JP7430472B2 - Carburizing treatment equipment - Google Patents

Description

The present invention relates to a carburizing apparatus for carburizing treated materials such as steel parts in a carburizing chamber. In particular, a carburizing chamber for carburizing the treated material, a carrier gas supply pipe for supplying a carrier gas containing CO gas and hydrogen gas, and an enrichment gas mainly composed of hydrocarbon gas are supplied into the carburizing chamber. In a carburizing apparatus equipped with an enriched gas supply pipe, when circulating the atmospheric gas in the carburizing chamber through the circulation path, the exhaust of hydrogen gas contained in the atmospheric gas is appropriately controlled to improve the atmosphere in the carburizing chamber. This method is characterized in that the CO gas concentration and hydrogen gas concentration contained in the gas can be stably maintained at an appropriate carburizing concentration suitable for carburizing treatment.

BACKGROUND ART Conventionally, in order to improve the strength of treated materials such as steel parts, carburizing treatment has been performed in which carbon is carburized and diffused from the surface of these treated materials into the interior.

Conventionally, in order to carburize and diffuse carbon into the inside of the treated material, the treated material is introduced into a carburizing chamber, and a carrier gas containing CO gas and hydrogen gas, methane gas, etc. Enrich gas mainly composed of hydrocarbon gas C _n H _2n+2, such as propane gas or butane gas, is supplied to heat the treated material led into the carburizing chamber, so that carbon is formed on the surface of the treated material. The carbon thus applied to the surface of the treated material is diffused into the interior of the treated material and carburized.

Here, when carburizing the treated material by adding carbon to it in the carburizing chamber to which the carrier gas and enrich gas are supplied, generally, 2CO→CO ₂ + (C), C _n H _2n+2 +nCO ₂ → 2nCO+ As a result of the reaction of (n+1) _H2 and the carbon component being applied to the surface of the treated material, hydrogen gas remains in the carburizing chamber, and the generated hydrogen gas causes CO in the carburizing chamber. Concentration decreases relatively. This makes it difficult to properly control the carbon potential (carbon equivalent) of the carburizing atmosphere, resulting in the problem that the treated material cannot have the targeted surface carbon concentration or carburized depth.

For this reason, an excessive amount of carrier gas is supplied into the carburizing chamber, and in that case, the hydrogen gas generated in the carburizing chamber is combined with the carrier gas using a structure as disclosed in Patent Document 1. The gas is then guided into the adjacent room through a gap in the door, etc., and the gas thus led into the adjacent room is led to an exhaust path provided in the adjacent room and combusted outside.

However, in that case, an excessive amount of carrier gas containing CO gas and hydrogen gas is supplied into the carburizing chamber, so much of the carrier gas is not used for carburizing, but is led through the exhaust path and burned outside. However, there were problems in that running costs were high and a large amount of _CO2 was generated, which harmed the environment.

Further, in Patent Document 2, a circulation path is provided to take out and circulate the atmospheric gas in the carburizing chamber, and a cooling device is provided to cool the atmospheric gas guided to this circulation path. Hydrogen gas contained in the cooled atmospheric gas is separated from the atmospheric gas through a hydrogen permeation filter provided in a hydrogen gas separation device and exhausted through a hydrogen gas guide pipe, and the atmospheric gas after exhausting the hydrogen gas is It is shown that it is returned to the carburizing chamber through the circulation path and reused.

However, as shown in Patent Document 2, the hydrogen gas contained in the atmospheric gas led from the carburizing chamber to the circulation path is always separated from the atmospheric gas through a hydrogen permeation filter provided in a hydrogen gas separation device. If the atmospheric gas is removed through the exhaust passage and returned to the carburizing chamber after hydrogen has been extracted, the hydrogen permeable filter installed in the atmospheric hydrogen gas separation device is constantly used, which requires the use of an expensive hydrogen permeable filter. There is a problem that deterioration is rapid, and cleaning and replacement are costly and labor-intensive.Also, simply returning the atmosphere gas from which hydrogen has been separated and removed as described above into the carburizing treatment chamber does not allow the return of the atmosphere. The gas changes the CO gas concentration in the atmospheric gas in the carburizing chamber, making it difficult to stably maintain the CO gas concentration in the atmospheric gas in the carburizing chamber at an appropriate concentration suitable for carburizing. There was a problem.

Furthermore, Patent Document 3 discloses a carburizing chamber for carburizing a material to be treated, a carrier gas supply means for supplying a carrier gas containing CO gas and hydrogen gas into the carburizing chamber, and In the carburizing treatment apparatus, the carrier gas supply means includes a hydrogen gas separation and removal device that separates hydrogen gas in the carrier gas and removes it through a hydrogen gas guide pipe. and the amount of hydrogen gas to be separated and removed from the carrier gas by the hydrogen gas separation and removal device according to the concentration of at least one gas selected from CO gas and hydrogen gas in the atmospheric gas in the carburizing chamber. It is shown that it is controlled by a control device.

However, as shown in Patent Document 3, a carrier gas supply means for supplying a carrier gas containing CO gas and hydrogen gas into a carburizing treatment chamber separates hydrogen gas in the carrier gas and removes it through a hydrogen gas guide pipe. A hydrogen gas separation and removal device is provided, and the hydrogen gas is separated from the carrier gas by the hydrogen gas separation and removal device, depending on the concentration of at least one gas selected from CO gas and hydrogen gas in the atmospheric gas in the carburizing chamber. By controlling the amount of hydrogen gas to be removed and controlling the ratio of CO gas and hydrogen gas in the carrier gas supplied into the carburizing chamber by the carrier gas supply means, the CO gas concentration in the atmospheric gas inside the carburizing chamber is controlled. It was not possible to stably maintain the proper carburizing concentration suitable for this.

Japanese Patent Application Publication No. 2001-214255 Japanese Patent Application Publication No. 2009-179816 Patent No. 5615212

The present invention provides a carburizing treatment apparatus for carburizing treated materials such as steel parts by supplying a carrier gas containing CO gas and hydrogen gas and an enrichment gas mainly composed of hydrocarbon gas into a carburizing treatment chamber. The objective is to solve various problems such as those mentioned above.

That is, the present invention provides a carburizing chamber in which a material to be treated is carburized, a gas supplying a carrier gas containing CO gas and hydrogen gas, and an enrich gas containing hydrocarbon gas as a main component into the carburizing chamber. In a carburizing treatment apparatus equipped with a supply device, when the atmospheric gas in the carburizing chamber is circulated through the circulation path, the removal of hydrogen gas contained in the atmospheric gas is appropriately controlled, and the removal of hydrogen gas contained in the atmospheric gas in the carburizing chamber is controlled appropriately. The object of the present invention is to stably maintain the CO gas concentration and hydrogen gas concentration at the appropriate carburizing concentration suitable for carburizing treatment.

In order to solve the above problems, the first carburizing apparatus of the present invention includes a carburizing chamber in which the material to be treated is carburized, and a carrier gas containing CO gas and hydrogen gas in the carburizing chamber. In a carburizing treatment apparatus equipped with a carrier gas supply pipe and an enrich gas supply pipe supplying an enrichment gas containing hydrocarbon gas as a main component, the atmospheric gas in the carburizing chamber is taken out from the carburizing chamber and circulated. A hydrogen gas separation device is provided in the first circulation path to separate and extract hydrogen gas contained in the atmospheric gas, while a second circulation path extracts and circulates the atmospheric gas in the carburizing chamber. a CO gas concentration measuring device for detecting the CO gas concentration and/or a hydrogen gas concentration measuring device for detecting the hydrogen gas concentration contained in the atmospheric gas in the carburizing chamber; Based on the CO gas concentration and/or hydrogen gas concentration detected by the carburizing chamber and/or the hydrogen gas concentration measuring device, the control device directs the atmospheric gas in the carburizing chamber to either the first circulation path or the second circulation path. Now you can control what is led to.

In the first carburizing treatment apparatus, if the CO gas concentration contained in the atmospheric gas in the carburizing chamber detected by the CO gas concentration measuring device is a carburizing appropriate concentration suitable for carburizing treatment, The control device guides the atmospheric gas in the carburizing chamber to the second circulation path to circulate the atmospheric gas in the carburizing chamber, while the atmospheric gas in the carburizing chamber detected by the CO gas concentration measuring device When the concentration of CO gas contained in the carburizing chamber becomes lower than the appropriate concentration for carburizing, the control device guides the atmospheric gas in the carburizing chamber to the first circulation path to remove the CO gas contained in the atmospheric gas. Hydrogen gas was separated and taken out by the hydrogen gas separator, and the remaining atmospheric gas was returned to the carburizing chamber.

Further, in the first carburizing treatment apparatus, if the hydrogen gas concentration contained in the atmospheric gas in the carburizing chamber detected by the hydrogen gas concentration measuring device is a carburizing appropriate concentration suitable for carburizing treatment, The control device guides the atmospheric gas in the carburizing chamber to the second circulation path to circulate the atmospheric gas in the carburizing chamber, while the atmospheric gas in the carburizing chamber detected by the hydrogen gas concentration measuring device If the concentration of hydrogen gas contained in the carburizing chamber exceeds the appropriate concentration for carburizing, the control device guides the atmospheric gas in the carburizing chamber to the first circulation path to remove the hydrogen contained in the atmospheric gas. The gas was separated and taken out by the hydrogen gas separator, and the remaining atmospheric gas was returned to the carburizing chamber.

The appropriate carburizing concentration based on the CO gas concentration and hydrogen gas concentration contained in the above-mentioned atmospheric gas depends on the material of the material to be carburized, the extent to which the material is carburized, and the gas supplied to the carburizing chamber by the gas supply device. It varies depending on the type of hydrocarbon gas used as carrier gas and enrich gas.

For example, when performing general carburizing treatment on treated steel materials, city gas (13A) whose main component is methane is used as the hydrocarbon gas used to generate enriched gas and carrier gas. The concentration of CO gas contained in the atmospheric gas is controlled to be approximately 21%, and when propane gas or butane gas is used as the hydrocarbon gas, the concentration of CO gas contained in the atmospheric gas is controlled to be approximately 23%. It is controlled to be about .5%.

