JP7413762B2 - Curable resin composition and cured film - Google Patents
Curable resin composition and cured film Download PDFInfo
- Publication number
- JP7413762B2 JP7413762B2 JP2019231207A JP2019231207A JP7413762B2 JP 7413762 B2 JP7413762 B2 JP 7413762B2 JP 2019231207 A JP2019231207 A JP 2019231207A JP 2019231207 A JP2019231207 A JP 2019231207A JP 7413762 B2 JP7413762 B2 JP 7413762B2
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- Prior art keywords
- meth
- acrylate
- parts
- resin
- resin composition
- Prior art date
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- 239000011342 resin composition Substances 0.000 title claims description 54
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 claims description 110
- 229920005989 resin Polymers 0.000 claims description 109
- 239000011347 resin Substances 0.000 claims description 109
- 239000000178 monomer Substances 0.000 claims description 50
- -1 oxime ester compound Chemical class 0.000 claims description 45
- 150000001412 amines Chemical class 0.000 claims description 17
- 239000003999 initiator Substances 0.000 claims description 17
- 239000002253 acid Substances 0.000 claims description 16
- 125000001302 tertiary amino group Chemical group 0.000 claims description 11
- 239000006229 carbon black Substances 0.000 claims description 3
- 239000012860 organic pigment Substances 0.000 claims description 3
- 239000010408 film Substances 0.000 description 53
- 238000006116 polymerization reaction Methods 0.000 description 51
- 239000000243 solution Substances 0.000 description 44
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 32
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 32
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 31
- 238000006243 chemical reaction Methods 0.000 description 29
- 239000000203 mixture Substances 0.000 description 29
- 239000000758 substrate Substances 0.000 description 21
- 239000002904 solvent Substances 0.000 description 20
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 16
- 239000011248 coating agent Substances 0.000 description 16
- 238000000576 coating method Methods 0.000 description 16
- 238000004519 manufacturing process Methods 0.000 description 16
- 150000001875 compounds Chemical class 0.000 description 15
- 229910052757 nitrogen Inorganic materials 0.000 description 14
- 238000000034 method Methods 0.000 description 13
- 238000003756 stirring Methods 0.000 description 13
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 12
- 238000003860 storage Methods 0.000 description 12
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 12
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 11
- 239000003963 antioxidant agent Substances 0.000 description 11
- 235000006708 antioxidants Nutrition 0.000 description 11
- 230000008859 change Effects 0.000 description 11
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 11
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 10
- 239000007789 gas Substances 0.000 description 9
- 150000003573 thiols Chemical class 0.000 description 9
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 8
- SOGAXMICEFXMKE-UHFFFAOYSA-N Butylmethacrylate Chemical compound CCCCOC(=O)C(C)=C SOGAXMICEFXMKE-UHFFFAOYSA-N 0.000 description 8
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 8
- 239000003795 chemical substances by application Substances 0.000 description 8
- 239000000126 substance Substances 0.000 description 8
- 239000006097 ultraviolet radiation absorber Substances 0.000 description 8
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 7
- 238000001816 cooling Methods 0.000 description 7
- 229920001187 thermosetting polymer Polymers 0.000 description 7
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 description 6
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 6
- 229920000178 Acrylic resin Polymers 0.000 description 6
- 239000004925 Acrylic resin Substances 0.000 description 6
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 6
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 6
- 239000006087 Silane Coupling Agent Substances 0.000 description 6
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 6
- 239000003729 cation exchange resin Substances 0.000 description 6
- 239000012986 chain transfer agent Substances 0.000 description 6
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 6
- 238000001035 drying Methods 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- JKNCOURZONDCGV-UHFFFAOYSA-N 2-(dimethylamino)ethyl 2-methylprop-2-enoate Chemical compound CN(C)CCOC(=O)C(C)=C JKNCOURZONDCGV-UHFFFAOYSA-N 0.000 description 5
- 229910021591 Copper(I) chloride Inorganic materials 0.000 description 5
- WOBHKFSMXKNTIM-UHFFFAOYSA-N Hydroxyethyl methacrylate Chemical compound CC(=C)C(=O)OCCO WOBHKFSMXKNTIM-UHFFFAOYSA-N 0.000 description 5
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 5
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 5
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 5
- 230000003078 antioxidant effect Effects 0.000 description 5
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 5
- 229920001577 copolymer Polymers 0.000 description 5
- OXBLHERUFWYNTN-UHFFFAOYSA-M copper(I) chloride Chemical compound [Cu]Cl OXBLHERUFWYNTN-UHFFFAOYSA-M 0.000 description 5
- 229940045803 cuprous chloride Drugs 0.000 description 5
- 238000011161 development Methods 0.000 description 5
- 230000018109 developmental process Effects 0.000 description 5
- 125000003700 epoxy group Chemical group 0.000 description 5
- IOLQWGVDEFWYNP-UHFFFAOYSA-N ethyl 2-bromo-2-methylpropanoate Chemical compound CCOC(=O)C(C)(C)Br IOLQWGVDEFWYNP-UHFFFAOYSA-N 0.000 description 5
- 125000000524 functional group Chemical group 0.000 description 5
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 5
- 239000003112 inhibitor Substances 0.000 description 5
- ZFSLODLOARCGLH-UHFFFAOYSA-N isocyanuric acid Chemical compound OC1=NC(O)=NC(O)=N1 ZFSLODLOARCGLH-UHFFFAOYSA-N 0.000 description 5
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 5
- 229920000642 polymer Polymers 0.000 description 5
- 238000002834 transmittance Methods 0.000 description 5
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 4
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 description 4
- CCTFMNIEFHGTDU-UHFFFAOYSA-N 3-methoxypropyl acetate Chemical compound COCCCOC(C)=O CCTFMNIEFHGTDU-UHFFFAOYSA-N 0.000 description 4
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical class C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 4
- BAPJBEWLBFYGME-UHFFFAOYSA-N Methyl acrylate Chemical compound COC(=O)C=C BAPJBEWLBFYGME-UHFFFAOYSA-N 0.000 description 4
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 4
- GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical compound CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 description 4
- 150000008065 acid anhydrides Chemical class 0.000 description 4
- 230000002378 acidificating effect Effects 0.000 description 4
- 239000003513 alkali Substances 0.000 description 4
- 125000003277 amino group Chemical group 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 239000002585 base Substances 0.000 description 4
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical class C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 4
- SWXVUIWOUIDPGS-UHFFFAOYSA-N diacetone alcohol Chemical compound CC(=O)CC(C)(C)O SWXVUIWOUIDPGS-UHFFFAOYSA-N 0.000 description 4
- 229910001873 dinitrogen Inorganic materials 0.000 description 4
- FJKIXWOMBXYWOQ-UHFFFAOYSA-N ethenoxyethane Chemical compound CCOC=C FJKIXWOMBXYWOQ-UHFFFAOYSA-N 0.000 description 4
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 4
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 4
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 4
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 4
- NWAHZAIDMVNENC-UHFFFAOYSA-N octahydro-1h-4,7-methanoinden-5-yl methacrylate Chemical compound C12CCCC2C2CC(OC(=O)C(=C)C)C1C2 NWAHZAIDMVNENC-UHFFFAOYSA-N 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 238000010926 purge Methods 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 239000003381 stabilizer Substances 0.000 description 4
- CNHDIAIOKMXOLK-UHFFFAOYSA-N toluquinol Chemical compound CC1=CC(O)=CC=C1O CNHDIAIOKMXOLK-UHFFFAOYSA-N 0.000 description 4
- KQTIIICEAUMSDG-UHFFFAOYSA-N tricarballylic acid Chemical compound OC(=O)CC(C(O)=O)CC(O)=O KQTIIICEAUMSDG-UHFFFAOYSA-N 0.000 description 4
- 229920002554 vinyl polymer Polymers 0.000 description 4
- LAGVOJJKZPIRMS-UHFFFAOYSA-N (1,2,2,6,6-pentamethylpiperidin-3-yl) 2-methylprop-2-enoate Chemical compound CN1C(C)(C)CCC(OC(=O)C(C)=C)C1(C)C LAGVOJJKZPIRMS-UHFFFAOYSA-N 0.000 description 3
- KMOUUZVZFBCRAM-OLQVQODUSA-N (3as,7ar)-3a,4,7,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C=CC[C@@H]2C(=O)OC(=O)[C@@H]21 KMOUUZVZFBCRAM-OLQVQODUSA-N 0.000 description 3
- JWTGRKUQJXIWCV-UHFFFAOYSA-N 1,2,3-trihydroxypropyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC(O)C(O)CO JWTGRKUQJXIWCV-UHFFFAOYSA-N 0.000 description 3
- VNQXSTWCDUXYEZ-UHFFFAOYSA-N 1,7,7-trimethylbicyclo[2.2.1]heptane-2,3-dione Chemical compound C1CC2(C)C(=O)C(=O)C1C2(C)C VNQXSTWCDUXYEZ-UHFFFAOYSA-N 0.000 description 3
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 3
- WYGWHHGCAGTUCH-UHFFFAOYSA-N 2-[(2-cyano-4-methylpentan-2-yl)diazenyl]-2,4-dimethylpentanenitrile Chemical compound CC(C)CC(C)(C#N)N=NC(C)(C#N)CC(C)C WYGWHHGCAGTUCH-UHFFFAOYSA-N 0.000 description 3
- XYXBMCIMPXOBLB-UHFFFAOYSA-N 3,4,5-tris(dimethylamino)-2-methylphenol Chemical compound CN(C)C1=CC(O)=C(C)C(N(C)C)=C1N(C)C XYXBMCIMPXOBLB-UHFFFAOYSA-N 0.000 description 3
- 229930008564 C01BA04 - Sparteine Natural products 0.000 description 3
- YYLLIJHXUHJATK-UHFFFAOYSA-N Cyclohexyl acetate Chemical compound CC(=O)OC1CCCCC1 YYLLIJHXUHJATK-UHFFFAOYSA-N 0.000 description 3
- 239000004593 Epoxy Substances 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 3
- HVVWZTWDBSEWIH-UHFFFAOYSA-N [2-(hydroxymethyl)-3-prop-2-enoyloxy-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(CO)(COC(=O)C=C)COC(=O)C=C HVVWZTWDBSEWIH-UHFFFAOYSA-N 0.000 description 3
- 125000003647 acryloyl group Chemical group O=C([*])C([H])=C([H])[H] 0.000 description 3
- 239000003463 adsorbent Substances 0.000 description 3
- SLRCCWJSBJZJBV-UHFFFAOYSA-N alpha-isosparteine Natural products C1N2CCCCC2C2CN3CCCCC3C1C2 SLRCCWJSBJZJBV-UHFFFAOYSA-N 0.000 description 3
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 3
- 239000012965 benzophenone Substances 0.000 description 3
- 150000008366 benzophenones Chemical class 0.000 description 3
- 229930006711 bornane-2,3-dione Natural products 0.000 description 3
- OCWYEMOEOGEQAN-UHFFFAOYSA-N bumetrizole Chemical compound CC(C)(C)C1=CC(C)=CC(N2N=C3C=C(Cl)C=CC3=N2)=C1O OCWYEMOEOGEQAN-UHFFFAOYSA-N 0.000 description 3
- 239000007795 chemical reaction product Substances 0.000 description 3
- 238000004132 cross linking Methods 0.000 description 3
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 3
- 238000004821 distillation Methods 0.000 description 3
- BHXIWUJLHYHGSJ-UHFFFAOYSA-N ethyl 3-ethoxypropanoate Chemical compound CCOCCC(=O)OCC BHXIWUJLHYHGSJ-UHFFFAOYSA-N 0.000 description 3
- UHESRSKEBRADOO-UHFFFAOYSA-N ethyl carbamate;prop-2-enoic acid Chemical compound OC(=O)C=C.CCOC(N)=O UHESRSKEBRADOO-UHFFFAOYSA-N 0.000 description 3
- 238000001914 filtration Methods 0.000 description 3
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 3
- 239000012948 isocyanate Substances 0.000 description 3
- IQPQWNKOIGAROB-UHFFFAOYSA-N isocyanate group Chemical group [N-]=C=O IQPQWNKOIGAROB-UHFFFAOYSA-N 0.000 description 3
- 150000002513 isocyanates Chemical class 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 3
- 239000002685 polymerization catalyst Substances 0.000 description 3
- 150000007519 polyprotic acids Polymers 0.000 description 3
- SLRCCWJSBJZJBV-AJNGGQMLSA-N sparteine Chemical compound C1N2CCCC[C@H]2[C@@H]2CN3CCCC[C@H]3[C@H]1C2 SLRCCWJSBJZJBV-AJNGGQMLSA-N 0.000 description 3
- 229960001945 sparteine Drugs 0.000 description 3
- 239000004094 surface-active agent Substances 0.000 description 3
- 229920005992 thermoplastic resin Polymers 0.000 description 3
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 3
- 150000003918 triazines Chemical class 0.000 description 3
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 3
- DTGKSKDOIYIVQL-WEDXCCLWSA-N (+)-borneol Chemical group C1C[C@@]2(C)[C@@H](O)C[C@@H]1C2(C)C DTGKSKDOIYIVQL-WEDXCCLWSA-N 0.000 description 2
- MYWOJODOMFBVCB-UHFFFAOYSA-N 1,2,6-trimethylphenanthrene Chemical compound CC1=CC=C2C3=CC(C)=CC=C3C=CC2=C1C MYWOJODOMFBVCB-UHFFFAOYSA-N 0.000 description 2
- OZCMOJQQLBXBKI-UHFFFAOYSA-N 1-ethenoxy-2-methylpropane Chemical compound CC(C)COC=C OZCMOJQQLBXBKI-UHFFFAOYSA-N 0.000 description 2
- UZKWTJUDCOPSNM-UHFFFAOYSA-N 1-ethenoxybutane Chemical compound CCCCOC=C UZKWTJUDCOPSNM-UHFFFAOYSA-N 0.000 description 2
- OVGRCEFMXPHEBL-UHFFFAOYSA-N 1-ethenoxypropane Chemical compound CCCOC=C OVGRCEFMXPHEBL-UHFFFAOYSA-N 0.000 description 2
- HSKPJQYAHCKJQC-UHFFFAOYSA-N 1-ethylanthracene-9,10-dione Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C=CC=C2CC HSKPJQYAHCKJQC-UHFFFAOYSA-N 0.000 description 2
- XLPJNCYCZORXHG-UHFFFAOYSA-N 1-morpholin-4-ylprop-2-en-1-one Chemical compound C=CC(=O)N1CCOCC1 XLPJNCYCZORXHG-UHFFFAOYSA-N 0.000 description 2
- ULQISTXYYBZJSJ-UHFFFAOYSA-N 12-hydroxyoctadecanoic acid Chemical compound CCCCCCC(O)CCCCCCCCCCC(O)=O ULQISTXYYBZJSJ-UHFFFAOYSA-N 0.000 description 2
- BTJPUDCSZVCXFQ-UHFFFAOYSA-N 2,4-diethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC(CC)=C3SC2=C1 BTJPUDCSZVCXFQ-UHFFFAOYSA-N 0.000 description 2
- HLIQLHSBZXDKLV-UHFFFAOYSA-N 2-(2-hydroxyethoxy)-1-phenoxyethanol Chemical compound OCCOCC(O)OC1=CC=CC=C1 HLIQLHSBZXDKLV-UHFFFAOYSA-N 0.000 description 2
- OLFNXLXEGXRUOI-UHFFFAOYSA-N 2-(benzotriazol-2-yl)-4,6-bis(2-phenylpropan-2-yl)phenol Chemical compound C=1C(N2N=C3C=CC=CC3=N2)=C(O)C(C(C)(C)C=2C=CC=CC=2)=CC=1C(C)(C)C1=CC=CC=C1 OLFNXLXEGXRUOI-UHFFFAOYSA-N 0.000 description 2
- WMYINDVYGQKYMI-UHFFFAOYSA-N 2-[2,2-bis(hydroxymethyl)butoxymethyl]-2-ethylpropane-1,3-diol Chemical compound CCC(CO)(CO)COCC(CC)(CO)CO WMYINDVYGQKYMI-UHFFFAOYSA-N 0.000 description 2
- SITYOOWCYAYOKL-UHFFFAOYSA-N 2-[4,6-bis(2,4-dimethylphenyl)-1,3,5-triazin-2-yl]-5-(3-dodecoxy-2-hydroxypropoxy)phenol Chemical compound OC1=CC(OCC(O)COCCCCCCCCCCCC)=CC=C1C1=NC(C=2C(=CC(C)=CC=2)C)=NC(C=2C(=CC(C)=CC=2)C)=N1 SITYOOWCYAYOKL-UHFFFAOYSA-N 0.000 description 2
- FDSUVTROAWLVJA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol;prop-2-enoic acid Chemical compound OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OCC(CO)(CO)COCC(CO)(CO)CO FDSUVTROAWLVJA-UHFFFAOYSA-N 0.000 description 2
- ZCDADJXRUCOCJE-UHFFFAOYSA-N 2-chlorothioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(Cl)=CC=C3SC2=C1 ZCDADJXRUCOCJE-UHFFFAOYSA-N 0.000 description 2
- GNUGVECARVKIPH-UHFFFAOYSA-N 2-ethenoxypropane Chemical compound CC(C)OC=C GNUGVECARVKIPH-UHFFFAOYSA-N 0.000 description 2
- VJIDDJAKLVOBSE-UHFFFAOYSA-N 2-ethylbenzene-1,4-diol Chemical compound CCC1=CC(O)=CC=C1O VJIDDJAKLVOBSE-UHFFFAOYSA-N 0.000 description 2
- BJEMXPVDXFSROA-UHFFFAOYSA-N 3-butylbenzene-1,2-diol Chemical compound CCCCC1=CC=CC(O)=C1O BJEMXPVDXFSROA-UHFFFAOYSA-N 0.000 description 2
- PGSWEKYNAOWQDF-UHFFFAOYSA-N 3-methylcatechol Chemical compound CC1=CC=CC(O)=C1O PGSWEKYNAOWQDF-UHFFFAOYSA-N 0.000 description 2
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Landscapes
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Description
本発明は、カラーフィルタ等の上層または下層に形成する被膜形成に使用する硬化性樹脂組成物に関する。 The present invention relates to a curable resin composition used for forming a film on an upper or lower layer of a color filter or the like.
近年、携帯情報端末などの電子機器において、自発光素子である有機EL(有機エレクトロルミネッセンス)を用いた表示装置の開発・量産化が進んでいる。また、カメラ付き携帯電話の普及にともない、固体撮像素子の需要が伸びている。これらのキーデバイスとしてカラーフィルタが使用されている。 In recent years, development and mass production of display devices using organic EL (organic electroluminescence), which is a self-emitting element, has been progressing in electronic devices such as mobile information terminals. Additionally, with the spread of camera-equipped mobile phones, demand for solid-state image sensors is increasing. Color filters are used as these key devices.
これらのデバイスでは、カラーフィルタの劣化や損傷を防止するための保護膜(オーバーコート膜)や、カラーフィルタを設ける上下層の素子表面を平坦化するための平坦化膜などが設けられている。例えば、特許文献1では、シランカップリング剤、アルカリ可溶性樹脂、2官能以上の多官能(メタ)アクリレート化合物、および光重合開始剤を含む硬化性樹脂組成物が開示されている。 These devices are provided with a protective film (overcoat film) to prevent deterioration or damage to the color filter, and a flattening film to flatten the element surface of the upper and lower layers on which the color filter is provided. For example, Patent Document 1 discloses a curable resin composition containing a silane coupling agent, an alkali-soluble resin, a bifunctional or higher polyfunctional (meth)acrylate compound, and a photopolymerization initiator.
