JP7420631B2 - Heat sink and its manufacturing method - Google Patents

Description

The present invention relates to a heat sink and a method of manufacturing the same, and more particularly to a heat sink with excellent heat dissipation and a method of manufacturing the same.

Heat sinks are used to prevent damage to electronic components by dissipating or cooling heat generated in electronic components mounted on moving objects such as railroad cars, aircraft, and automobiles, and electrical equipment.

In recent years, there has been an increase in the number of applications in which intense heat is applied to electronic components inside moving bodies and electronic devices, and various studies have been conducted to improve the heat dissipation efficiency of heat sinks. For example, in Patent Document 1, a plate-like member having a substantially L-shape in side view, which is composed of a connecting portion and one fin provided at one end of the connecting portion, is used, and an angle formed between one fin and a base plate is used. A heat sink configured such that the angle is an acute angle has been proposed. When manufacturing such a heat sink by irradiating a laser beam or the like from the inside of a plate-shaped member, it is possible to increase the bonding area between the connection part and the base plate, resulting in excellent heat dissipation. It is disclosed that it has.

Japanese Patent Application Publication No. 2018-190847

However, in the heat sink disclosed in Patent Document 1, although the fins and the base plate are joined, the adjacent fins are spaced apart without contacting each other, so that the heat from the heating element is transferred to the base plate. Since the structure is such that heat is transmitted to the individual fins through the plate and radiated, the heat dissipation performance may not be sufficient. In addition, with such a heat sink, it is necessary to laser weld the entire bottom part multiple times for each individual fin, which requires a considerable amount of time for welding (processing). This also poses the problem that distortion is likely to occur due to heat accumulation.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a heat sink with excellent heat dissipation performance and a method for manufacturing the same.

The inventors of the present invention have made extensive studies to solve the above-mentioned problems. As a result, the heat sink has a first main surface that is a heat input surface for heat from the heating element and a second main surface that is a heat radiation surface, and a base member made of a thermally conductive material and a second main surface that is disposed on the second main surface. and a plurality of fins arranged adjacent to each other in a row, each fin having a base disposed facing the second main surface, and a bending portion located at one end of the base, and a plurality of fins arranged adjacent to each other. The plurality of fins have a fin body portion extending in a direction away from each other, and the plurality of fins have a base portion that constitutes one fin and a bent portion that constitutes the other fin, when viewed from two adjacent fins. The present inventors have discovered that by having at least an integral joint at the boundary position formed by the base member and the second main surface of the base member, excellent heat dissipation is achieved, and the present invention has been completed. Specifically, the present invention provides the following.

(1) A base member made of a thermally conductive material, which has a first main surface that is a heat input surface for heat from the heating element and a second main surface that is a heat radiation surface, and on the second main surface, a plurality of fins arranged adjacent to each other, each fin having a base portion disposed facing the second main surface, and a bent portion located at one end of the base portion, and a plurality of fins arranged adjacent to each other, each fin extending from a base portion facing the second main surface and a bent portion located at one end of the base portion; and a fin main body extending in a direction away from the fin, and when viewed from two adjacent fins of the plurality of fins, the other end of the base forming one fin and the other end forming the other fin. A heat sink having at least an integral joint portion at a boundary position formed by a bent portion and a second main surface of the base member.
(2) The heat sink according to (1) above, wherein the fin has an angle of approximately 90° between the base and the fin main body.
(3) The heat sink according to (1) above, wherein the fin has an angle of less than 90° between the base and the fin main body.
(4) The heat sink according to (2) or (3), wherein the plurality of fins have the same angle between the base and the fin main body.
(5) The plurality of fins include a first fin in which the angle between the base and the fin main body is less than 90°, and a second fin in which the angle between the base and the fin main body is 90° or more. The heat sink according to (1) above, comprising a fin.
(6) The heat sink according to any one of (1) to (5) above, wherein the base member is a vapor chamber composed of two heat conductive plates made of a heat conductive material.
(7) The method for manufacturing a heat sink according to any one of (1) to (6) above, including the step of aligning and arranging a plurality of fins adjacent to each other on the second main surface of the base member. , when looking at two adjacent fins of the plurality of aligned fins, the other end of the base constituting one fin, the bent part constituting the other fin, and the base of the one fin. a step of simultaneously joining the other end portion and the second main surface of the base member facing the bent portion constituting the other fin by laser welding to form a joint portion. Production method.
(8) The base member is a vapor chamber composed of two heat conductive plates made of a heat conductive material, and the base of the fin is joined to the first main surface of the base member by laser welding. ,
The method for manufacturing a heat sink according to (7) above, wherein the two heat conductive plates are joined by laser welding from the outer surface side of the first heat conductive plate or the second heat conductive plate.