Here, in the first carburizing treatment apparatus, if the concentration of CO gas contained in the atmospheric gas in the carburizing chamber becomes less than the appropriate concentration for carburizing, or if the concentration of CO gas contained in the atmospheric gas in the carburizing chamber becomes When the hydrogen gas concentration exceeds the appropriate carburizing concentration suitable for carburizing, the control device guides the atmospheric gas in the carburizing chamber to the first circulation path, and converts the hydrogen gas contained in the atmospheric gas into the hydrogen gas. When separated and removed by a separator, the proportion of CO gas contained in the remaining atmospheric gas increases, and when the remaining atmospheric gas with a high proportion of CO gas is returned to the carburizing chamber, the carburizing process is completed. The concentration of CO gas contained in the indoor atmospheric gas increases.

In addition, when the concentration of CO gas contained in the atmospheric gas in the carburizing chamber increases in this way, and the concentration of CO gas and hydrogen gas contained in the atmospheric gas in the carburizing chamber reach the appropriate concentration for carburizing, control is performed as described above. The apparatus guides the atmospheric gas within the carburizing chamber to the second circulation path, thereby circulating the atmospheric gas within the carburizing chamber.

Then, as in the first carburizing treatment apparatus, the atmospheric gas in the carburizing chamber is circulated by appropriately selecting the first circulation path and the second circulation path by the control device, and hydrogen contained in the atmospheric gas is circulated. Removing gas only when necessary slows down the deterioration of the expensive hydrogen permeation filter compared to conventional hydrogen permeation filters that are installed in hydrogen gas separation equipment, making it easier to clean and replace them. The cost and effort required for this can be reduced.

In addition, since the CO gas concentration and hydrogen gas concentration are measured and controlled, it becomes possible to stably maintain the CO gas concentration and hydrogen gas concentration in the atmospheric gas in the carburizing process chamber at the appropriate carburizing concentration suitable for carburizing process. .

In addition, since the hydrogen component is removed from the atmospheric gas and the carbon component is reused, the amount of expensive carrier gas and enrichment gas to be supplied and the amount that is burned and discharged from the exhaust path without contributing to carburization can be reduced. Running costs and environmental pollution can be reduced.

In order to solve the above problems, the second carburizing apparatus of the present invention includes a carburizing chamber in which the material to be treated is carburized, and a carrier gas containing CO gas and hydrogen gas in the carburizing chamber. In a carburizing treatment apparatus equipped with a carrier gas supply pipe and an enrich gas supply pipe supplying an enrichment gas containing hydrocarbon gas as a main component, the atmospheric gas in the carburizing chamber is taken out from the carburizing chamber and circulated. A hydrogen gas separation device for separating and extracting the hydrogen gas contained in the atmospheric gas is installed in the circulation path, and an exhaust control valve is installed in the hydrogen gas guide pipe that guides the hydrogen gas separated by the hydrogen gas separation device. and a CO gas concentration measuring device for detecting the CO gas concentration and/or a hydrogen gas concentration measuring device for detecting the hydrogen gas concentration contained in the atmospheric gas in the carburizing chamber. Based on the CO gas concentration detected by the CO gas concentration and/or the hydrogen gas concentration detected by the hydrogen gas concentration measuring device, a control device controls opening and closing of the exhaust control valve provided in the hydrogen gas guide pipe. I decided to do so.

In the second carburizing treatment apparatus, if the CO gas concentration contained in the atmospheric gas in the carburizing chamber detected by the CO gas concentration measuring device is a carburizing appropriate concentration suitable for carburizing treatment, , the control device closes the exhaust control valve provided on the hydrogen gas guide pipe, takes out the atmospheric gas in the carburizing chamber and circulates it through the circulation path, while controlling the CO gas concentration. When the CO gas concentration contained in the atmospheric gas in the carburizing chamber detected by the measuring device becomes less than the appropriate carburizing concentration suitable for carburizing, the control device controls the hydrogen gas guide pipe to The exhaust control valve was opened, the hydrogen gas separated from the atmospheric gas by the hydrogen gas separation device was discharged through the hydrogen gas guide pipe, and the remaining atmospheric gas was returned to the carburizing chamber.

Further, in the second carburizing treatment apparatus, if the hydrogen gas concentration contained in the atmospheric gas in the carburizing chamber detected by the hydrogen gas concentration measuring device is a carburizing appropriate concentration suitable for carburizing treatment, , the control device closes the exhaust control valve provided in the hydrogen gas guide pipe, takes out the atmospheric gas in the carburizing chamber and circulates it through the circulation path, while controlling the hydrogen gas concentration. If the concentration of hydrogen gas contained in the atmospheric gas in the carburizing treatment chamber detected by the measuring device exceeds the appropriate carburizing concentration suitable for carburizing treatment, the control device The exhaust control valve was opened, and the hydrogen gas separated from the atmospheric gas by the hydrogen gas separator was discharged through the hydrogen gas guide pipe, and the remaining atmospheric gas was returned to the carburizing chamber.

Here, in the second carburizing treatment apparatus, if the concentration of CO gas contained in the atmospheric gas in the carburizing chamber becomes less than the appropriate concentration for carburizing, or if CO gas contained in the atmospheric gas in the carburizing chamber becomes When the hydrogen gas concentration exceeds the appropriate carburizing concentration suitable for carburizing treatment, the control device opens the exhaust control valve provided on the hydrogen gas guide pipe, and the hydrogen gas separated from the atmospheric gas by the hydrogen gas separation device is When the hydrogen gas is discharged through the hydrogen gas guide pipe, the proportion of CO gas contained in the remaining atmospheric gas increases, and when the remaining atmospheric gas containing a large proportion of CO gas is returned to the carburizing chamber, the carburizing process begins. The concentration of CO gas contained in the indoor atmospheric gas increases.

In addition, when the CO gas concentration contained in the atmospheric gas in the carburizing chamber increases in this way, and the CO gas concentration and hydrogen gas concentration contained in the atmospheric gas in the carburizing chamber reach the appropriate concentration for carburizing, the control device Then, the exhaust control valve provided on the hydrogen gas guide pipe is closed to prevent the hydrogen gas contained in the atmospheric gas from being discharged, and the atmospheric gas in the carburizing chamber is circulated through the circulation path.

As in the second carburizing treatment apparatus, when the atmospheric gas in the carburizing chamber is circulated through the circulation path, the control device appropriately opens and closes the exhaust control valve provided in the hydrogen gas guide pipe. Therefore, if the hydrogen gas separated from the atmospheric gas by the hydrogen gas separation device is removed only when necessary, it will be more expensive than the conventional method of constantly using the hydrogen permeation filter installed in the hydrogen gas separation device. This slows down the deterioration of hydrogen permeable filters, reducing the cost and effort required to clean and replace them.

In addition, since the CO gas concentration and hydrogen gas concentration are measured and controlled, it becomes possible to stably maintain the CO gas concentration and hydrogen gas concentration in the atmospheric gas in the carburizing process chamber at the appropriate carburizing concentration suitable for carburizing process. .

In addition, since the hydrogen component is removed from the atmospheric gas and the carbon component is reused, the amount of expensive carrier gas CG and enriched gas EG to be supplied and the amount that is burned and discharged from the exhaust path without contributing to carburization are reduced. This reduces running costs and environmental pollution.

In order to solve the above problems, the third carburizing apparatus of the present invention includes a carburizing chamber in which the material to be treated is carburized, and a carrier gas containing CO gas and hydrogen gas in the carburizing chamber. In a carburizing treatment apparatus equipped with a carrier gas supply pipe and an enrich gas supply pipe supplying an enrichment gas containing hydrocarbon gas as a main component, the atmospheric gas in the carburizing chamber is taken out from the carburizing chamber and circulated. A hydrogen gas separation device for separating and extracting hydrogen gas contained in the atmospheric gas is provided in the circulation path, and a hydrogen gas guide pipe is provided for guiding the hydrogen gas separated by the hydrogen gas separation device, A CO gas concentration measuring device for detecting the CO gas concentration and/or a hydrogen gas concentration measuring device for detecting the hydrogen gas concentration contained in the atmospheric gas in the carburizing chamber is provided, and the CO gas concentration measuring device detects the CO gas concentration contained in the atmospheric gas in the carburizing chamber. Based on the CO gas concentration and/or the hydrogen gas concentration detected by the hydrogen gas concentration measuring device, the control device controls the amount of atmospheric gas guided to the hydrogen gas separation device through the circulation path. did.

In the third carburizing treatment apparatus, if the CO gas concentration contained in the atmospheric gas in the carburizing chamber detected by the CO gas concentration measuring device becomes less than the appropriate carburizing concentration suitable for carburizing treatment. In order to increase the amount of atmospheric gas guided to the hydrogen gas separation device through the circulation path by the control device, the amount of hydrogen gas separated from the atmospheric gas by the hydrogen gas separation device is increased. did.

Further, in the third carburizing treatment apparatus, when the hydrogen gas concentration contained in the atmospheric gas in the carburizing chamber detected by the hydrogen gas concentration measuring device exceeds the appropriate carburizing concentration suitable for carburizing treatment, The control device increases the amount of atmospheric gas guided to the hydrogen gas separation device through the circulation path, thereby increasing the amount of hydrogen gas separated from the atmospheric gas by the hydrogen gas separation device. .

Here, in the third carburizing treatment apparatus, if the concentration of CO gas contained in the atmospheric gas in the carburizing chamber becomes less than the appropriate concentration for carburizing, or if the concentration of CO gas contained in the atmospheric gas in the carburizing chamber becomes When the hydrogen gas concentration exceeds the appropriate carburizing concentration suitable for carburizing treatment, the control device increases the amount of atmospheric gas guided through the circulation path to the hydrogen gas separation device, and the hydrogen gas separation device removes the atmospheric gas from the atmospheric gas. When the amount of hydrogen gas to be separated is increased, the proportion of CO gas contained in the remaining atmospheric gas increases, and when the remaining atmospheric gas with this increased proportion of CO gas is returned to the carburizing treatment chamber, carburizing occurs. The concentration of CO gas contained in the atmospheric gas within the processing chamber increases, and the concentration of CO gas and hydrogen gas contained in the atmospheric gas within the carburizing processing chamber are adjusted to an appropriate carburizing concentration suitable for carburizing processing.