硬化性樹脂組成物は、耐熱性が低く高温で加工できないデバイスに使用する場合、80℃以下の低温で被膜を形成することが多い。しかし、従来の硬化性樹脂組成物が含むシランカップリング剤は、加熱温度が低くなると脱水反応が進行しにくくなるため所望の密着性が得にくい問題があった。また、シランカップリング剤は組成物中の水分により反応しやすく、組成物の貯蔵安定性を低下させる問題があった。 When a curable resin composition is used for a device that has low heat resistance and cannot be processed at high temperatures, it is often formed into a film at a low temperature of 80° C. or lower. However, the silane coupling agent contained in the conventional curable resin composition has a problem in that it is difficult to obtain desired adhesion because the dehydration reaction becomes difficult to proceed when the heating temperature becomes low. Furthermore, the silane coupling agent tends to react with moisture in the composition, resulting in a problem of lowering the storage stability of the composition.
本発明は、低温加熱での密着性が優れ、貯蔵安定性も優れる硬化性樹脂組成物、および硬化膜の提供を目的とする。 The present invention aims to provide a curable resin composition and a cured film that have excellent adhesion when heated at low temperatures and excellent storage stability.
本発明の硬化性樹脂組成物は、塩基性樹脂(A)と、アルカリ可溶性樹脂(B)と、光重合性単量体(C)と、光重合開始剤(D)とを含み、有機顔料およびカーボンブラックを含まない。 The curable resin composition of the present invention contains a basic resin (A), an alkali-soluble resin (B), a photopolymerizable monomer (C), and a photopolymerization initiator (D), and contains an organic pigment. and carbon black free.
上記の本発明により、低温加熱での密着性が優れ、貯蔵安定性も優れる硬化性樹脂組成物、および硬化膜を提供できる。 The present invention described above can provide a curable resin composition and a cured film that have excellent adhesion when heated at low temperatures and excellent storage stability.
本願明細書の用語を定義する。「(メタ)アクリロイル」、「(メタ)アクリル」、「(メタ)アクリル酸」、「(メタ)アクリレート」、又は「(メタ)アクリルアミド」と表記した場合には、特に説明がない限り、それぞれ、「アクリロイル及び/又はメタクリロイル」、「アクリル及び/又はメタクリル」、「アクリル酸及び/又はメタクリル酸」、「アクリレート及び/又はメタクリレート」、又は「アクリルアミド及び/又はメタクリルアミド」を表すものとする。重合性不飽和基は、エチレン性不飽和基であり、ビニル基、(メタ)アクリロイル基等である。 Define terms used herein. When expressed as "(meth)acryloyl", "(meth)acrylic", "(meth)acrylic acid", "(meth)acrylate", or "(meth)acrylamide", unless otherwise specified, each , "acryloyl and/or methacryloyl", "acrylic and/or methacrylic", "acrylic acid and/or methacrylic acid", "acrylate and/or methacrylate" or "acrylamide and/or methacrylamide". The polymerizable unsaturated group is an ethylenically unsaturated group, such as a vinyl group or a (meth)acryloyl group.
本発明の硬化性樹脂組成物は、塩基性樹脂(A)と、アルカリ可溶性樹脂(B)と、光重合性単量体(C)と、光重合開始剤(D)とを含み、有機顔料およびカーボンブラックを含まない。
本発明の硬化性樹脂組成物は、カラーフィルタや基材(基板ともいう)等の部材上に被膜を形成し、他の部材の密着性向上や保護のために使用されることが好ましい。
The curable resin composition of the present invention contains a basic resin (A), an alkali-soluble resin (B), a photopolymerizable monomer (C), and a photopolymerization initiator (D), and contains an organic pigment. and carbon black free.
The curable resin composition of the present invention is preferably used to form a film on members such as color filters and base materials (also referred to as substrates) to improve adhesion and protect other members.
<塩基性樹脂(A)>
塩基性樹脂(A)は、塩基性官能基を有する樹脂である。硬化性樹脂組成物は、塩基性樹脂(A)を含有することで他の部材との密着性が向上するのみならず、組成物の貯蔵安定性を損なわない。なお、本明細書の硬化性樹脂組成物は、課題を解決できる範囲であれば、シランカップリング剤を配合できる。
<Basic resin (A)>
The basic resin (A) is a resin having a basic functional group. By containing the basic resin (A), the curable resin composition not only improves adhesion to other members, but also does not impair the storage stability of the composition. In addition, the curable resin composition of this specification can contain a silane coupling agent as long as the problem can be solved.
塩基性官能基は、例えば、アミノ基、アミド基、ウレタン基、ウレア基等が挙げられる。これらの中でもアミノ基が好ましく、3級アミノ基がより好ましい。塩基性樹脂(A)の樹脂種は、例えば、アクリル樹脂、アミド樹脂、ウレタン樹脂、ウレア樹脂等が挙げられる。塩基性樹脂(A)の形状は、例えば、直鎖型、グラフト型等が挙げられる。また、塩基性樹脂(A)の重合形態は、ランダム共重合体、ブロック共重合体等が挙げられる。 Examples of the basic functional group include an amino group, an amide group, a urethane group, and a urea group. Among these, amino groups are preferred, and tertiary amino groups are more preferred. Examples of the resin type of the basic resin (A) include acrylic resin, amide resin, urethane resin, and urea resin. Examples of the shape of the basic resin (A) include a linear type and a graft type. Moreover, the polymerization form of the basic resin (A) includes a random copolymer, a block copolymer, and the like.
塩基性樹脂(A)は、アミノ基含有アクリル樹脂が好ましい。これにより、例えば、硬化性樹脂組成物が有機溶剤を含有する場合、塩基性樹脂(A)の有機溶剤に対する相溶性が向上する。また、硬化膜の耐溶剤性が向上する。 The basic resin (A) is preferably an amino group-containing acrylic resin. Thereby, for example, when the curable resin composition contains an organic solvent, the compatibility of the basic resin (A) with the organic solvent is improved. Moreover, the solvent resistance of the cured film is improved.
塩基性樹脂(A)を構成する単量体は、塩基性官能基含有単量体、その他単量体が挙げられる。
塩基性官能基含有単量体は、例えば、ジメチルアミノエチル(メタ)アクリレート、ジメチルアミノプロピル(メタ)アクリレート、ジメチルアミノブチル(メタ)アクリレート、ジエチルアミノエチル(メタ)アクリレート、ジエチルアミノプロピル(メタ)アクリレート、ジエチルアミノブチル(メタ)アクリレート、ペンタメチルピペリジルメタクリレート、テトラメチルピペリジルメタクリレート、(メタ)アクリルアミド、N,N-ジメチル(メタ)アクリルアミド、N,N-ジエチル(メタ)アクリルアミド、N-イソプロピル(メタ)アクリルアミド、ジメチルアミノエチル(メタ)アクリルアミド、ジメチルアミノプロピル(メタ)アクリルアミド、ダイアセトン(メタ)アクリルアミド、又はアクリロイルモルホリン等の(メタ)アクリルアミド類が挙げられる。
Examples of the monomer constituting the basic resin (A) include a basic functional group-containing monomer and other monomers.
Basic functional group-containing monomers include, for example, dimethylaminoethyl (meth)acrylate, dimethylaminopropyl (meth)acrylate, dimethylaminobutyl (meth)acrylate, diethylaminoethyl (meth)acrylate, diethylaminopropyl (meth)acrylate, Diethylaminobutyl (meth)acrylate, pentamethylpiperidyl methacrylate, tetramethylpiperidyl methacrylate, (meth)acrylamide, N,N-dimethyl (meth)acrylamide, N,N-diethyl (meth)acrylamide, N-isopropyl (meth)acrylamide, Examples include (meth)acrylamides such as dimethylaminoethyl (meth)acrylamide, dimethylaminopropyl (meth)acrylamide, diacetone (meth)acrylamide, or acryloylmorpholine.
その他単量体は、例えば、メチル(メタ)アクリレート、エチル(メタ)アクリレート、n-プロピル(メタ)アクリレート、イソプロピル(メタ)アクリレート、n-ブチル(メタ)アクリレート、イソブチル(メタ)アクリレート、t-ブチル(メタ)アクリレート、2-エチルヘキシル(メタ)アクリレート、シクロヘキシル(メタ)アクリレート、ステアリル(メタ)アクリレート、ラウリル(メタ)アクリレート、テトラヒドロフルフリル(メタ)アクリレート、イソボルニル(メタ)アクリレート、フェニル(メタ)アクリレート、ベンジル(メタ)アクリレート、フェノキシエチル(メタ)アクリレート、フェノキシジエチレングリコール(メタ)アクリレート、メトキシポリプロピレングリコール(メタ)アクリレート、又はエトキシポリエチレングリコール(メタ)アクリレート等の(メタ)アクリレート類、スチレン又はα-メチルスチレン等のスチレン類、エチルビニルエーテル、n-プロピルビニルエーテル、イソプロピルビニルエーテル、n-ブチルビニルエーテル、又はイソブチルビニルエーテル等のビニルエーテル類、酢酸ビニル、又はプロピオン酸ビニル等の脂肪酸ビニル類等が挙げられる。 Other monomers include, for example, methyl (meth)acrylate, ethyl (meth)acrylate, n-propyl (meth)acrylate, isopropyl (meth)acrylate, n-butyl (meth)acrylate, isobutyl (meth)acrylate, t- Butyl (meth)acrylate, 2-ethylhexyl (meth)acrylate, cyclohexyl (meth)acrylate, stearyl (meth)acrylate, lauryl (meth)acrylate, tetrahydrofurfuryl (meth)acrylate, isobornyl (meth)acrylate, phenyl (meth)acrylate Acrylate, (meth)acrylates such as benzyl (meth)acrylate, phenoxyethyl (meth)acrylate, phenoxydiethylene glycol (meth)acrylate, methoxypolypropylene glycol (meth)acrylate, or ethoxypolyethylene glycol (meth)acrylate, styrene or α- Examples include styrenes such as methylstyrene, vinyl ethers such as ethyl vinyl ether, n-propyl vinyl ether, isopropyl vinyl ether, n-butyl vinyl ether, or isobutyl vinyl ether, and fatty acid vinyls such as vinyl acetate and vinyl propionate.
単量体は、単独または2種類以上併用して使用できる。 The monomers can be used alone or in combination of two or more.
塩基性樹脂(A)の市販品は、例えば、ビックケミ- ・ジャパン社製のDisperbyk-101、140、161、162、163、164、168、180、182、184、185、2000、2001、2009、2013、2020、2022、2025、2050、2055、2070、2150、2155、2163、2164またはBYK-9076、9077、Anti-Terra-U、204、日本ル-ブリゾ-ル社製のSOLSPERSE-9000、13240、13650、13940、17000、18000、20000、24000、28000、31845、32000、32500、32600、33500、34750、35200、38500等、BASFジャパン社製のEfka FA 4644、4654、4663、Efka PA 4400、4401、4403、Efka PU4063、Efka PX4300、4310、4320、4330、4340、4700、4701、4731、4732等、味の素ファインテクノ社製のアジスパ-PB821、PB822、PB824、PB881等が挙げられる。 Commercially available basic resins (A) include, for example, Disperbyk-101, 140, 161, 162, 163, 164, 168, 180, 182, 184, 185, 2000, 2001, 2009, manufactured by BYK Chemie Japan Co., Ltd. 2013, 2020, 2022, 2025, 2050, 2055, 2070, 2150, 2155, 2163, 2164 or BYK-9076, 9077, Anti-Terra-U, 204, SOLSPERSE-9000, 13240 manufactured by Lubrisol Japan , 13650, 13940, 17000, 18000, 20000, 24000, 28000, 31845, 32000, 32500, 32600, 33500, 34750, 35200, 38500, etc., Efka FA 4644, 4654, 4663 manufactured by BASF Japan. , Efka PA 4400, 4401 , 4403, Efka PU4063, Efka PX4300, 4310, 4320, 4330, 4340, 4700, 4701, 4731, 4732, and Ajisper-PB821, PB822, PB824, PB881 manufactured by Ajinomoto Fine Techno.
塩基性樹脂(A)のアミン価は、30~350mgKOH/gが好ましく、50~150mgKOH/gがより好ましい。適度なアミン価により、密着性がより向上し、貯蔵安定性もより向上する。 The amine value of the basic resin (A) is preferably 30 to 350 mgKOH/g, more preferably 50 to 150 mgKOH/g. An appropriate amine value further improves adhesion and storage stability.
塩基性樹脂(A)の重量平均分子量は5000~20000が好ましく、8000~15000がより好ましい。 The weight average molecular weight of the basic resin (A) is preferably 5,000 to 20,000, more preferably 8,000 to 15,000.
塩基性樹脂(A)の含有量は、硬化性樹脂組成物の不揮発分100質量%中、0.01~60質量%が好ましく、0.1~30質量%がより好ましい。 The content of the basic resin (A) is preferably 0.01 to 60% by mass, more preferably 0.1 to 30% by mass based on 100% by mass of nonvolatile content of the curable resin composition.
<アルカリ可溶性樹脂(B)>
本明細書の硬化性樹脂組成物は、アルカリ可溶性樹脂(B)を含む。アルカリ可溶性は、硬化性樹脂組成物を下地層として使用する場合、当該下地層上に形成するカラーフィルタを作製する際のアルカリ現像工程で、非露光部のフィルタセグメントと共に下地層を除去するために現像溶解性として必要である。なお、アルカリ可溶性には、酸性基が必要である。
<Alkali-soluble resin (B)>
The curable resin composition of this specification contains an alkali-soluble resin (B). Alkali solubility means that when the curable resin composition is used as a base layer, the base layer is removed together with the filter segments in the non-exposed areas during the alkaline development step when producing a color filter to be formed on the base layer. It is necessary for developing solubility. Note that an acidic group is required for alkali solubility.
アルカリ可溶性樹脂(B)は、厚さ2μmの被膜形成時に400~700nmの全波長領域において透過率が80%以上の樹脂であることが好ましい。なお、透過率は、95%以上が好ましい。アルカリ可溶性樹脂(B)は、重合性不飽和基を有するアルカリ可溶性感光性樹脂が好ましい。なお、アルカリ可溶性樹脂(B)は、エポキシ基やオキセタニル基等の熱硬化性基を含有できる。 The alkali-soluble resin (B) is preferably a resin that has a transmittance of 80% or more in the entire wavelength range of 400 to 700 nm when a film with a thickness of 2 μm is formed. Note that the transmittance is preferably 95% or more. The alkali-soluble resin (B) is preferably an alkali-soluble photosensitive resin having a polymerizable unsaturated group. Note that the alkali-soluble resin (B) can contain a thermosetting group such as an epoxy group or an oxetanyl group.
アルカリ可溶性樹脂(非感光性)は、例えば、カルボキシル基、スルホン基等の酸性基を有する樹脂が挙げられる。アルカリ可溶性樹脂は、例えば、酸性基を有するアクリル樹脂、α-オレフィン/(無水)マレイン酸共重合体、スチレン/スチレンスルホン酸共重合体、エチレン/(メタ)アクリル酸共重合体、又はイソブチレン/(無水)マレイン酸共重合体等が挙げられる。これらの中でも現像性、耐熱性、透明性が向上する面で酸性基を有するアクリル樹脂、スチレン/スチレンスルホン酸共重合体が好ましい。 Examples of the alkali-soluble resin (non-photosensitive) include resins having acidic groups such as carboxyl groups and sulfone groups. Examples of the alkali-soluble resin include an acrylic resin having an acidic group, an α-olefin/(anhydrous) maleic acid copolymer, a styrene/styrene sulfonic acid copolymer, an ethylene/(meth)acrylic acid copolymer, or an isobutylene/(meth)acrylic acid copolymer. Examples include (anhydrous) maleic acid copolymers. Among these, acrylic resins having acidic groups and styrene/styrene sulfonic acid copolymers are preferred from the viewpoint of improving developability, heat resistance, and transparency.
アルカリ可溶性感光性樹脂は、アルカリ可溶性があり、感光性を有すれば良く、公知の樹脂を使用できるところ、以下の方法 (i) (ii)で合成した樹脂が好ましい。アルカリ可溶性感光性樹脂を使用すると光照射で3次元架橋して架橋密度が上がるため、被膜の薬品耐性が向上する。 The alkali-soluble photosensitive resin only needs to be alkali-soluble and photosensitive, and known resins can be used, but resins synthesized by the following methods (i) and (ii) are preferred. When an alkali-soluble photosensitive resin is used, it undergoes three-dimensional crosslinking upon irradiation with light, increasing the crosslinking density, thereby improving the chemical resistance of the coating.
[方法(i)]
方法(i)は、例えば、まず、エポキシ基含有単量体、およびその他単量体の重合体を合成する。次いで、前記重合体のエポキシ基に、モノカルボキシル基含有単量体を付加し、生成した水酸基に、多塩基酸無水物を反応させてアルカリ可溶性感光性樹脂を得る方法が挙げられる。なお、モノカルボキシル基含有単量体は、カルボキシル基を1有する単量体である。
[Method (i)]
In method (i), for example, first, a polymer of an epoxy group-containing monomer and other monomers is synthesized. Next, a method can be mentioned in which a monocarboxyl group-containing monomer is added to the epoxy group of the polymer, and the generated hydroxyl group is reacted with a polybasic acid anhydride to obtain an alkali-soluble photosensitive resin. Note that the monocarboxyl group-containing monomer is a monomer having one carboxyl group.
エポキシ基含有単量体は、例えば、グリシジル(メタ)アクリレート、メチルグリシジル(メタ)アクリレート、2-グリシドキシエチル(メタ)アクリレート、3,4-エポキシブチル(メタ)アクリレート、及び3,4-エポキシシクロヘキシル(メタ)アクリレートが挙げられる。これらの中でも、反応性の観点で、グリシジル(メタ)アクリレートが好ましい Epoxy group-containing monomers include, for example, glycidyl (meth)acrylate, methylglycidyl (meth)acrylate, 2-glycidoxyethyl (meth)acrylate, 3,4-epoxybutyl (meth)acrylate, and 3,4- Epoxycyclohexyl (meth)acrylate is mentioned. Among these, glycidyl (meth)acrylate is preferred from the viewpoint of reactivity.
モノカルボキシル基含有単量体は、例えば、(メタ)アクリル酸、クロトン酸、o-、m-、p-ビニル安息香酸、(メタ)アクリル酸のα位ハロアルキル、アルコキシル、ハロゲン、ニトロ、シアノ置換体等のモノカルボン酸等が挙げられる。 Examples of monocarboxyl group-containing monomers include (meth)acrylic acid, crotonic acid, o-, m-, p-vinylbenzoic acid, and haloalkyl, alkoxyl, halogen, nitro, and cyano-substituted α-positions of (meth)acrylic acid. Examples include monocarboxylic acids such as carboxylic acid and the like.