According to the present invention, it is possible to provide a heat sink with excellent heat dissipation and a method for manufacturing the same.

FIG. 1 is a schematic perspective view of a heat sink according to a first embodiment of the present invention. FIG. 2 is a schematic side view showing two adjacent fins of the heat sink according to the first embodiment of the present invention. FIG. 3 is a schematic perspective view of a heat sink according to a second embodiment of the present invention. FIG. 7 is a schematic side view showing two adjacent fins of a heat sink according to a second embodiment of the present invention. FIG. 7 is a schematic perspective view of a heat sink according to a third embodiment of the present invention. FIG. 7 is a schematic side view showing three adjacent fins of a heat sink according to a third embodiment of the present invention. FIG. 3 is a schematic diagram for explaining a method of manufacturing a heat sink according to the first embodiment. FIG. 3 is a schematic diagram for explaining the influence of the angle between the base and the fin main body on laser implantation in the heat sink manufacturing method of the first to third embodiments. FIG. 7 is a schematic diagram for explaining a method of manufacturing a heat sink according to a third embodiment. FIG. 2 is a schematic diagram for explaining a heat sink of an embodiment applied to a vapor chamber and a method for manufacturing the same, and (a) is a diagram schematically showing laser irradiation directions L1 to L3 when manufacturing the heat sink. , (b) are diagrams schematically showing the positions of joints formed after laser irradiation in the laser irradiation directions L1 to L3 shown in (a).

Preferred embodiments of the present invention will be described in detail below, but the present invention is not limited to the following embodiments.

1. Heat Sink The heat sink of the present invention has a first main surface that is a heat input surface for heat from a heating element and a second main surface that is a heat radiation surface, and includes a base member made of a thermally conductive material and a second main surface. and a plurality of fins arranged adjacent to each other on the top. Each fin has a base disposed facing the second main surface, and a fin main body extending in a direction away from the second main surface from a bent portion located at one end of the base. When looking at two adjacent fins among the plurality of fins, the base member is formed by the other end of the base that constitutes one fin, the bent portion that constitutes the other fin, and the second main surface of the base member. at least an integral joint at a boundary position.

Note that the term "thermal conductive material" refers to a material whose thermal conductivity at 25° C. is 10 Wm ⁻¹ K ⁻¹ or more.

In addition, in the following, for convenience, only an example in which the first principal surface and the second principal surface are different surfaces will be specifically described, but the first principal surface and the second principal surface, that is, the heat input surface and the heat radiation surface. This also includes an embodiment in which the two are on the same plane.

FIG. 1 is a schematic perspective view of a heat sink according to a first embodiment of the present invention. The heat sink 1 shown in FIG. 1 has a first main surface 21 that is a heat input surface for heat from a heating element, and a second main surface 22 that is a heat radiation surface, and a base member 2 made of a thermally conductive material. , a plurality of fins 3, five fins 3-1 to 3-5 in FIG. 1, are arranged adjacent to each other on the second main surface 22. Further, each fin 3 includes a base 31 disposed facing the second main surface 22 and a fin body extending in a direction away from the second main surface 22 from a bent portion 32 located at one end of the base 31. 33.

FIG. 2 is a schematic side view showing two adjacent fins of the heat sink 1 according to the first embodiment of the present invention. As shown in FIG. 2, when looking at two adjacent fins 3-1 and 3-2 among the plurality of fins 3-1 to 3-5, the base 31- A joint portion 4-1 is formed at an interface having a substantially T-shaped cross section formed by the other end portion 34-1 of the base member 2, the bent portion 32-2 constituting another fin, and the second main surface 22 of the base member 2. have at least

As a result of studies by the present inventors, the base portions 31-1 and 31-2 of each fin 3-1 and 3-2 do not necessarily need to be joined to the base member 2 on its entire surface, and one fin 3-1 A joint portion 4-1 formed by the other end portion 34-1 of the base portion 31-1, the bent portion 32-2 forming the other fin 3-2, and the second main surface 22 of the base member 2. As long as they are joined together, a structure is obtained in which the heat from the heating element is transmitted to all adjacent fins through the base plate and radiated, and as in Patent Document 1, the base of each fin 3-1, 3-2 It has been found that thermal conductivity can be effectively increased without increasing the bonding area between the lower surface and the second main surface of the base member. It has also been found that the heat sink 1 exhibits excellent heat dissipation properties even when compared with a so-called die-cast model heat sink cast using a metal mold.

