JP7432298B2 - Transducer and its manufacturing method - Google Patents

Description

The present invention relates to a transducer and a method for manufacturing the same.

Patent Document 1 discloses a piezoelectric element in which a porous sheet-like electrode is embedded in a polymer piezoelectric body. This piezoelectric element is manufactured by treating the surface of a polymer piezoelectric film or sheet with an organic solvent such as acetone, and then laminating and pressing a porous sheet-like electrode on the treated surface.

Patent Document 2 discloses a piezoelectric type comprising a piezoelectric film, two mesh-like electrodes arranged on both sides of the piezoelectric film, and two supporting plates made of plate-like rigid bodies on both outer sides of each electrode. A vibration sensor is disclosed.

Patent No. 3105645 JP-A-5-172839

In recent years, there has been a need to suppress emissions of volatile organic compounds (VOC) as an environmental measure. Therefore, it is required not to use a volatile adhesive, and it is also required not to use an organic solvent.

Furthermore, unlike structures that use piezoelectric effects, transducers that use electrostatic capacitance between electrodes are attracting attention. Electrostatic transducers have different capacitances depending on the dielectric material. If the surface of a polymer dielectric is treated with an organic solvent and an electrode is pressure-bonded, components of the organic solvent will remain in the pressure-bonded area. The remaining organic solvent components may affect the capacitance. As a result, there is a possibility that the designed capacitance cannot be obtained due to the influence of the remaining organic solvent components.

In addition, electrostatic transducers are required to have not only flexibility but also stretchability so that they can be attached to various locations. For example, when the mounting target has various shapes such as free-form surfaces and a flat transducer is mounted along the mounting target surface, flexibility and stretchability are extremely important for the transducer. This becomes an important element. Without flexibility and stretchability, a transducer cannot be neatly attached to a free-form surface.

Furthermore, as described above, when a volatile adhesive or an organic solvent is used, the components of the volatile adhesive or organic solvent may affect the flexibility and elasticity of the transducer. Therefore, from the viewpoint of flexibility and stretchability, it is required to avoid using volatile adhesives and organic solvents.

One object of the present invention is to provide a transducer that can be manufactured without using volatile adhesives and organic solvents, and a method for manufacturing the same. Another object of the present invention is to provide a flexible and stretchable transducer and a method for manufacturing the same.

(1. Transducer)
A first aspect of the present invention is a first electrode sheet in the form of a sheet , including a first inner surface and a first outer surface, and a plurality of first through holes penetrating from the first inner surface to the first outer surface;
a sheet-like dielectric layer formed of a dielectric material made of a thermoplastic material, and whose first surface is arranged to face the first inner surface of the first electrode sheet;
It is made up of a part of the dielectric material constituting the dielectric layer as a fusion material, and it is made of the same material component as the main body part of the dielectric layer, and the main body part of the dielectric layer and the first electrode sheet and a first fusion layer, which is bonded by fusion of a portion of the dielectric material as the fusion material;
Equipped with
The first fusion layer includes:
By fusing a portion of the dielectric material as the fusing material to the entire surface of the first inner surface of the first electrode sheet, the body portion of the dielectric layer and the first inner surface of the first electrode sheet are bonded to each other. joining the main body portion of the dielectric layer and the first inner surface of the first electrode sheet over the entire range where the inner surface faces each other;
The other part of the dielectric material as the fusion material is located in the plurality of first through holes and fused to the first inner circumferential surface of the first through holes , thereby forming the main body of the dielectric layer. In the transducer, the portion and the first inner circumferential surface of the plurality of first through-holes are joined together, and the plurality of first through-holes of the first electrode sheet are closed.
A second aspect of the present invention is a first electrode sheet including a first inner surface and a first outer surface, and a plurality of first through holes penetrating from the first inner surface to the first outer surface;
a dielectric layer formed of a dielectric material made of a thermoplastic material, the first surface of which is arranged to face the first inner surface of the first electrode sheet;
It is made up of a part of the dielectric material constituting the dielectric layer as a fusion material, and it is made of the same material component as the main body part of the dielectric layer, and the main body part of the dielectric layer and the first electrode sheet and a first fusion layer, which is bonded by fusion of a portion of the dielectric material as the fusion material;
Equipped with
The first fusion layer includes:
By fusing a portion of the dielectric material as the fusing material to the first inner surface of the first electrode sheet, the main body portion of the dielectric layer and the first inner surface of the first electrode sheet are bonded together. join,
The other part of the dielectric material as the fusion material is fused to the first inner circumferential surface of the plurality of first through holes, so that the main body part of the dielectric layer and the plurality of first through holes are fused. joining the first inner circumferential surface of the hole and closing the plurality of first through holes of the first electrode sheet;
Another part of the dielectric material as the fusion material is fused to a part of the first outer surface of the first electrode sheet, thereby covering at least a part of the first outer surface of the first electrode sheet. .
A third aspect of the present invention is a first electrode sheet including a first inner surface and a first outer surface, and a plurality of first through holes penetrating from the first inner surface to the first outer surface;
a dielectric layer formed of a dielectric material made of a thermoplastic material, the first surface of which is arranged to face the first inner surface of the first electrode sheet;
It is made up of a part of the dielectric material constituting the dielectric layer as a fusion material, and it is made of the same material component as the main body part of the dielectric layer, and the main body part of the dielectric layer and the first electrode sheet and a first fusion layer that is bonded by fusion of a portion of the dielectric material as the fusion material;
a second inner surface and a second outer surface, a plurality of second through holes penetrating from the second inner surface to the second outer surface, the second inner surface being opposite to the first surface of the dielectric layer; a second electrode sheet disposed opposite to the second surface of the side;
It is made up of a part of the dielectric material constituting the dielectric layer as a fusion material, and it is made of the same material component as the main body part of the dielectric layer, and the main body part of the dielectric layer and the second electrode a second fusion layer that joins the sheet by fusion of a portion of the dielectric material as the fusion material;
Equipped with
The first fusion layer includes:
By fusing a portion of the dielectric material as the fusing material to the first inner surface of the first electrode sheet, the main body portion of the dielectric layer and the first inner surface of the first electrode sheet are bonded together. join,
The other part of the dielectric material as the fusion material is fused to the first inner circumferential surface of the plurality of first through-holes, so that the main body part of the dielectric layer and the plurality of first through-holes are fused. joining the first inner circumferential surface of the hole and closing the plurality of first through holes of the first electrode sheet;
The second fusion layer includes:
By fusing a portion of the dielectric material as the fusing material to the second inner surface of the second electrode sheet, the main body portion of the dielectric layer and the second inner surface of the second electrode sheet are bonded together. join,
The other part of the dielectric material as the fusion material is fused to the second inner peripheral surface of the plurality of second through-holes, so that the main body part of the dielectric layer and the plurality of second through-holes are fused. joining the second inner circumferential surface of the hole and closing the plurality of second through holes of the second electrode sheet;
Another part of the dielectric material as the fusion material is fused to a part of the second outer surface of the second electrode sheet, thereby covering at least a part of the second outer surface of the second electrode sheet. .

According to the above aspect , the main body portion of the dielectric layer and the first electrode sheet are joined by fusion of the fusion material. Because the fusing material is not a volatile adhesive and an organic solvent, the first transducer can be manufactured without volatile adhesives and organic solvents. Therefore, in manufacturing the first transducer, it is possible to suppress VOC emissions. Here, the first fusion layer includes a case in which a part of the material of the dielectric layer is a fusion material, and a case in which a fusion material different from that of the dielectric layer is used.

(2. Transducer manufacturing method)
A fourth aspect of the present invention is a method for manufacturing the transducer according to the above-mentioned first aspect or second aspect, comprising :
forming a laminate by laminating the first electrode sheet and the dielectric material;
By pressurizing and heating the laminate from the first outer surface side of the first electrode sheet, the surface of the dielectric material on the first electrode sheet side is melted, and the surface of the dielectric layer is melted. The method of manufacturing a transducer includes forming the first fusion layer that joins the main body portion and the first electrode sheet, and embedding the first electrode sheet on the first surface side of the dielectric material .
A fifth aspect of the present invention is a method for manufacturing the transducer according to the third aspect, comprising:
forming a laminate by laminating the first electrode sheet, the dielectric material, and the second electrode sheet;
By pressurizing and heating the laminate from the first outer surface side of the first electrode sheet, the surface of the dielectric material on the first electrode sheet side is melted, and the surface of the dielectric layer is melted. forming the first fusion layer that joins the main body portion and the first electrode sheet, embedding the first electrode sheet on the first surface side of the dielectric material;
By heating the laminate from the second outer surface side of the second electrode sheet, the surface of the dielectric material on the second electrode sheet side is melted and the main body portion of the dielectric layer is melted. The method of manufacturing a transducer includes forming the second fusion layer that joins the second electrode sheet, and embedding the second electrode sheet on the second surface side of the dielectric material.

According to the transducer manufacturing method of the above aspect , the fusion material is neither a volatile adhesive nor an organic solvent, so the transducer can be manufactured without using a volatile adhesive or an organic solvent. Therefore, in manufacturing the transducer, it is possible to suppress VOC emissions.

FIG. 2 is a diagram showing an outline of the configuration of a transducer. It is a top view of the transducer of a first example. 3 is a sectional view taken along line III-III in FIG. 2. FIG. It is a figure which shows the manufacturing method of the transducer of a first example. It is a figure which shows the manufacturing method of the transducer of a second example. It is a figure which shows the manufacturing method of the transducer of a third example. It is a figure which shows the manufacturing method of the transducer of a fourth example. It is a figure which shows the manufacturing method of the transducer of a fifth example. It is a figure which shows the manufacturing method of the transducer of the modified form of a fifth example. It is a figure which shows the manufacturing method of the transducer of a sixth example. It is a figure which shows the manufacturing method of the transducer of a seventh example. It is a figure which shows the manufacturing method of the transducer of an 8th example. It is a perspective view of the transducer of a ninth example. It is a perspective view showing the material of the transducer of a ninth example. It is a perspective view which shows the raw material of the transducer of the 1st modification form of a 9th example. It is a top view which shows the transducer of the second modified form of a ninth example. It is a top view which shows the transducer of the third modified form of a ninth example. It is a top view which shows the transducer of the fourth modified form of a ninth example. It is a perspective view which shows the transducer of a tenth example. It is a sectional view showing the material of the transducer of the tenth example. It is a sectional view showing a transducer of a tenth example. It is a sectional view showing the transducer of the first modification of the tenth example. It is a sectional view showing the transducer of the second modification of the tenth example.

