部に切り欠きを有するオープンリング形状であり、
上記2つの高周波電力伝送用アンテナについて、オープンリングのリング幅、リング直径、切り欠き位置、切り欠き幅および切り欠き数の少なくとも1つを非対称にしたことを特徴とする請求項3に記載のDCブロック。 - 高周波電力を使用した放電によってプラズマを生成するとともに、生成されたプラズマを高電圧の直流電力によって加速させるための容器であるプラズマ生成室と、
上記プラズマ生成室に対して上記高周波電力を伝送するための伝送線路に配置され、上記高周波電力のみを透過して直流電力を遮断するDCブロックとを備え、
上記DCブロックは、請求項1~4の何れか1項に記載の構成を有することを特徴とするプラズマ発生装置。 - 上記電圧印加用回路として直流電源を備えたことを特徴とする請求項5に記載のプラズマ発生装置。
- 上記電圧印加用回路として、上記プラズマ発生装置の直流電源に接続される抵抗を備えたことを特徴とする請求項5に記載のプラズマ発生装置。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2021/010520 WO2022195700A1 (ja) | 2021-03-16 | 2021-03-16 | Dcブロックおよびこれを用いたプラズマ発生装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2022195700A1 JPWO2022195700A1 (ja) | 2022-09-22 |
JP7464897B2 true JP7464897B2 (ja) | 2024-04-10 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2023506423A Active JP7464897B2 (ja) | 2021-03-16 | 2021-03-16 | Dcブロックおよびこれを用いたプラズマ発生装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20240195037A1 (ja) |
EP (1) | EP4311022A1 (ja) |
JP (1) | JP7464897B2 (ja) |
KR (1) | KR20230149314A (ja) |
WO (1) | WO2022195700A1 (ja) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004034505A1 (en) | 2002-09-27 | 2004-04-22 | Nokia Corporation | Coupling device |
JP2009162178A (ja) | 2008-01-09 | 2009-07-23 | Japan Aerospace Exploration Agency | イオン噴射装置、推進装置及び人工衛星 |
JP2009246810A (ja) | 2008-03-31 | 2009-10-22 | Univ Of Tokushima | 高周波信号伝送装置 |
US20120200369A1 (en) | 2009-10-15 | 2012-08-09 | Ace Technologies Corporation | Dc blocking device by using impedance matching |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6359101A (ja) * | 1986-08-28 | 1988-03-15 | Matsushita Electric Ind Co Ltd | マイクロ波回路接続装置 |
-
2021
- 2021-03-16 WO PCT/JP2021/010520 patent/WO2022195700A1/ja active Application Filing
- 2021-03-16 EP EP21931452.3A patent/EP4311022A1/en active Pending
- 2021-03-16 US US18/550,333 patent/US20240195037A1/en active Pending
- 2021-03-16 KR KR1020237032718A patent/KR20230149314A/ko unknown
- 2021-03-16 JP JP2023506423A patent/JP7464897B2/ja active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004034505A1 (en) | 2002-09-27 | 2004-04-22 | Nokia Corporation | Coupling device |
JP2009162178A (ja) | 2008-01-09 | 2009-07-23 | Japan Aerospace Exploration Agency | イオン噴射装置、推進装置及び人工衛星 |
JP2009246810A (ja) | 2008-03-31 | 2009-10-22 | Univ Of Tokushima | 高周波信号伝送装置 |
US20120200369A1 (en) | 2009-10-15 | 2012-08-09 | Ace Technologies Corporation | Dc blocking device by using impedance matching |
Also Published As
Publication number | Publication date |
---|---|
JPWO2022195700A1 (ja) | 2022-09-22 |
KR20230149314A (ko) | 2023-10-26 |
EP4311022A1 (en) | 2024-01-24 |
US20240195037A1 (en) | 2024-06-13 |
WO2022195700A1 (ja) | 2022-09-22 |
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