多塩基酸無水物は、例えば、テトラヒドロ無水フタル酸、無水フタル酸、ヘキサヒドロ無水フタル酸、無水コハク酸、無水マレイン酸等が挙げられる。なお、多塩基酸無水物は、酸無水物を形成しないカルボキシル基を有しても良い。 Examples of the polybasic acid anhydride include tetrahydrophthalic anhydride, phthalic anhydride, hexahydrophthalic anhydride, succinic anhydride, maleic anhydride, and the like. Note that the polybasic acid anhydride may have a carboxyl group that does not form an acid anhydride.
その他単量体は、例えば、メチル(メタ)アクリレート、エチル(メタ)アクリレート、n-プロピル(メタ)アクリレート、イソプロピル(メタ)アクリレート、n-ブチル(メタ)アクリレート、イソブチル(メタ)アクリレート、t-ブチル(メタ)アクリレート、2-エチルヘキシル(メタ)アクリレート、シクロヘキシル(メタ)アクリレート、ステアリル(メタ)アクリレート、ラウリル(メタ)アクリレート、テトラヒドロフルフリル(メタ)アクリレート、イソボルニル(メタ)アクリレート、フェニル(メタ)アクリレート、ベンジル(メタ)アクリレート、フェノキシエチル(メタ)アクリレート、フェノキシジエチレングリコール(メタ)アクリレート、メトキシポリプロピレングリコール(メタ)アクリレート、又はエトキシポリエチレングリコール(メタ)アクリレート等の(メタ)アクリレート類、あるいは、(メタ)アクリルアミド、N,N-ジメチル(メタ)アクリルアミド、N,N-ジエチル(メタ)アクリルアミド、N-イソプロピル(メタ)アクリルアミド、ダイアセトン(メタ)アクリルアミド、又はアクリロイルモルホリン等の(メタ)アクリルアミド類スチレン、又はα-メチルスチレン等のスチレン類、エチルビニルエーテル、n-プロピルビニルエーテル、イソプロピルビニルエーテル、n-ブチルビニルエーテル、又はイソブチルビニルエーテル等のビニルエーテル類、酢酸ビニル、又はプロピオン酸ビニル等の脂肪酸ビニル類等が挙げられる。 Other monomers include, for example, methyl (meth)acrylate, ethyl (meth)acrylate, n-propyl (meth)acrylate, isopropyl (meth)acrylate, n-butyl (meth)acrylate, isobutyl (meth)acrylate, t- Butyl (meth)acrylate, 2-ethylhexyl (meth)acrylate, cyclohexyl (meth)acrylate, stearyl (meth)acrylate, lauryl (meth)acrylate, tetrahydrofurfuryl (meth)acrylate, isobornyl (meth)acrylate, phenyl (meth)acrylate (Meth)acrylates such as acrylate, benzyl (meth)acrylate, phenoxyethyl (meth)acrylate, phenoxydiethylene glycol (meth)acrylate, methoxypolypropylene glycol (meth)acrylate, or ethoxypolyethylene glycol (meth)acrylate; ) Acrylamide, N,N-dimethyl (meth)acrylamide, N,N-diethyl (meth)acrylamide, N-isopropyl (meth)acrylamide, diacetone (meth)acrylamide, or (meth)acrylamides such as acryloylmorpholine, styrene, or styrenes such as α-methylstyrene, vinyl ethers such as ethyl vinyl ether, n-propyl vinyl ether, isopropyl vinyl ether, n-butyl vinyl ether, or isobutyl vinyl ether, and fatty acid vinyls such as vinyl acetate or vinyl propionate. .
また、シクロヘキシルマレイミド、フェニルマレイミド、メチルマレイミド、エチルマレイミド、1,2-ビスマレイミドエタン1,6-ビスマレイミドヘキサン、3-マレイミドプロピオン酸、6,7-メチレンジオキシ-4-メチル-3-マレイミドクマリン、4,4’-ビスマレイミドジフェニルメタン、ビス(3-エチル-5-メチル-4-マレイミドフェニル)メタン、N,N’-1,3-フェニレンジマレイミド、N,N’-1,4-フェニレンジマレイミド、N-(1-ピレニル)マレイミド、N-(2,4,6-トリクロロフェニル)マレイミド、N-(4-アミノフェニル)マレイミド、N-(4-ニトロフェニル)マレイミド、N-ベンジルマレイミド、N-ブロモメチル-2,3-ジクロロマレイミド、N-スクシンイミジル-3-マレイミドベンゾエート、N-スクシンイミジル-3-マレイミドプロピオナート、N-スクシンイミジル-4-マレイミドブチラート、N-スクシンイミジル-6-マレイミドヘキサノアート、N-[4-(2-ベンゾイミダゾリル)フェニル]マレイミド、9-マレイミドアクリジン等のN-置換マレイミド類、EO変性クレゾールアクリレート、n-ノニルフェノキシポリエチレングリコールアクリレート、フェノキシエチルアクリレート、エトキシ化フェニルアクリレート、フェノールのエチレンオキサイド(EO)変性(メタ)アクリレート、パラクミルフェノールのEO又はプロピレンオキサイド(PO)変性(メタ)アクリレート、ノニルフェノールのEO変性(メタ)アクリレート、ノニルフェノールのPO変性(メタ)アクリレート等が挙げられる。 Also, cyclohexylmaleimide, phenylmaleimide, methylmaleimide, ethylmaleimide, 1,2-bismaleimideethane 1,6-bismaleimidehexane, 3-maleimidopropionic acid, 6,7-methylenedioxy-4-methyl-3-maleimide Coumarin, 4,4'-bismaleimidiphenylmethane, bis(3-ethyl-5-methyl-4-maleimidophenyl)methane, N,N'-1,3-phenylene dimaleimide, N,N'-1,4- Phenylene dimaleimide, N-(1-pyrenyl)maleimide, N-(2,4,6-trichlorophenyl)maleimide, N-(4-aminophenyl)maleimide, N-(4-nitrophenyl)maleimide, N-benzyl Maleimide, N-bromomethyl-2,3-dichloromaleimide, N-succinimidyl-3-maleimidobenzoate, N-succinimidyl-3-maleimidopropionate, N-succinimidyl-4-maleimidobutyrate, N-succinimidyl-6-maleimide N-substituted maleimides such as hexanoate, N-[4-(2-benzimidazolyl)phenyl]maleimide, 9-maleimidoacridine, EO-modified cresol acrylate, n-nonylphenoxypolyethylene glycol acrylate, phenoxyethyl acrylate, ethoxylated phenyl Acrylate, ethylene oxide (EO)-modified (meth)acrylate of phenol, EO- or propylene oxide (PO)-modified (meth)acrylate of paracumylphenol, EO-modified (meth)acrylate of nonylphenol, PO-modified (meth)acrylate of nonylphenol, etc. can be mentioned.
方法(ii)は、例えば、水酸基含有単量体、カルボキシル基含有単量体、およびそれ以外の単量体を合成し重合体を作製する。次いで、前記重合体の水酸基に、イソシアネート基含有単量体のイソシアネート基を反応させてアルカリ可溶性感光性樹脂を合成する方法が挙げられる。 In method (ii), for example, a hydroxyl group-containing monomer, a carboxyl group-containing monomer, and other monomers are synthesized to produce a polymer. Next, a method of synthesizing an alkali-soluble photosensitive resin by reacting an isocyanate group of an isocyanate group-containing monomer with the hydroxyl group of the polymer may be mentioned.
水酸基含有単量体は、例えば、2-ヒドロキシエチル(メタ)アクリレート、2-若しくは3-ヒドロキシプロピル(メタ)アクリレート、2-若しくは3-若しくは4-ヒドロキシブチル(メタ)アクリレート、グリセロールモノ(メタ)アクリレート、又はシクロヘキサンジメタノールモノ(メタ)アクリレート等のヒドロキシアルキルメタアクリレート類が挙げられる。また、ヒドロキシアルキル(メタ)アクリレートに、エチレンオキシド、プロピレンオキシド、及び/又はブチレンオキシド等を付加重合させたポリエーテルモノ(メタ)アクリレートや、ポリγ-バレロラクトン、ポリε-カプロラクトン、及び/又はポリ12-ヒドロキシステアリン酸等を付加したポリエステルモノ(メタ)アクリレートも挙げられる。これらの中でも2-ヒドロキシエチルメタアクリレート、グリセロールモノ(メタ)アクリレートが好ましく、グリセロールモノ(メタ)アクリレートがより好ましい。 Hydroxyl group-containing monomers include, for example, 2-hydroxyethyl (meth)acrylate, 2- or 3-hydroxypropyl (meth)acrylate, 2-, 3- or 4-hydroxybutyl (meth)acrylate, glycerol mono(meth)acrylate, Examples include acrylates and hydroxyalkyl methacrylates such as cyclohexanedimethanol mono(meth)acrylate. In addition, polyether mono(meth)acrylate obtained by addition polymerizing ethylene oxide, propylene oxide, and/or butylene oxide, etc. to hydroxyalkyl (meth)acrylate, polyγ-valerolactone, polyε-caprolactone, and/or polyester Also included are polyester mono(meth)acrylates to which 12-hydroxystearic acid and the like are added. Among these, 2-hydroxyethyl methacrylate and glycerol mono(meth)acrylate are preferred, and glycerol mono(meth)acrylate is more preferred.
イソシアネート基含有単量体は、例えば、2-(メタ)アクリロイルエチルイソシアネート、2-(メタ)アクリロイルオキシエチルイソシアネート、又は1,1-ビス〔メタアクリロイルオキシ〕エチルイソシアネート等が挙げられる。 Examples of the isocyanate group-containing monomer include 2-(meth)acryloyl ethyl isocyanate, 2-(meth)acryloyloxyethyl isocyanate, and 1,1-bis[methacryloyloxy]ethyl isocyanate.
上記単量体以外に使用できる単量体は、上記方法(i)で例示したその他単量体に加え、リン酸エステル基含有単量体等が挙げられる。 Monomers that can be used in addition to the above monomers include, in addition to the other monomers exemplified in the method (i) above, phosphate group-containing monomers.
リン酸エステル基含有単量体は、例えば、水酸基含有単量体の水酸基に、5酸化リンやポリリン酸等のリン酸エステル化剤を反応させた化合物である。 The phosphate group-containing monomer is, for example, a compound obtained by reacting the hydroxyl group of a hydroxyl group-containing monomer with a phosphoric acid esterification agent such as phosphorus pentoxide or polyphosphoric acid.
アルカリ可溶性樹脂の合成に使用する各原料は、単独または2種類以上を併用して使用できる。 Each raw material used in the synthesis of the alkali-soluble resin can be used alone or in combination of two or more.
アルカリ可溶性樹脂(B)は、単独または2種類以上を併用して使用できる。 The alkali-soluble resin (B) can be used alone or in combination of two or more types.
アルカリ可溶性樹脂(B)の酸価は、30~130mgKOH/gが好ましく、60~100mgKOH/gがより好ましい。適度な酸価を有することでアルカリ現像性がより向上する。 The acid value of the alkali-soluble resin (B) is preferably 30 to 130 mgKOH/g, more preferably 60 to 100 mgKOH/g. Having an appropriate acid value further improves alkali developability.
アルカリ可溶性樹脂の重量平均分子量(Mw)は、2000~40000が好ましく、3000~30000がより好ましく、4000~20000がさらに好ましい。適度なMwによりアルカリ現像性がより向上する。また、Mw/Mnの値は10以下が好ましい。なお、Mnは、数平均分子量である。 The weight average molecular weight (Mw) of the alkali-soluble resin is preferably 2,000 to 40,000, more preferably 3,000 to 30,000, and even more preferably 4,000 to 20,000. Alkaline developability is further improved by appropriate Mw. Moreover, the value of Mw/Mn is preferably 10 or less. In addition, Mn is a number average molecular weight.
アルカリ可溶性樹脂の含有量は、硬化性樹脂組成物の不揮発分100質量%中に対して、1~30質量%が好ましく、5~20質量%がより好ましい。適量含有すると被膜を容易形成できる上、良好なパターニング特性が得やすい。 The content of the alkali-soluble resin is preferably 1 to 30% by mass, more preferably 5 to 20% by mass, based on 100% by mass of nonvolatile content of the curable resin composition. When contained in an appropriate amount, a film can be easily formed and good patterning characteristics can be easily obtained.
<熱可塑性樹脂>
硬化性樹脂組成物は、アルカリ可溶性を有しない熱可塑性樹脂を含有できる。これにより現像性を適宜調整できる。
熱可塑性樹脂は、例えば、アクリル樹脂、ブチラール樹脂、スチレン-マレイン酸共重合体、塩素化ポリエチレン、塩素化ポリプロピレン、ポリ塩化ビニル、塩化ビニル-酢酸ビニル共重合体、ポリ酢酸ビニル、ポリウレタン系樹脂、ポリエステル樹脂、ビニル系樹脂、アルキッド樹脂、ポリスチレン樹脂、ポリアミド樹脂、ゴム系樹脂、環化ゴム系樹脂、セルロース類、ポリエチレン(HDPE、LDPE)、ポリブタジエン、及びポリイミド樹脂等が挙げられる。
<Thermoplastic resin>
The curable resin composition can contain a thermoplastic resin that does not have alkali solubility. This allows the developability to be adjusted as appropriate.
Examples of the thermoplastic resin include acrylic resin, butyral resin, styrene-maleic acid copolymer, chlorinated polyethylene, chlorinated polypropylene, polyvinyl chloride, vinyl chloride-vinyl acetate copolymer, polyvinyl acetate, polyurethane resin, Examples include polyester resin, vinyl resin, alkyd resin, polystyrene resin, polyamide resin, rubber resin, cyclized rubber resin, celluloses, polyethylene (HDPE, LDPE), polybutadiene, and polyimide resin.
<光重合性単量体(C)>
光重合性単量体(C)は、紫外線や熱などにより硬化して透明樹脂を生成するモノマー、オリゴマーを含む。光重合性単量体(C)は、重合性不飽和基を3以上有する(メタ)アクリレートが好ましい。重合性不飽和基を3以上有する(メタ)アクリレートを使用すると硬化膜の架橋密度が向上することに加え、硬化膜の耐溶剤性が向上する。なお、重合性不飽和基数の上限は、課題を解決できる範囲であれば良く限定されないところ、強いてあげれば、10以下が好ましく、6以下がより好ましい。
<Photopolymerizable monomer (C)>
The photopolymerizable monomer (C) includes monomers and oligomers that can be cured by ultraviolet rays, heat, etc. to produce transparent resins. The photopolymerizable monomer (C) is preferably a (meth)acrylate having three or more polymerizable unsaturated groups. When a (meth)acrylate having three or more polymerizable unsaturated groups is used, not only the crosslinking density of the cured film is improved, but also the solvent resistance of the cured film is improved. The upper limit of the number of polymerizable unsaturated groups is not limited as long as the problem can be solved, but it is preferably 10 or less, more preferably 6 or less.
重合性不飽和基を3以上有する(メタ)アクリレートは、例えば、トリメチロールプロパントリ(メタ)アクリレート、トリメチロールプロパンPO変性トリ(メタ)アクリレート、トリメチロールプロパンEO変性トリ(メタ)アクリレート、イソシアヌル酸EO変性トリ(メタ)アクリレート、ジトリメチロールプロパンテトラ(メタ)アクリレート、ペンタエリスリトールトリ(メタ)アクリレート、ペンタエリスリトールテトラ(メタ)アクリレート、ジペンタエリスリトールヘキサ(メタ)アクリレート、ジペンタエリスリトールペンタ(メタ)アクリレート等が挙げられる。 Examples of (meth)acrylates having three or more polymerizable unsaturated groups include trimethylolpropane tri(meth)acrylate, trimethylolpropane PO-modified tri(meth)acrylate, trimethylolpropane EO-modified tri(meth)acrylate, and isocyanuric acid. EO modified tri(meth)acrylate, ditrimethylolpropane tetra(meth)acrylate, pentaerythritol tri(meth)acrylate, pentaerythritol tetra(meth)acrylate, dipentaerythritol hexa(meth)acrylate, dipentaerythritol penta(meth)acrylate etc.
光重合性単量体(C)は、重合性不飽和基を3以上有する(メタ)アクリレート以外に酸基含有単量体、ウレタン結合含有単量体、その他光重合性単量体を使用できる。 As the photopolymerizable monomer (C), in addition to (meth)acrylate having three or more polymerizable unsaturated groups, acid group-containing monomers, urethane bond-containing monomers, and other photopolymerizable monomers can be used. .
酸基含有単量体の酸基は、スルホン酸基、カルボキシル基、リン酸基等が挙げられる。 Examples of the acid group of the acid group-containing monomer include a sulfonic acid group, a carboxyl group, and a phosphoric acid group.
酸基含有単量体は、例えば、多価アルコールと(メタ)アクリル酸との遊離水酸基含有ポリ(メタ)アクリレート類と、ジカルボン酸類とのエステル化物;多価カルボン酸と、モノヒドロキシアルキル(メタ)アクリレート類とのエステル化物等が挙げられる。具体例は、トリメチロールプロパンジアクリレート、トリメチロールプロパンジメタクリレート、ペンタエリスリトールトリアクリレート、ペンタエリスリトールトリメタクリレート、ジペンタエリスリトールペンタアクリレート、ジペンタエリスリトールペンタメタクリレート等のモノヒドロキシオリゴアクリレート又はモノヒドロキシオリゴメタクリレート類と、マロン酸、コハク酸、グルタル酸、フタル酸等のジカルボン酸類との遊離カルボキシル基含有モノエステル化物;プロパン-1,2,3-トリカルボン酸(トリカルバリル酸)、ブタン-1,2,4-トリカルボン酸、ベンゼン-1,2,3-トリカルボン酸、ベンゼン-1,3,4-トリカルボン酸、ベンゼン-1,3,5-トリカルボン酸等のトリカルボン酸類と、2-ヒドロキシエチルアクリレート、2-ヒドロキシエチルメタクリレート、2-ヒドロキシプロピルアクリレート、2-ヒドロキシプロピルメタクリレート等のモノヒドロキシモノアクリレート又はモノヒドロキシモノメタクリレート類との遊離カルボキシル基含有オリゴエステル化物等が挙げられる。 Acid group-containing monomers include, for example, esterification products of free hydroxyl group-containing poly(meth)acrylates of polyhydric alcohols and (meth)acrylic acid, and dicarboxylic acids; ) Examples include esterified products with acrylates. Specific examples include monohydroxyoligoacrylates or monohydroxyoligomethacrylates such as trimethylolpropane diacrylate, trimethylolpropane dimethacrylate, pentaerythritol triacrylate, pentaerythritol trimethacrylate, dipentaerythritol pentaacrylate, and dipentaerythritol pentamethacrylate. , free carboxyl group-containing monoesters with dicarboxylic acids such as malonic acid, succinic acid, glutaric acid, and phthalic acid; propane-1,2,3-tricarboxylic acid (tricarballylic acid), butane-1,2,4- Tricarboxylic acids such as tricarboxylic acid, benzene-1,2,3-tricarboxylic acid, benzene-1,3,4-tricarboxylic acid, benzene-1,3,5-tricarboxylic acid, and 2-hydroxyethyl acrylate, 2-hydroxy Examples include free carboxyl group-containing oligoesters with monohydroxy monoacrylates or monohydroxy monomethacrylates such as ethyl methacrylate, 2-hydroxypropyl acrylate, and 2-hydroxypropyl methacrylate.