(1. Basic configuration of transducer T)
Transducer T is of an electrostatic type. That is, the transducer T can function as an actuator that generates vibrations, sounds, etc. by utilizing changes in capacitance between electrodes. Further, the transducer T can function as a sensor that detects external pushing force or the like, or as a sensor that detects contact or approach of a conductor having a potential, by utilizing a change in capacitance between electrodes.

When the transducer T functions as an actuator, a voltage is applied to the electrodes, thereby deforming the dielectric according to the potential between the electrodes, and vibrations occur as the dielectric deforms. When the transducer T functions as a pushing force detection sensor, the capacitance between the electrodes changes due to deformation of the dielectric due to input of external pushing force, vibration, sound, etc., and the capacitance between the electrodes changes. External pushing force, etc. is detected by detecting the voltage according to the capacitance. In addition, when the transducer T functions as a contact proximity sensor, the capacitance between the electrodes changes due to the contact or approach of a conductor with a potential, and a voltage corresponding to the changed capacitance between the electrodes is detected. By doing so, contact or approach of the conductor is detected.

Regarding the configuration of the transducer T, first to eighth examples will be given below as examples. First, an overview of the basic configuration common to the transducer T of each example will be explained. In the general description of the configuration of the transducer T, reference is made to FIG.

As shown in FIG. 1, the transducer T is of the electrostatic type, as described above. Therefore, as shown in FIG. A dielectric layer T3 is provided between the second electrode layer T2 and the second inner surface of the second electrode layer T2. However, depending on the type, the transducer T further includes a first protective layer T4 that covers the first outer surface of the first electrode layer T1, and a second protective layer T5 that covers the second outer surface of the second electrode layer T2. There are cases.

Here, both the first electrode layer T1 and the second electrode layer T2 may be formed into a deformable sheet shape. In this case, a portion including the first electrode layer T1 and the second electrode layer T2 constitutes a deformable electrostatic sheet. Further, the first electrode layer T1 is formed in a deformable sheet shape, whereas the second electrode layer T2 is not formed in a sheet shape but is a conductive layer formed in an arbitrary shape that cannot be deformed. It can also be used as a member. The non-deformable conductive member is a rigid metal or the like. In this case, the portion including the first electrode layer T1, excluding the second electrode layer T2, constitutes a deformable electrostatic sheet.

In the following description, a case will be exemplified in which both the first electrode layer T1 and the second electrode layer T2 are formed in a deformable sheet shape. Moreover, the boundary part between the first electrode layer T1 and the dielectric layer T3 is called a first boundary part T6, and the boundary part between the second electrode layer T2 and the dielectric layer T3 is called a second boundary part T7.

(2. Outline of each example)
The outline of the configuration of the transducer T in each example is as shown in Tables 1 and 2. In either example, some of the constituent members of the transducer T are joined by fusion using a fusion material. The part formed of the fusion material and which fuses the members to be joined is called a fusion layer. Here, the fusing material is a material that exhibits bonding force with other members by being melted by heat and then solidified. However, the fusing material is a material different from the volatile adhesive, and is a material that can be melted by heat without using an organic solvent. That is, the fusing material is a thermoplastic material. In particular, in the following, a thermoplastic elastomer is suitably used as the fusion material.

As shown in Tables 1 and 2, the transducers T of the first to fourth examples have a first fusion layer as the first boundary region T6, and a first electrode sheet as the first electrode layer T1. The dielectric layer T3 is joined by fusion bonding. The transducers T of the first and second examples further have a second fusion layer as a second boundary region T7, and the second electrode sheet, which is the second electrode layer T2, and the dielectric layer T3 are fused. It is joined by wearing.

The transducers T of the fifth and sixth examples have, as an internal structure of the dielectric layer T3, an intermediate fusion layer that joins the first dielectric layer and the second dielectric layer by fusion bonding. Further, the transducers T of the seventh and eighth examples have a first intermediate fusion layer that joins the first dielectric layer and the intermediate dielectric layer by fusion, as the internal structure of the dielectric layer T3, Further, it has a second intermediate fusion layer that joins the second dielectric layer and the intermediate dielectric layer by fusion bonding.

(3. First example)
A first example of the transducer 1 will be explained with reference to FIGS. 2 to 4. As shown in FIGS. 2 and 3, the transducer 1 includes a first electrode sheet 21, a second electrode sheet 22, a dielectric layer 23, a first protective layer 24, and a second protective layer 25. Equipped with a seat. Note that the transducer 1 of the first example does not include the second electrode sheet 22 and the second protective layer 25, but includes an electrostatic sheet composed of the first electrode sheet 21, the dielectric layer 23, and the first protective layer 24. In addition, a configuration may also be adopted in which a non-deformable conductive member (not shown) corresponding to the second electrode layer T2 (shown in FIG. 1) is provided.

The first electrode sheet 21 and the second electrode sheet 22 are electrically conductive cloth. The first electrode sheet 21 and the second electrode sheet 22 have conductivity, flexibility, and stretchability in the plane direction. The first electrode sheet 21 and the second electrode sheet 22 are woven or nonwoven fabrics made of conductive fibers. Here, the conductive fiber is formed by coating the surface of a flexible fiber with a conductive material. The conductive fiber is formed, for example, by plating the surface of a resin fiber such as polyethylene with copper, nickel, or the like.

The first electrode sheet 21 has a plurality of first through-holes 21a (shown in FIG. 3) by forming a cloth from fibers, has flexibility, and can be expanded and contracted in the plane direction. Similar to the first electrode sheet 21, the second electrode sheet 22 includes a plurality of second through holes 22a (shown in FIG. 3).

In the following, an example will be given in which the first electrode sheet 21 and the second electrode sheet 22 are made of conductive fabric, but conductive nonwoven fabric can also be used. For example, as shown in FIG. 2, in the case of a conductive fabric, the first electrode sheet 21 is formed by weaving conductive fibers as warp and weft. The area surrounded by the warp and weft becomes the first through hole 21a. The same applies to the second through hole 22a.

In addition, when the first electrode sheet 21 is a conductive nonwoven fabric, the first through holes 21a are formed irregularly. In addition to the conductive cloth, the first electrode sheet 21 may be made of a thin film of punched metal that has flexibility and can be expanded and contracted in the surface direction. In this case, the first through hole 21a becomes a punched portion. Furthermore, the first electrode sheet 21 may be an elastomer sheet (including a rubber sheet) containing a conductive material and having a plurality of through holes. In this example, the elastomer is a polymeric material having elasticity, and is used to include a rubber elastic body and an elastic body having a rubber-like shape other than a rubber elastic body.

The first electrode sheet 21 and the second electrode sheet 22 are formed to have approximately the same size, and are arranged to face each other. Here, in the first electrode sheet 21, the surface facing the second electrode sheet 22 is defined as a first inner surface 21b, and the surface opposite to the second electrode sheet 22 is defined as a first outer surface 21c. Further, in the second electrode sheet 22, the surface facing the first electrode sheet 21 is defined as a second inner surface 22b, and the surface opposite to the first electrode sheet 21 is defined as a second outer surface 22c.

The dielectric layer 23 is formed of an elastically deformable dielectric material. Specifically, the dielectric layer 23 is made of thermoplastic elastomer. The dielectric layer 23 is sheet-shaped and has the same outer shape as the first electrode sheet 21 . The dielectric layer 23 has a structure that expands and contracts in the thickness direction and also expands and contracts in the surface direction. A first electrode sheet 21 is disposed on the first surface (upper surface in FIG. 3) of the dielectric layer 23, and a second electrode sheet 22 is disposed on the second surface (lower surface in FIG. 3) of the dielectric layer 23. is located. The main body portion (main portion) of the dielectric layer 23 is arranged between the first inner surface 21b of the first electrode sheet 21 and the second inner surface 22b of the second electrode sheet 22.

However, the first electrode sheet 21 is embedded in the first surface side (upper side in FIG. 3) of the material 23a of the dielectric layer 23 (referred to as dielectric material, shown in FIG. 4). That is, a portion of the first surface side of the dielectric material 23a exists as the first fusion layer 26 on the first inner peripheral surface and the first inner surface 21b of the plurality of first through holes 21a in the first electrode sheet 21. ing. The first fusion layer 26 uses a part of the dielectric material 23a as a fusion material, and includes a boundary between the first inner circumferential surface of the first through hole 21a and the main body of the dielectric layer 23, and The boundary between the first inner surface 21b and the main body portion of the dielectric layer 23 is joined by fusing a portion of the dielectric material 23a. Here, the main body portion of the dielectric layer 23 means a portion interposed between the first electrode sheet 21 and the second electrode sheet 22.

More specifically, the first fusion layer 26 is fused to the entire surface of the first inner surface 21b. That is, the first fusion layer 26 is fused to the main body portion of the dielectric layer 23 and the first inner surface 21b over the entire opposing range. Furthermore, since the first fusion layer 26 fills the entire first through hole 21a, it closes the first through hole 21a. That is, the first fusion layer 26 is fused to the entire first inner peripheral surface of the first through hole 21a. Therefore, the bonding force between the first electrode sheet 21 and the dielectric layer 23 is very high.