As in the third carburizing treatment apparatus, when the atmospheric gas in the carburizing chamber is circulated through the circulation path, the CO gas concentration contained in the atmospheric gas in the carburizing chamber is adjusted to an appropriate carburizing concentration suitable for carburizing. Only when the concentration of hydrogen gas contained in the atmospheric gas in the carburizing chamber exceeds the appropriate carburizing concentration suitable for carburizing treatment, the control device controls the hydrogen gas separation device through the circulation path. If the amount of atmospheric gas to be introduced is increased to increase the amount of hydrogen gas separated from the atmospheric gas by the hydrogen gas separation device, the hydrogen permeation filter installed in the hydrogen gas separation device must be constantly used, as in the past. This slows down the deterioration of expensive hydrogen permeable filters, reducing the cost and effort required to clean and replace them.

In addition, since the CO gas concentration and hydrogen gas concentration are measured and controlled, it becomes possible to stably maintain the CO gas concentration and hydrogen gas concentration in the atmospheric gas in the carburizing process chamber at the appropriate carburizing concentration suitable for carburizing process. .

In addition, since the hydrogen component is removed from the atmospheric gas and the carbon component is reused, the amount of expensive carrier gas CG and enriched gas EG to be supplied and the amount that is burned and discharged from the exhaust path without contributing to carburization are reduced. This reduces running costs and environmental pollution.

Further, in the third carburizing treatment apparatus, when the control device controls the amount of atmospheric gas to be circulated through the circulation path, the atmospheric gas is taken out from the carburizing chamber and circulated through the circulation path. A flow rate adjustment valve is provided at a position upstream of the hydrogen gas separation device, and the control device adjusts the flow rate adjustment valve to guide the hydrogen gas through the circulation path to the hydrogen gas separation device. In addition to controlling the amount of atmospheric gas, an output adjustment device is provided to adjust the output of a circulation pump that circulates the atmospheric gas through the circulation path, and the control device adjusts the output adjustment device to The amount of atmospheric gas introduced to the hydrogen gas separation device through the circulation path can be controlled by the circulation pump.

When the first carburizing device, the second carburizing device, and the third carburizing device of the present invention are configured, the atmospheric gas in the carburizing chamber is circulated through each of the above-mentioned circulation paths. The removal of the contained hydrogen gas can be appropriately controlled, and the CO gas concentration in the atmospheric gas in the carburizing chamber can be stably maintained at an appropriate carburizing concentration suitable for carburizing.

Furthermore, maintenance time for the hydrogen gas separation device can be reduced, and the amount of carburizing gas (carrier gas or enriched gas) used can be reduced.

In the carburizing apparatus according to Embodiments 1A and 1B of the present invention, when introducing the treatment material into the carburizing chamber and performing the carburizing process, the atmospheric gas in the carburizing chamber is guided to the second circulation path by the control device and circulated. FIG. In the carburizing apparatus according to Embodiment 1A, when the CO gas concentration contained in the atmospheric gas in the carburizing chamber becomes less than the appropriate concentration for carburizing, and in the carburizing apparatus according to Embodiment 1B, the atmosphere in the carburizing chamber This is a schematic explanatory diagram showing a state in which the atmospheric gas in the carburizing chamber is guided to the first circulation path and circulated by the control device when the hydrogen gas concentration contained in the gas exceeds the appropriate carburizing concentration suitable for carburizing treatment. be. In the carburizing treatment apparatus according to Embodiments 2A and 2B of the present invention, when guiding the atmospheric gas in the carburizing treatment chamber to the circulation path and circulating it, the hydrogen gas guide pipe is provided to guide the hydrogen gas separated by the hydrogen gas separation device. FIG. 3 is a schematic explanatory diagram showing a state in which the exhaust control valve is closed by the control device. In the carburizing apparatus according to Embodiment 2A, when the CO gas concentration contained in the atmospheric gas in the carburizing chamber becomes less than the appropriate concentration for carburizing, and in the carburizing apparatus according to Embodiment 2B, the atmosphere in the carburizing chamber When the concentration of hydrogen gas contained in the gas exceeds the appropriate concentration for carburizing, the control device opens the exhaust control valve installed in the hydrogen gas guide pipe that guides the hydrogen gas separated by the hydrogen gas separation device. FIG. 2 is a schematic explanatory diagram showing a state in which separated hydrogen gas is discharged through a hydrogen gas guide pipe. In the carburizing apparatus according to Embodiments 3A and 3B of the present invention, when the atmospheric gas in the carburizing chamber is guided to the circulation path and circulated, the flow rate is adjusted at a position upstream of the hydrogen gas separation device provided in the circulation path. A valve is provided, and the control device adjusts the flow rate adjustment valve based on the CO gas concentration and hydrogen gas concentration contained in the atmospheric gas in the carburizing chamber, and the atmospheric gas is guided through the circulation path to the hydrogen gas separation device. FIG. 2 is a schematic explanatory diagram showing a state in which the amount is controlled. In the carburizing treatment apparatus according to Embodiments 4A and 4B of the present invention, when guiding the atmospheric gas in the carburizing treatment chamber to the circulation path and circulating it, an output adjustment device is provided that adjusts the output of the circulation pump that circulates the atmospheric gas through the circulation path. Based on the CO gas concentration and hydrogen gas concentration contained in the atmospheric gas in the carburizing chamber, the control device adjusts the output adjustment device, and the atmospheric gas is guided to the hydrogen gas separation device through the circulation path by the circulation pump. FIG. 2 is a schematic explanatory diagram showing a state in which the amount of is controlled.

DESCRIPTION OF THE PREFERRED EMBODIMENTS A carburizing treatment apparatus according to an embodiment of the present invention will be specifically described below based on the accompanying drawings. Note that the carburizing treatment apparatus according to the present invention is not limited to that shown in the embodiments below, and can be implemented with appropriate modifications within the scope of the gist of the invention.

[Embodiment 1A]
In the carburizing treatment apparatus in Embodiment 1A, as shown in FIGS. 1 and 2, the treated material W is introduced into the introduction chamber 2 through the first door 1a, and then the treated material W guided into the introduction chamber 2. is introduced into the carburizing chamber 3 through the second door 1b, and the treatment material W is carburized in the carburizing chamber 3.

Here, in the carburizing treatment apparatus in this embodiment 1A, the carrier gas CG containing CO gas and hydrogen gas H ₂ is supplied into the carburizing treatment chamber 3 while adjusting the flow rate with the flow rate regulating valve 4a. At the same time, an enriched gas EG whose main component is a hydrocarbon gas C _n H _2n+2 such as city gas, propane gas, or butane gas is supplied through the enriched gas supply pipe 5 while adjusting the flow rate with a flow rate regulating valve 5a. We are trying to supply it. Note that the carrier gas CG containing CO gas and hydrogen gas H ₂ is generally made by mixing the above-mentioned city gas, a hydrocarbon gas C _n H _2n+2 such as propane gas, or butane gas with air, and converting it. used.

In the carburizing apparatus of Embodiment 1A, the stirring fan 3a provided in the carburizing chamber 3 stirs the carrier gas CG and enrich gas EG supplied into the carburizing chamber 3. The treated material W introduced into the carburizing chamber 3 is heated to add carbon to the surface of the treated material W, and the carbon thus applied to the surface of the treated material W is transferred to the inside of the treated material W. to cause carburization.

Note that in the carburizing chamber 3 to which the carrier gas CG and the enriched gas EG are supplied in this way, when carbon is applied to the surface of the treated material W for carburization, 2CO → CO ₂ as described above. +(C), C _n H _2n+2 +nCO ₂ →2nCO+(n+1)H ₂ reaction occurs, and as a result of the carbon component being applied to the surface of the treated material W, hydrogen gas is generated in the carburizing chamber 3. The remaining and generated hydrogen gas H ₂ causes the CO gas concentration in the carburizing chamber 3 to gradually decrease.

Here, in the carburizing treatment apparatus according to Embodiment 1A, as shown in FIGS. 1 and 2, a first circulation path 10 and a first circulation path 10 for taking out and circulating atmospheric gas in the carburizing treatment chamber 3, 2 circulation paths 20 are provided.

In the first circulation path 10, a first circulation pump 11 for sucking and circulating the atmospheric gas in the carburizing chamber 3 is provided, and an upstream side for guiding the atmospheric gas taken out from the carburizing chamber 3 is provided. A cooling device 13 for cooling the atmospheric gas and a first take-out valve 12 are provided in the section, and hydrogen gas H 2 is extracted from the atmospheric gas cooled by the cooling device 13 at a position downstream of the first take-out valve ₁₂ . A hydrogen gas separation device 14 for separation is provided, and the atmospheric gas after hydrogen gas H ₂ is separated by the hydrogen gas separation device 14 is sucked by the first circulation pump 11 and returned to the carburizing chamber 3. Meanwhile, the hydrogen gas H ₂ separated by the hydrogen gas separation device 14 is sucked by the hydrogen gas suction pump 14a and guided to the hydrogen gas guide pipe 14b, and the hydrogen gas H ₂ is discharged through the hydrogen gas guide pipe 14b. That's what I do. Note that the hydrogen gas discharged through the hydrogen gas guide pipe 14b in this manner can be combusted or used as a hydrogen gas raw material.

Here, the structure of the hydrogen gas separation device 14 is, for example, one in which atmospheric gas is circulated inside a hydrogen permeation filter 15 provided in a cylindrical shape, and only hydrogen is sucked to the outside by the hydrogen gas suction pump 14a. is possible.

On the other hand, in the second circulation path 20 that takes out the atmospheric gas in the carburizing chamber 3 and circulates it, the second circulation path 20 sucks and circulates the atmospheric gas in the carburizing chamber 3. A pump 21 is provided, and a cooling device 23 for cooling the atmospheric gas and a second extraction valve 22 are provided on the upstream side where the atmospheric gas taken out from the carburizing chamber 3 is introduced.