(ウレタン結合含有単量体)
ウレタン結合含有単量体は、例えば、水酸基を有する(メタ)アクリレートに多官能イソシアネートを反応させて得られる多官能ウレタンアクリレート、アルコールに多官能イソシアネートを反応させ、さらに水酸基を有する(メタ)アクリレートを反応させて得られる多官能ウレタンアクリレート等が挙げられる。
(Urethane bond-containing monomer)
The urethane bond-containing monomer is, for example, a polyfunctional urethane acrylate obtained by reacting a (meth)acrylate having a hydroxyl group with a polyfunctional isocyanate, or a polyfunctional urethane acrylate obtained by reacting a polyfunctional isocyanate with an alcohol, and then a (meth)acrylate having a hydroxyl group. Examples include polyfunctional urethane acrylates obtained by reaction.
水酸基を有する(メタ)アクリレートは、2-ヒドロキシエチル(メタ)アクリレート、4-ヒドロキシブチル(メタ)アクリレート、トリメチロールプロパンジ(メタ)アクリレート、ペンタエリスリトールトリ(メタ)アクリレート、ジトリメチロールプロパントリ(メタ)アクリレート、ジペンタエリスリトールペンタ(メタ)アクリレート、ジペンタエリスリトールエチレンオキサイド変性ペンタ(メタ)アクリレート、ジペンタエリスリトールプロピレンオキサイド変性ペンタ(メタ)アクリレート、ジペンタエリスリトールカプロラクトン変性ペンタ(メタ)アクリレート、グリセロールアクリレートメタクリレート、グリセロールジメタクリレート、2-ヒドロキシ-3-アクリロイルプロピルメタクリレート、エポキシ基含有化合物とカルボキシ(メタ)アクリレートの反応物、水酸基含有ポリオールポリアクリレート等が挙げられる。 (Meth)acrylates having a hydroxyl group include 2-hydroxyethyl (meth)acrylate, 4-hydroxybutyl (meth)acrylate, trimethylolpropane di(meth)acrylate, pentaerythritol tri(meth)acrylate, and ditrimethylolpropane tri(meth)acrylate. ) acrylate, dipentaerythritol penta(meth)acrylate, dipentaerythritol ethylene oxide modified penta(meth)acrylate, dipentaerythritol propylene oxide modified penta(meth)acrylate, dipentaerythritol caprolactone modified penta(meth)acrylate, glycerol acrylate methacrylate , glycerol dimethacrylate, 2-hydroxy-3-acryloylpropyl methacrylate, a reaction product of an epoxy group-containing compound and carboxy(meth)acrylate, a hydroxyl group-containing polyol polyacrylate, and the like.
多官能イソシアネートは、トリレンジイソシアネート、ヘキサメチレンジイソシアネート、ジフェニルメチレンジイソシアネート、イソホロンジイソシアネート、ポリイソシアネート等が挙げられる。 Examples of the polyfunctional isocyanate include tolylene diisocyanate, hexamethylene diisocyanate, diphenylmethylene diisocyanate, isophorone diisocyanate, and polyisocyanate.
その他光重合性単量体は、例えば、メチル(メタ)アクリレート、エチル(メタ)アクリレート、2-ヒドロキシエチル(メタ)アクリレート、2-ヒドロキシプロピル(メタ)アクリレート、シクロヘキシル(メタ)アクリレート、β-カルボキシエチル(メタ)アクリレート、ポリエチレングリコールジ(メタ)アクリレート、1,6-ヘキサンジオールジ(メタ)アクリレート、トリエチレングリコールジ(メタ)アクリレート、ポリプロピレングリコールジ(メタ)アクリレート、フェノキシテトラエチレングリコール(メタ)アクリレート、フェノキシヘキサエチレングリコール(メタ)アクリレート、イソシアヌル酸EO変性ジ(メタ)アクリレート、1,6-ヘキサンジオールジグリシジルエーテルジ(メタ)アクリレート、ビスフェノールAジグリシジルエーテルジ(メタ)アクリレート、ネオペンチルグリコールジグリシジルエーテルジ(メタ)アクリレート、トリシクロデカニル(メタ)アクリレート、メチロール化メラミンの(メタ)アクリル酸エステル、エポキシ(メタ)アクリレート、(メタ)アクリル酸、スチレン、酢酸ビニル、ヒドロキシエチルビニルエーテル、エチレングリコールジビニルエーテル、ペンタエリスリトールトリビニルエーテル、(メタ)アクリルアミド、N-ヒドロキシメチル(メタ)アクリルアミド、N-ビニルホルムアミド、アクリロニトリル等が挙げられる。 Other photopolymerizable monomers include, for example, methyl (meth)acrylate, ethyl (meth)acrylate, 2-hydroxyethyl (meth)acrylate, 2-hydroxypropyl (meth)acrylate, cyclohexyl (meth)acrylate, and β-carboxylate. Ethyl (meth)acrylate, polyethylene glycol di(meth)acrylate, 1,6-hexanediol di(meth)acrylate, triethylene glycol di(meth)acrylate, polypropylene glycol di(meth)acrylate, phenoxytetraethylene glycol (meth)acrylate Acrylate, phenoxyhexaethylene glycol (meth)acrylate, isocyanuric acid EO-modified di(meth)acrylate, 1,6-hexanediol diglycidyl ether di(meth)acrylate, bisphenol A diglycidyl ether di(meth)acrylate, neopentyl glycol diglycidyl ether di(meth)acrylate, tricyclodecanyl (meth)acrylate, (meth)acrylic acid ester of methylolated melamine, epoxy (meth)acrylate, (meth)acrylic acid, styrene, vinyl acetate, hydroxyethyl vinyl ether, Examples include ethylene glycol divinyl ether, pentaerythritol trivinyl ether, (meth)acrylamide, N-hydroxymethyl (meth)acrylamide, N-vinylformamide, and acrylonitrile.
光重合性単量体(C)は、単独または2種類以上を併用して使用できる。 The photopolymerizable monomer (C) can be used alone or in combination of two or more types.
光重合性単量体(C)の配合量は、硬化性樹脂組成物の不揮発分100質量%中、1~90質量%が好ましく、10~85質量%がより好ましい。適量配合すると硬化性及び現像性がより向上する。 The blending amount of the photopolymerizable monomer (C) is preferably 1 to 90% by weight, more preferably 10 to 85% by weight based on 100% by weight of nonvolatile content of the curable resin composition. When blended in an appropriate amount, curability and developability are further improved.
<光重合開始剤(D)>
光重合開始剤(D)は、例えば、4-フェノキシジクロロアセトフェノン、4-t-ブチル-ジクロロアセトフェノン、ジエトキシアセトフェノン、1-(4-イソプロピルフェニル)-2-ヒドロキシ-2-メチルプロパン-1-オン、1-ヒドロキシシクロヘキシルフェニルケトン、2-メチル-1-[4-(メチルチオ)フェニル]-2-モルフォリノプロパン-1-オン、2-(ジメチルアミノ)-1-[4-(4-モルホリノ)フェニル]-2-(フェニルメチル)-1-ブタノン、又は2-(ジメチルアミノ)-2-[(4-メチルフェニル)メチル]-1-[4-(4-モルホリニル)フェニル]-1-ブタノン等のアセトフェノン系化合物;ベンゾイン、ベンゾインメチルエーテル、ベンゾインエチルエーテル、ベンゾインイソプロピルエーテル、又はベンジルジメチルケタール等のベンゾイン系化合物;ベンゾフェノン、ベンゾイル安息香酸、ベンゾイル安息香酸メチル、4-フェニルベンゾフェノン、ヒドロキシベンゾフェノン、アクリル化ベンゾフェノン、4-ベンゾイル-4’-メチルジフェニルサルファイド、又は3,3’,4,4’-テトラ(t-ブチルパーオキシカルボニル)ベンゾフェノン等のベンゾフェノン系化合物;チオキサントン、2-クロルチオキサントン、2-メチルチオキサントン、イソプロピルチオキサントン、2,4-ジイソプロピルチオキサントン、又は2,4-ジエチルチオキサントン等のチオキサントン系化合物;2,4,6-トリクロロ-s-トリアジン、2-フェニル-4,6-ビス(トリクロロメチル)-s-トリアジン、2-(p-メトキシフェニル)-4,6-ビス(トリクロロメチル)-s-トリアジン、2-(p-トリル)-4,6-ビス(トリクロロメチル)-s-トリアジン、2-ピペロニル-4,6-ビス(トリクロロメチル)-s-トリアジン、2,4-ビス(トリクロロメチル)-6-スチリル-s-トリアジン、2-(ナフト-1-イル)-4,6-ビス(トリクロロメチル)-s-トリアジン、2-(4-メトキシ-ナフト-1-イル)-4,6-ビス(トリクロロメチル)-s-トリアジン、2,4-トリクロロメチル-(ピペロニル)-6-トリアジン、又は2,4-トリクロロメチル-(4’-メトキシスチリル)-6-トリアジン等のトリアジン系化合物;1,2-オクタンジオン,1-〔4-(フェニルチオ)フェニル-,2-(O-ベンゾイルオキシム)〕、又はエタノン,1-〔9-エチル-6-(2-メチルベンゾイル)-9H-カルバゾール-3-イル〕-,1-(O-アセチルオキシム)等のオキシムエステル系化合物;ビス(2,4,6-トリメチルベンゾイル)フェニルホスフィンオキサイド、又はジフェニル-2,4,6-トリメチルベンゾイルホスフィンオキサイド等のホスフィン系化合物;9,10-フェナンスレンキノン、カンファーキノン、エチルアントラキノン等のキノン系化合物;ボレート系化合物;カルバゾール系化合物;イミダゾール系化合物;あるいは、チタノセン系化合物等が挙げられる。これらの中でも、オキシムエステル系化合物が好ましい。
<Photopolymerization initiator (D)>
The photoinitiator (D) is, for example, 4-phenoxydichloroacetophenone, 4-t-butyl-dichloroacetophenone, diethoxyacetophenone, 1-(4-isopropylphenyl)-2-hydroxy-2-methylpropane-1- one, 1-hydroxycyclohexyl phenylketone, 2-methyl-1-[4-(methylthio)phenyl]-2-morpholinopropan-1-one, 2-(dimethylamino)-1-[4-(4-morpholino) ) phenyl]-2-(phenylmethyl)-1-butanone, or 2-(dimethylamino)-2-[(4-methylphenyl)methyl]-1-[4-(4-morpholinyl)phenyl]-1- Acetophenone compounds such as butanone; Benzoin compounds such as benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, or benzyl dimethyl ketal; benzophenone, benzoylbenzoic acid, methyl benzoylbenzoate, 4-phenylbenzophenone, hydroxybenzophenone, Benzophenone compounds such as acrylated benzophenone, 4-benzoyl-4'-methyldiphenyl sulfide, or 3,3',4,4'-tetra(t-butylperoxycarbonyl)benzophenone; thioxanthone, 2-chlorothioxanthone, 2 - Thioxanthone compounds such as methylthioxanthone, isopropylthioxanthone, 2,4-diisopropylthioxanthone, or 2,4-diethylthioxanthone; 2,4,6-trichloro-s-triazine, 2-phenyl-4,6-bis(trichloro methyl)-s-triazine, 2-(p-methoxyphenyl)-4,6-bis(trichloromethyl)-s-triazine, 2-(p-tolyl)-4,6-bis(trichloromethyl)-s- Triazine, 2-piperonyl-4,6-bis(trichloromethyl)-s-triazine, 2,4-bis(trichloromethyl)-6-styryl-s-triazine, 2-(naphth-1-yl)-4, 6-bis(trichloromethyl)-s-triazine, 2-(4-methoxy-naphth-1-yl)-4,6-bis(trichloromethyl)-s-triazine, 2,4-trichloromethyl-(piperonyl) -6-triazine or triazine compounds such as 2,4-trichloromethyl-(4'-methoxystyryl)-6-triazine; 1,2-octanedione, 1-[4-(phenylthio)phenyl-,2- (O-benzoyloxime)], or oxime esters such as ethanone, 1-[9-ethyl-6-(2-methylbenzoyl)-9H-carbazol-3-yl]-,1-(O-acetyloxime) Compounds: Phosphine compounds such as bis(2,4,6-trimethylbenzoyl)phenylphosphine oxide or diphenyl-2,4,6-trimethylbenzoylphosphine oxide; 9,10-phenanthrenequinone, camphorquinone, ethyl anthraquinone Examples include quinone compounds such as; borate compounds; carbazole compounds; imidazole compounds; and titanocene compounds. Among these, oxime ester compounds are preferred.
(オキシムエステル系化合物)
オキシムエステル系化合物は、紫外線を吸収することによってオキシムのN-O結合の解裂がおこり、イミニルラジカルとアルキロキシラジカルを生成する。これらのラジカルは更に分解することにより活性の高いラジカルを生成するため、少ない露光量でパターンを形成させることができる。硬化膜層を薄膜で塗工する場合、酸素による硬化阻害を受けやすくなるため塗膜の硬化度が低くなることがあるが、オキシムエステル系化合物は高い量子効率を持つため好適に使用される。
(oxime ester compound)
When an oxime ester compound absorbs ultraviolet light, the N—O bond of the oxime is cleaved to generate iminyl radicals and alkyloxy radicals. Since these radicals generate highly active radicals by further decomposition, a pattern can be formed with a small amount of exposure. When the cured film layer is applied as a thin film, the degree of curing of the coating film may be low because it is susceptible to curing inhibition by oxygen, but oxime ester compounds are preferably used because they have high quantum efficiency.
オキシムエステル系化合物は、特開2007-210991号公報、特開2009-179619号公報、特開2010-037223号公報、特開2010-215575号公報、特開2011-020998号公報等に記載のオキシムエステル系光重合開始剤が挙げられる。 Oxime ester compounds include oximes described in JP-A No. 2007-210991, JP-A 2009-179619, JP-A 2010-037223, JP-A 2010-215575, JP-A 2011-020998, etc. Examples include ester photopolymerization initiators.
光重合開始剤(D)は、単独または2種類以上を併用して使用できる。 The photopolymerization initiator (D) can be used alone or in combination of two or more types.
光重合開始剤(D)の含有量は、アルカリ可溶性樹脂(B)および光重合性単量体(C)の合計100質量部に対し、1~20質量部が好ましく、2~15質量部がより好ましい。適量配合すると光硬化性及び解像性がより向上する。 The content of the photopolymerization initiator (D) is preferably 1 to 20 parts by mass, and 2 to 15 parts by mass based on a total of 100 parts by mass of the alkali-soluble resin (B) and the photopolymerizable monomer (C). More preferred. When incorporated in an appropriate amount, photocurability and resolution are further improved.
<増感剤>
硬化性樹脂組成物は、さらに増感剤を含有できる。
増感剤は、例えば、カルコン誘導体、ジベンザルアセトン等に代表される不飽和ケトン類、ベンジルやカンファーキノン等に代表される1,2-ジケトン誘導体、ベンゾイン誘導体、フルオレン誘導体、ナフトキノン誘導体、アントラキノン誘導体、キサンテン誘導体、チオキサンテン誘導体、キサントン誘導体、チオキサントン誘導体、クマリン誘導体、ケトクマリン誘導体、シアニン誘導体、メロシアニン誘導体、オキソノ-ル誘導体等のポリメチン色素、アクリジン誘導体、アジン誘導体、チアジン誘導体、オキサジン誘導体、インドリン誘導体、アズレン誘導体、アズレニウム誘導体、スクアリリウム誘導体、ポルフィリン誘導体、テトラフェニルポルフィリン誘導体、トリアリールメタン誘導体、テトラベンゾポルフィリン誘導体、テトラピラジノポルフィラジン誘導体、フタロシアニン誘導体、テトラアザポルフィラジン誘導体、テトラキノキサリロポルフィラジン誘導体、ナフタロシアニン誘導体、サブフタロシアニン誘導体、ピリリウム誘導体、チオピリリウム誘導体、テトラフィリン誘導体、アヌレン誘導体、スピロピラン誘導体、スピロオキサジン誘導体、チオスピロピラン誘導体、金属アレーン錯体、有機ルテニウム錯体、又はミヒラーケトン誘導体、α-アシロキシエステル、アシルフォスフィンオキサイド、メチルフェニルグリオキシレート、ベンジル、9,10-フェナンスレンキノン、カンファーキノン、エチルアンスラキノン、4,4’-ジエチルイソフタロフェノン、3,3’又は4,4’-テトラ(t-ブチルパーオキシカルボニル)ベンゾフェノン、4,4’-ビス(ジエチルアミノ)ベンゾフェノン等が挙げられる。
<Sensitizer>
The curable resin composition can further contain a sensitizer.
Examples of sensitizers include chalcone derivatives, unsaturated ketones such as dibenzalacetone, 1,2-diketone derivatives such as benzyl and camphorquinone, benzoin derivatives, fluorene derivatives, naphthoquinone derivatives, and anthraquinones. derivatives, polymethine dyes such as xanthene derivatives, thioxanthene derivatives, xanthone derivatives, thioxanthone derivatives, coumarin derivatives, ketocoumarin derivatives, cyanine derivatives, merocyanine derivatives, oxonol derivatives, acridine derivatives, azine derivatives, thiazine derivatives, oxazine derivatives, indoline derivatives , azulene derivatives, azulenium derivatives, squarylium derivatives, porphyrin derivatives, tetraphenylporphyrin derivatives, triarylmethane derivatives, tetrabenzoporphyrin derivatives, tetrapyrazinoporphyrazine derivatives, phthalocyanine derivatives, tetraazaporphyrazine derivatives, tetraquinoxalyloporphyrazine derivatives, naphthalocyanine derivatives, subphthalocyanine derivatives, pyrylium derivatives, thiopyrylium derivatives, tetraphylline derivatives, annulene derivatives, spiropyran derivatives, spirooxazine derivatives, thiospiropyran derivatives, metal arene complexes, organic ruthenium complexes, or Michler ketone derivatives, α-acyloxy Ester, acylphosphine oxide, methylphenylglyoxylate, benzyl, 9,10-phenanthrenequinone, camphorquinone, ethyl anthraquinone, 4,4'-diethylisophthalophenone, 3,3' or 4,4' -tetra(t-butylperoxycarbonyl)benzophenone, 4,4'-bis(diethylamino)benzophenone, and the like.
これらの中でもチオキサントン誘導体、ミヒラーケトン誘導体、カルバゾール誘導体が好ましい。具体的には、2,4-ジエチルチオキサントン、2-クロロチオキサントン、2,4-ジクロロチオキサントン、2-イソプロピルチオキサントン、4-イソプロピルチオキサントン、1-クロロ-4-プロポキシチオキサントン、4,4’-ビス(ジメチルアミノ)ベンゾフェノン、4,4’-ビス(ジエチルアミノ)ベンゾフェノン、4,4’-ビス(エチルメチルアミノ)ベンゾフェノン、N-エチルカルバゾール、3-ベンゾイル-N-エチルカルバゾール、3,6-ジベンゾイル-N-エチルカルバゾール等がより好ましい。 Among these, thioxanthone derivatives, Michler's ketone derivatives, and carbazole derivatives are preferred. Specifically, 2,4-diethylthioxanthone, 2-chlorothioxanthone, 2,4-dichlorothioxanthone, 2-isopropylthioxanthone, 4-isopropylthioxanthone, 1-chloro-4-propoxythioxanthone, 4,4'-bis( dimethylamino)benzophenone, 4,4'-bis(diethylamino)benzophenone, 4,4'-bis(ethylmethylamino)benzophenone, N-ethylcarbazole, 3-benzoyl-N-ethylcarbazole, 3,6-dibenzoyl-N - Ethylcarbazole and the like are more preferred.