Further, on the first outer surface 21c of the first electrode sheet 21, a portion of the first surface side of the dielectric material 23a (shown in FIG. 4) exists as a first protective layer 24. Due to the presence of the first protective layer 24, the first electrode sheet 21 is not exposed, making the transducer 1 easy to handle. Furthermore, since a portion of the dielectric material 23a exists so as to surround the entire circumference of the thread of the first electrode sheet 21, the bonding force between the first electrode sheet 21 and the dielectric layer 23 is extremely high.

Similar to the first electrode sheet 21, a second electrode sheet 22 is embedded on the second surface side (lower side in FIG. 3) of the dielectric material 23a. That is, a portion of the second surface side of the dielectric material 23a exists as the second fusion layer 27 on the second inner peripheral surface and second inner surface 22b of the plurality of second through holes 22a in the second electrode sheet 22. ing. The second fusion layer 27 uses a part of the dielectric material 23a as a fusion material, and includes a boundary between the second inner peripheral surface of the second through hole 22a and the main body of the dielectric layer 23, and The boundary between the second inner surface 22b and the main body portion of the dielectric layer 23 is joined by fusing a portion of the dielectric material 23a.

More specifically, the second fusion layer 27 is fused to the entire surface of the second inner surface 22b. That is, the second fusion layer 27 is fused over the entire opposing range of the main body portion of the dielectric layer 23 and the second inner surface 22b. Furthermore, since the second fusion layer 27 fills the entire second through hole 22a, it closes the second through hole 22a. That is, the second fusion layer 27 is fused to the entire second inner peripheral surface of the second through hole 22a. Therefore, the bonding force between the second electrode sheet 22 and the dielectric layer 23 is very high.

Further, on the second outer surface 22c of the second electrode sheet 22, a portion of the second surface side of the dielectric material 23a exists as a second protective layer 25. Due to the presence of the second protective layer 25, the second electrode sheet 22 is not exposed, making the transducer 1 easier to handle. Furthermore, since a portion of the dielectric material 23a exists so as to surround the entire circumference of the thread of the second electrode sheet 22, the bonding force between the second electrode sheet 22 and the dielectric layer 23 is extremely high.

Further, the first fusion layer 26 and the second fusion layer 27 are made of the same material components as the dielectric layer 23. The first fusion layer 26 and the second fusion layer 27 are formed by applying heat to a portion of the dielectric material 23a made of thermoplastic elastomer. In other words, the first fusion layer 26 and the second fusion layer 27 are formed without substantially changing the material components of the dielectric material 23a. This means that the first fusion layer 26 and the second fusion layer 27 do not contain volatile adhesives, organic solvents, or the like.

Next, a method for manufacturing the transducer 1 will be described with reference to FIG. 4. The transducer 1 is manufactured by including a pair of pressurizing and heating rollers 41 and 42 (pressing and heating members). The transducer 1 as a product is manufactured by heating the material 1a while applying pressure with a pair of rollers 41 and 42 while conveying the material 1a. Note that, instead of the pair of rollers 41 and 42, a pair of press plates (not shown) can be used to apply pressure and heat. If the transducer 1 does not include the second electrode sheet 22, the lower roller 42 in FIG. 4 only needs to apply pressure, and heating is not necessary.

As shown on the left side of FIG. 4, (a) a first electrode sheet 21, (b) a second electrode sheet 22, and (c) a dielectric material 23a are prepared as the material 1a of the transducer 1. A laminate is formed by laminating (a) the first electrode sheet 21, (c) the dielectric material 23a, and (b) the second electrode sheet 22 in this order. The laminated material 1a (laminate) is conveyed to the right side in FIG. 4 and entered between a pair of rollers 41 and 42.

That is, the pair of rollers 41 and 42 press and heat the first electrode sheet 21 from the first outer surface 21c side, and press and heat the second electrode sheet 22 from the second outer surface 22c side. As a result, the heat of the first roller 41 is transferred to the first surface (upper side in FIG. 4) of the dielectric material 23a, and the portion to which the heat is transferred is melted. Similar to the first roller 41, the heat of the second roller 42 is transferred to the second surface (lower side in FIG. 4) of the dielectric material 23a, and the portion to which the heat is transferred is melted.

Then, the first electrode sheet 21 is buried on the first surface side of the dielectric material 23a, and the second electrode sheet 22 is buried on the second surface side of the dielectric material 23a. Then, a portion of the first surface side of the dielectric material 23a is fused to the first electrode sheet 21 and the second electrode sheet 22 as the melted dielectric material 23a solidifies.

In this way, a portion of the first surface side of the dielectric material 23a forms the first fusion layer 26, and the first inner circumferential surface of the first through hole 21a of the first electrode sheet 21 and the dielectric layer 23 form a first fusion layer 26. and the boundary between the first inner surface 21b and the dielectric layer 23. Further, a portion of the first surface side of the dielectric material 23a forms a first protective layer 24 that covers the first outer surface 21c of the first electrode sheet 21. Similar to the first surface side of the dielectric material 23a, a portion of the second surface side of the dielectric material 23a forms the second fusion layer 27, and the first side of the second through hole 22a of the second electrode sheet 22 The boundary portion between the inner circumferential surface and the dielectric layer 23 and the boundary portion between the second inner surface 22b and the dielectric layer 23 are bonded. Furthermore, a portion of the second surface side of the dielectric material 23 a forms a second protective layer 25 that covers the second outer surface 22 c of the second electrode sheet 22 .

According to the transducer 1 of the first example, the main body portion of the dielectric layer 23 and the first electrode sheet 21 are joined by fusion of the fusion material. Since the fusing material is not an adhesive or an organic solvent, the transducer 1 can be manufactured without using an adhesive or an organic solvent. Therefore, in manufacturing the transducer 1, manufacturing costs can be reduced and VOC emissions can be suppressed.

Here, in the transducer 1, the first electrode sheet 21 and the second electrode sheet 22 have flexibility and stretchability in the plane direction. Furthermore, the dielectric layer 23, the first fusion layer 26, the second fusion layer 27, the first protective layer 24, and the second protective layer 25 are formed of an elastomer. Therefore, the transducer 1 as a whole has flexibility and has stretchability in the plane direction and the normal direction. Therefore, the transducer 1 can be neatly attached to an attachment target of any shape.

Further, since the first fusion layer 26 and the second fusion layer 27 are constituted by a portion of the dielectric material 23a, the material composition is the same as that of the dielectric layer 23. Therefore, the first fusion layer 26 and the second fusion layer 27 do not inhibit the deformation of the dielectric layer 23.

(4. Second example)
A second example of the transducer 2 and its manufacturing method will be described with reference to FIG. 5. Components that are the same as those in the first example are given the same reference numerals and detailed explanations will be omitted.

As shown on the left side of FIG. 5, the materials 2a of the transducer 2 include (a) the first electrode sheet 21, (b) the second electrode sheet 22, (c) the dielectric layer 53, and (d) the first fusion material. 56a and (e) second fusion material 57a are prepared. The dielectric layer 53 is made of a non-thermoplastic material. In particular, in this example, the dielectric layer 53 is formed of an elastomer, which is a non-thermoplastic material. Further, the dielectric layer 53 is made of a foamed elastomer material, which is a non-thermoplastic material. That is, the dielectric layer 53 has holes that communicate in the normal direction of the sheet, that is, in the direction of lamination of the laminated body of the constituent members of the transducer 2.

That is, the dielectric layer 53 does not melt even if heat is transferred from the pair of rollers 41 and 42. In addition to the elastomer, the dielectric layer 53 may also be made of a material with good air permeability, such as a non-woven fabric made of a non-thermoplastic material.

The first welding material 56a and the second welding material 57a are made of an elastomer thermoplastic material. That is, the first fusion material 56a and the second fusion material 57a are different materials from the dielectric layer 53. However, the elastic modulus of the first fusion material 56a and the second fusion material 57a in a solidified state is preferably about the same as that of the dielectric layer 53. The first fusion material 56a and the second fusion material 57a are formed into particles, for example, and melt when heat is applied.

Then, (a) first electrode sheet 21, (d) first fusion material 56a, (c) dielectric layer 53, (e) second fusion material 57a, and (b) second electrode sheet 22 are laminated in this order. By doing so, a laminate made of the material 2a is formed. However, although this example will be described as a state in which both sides of the transducer 2 are manufactured simultaneously, it is also possible to manufacture one side at a time. In this case, (a) the first electrode sheet 21, (d) the first fusion material 56a, and (c) the dielectric layer 53 are laminated in this order to manufacture one side, and then (f) the single-sided manufactured body. , (e) the second fusion material 57a, and (b) the second electrode sheet 22 are laminated in this order to produce the other side.

Returning to FIG. 5, the explanation will be continued. The laminated material 2a (laminate) is conveyed to the right side in FIG. 5 and entered between a pair of rollers 41 and 42. That is, the first roller 41 applies pressure and heat to the first electrode sheet 21 from the first outer surface 21c side. As a result, the heat of the first roller 41 is transferred to the first welding material 56a, and the first welding material 56a is melted. Then, the melted first welding material 56a joins the first inner peripheral surface of at least a portion of the first through hole 21a of the first electrode sheet 21 and the boundary region of the dielectric layer 53. Form layer 56.

The first fusion layer 56 further bonds the boundary between at least a portion of the first inner surface 21b of the first electrode sheet 21 and the dielectric layer 53. The first fusion layer 56 may be fused to the entire area where the dielectric layer 53 and the first inner surface 21b face each other. In this case, it has high bonding strength. On the other hand, the first fusion layer 56 may be fused so that there is a gap in a part of the surface direction in the opposing range. In this case, for example, when bonding the first electrode sheet 21 and the lead wires using a conductive bonding material such as solder or a conductive resin, the conductive bonding material may spread over a wide area of the first electrode sheet 21. It is possible to create a state in which

Here, the first outer surface 21c of the first electrode sheet 21 is exposed because the first fusion material 56a is not present. However, the first protective layer covering the first outer surface 21c can also be formed by adjusting the amount of the first fusion material 56a.