Further, in the carburizing treatment apparatus according to Embodiment 1A, a CO gas concentration measuring device 6 for detecting the CO gas concentration contained in the atmospheric gas in the carburizing treatment chamber 3 is provided, and the CO gas concentration measuring device 6 detects the CO gas concentration. The CO gas concentration contained in the atmospheric gas is output to the control device 7, and the control device 7 controls the first take-out valve 12 provided in the first circulation path 10 and the second take-out valve provided in the second circulation path 20. Opening and closing of the valve 22 is controlled.

Furthermore, in the carburizing apparatus according to Embodiment 1A, when the amount of atmospheric gas in the carburizing chamber 3 becomes excessive, a part of the atmospheric gas in the carburizing chamber 3 is discharged to the outside. The carburizing chamber 3 is provided with an exhaust pipe 8 having an exhaust regulating valve 8a in the middle thereof, and the atmospheric gas introduced into the exhaust pipe 8 is combusted outside. Note that in the carburizing apparatus in Embodiment 1A, the carburizing chamber 3 is provided with an exhaust pipe 8 for discharging the excess atmospheric gas in the carburizing chamber 3 to the outside, but the exhaust pipe 8 is not provided. Although the position is not limited and is not shown, the excess atmospheric gas in the carburizing chamber 3 is guided to the introduction chamber 2 through the gap of the second door 1b, etc. An exhaust pipe 8 may also be provided.

In the carburizing treatment apparatus according to Embodiment 1A, the CO gas concentration contained in the atmospheric gas in the carburizing chamber 3 detected by the CO gas concentration measuring device 6 and output to the control device 7 is used in the carburizing treatment. When the carburizing concentration is suitable, as shown in FIG. While preventing the atmospheric gas from being introduced to the hydrogen gas separation device 14, the second take-out valve 22 provided in the second circulation path 20 is opened, and the atmospheric gas in the carburizing chamber 3 is transferred to the second circulation pump. 21 and circulated through the second circulation path 20 to carburize the material W in the carburizing chamber 3.

By doing so, the atmosphere inside the carburizing chamber 3 is stirred in synergy with the stirring effect of the stirring fan 3a provided in the carburizing chamber 3, and a more uniform carburizing process can be performed. Note that the first take-out valve 12 and the second take-out valve 22 are shown in black when in a closed state, and in white when in an open state. (The same applies to other valves after that.)

Here, when the material W to be treated is carburized in the carburizing chamber 3, hydrogen gas _H2 is generated in the carburizing chamber 3 as described above, and this hydrogen gas _H2 causes the inside of the carburizing chamber 3. The concentration of CO gas contained in the atmospheric gas gradually decreases.

In this way, the CO gas concentration contained in the atmospheric gas in the carburizing chamber 3 gradually decreases, and the atmosphere in the carburizing chamber 3 detected by the CO gas concentration measuring device 6 and output to the control device 7 When the CO gas concentration contained in the gas becomes less than the above-mentioned appropriate carburizing concentration, as shown in FIG. On the other hand, the first take-out valve 12 provided in the first circulation path 10 is opened, and the first circulation pump 11 provided in the first circulation path 10 removes the atmospheric gas in the carburizing chamber 3 from the first outlet valve 12 . After the atmospheric gas is sucked into the circulation path 10 and guided to the cooling device 13 to be cooled, the thus cooled atmospheric gas is led to the hydrogen gas separation device 14, where the atmospheric gas is The hydrogen gas _H2 contained therein is separated.

Then, the hydrogen gas H ₂ separated from the atmospheric gas by the hydrogen gas separation device 14 is sucked by the hydrogen gas suction pump 14a and guided to the hydrogen gas guide pipe 14b, and the hydrogen gas H ₂ is passed through the hydrogen gas guide pipe 14b. At the same time, the atmospheric gas after separating the hydrogen gas _H2 is sucked by the first circulation pump 11 and returned to the carburizing chamber 3, and the treated material W is discharged in the carburizing chamber 3. to be carburized.

Here, when the hydrogen gas H ₂ contained in the atmospheric gas is separated and discharged by the hydrogen gas separation device 14 as described above, the proportion of CO gas contained in the remaining atmospheric gas increases, and in this way, the CO gas When the remaining atmospheric gas with an increased proportion of is returned to the carburizing chamber 3, the concentration of CO gas contained in the atmospheric gas within the carburizing chamber 3 increases.

When the concentration of CO gas contained in the atmospheric gas in the carburizing chamber 3 increases in this way and the concentration of CO gas contained in the atmospheric gas in the carburizing chamber 3 reaches the appropriate concentration for carburizing, as shown in FIG. As shown, the control device 7 closes the first take-out valve 12 provided in the first circulation path 10 to prevent the atmospheric gas in the carburizing chamber 3 from being introduced to the hydrogen gas separation device 14. The second take-out valve 22 provided in the second circulation path 20 is opened, and the atmospheric gas in the carburizing chamber 3 is sucked by the second circulation pump 21 and circulated through the second circulation path 20.

In the carburizing apparatus according to Embodiment 1A, when circulating the atmospheric gas in the carburizing chamber 3, the control device 7 controls the path for circulating the atmospheric gas between the first circulation path 10 and the second circulation path. 20 and removes hydrogen gas _H2 contained in the atmospheric gas only when necessary, making it possible to remove the hydrogen gas H2 contained in the atmospheric gas only when necessary. In comparison, the deterioration of the expensive hydrogen permeation filter 15 is delayed, and the cost and effort required for cleaning and replacing it can be reduced.

Furthermore, by measuring and controlling the CO gas concentration, the CO gas concentration in the atmospheric gas in the carburizing chamber 3 can be stably maintained at an appropriate carburizing concentration suitable for carburizing.

In addition, since the hydrogen component is removed from the atmospheric gas and the carbon component is reused, the amount of expensive carrier gas CG and enriched gas EG to be supplied and the amount that is burned and discharged from the exhaust pipe 8 without contributing to carburization are reduced. This reduces running costs and environmental pollution.

[Embodiment 1B]
In the carburizing apparatus in Embodiment 1B, as shown in parentheses () in FIGS. 1 and 2, the concentration of CO gas contained in the atmospheric gas in the carburizing chamber 3 is In place of the CO gas concentration measuring device 6 that detects the CO gas concentration measuring device 6, a hydrogen gas concentration measuring device 9 that detects the hydrogen gas concentration contained in the atmospheric gas in the carburizing chamber 3 is provided. It was configured in the same way as the processing device.

Here, in the carburizing treatment apparatus according to Embodiment 1B, the hydrogen gas concentration contained in the atmospheric gas in the carburizing chamber 3 detected by the hydrogen gas concentration measuring device 9 and output to the control device 7 is When the carburizing concentration is appropriate for the treatment, as shown in FIG. While preventing the atmospheric gas in the carburizing process chamber 3 from being introduced to the hydrogen gas separation device 14, the second take-out valve 22 provided in the second circulation path 20 is opened, and the atmospheric gas in the carburizing process chamber 3 is prevented from being introduced into the hydrogen gas separation device 14. The material W to be treated is carburized in the carburizing chamber 3 by suction by the circulation pump 21 and circulating through the second circulation path 20 .

When the treated material W is carburized in the carburizing chamber 3 in this way, hydrogen gas H ₂ is generated in the carburizing chamber 3 as described above, and this hydrogen gas H ₂ causes the carburizing chamber 3 to be heated. The concentration of hydrogen gas contained in the atmospheric gas gradually increases.

In this way, the hydrogen gas concentration contained in the atmospheric gas in the carburizing chamber 3 gradually increases, and the atmosphere in the carburizing chamber 3 is detected by the hydrogen gas concentration measuring device 9 and output to the control device 7. When the concentration of hydrogen gas contained in the gas exceeds the appropriate carburizing concentration, the control device 7 controls the second take-out valve 22 provided in the second circulation path 20, as shown in FIG. While closing, the first take-out valve 12 provided in the first circulation path 10 is opened, and the first circulation pump 11 provided in the first circulation path 10 circulates the atmospheric gas in the carburizing chamber 3 for the first time. After the atmospheric gas is drawn into the passage 10 and cooled by being guided to the cooling device 13, the atmospheric gas thus cooled is led to the hydrogen gas separation device 14, where the atmospheric gas is The hydrogen gas H ₂ contained in the water is separated.

Then, the hydrogen gas H ₂ separated from the atmospheric gas by the hydrogen gas separation device 14 is sucked by the hydrogen gas suction pump 14a and guided to the hydrogen gas guide pipe 14b, and the hydrogen gas H ₂ is passed through the hydrogen gas guide pipe 14b. At the same time, the atmospheric gas after separating the hydrogen gas _H2 is sucked by the first circulation pump 11 and returned to the carburizing chamber 3, and the treated material W is discharged in the carburizing chamber 3. to be carburized.

When the hydrogen gas _H2 contained in the atmospheric gas is separated and discharged by the hydrogen gas separation device 14 in this way, the proportion of CO gas contained in the remaining atmospheric gas increases, and in this way, the proportion of CO gas increases. When the remaining atmospheric gas is returned to the carburizing chamber 3, the concentration of CO gas contained in the atmospheric gas within the carburizing chamber 3 increases.

Then, when the CO gas concentration contained in the atmospheric gas in the carburizing chamber 3 increases and the hydrogen gas concentration contained in the atmospheric gas in the carburizing chamber 3 reaches the appropriate concentration for carburizing, as shown in FIG. Then, the control device 7 closes the first take-out valve 12 provided in the first circulation path 10 to prevent the atmospheric gas in the carburizing chamber 3 from being introduced to the hydrogen gas separation device 14. The second take-out valve 22 provided in the passage 20 is opened, and the atmospheric gas in the carburizing chamber 3 is sucked by the second circulation pump 21 and circulated through the second circulation passage 20.

As a result, the carburizing apparatus according to Embodiment 1B can achieve the same effects as the carburizing apparatus according to Embodiment 1A.