増感剤は、単独または2種類以上を併用して使用できる。 The sensitizers can be used alone or in combination of two or more.
増感剤の含有量は、光重合開始剤(D)100質量部に対し、3~60質量部が好ましく、5~50質量部がより好ましい。適量含有すると硬化性、現像性がより向上する。 The content of the sensitizer is preferably 3 to 60 parts by weight, more preferably 5 to 50 parts by weight, based on 100 parts by weight of the photopolymerization initiator (D). When contained in an appropriate amount, curability and developability are further improved.
<熱硬化性化合物>
硬化性樹脂組成物は、熱硬化性化合物を含有できる。熱硬化性化合物は、低分子化合物でもよく、樹脂のような高分子量化合物でもよい。
熱硬化性化合物は、例えば、エポキシ化合物、オキセタン化合物、ベンゾグアナミン化合物、ロジン変性マレイン酸化合物、ロジン変性フマル酸化合物、メラミン化合物、尿素化合物、およびフェノール化合物が挙げられる。これらの中でもエポキシ化合物、オキセタン化合物が好ましい。
<Thermosetting compound>
The curable resin composition can contain a thermosetting compound. The thermosetting compound may be a low molecular weight compound or a high molecular weight compound such as a resin.
Examples of thermosetting compounds include epoxy compounds, oxetane compounds, benzoguanamine compounds, rosin-modified maleic acid compounds, rosin-modified fumaric acid compounds, melamine compounds, urea compounds, and phenol compounds. Among these, epoxy compounds and oxetane compounds are preferred.
<チオール系連鎖移動剤>
硬化性樹脂組成物は、チオール系連鎖移動剤を含有できる。チオール系連鎖移動剤は、光重合開始剤と併用すると光照射後のラジカル重合の際、酸素による重合阻害を受けにくいチイルラジカルが発生し、硬化性樹脂組成物の感度が向上する。
<Thiol-based chain transfer agent>
The curable resin composition can contain a thiol-based chain transfer agent. When a thiol-based chain transfer agent is used in combination with a photopolymerization initiator, thiyl radicals, which are less susceptible to polymerization inhibition by oxygen, are generated during radical polymerization after light irradiation, thereby improving the sensitivity of the curable resin composition.
チオール系連鎖移動剤は、チオール基(SH基)2以上有する多官能チオールが好ましい。なお、チオール系連鎖移動剤は、SH基を4以上有することがより好ましい。官能基数が増えると被膜の表面から最深部まで光硬化し易くなる。 The thiol-based chain transfer agent is preferably a polyfunctional thiol having two or more thiol groups (SH groups). In addition, it is more preferable that the thiol-based chain transfer agent has 4 or more SH groups. As the number of functional groups increases, it becomes easier to photocure from the surface of the film to the deepest part.
多官能チオールは、例えば、ヘキサンジチオール、デカンジチオール、1,4-ブタンジオールビスチオプロピオネート、1,4-ブタンジオールビスチオグリコレート、エチレングリコールビスチオグリコレート、エチレングリコールビスチオプロピオネート、トリメチロールプロパントリスチオグリコレート、トリメチロールプロパントリスチオプロピオネート、トリメチロールプロパントリス(3-メルカプトブチレート)、ペンタエリスリトールテトラキスチオグリコレート、ペンタエリスリトールテトラキスチオプロピオネート、トリメルカプトプロピオン酸トリス(2-ヒドロキシエチル)イソシアヌレート、1,4-ジメチルメルカプトベンゼン、2、4、6-トリメルカプト-s-トリアジン、2-(N,N-ジブチルアミノ)-4,6-ジメルカプト-s-トリアジン等が挙げられる。これらの中でもエチレングリコールビスチオプロピオネート、トリメチロールプロパントリスチオプロピオネート、ペンタエリスリトールテトラキスチオプロピオネートが、好ましい。 Examples of polyfunctional thiols include hexanedithiol, decanedithiol, 1,4-butanediol bisthiopropionate, 1,4-butanediol bisthioglycolate, ethylene glycol bisthioglycolate, and ethylene glycol bisthiopropionate. , trimethylolpropane tristhioglycolate, trimethylolpropane tristhiopropionate, trimethylolpropane tris (3-mercaptobutyrate), pentaerythritol tetrakisthioglycolate, pentaerythritol tetrakisthiopropionate, tris trimercaptopropionate (2-Hydroxyethyl)isocyanurate, 1,4-dimethylmercaptobenzene, 2,4,6-trimercapto-s-triazine, 2-(N,N-dibutylamino)-4,6-dimercapto-s-triazine etc. Among these, ethylene glycol bisthiopropionate, trimethylolpropane tristhiopropionate, and pentaerythritol tetrakisthiopropionate are preferred.
チオール系連鎖移動剤は、単独または2種類以上を併用して使用できる。 Thiol-based chain transfer agents can be used alone or in combination of two or more.
チオール系連鎖移動剤の含有量は、硬化性樹脂組成物の不揮発分100質量%中、0.1~10質量%が好ましく、0.1~3質量%がより好ましい。適量含有すると光感度が向上し、被膜表面にシワが発生し難くなる。 The content of the thiol-based chain transfer agent is preferably 0.1 to 10% by weight, more preferably 0.1 to 3% by weight based on 100% by weight of nonvolatile content of the curable resin composition. When contained in an appropriate amount, photosensitivity is improved and wrinkles are less likely to occur on the coating surface.
<重合禁止剤>
硬化性樹脂組成物は、重合禁止剤を含有できる。これにより露光時にマスクの回折光による感光を防止し、良好なパターン形状が得やすくなる。
<Polymerization inhibitor>
The curable resin composition can contain a polymerization inhibitor. This prevents exposure due to diffracted light from the mask during exposure, making it easier to obtain a good pattern shape.
重合禁止剤は、例えば、カテコール、レゾルシノール、1,4-ヒドロキノン、2-メチルカテコール、3-メチルカテコール、4-メチルカテコール、2-エチルカテコール、3-エチルカテコール、4-エチルカテコール、2-プロピルカテコール、3-プロピルカテコール、4-プロピルカテコール、2-n-ブチルカテコール、3-n-ブチルカテコール、4-n-ブチルカテコール、2-tert-ブチルカテコール、3-tert-ブチルカテコール、4-tert-ブチルカテコール、3,5-ジ-tert-ブチルカテコール等のアルキルカテコール系化合物、2-メチルレゾルシノール、4-メチルレゾルシノール、2-エチルレゾルシノール、4-エチルレゾルシノール、2-プロピルレゾルシノール、4-プロピルレゾルシノール、2-n-ブチルレゾルシノール、4-n-ブチルレゾルシノール、2-tert-ブチルレゾルシノール、4-tert-ブチルレゾルシノール等のアルキルレゾルシノール系化合物、メチルヒドロキノン、エチルヒドロキノン、プロピルヒドロキノン、tert-ブチルヒドロキノン、2,5-ジ-tert-ブチルヒドロキノン等のアルキルヒドロキノン系化合物、トリブチルホスフィン、トリオクチルホスフィン、トリシクロヘキシルホスフィン、トリフェニルホスフィン、トリベンジルホスフィン等のホスフィン化合物、トリオクチルホスフィンオキサイド、トリフェニルホスフィンオキサイドなどのホスフィンオキサイド化合物、トリフェニルホスファイト、トリスノニルフェニルホスファイト等のホスファイト化合物、ピロガロール、フロログルシンなどが挙げられる。 Examples of the polymerization inhibitor include catechol, resorcinol, 1,4-hydroquinone, 2-methylcatechol, 3-methylcatechol, 4-methylcatechol, 2-ethylcatechol, 3-ethylcatechol, 4-ethylcatechol, 2-propyl Catechol, 3-propylcatechol, 4-propylcatechol, 2-n-butylcatechol, 3-n-butylcatechol, 4-n-butylcatechol, 2-tert-butylcatechol, 3-tert-butylcatechol, 4-tert - Alkylcatechol compounds such as butylcatechol, 3,5-di-tert-butylcatechol, 2-methylresorcinol, 4-methylresorcinol, 2-ethylresorcinol, 4-ethylresorcinol, 2-propylresorcinol, 4-propylresorcinol , 2-n-butylresorcinol, 4-n-butylresorcinol, 2-tert-butylresorcinol, 4-tert-butylresorcinol and other alkylresorcinol compounds, methylhydroquinone, ethylhydroquinone, propylhydroquinone, tert-butylhydroquinone, 2 , 5-di-tert-butylhydroquinone and other alkylhydroquinone compounds, tributylphosphine, trioctylphosphine, tricyclohexylphosphine, triphenylphosphine, tribenzylphosphine and other phosphine compounds, trioctylphosphine oxide, triphenylphosphine oxide, etc. Examples include phosphine oxide compounds, phosphite compounds such as triphenyl phosphite and trisnonylphenyl phosphite, pyrogallol, and phloroglucin.
重合禁止剤の含有量は、硬化性樹脂組成物の不揮発分100質量%中、0.01~0.4質量%が好ましい。適量含有すると良好なパターン形状が得やすくなる。 The content of the polymerization inhibitor is preferably 0.01 to 0.4% by mass based on 100% by mass of nonvolatile content of the curable resin composition. When contained in an appropriate amount, it becomes easier to obtain a good pattern shape.
<紫外線吸収剤>
硬化性樹脂組成物は、紫外線吸収剤を含有できる。紫外線吸収剤は、ベンゾトリアゾール系化合物、トリアジン系化合物、ベンゾフェノン系化合物、サリチル酸エステル系化合物、シアノアクリレート系化合物、及びサリシレート系化合物等が挙げられる。なお、紫外線吸収剤は、オリゴマーやポリマーであってもよい。
<Ultraviolet absorber>
The curable resin composition can contain an ultraviolet absorber. Examples of the ultraviolet absorber include benzotriazole compounds, triazine compounds, benzophenone compounds, salicylic acid ester compounds, cyanoacrylate compounds, and salicylate compounds. Note that the ultraviolet absorber may be an oligomer or a polymer.
ベンゾトリアゾール系化合物は、例えば、2-(5メチル-2-ヒドロキシフェニル)ベンゾトリアゾール、2-(2-ヒドロキシ-5-t-ブチルフェニル)-2H-ベンゾトリアゾール、2-[2-ヒドロキシ-3,5-ビス(α, α-ジメチルベンジル)フェニル]-2H-ベンゾトリアゾール、2-(3-tブチル-5-メチル-2-ヒドロキシフェニル)-5-クロロベンゾトリアゾール、2-(2'-ヒドロキシ-5'-t-オクチルフェニル)ベンゾトリアゾール、5%の2-メトキシ-1-メチルエチルアセテートと95%のベンゼンプロパン酸,3-(2H-ベンゾトリアゾール-2-イル)-(1,1-ジメチルエチル)-4-ヒドロキシ,C7-9側鎖及び直鎖アルキルエステルの混合物、2-(2H-ベンゾトリアゾール-2-イル)-4,6-ビス(1-メチル-1-フェニルエチル)フェノール、2-(2H-ベンゾトリアゾール-2-イル)-6-(1-メチル-1-フェニルエチル)-4-(1,1,3,3-テトラメチルブチル)フェノール、メチル 3-(3-(2H-ベンゾトリアゾール-2-イル)-5-t-ブチル-4-ヒドロキシフェニル)プロピオネート/ポリエチレングリコール300の反応生成物、2-(2H-ベンゾトリアゾール-2-イル)-4-(1,1,3,3-テトラメチルブチル)フェノール、2,2’-メチレンビス[6-(2H-ベンゾトリアゾール-2-イル)-4-(1,1,3,3-テトラメチルブチル)フェノール]、2-(2H-ベンゾトリアゾール-2-イル)-p-クレゾール、2-(5-クロロ-2H-ベンゾトリアゾール-2-イル)-6-t-ブチル-4-メチルフェノール、2-(3,5-ジ-t-アミル-2-ヒドロキシフェニル)ベンゾトリアゾール、2-[2-ヒドロキシ-5-[2-(メタクリロイルオキシ)エチル]フェニル]-2H-ベンゾトリアゾール、オクチル-3-[3-tert-ブチル-4-ヒドロキシ-5-(5-クロロ-2H-ベンゾトリアゾール-2-イル)フェニル]プロピオネート、2-エチルヘキシル-3-[3-tert-ブチル-4-ヒドロキシ-5-(5-クロロ-2H-ベンゾトリアゾール-2-イル)フェニル]プロピオネートが挙げられる。 Examples of benzotriazole compounds include 2-(5methyl-2-hydroxyphenyl)benzotriazole, 2-(2-hydroxy-5-t-butylphenyl)-2H-benzotriazole, 2-[2-hydroxy-3 ,5-bis(α,α-dimethylbenzyl)phenyl]-2H-benzotriazole, 2-(3-t-butyl-5-methyl-2-hydroxyphenyl)-5-chlorobenzotriazole, 2-(2'- Hydroxy-5'-t-octylphenyl)benzotriazole, 5% 2-methoxy-1-methylethyl acetate and 95% benzenepropanoic acid, 3-(2H-benzotriazol-2-yl)-(1,1 -dimethylethyl)-4-hydroxy, mixture of C7-9 side chain and linear alkyl esters, 2-(2H-benzotriazol-2-yl)-4,6-bis(1-methyl-1-phenylethyl) Phenol, 2-(2H-benzotriazol-2-yl)-6-(1-methyl-1-phenylethyl)-4-(1,1,3,3-tetramethylbutyl)phenol, methyl 3-(3 -(2H-benzotriazol-2-yl)-5-t-butyl-4-hydroxyphenyl)propionate/polyethylene glycol 300 reaction product, 2-(2H-benzotriazol-2-yl)-4-(1 , 1,3,3-tetramethylbutyl)phenol, 2,2'-methylenebis[6-(2H-benzotriazol-2-yl)-4-(1,1,3,3-tetramethylbutyl)phenol] , 2-(2H-benzotriazol-2-yl)-p-cresol, 2-(5-chloro-2H-benzotriazol-2-yl)-6-t-butyl-4-methylphenol, 2-(3 , 5-di-t-amyl-2-hydroxyphenyl)benzotriazole, 2-[2-hydroxy-5-[2-(methacryloyloxy)ethyl]phenyl]-2H-benzotriazole, octyl-3-[3- tert-butyl-4-hydroxy-5-(5-chloro-2H-benzotriazol-2-yl)phenyl]propionate, 2-ethylhexyl-3-[3-tert-butyl-4-hydroxy-5-(5- Chloro-2H-benzotriazol-2-yl)phenyl]propionate is mentioned.
トリアジン系化合物は、例えば、2,4-ビス(2,4-ジメチルフェニル)-6-(2-ヒドロキシ-4-n-オクチルオキシフェニル)-1,3,5-トリアジン、2‐[4,6‐ビス(2,4‐ジメチルフェニル)‐1,3,5‐トリアジン‐2‐イル]‐5‐[3‐(ドデシルオキシ)‐2‐ヒドロキシプロポキシ]フェノール、2-(2,4-ジヒドロキシフェニル)-4,6-ビス(2,4-ジメチルフェニル)-1,3,5-トリアジンと(2-エチルヘキシル)-グリシド酸エステルの反応生成物、2,4-ビス「2-ヒドロキシ-4-ブトキシフェニル」-6-(2,4-ジブトキシフェニル)-1,3,5-トリアジン、2-(4,6-ジフェニル-1,3,5-トリアジン-2-イル)-5-(ヘキシルオキシ)フェノール、2-(4,6-ジフェニル-1,3,5-トリアジン-2-イル)-5-[2-(2-エチルヘキサノイルオキシ)エトキシ]フェノール、2,4,6-トリス(2-ヒドロキシ-4-ヘキシルオキシ-3-メチルフェニル)-1,3,5-トリアジン等が挙げられる。 Examples of triazine compounds include 2,4-bis(2,4-dimethylphenyl)-6-(2-hydroxy-4-n-octyloxyphenyl)-1,3,5-triazine, 2-[4, 6-bis(2,4-dimethylphenyl)-1,3,5-triazin-2-yl]-5-[3-(dodecyloxy)-2-hydroxypropoxy]phenol, 2-(2,4-dihydroxy Reaction product of phenyl)-4,6-bis(2,4-dimethylphenyl)-1,3,5-triazine and (2-ethylhexyl)-glycidic acid ester, 2,4-bis(2-hydroxy-4 -butoxyphenyl"-6-(2,4-dibutoxyphenyl)-1,3,5-triazine, 2-(4,6-diphenyl-1,3,5-triazin-2-yl)-5-( hexyloxy)phenol, 2-(4,6-diphenyl-1,3,5-triazin-2-yl)-5-[2-(2-ethylhexanoyloxy)ethoxy]phenol, 2,4,6- Examples include tris(2-hydroxy-4-hexyloxy-3-methylphenyl)-1,3,5-triazine.
ベンゾフェノン系化合物は、例えば、2,4-ジ-ヒドロキシベンゾフェノン、2-ヒドロキシ-4-メトキシベンゾフェノン、2-ヒドロキシ-4-n-オクトキシベンゾフェノン、2,2’-ジ-ヒドロキシ-4-メトキシベンゾフェノン、2,2’-ジヒドロキシ-4,4’-ジメトキシベンゾフェノン、4-ドデシロキシ-2-ヒドロキシベンゾフェノン、2-ヒドロキシ-4-オクタデシロキシベンゾフェノン、2,2’ジヒドロキシ-4,4’-ジメトキシベンゾフェノン、2,2’,4,4’-テトラヒドロキシベンゾフェノン、2-ヒドロキシ-4-メトキシ-2’-カルボキシベンゾフェノン等が挙げられる。 Examples of benzophenone compounds include 2,4-di-hydroxybenzophenone, 2-hydroxy-4-methoxybenzophenone, 2-hydroxy-4-n-octoxybenzophenone, and 2,2'-di-hydroxy-4-methoxybenzophenone. , 2,2'-dihydroxy-4,4'-dimethoxybenzophenone, 4-dodecyloxy-2-hydroxybenzophenone, 2-hydroxy-4-octadecyloxybenzophenone, 2,2'dihydroxy-4,4'-dimethoxybenzophenone, Examples include 2,2',4,4'-tetrahydroxybenzophenone and 2-hydroxy-4-methoxy-2'-carboxybenzophenone.
サリチル酸エステル系化合物は、例えば、サリチル酸フェニル、サリチル酸p-オクチルフェニル、サリチル酸p-tertブチルフェニル等が挙げられる。 Examples of salicylic acid ester compounds include phenyl salicylate, p-octylphenyl salicylate, and p-tertbutylphenyl salicylate.
紫外線吸収剤の含有量は、光重合開始剤と紫外線吸収剤との合計100質量%中、5~70質量%が好ましい。適量含有すると現像後の解像性がより向上する。 The content of the ultraviolet absorber is preferably 5 to 70% by weight based on the total of 100% by weight of the photopolymerization initiator and the ultraviolet absorber. When contained in an appropriate amount, the resolution after development is further improved.