Like the first roller 41, the second roller 42 applies pressure and heat to the second electrode sheet 22 from the second outer surface 22c side. As a result, the heat of the second roller 42 is transferred to the second fusion material 57a, and the second fusion material 57a is melted. Then, the melted second fusion material 57a is applied to the boundary region between the second inner circumferential surface of at least a portion of the second through hole 22a of the second electrode sheet 22 and the dielectric layer 53, and the second electrode sheet A second fusion layer 57 is formed to bond the boundary between at least a portion of the second inner surface 22b of 22 and the dielectric layer 53. Here, the second outer surface 22c of the second electrode sheet 22 is exposed because the second fusion material 57a is not present. However, by adjusting the amount of the second fusion material 57a, it is also possible to form a second protective layer covering the second outer surface 22c.

The transducer 2 manufactured as described above includes the first electrode sheet 21, the second electrode sheet 22, the dielectric layer 53, the first fusion layer 56 formed of a material different from the dielectric layer 53, and A second fusion layer 57 made of a material different from that of the dielectric layer 53 is provided. In this manufacturing method as well, as in the first example, it is possible to suppress VOC emissions. In addition, similar effects can be achieved for other effects as well.

Furthermore, since the dielectric layer 53 is formed of a foamed material, a nonwoven fabric, or the like, it has holes communicating in the normal direction of the transducer 2 (the stacking direction). Further, the first fusion layer 56 is fused to the first inner circumferential surface while maintaining the state where the first through hole 21a of the first electrode sheet 21 penetrates. Furthermore, the first fusion layer 56 is fused to a part of the first inner surface 21b of the first electrode sheet 21, and forms a gap between the other part and the dielectric layer 53. . Further, the second fusion layer 57 is fused to a part of the second inner surface 22b of the second electrode sheet 22, and forms a gap between the other part and the dielectric layer 53.

Therefore, the transducer 2 is communicated between both surfaces of the electrostatic sheet forming the transducer 2 through the plurality of first through holes 21a, the plurality of second through holes 22a, and the holes in the dielectric layer 53. That is, the electrostatic sheet is connected from the first surface to the second surface of the electrostatic sheet. As a result, the electrostatic sheet constituting the transducer 2 has air permeability as a whole, so that the electrostatic sheet constituting the transducer 2 can be installed in a location that requires breathability.

(5. Third example)
A third example of the transducer 3 and its manufacturing method will be described with reference to FIG. 6. Components that are the same as those in the first example are given the same reference numerals and detailed explanations will be omitted.

As shown on the left side of FIG. 6, a member in which (a) the first electrode sheet 21 and (b) the second electrode sheet 22 and the dielectric material 63a are integrated is prepared as the material 3a of the transducer 3. Here, the dielectric material 63a is made of thermoplastic elastomer, similar to the dielectric material 23a of the first example.

The dielectric material 63a is attached to all surfaces of the conductive fibers of the second electrode sheet 22 by dipping, spraying, coating, etc., so that they are integrally mechanically engaged. Therefore, the dielectric material 63a is attached to all of the second inner peripheral surface, second inner surface 22b, and second outer surface 22c of the second through hole 22a of the second electrode sheet 22. Here, in the state in which the dielectric material 63a is attached, the second through hole 22a is mechanically engaged integrally with the second electrode sheet 22 while maintaining the penetrating state. It can be said that the dielectric material 63a has holes in the same direction as the second through-holes 22a of the second electrode sheet 22 (the surface normal direction and the stacking direction). In other words, the member in which the dielectric material 63a is attached to the surface of the second electrode sheet 22 maintains a woven fabric shape.

Subsequently, as shown on the left side of FIG. 6, the members in which (a) the first electrode sheet 21, (b) the second electrode sheet 22, and the dielectric material 63a are integrated are laminated in this order, starting with the material 3a. A laminate is formed. The stacked material 3a (laminated body) is conveyed to the right side in FIG. 6 and entered between a pair of rollers 41 and 42. That is, the pair of rollers 41 and 42 press and heat the first electrode sheet 21 from the first outer surface 21c side, and press and heat the second electrode sheet 22 from the second outer surface 22c side. As a result, the heat of the first roller 41 is mainly transferred to the surface of the dielectric material 63a on the first electrode sheet 21 side (upper side in FIG. 6), and the portion to which the heat is transferred is melted.

Then, a part of the first electrode sheet 21 enters the dielectric material 63a. Then, a portion of the dielectric material 63a is fused to the first electrode sheet 21 as the melted dielectric material 63a solidifies. In this way, a first welding layer 66 is formed in which a portion of the dielectric material 63a is applied as a welding material. That is, the first fusion layer 66 is made of the same material component as the main body portion of the dielectric layer 63. The first fusion layer 66 is bonded to the boundary between at least a portion of the first inner circumferential surface of the first through hole 21a of the first electrode sheet 21 and the main body portion of the dielectric layer 63, and to the first inner surface 21b and the dielectric layer. The boundary portion of the body layer 63 with the main body portion is joined. At this time, a portion of the dielectric material 63a forming the first welding layer 66 welds the first inner circumferential surface of the first through-hole 21a while maintaining the state where the first through-hole 21a penetrates.

Further, the dielectric material 63a constitutes a second protective layer 65 that covers the second outer surface 22c of the second electrode sheet 22 in advance. Note that the second roller 42 does not need to be heated.

The transducer 3 manufactured as described above includes the first electrode sheet 21, the second electrode sheet 22, the dielectric layer 63, the first fusion layer 66 formed by a portion of the dielectric material 63a, and the dielectric material 63a. A second protective layer 65 is provided. In this manufacturing method, as in the first example, manufacturing costs can be reduced and VOC emissions can be suppressed. In addition, similar effects can be achieved for other effects as well.

Furthermore, the dielectric material 63a maintains a state where the second through hole 22a of the second electrode sheet 22 penetrates. Further, the first fusion layer 66 is fused to the first inner circumferential surface while maintaining the state where the first through hole 21a of the first electrode sheet 21 penetrates. Therefore, the transducer 3 is communicated between both surfaces of the electrostatic sheet forming the transducer 3 through the plurality of first through holes 21a and the plurality of second through holes 22a. As a result, the electrostatic sheet forming the transducer 3 has air permeability as a whole, so that the electrostatic sheet forming the transducer 3 can be installed in a location that requires air permeability.

(6. Variation of the third example)
In the third example, the dielectric material 63a was attached to the second electrode sheet 22 by dipping, spraying, coating, or the like. In addition, in order to manufacture a member in which the second electrode sheet 22 and the dielectric material 63a are integrated, well-known co-extrusion can also be applied. However, in this case, the dielectric material 63a closes the second through hole 22a of the second electrode sheet 22, so the transducer 3 does not have air permeability.

(7. Fourth example)
A fourth example of the transducer 4 and its manufacturing method will be described with reference to FIG. 7. Components that are the same as those in the first example are given the same reference numerals and detailed explanations will be omitted.

As shown on the left side of FIG. 7, the material 4a of the transducer 4 includes (a) the first electrode sheet 21, (b) a member in which the second electrode sheet 22 and the dielectric material 73a are integrated, and (c) First fusion material 76a is prepared. The dielectric material 73a is made of elastomer, which is a non-thermoplastic material. That is, even if heat is transferred from the pair of rollers 41 and 42, it will not melt.

Similarly to the third example, the dielectric material 73a is attached to all surfaces of the conductive fibers of the second electrode sheet 22 by dipping, spraying, coating, etc., so that they are mechanically engaged integrally. There is. Here, in the state in which the dielectric material 73a is attached, the second through hole 22a is mechanically engaged integrally with the second electrode sheet 22 while maintaining the penetrating state. It can be said that the dielectric material 73a has holes in the same direction as the second through-holes 22a of the second electrode sheet 22 (the surface normal direction and the stacking direction).

The first fusion material 76a is made of an elastomer thermoplastic material. That is, the first fusion material 76a is a different material from the dielectric material 73a. However, the elastic modulus of the first fusion material 76a in a solidified state is preferably about the same as that of the dielectric material 73a. The first fusion material 76a is formed into particles and melts when heat is applied.

Then, by laminating the members in which (a) the first electrode sheet 21, (c) the first fusion material 76a, and (b) the second electrode sheet 22 and the dielectric material 73a are integrated, from the material 4a. A laminate is formed. The laminated material 4a (laminate) is conveyed to the right side in FIG. 7 and entered between a pair of rollers 41 and 42. That is, the pair of rollers 41 and 42 press and heat the first electrode sheet 21 from the first outer surface 21c side, and press and heat the second electrode sheet 22 from the second outer surface 22c side. As a result, the heat of the first roller 41 is mainly transferred to the first welding material 76a, and the first welding material 76a is melted.

Then, the melted first welding material 76a is applied to the boundary area between the first inner circumferential surface of at least a portion of the first through hole 21a of the first electrode sheet 21 and the dielectric layer 73, and the first electrode sheet A first fusion layer 76 is formed that joins at least a portion of the first inner surface 21b of 21 and the boundary region of the dielectric layer 73. Here, the first outer surface 21c of the first electrode sheet 21 is exposed because the first fusion material 76a is not present. However, the first protective layer covering the first outer surface 21c can also be formed by adjusting the amount of the first fusion material 76a.

Further, the dielectric material 73a constitutes a second protective layer 75 that covers the second outer surface 22c of the second electrode sheet 22 in advance. Note that the second roller 42 does not need to be heated.

The transducer 4 manufactured as described above includes the first electrode sheet 21, the second electrode sheet 22, the dielectric layer 73, the first fusion layer 76 formed of a material different from the dielectric layer 73, and A second protective layer 75 formed of a dielectric material 73a is provided. In this manufacturing method as well, as in the first example, it is possible to suppress VOC emissions. Furthermore, as in the third example, since the electrostatic sheet constituting the transducer 4 has breathability as a whole, the electrostatic sheet constituting the transducer 4 can be installed in a location that requires ventilation. .