[Embodiment 2A]
Also in the carburizing apparatus in Embodiment 2A, as shown in FIGS. 3 and 4, similarly to the carburizing apparatus in Embodiment 1A, the treated material W was guided into the introduction chamber 2 through the first door 1a. Thereafter, the treated material W introduced into the introduction chamber 2 is introduced into the carburizing chamber 3 through the second door 1b, and the treated material W is carburized in the carburizing chamber 3.

Also in the carburizing treatment apparatus in Embodiment 2A, a carrier gas CG containing CO gas and hydrogen gas H ₂ is supplied into the carburizing chamber 3 through a carrier gas supply pipe while adjusting the flow rate with the flow rate regulating valve 4a. At the same time, an enriched gas EG whose main component is a hydrocarbon gas C _n H _2n+2 such as city gas, propane gas, or butane gas is supplied through the enriched gas supply pipe 5 while adjusting the flow rate with a flow rate regulating valve 5a. The stirring fan 3a provided in the carburizing chamber 3 stirs the carrier gas CG and enrichment gas EG supplied into the carburizing chamber 3, and the carrier gas CG and enrichment gas EG supplied into the carburizing chamber 3 are stirred. The treated material W is heated to apply carbon to the surface of the treated material W, and the carbon thus applied to the surface of the treated material W is diffused into the interior of the treated material W to be carburized.

Also, in the carburizing apparatus according to Embodiment 2A, similarly to the carburizing apparatus according to Embodiment 1A, when the amount of atmospheric gas in the carburizing chamber 3 becomes excessive, the inside of the carburizing chamber 3 is In order to exhaust part of the atmospheric gas to the outside, an exhaust pipe 8 with an exhaust regulating valve 8a provided in the middle is provided in this carburizing processing chamber 3, and a part of the atmospheric gas guided to the exhaust pipe 8 is discharged. I try to burn it outside.

Here, in the carburizing apparatus according to Embodiment 2A, as shown in FIGS. 3 and 4, one circulation path 30 is provided in which atmospheric gas in the carburizing chamber 3 is taken out from the carburizing chamber 3 and circulated. ing.

The circulation path 30 is provided with a circulation pump 31 for sucking and circulating the atmospheric gas in the carburizing chamber 3 . The guided atmospheric gas is guided to a cooling device 33 to be cooled, and the atmospheric gas thus cooled by the cooling device 33 is guided to a hydrogen gas separation device 34 that separates hydrogen gas H ₂ from the atmospheric gas. The atmospheric gas that has passed through the separation device 34 is sucked by the circulation pump 31 and returned to the carburizing chamber 3.

Here, in the carburizing treatment apparatus in Embodiment 2A, the hydrogen gas H ₂ separated from the atmospheric gas by the hydrogen gas separation device 34 is sucked by the hydrogen gas suction pump 34a and guided to the hydrogen gas guide pipe 34b. In this case, an exhaust control valve 34c is provided in the hydrogen gas guide pipe 34b, and when the exhaust control valve 34c is closed, the hydrogen gas H ₂ is not separated from the atmospheric gas and exhausted, _but is removed. While the atmospheric gas is returned to the carburizing chamber 3 when the exhaust control valve 34c is open, the hydrogen gas H ₂ separated by the hydrogen gas separation device 34 is returned to the hydrogen gas suction pump 34a. As a result, the hydrogen gas is sucked and discharged through the hydrogen gas guide pipe 34b, and the atmospheric gas is returned to the carburizing chamber 3 with the hydrogen gas _H2 removed.

At this time, instead of opening and closing the exhaust control valve 34c, the exhaust control valve 34c may be left open and the hydrogen gas suction pump 34a may be turned ON/OFF.

By stopping the action of the hydrogen permeation filter 35 of the hydrogen gas separation device 34 by some means in this manner, the deterioration of the expensive hydrogen permeation filter 35 can be slowed down, as in Embodiments 1A and 1B, and its cleaning and The cost and effort required for replacement can be reduced.

Furthermore, according to this embodiment 2A, the second circulation path 20 as in the first embodiment is not required, so that equipment costs and required space can be reduced.

Further, in the carburizing treatment apparatus in Embodiment 2A, a CO gas concentration measuring device 6 for detecting the CO gas concentration contained in the atmospheric gas in the carburizing treatment chamber 3 is provided. The CO gas concentration contained in the atmospheric gas is output to a control device 7, which controls opening and closing of the exhaust control valve 34c provided in the hydrogen gas guide pipe 34b.

In the carburizing treatment apparatus in Embodiment 2A, the CO gas concentration contained in the atmospheric gas in the carburizing chamber 3 detected by the CO gas concentration measuring device 6 and output to the control device 7 is used in the carburizing treatment. When the carburizing concentration is suitable, as shown in FIG. 3, the control device 7 closes the exhaust control valve 34c of the hydrogen gas guide pipe 34b, and hydrogen gas _H2 is separated from the atmospheric gas. The atmospheric gas is sucked by the circulation pump 31 in a state in which the hydrogen gas H ₂ is not removed, and is returned to the carburizing chamber 3 through the circulation path 30 so that the hydrogen gas H 2 is not discharged. In this step, the treated material W is carburized.

Here, when the material W to be treated is carburized in the carburizing chamber 3, hydrogen gas _H2 is generated in the carburizing chamber 3 as described above, and this hydrogen gas _H2 causes the inside of the carburizing chamber 3. The concentration of CO gas contained in the atmospheric gas gradually decreases.

In this way, the CO gas concentration contained in the atmospheric gas in the carburizing chamber 3 gradually decreases, and the atmosphere in the carburizing chamber 3 detected by the CO gas concentration measuring device 6 and output to the control device 7 When the CO gas concentration contained in the gas becomes less than the appropriate carburizing concentration, as shown in FIG. 4, the control device 7 opens the exhaust control valve 34c of the hydrogen gas guide pipe 34b. The hydrogen gas H ₂ separated by the hydrogen gas separation device 34 is sucked and discharged through the hydrogen gas guide pipe 34 b by the hydrogen gas suction pump 34 a, while the atmospheric gas after the hydrogen gas H ₂ has been separated is The material W is suctioned by the circulation pump 31 and returned to the carburizing chamber 3 through the circulation path 30, so that the material W to be treated is carburized in the carburizing chamber 3.

Here, when the hydrogen gas H ₂ contained in the atmospheric gas is separated and discharged by the hydrogen gas separation device 34 as described above, the proportion of CO gas contained in the remaining atmospheric gas increases, and in this way, the CO gas When the remaining atmospheric gas with an increased proportion of is returned to the carburizing chamber 3, the concentration of CO gas contained in the atmospheric gas within the carburizing chamber 3 increases.

When the concentration of CO gas contained in the atmospheric gas in the carburizing chamber 3 increases in this way and the concentration of CO gas contained in the atmospheric gas in the carburizing chamber 3 reaches the appropriate concentration for carburizing, as shown in FIG. As shown, the control device 7 closes the exhaust control valve 34c of the hydrogen gas guide pipe 34b to prevent the hydrogen gas H ₂ from being separated from the atmospheric gas and being discharged, and the hydrogen gas H ₂ is removed. Atmospheric gas is returned to the carburizing chamber 3 in a state in which the material W is carburized in the carburizing chamber 3.

In the carburizing treatment apparatus in Embodiment 2A, when the atmospheric gas in the carburizing chamber 3 is circulated through the circulation path 30, the exhaust control valve 34c provided in the hydrogen gas guide pipe 34b is controlled by the control device 7 as described above. The hydrogen gas _H2 contained in the atmospheric gas is removed only when necessary through the hydrogen gas guide pipe 34b by appropriately controlling the opening and closing of the hydrogen gas separation device. Compared to using the filter all the time, the deterioration of the expensive hydrogen permeable filter 35 is delayed, and the cost and effort required for cleaning and replacing it can be reduced.

Furthermore, by measuring and controlling the CO gas concentration, the CO gas concentration in the atmospheric gas in the carburizing chamber 3 can be stably maintained at an appropriate carburizing concentration suitable for carburizing.

In addition, since the hydrogen component is removed from the atmospheric gas and the carbon component is reused, the amount of expensive carrier gas CG and enriched gas EG to be supplied and the amount that is burned and discharged from the exhaust pipe 8 without contributing to carburization are reduced. This reduces running costs and environmental pollution.

[Embodiment 2B]
In the carburizing apparatus in Embodiment 2B, as shown in parentheses () in FIGS. 3 and 4, the concentration of CO gas contained in the atmospheric gas in the carburizing chamber 3 is In place of the CO gas concentration measuring device 6 that detects the CO gas concentration measuring device 6, a hydrogen gas concentration measuring device 9 that detects the hydrogen gas concentration contained in the atmospheric gas in the carburizing treatment chamber 3 is provided. It was configured in the same way as the processing device.

In the carburizing apparatus according to Embodiment 2B, the hydrogen gas concentration contained in the atmospheric gas in the carburizing chamber 3 detected by the hydrogen gas concentration measuring device 9 and output to the control device 7 is When the carburizing concentration is appropriate for the carburization, as shown in FIG. 3, the control device 7 closes the exhaust control valve 34c of the hydrogen gas guide pipe 34b, and hydrogen gas _H2 is separated from the atmospheric gas. The atmospheric gas is sucked by the circulation pump 31 in a state in which the hydrogen gas H ₂ is not removed, and is returned to the carburizing chamber 3 through the circulation path 30. The treated material W is carburized inside.

Here, when the treatment material W is carburized in the carburizing chamber 3 in this way, hydrogen gas _H2 is generated in the carburizing chamber 3 as described above and is contained in the atmospheric gas in the carburizing chamber 3. The hydrogen gas H ₂ concentration gradually increases and the CO gas concentration begins to decrease.

In this way, the hydrogen gas concentration contained in the atmospheric gas in the carburizing chamber 3 gradually increases, and the atmosphere in the carburizing chamber 3 is detected by the hydrogen gas concentration measuring device 9 and output to the control device 7. When the concentration of hydrogen gas contained in the gas exceeds the appropriate carburizing concentration, as shown in FIG. 4, the control device 7 opens the exhaust control valve 34c of the hydrogen gas guide pipe 34b. The hydrogen gas H ₂ separated by the hydrogen gas separation device 34 is sucked and discharged through the hydrogen gas guide pipe 34 b by the hydrogen gas suction pump 34 a, while the atmospheric gas after the hydrogen gas H ₂ has been separated is It is sucked by the circulation pump 31 and returned to the carburizing chamber 3 through the circulation path 30, so that the material W to be treated is carburized in the carburizing chamber 3.