また、光重合開始剤と紫外線吸収剤の合計含有量は、硬化性樹脂組成物のアルカリ可溶性樹脂(B)および光重合性単量体(C)の合計100質量部に対し、1~20質量部が好ましい。適量含有すると基板と被膜の密着性がより向上し、良好な解像性が得られる。 In addition, the total content of the photopolymerization initiator and the ultraviolet absorber is 1 to 20 parts by mass based on the total of 100 parts by mass of the alkali-soluble resin (B) and the photopolymerizable monomer (C) of the curable resin composition. part is preferred. When contained in an appropriate amount, the adhesion between the substrate and the coating is further improved, and good resolution can be obtained.
<酸化防止剤>
硬化性樹脂組成物は、酸化防止剤を含有できる。酸化防止剤は、硬化性樹脂組成物に含まれる光重合開始剤や熱硬化性化合物が、熱硬化時より酸化による黄変を防止できる。これにより硬化膜の透明性を向上できる。
<Antioxidant>
The curable resin composition can contain an antioxidant. The antioxidant can prevent the photopolymerization initiator and thermosetting compound contained in the curable resin composition from yellowing due to oxidation during thermosetting. This can improve the transparency of the cured film.
酸化防止剤は、例えば、ヒンダードフェノール系、ヒンダードアミン系、リン系、イオウ系、及びヒドロキシルアミン系の化合物が挙げられる。なお、本明細書で酸化防止剤は、ハロゲン原子を含有しない化合物が好ましい。 Examples of antioxidants include hindered phenol-based, hindered amine-based, phosphorus-based, sulfur-based, and hydroxylamine-based compounds. In this specification, the antioxidant is preferably a compound that does not contain a halogen atom.
これらの中でも、塗膜の透過率と感度の両立の観点から、ヒンダードフェノール系酸化防止剤、ヒンダードアミン系酸化防止剤、リン系酸化防止剤、イオウ系酸化防止剤が好ましい。 Among these, hindered phenol antioxidants, hindered amine antioxidants, phosphorus antioxidants, and sulfur antioxidants are preferred from the viewpoint of achieving both transmittance and sensitivity of the coating film.
酸化防止剤は、単独または2種類以上を併用して使用できる。 Antioxidants can be used alone or in combination of two or more.
酸化防止剤の含有量は、硬化性樹脂組成物の不揮発分100質量%中、0.5~5.0質量%が好ましい。これにより透過率、および感度がより向上する。 The content of the antioxidant is preferably 0.5 to 5.0% by mass based on 100% by mass of nonvolatile content of the curable resin composition. This further improves transmittance and sensitivity.
<レベリング剤>
硬化性樹脂組成物は、レベリング剤を含有できる。これにより、被膜形成時の透明基板に対する濡れ性および被膜の乾燥性がより向上する。レベリング剤は、例えば、シリコーン系界面活性剤、フッ素系界面活性剤、ノニオン性界面活性剤、カチオン性界面活性剤、アニオン性界面活性剤等が挙げられる。
<Leveling agent>
The curable resin composition can contain a leveling agent. This further improves the wettability to the transparent substrate during coating formation and the drying properties of the coating. Examples of the leveling agent include silicone surfactants, fluorine surfactants, nonionic surfactants, cationic surfactants, and anionic surfactants.
レベリング剤は、単独または2種類以上を混合して使用できる。 Leveling agents can be used alone or in combination of two or more.
レベリング剤の含有量は、硬化性樹脂組成物の不揮発分100質量%中、0.001~2.0質量%が好ましく、0.005~1.0質量%がより好ましい。この範囲内であることで、硬化性樹脂組成物の塗布性と透過率とのバランスがより向上する。 The content of the leveling agent is preferably 0.001 to 2.0% by mass, more preferably 0.005 to 1.0% by mass based on 100% by mass of nonvolatile content of the curable resin composition. Within this range, the balance between coatability and transmittance of the curable resin composition is further improved.
<貯蔵安定剤>
硬化性樹脂組成物は、組成物の経時粘度を安定化させるために貯蔵安定剤を含有できる。
貯蔵安定剤は、例えば、ベンジルトリメチルクロライド、ジエチルヒドロキシアミンなどの4級アンモニウムクロライド、乳酸、シュウ酸などの有機酸およびそのメチルエーテル、t-ブチルピロカテコール、テトラエチルホスフィン、テトラフェニルフォスフィンなどの有機ホスフィン、亜リン酸塩等が挙げられる。
<Storage stabilizer>
The curable resin composition can contain a storage stabilizer to stabilize the viscosity of the composition over time.
Storage stabilizers include, for example, quaternary ammonium chlorides such as benzyl trimethyl chloride and diethyl hydroxyamine, organic acids such as lactic acid and oxalic acid and their methyl ethers, and organic acids such as t-butylpyrocatechol, tetraethylphosphine, and tetraphenylphosphine. Examples include phosphine and phosphites.
貯蔵安定剤は、硬化性樹脂組成物の不揮発分100質量%中、0.01~1質量%程度が好ましい。 The storage stabilizer is preferably about 0.01 to 1% by mass based on 100% by mass of nonvolatile content of the curable resin composition.
<溶剤>
硬化性樹脂組成物は、溶剤を含有できる。これにより硬化性樹脂組成物の粘度調整が容易になるため、表面が平滑な被膜を形成し易い。溶剤は、使用目的に応じて適宜選択し、適量を含有すれば良い。
<Solvent>
The curable resin composition can contain a solvent. This makes it easier to adjust the viscosity of the curable resin composition, making it easier to form a film with a smooth surface. The solvent may be appropriately selected depending on the purpose of use and may be contained in an appropriate amount.
溶剤は、例えば、エステル溶剤(分子内に-COO-を含み、-O-を含まない溶剤)、エーテル溶剤(分子内に-O-を含み、-COO-を含まない溶剤)、エーテルエステル溶剤(分子内に-COO-と-O-とを含む溶剤)、ケトン溶剤(分子内に-CO-を含み、-COO-を含まない溶剤)、アルコール溶剤(分子内にOHを含み、-O-、-CO-及び-COO-を含まない溶剤)、芳香族炭化水素溶剤、アミド溶剤、ジメチルスルホキシド等が挙げられる。 Examples of the solvent include ester solvents (solvents containing -COO- in the molecule but not containing -O-), ether solvents (solvents containing -O- but not -COO- in the molecule), and ether ester solvents. (solvents containing -COO- and -O- in the molecule), ketone solvents (solvents containing -CO- but not -COO- in the molecule), alcohol solvents (solvents containing OH in the molecule and -O -, -CO- and -COO--free), aromatic hydrocarbon solvents, amide solvents, dimethyl sulfoxide, and the like.
これらの中でも塗布性、乾燥性の面で1atmにおける沸点が120℃以上180℃以下の溶剤が好ましい。例えば、プロピレングリコールモノメチルエーテルアセテート、シクロヘキシルアセテート、乳酸エチル、乳酸ブチル、プロピレングリコールモノメチルエーテル、3-エトキシプロピオン酸エチル、エチレングリコールモノメチルエーテル、ジエチレングリコールモノメチルエーテル、ジエチレングリコールモノエチルエーテル、4-ヒドロキシ-4-メチル-2-ペンタノン、シクロヘキサノン、N,N-ジメチルホルムアミド、N-メチルピロリドン等が好ましく、プロピレングリコールモノメチルエーテルアセテート、シクロヘキサノン、シクロヘキシルアセテート、プロピレングリコールモノメチルエーテル、乳酸エチル、3-エトキシプロピオン酸エチル等がより好ましい。 Among these, solvents having a boiling point of 120° C. or higher and 180° C. or lower at 1 atm are preferred in terms of coating properties and drying properties. For example, propylene glycol monomethyl ether acetate, cyclohexyl acetate, ethyl lactate, butyl lactate, propylene glycol monomethyl ether, ethyl 3-ethoxypropionate, ethylene glycol monomethyl ether, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, 4-hydroxy-4-methyl -2-pentanone, cyclohexanone, N,N-dimethylformamide, N-methylpyrrolidone, etc. are preferred, and propylene glycol monomethyl ether acetate, cyclohexanone, cyclohexyl acetate, propylene glycol monomethyl ether, ethyl lactate, ethyl 3-ethoxypropionate, etc. are more preferred. preferable.
溶剤は、単独または2種類以上を混合して使用できる。 The solvents can be used alone or in combination of two or more.
<カラーフィルタ>
本明細書でカラーフィルタは、赤色フィルタセグメント、緑色フィルタセグメント、および青色フィルタセグメントを有することが好ましい。また、カラーフィルタは、カラーフィルタセグメントとして、さらにマゼンタ色フィルタセグメント、シアン色フィルタセグメント、黄色フィルタセグメントを有することができる。なお、透明基板に代えて反射基板を使用できる。透明基板は、例えば、ガラス基板が挙げられる。反射基板は、例えばアルミ電極や金属薄膜を反射面として使用する基板が挙げられる。
<Color filter>
Preferably, the color filter herein has a red filter segment, a green filter segment, and a blue filter segment. Further, the color filter can further include a magenta color filter segment, a cyan color filter segment, and a yellow filter segment as color filter segments. Note that a reflective substrate can be used instead of the transparent substrate. Examples of the transparent substrate include a glass substrate. Examples of the reflective substrate include a substrate using an aluminum electrode or a metal thin film as a reflective surface.
<硬化膜の製造方法> <Method for manufacturing cured film>
硬化膜は、例えば、フォトリソグラフィー法等で作製できる。
フォトリソグラフィー法は、例えば、硬化性樹脂組成物を、基板上に、乾燥膜厚が0.05~5μm程度になるように塗布し被膜を形成する。得られた被膜(以下、第一の被膜という)は、所定のパターンを有するマスクを通して露光(光照射)を行う。次いで、溶剤又はアルカリ現像液に浸漬するかもしくはスプレーなどにより現像液を噴霧し現像を行い、未硬化部分を除去して所望のパターンを得る。また、露光前の第一の被膜上にさらにポリビニルアルコールや水溶性アクリル樹脂を使用して第二の被膜(酸素遮断膜)を形成できる。これにより第一の被膜は、酸素に接しないため露光感度がより向上する。
The cured film can be produced by, for example, a photolithography method.
In the photolithography method, for example, a curable resin composition is applied onto a substrate to form a film with a dry film thickness of about 0.05 to 5 μm. The obtained film (hereinafter referred to as the first film) is exposed (light irradiated) through a mask having a predetermined pattern. Next, development is performed by immersing in a solvent or alkaline developer or spraying a developer, and uncured portions are removed to obtain a desired pattern. Furthermore, a second film (oxygen barrier film) can be formed on the first film before exposure using polyvinyl alcohol or a water-soluble acrylic resin. As a result, the first film does not come into contact with oxygen, so that the exposure sensitivity is further improved.
本明細書の硬化膜は、カラーフィルタ上に保護膜として形成しても良い。 The cured film of this specification may be formed as a protective film on a color filter.
塗布装置は、例えば、スプレーコートやスピンコート、スリットコート、ロールコート等が挙げられる。塗工に際し、乾燥工程を行うことができる。乾燥装置は、例えば、熱風オーブン、赤外線ヒーター等が挙げられる。 Examples of the coating device include spray coating, spin coating, slit coating, and roll coating. A drying process can be performed during coating. Examples of the drying device include a hot air oven and an infrared heater.
前記現像液は、アルカリ現像液として、例えば、炭酸ナトリウム、水酸化ナトリウム等の無機アルカリ;テトラメチルアンモニウムハイドロオキサイド、ジメチルベンジルアミン、トリエタノールアミン等の有機アルカリが挙げられる。また、現像液は、消泡剤や界面活性剤を添加できる。 Examples of the alkaline developer include inorganic alkalis such as sodium carbonate and sodium hydroxide; organic alkalis such as tetramethylammonium hydroxide, dimethylbenzylamine, and triethanolamine. Further, an antifoaming agent and a surfactant can be added to the developer.
本明細書で硬化膜は、固体撮像素子、有機EL表示装置、量子ドット表示装置、電子ペーパー、ヘッドマウントディスプレイ等を構成する部材に使用できる。 In this specification, the cured film can be used for members constituting solid-state image sensors, organic EL display devices, quantum dot display devices, electronic paper, head-mounted displays, and the like.
以下、本発明を実施例に基づいて説明するが、本発明はこれらに限定されない。また、
特に断りの無い限り「部」は「質量部」、「%」は「質量%」を意味する。なお、実施例4、5、6,7は参考例である。
The present invention will be described below based on Examples, but the present invention is not limited thereto. Also,
Unless otherwise specified, "part" means "part by mass" and "%" means "% by mass." Note that Examples 4, 5, 6, and 7 are reference examples.
まず、樹脂の平均分子量、及び樹脂の酸価の測定方法の計算方法について説明する。 First, a calculation method for measuring the average molecular weight of the resin and the acid value of the resin will be explained.
(樹脂の平均分子量)
樹脂の重量平均分子量(Mw)は、RI検出器を装備したゲルパーミエーションクロマトグラフィー(GPC)で測定した。装置としてHLC-8220GPC(東ソー株式会社製)を用い、分離カラムを2本直列に繋ぎ、両方の充填剤には「TSK-GEL SUPER HZM-N」を2連でつなげて使用し、オーブン温度40℃、溶離液としてテトラヒドロフラン(THF)溶液を用い、流速0.35ml/minで測定した。サンプルは1wt%の上記溶離液からなる溶剤に溶解し、20マイクロリットル注入した。分子量はいずれもポリスチレン換算値である。
(Average molecular weight of resin)
The weight average molecular weight (Mw) of the resin was measured by gel permeation chromatography (GPC) equipped with an RI detector. HLC-8220GPC (manufactured by Tosoh Corporation) was used as the equipment, two separation columns were connected in series, and the packing material for both was "TSK-GEL SUPER HZM-N" connected in two series, and the oven temperature was 40. ℃, using a tetrahydrofuran (THF) solution as an eluent, and a flow rate of 0.35 ml/min. The sample was dissolved in a solvent consisting of 1 wt % of the above eluent, and 20 microliters of the sample was injected. All molecular weights are polystyrene equivalent values.
(樹脂の酸価)
樹脂溶液0.5~1gに、アセトン80ml及び水10mlを加えて攪拌して均一に溶解させ、0.1mol/LのKOH水溶液を滴定液として、自動滴定装置(「COM-555」平沼産業製)を用いて滴定し、樹脂溶液の酸価(mgKOH/g)を測定した。そして、樹脂溶液の酸価と樹脂溶液の不揮発分濃度から、樹脂の不揮発分あたりの酸価を算出した。
(acid value of resin)
Add 80 ml of acetone and 10 ml of water to 0.5 to 1 g of the resin solution, stir to dissolve uniformly, and use an automatic titration device ("COM-555" manufactured by Hiranuma Sangyo) using 0.1 mol/L KOH aqueous solution as the titrant. ) to measure the acid value (mgKOH/g) of the resin solution. Then, the acid value per nonvolatile content of the resin was calculated from the acid value of the resin solution and the nonvolatile content concentration of the resin solution.
(塩基性樹脂のアミン価(mgKOH/g))
塩基性樹脂のアミン価は、ASTM D 2074の方法に準拠し、測定した全アミン価(mgKOH/g)を不揮発分換算した値である。
(Amine value of basic resin (mgKOH/g))
The amine value of the basic resin is the value obtained by converting the total amine value (mgKOH/g) measured in accordance with the method of ASTM D 2074 into nonvolatile content.
<塩基性樹脂(A)の製造例>
(塩基性樹脂(A-1)の製造)
温度計、攪拌機、蒸留管、冷却器を具備した4つ口セパラブルフラスコに、メチルエチルケトン(MEK)70部、n-ブチルメタクリレート80.0部、スパルテイン2.8部、ブロモイソ酪酸エチル1.9部を仕込み窒素気流下で40℃に昇温した。塩化第一銅 1.1部を投入し、75℃まで昇温して重合を開始した。3時間重合後、重合溶液をサンプリングし、重合の不揮発分から重合収率が95%以上である事を確認し、N、N-ジメチルアミノエチルメタクリレート20.0部、及びMEK30.0部を添加し、重合を継続した。2時間後重合溶液の不揮発分から重合収率が97%以上であるのを確認し、室温に冷却して重合を停止した。得られた樹脂溶液100部をメチルエチルケトン100部で希釈し、カチオン交換樹脂「ダイアイオン PK228LH(三菱化学社製)」60部を添加し室温で1時間攪拌し、更に、中和剤として「キョーワード500SN(協和化学工業社製)」を6部添加し30分攪拌を行った。濾過によりカチオン交換樹脂と吸着剤を取り除く事で重合触媒の残渣を取り除いた。更に、樹脂溶液を濃縮しプロピレングリコールモノメチルエーテルアセテートに置換して不揮発分が40重量%の3級アミノ基を有する塩基性樹脂(Mw=8700、アミン価61mgKOH/g)(A-1)の溶液を得た。
<Production example of basic resin (A)>
(Production of basic resin (A-1))
In a four-neck separable flask equipped with a thermometer, stirrer, distillation tube, and condenser, add 70 parts of methyl ethyl ketone (MEK), 80.0 parts of n-butyl methacrylate, 2.8 parts of sparteine, and 1.9 parts of ethyl bromoisobutyrate. The temperature was raised to 40°C under a nitrogen stream. 1.1 parts of cuprous chloride was added, and the temperature was raised to 75°C to start polymerization. After polymerization for 3 hours, the polymerization solution was sampled and it was confirmed that the polymerization yield was 95% or more from the nonvolatile components of the polymerization, and 20.0 parts of N,N-dimethylaminoethyl methacrylate and 30.0 parts of MEK were added. , polymerization continued. After 2 hours, it was confirmed from the nonvolatile components of the polymerization solution that the polymerization yield was 97% or more, and the polymerization was stopped by cooling to room temperature. 100 parts of the obtained resin solution was diluted with 100 parts of methyl ethyl ketone, 60 parts of cation exchange resin "Diaion PK228LH (manufactured by Mitsubishi Chemical Corporation)" was added, and the mixture was stirred at room temperature for 1 hour. 500SN (manufactured by Kyowa Chemical Industry Co., Ltd.)" was added and stirred for 30 minutes. Residues of the polymerization catalyst were removed by removing the cation exchange resin and adsorbent by filtration. Furthermore, the resin solution was concentrated and replaced with propylene glycol monomethyl ether acetate to prepare a solution of a basic resin (Mw = 8700, amine value 61 mgKOH/g) (A-1) having a tertiary amino group with a nonvolatile content of 40% by weight. I got it.
(塩基性樹脂(A-2)の製造)
ガス導入管、コンデンサー、攪拌翼、及び温度計を備え付けた反応槽に、メトキシプロピルアセテート133部を仕込み、窒素置換しながら100℃に昇温した。滴下槽にN,N-ジメチルアミノエチルメタクリレート40部、n-ブチルメタクリレート160部、メトキシプロピルアセテート61部、及び2,2’-アゾビス(2,4-ジメチルバレロニトリル)を6部仕込み、均一になるまで攪拌した後、反応槽へ2時間かけて滴下し、その後同温度で3時間反応を継続した。室温まで冷却した後、樹脂溶液約2gをサンプリングして180℃、20分加熱乾燥して不揮発分を測定し、不揮発分が40質量%になるようにプロピレングリコールモノメチルエーテルアセテートを添加して、3級アミノ基を有する塩基性樹脂(Mw=8800、アミン価=61mgKOH/g)(A-2)の溶液を得た。
(Production of basic resin (A-2))
133 parts of methoxypropyl acetate was charged into a reaction tank equipped with a gas introduction tube, a condenser, a stirring blade, and a thermometer, and the temperature was raised to 100° C. while purging with nitrogen. Charge 40 parts of N,N-dimethylaminoethyl methacrylate, 160 parts of n-butyl methacrylate, 61 parts of methoxypropyl acetate, and 6 parts of 2,2'-azobis(2,4-dimethylvaleronitrile) into a dropping tank and mix uniformly. After the mixture was stirred until the mixture was mixed, it was added dropwise to the reaction tank over 2 hours, and the reaction was continued for 3 hours at the same temperature. After cooling to room temperature, about 2 g of the resin solution was sampled and heated and dried at 180°C for 20 minutes to measure the nonvolatile content. Propylene glycol monomethyl ether acetate was added so that the nonvolatile content was 40% by mass. A solution of a basic resin having a grade amino group (Mw=8800, amine value=61 mgKOH/g) (A-2) was obtained.