(8. Fifth example)
A fifth example of the transducer 5 and its manufacturing method will be described with reference to FIG. 8. Components that are the same as those in the first example are given the same reference numerals and detailed explanations will be omitted.

As shown on the left side of FIG. 8, the material 5a of the transducer 5 includes (a) a member in which the first electrode sheet 21 and the first dielectric material 83a are integrated, and (b) a member in which the second electrode sheet 22 and the first dielectric material 83a are integrated. A member in which the dielectric material 84a is integrated is prepared. Here, the first dielectric material 83a and the second dielectric material 84a are made of thermoplastic elastomer, similar to the dielectric material 23a of the first example. Further, the first dielectric material 83a and the second dielectric material 84a are integrated into the first electrode sheet 21 and the second electrode sheet 22 by the same method as in the third example.

Subsequently, as shown on the left side of FIG. 8, (a) a member in which the first electrode sheet 21 and the first dielectric material 83a are integrated, and (b) a member in which the second electrode sheet 22 and the second dielectric material 84a are integrated. The integrated members are stacked in order. The laminated material 5a (laminate) is conveyed to the right side in FIG. 8 and entered between a pair of rollers 41 and 42. That is, the pair of rollers 41 and 42 press and heat the first electrode sheet 21 from the first outer surface 21c side, and press and heat the second electrode sheet 22 from the second outer surface 22c side. As a result, the heat of the pair of rollers 41 and 42 is transmitted to a portion of the first dielectric material 83a on the second dielectric material 84a side and a portion of the second dielectric material 84a on the first dielectric material 83a side. The area to which the heat was transferred melts.

Then, a portion of the first dielectric material 83a and a portion of the second dielectric material 84a are fused together. In this way, an intermediate fusion layer 85 is formed in which a portion of the first dielectric material 83a and a portion of the second dielectric material 84a are applied as fusion materials. That is, the intermediate fusion layer 85 is made of the same material components as the first dielectric layer 83 and the second dielectric layer 84. In the intermediate fusion layer 85, the first dielectric layer 83 and the second dielectric layer 84 are directly bonded.

Further, the first dielectric material 83a forms a first protective layer 86 that covers the first outer surface 21c of the first electrode sheet 21 in advance. Further, the second dielectric material 84a forms a second protective layer 87 that covers the second outer surface 22c of the second electrode sheet 22 in advance.

The transducer 5 manufactured as described above includes the first electrode sheet 21, the second electrode sheet 22, the first dielectric layer 83, the second dielectric layer 84, the intermediate fusion layer 85, the first protective layer 86, and a second protective layer 87. In this manufacturing method, as in the first example, manufacturing costs can be reduced and VOC emissions can be suppressed. Furthermore, since the transducer 5 as a whole has air permeability, the transducer 5 can be installed in a location that requires air permeability.

(9. Variation of the fifth example)
A fifth modified example of the transducer 6 and its manufacturing method will be described with reference to FIG. 9. The differences from the fifth example will be explained. As shown in FIG. 9, the first dielectric material 83a does not cover the first outer surface 21c of the first electrode sheet 21. As shown in FIG. Furthermore, the second dielectric material 84a does not cover the second outer surface 22c of the second electrode sheet 22. Then, the material 6a of the transducer 6 is prepared and manufactured in the same manner as in the fifth example. The transducer 6 manufactured in this manner is generally similar to the transducer 5 of the fifth example. However, the first outer surface 21c of the first electrode sheet 21 and the second outer surface 22c of the second electrode sheet 22 are exposed. As long as exposure of the electrodes is allowed, the transducer 6 is fully effective.

(10. Sixth example)
A sixth example of the transducer 7 and its manufacturing method will be described with reference to FIG. 10. Components that are the same as those in the first example are given the same reference numerals and detailed explanations will be omitted.

As shown on the left side of FIG. 10, the material 7a of the transducer 7 includes (a) a member in which the first electrode sheet 21 and the first dielectric material 93a are integrated, and (b) the second electrode sheet 22 and the second dielectric material 93a. A member into which the body material 94a is integrated and (c) an intermediate fusion material 95a are prepared. The first dielectric material 93a and the second dielectric material 94a are made of elastomer, which is a non-thermoplastic material. That is, even if heat is transferred from the pair of rollers 41 and 42, it will not melt.

As in the fifth example, the first dielectric material 93a and the second dielectric material 94a are integrally attached to the first electrode sheet 21 and the second electrode sheet 22 by dipping, spraying, coating, etc. mechanically engaged.

The intermediate fusion material 95a is made of an elastomer thermoplastic material. That is, the intermediate fusion material 95a is a different material from the first dielectric material 93a and the second dielectric material 94a. However, the elastic modulus of the intermediate fusion material 95a in a solidified state is preferably about the same as that of the first dielectric material 93a and the second dielectric material 94a. The intermediate fusion material 95a is formed into particles and melts when heat is applied.

(a) a member in which the first electrode sheet 21 and the first dielectric material 93a are integrated; (c) an intermediate fusion material 95a; and (b) a member in which the second electrode sheet 22 and the second dielectric material 94a are integrated. A laminate is formed by stacking the laminate members in this order. The laminated material 7a (laminated body) is conveyed to the right side in FIG. 10 and entered between a pair of rollers 41 and 42. That is, the pair of rollers 41 and 42 press and heat the first electrode sheet 21 from the first outer surface 21c side, and press and heat the second electrode sheet 22 from the second outer surface 22c side. As a result, the heat of the pair of rollers 41 and 42 is mainly transferred to the intermediate welding material 95a, and the intermediate welding material 95a is melted. Then, the melted intermediate welding material 95a forms an intermediate welding layer 95 that directly joins the first dielectric material 93a and the second dielectric material 94a.

Further, the first dielectric material 93a forms a first protective layer 96 that covers the first outer surface 21c of the first electrode sheet 21 in advance. Further, the second dielectric material 94a forms a second protective layer 97 that covers the second outer surface 22c of the second electrode sheet 22 in advance.

The transducer 7 manufactured as described above includes the first electrode sheet 21, the second electrode sheet 22, the first dielectric layer 93, the second dielectric layer 94, the intermediate fusion layer 95, the first protective layer 96, and a second protective layer 97. In this manufacturing method as well, as in the first example, it is possible to suppress VOC emissions. Furthermore, since the electrostatic sheet forming the transducer 7 has air permeability as a whole, the electrostatic sheet forming the transducer 7 can be installed in a place that requires air permeability.

(11. Seventh example)
A seventh example of the transducer 8 and its manufacturing method will be described with reference to FIG. 11. Components that are the same as those in the first example are given the same reference numerals and detailed explanations will be omitted.

As shown on the left side of FIG. 11, the material 8a of the transducer 8 includes (a) a member in which the first electrode sheet 21 and the first dielectric material 103a are integrated, and (b) a member in which the second electrode sheet 22 and the first dielectric material 103a are integrated. A member in which the two dielectric materials 104a are integrated, (c) an intermediate dielectric material 105a is prepared. Here, the first dielectric material 103a and the second dielectric material 104a are formed of a non-thermoplastic elastomer. On the other hand, the intermediate dielectric material 105a is made of thermoplastic elastomer. The intermediate dielectric material 105a is made of a foamed thermoplastic elastomer material. That is, the intermediate dielectric material 105a has holes communicating in the stacking direction. Further, the first dielectric material 103a and the second dielectric material 104a are integrated into the first electrode sheet 21 and the second electrode sheet 22 by the same method as in the third example.

Subsequently, as shown on the left side of FIG. 11, (a) a member in which the first electrode sheet 21 and the first dielectric material 103a are integrated, (c) the intermediate dielectric material 105a, and (b) the second electrode sheet. 22 and the second dielectric material 104a are laminated in this order to form a laminate. The laminated material 8a (laminated body) is conveyed to the right side in FIG. 11 and entered between a pair of rollers 41 and 42. That is, the pair of rollers 41 and 42 press and heat the first electrode sheet 21 from the first outer surface 21c side, and press and heat the second electrode sheet 22 from the second outer surface 22c side. As a result, the heat of the pair of rollers 41 and 42 is transferred to the portion of the intermediate dielectric material 105a on the first dielectric material 103a side and the portion of the intermediate dielectric material 105a on the second dielectric material 104a side. , the area to which the heat was transferred melts.

Then, a portion of the first dielectric material 103a enters the intermediate dielectric material 105a. Then, a portion of the intermediate dielectric material 105a is fused to the first dielectric material 103a as the melted intermediate dielectric material 105a solidifies. In this way, a first intermediate welding layer 106 is formed in which a portion of the intermediate dielectric material 105a is applied as the first intermediate welding material. That is, the first intermediate fusion layer 106 is made of the same material components as the main body portion of the intermediate dielectric layer 105.

Similar to the first dielectric material 103a, a portion of the second dielectric material 104a penetrates into the intermediate dielectric material 105a. Then, a portion of the intermediate dielectric material 105a is fused to the second dielectric material 104a as the melted intermediate dielectric material 105a solidifies. In this way, a second intermediate fusion layer 107 is formed in which a portion of the intermediate dielectric material 105a is applied as the second intermediate fusion material. That is, the second intermediate fusion layer 107 is made of the same material components as the main body portion of the intermediate dielectric layer 105.

In this way, the first dielectric material 103a and the second dielectric material 104a are indirectly bonded via the intermediate dielectric layer 105, the first intermediate fusion layer 106, and the second intermediate fusion layer 107. has been done.

Further, the first dielectric material 103a constitutes the first protective layer 108 that covers the first outer surface 21c of the first electrode sheet 21 in advance. Further, the second dielectric material 104a forms a second protective layer 109 that covers the second outer surface 22c of the second electrode sheet 22 in advance.