Here, when the hydrogen gas H ₂ contained in the atmospheric gas is separated and discharged by the hydrogen gas separation device 34 as described above, the proportion of CO gas contained in the remaining atmospheric gas increases, and in this way, the CO gas When the remaining atmospheric gas with an increased proportion of is returned to the carburizing chamber 3, the concentration of CO gas contained in the atmospheric gas within the carburizing chamber 3 increases.

Then, when the CO gas concentration contained in the atmospheric gas in the carburizing chamber 3 increases and the hydrogen gas concentration contained in the atmospheric gas in the carburizing chamber 3 reaches the appropriate concentration for carburizing, as shown in FIG. As shown, the control device 7 closes the exhaust control valve 34c of the hydrogen gas guide pipe 34b to prevent the hydrogen gas H ₂ from being separated from the atmospheric gas and being discharged, and the hydrogen gas H ₂ is removed. Atmospheric gas is returned to the carburizing chamber 3 in a state in which the material W is carburized in the carburizing chamber 3.

As a result, the carburizing apparatus according to Embodiment 2B can achieve the same effects as the carburizing apparatus according to Embodiment 2A.

[Embodiment 3A]
Also in the carburizing treatment apparatus in Embodiment 3A, as shown in FIG. 5, similarly to the carburizing treatment apparatus in Embodiment 1A, etc., after the treatment material W is introduced into the introduction chamber 2 through the first door 1a, The treatment material W introduced into the introduction chamber 2 is introduced into the carburizing chamber 3 through the second door 1b, so that the treatment material W is carburized in the carburizing chamber 3.

Also in the carburizing apparatus of Embodiment 3A, a carrier gas CG containing CO gas and hydrogen gas H ₂ is supplied into the carburizing chamber 3 through a carrier gas supply pipe while adjusting the flow rate with the flow rate regulating valve 4a. At the same time, an enriched gas EG whose main component is a hydrocarbon gas C _n H _2n+2 such as city gas, propane gas, or butane gas is supplied through the enriched gas supply pipe 5 while adjusting the flow rate with a flow rate regulating valve 5a. The stirring fan 3a provided in the carburizing chamber 3 stirs the carrier gas CG and enrichment gas EG supplied into the carburizing chamber 3, and the carrier gas CG and enrichment gas EG supplied into the carburizing chamber 3 are stirred. The treated material W is heated to apply carbon to the surface of the treated material W, and the carbon thus applied to the surface of the treated material W is diffused into the interior of the treated material W to be carburized.

Also, in the carburizing apparatus according to Embodiment 3A, similarly to the carburizing apparatus according to Embodiment 1A, etc., when the amount of atmospheric gas in the carburizing chamber 3 becomes excessive, the carburizing chamber 3 In order to discharge part of the atmospheric gas inside the carburizing chamber 3 to the outside, an exhaust pipe 8 with an exhaust regulating valve 8a provided in the middle is provided in the carburizing chamber 3, and a part of the atmospheric gas guided to the exhaust pipe 8 is is combusted externally.

Here, in the carburizing treatment apparatus according to this embodiment 3A, as shown in FIG. One circulation path 30 is provided for circulation.

The circulation path 30 is provided with a circulation pump 31 for sucking and circulating the atmospheric gas in the carburizing chamber 3 . The guided atmospheric gas is guided to a cooling device 33 to be cooled, and the atmospheric gas thus cooled by the cooling device 33 is guided to a hydrogen gas separation device 34 that separates hydrogen gas H ₂ from the atmospheric gas. The hydrogen gas H ₂ separated by the separation device 34 is sucked through the hydrogen gas guide pipe 34 b by the hydrogen gas suction pump 34 a and discharged, while the atmospheric gas from which the hydrogen gas H ₂ has been removed is returned to the carburizing chamber 3. That's what I do.

Here, in the carburizing treatment apparatus in Embodiment 3A, the atmospheric gas guided to the circulation path 30 as described above is guided to the cooling device 33 and cooled, and the atmospheric gas cooled by the cooling device 33 is In guiding the hydrogen gas to the hydrogen gas separation device 34, a flow rate adjustment valve 36 is provided at the upstream side of the hydrogen gas separation device 34, and the CO gas contained in the atmospheric gas in the carburizing chamber 3 detected by the CO gas concentration measuring device 6 is provided. Based on the CO gas concentration, the control device 7 controls the flow rate adjustment valve 36 to adjust the amount of atmospheric gas introduced to the hydrogen gas separation device 34.

In the carburizing apparatus of Embodiment 3A, the carburizing process gradually reduces the CO gas concentration contained in the atmospheric gas in the carburizing chamber 3, which is detected by the CO gas concentration measuring device 6 and is detected by the control device 7. When the CO gas concentration contained in the atmospheric gas in the carburizing chamber 3 that is output to the carburizing chamber 3 becomes less than the above-mentioned appropriate carburizing concentration, the control device 7 adjusts the flow rate adjustment valve 36 and the above-mentioned The amount of atmospheric gas introduced to the hydrogen gas separation device 34 is increased to increase the amount of hydrogen gas H ₂ separated from the atmospheric gas by the hydrogen gas separation device 34, and the separated hydrogen gas H ₂ is transferred to the hydrogen gas suction pump 34a. While the hydrogen gas H2 is suctioned and discharged through the hydrogen gas guide pipe 34b, the atmospheric gas after separating the hydrogen gas _H2 is suctioned by the circulation pump 31 and returned to the carburizing chamber 3 through the circulation path 30. The treatment material W is carburized in the carburizing chamber 3.

Here, when the hydrogen gas H ₂ contained in the atmospheric gas is separated and discharged by the hydrogen gas separation device 34 as described above, the proportion of CO gas contained in the remaining atmospheric gas increases, and in this way, the CO gas When the remaining atmospheric gas with an increased proportion of is returned to the carburizing chamber 3, the concentration of CO gas contained in the atmospheric gas within the carburizing chamber 3 increases.

Then, when the concentration of CO gas contained in the atmospheric gas in the carburizing chamber 3 increases and the concentration of CO gas contained in the atmospheric gas in the carburizing chamber 3 reaches the appropriate concentration for carburizing, the control device 7 adjusting the flow rate adjustment valve 36 to reduce the amount of atmospheric gas introduced to the hydrogen gas separation device 34, and adjusting the amount of hydrogen gas _H2 separated from the atmospheric gas by the hydrogen gas separation device 34, The treatment material W is carburized in the carburizing chamber 3 by maintaining the CO gas concentration contained in the atmospheric gas at an appropriate carburizing concentration.

Here, in the carburizing treatment apparatus in this embodiment 3A, when circulating the atmospheric gas in the carburizing treatment chamber 3 through the circulation path 30, the flow rate adjustment valve 36 is adjusted by the control device 7 as described above, Since the amount of hydrogen gas H ₂ separated from the atmospheric gas and exhausted by the hydrogen gas separation device 34 is controlled only when necessary, the hydrogen permeation filter provided in the hydrogen gas separation device is always used as in the conventional method. The deterioration of the expensive hydrogen permeable filter 35 is delayed, and the cost and effort required for cleaning and replacing it can be reduced.

Furthermore, by measuring and controlling the CO gas concentration, the CO gas concentration in the atmospheric gas in the carburizing chamber 3 can be stably maintained at an appropriate carburizing concentration suitable for carburizing.

In addition, since the hydrogen component is removed from the atmospheric gas and the carbon component is reused, the amount of expensive carrier gas CG and enriched gas EG to be supplied and the amount that is burned and discharged from the exhaust pipe 8 without contributing to carburization are reduced. This reduces running costs and environmental pollution.

[Embodiment 3B]
In the carburizing apparatus in Embodiment 3B, in the carburizing apparatus in Embodiment 3A, as shown in parentheses () in FIG. 5, the concentration of CO gas contained in the atmospheric gas in the carburizing chamber 3 is detected. In place of the CO gas concentration measuring device 6, a hydrogen gas concentration measuring device 9 for detecting the hydrogen gas concentration contained in the atmospheric gas in the carburizing chamber 3 is provided, and other than that, the carburizing treatment in Embodiment 3A is performed. It was configured in the same way as the device.

Here, in the carburizing apparatus of Embodiment 3B, the carburizing process gradually reduces the CO gas concentration contained in the atmospheric gas in the carburizing process chamber 3, while increasing the hydrogen gas concentration. When the hydrogen gas concentration contained in the atmospheric gas detected by the measuring device 9 and output to the control device 7 exceeds the appropriate carburizing concentration, the control device 7 controls the flow rate adjustment valve 36 to The amount of atmospheric gas introduced into the hydrogen gas separation device 34 is increased to increase the amount of hydrogen gas H ₂ separated from the atmospheric gas by the hydrogen gas separation device 34, and the hydrogen gas H ₂ thus separated is converted into hydrogen. While the gas suction pump 34a suctions and discharges the hydrogen gas through the gas guide pipe 34b, the atmospheric gas after separating the hydrogen gas _H2 is suctioned by the circulation pump 31, and is passed through the circulation path 30 into the carburizing chamber 3. The process material W is then carburized in the carburizing chamber 3.

Here, when the hydrogen gas H ₂ contained in the atmospheric gas is separated and discharged by the hydrogen gas separation device 34 as described above, the proportion of CO gas contained in the remaining atmospheric gas increases, and in this way, the CO gas When the remaining atmospheric gas with an increased proportion of is returned to the carburizing chamber 3, the CO gas concentration contained in the atmospheric gas within the carburizing chamber 3 increases, while the hydrogen gas concentration decreases.