That is, the base portion 31-1 may or may not be joined to the base member 2 other than the joint portion 4-1. Of course, a heat sink in which the base portion 31-1 of the fin 3-1 is joined to the base member 2 in areas other than the joint portion 4-1 has slightly higher heat dissipation than a heat sink in which only the joint portion 4-1 is joined. This means that in a heat sink where only the joint part 4-1 is joined, a part of the lower surface of the base part 31-1 other than the joint part 4-1 is on the nano-order to millimeter-order with respect to the second main surface of the base member 1. This is probably due to the fact that there is no contact in some parts, but considering that the work time for individually welding the lower surfaces of the bases 31-1 of each fin 3-1 to 3-5 can be omitted, it is a short process. This is advantageous in that a heat sink having excellent heat dissipation can be efficiently manufactured in a bonding time of hours.

In the heat sink 1 according to the first embodiment, the angle between the base portion 31 and the fin body portion 33 of the fin 3 is approximately 90°. In the fin 3, since the angle between the base portion 31 and the fin main body portion 33 is approximately 90°, it is possible to accommodate the fins in a rectangular parallelepiped-shaped housing (such as a duct) without reducing the number of fins. can. Note that "approximately 90°" here means a range of 90°±5°, taking into consideration dimensional errors during manufacturing.

Further, in the heat sink 1 shown in FIG. 1, the fins 3 have the same angle between the base portion 31 and the fin body portion 33. In this way, in the fin 3, since the angles formed by the base portion 31 and the fin main body portion 33 are the same, there is no unevenness of heat throughout the fin 3, and generation of heat accumulation can be prevented. In addition, when manufacturing using the manufacturing method described later, since the angles formed by the base 31 and the fin main body 33 are the same, the spaces in which the laser is fired when providing the integral joint 4 are equally spaced. , moldability is improved.

The material constituting the base member 2 is not particularly limited as long as it is a thermally conductive material, that is, a material with a thermal conductivity of 10 Wm ⁻¹ K ⁻¹ or more at 25° C. Aluminum, aluminum alloy, copper, copper, etc. It may be made of alloy, SUS, etc.

The material constituting the fins 3 is not particularly limited as long as it is a thermally conductive material, that is, a material whose thermal conductivity at 25° C. is 10 Wm ⁻¹ K ⁻¹ or more, and includes aluminum, aluminum alloy, copper, and copper alloy. , SUS, etc. Note that the material constituting the fins 3 does not necessarily have to have the same composition as the base member 2 described above, but from the viewpoint of efficient heat conduction, the material constituting the fins 3 is the same as the base member 2 described above. Preferably, they have the same compositional components.

The shape of the integral joint portion 4 is not particularly limited as it varies depending on the specific method of integration, and is not limited to the triangular shape as shown in FIG. Further, even if the shape is approximately triangular, its angle and direction are not limited. Note that when integrated by welding by laser irradiation, it often becomes a substantially triangular shape, but its direction differs depending on the direction of laser irradiation. The details will be described later.

The material constituting the integral joint portion 4 is not particularly limited as long as it has thermal conductivity, and may be aluminum, copper, or the like. Moreover, it is preferable that the integral joint part 4 has a composition component contained in at least one of the material constituting the base member 2 and the material constituting the fin 3. It is more preferable to have the composition components contained in both of the materials constituting the material. In one embodiment, it is preferable that the material constituting the base member 2 and the material constituting the fin 3 are melted and the compositional components contained in both materials are welded. Moreover, it is preferable that the material constituting the base member 2, the material constituting the fin 3, and the material constituting the integral joint part 4 all have the same compositional components from the viewpoint of efficient heat conduction.

In the above example, the angle between the base 31 and the fin main body 33 of the fin 3 is approximately 90°, but the fin can be used even if the angle between the base and the fin main body is less than 90°. good. Hereinafter, such embodiments will be described by giving specific examples. FIG. 3 is a schematic perspective view of a heat sink according to a second embodiment of the present invention. Moreover, FIG. 4 is a schematic side view showing two adjacent fins of a heat sink 1A according to the second embodiment of the present invention. Note that the heat sink of the second embodiment and the heat sink of the first embodiment differ only in the angle formed between the base and the fin main body. Further, the reference numerals of the respective parts of the heat sink of the second embodiment shown in FIGS. 3 and 4 are the same as the reference numerals of the respective parts of the heat sink of the first embodiment shown in FIGS. 1 and 2 with "A" added. , and if the numbers are the same, they mean the same part.