(塩基性樹脂(A-3)の製造)
温度計、攪拌機、蒸留管、冷却器を具備した4つ口セパラブルフラスコに、メチルエチルケトン70部、n-ブチルアクリレート76.0部、スパルテイン2.8部、ブロモイソ酪酸エチル1.9部を仕込み窒素気流下で40℃に昇温した。塩化第一銅 1.1部を投入し、75℃まで昇温して重合を開始した。3時間重合後、重合溶液をサンプリングし重合の不揮発分から重合収率が95%以上である事を確認し、N、N-ジメチルアミノエチルメタクリレート24.0部、及びMEK30.0部を添加し、更に、重合を行った。2時間後重合溶液の不揮発分から重合収率が97%以上であるのを確認し、室温に冷却して重合を停止した。得られた樹脂溶液100部をメチルエチルケトン100部で希釈し、カチオン交換樹脂「ダイアイオン PK228LH(三菱化学社製)」60部を添加し室
温で1時間攪拌し、更に、中和剤として「キョーワード500SN(協和化学工業社製
)」を6部添加し30分攪拌を行った。濾過によりカチオン交換樹脂と吸着剤を取り除く事で重合触媒の残渣を取り除いた。更に、樹脂溶液を濃縮しプロピレングリコールモノメチルエーテルアセテートに置換して不揮発分が40重量%の3級アミノ基を有する塩基性樹脂(Mw=12200、アミン価86mgKOH/g)(A-3)の溶液を得た。
(Production of basic resin (A-3))
70 parts of methyl ethyl ketone, 76.0 parts of n-butyl acrylate, 2.8 parts of sparteine, and 1.9 parts of ethyl bromoisobutyrate were placed in a four-neck separable flask equipped with a thermometer, stirrer, distillation tube, and condenser. The temperature was raised to 40°C under a nitrogen stream. 1.1 parts of cuprous chloride was added, and the temperature was raised to 75°C to start polymerization. After 3 hours of polymerization, the polymerization solution was sampled and it was confirmed that the polymerization yield was 95% or more from the nonvolatile components of the polymerization, and 24.0 parts of N,N-dimethylaminoethyl methacrylate and 30.0 parts of MEK were added. Furthermore, polymerization was performed. After 2 hours, it was confirmed from the nonvolatile components of the polymerization solution that the polymerization yield was 97% or more, and the polymerization was stopped by cooling to room temperature. 100 parts of the obtained resin solution was diluted with 100 parts of methyl ethyl ketone, 60 parts of cation exchange resin "Diaion PK228LH (manufactured by Mitsubishi Chemical Corporation)" was added, and the mixture was stirred at room temperature for 1 hour. 500SN (manufactured by Kyowa Chemical Industry Co., Ltd.)" was added and stirred for 30 minutes. Residues of the polymerization catalyst were removed by removing the cation exchange resin and adsorbent by filtration. Furthermore, the resin solution was concentrated and replaced with propylene glycol monomethyl ether acetate to obtain a solution of a basic resin (Mw = 12200, amine value 86 mgKOH/g) (A-3) having a tertiary amino group with a nonvolatile content of 40% by weight. I got it.
(塩基性樹脂(A-4)の製造)
温度計、攪拌機、蒸留管、冷却器を具備した4つ口セパラブルフラスコに、メチルエチルケトン70部、n-ブチルアクリレート96.0部、スパルテイン2.8部、ブロモイソ酪酸エチル1.9部を仕込み窒素気流下で40℃に昇温した。塩化第一銅 1.1部を投入し、75℃まで昇温して重合を開始した。3時間重合後、重合溶液をサンプリングし、重合の不揮発分から重合収率が95%以上である事を確認し、N、N-ジメチルアミエチルメタクリレート4.0部、及びメチルエチルケトン30.0部を添加し、更に、重合を行った。2時間後重合溶液の不揮発分から重合収率が97%以上であるのを確認し、室温に冷却して重合を停止した。得られた樹脂溶液100部をメチルエチルケトン100部で希釈し、カチオン交換樹脂「ダイアイオン PK228LH(三菱化学社製)」60部を添加し室温で1時間攪拌し、更に、中和剤として「キョーワード500SN(協和化学工業社製)」を6部添加し30分攪拌を行った。濾過によりカチオン交換樹脂と吸着剤を取り除く事で重合触媒の残渣を取り除いた。更に、樹脂溶液を濃縮しプロピレングリコールモノメチルエーテルアセテートに置換して不揮発分が40重量%の3級アミノ基を有する塩基性樹脂(Mw=12000、アミン価14mgKOH/g)(A-4)の溶液を得た。
(Production of basic resin (A-4))
70 parts of methyl ethyl ketone, 96.0 parts of n-butyl acrylate, 2.8 parts of sparteine, and 1.9 parts of ethyl bromoisobutyrate were placed in a four-neck separable flask equipped with a thermometer, stirrer, distillation tube, and condenser. The temperature was raised to 40°C under a nitrogen stream. 1.1 parts of cuprous chloride was added, and the temperature was raised to 75°C to start polymerization. After 3 hours of polymerization, the polymerization solution was sampled and it was confirmed that the polymerization yield was 95% or more from the nonvolatile components of the polymerization, and 4.0 parts of N,N-dimethylamiethyl methacrylate and 30.0 parts of methyl ethyl ketone were added. Then, polymerization was further carried out. After 2 hours, it was confirmed from the nonvolatile components of the polymerization solution that the polymerization yield was 97% or more, and the polymerization was stopped by cooling to room temperature. 100 parts of the obtained resin solution was diluted with 100 parts of methyl ethyl ketone, 60 parts of cation exchange resin "Diaion PK228LH (manufactured by Mitsubishi Chemical Corporation)" was added, and the mixture was stirred at room temperature for 1 hour. 500SN (manufactured by Kyowa Chemical Industry Co., Ltd.)" was added and stirred for 30 minutes. Residues of the polymerization catalyst were removed by removing the cation exchange resin and adsorbent by filtration. Furthermore, the resin solution was concentrated and replaced with propylene glycol monomethyl ether acetate to obtain a solution of a basic resin (Mw = 12000, amine value 14 mgKOH/g) (A-4) having a tertiary amino group with a nonvolatile content of 40% by weight. I got it.
(塩基性樹脂(A-5)の製造)
ガス導入管、コンデンサー、攪拌翼、及び温度計を備え付けた反応槽に、メトキシプロピルアセテート133部を仕込み、窒素置換しながら100℃に昇温した。滴下槽にN,N-ジメチルアミノエチルメタクリレート180部、2-ヒドロキシエチルメタクリレート20部、メトキシプロピルアセテート61部、及び2,2’-アゾビス(2,4-ジメチルバレロニトリル)を6部仕込み、均一になるまで攪拌した後、反応槽へ2時間かけて滴下し、その後同温度で3時間反応を継続し、3級アミノ基を有するビニル系樹脂の溶液を得た。室温まで冷却した後、樹脂溶液約2gをサンプリングして180℃、20分加熱乾燥して不揮発分を測定し、先に合成した樹脂溶液に不揮発分が40重量%になるようにプロピレングリコールモノメチルエーテルアセテートを添加して、3級アミノ基を有する塩基性樹脂(Mw=10000、アミン価330mgKOH/g)(A-5)溶液を得た。
(Production of basic resin (A-5))
133 parts of methoxypropyl acetate was charged into a reaction tank equipped with a gas introduction tube, a condenser, a stirring blade, and a thermometer, and the temperature was raised to 100° C. while purging with nitrogen. A dropping tank was charged with 180 parts of N,N-dimethylaminoethyl methacrylate, 20 parts of 2-hydroxyethyl methacrylate, 61 parts of methoxypropyl acetate, and 6 parts of 2,2'-azobis(2,4-dimethylvaleronitrile), and then uniformly mixed. The mixture was stirred until the mixture was dissolved, and then added dropwise to the reaction tank over a period of 2 hours.The reaction was then continued at the same temperature for 3 hours to obtain a solution of a vinyl resin having a tertiary amino group. After cooling to room temperature, about 2 g of the resin solution was sampled and dried by heating at 180°C for 20 minutes to measure the nonvolatile content. Propylene glycol monomethyl ether was added to the previously synthesized resin solution so that the nonvolatile content was 40% by weight. Acetate was added to obtain a basic resin having a tertiary amino group (Mw=10000, amine value 330 mgKOH/g) (A-5) solution.
(塩基性樹脂(A-6)の製造)
ガス導入管、コンデンサー、攪拌翼、及び温度計を備え付けた反応槽に、プロピレングリコールモノメチルエーテルアセテート(PGMAc)133部を仕込み、窒素置換しながら110℃に昇温した。滴下槽にジエチルアミノエチルメタクリレート177部、メチルアクリレート3部、2-ヒドロキシエチルメタクリレート20部、PGMAc61部、及び2,2’-アゾビス(2,4-ジメチルバレロニトリル)を6部仕込み、均一になるまで攪拌した後、反応槽へ2時間かけて滴下し、その後同温度で3時間反応を継続した。さらに、不揮発分が40重量%になるようにプロピレングリコールモノメチルエーテルアセテートを添加して希釈して、3級アミノ基を有する塩基性樹脂(Mw=9000、アミン価315mgKOH/g)(A-6)溶液を調製した。
(Production of basic resin (A-6))
133 parts of propylene glycol monomethyl ether acetate (PGMAc) was charged into a reaction tank equipped with a gas introduction pipe, a condenser, a stirring blade, and a thermometer, and the temperature was raised to 110° C. while purging with nitrogen. Charge 177 parts of diethylaminoethyl methacrylate, 3 parts of methyl acrylate, 20 parts of 2-hydroxyethyl methacrylate, 61 parts of PGMAc, and 6 parts of 2,2'-azobis(2,4-dimethylvaleronitrile) into a dropping tank until uniform. After stirring, it was added dropwise to the reaction tank over 2 hours, and then the reaction was continued at the same temperature for 3 hours. Furthermore, propylene glycol monomethyl ether acetate was added to dilute the nonvolatile content to 40% by weight, resulting in a basic resin having a tertiary amino group (Mw=9000, amine value 315 mgKOH/g) (A-6). A solution was prepared.
(塩基性樹脂(A-7)の製造)
ガス導入管、コンデンサー、攪拌翼、及び温度計を備え付けた反応槽に、PGMAc133部を仕込み、窒素置換しながら110℃に昇温した。滴下槽に1,2,2,6,6-ペンタメチルピペリジルメタクリレート177部、メチルアクリレート3部、2-ヒドロキシエチルメタクリレート20部、PGMAc61部、及び2,2’-アゾビス(2,4-ジメチルバレロニトリル)を6部仕込み、均一になるまで攪拌した後、反応槽へ2時間かけて滴下し、その後同温度で3時間反応を継続した。さらに、不揮発分が40重量%になるようにプロピレングリコールモノメチルエーテルアセテートを添加して希釈して、3級アミノ基を有する塩基性樹脂(Mw=7200、アミン価201mgKOH/g)(A-7)溶液を調製した。
(Production of basic resin (A-7))
133 parts of PGMAc was charged into a reaction tank equipped with a gas introduction tube, a condenser, a stirring blade, and a thermometer, and the temperature was raised to 110° C. while purging with nitrogen. In a dropping tank were placed 177 parts of 1,2,2,6,6-pentamethylpiperidyl methacrylate, 3 parts of methyl acrylate, 20 parts of 2-hydroxyethyl methacrylate, 61 parts of PGMAc, and 2,2'-azobis(2,4-dimethylvalero). After charging 6 parts of nitrile and stirring until uniform, the mixture was added dropwise to the reaction tank over 2 hours, and the reaction was then continued at the same temperature for 3 hours. Furthermore, propylene glycol monomethyl ether acetate was added to dilute the nonvolatile content to 40% by weight, resulting in a basic resin having a tertiary amino group (Mw=7200, amine value 201mgKOH/g) (A-7). A solution was prepared.
(塩基性樹脂(A-8)の調整)
ガス導入管、コンデンサー、攪拌翼、及び温度計を備え付けた反応装置に、メチルメタクリレート30部、nーブチルメタクリレート30部、ヒドロキシエチルメタクリレート20部、テトラメチルエチレンジアミン13.2部を仕込み、窒素を流しながら50℃で1時間撹拌し、反応装置内を窒素置換した。次に、ブロモイソ酪酸エチル9.3部、塩化第一銅5.6部、PGMAc133部を仕込み、窒素気流下で、110℃まで昇温して第一ブロック(Bブロック)の重合を開始した。4時間重合後、重合溶液をサンプリングして不揮発分測定を行い、不揮発分から換算して重合転化率が98%以上であることを確認した。
次に、この反応装置に、PGMAc61部、第二ブロック(Aブロック)モノマーとして1,2,2,6,6-ペンタメチルピペリジルメタクリレート20部(日立化成工業社製、ファンクリルFA-711MM)を投入し、110℃・窒素雰囲気下を保持したまま撹拌し、反応を継続した。1,2,2,6,6-ペンタメチルピペリジルメタクリレート投入から2時間後、重合溶液をサンプリングして不揮発分測定を行い、不揮発分から換算して第二ブロック(Aブロック)の重合転化率が98%以上であることを確認し、反応溶液を室温まで冷却して重合を停止した。さらに、不揮発分が40重量%になるようにプロピレングリコールモノメチルエーテルアセテートを添加して、3級アミノ基を有する塩基性樹脂(Mw=5400、アミン価57mgKOH/g)(A-8)溶液を得た。
(Adjustment of basic resin (A-8))
30 parts of methyl methacrylate, 30 parts of n-butyl methacrylate, 20 parts of hydroxyethyl methacrylate, and 13.2 parts of tetramethylethylenediamine were charged into a reaction apparatus equipped with a gas inlet pipe, a condenser, a stirring blade, and a thermometer, and the mixture was flushed with nitrogen. The mixture was stirred at 50° C. for 1 hour, and the inside of the reactor was purged with nitrogen. Next, 9.3 parts of ethyl bromoisobutyrate, 5.6 parts of cuprous chloride, and 133 parts of PGMAc were charged, and the temperature was raised to 110° C. under a nitrogen stream to start polymerization of the first block (B block). After 4 hours of polymerization, the polymerization solution was sampled and the nonvolatile content was measured, and it was confirmed that the polymerization conversion rate was 98% or more as calculated from the nonvolatile content.
Next, 61 parts of PGMAc and 20 parts of 1,2,2,6,6-pentamethylpiperidyl methacrylate (manufactured by Hitachi Chemical Co., Ltd., Fancryl FA-711MM) were added to this reactor. The reaction was continued by stirring while maintaining the temperature at 110° C. and nitrogen atmosphere. Two hours after adding 1,2,2,6,6-pentamethylpiperidyl methacrylate, the polymerization solution was sampled and the non-volatile content was measured, and the polymerization conversion rate of the second block (A block) was 98 in terms of non-volatile content. % or more, and the reaction solution was cooled to room temperature to stop the polymerization. Furthermore, propylene glycol monomethyl ether acetate was added so that the nonvolatile content was 40% by weight to obtain a basic resin having a tertiary amino group (Mw=5400, amine value 57 mgKOH/g) (A-8) solution. Ta.
(塩基性樹脂(A-9)の調整)
ガス導入管、コンデンサー、攪拌翼、及び温度計を備え付けた反応装置に、メチルメタクリレート40部、nーブチルメタクリレート10部、触媒としてテトラメチルエチレンジアミン13.2部を仕込み、窒素を流しながら50℃で1時間撹拌し、反応装置内を窒素置換した。次に、開始剤としてブロモイソ酪酸エチル9.3部、触媒として塩化第一銅5.6部、PGMAc133部を仕込み、窒素気流下で、110℃まで昇温して第一ブロック(Bブロック)の重合を開始した。4時間重合後、重合溶液をサンプリングして不揮発分測定を行い、不揮発分から換算して重合転化率が98%以上であることを確認した。次に、この反応装置に、PGMAc61部、第二ブロック(Aブロック)モノマーとしてジメチルアミノエチルメタクリレート40部、メタクリロイルオキシエチルベンジルジメチルアンモニウムクロライド10部を投入し、110℃で窒素雰囲気下を保持したまま撹拌し、反応を継続した。投入から2時間後、重合溶液をサンプリングして不揮発分測定を行い、不揮発分から換算して第二ブロック(Aブロック)の重合転化率が98%以上であることを確認し、反応溶液を室温まで冷却して重合を停止した。さらに、不揮発分が40%になるようにプロピレングリコールモノメチルエーテルアセテートを添加して、3級アミノ基および4級アンモニウム塩基を有する塩基性樹脂(Mw=20000、アミン価170mgKOH/g)(A-9)溶液を得た。
(Adjustment of basic resin (A-9))
40 parts of methyl methacrylate, 10 parts of n-butyl methacrylate, and 13.2 parts of tetramethylethylenediamine as a catalyst were charged into a reaction apparatus equipped with a gas introduction pipe, a condenser, a stirring blade, and a thermometer, and the mixture was heated at 50°C while flowing nitrogen. The mixture was stirred for 1 hour, and the inside of the reaction apparatus was purged with nitrogen. Next, 9.3 parts of ethyl bromoisobutyrate as an initiator, 5.6 parts of cuprous chloride and 133 parts of PGMAc as a catalyst were charged, and the temperature was raised to 110°C under a nitrogen stream to form the first block (B block). Polymerization started. After 4 hours of polymerization, the polymerization solution was sampled and the nonvolatile content was measured, and it was confirmed that the polymerization conversion rate was 98% or more as calculated from the nonvolatile content. Next, 61 parts of PGMAc, 40 parts of dimethylaminoethyl methacrylate as a second block (A block) monomer, and 10 parts of methacryloyloxyethylbenzyldimethylammonium chloride were added to this reactor, and the mixture was kept at 110°C under a nitrogen atmosphere. The reaction was continued with stirring. Two hours after the addition, the polymerization solution was sampled and the nonvolatile content was measured, and it was confirmed that the polymerization conversion rate of the second block (block A) was 98% or more in terms of nonvolatile content, and the reaction solution was heated to room temperature. Polymerization was stopped by cooling. Furthermore, propylene glycol monomethyl ether acetate was added so that the nonvolatile content was 40%, and a basic resin having a tertiary amino group and a quaternary ammonium base (Mw=20000, amine value 170 mgKOH/g) (A-9 ) solution was obtained.