Then, when the concentration of hydrogen gas contained in the atmospheric gas in the carburizing chamber 3 decreases and the concentration of hydrogen gas contained in the atmospheric gas in the carburizing chamber 3 reaches the appropriate concentration for carburizing, the control device 7 The flow rate adjustment valve 36 is adjusted to reduce the amount of atmospheric gas introduced to the hydrogen gas separation device 34, thereby reducing the amount of hydrogen gas _H2 to be separated from the atmospheric gas. The material W to be treated is carburized in the carburizing chamber 3 in a state where the concentration of hydrogen gas contained in the atmospheric gas reaches the appropriate concentration for carburizing.

As a result, the carburizing apparatus in Embodiment 3B also provides the same effects as the carburizing apparatus in Embodiment 3A.

[Embodiment 4A]
Also in the carburizing treatment apparatus in Embodiment 4A, as shown in FIG. 6, similarly to the carburizing treatment apparatus in Embodiment 1A, etc., after the treatment material W is introduced into the introduction chamber 2 through the first door 1a, The treatment material W introduced into the introduction chamber 2 is introduced into the carburizing chamber 3 through the second door 1b, so that the treatment material W is carburized in the carburizing chamber 3.

Also in the carburizing treatment apparatus according to Embodiment 4A, a carrier gas CG containing CO gas and hydrogen gas H ₂ is introduced into the carburizing chamber 3 through a carrier gas supply pipe while adjusting the flow rate with the flow rate regulating valve 4a. At the same time, an enriched gas EG whose main component is a hydrocarbon gas C _n H _2n+2 such as city gas, propane gas, or butane gas is supplied through the enriched gas supply pipe 5 while adjusting the flow rate with a flow rate regulating valve 5a. The stirring fan 3a provided in the carburizing chamber 3 stirs the carrier gas CG and enrichment gas EG supplied into the carburizing chamber 3, and the carrier gas CG and enrichment gas EG supplied into the carburizing chamber 3 are stirred. The treated material W is heated to apply carbon to the surface of the treated material W, and the carbon thus applied to the surface of the treated material W is diffused into the interior of the treated material W to be carburized.

Also, in the carburizing apparatus according to Embodiment 4A, similarly to the carburizing apparatus according to Embodiment 1A, etc., when the amount of atmospheric gas in the carburizing chamber 3 becomes excessive, the carburizing chamber 3 In order to discharge part of the atmospheric gas inside the carburizing chamber 3 to the outside, an exhaust pipe 8 with an exhaust regulating valve 8a provided in the middle is provided in the carburizing chamber 3, and a part of the atmospheric gas guided to the exhaust pipe 8 is is combusted externally.

Here, in the carburizing treatment apparatus in this embodiment 4A, as shown in FIG. 6, the atmospheric gas in the carburizing treatment chamber 3 is One circulation path 30 is provided for taking out and circulating the water.

The circulation path 30 is provided with a circulation pump 31 for sucking and circulating the atmospheric gas in the carburizing chamber 3. The atmospheric gas thus cooled by the cooling device 33 is guided to a hydrogen gas separation device 34 that separates hydrogen gas H ₂ from the atmospheric gas, and the hydrogen gas is separated. The hydrogen gas H ₂ separated by the device 34 is sucked and discharged through the hydrogen gas guide pipe 34 b by the hydrogen gas suction pump 34 a, while the atmospheric gas from which the hydrogen gas H ₂ has been removed is returned to the carburizing chamber 3. I have to.

Here, in the carburizing treatment apparatus in this embodiment 4A, when the atmospheric gas in the carburizing treatment chamber 3 is circulated through the circulation path 30 by the circulation pump 31 as described above, an output adjustment device that adjusts the output of the circulation pump 31 is used. 32, and the control device 7 adjusts the output adjustment device 32 based on the CO gas concentration contained in the atmospheric gas in the carburizing chamber 3 detected by the CO gas concentration measuring device 6, The amount of atmospheric gas introduced into the hydrogen gas separation device 34 through the circulation path 30 by a circulation pump 31 is controlled.

In the carburizing apparatus according to Embodiment 4A, the CO gas concentration contained in the atmospheric gas in the carburizing chamber 3 gradually decreases due to the carburizing process, and is detected by the CO gas concentration measuring device 6 and controlled by the control device 7. When the CO gas concentration contained in the atmospheric gas in the carburizing chamber 3 that is output to the carburizing process chamber 3 becomes less than the appropriate carburizing concentration, the output adjustment device 32 is adjusted by the control device 7, and the The circulation pump 31 increases the amount of atmospheric gas guided to the hydrogen gas separation device 34 through the circulation path 30, and increases the amount of hydrogen gas H ₂ to be separated from the atmospheric gas by the hydrogen gas separation device 34. The hydrogen gas H ₂ is sucked through the hydrogen gas guide pipe 34 b by the hydrogen gas suction pump 34 a and discharged, while the atmospheric gas after the hydrogen gas H ₂ has been separated is introduced into the carburizing chamber 3 through the circulation path 30 . Then, the material W to be treated is carburized in the carburizing chamber 3.

Here, as the amount of hydrogen gas H ₂ contained in the atmospheric gas separated and discharged by the hydrogen gas separation device 34 increases as described above, the proportion of CO gas contained in the remaining atmospheric gas increases, and such When the remaining atmospheric gas containing an increased proportion of CO gas is returned to the carburizing chamber 3, the concentration of CO gas contained in the atmospheric gas within the carburizing chamber 3 increases.

Then, when the concentration of CO gas contained in the atmospheric gas in the carburizing chamber 3 increases and the concentration of CO gas contained in the atmospheric gas in the carburizing chamber 3 reaches the appropriate concentration for carburizing, the control device 7 The output adjustment device 32 is adjusted to reduce the amount of atmospheric gas guided to the hydrogen gas separation device 34 through the circulation path 30 by the circulation pump 31, and the hydrogen gas separation device 34 removes the atmospheric gas from the atmospheric gas. The amount of hydrogen gas H ₂ to be separated is adjusted to maintain the concentration of CO gas contained in the atmospheric gas at an appropriate concentration for carburizing, and the material W to be treated is carburized in the carburizing chamber 3.

In the carburizing treatment apparatus in this embodiment 4A, when the atmospheric gas in the carburizing chamber 3 is circulated through the circulation path 30 by the circulation pump 31, the output adjustment device 32 is adjusted by the control device 7 as described above. The circulation pump 31 adjusts the amount of atmospheric gas guided from the carburizing chamber 3 through the circulation path 30 to the hydrogen gas separation device 34, and the hydrogen gas separation device 34 separates hydrogen from the atmospheric gas and exhausts it. Since the amount of gas H ₂ is controlled only when necessary, the deterioration of the expensive hydrogen permeation filter 35 is slowed down compared to the conventional method where a hydrogen permeation filter installed in a hydrogen gas separation device is always used. The cost and effort required for cleaning and replacing them can be reduced.

Furthermore, by measuring and controlling the CO gas concentration, the CO gas concentration in the atmospheric gas in the carburizing chamber 3 can be stably maintained at an appropriate carburizing concentration suitable for carburizing.

In addition, since the hydrogen component is removed from the atmospheric gas and the carbon component is reused, the amount of expensive carrier gas CG and enriched gas EG to be supplied and the amount that is burned and discharged from the exhaust pipe 8 without contributing to carburization are reduced. This reduces running costs and environmental pollution.

[Embodiment 4B]
In the carburizing apparatus in Embodiment 4B, in the carburizing apparatus in Embodiment 4A, as shown in parentheses () in FIG. 6, the concentration of CO gas contained in the atmospheric gas in the carburizing chamber 3 is detected. In place of the CO gas concentration measuring device 6, a hydrogen gas concentration measuring device 9 for detecting the hydrogen gas concentration contained in the atmospheric gas in the carburizing chamber 3 is provided, and other than that, the carburizing treatment in Embodiment 4A is performed. It was configured in the same way as the device.

Here, in the carburizing apparatus in Embodiment 4B, the carburizing process gradually reduces the CO gas concentration contained in the atmospheric gas in the carburizing process chamber 3, while increasing the hydrogen gas concentration. When the hydrogen gas concentration contained in the atmospheric gas detected by the measuring device 9 and output to the control device 7 exceeds the appropriate carburizing concentration, the control device 7 controls the output adjustment device 32, and the control device 7 controls the output adjustment device 32. The circulation pump 31 increases the amount of atmospheric gas guided to the hydrogen gas separation device 34 through the circulation path 30, thereby increasing the amount of hydrogen gas _H2 separated from the atmospheric gas by the hydrogen gas separation device 34. The hydrogen gas H ₂ separated as above is sucked and discharged through the hydrogen gas guide pipe 34 b by the hydrogen gas suction pump 34 a, while the atmospheric gas after the hydrogen gas H ₂ has been separated is passed through the circulation path 30 to the carburizing treatment chamber. 3, and the treated material W is carburized in the carburizing chamber 3.

Here, when the hydrogen gas H ₂ contained in the atmospheric gas is separated and discharged by the hydrogen gas separation device 34 as described above, the proportion of CO gas contained in the remaining atmospheric gas increases, and in this way, the CO gas When the remaining atmospheric gas with an increased proportion of is returned to the carburizing chamber 3, the CO gas concentration contained in the atmospheric gas within the carburizing chamber 3 increases, while the hydrogen gas concentration decreases.

Then, when the concentration of hydrogen gas contained in the atmospheric gas in the carburizing chamber 3 decreases and the concentration of hydrogen gas contained in the atmospheric gas in the carburizing chamber 3 reaches the appropriate concentration for carburizing, the control device 7 The output adjustment device 32 is adjusted to reduce the amount of atmospheric gas guided to the hydrogen gas separation device 34 through the circulation path 30 by the circulation pump 31, and the hydrogen gas separation device 34 removes the atmospheric gas from the atmospheric gas. The amount of hydrogen gas H ₂ to be separated is adjusted to maintain the concentration of hydrogen gas contained in the atmospheric gas at an appropriate concentration for carburizing, and the material W to be carburized is carburized in the carburizing chamber 3.

As a result, the carburizing apparatus according to Embodiment 4B also provides the same effects as the carburizing apparatus according to Embodiment 4A.