In this heat sink 1A, the angle between the base 31A and the fin main body 33A of the fin 3A is less than 90°. In the fin 3A, since the angle between the base 31A and the fin main body 33A is less than 90°, for example, when manufactured by the manufacturing method described later, it is difficult to irradiate the laser in the perpendicular direction to the base member 2A. Therefore, it is easy to improve work efficiency (see FIG. 8. Details will be described later).

Further, the plurality of fins are composed of a first fin in which the angle between the base and the fin main body is less than 90°, and a second fin in which the angle between the base and the fin main body is 90° or more. You can. Hereinafter, such embodiments will be described by giving specific examples. FIG. 5 is a schematic perspective view of a heat sink according to a third embodiment of the present invention. Moreover, FIG. 6 is a schematic side view showing three adjacent fins of a heat sink 1B according to the third embodiment of the present invention. Note that the heat sink of the third embodiment and the heat sink of the first embodiment differ only in the angle formed between the base and the fin main body. Further, the reference numerals of each part of the heat sink of the third embodiment shown in FIGS. 5 and 6 are the same as the reference numerals of each part of the heat sink of the first embodiment shown in FIGS. 1 and 2 with "B" added. , and if the numbers are the same, they mean the same part.

In the heat sink 1B of this embodiment, as shown in FIG. -3, 3B-5, and second fins 3B-2, 3B-4 whose angle between the base and the fin main body is 90° or more is shown. In this way, the plurality of fins 3B-1 to 3B-5 are composed of the first fins 3B-1, 3B-3, 3B-5 and the second fins 3B-2, 3B-4, so that, for example, When manufactured using the manufacturing method described later, as shown in FIGS. 6 and 8(c), the fin body portion 33B-2 and the fin body portion 33B-3 of the two fins 3B-2 and 3B-3 are By irradiating the laser while changing the laser irradiation direction from the partitioned space, it is possible to form two integral joints 4B-1 and 4B-2, which has the advantage of increasing the processing speed. , which has the advantage of reducing distortion (see FIG. 8; details will be described later). Note that, when the heat sink is viewed from the side, it is preferable that the fin main body portions do not protrude outward beyond the end portions of the base plate. For example, in the heat sink 1B, in the fin 3B-1 having the fin body portion 33B-1 closest to the end of the base plate 2B, the angle between the base portion 31B-1 and the fin body portion 33B-1 is less than 90°. By setting the angle between the base portion 31B-1 and the fin body portion 33B-1 to be less than 90° in this manner, it is possible to accommodate the fin in a cubic duct and save space. In addition, in the heat sink 1B, unlike the heat sink 1 and the heat sink 1A, the reason why the integral joint part 4B spreads from the top to the bottom is to make a difference in the direction of laser irradiation for welding, as described above. The details will be described later.

2. Method for manufacturing a heat sink The method for manufacturing a heat sink of the present invention is any of the methods for manufacturing the heat sink described above, and includes the step of aligning and arranging a plurality of fins adjacent to each other on the second main surface of the base member; When looking at two adjacent fins of a plurality of aligned fins, the other end of the base constituting one fin, the bent part constituting the other fin, and the other end of the base of one fin and a second main surface of the base member facing the bent portion constituting the other fin, are simultaneously joined by laser welding to form an integral joint.

First, a method for manufacturing the heat sink of the first embodiment will be described using FIG. 7. FIG. 7 is a schematic diagram for explaining the method for manufacturing the heat sink of the first embodiment. First, a plurality of fins 3-1 to 3-5 are aligned and arranged adjacent to each other on the second main surface 22 of the base member 2 (FIGS. 7(a) to 7(b)). Next, the plurality of fins 3-1 to 3-5 arranged in this way are looked at as two adjacent fins (cases 3-1 and 3-2 will be explained below). The other end 34-1 of the base 31-1 forming the fin 3-1, the bent portion 32-2 forming the other fin 3-2, and the other end 34-1 of the base 31-1 of the first fin 3-1. The end portion 34-1 and the second main surface 22 of the base member 2 facing the bent portion 32-2 constituting the other fins 3-2 are welded for a short time by laser welding that scans and irradiates the laser beam L. The integral joint portion 4-1 can be formed by (FIGS. 7(b) to (d)).