The transducer 8 manufactured as described above includes the first electrode sheet 21, the second electrode sheet 22, the first dielectric layer 103, the second dielectric layer 104, the intermediate dielectric layer 105, and the first intermediate fusion layer. 106, a second intermediate fusion layer 107, a first protective layer 108, and a second protective layer 109. In this manufacturing method, as in the first example, it is possible to suppress VOC emissions. Furthermore, since the transducer 8 as a whole has air permeability, the transducer 5 can be installed in a place that requires air permeability.

(12. Eighth example)
An eighth example of the transducer 9 and its manufacturing method will be described with reference to FIG. 12. Components that are the same as those in the first example are given the same reference numerals and detailed explanations will be omitted.

As shown on the left side of FIG. 12, the material 9a of the transducer 9 includes (a) a member in which the first electrode sheet 21 and the first dielectric material 113a are integrated, and (b) a member in which the second electrode sheet 22 and the first dielectric material 113a are integrated. A member in which the two dielectric materials 114a are integrated, (c) an intermediate dielectric layer 115, (d) a first intermediate fusion material 116a, and (e) a second intermediate fusion material 117a are prepared.

The first dielectric material 113a, the second dielectric material 114a, and the intermediate dielectric layer 115 are made of an elastomer, which is a non-thermoplastic material. That is, even if heat is transferred from the pair of rollers 41 and 42, it will not melt.

The first dielectric material 113a and the second dielectric material 114a are integrally attached to the first electrode sheet 21 and the second electrode sheet 22 by dipping, spraying, coating, etc., as in the fifth example. mechanically engaged.

The first intermediate welding material 116a and the second intermediate welding material 117a are made of an elastomer thermoplastic material. That is, the first intermediate welding material 116a and the second intermediate welding material 117a are different materials from the first dielectric material 113a, the second dielectric material 114a, and the intermediate dielectric layer 115. However, the elastic modulus of the first intermediate fusion material 116a and the second intermediate fusion material 117a in a solidified state is approximately the same as that of the first dielectric material 113a, the second dielectric material 114a, and the intermediate dielectric layer 115. Good. The intermediate fusion material 95a is formed into particles and melts when heat is applied.

(a) A member in which the first electrode sheet 21 and the first dielectric material 113a are integrated, (d) the first intermediate fusion material 116a, (c) the intermediate dielectric layer 115, and (e) the second intermediate A laminate is formed by laminating the members in which the fusion material 117a, (b) the second electrode sheet 22, and the second dielectric material 114a are integrated in this order. However, although this example will be described as a state in which both sides of the transducer 9 are manufactured simultaneously, it is also possible to manufacture one side at a time. In this case, (a) a member in which the first electrode sheet 21 and the first dielectric material 113a are integrated, (d) the first intermediate fusion material 116a, and (c) the intermediate dielectric layer 115 are laminated in this order. After that, (f) a single-sided manufactured body, (e) a second intermediate fusion material 117a, and (b) a member in which the second electrode sheet 22 and the second dielectric material 114a are integrated. They will be laminated and the other side will be manufactured.

Returning to FIG. 12, the explanation will be continued. The laminated material 9a (laminated body) is conveyed to the right side in FIG. 12 and entered between a pair of rollers 41 and 42. That is, the first roller 41 applies pressure and heat to the first electrode sheet 21 from the first outer surface 21c side. As a result, the heat of the first roller 41 is transferred to the first intermediate welding material 116a, and the first intermediate welding material 116a is melted. Then, the melted first intermediate welding material 116a forms a first intermediate welding layer 116 that joins the first dielectric material 113a and the intermediate dielectric layer 115.

Similar to the first roller 41, the second roller 42 applies pressure and heat to the second electrode sheet 22 from the second outer surface 22c side. As a result, the heat of the second roller 42 is transferred to the second intermediate welding material 117a, and the second intermediate welding material 117a is melted. Then, the melted second intermediate welding material 117a forms a second intermediate welding layer 117 that joins the second dielectric material 114a and the intermediate dielectric layer 115.

Further, the first dielectric material 113a forms a first protective layer 118 that covers the first outer surface 21c of the first electrode sheet 21 in advance. Further, the second dielectric material 114a forms a second protective layer 119 that covers the second outer surface 22c of the second electrode sheet 22 in advance.

The transducer 9 manufactured as described above includes the first electrode sheet 21, the second electrode sheet 22, the first dielectric layer 113, the second dielectric layer 114, the intermediate dielectric layer 115, and the first intermediate fusion layer. 116, a second intermediate fusion layer 117, a first protective layer 118, and a second protective layer 119. In this manufacturing method as well, as in the first example, it is possible to suppress VOC emissions. Furthermore, since the transducer 9 as a whole has air permeability, the transducer 9 can be installed in a location that requires air permeability.

(13. Ninth example)
The electrostatic sheet constituting the transducer 10 of the ninth example and its manufacturing method will be described with reference to FIGS. 13 and 14. Components that are the same as those in the first example are given the same reference numerals and detailed explanations will be omitted. Here, the transducer 10 of the ninth example will be described as a modification of the transducer 2 of the first example. However, the unique configuration of the transducer 10 of the ninth example, that is, the first electrode sheet 121 and the second electrode sheet 122, can also be replaced with the first electrode sheet 21 and the second electrode sheet 22 in other examples.

As shown in FIG. 13, the transducer 10 includes an electrostatic sheet composed of a first electrode sheet 121, a second electrode sheet 122, a dielectric layer 23, a first protective layer 24, and a second protective layer 25. . As shown in FIG. 14, similarly to the first example, (a) the first electrode sheet 121, (b) the dielectric material 23a, and (c) the second electrode sheet 122 are laminated in this order to form a laminate. do. Subsequently, by applying pressure and heating using a pair of rollers 41 and 42 (shown in FIG. 4), the first electrode sheet 121 and the second electrode sheet 122 are bonded to the dielectric material 23a, as shown in FIG. It is buried. In this way, the electrostatic sheet that constitutes the transducer 10 is manufactured.

Here, the first electrode sheet 121 is substantially the same conductive cloth as the first electrode sheet 21 in the first example. However, as shown in FIGS. 13 and 14, the first electrode sheet 121 is different from the first electrode sheet 21 in the first example in that it includes a plurality of first slits 121d.

The first electrode sheet 121 includes a plurality of first slits 121d arranged in the main direction. Here, the main direction means a predetermined direction of the first electrode sheet 121. In FIG. 13, an example is given in which the main direction is the longitudinal direction of the first electrode sheet 121. That is, the main direction is the direction A shown in FIG. Further, the sub-direction is a direction having an angle with respect to the main direction, for example, a direction orthogonal to the main direction. For example, in FIG. 13, the sub-direction is the lateral direction of the first electrode sheet 121, that is, the B direction shown in FIG.

The first slit 121d may be formed to have a region when the first electrode sheet 121 is in a non-stretched state, as shown in FIGS. 13 and 14. The shape of the region can be various shapes such as a circle, an ellipse, a square, a rectangle, a parallelogram, a trapezoid, a triangle, other polygons, and a shape surrounded by arbitrary lines. Further, the first slit 121d may be formed in a linear shape when the first electrode sheet 121 is in a non-stretched state.

In FIGS. 13 and 14, the first slit 121d is formed in an elliptical shape extending in the secondary direction. That is, the first slit 121d is formed longer than the opening length of the first through hole 21a in the sub direction. Furthermore, the first slit 121d is formed in the center of the first electrode sheet 121 in the sub direction. That is, the first slits 121d are not formed at both ends of the first electrode sheet 121 in the secondary direction, and are spaced from both ends in the secondary direction. The first slit 121d allows at least the first electrode sheet 121 to expand in the main direction due to the expansion deformation of the first slit 121d in the main direction.

Here, the first slit 121d is formed longer than the opening length of the first through hole 21a also in the main direction. Therefore, the first slit 121d also allows the first electrode sheet 121 to expand in the secondary direction due to expansion deformation of the first slit 121d in the secondary direction.

The second electrode sheet 122 is similar to the first electrode sheet 121. That is, as shown in FIG. 14, the second electrode sheet 122 is different from the second electrode sheet 22 in the first example in that it includes a plurality of second slits 122d. The second slit 122d is similar to the first slit 121d.

The dielectric layer 23 made of elastomer is filled in a portion corresponding to the first slit 121d and a portion corresponding to the second slit 122d. The portion corresponding to the first slit 121d includes the inside of the first slit 121d and a region normal to the first slit 121d.

Therefore, when the electrostatic sheet constituting the transducer 10 is stretched in the main direction, the first slit 121d is expanded and deformed, and the portion of the dielectric layer 23 corresponding to the first slit 121d is stretched. Further, the second slit 122d is expanded and deformed, and the portion of the dielectric layer 23 corresponding to the second slit 122d is expanded. In this way, the electrostatic sheet constituting the transducer 10 can be greatly expanded in the main direction. Furthermore, the electrostatic sheet can also be stretched in the secondary direction. However, the amount of expansion in the secondary direction is smaller than the amount of expansion in the main direction.

The electrostatic sheet constituting the transducer 10 in this example is useful when covering the surface of a three-dimensional object. That is, by placing the electrostatic sheet on the surface of the object while stretching it, the electrostatic sheet is placed along the surface of the object. That is, since the electrostatic sheet can be arranged neatly and easily, the design of the object can be improved in a state covered with the electrostatic sheet. The transducer 10 can be applied to, for example, the surface of a mouse that is a pointing device, the surface of a steering wheel of a vehicle, a doorknob of a vehicle, a shift lever of a vehicle, and the like.

(14. First variant of the ninth example)
The electrostatic sheet constituting the transducer 11 of the first modification of the ninth example will be described with reference to FIG. 15. In the electrostatic sheet constituting the transducer 10 of the ninth example, the first electrode sheet 121 is provided with the first slit 121d, and the second electrode sheet 122 is provided with the second slit 122d. In addition, as shown in FIG. 15, in the electrostatic sheet constituting the transducer 11, the first electrode sheet 121 is provided with a first slit 121d, and the second electrode sheet 22 is not provided with a second slit. Good too.