In each of the above embodiments, two types of gases, carrier gas CG and enrichment gas EG, are used for carburizing, but the carburizing gases required for carburizing may be one type or three or more types. Needless to say.

1a: First door 1b: Second door 2: Introduction chamber 3: Carburizing chamber 3a: Stirring fan 4: Carrier gas supply pipe 4a: Flow rate adjustment valve 5: Enrich gas supply pipe 5a: Flow rate adjustment valve 6: CO gas concentration Measuring device 7: Control device 8: Exhaust pipe 8a: Exhaust adjustment valve 9: Hydrogen gas concentration measuring device 10: First circulation path 11: First circulation pump 12: First extraction valve 13: Cooling device 14: Hydrogen gas separation device 14a: Hydrogen gas suction pump 14b: Hydrogen gas guide pipe 15: Hydrogen permeation filter 20: Second circulation path 21: Second circulation pump 22: Second extraction valve 23: Cooling device 30: Circulation path 31: Circulation pump 32: Output Adjustment device 33: Cooling device 34: Hydrogen gas separation device 34a: Hydrogen gas suction pump 34b: Hydrogen gas guide pipe 34c: Exhaust control valve 35: Hydrogen permeation filter 36: Flow rate adjustment valve CG: Carrier gas EG: Enriched gas H ₂ : Hydrogen gas W: Processing material

Claims (11)

A carburizing chamber for carburizing the treated material, a carrier gas supply pipe for supplying a carrier gas containing CO gas and hydrogen gas into the carburizing chamber, and an enrichment chamber for supplying an enrichment gas containing hydrocarbon gas as a main component. In a carburizing treatment apparatus equipped with a gas supply pipe, hydrogen gas contained in the atmospheric gas is separated and taken out into a first circulation path in which the atmospheric gas in the carburizing chamber is extracted from the carburizing chamber and circulated. A hydrogen gas separation device is provided, and a second circulation path is provided for extracting and circulating the atmospheric gas in the carburizing chamber, and a CO gas concentration in the carburizing chamber is detected. A gas concentration measuring device and/or a hydrogen gas concentration measuring device that detects the hydrogen gas concentration is provided, and the CO gas concentration and/or hydrogen gas concentration detected by the above-mentioned CO gas concentration measuring device and/or hydrogen gas concentration measuring device is provided. A carburizing treatment apparatus characterized in that a control device controls which of the first circulation path and the second circulation path the atmospheric gas in the carburization chamber is guided to based on the above. In the carburizing treatment apparatus according to claim 1, when the CO gas concentration contained in the atmospheric gas in the carburizing chamber detected by the CO gas concentration measuring device is a carburizing appropriate concentration suitable for carburizing treatment, The control device guides the atmospheric gas in the carburizing chamber to the second circulation path to circulate the atmospheric gas in the carburizing chamber, while also controlling the atmospheric gas in the carburizing chamber detected by the CO gas concentration measuring device. When the concentration of CO gas contained in the carburizing process becomes lower than the appropriate concentration for carburizing, the control device guides the atmospheric gas in the carburizing process chamber to the first circulation path, and removes the hydrogen contained in the atmospheric gas. A carburizing treatment apparatus characterized in that the gas is separated and taken out by the hydrogen gas separation device, and the remaining atmospheric gas is returned into the carburizing treatment chamber. In the carburizing treatment apparatus according to claim 1, when the hydrogen gas concentration contained in the atmospheric gas in the carburizing chamber detected by the hydrogen gas concentration measuring device is a carburizing appropriate concentration suitable for carburizing treatment, The control device guides the atmospheric gas in the carburizing chamber to the second circulation path to circulate the atmospheric gas in the carburizing chamber, while also controlling the atmospheric gas in the carburizing chamber detected by the hydrogen gas concentration measuring device. When the concentration of hydrogen gas contained exceeds the appropriate carburizing concentration suitable for carburizing, the control device guides the atmospheric gas in the carburizing chamber to the first circulation path to remove the hydrogen gas contained in the atmospheric gas. A carburizing treatment apparatus characterized in that the hydrogen gas is separated and taken out by the hydrogen gas separation device, and the remaining atmospheric gas is returned into the carburizing treatment chamber. A carburizing chamber for carburizing the treated material, a carrier gas supply pipe for supplying a carrier gas containing CO gas and hydrogen gas into the carburizing chamber, and an enrichment chamber for supplying an enrichment gas containing hydrocarbon gas as a main component. In a carburizing treatment apparatus equipped with a gas supply pipe, a hydrogen gas for separating and extracting hydrogen gas contained in the atmospheric gas is added to a circulation path for extracting and circulating the atmospheric gas in the carburizing chamber from the carburizing chamber. A separation device is provided, and an exhaust control valve is provided in a hydrogen gas guide pipe that guides the hydrogen gas separated by the hydrogen gas separation device, and a CO gas concentration is detected in the atmospheric gas in the carburizing chamber. A gas concentration measuring device and/or a hydrogen gas concentration measuring device for detecting hydrogen gas concentration is provided, and the CO gas concentration detected by the CO gas concentration measuring device and/or the hydrogen detected by the hydrogen gas concentration measuring device is provided. A carburizing treatment apparatus characterized in that a control device controls opening and closing of the exhaust control valve provided in the hydrogen gas guide pipe based on the gas concentration. In the carburizing treatment apparatus according to claim 4, when the CO gas concentration contained in the atmospheric gas in the carburizing chamber detected by the CO gas concentration measuring device is a carburizing appropriate concentration suitable for carburizing treatment, The control device closes the exhaust control valve provided on the hydrogen gas guide pipe to take out the atmospheric gas in the carburizing chamber and circulate it through the circulation path, while measuring the CO gas concentration. When the CO gas concentration contained in the atmospheric gas in the carburizing chamber detected by the device becomes less than the appropriate carburizing concentration suitable for carburizing treatment, the control device controls the Carburizing characterized by opening an exhaust control valve, discharging the hydrogen gas separated from the atmospheric gas by the hydrogen gas separation device through the hydrogen gas guide pipe, and returning the remaining atmospheric gas into the carburizing chamber. Processing equipment. In the carburizing treatment apparatus according to claim 4, when the hydrogen gas concentration contained in the atmospheric gas in the carburizing chamber detected by the hydrogen gas concentration measuring device is a carburizing appropriate concentration suitable for carburizing treatment, The control device closes the exhaust control valve provided in the hydrogen gas guide pipe to take out the atmospheric gas in the carburizing chamber and circulate it through the circulation path, while measuring the hydrogen gas concentration. If the concentration of hydrogen gas contained in the atmospheric gas in the carburizing chamber detected by the device exceeds the appropriate carburizing concentration suitable for carburizing, the control device controls the exhaust gas installed in the hydrogen gas guide pipe. A carburizing process characterized by opening a control valve, discharging the hydrogen gas separated from the atmospheric gas by the hydrogen gas separation device through the hydrogen gas guide pipe, and returning the remaining atmospheric gas into the carburizing process chamber. Device. A carburizing chamber for carburizing the treated material, a carrier gas supply pipe for supplying a carrier gas containing CO gas and hydrogen gas into the carburizing chamber, and an enrichment chamber for supplying an enrichment gas containing hydrocarbon gas as a main component. In a carburizing treatment apparatus equipped with a gas supply pipe, a hydrogen gas for separating and extracting hydrogen gas contained in the atmospheric gas is added to a circulation path for extracting and circulating the atmospheric gas in the carburizing chamber from the carburizing chamber. A separation device is provided, a hydrogen gas guide pipe is provided to guide the hydrogen gas separated by the hydrogen gas separation device, and a CO gas concentration measuring device is provided to detect the CO gas concentration contained in the atmospheric gas in the carburizing chamber. and/or providing a hydrogen gas concentration measuring device for detecting hydrogen gas concentration, based on the CO gas concentration detected by the CO gas concentration measuring device and/or the hydrogen gas concentration detected by the hydrogen gas concentration measuring device; A carburizing treatment apparatus, characterized in that a control device controls the amount of atmospheric gas guided to the hydrogen gas separation device through the circulation path. In the carburizing treatment apparatus according to claim 7, when the CO gas concentration contained in the atmospheric gas in the carburizing chamber detected by the CO gas concentration measuring device becomes less than the appropriate carburizing concentration suitable for carburizing treatment. is characterized in that the control device increases the amount of atmospheric gas guided to the hydrogen gas separation device through the circulation path, thereby increasing the amount of hydrogen gas separated from the atmospheric gas by the hydrogen gas separation device. Carburizing treatment equipment. In the carburizing treatment apparatus according to claim 7, when the hydrogen gas concentration contained in the atmospheric gas in the carburizing chamber detected by the hydrogen gas concentration measuring device exceeds the appropriate carburizing concentration suitable for carburizing treatment, , characterized in that the control device increases the amount of atmospheric gas guided to the hydrogen gas separation device through the circulation path, thereby increasing the amount of hydrogen gas separated from the atmospheric gas by the hydrogen gas separation device. carburizing treatment equipment. In the carburizing treatment apparatus according to claim 7, when the control device controls the amount of atmospheric gas to be circulated through the circulation path, in the circulation path in which the atmospheric gas is taken out from the carburizing chamber and circulated, A flow rate adjustment valve is provided at a position upstream of the hydrogen gas separation device, and the flow rate adjustment valve is controlled by the control device based on the CO gas concentration and hydrogen gas concentration contained in the atmospheric gas in the carburizing chamber. A carburizing treatment apparatus characterized in that the amount of atmospheric gas guided to the hydrogen gas separation apparatus through the circulation path is controlled by adjusting the amount of atmospheric gas. In the carburizing treatment apparatus according to claim 7, when controlling the amount of atmospheric gas to be circulated through the circulation path by the control device, output adjustment is performed to adjust the output of a circulation pump that circulates the atmospheric gas through the circulation path. A device is provided, and the control device adjusts the output adjustment device based on the CO gas concentration and hydrogen gas concentration contained in the atmospheric gas in the carburizing chamber, and the circulation pump causes the circulation path to flow through the carburizing chamber. A carburizing treatment apparatus characterized by controlling the amount of atmospheric gas introduced into the hydrogen gas separation apparatus.

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