In this way, the other end portion 34-1 of the base portion 31-1 constituting one fin 3-1, the bent portion 32-2 constituting the other fin 3-2, and the other end portion 34-1 of the base portion 31-1 constituting one fin 3-1, Welding is performed by melting at least one of the second main surfaces 22 of the base member 2 facing the other end portion 34-1 of the base and the bent portion 32-2 constituting the other fin 3-2 by laser irradiation. By simultaneously bonding these together, any of the heat sinks described above can be manufactured. Such a heat sink exhibits excellent thermal conductivity.

Regarding the method of manufacturing the heat sink of the first to third embodiments described above, the influence of the angle between the base and the fin main body on laser implantation will be described. FIG. 8 is a schematic diagram for explaining the influence of the angle between the base and the fin main body on laser implantation in the heat sink manufacturing methods of the first to third embodiments.

FIG. 8A is a diagram schematically showing the laser irradiation position when manufacturing the heat sink of the first embodiment. In this manner, when manufacturing the heat sink of the first embodiment using the laser welding method that irradiates the laser L, it is necessary to irradiate the base member 2 with the laser obliquely.

FIG. 8(b) is a diagram schematically showing the laser irradiation position when manufacturing the heat sink of the second embodiment. In this way, when manufacturing the heat sink of the second embodiment by the laser welding method, the laser may be applied perpendicularly to the base member 2A. (direction) may not be perpendicular but may be inclined). Normally, laser melting work is performed with the base member 2A placed horizontally, so being able to drive the laser from the vertical direction in this way helps improve work efficiency, and also from the perspective of automating the process. Useful.

FIG. 8(c) is a diagram schematically showing the laser irradiation position when manufacturing the heat sink of the third embodiment. In this way, when the heat sink of the third embodiment is manufactured using the laser welding method, the laser irradiation can be performed twice on the same section at different angles, which increases the processing speed. This has the advantage of reducing distortion. Note that, similarly to the heat sink manufacturing methods of the first and second embodiments described above, laser irradiation may be performed on one bent portion in one laser irradiation.

Note that the laser may be applied to a surface (first main surface 21B) of the base member that is different from the surface on which the fins are arranged (second main surface 22B). FIG. 9 is a schematic diagram for explaining a method of manufacturing a heat sink according to the third embodiment. When the laser is irradiated as shown in FIG. 9, a triangular integral joint portion 4B oriented as shown in FIG. 5 is obtained.

3. Application to Vapor Chamber The heat sink described above can be applied to, for example, a vapor chamber. Specifically, in the heat sink of such an embodiment, the base member is a vapor chamber made of two heat conductive plates made of a heat conductive material. FIG. 10 is a schematic diagram for explaining a heat sink of an embodiment applied to a vapor chamber and a method of manufacturing the same.

In the method for manufacturing a heat sink of this embodiment, the base members are vapor chambers 2C-1 and 2C-2 that are composed of two heat conductive plates made of a heat conductive material. The bases of the fins 3C-1, 3C-2, and 3C-3 are joined by laser welding (L1, L2) to the first main surface 22C of the base member, and the two heat conductive plates 2C-1, 2C -2 shall be joined by laser (L3) welding from the outer surface side of the first heat conductive plate 2C-1 or 2C-2.

Note that the present invention is not limited to the embodiments described above, and can be freely modified without departing from the spirit of the present invention.

[Example]
EXAMPLES Hereinafter, the present invention will be described in more detail with reference to Examples, but the present invention is not limited to the following Examples.

[Preparation of sample material (analytical model)]
(Example 1)
A heater was placed in the center of one main surface of a plate-shaped base member (thickness: 0.5 mm). On the other hand, 13 fins (fin main body: 0.5 mm thick, base: 0.5 mm thick) having an L-shape when viewed from the side were aligned and arranged on the other main surface of the base member. Next, when looking at two adjacent fins, the approximate cross section T formed by the other end of the base forming one fin, the bent portion forming the other fin, and the second main surface of the base member A heat sink test material was obtained by laser welding a 1 mm wide area of the letter-shaped interface in a direction parallel to the long side direction of the fin. Aluminum was used for the base member and fins. Note that there are gaps on the micro to nano order except for the areas where laser bonding was performed.

(Example 2)
When looking at the position of laser bonding between two adjacent fins, the position formed by the other end of the base constituting one fin, the bent part constituting the other fin, and the second main surface of the base member. A test material was obtained in the same manner as in Example 1, except that the entire base of the fin was laser welded, and had an integral joint at the boundary position.