In this case, in the electrostatic sheet, a difference can be made between the rigidity on the first surface side and the rigidity on the second surface side. For example, when placing the electrostatic sheet on the surface of a three-dimensional object, assume that the surface of the object has a convex shape. In this case, the first electrode sheet 121 having the first slit 121d is located on the surface side of the object, and the second electrode sheet 22 not having the second slit is located on the inside side of the object. By doing so, the electrostatic sheet can be arranged neatly and easily.

(15. Second variant of the ninth example)
The electrostatic sheet constituting the transducer 12 of the second modification of the ninth example will be described with reference to FIG. 16. In the electrostatic sheet constituting the transducer 10 of the ninth example, the first slit 121d and the second slit 122d are formed at the center in the sub direction. On the other hand, in the electrostatic sheet constituting the transducer 12, as shown in FIG. 16, the first slit 221d of the first electrode sheet 221 and the second slit 222d of the second electrode sheet 222 It is not formed in the central part in the secondary direction. In this case as well, the same effects as the transducer 10 of the ninth example are achieved.

(16. Third variant of the ninth example)
The electrostatic sheet constituting the transducer 13 of the third modification of the ninth example will be described with reference to FIG. 17. In the electrostatic sheet constituting the transducer 13, the dielectric layer 323 has cutouts 323a and 323b formed at both ends in the sub direction.

In the first electrode sheet 321, the first slit 321d is formed in a linear shape. In the second electrode sheet 322, the second slit 322d is also formed linearly. At a position away from the cutouts 323a, 323b, the first slit 321d and the second slit 322d are formed in a linear shape extending in the sub direction. On the other hand, at positions close to the notches 323a and 323b, the first slit 321d and the second slit 322d are formed so as to extend in a direction having an angle to the main direction and the sub-direction (in a direction oblique to the main direction). There is.

The first slit 321d and the second slit 322d extending in the sub direction function in substantially the same manner as the first slit 121d and the second slit 122d in the ninth example. On the other hand, the first slit 321d and the second slit 322d extending in the inclined direction act to suppress stress concentration in the cutouts 323a and 323b. Therefore, it is preferable to set the positions and extending directions of the first slit 321d and the second slit 322d depending on the shape of the dielectric layer 323.

(17. Fourth variant of the ninth example)
The electrostatic sheet constituting the transducer 14 of the fourth modification of the ninth example will be described with reference to FIG. 18. In the electrostatic sheet constituting the transducer 14, the first electrode sheet 421 includes a plurality of types of first slits 421d1, 421d2, and 421d3. The first slit 421d1 is formed to connect two positions (both end positions) on the outer edge of the first electrode sheet 421 in the sub direction. The first slit 421d2 is formed to connect two positions (both end positions) on the outer edge of the first electrode sheet 421 in the main direction. That is, the two types of first slits 421d1 and 421d2 divide the detection area by the first electrode sheet 421 into a plurality (four). Here, the two types of first slits 421d1 and 421d2 are illustrated as being linear, but any arbitrary line such as a curved line or a bent line may be adopted.

Furthermore, the first slit 421d3 is formed in an elliptical shape extending in the sub direction in each divided region. However, the first slit 421d3 can have any shape as described in the ninth example. The second electrode sheet 422 is formed similarly to the first electrode sheet 421.

This example is effective when dividing the detection area into a plurality of parts. Even if the detection area is divided in this way, there is only one electrostatic sheet that constitutes the transducer 14, and therefore various effects can be achieved by integrating the transducer into one component.

(18. 10th example)
A tenth example of the transducer 15 will be described with reference to FIG. 19. Components that are the same as those in the first example are given the same reference numerals and detailed explanations will be omitted. Here, the tenth example transducer 15 will be described as a modification of the first example transducer 2. However, the unique configuration of the transducer 15 of the tenth example, that is, the configuration in which the first lead wire 526 and the second lead wire 527 are added, can also be applied to other examples.

As shown in FIG. 19, the transducer 15 includes a first electrode sheet 21, a second electrode sheet 22, a dielectric layer 23, a first protective layer 24, a second protective layer 25, a first lead wire 526, and a second electrode sheet 22. An electrostatic sheet made up of lead wires 527 is provided.

The first lead wire 526 includes a main body portion 526a that covers the conductive wire with an insulating material, and a conductive portion 526b that exposes the conductive wire. The distal end side of the main body portion 526a of the first lead wire 526 is arranged on the first inner surface 21b side of the first electrode sheet 21. The conductive portion 526b of the first lead wire 526 is also arranged on the first inner surface 21b side of the first electrode sheet 21. That is, both the distal end side of the main body portion 526a of the first lead wire 526 and the conductive portion 526b are sandwiched between the first electrode sheet 21 and the main body portion of the dielectric layer 23. A main body portion 526a of the first lead wire 526 extends outward from between the first electrode sheet 21 and the main body portion of the dielectric layer 23. The conductive portion 526b of the first lead wire 526 is electrically connected to the first electrode sheet 21.

The second lead wire 527 includes a main body portion 527a that covers the conductive wire with an insulating material, and a conductive portion 527b that exposes the conductive wire. The distal end side of the main body portion 527a of the second lead wire 527 is arranged on the second inner surface 22b side of the second electrode sheet 22. The conductive portion 527b of the second lead wire 527 is also arranged on the second inner surface 22b side of the second electrode sheet 22. That is, both the distal end side of the main body portion 527a of the second lead wire 527 and the conductive portion 527b are sandwiched between the second electrode sheet 22 and the main body portion of the dielectric layer 23. A main body portion 527a of the second lead wire 527 extends outward from between the second electrode sheet 22 and the main body portion of the dielectric layer 23. The conductive portion 527b of the second lead wire 527 is electrically connected to the second electrode sheet 22.

A method of manufacturing the electrostatic sheet constituting the transducer 15 will be described with reference to FIGS. 20 and 21. As shown in FIG. 20, (a) first electrode sheet 21, (b) first lead wire 526, (c) dielectric material 23a, (d) second lead wire 527, (e) second electrode sheet 22. A laminate is formed by laminating in this order. Subsequently, by applying pressure and heating using a pair of rollers 41 and 42 (shown in FIG. 4), the first electrode sheet 21 and first lead wire 526 are bonded to the dielectric material 23a, as shown in FIG. It is buried on the first side. Further, the second electrode sheet 22 and the second lead wire 527 are buried on the second surface side of the dielectric material 23a. In this way, the electrostatic sheet constituting the transducer 15 is manufactured.

As shown in FIG. 21, even in the region where the first lead wire 526 and the second lead wire 527 are present, it is possible to suppress the thickness of the electrostatic sheet forming the transducer 15 from becoming extremely thick compared to other regions. . Therefore, the design of the electrostatic sheet can be improved. Furthermore, a conductive bonding material such as solder or conductive resin for electrically connecting the first electrode sheet 21 and the first lead wire 526 is not required. As a result, cost reduction can be achieved.

(19. First variant of the tenth example)
The electrostatic sheet constituting the transducer 16 of the first modification of the tenth example will be described with reference to FIG. 22. In the transducer 16, the conductive portion 526b of the first lead wire 526 is entangled with the first electrode sheet 21 via the first through hole 21a. In this way, the electrical connection between the two can be ensured. During manufacturing, the conductive portion 526b and the first electrode sheet 21 are brought into a state of being entwined in advance, and then fused to the main body portion of the dielectric layer 23 by pressure and heating by a pair of rollers 41 and 42.

Further, the conductive portion 527b of the second lead wire 527 is also entangled with the second electrode sheet 22 via the second through hole 22a. In this way, the electrical connection between the two can be ensured. Further, during manufacturing, the conductive portion 527b and the second electrode sheet 22 are made to be entwined in advance, and then fused to the main body portion of the dielectric layer 23 by pressure and heating by a pair of rollers 41 and 42. .

(20. Second variant of the tenth example)
The electrostatic sheet constituting the transducer 17 of the second modification of the tenth example will be described with reference to FIG. 23. The transducer 17 further includes a first fixing layer 728 that fixes the conductive portion 526b of the first lead wire 526 and the first electrode sheet 21 in an electrically connected state. The first fixing layer 728 is made of a conductive bonding material such as solder or conductive resin. Before the pressing and heating by the pair of rollers 41 and 42, the conductive portion 526b of the first lead wire 526 and the first electrode sheet 21 may be fixed in advance by the first fixing layer 728. Further, after the pressure and heating by the pair of rollers 41 and 42, the conductive portion 526b of the first lead wire 526 and the first electrode sheet 21 may be fixed by the first fixing layer 728. This ensures electrical connection between the first electrode sheet 21 and the conductive portion 526b of the first lead wire 526.

The transducer 17 further includes a second fixing layer 729 that fixes the conductive portion 527b of the second lead wire 527 and the second electrode sheet 22 in an electrically connected state. The second fixed layer 729 is similar to the first fixed layer 728.

1-17: Transducer, 21, 121, 221, 321, 421: First electrode sheet, 21a: First through hole, 21b: First inner surface, 21c: First outer surface, 22, 122, 222, 322, 422: Second electrode sheet, 22a: second through hole, 22b: second inner surface, 22c: second outer surface, 23, 53, 63, 73, 323: dielectric layer, 23a, 63a, 73a: dielectric material, 24, 86,96,108,118: First protective layer, 25,65,75,87,97,109,119: Second protective layer, 26,56,66,76: First fusion layer, 27,57: Second fusion layer, 56a, 76a: first fusion material, 57a: second fusion material, 83, 93, 103, 113: first dielectric layer, 83a, 93a, 103a, 113a: first dielectric Material, 84, 94, 104, 114: Second dielectric layer, 84a, 94a, 104a, 114a: Second dielectric material, 85, 95: Intermediate fusion layer, 95a: Intermediate fusion material, 105, 115: Intermediate dielectric layer, 105a: intermediate dielectric material, 106, 116: first intermediate fusion layer, 107, 117: second intermediate fusion layer, 116a: first intermediate fusion material, 117a: second intermediate fusion layer Material, 121d, 221d, 321d, 421d1, 421d2, 421d3: First slit, 122d, 222d, 322d: Second slit, 526: First lead wire, 527: Second lead wire, 728: First fixed layer, 729 :Second fixed layer

Claims (19)

a sheet-shaped first electrode sheet having a first inner surface and a first outer surface, and a plurality of first through holes penetrating from the first inner surface to the first outer surface;
a sheet-like dielectric layer formed of a dielectric material made of a thermoplastic material, and whose first surface is arranged to face the first inner surface of the first electrode sheet;
It is made up of a part of the dielectric material constituting the dielectric layer as a fusion material, and it is made of the same material component as the main body part of the dielectric layer, and the main body part of the dielectric layer and the first electrode sheet and a first fusion layer, which is bonded by fusion of a portion of the dielectric material as the fusion material;
Equipped with
The first fusion layer includes:
By fusing a portion of the dielectric material as the fusing material to the entire surface of the first inner surface of the first electrode sheet, the body portion of the dielectric layer and the first inner surface of the first electrode sheet are bonded to each other. joining the main body portion of the dielectric layer and the first inner surface of the first electrode sheet over the entire range where the inner surface faces each other;
The other part of the dielectric material as the fusion material is located in the plurality of first through holes and fused to the first inner circumferential surface of the first through holes , thereby forming the main body of the dielectric layer. A transducer, wherein the portion and the first inner circumferential surface of the plurality of first through-holes are joined together, and the plurality of first through-holes of the first electrode sheet are closed. a first electrode sheet including a first inner surface and a first outer surface, and a plurality of first through holes penetrating from the first inner surface to the first outer surface;
a dielectric layer formed of a dielectric material made of a thermoplastic material, the first surface of which is arranged to face the first inner surface of the first electrode sheet;
It is made up of a part of the dielectric material constituting the dielectric layer as a fusion material, and it is made of the same material component as the main body part of the dielectric layer, and the main body part of the dielectric layer and the first electrode sheet and a first fusion layer, which is bonded by fusion of a portion of the dielectric material as the fusion material;
Equipped with
The first fusion layer includes:
By fusing a portion of the dielectric material as the fusing material to the first inner surface of the first electrode sheet, the main body portion of the dielectric layer and the first inner surface of the first electrode sheet are bonded together. join,
The other part of the dielectric material as the fusion material is fused to the first inner circumferential surface of the plurality of first through holes, so that the main body part of the dielectric layer and the plurality of first through holes are fused. joining the first inner circumferential surface of the hole and closing the plurality of first through holes of the first electrode sheet;
Another portion of the dielectric material as the fusion material is fused to a portion of the first outer surface of the first electrode sheet, thereby covering at least a portion of the first outer surface . The first electrode sheet is stretchable in the plane direction,
The dielectric layer is formed of an elastomer,
3. The transducer according to claim 1, wherein the electrostatic sheet made up of the first electrode sheet and the dielectric layer is expandable and contractible in a plane direction. The first electrode sheet further includes a slit that is formed longer than the opening length of the first through hole and that allows the first electrode sheet to expand in the main direction by spreading deformation,
4. A portion of the dielectric material constituting the dielectric layer is filled in a portion of the slit, and expands in the main direction as the slit expands and deforms in the main direction. transducer. The transducer according to claim 4, wherein the first electrode sheet includes a plurality of the slits in the main direction. The transducer according to claim 4 or 5, wherein the slit extends in a direction at an angle to the main direction. 7. The transducer according to claim 4, wherein the slit is formed at the center in a sub-direction perpendicular to the main direction, and is not formed at either end in the sub-direction. 7. The transducer according to claim 4, wherein the slit is formed at both ends in a sub-direction perpendicular to the main direction, and is not formed at the center in the sub-direction. The slit is formed to connect two positions on the outer edge of the first electrode sheet, and divides the detection area by the first electrode sheet into a plurality of parts, according to any one of claims 4 to 6. transducer. The transducer according to any one of claims 4 to 9, wherein the slit is formed to have a region when the first electrode sheet is in a non-stretched state. The transducer according to any one of claims 4 to 9, wherein the slit is formed in a linear shape when the first electrode sheet is in a non-stretched state. The slit is formed longer than the opening length of the first through-hole in the main direction, and the first electrode sheet is expanded in the sub-direction by expanding and deforming in the sub-direction perpendicular to the main direction. allow,
The transducer according to any one of claims 4 to 11, wherein the dielectric layer is disposed in a portion of the slit and expands in the secondary direction as the slit expands and deforms in the secondary direction. . The transducer further includes:
sandwiched between the first inner surface of the first electrode sheet and the main body portion of the dielectric layer, and the first inner surface of the first electrode sheet and the main body portion of the dielectric layer 13. A transducer according to any preceding claim, comprising a first lead extending externally between the transducers. The transducer according to claim 13, wherein the conductive portion of the first lead wire is wound around the first electrode sheet via the first through hole. The transducer further includes:
The transducer according to claim 13 or 14, further comprising a first fixing layer made of a conductive bonding material, which fixes the conductive portion of the first lead wire and the first electrode sheet in an electrically connected state. The transducer further includes:
a second inner surface and a second outer surface, a plurality of second through holes penetrating from the second inner surface to the second outer surface, the second inner surface being opposite to the first surface of the dielectric layer; a sheet -shaped second electrode sheet disposed opposite to the second surface of the side;
It is made up of a part of the dielectric material constituting the dielectric layer as a fusion material, and it is made of the same material component as the main body part of the dielectric layer, and the main body part of the dielectric layer and the second electrode a second fusion layer that joins the sheet by fusion of a portion of the dielectric material as the fusion material;
Equipped with
The second fusion layer includes:
By fusing a portion of the dielectric material as the fusing material to the entire surface of the second inner surface of the second electrode sheet, the main body portion of the dielectric layer and the second inner surface of the second electrode sheet are bonded to each other. joining the main body portion of the dielectric layer and the second inner surface of the second electrode sheet over the entire range where the inner surface faces each other;
The other part of the dielectric material as the fusion material is located in the plurality of second through holes and fused to the second inner peripheral surface of the second through holes , thereby forming the main body of the dielectric layer. The transducer according to claim 1 , wherein the portion and the second inner circumferential surface of the plurality of second through holes are joined, and the plurality of second through holes of the second electrode sheet are closed. a first electrode sheet including a first inner surface and a first outer surface, and a plurality of first through holes penetrating from the first inner surface to the first outer surface;
a dielectric layer formed of a dielectric material made of a thermoplastic material, the first surface of which is arranged to face the first inner surface of the first electrode sheet;
It is made up of a part of the dielectric material constituting the dielectric layer as a fusion material, and it is made of the same material component as the main body part of the dielectric layer, and the main body part of the dielectric layer and the first electrode sheet and a first fusion layer, which is bonded by fusion of a portion of the dielectric material as the fusion material;
a second inner surface and a second outer surface, a plurality of second through holes penetrating from the second inner surface to the second outer surface, the second inner surface being opposite to the first surface of the dielectric layer; a second electrode sheet disposed opposite to the second surface of the side;
It is made up of a part of the dielectric material constituting the dielectric layer as a fusion material, and it is made of the same material component as the main body part of the dielectric layer, and the main body part of the dielectric layer and the second electrode a second fusion layer that joins the sheet by fusion of a portion of the dielectric material as the fusion material;
Equipped with
The first fusion layer includes:
By fusing a portion of the dielectric material as the fusing material to the first inner surface of the first electrode sheet, the main body portion of the dielectric layer and the first inner surface of the first electrode sheet are bonded together. join,
The other part of the dielectric material as the fusion material is fused to the first inner circumferential surface of the plurality of first through holes, so that the main body part of the dielectric layer and the plurality of first through holes are fused. joining the first inner circumferential surface of the hole and closing the plurality of first through holes of the first electrode sheet;
The second fusion layer includes:
By fusing a portion of the dielectric material as the fusing material to the second inner surface of the second electrode sheet, the main body portion of the dielectric layer and the second inner surface of the second electrode sheet are bonded together. join,
The other part of the dielectric material as the fusion material is fused to the second inner circumferential surface of the plurality of second through holes, so that the main body part of the dielectric layer and the plurality of second through holes are fused. joining the second inner circumferential surface of the hole and closing the plurality of second through holes of the second electrode sheet;
Another portion of the dielectric material as the fusion material is fused to a portion of the second outer surface of the second electrode sheet, thereby covering at least a portion of the second outer surface . A method for manufacturing a transducer according to claim 1 or 2, comprising:
forming a laminate by laminating the first electrode sheet and the dielectric material;
By pressurizing and heating the laminate from the first outer surface side of the first electrode sheet, the surface of the dielectric material on the first electrode sheet side is melted, and the surface of the dielectric layer is melted. A method of manufacturing a transducer, comprising forming the first fusion layer that joins the main body portion and the first electrode sheet, and embedding the first electrode sheet on the first surface side of the dielectric material . A method for manufacturing a transducer according to claim 16 or 17,
forming a laminate by laminating the first electrode sheet, the dielectric material, and the second electrode sheet;
By pressurizing and heating the laminate from the first outer surface side of the first electrode sheet, the surface of the dielectric material on the first electrode sheet side is melted, and the surface of the dielectric layer is melted. forming the first fusion layer that joins the main body portion and the first electrode sheet, embedding the first electrode sheet on the first surface side of the dielectric material;
By heating the laminate from the second outer surface side of the second electrode sheet, the surface of the dielectric material on the second electrode sheet side is melted and the main body portion of the dielectric layer is melted. A method of manufacturing a transducer, comprising: forming the second fusion layer that joins the second electrode sheet; and embedding the second electrode sheet on the second surface side of the dielectric material .

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