(Comparative example 1)
When looking at the position of laser bonding between two adjacent fins, the position formed by the other end of the base constituting one fin, the bent part constituting the other fin, and the second main surface of the base member. A sample material was obtained in the same manner as in Example 1, except that a 1 mm width area at the center of the base of the fin, which did not have an integral joint at the boundary position, was laser welded in a direction parallel to the long side direction of the fin.

(Comparative example 2)
A material with a shape in which 13 fins (0.5 mm thick) extend away from the surface of the base member from a plate-shaped base member (0.5 mm thick) and are arranged in parallel. (assumed to be manufactured by die-casting method), we performed thermal analysis and calculated the thermal resistance of this shape. The atmosphere of the base member, the size of the fins, and the spacing between the fins were the same as in Example 1. The base member and fins were made of aluminum.

〔evaluation〕
The test materials of Examples 1 and 2 and Comparative Example 1 were placed in a room adjusted to a room temperature of 20° C., the heat input from the heater to the base plate was 10 W, and the thermal resistance was measured (calculated). The results are shown in Table 1 below.

1, 1A, 1B
2, 2A, 2B, 2C Base member 2D-1, 2D-2 Vapor chamber 21, 21A, 21B First main surface 22, 22A, 22B Second main surface 3, 3-1, 3-2, 3-3, 3-4, 3-5, 3A, 3A-1, 3A-2, 3B-1, 3B-2, 3B-3, 3B-4, 3B-5, 3C-1, 3C-2, 3C-3 Fin 31, 31-1, 31-2, 31A, 31A-1, 31A-2, 31B, 31B-1, 31B-2, 31B-3, 31B-3, 31B-4, 31B-5 Base 32, 32- 1, 32-2, 32A, 32A (1), 32A (2) Bent part 33, 33A, 33B, 33B-1, 33B-2, 33-B3 Fin body part 34, 34-1, 34-2, 34A , 34A-1, 34A-2, 34B, 34B-1, 34B-2, 34B-3 Other end 4, 4-1, 4A, 4A-1, 4B-1 Integral joint B1, B2, B3 Weld bead L, L1, L2, L3 laser

Claims (8)

a base member made of a thermally conductive material and having a first main surface that is a heat input surface for heat from the heating element and a second main surface that is a heat radiation surface;
a plurality of fins arranged adjacent to each other and aligned on the second main surface;
Each fin is
a base disposed facing the second main surface;
a fin main body extending from a bent portion located at one end of the base in a direction away from the second main surface;
When looking at two adjacent fins among the plurality of fins, the other end of the base constituting one fin, the bent portion constituting the other fin, and the second main surface of the base member A heat sink characterized in that it has at least an integral joint at a boundary position formed therein. The heat sink according to claim 1, wherein the fin has an angle of about 90° between the base and the fin main body. In the fin, the angle between the base and the fin body is such that the angle between the edge of the other end in the thickness direction of the fin body at the end of the fin body remote from the second main surface and the fin body are 2. The fin body according to claim 1, which is larger than the angle formed by the base and the fin body when the angle formed by the base and the line connecting the other end is 90 degrees, but less than 90 degrees. heat sink. 4. The heat sink according to claim 2, wherein the plurality of fins have the same angle between the base and the fin main body. The plurality of fins include a first fin in which the angle between the base and the fin main body is less than 90°, and a second fin in which the angle between the base and the fin main body is 90° or more. A heat sink according to claim 1, comprising: The heat sink according to any one of claims 1 to 5, wherein the base member is a vapor chamber composed of two heat conductive plates made of a heat conductive material. A method for manufacturing a heat sink according to any one of claims 1 to 6, comprising:
aligning a plurality of fins adjacent to each other on the second main surface of the base member;
When looking at two adjacent fins of the plurality of aligned fins, the other end of the base constituting one fin, the bent part constituting the other fin, and the other end of the base of the one fin. a step of simultaneously joining the end portion and the second main surface of the base member facing the bent portion constituting the other fin by laser welding to form an integral joint portion. Production method. The base member is a vapor chamber composed of two heat conductive plates made of a heat conductive material,
The base of the fin is joined to the first main surface of the base member by laser welding,
The method for manufacturing a heat sink according to claim 7, wherein the two heat conductive plates are joined by laser welding from the outer surface side of the first heat conductive plate or the second heat conductive plate.

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