<アルカリ可溶性樹脂(B)の製造例>
(アルカリ可溶性樹脂(B-1)の製造)
撹拌装置、滴下ロート、コンデンサー、温度計、ガス導入管を備えたフラスコにPGMAc150部を入れ、容器に窒素ガスを注入しながら120℃に加熱して、同温度で滴下管よりスチレン10.0部、グリシジルメタクリレート32.4部、ジシクロペンタニルメタクリレート10.0部、アゾビスイソブチロニトリル2.5部の混合物を2.5時間かけて滴下し重合反応を行った。
次にフラスコ内を空気置換し、アクリル酸16.4部にトリスジメチルアミノメチルフェノール0.3部、及びハイドロキノン0.3部を投入し、120℃で5時間反応を続けた。 さらにテトラヒドロ無水フタル酸29.4部、トリエチルアミン0.5部を加え120℃で4時間反応させ、不揮発分が40%になるようにPGMAcを添加して樹脂(B-1)溶液を調製した。重合性不飽和基を有する樹脂(B-1)の重量平均分子量は9600、酸価は79mgKOH/gであった。
<Production example of alkali-soluble resin (B)>
(Production of alkali-soluble resin (B-1))
Put 150 parts of PGMAc into a flask equipped with a stirrer, a dropping funnel, a condenser, a thermometer, and a gas introduction tube, heat it to 120°C while injecting nitrogen gas into the container, and add 10.0 parts of styrene from the dropping tube at the same temperature. A mixture of 32.4 parts of glycidyl methacrylate, 10.0 parts of dicyclopentanyl methacrylate, and 2.5 parts of azobisisobutyronitrile was added dropwise over 2.5 hours to carry out a polymerization reaction.
Next, the inside of the flask was purged with air, and 0.3 parts of trisdimethylaminomethylphenol and 0.3 parts of hydroquinone were added to 16.4 parts of acrylic acid, and the reaction was continued at 120° C. for 5 hours. Further, 29.4 parts of tetrahydrophthalic anhydride and 0.5 parts of triethylamine were added and reacted at 120°C for 4 hours, and PGMAc was added so that the nonvolatile content was 40% to prepare a resin (B-1) solution. The weight average molecular weight of the resin (B-1) having a polymerizable unsaturated group was 9600, and the acid value was 79 mgKOH/g.
(アルカリ可溶性樹脂(B-2)の製造)
撹拌装置、滴下ロート、コンデンサー、温度計、ガス導入管を備えたフラスコにPGMAc150部を入れ、容器に窒素ガスを注入しながら120℃に加熱して、同温度で滴下管より2-エチルヘキシルアクリレート33.0部、グリシジルメタクリレート28.3部、ジシクロペンタニルメタクリレート1.0部、アゾビスイソブチロニトリル2.5部の混合物を2.5時間かけて滴下し重合反応を行った。
次にフラスコ内を空気置換し、アクリル酸13.5部にトリスジメチルアミノメチルフェノール0.3部、及びハイドロキノン0.3部を投入し、120℃で5時間反応を続けた。 さらにテトラヒドロ無水フタル酸24.2部、トリエチルアミン0.5部を加え120℃で4時間反応させ、不揮発分が40%になるようにPGMAcを添加して重合性不飽和基を有する樹脂(B-2)溶液を調製した。樹脂(B-2)の重量平均分子量は6400、酸価は36mgKOH/gであった。
(Production of alkali-soluble resin (B-2))
Put 150 parts of PGMAc into a flask equipped with a stirrer, a dropping funnel, a condenser, a thermometer, and a gas inlet tube, heat it to 120°C while injecting nitrogen gas into the container, and add 2-ethylhexyl acrylate 33 through the dropping tube at the same temperature. 0 part of glycidyl methacrylate, 1.0 part of dicyclopentanyl methacrylate, and 2.5 parts of azobisisobutyronitrile was added dropwise over 2.5 hours to carry out a polymerization reaction.
Next, the inside of the flask was purged with air, and 0.3 parts of trisdimethylaminomethylphenol and 0.3 parts of hydroquinone were added to 13.5 parts of acrylic acid, and the reaction was continued at 120° C. for 5 hours. Further, 24.2 parts of tetrahydrophthalic anhydride and 0.5 parts of triethylamine were added and reacted at 120°C for 4 hours, and PGMAc was added so that the nonvolatile content was 40%. 2) A solution was prepared. The weight average molecular weight of the resin (B-2) was 6400, and the acid value was 36 mgKOH/g.
(アルカリ可溶性樹脂(B-3)の製造)
撹拌装置、滴下ロート、コンデンサー、温度計、ガス導入管を備えたフラスコにPGMAc145部を入れ、容器に窒素ガスを注入しながら120℃に加熱して、同温度で滴下管よりジシクロペンタニルメタクリレート20.0部、メタクリル酸108.0部、ベンジルメタクリレート27.6部、アゾビスイソブチロニトリル6.0部の混合物を2時間かけて滴下し重合反応を行った。
次にフラスコ内を空気置換し、グリシジルメタクリレート125.7部にトリスジメチルアミノメチルフェノール0.9部、及びハイドロキノン0.145部を投入し、120℃で6時間反応を続けた。さらに、不揮発分が40%になるようにPGMAcを添加して重合性不飽和基を有する樹脂(B-3)溶液を調製した。樹脂(B-3)の重量平均分子量は18500、酸価は120mgKOH/gであった。
(Production of alkali-soluble resin (B-3))
Put 145 parts of PGMAc into a flask equipped with a stirring device, a dropping funnel, a condenser, a thermometer, and a gas inlet tube, heat it to 120°C while injecting nitrogen gas into the container, and add dicyclopentanyl methacrylate from the dropping tube at the same temperature. A mixture of 20.0 parts of methacrylic acid, 108.0 parts of benzyl methacrylate, and 6.0 parts of azobisisobutyronitrile was added dropwise over 2 hours to carry out a polymerization reaction.
Next, the inside of the flask was purged with air, and 0.9 parts of trisdimethylaminomethylphenol and 0.145 parts of hydroquinone were added to 125.7 parts of glycidyl methacrylate, and the reaction was continued at 120° C. for 6 hours. Furthermore, PGMAc was added so that the nonvolatile content was 40% to prepare a resin (B-3) solution having polymerizable unsaturated groups. The weight average molecular weight of the resin (B-3) was 18,500, and the acid value was 120 mgKOH/g.
(アルカリ可溶性樹脂(B-4)の製造)
温度計、冷却管、窒素ガス導入管、滴下管及び撹拌装置を備えたセパラブル4口フラス
コに、プロピレングリコールモノメチルエーテルアセテート153.0部を仕込み、80℃に昇温し、反応容器内を窒素置換した後、滴下管よりメタクリル酸28.0部、ベンジルメタクリレート62.0部、ジシクロペンタニルメタクリレート10.0部、2,2’-アゾビスイソブチロニトリル1.4部の混合物を2時間かけて滴下した。滴下終了後、更に3時間反応を継続し、不揮発分が40重量%になるようにプロピレングリコールモノメチルエーテルアセテートを添加して、樹脂(B-4)溶液を調製した。樹脂(B-4)の酸価は98mgKOH/g、重量平均分子量は17500であった。
(Production of alkali-soluble resin (B-4))
153.0 parts of propylene glycol monomethyl ether acetate was charged into a separable 4-necked flask equipped with a thermometer, a cooling tube, a nitrogen gas introduction tube, a dropping tube, and a stirring device, and the temperature was raised to 80°C, and the inside of the reaction vessel was replaced with nitrogen. After that, a mixture of 28.0 parts of methacrylic acid, 62.0 parts of benzyl methacrylate, 10.0 parts of dicyclopentanyl methacrylate, and 1.4 parts of 2,2'-azobisisobutyronitrile was added from a dropping tube for 2 hours. It dripped. After the dropwise addition was completed, the reaction was continued for another 3 hours, and propylene glycol monomethyl ether acetate was added so that the nonvolatile content was 40% by weight to prepare a resin (B-4) solution. Resin (B-4) had an acid value of 98 mgKOH/g and a weight average molecular weight of 17,500.
<硬化性樹脂組成物の製造方法>
[実施例1]
(硬化性樹脂組成物(R-1))
下記組成の混合物を均一になるように攪拌混合した後、孔径0.45μmのナイロン製フィルタ(日本ポール社製)で濾過して、硬化性樹脂組成物(R-1)を得た。
塩基性樹脂(A-1:不揮発分40%)溶液:0.50部
アルカリ可溶性樹脂(B-1:不揮発分40%)溶液:3.00部
光重合性単量体(C-1):6.00部
光重合開始剤(D-1):0.68部
レベリング剤(E-1:不揮発分1%):1.00部
溶剤(I-1):88.82部
<Method for manufacturing curable resin composition>
[Example 1]
(Curable resin composition (R-1))
A mixture having the following composition was stirred and mixed to be uniform, and then filtered through a nylon filter (manufactured by Nippon Pall Co., Ltd.) with a pore size of 0.45 μm to obtain a curable resin composition (R-1).
Basic resin (A-1: non-volatile content 40%) solution: 0.50 parts Alkali-soluble resin (B-1: non-volatile content 40%) solution: 3.00 parts Photopolymerizable monomer (C-1): 6.00 parts Photopolymerization initiator (D-1): 0.68 parts Leveling agent (E-1: nonvolatile content 1%): 1.00 parts Solvent (I-1): 88.82 parts
[実施例2~28、比較例1~2]
(硬化性樹脂組成物(R-2~R-30)の作製)
表1に記載した通りの材料種、質量に変更した以外は、実施例1と同様に行い硬化膜用成物(R-2~R-30)をそれぞれ作製した。
[Examples 2 to 28, Comparative Examples 1 to 2]
(Preparation of curable resin compositions (R-2 to R-30))
Cured film compositions (R-2 to R-30) were prepared in the same manner as in Example 1, except that the material type and mass were changed as shown in Table 1.
<光重合性単量体(C)>
・(C-1)ペンタエリスリトールトリアクリレート及びペンタエリスリトールテトラアクリレートの混合物[アロニックスM450(東亞合成社製)]
・(C-2)ジペンタエリスリトールペンタアクリレート及びジペンタエリスリトールヘキサアクリレートの混合物[アロニックスM402(東亞合成社製)]
・(C-3)トリメチロールプロパントリアクリレート[アロニックスM309(東亞合成社製)]
・(C-4)トリメチロールプロパンEO変性トリアクリレート[アロニックスM350(東亞合成社製)]
・(C-5)ペンタエリスリトールトリアクリレート及びペンタエリスリトールテトラアクリレートの混合物[アロニックスM306(東亞合成社製)]
<Photopolymerizable monomer (C)>
・(C-1) Mixture of pentaerythritol triacrylate and pentaerythritol tetraacrylate [Aronix M450 (manufactured by Toagosei Co., Ltd.)]
・(C-2) Mixture of dipentaerythritol pentaacrylate and dipentaerythritol hexaacrylate [Aronix M402 (manufactured by Toagosei Co., Ltd.)]
・(C-3) Trimethylolpropane triacrylate [Aronix M309 (manufactured by Toagosei Co., Ltd.)]
・(C-4) Trimethylolpropane EO modified triacrylate [Aronix M350 (manufactured by Toagosei Co., Ltd.)]
・(C-5) Mixture of pentaerythritol triacrylate and pentaerythritol tetraacrylate [Aronix M306 (manufactured by Toagosei Co., Ltd.)]
<光重合開始剤(D)> <Photopolymerization initiator (D)>
・(D-6)下記(D-6-1)~(D-6-4)の4種を同量配合した混合物 ・(D-6) A mixture containing the same amounts of the following four types (D-6-1) to (D-6-4)
・(D-7)下記構造の化合物 ・(D-7) Compound with the following structure
<レベリング剤(E)>
・(E-1)東レ・ダウコーニング社製「FZ-2122」1部をPGMAc99部に溶解させた溶液
・(E-2)DIC社製「メガファックF-563」30部をPGMAc70部に溶解させた溶液
<Leveling agent (E)>
・(E-1) A solution in which 1 part of "FZ-2122" manufactured by Toray Dow Corning was dissolved in 99 parts of PGMAc. ・(E-2) 30 parts of "Megafac F-563" manufactured by DIC Corporation was dissolved in 70 parts of PGMAc. solution
<紫外線吸収剤(F)>
・(F-1)2-[4-[(2-ヒドロキシ-3-(ドデシルおよびトリデシル)オキシプロピル)オキシ]-2-ヒドロキシフェニル]-4,6-ビス(2,4-ジメチルフェニル)-1,3,5-トリアジン[TINUVIN326(BASFジャパン社製)]
・(F-2)2-(2H-ベンゾトリアゾール-2-イル)-4,6-ビス(1-メチル-1-フェニルエチル)フェノール[TINUVIN400(BASFジャパン社製)]
<Ultraviolet absorber (F)>
・(F-1) 2-[4-[(2-hydroxy-3-(dodecyl and tridecyl)oxypropyl)oxy]-2-hydroxyphenyl]-4,6-bis(2,4-dimethylphenyl)- 1,3,5-triazine [TINUVIN326 (manufactured by BASF Japan)]
・(F-2) 2-(2H-benzotriazol-2-yl)-4,6-bis(1-methyl-1-phenylethyl)phenol [TINUVIN400 (manufactured by BASF Japan)]
<重合禁止剤(G)>
・(G-1)メチルハイドロキノン
<Polymerization inhibitor (G)>
・(G-1) Methylhydroquinone
<シランカップリング剤(H)>
・(H-1)N-2-(アミノエチル)-3-アミノプロピルトリメトキシシラン
[信越シリコーン シランカップリング剤KBM-603(信越化学工業社製)]
<Silane coupling agent (H)>
・(H-1)N-2-(aminoethyl)-3-aminopropyltrimethoxysilane
[Shin-Etsu Silicone Silane Coupling Agent KBM-603 (manufactured by Shin-Etsu Chemical Co., Ltd.)]
<溶剤(I)>
・(I-1)PGMAc
・(I-2)(I-2-1)~(I-2-6)を下記質量部にて混合し、溶剤(I-2)とした。
(I-2-1)PGMAc:40部
(I-2-2)シクロヘキサノン:40部
(I-2-3)3-エトキシプロピオン酸エチル:10部
(I-2-4)プロピレングリコールモノメチルエーテル:10部
(I-2-5)シクロヘキサノールアセテート:10部
(I-2-6)ジプロプレングリコールメチルエーテルアセテート:10部
<Solvent (I)>
・(I-1) PGMAc
- (I-2) (I-2-1) to (I-2-6) were mixed in the following parts by mass to obtain a solvent (I-2).
(I-2-1) PGMAc: 40 parts (I-2-2) Cyclohexanone: 40 parts (I-2-3) Ethyl 3-ethoxypropionate: 10 parts (I-2-4) Propylene glycol monomethyl ether: 10 parts (I-2-5) Cyclohexanol acetate: 10 parts (I-2-6) Dipropylene glycol methyl ether acetate: 10 parts
<硬化性樹脂組成物の評価>
得られた硬化性樹脂組成物について、解像性、アルカリ現像液耐性、基板密着性、貯蔵安定性に関する試験を下記の方法で行った。試験の結果を表2に示す。
<Evaluation of curable resin composition>
The resulting curable resin composition was tested for resolution, alkaline developer resistance, substrate adhesion, and storage stability using the following methods. The results of the test are shown in Table 2.
(解像性)
硬化性樹脂組成物を厚さ200mmのシリコンウエハ基板上に、スピンコーターを用いて乾燥後の厚さが0.20μmとなるように塗布し、100℃20分乾燥して基板を得た。次に、i線ステッパー露光装置FPA-3000i5+(Canon社製)を使用して、365nmの波長で2000J/m2の露光を行った。露光は、10.0μm四方の正方形の遮光部を有するフォトマスクを通して行った。露光後の塗膜をTMAH2.38%(多摩化学工業製 テトラメチルアンモニウムヒドロキシドの2.38%水溶液)で1分、パドル現像を行った。パドル現像後、20秒スピンシャワーにて純水でリンスを行い、スピン乾燥させた。遮光部により形成されたホールパターンを走査型電子顕微鏡(日立ハイテク社製「S-3000N」)を用いて観察し、下記基準で評価した。
◎:ホールパターンの一辺が9.5μm以上、10.0μm未満(非常に良好なレベル)
○:ホールパターンの一辺が9.0μm以上、9.5μm未満(良好なレベル)
△:ホールパターンの一辺が8.0μm以上、9.0μm未満(実用可能なレベル)
×:ホールパターンの一辺が8.0μm未満(実用には適さないレベル)
なお、以下同様に◎と〇が実用上好ましいレベル、△が実用可能なレベル、×は実用には適さないレベルである。
(Resolution)
The curable resin composition was coated on a silicon wafer substrate with a thickness of 200 mm using a spin coater so that the thickness after drying was 0.20 μm, and dried at 100° C. for 20 minutes to obtain a substrate. Next, exposure was performed at 2000 J/m 2 at a wavelength of 365 nm using an i-line stepper exposure device FPA-3000i5+ (manufactured by Canon). Exposure was performed through a photomask having a 10.0 μm square light-shielding portion. The exposed coating film was paddle developed with TMAH 2.38% (a 2.38% aqueous solution of tetramethylammonium hydroxide manufactured by Tama Chemical Industries) for 1 minute. After paddle development, the film was rinsed with pure water using a spin shower for 20 seconds and spin-dried. The hole pattern formed by the light-shielding part was observed using a scanning electron microscope ("S-3000N" manufactured by Hitachi High-Tech Corporation) and evaluated according to the following criteria.
◎: One side of the hole pattern is 9.5 μm or more and less than 10.0 μm (very good level)
○: One side of the hole pattern is 9.0 μm or more and less than 9.5 μm (good level)
△: One side of the hole pattern is 8.0 μm or more and less than 9.0 μm (practical level)
×: One side of the hole pattern is less than 8.0 μm (level not suitable for practical use)
In addition, similarly below, ◎ and ○ are practically preferable levels, △ is a practically possible level, and × is a level that is not suitable for practical use.
(アルカリ現像液耐性)
硬化性樹脂組成物を縦100mm×横100mm・0.7mm厚のガラス基板上に、スピンコーターを用いて乾燥膜厚が0.20μmとなるように回転塗工し、100℃で20分乾燥した。次に、得られた被膜に対して、400μm四方の正方パターンマスクパターンを配列したフォトマスクを介してi線の照度30mW/cm2の超高圧水銀灯にて2000mJ/cm2の露光を行った。 パターン露光された被膜に対して、TMAH2.38%を用いて、未露光部を現像した後、純水にて水洗を行なった。その後、水滴を高圧のエアーで飛ばし、基板を自然乾燥させ、100℃で20分間、ホットプレートでポストベーク処理し、ガラス基板上に硬化膜のパターンを形成した。ガラス基板のパターン形成された部分の膜厚を測定した。塗膜の膜厚は、Dektak3030(日本真空技術社製)を用いて行った。その後、TMAH2.38%に10分間浸漬し、再び膜厚を測定し、膜厚変化を評価した。評価のランクは次の通りである。
◎:膜厚変化が0.5%未満
〇:膜厚変化が0.5%以上、1.0%未満
△:膜厚変化が1.0%以上、5.0%未満
×:膜厚変化が5.0%以上
(alkaline developer resistance)
The curable resin composition was spin-coated onto a glass substrate measuring 100 mm long x 100 mm wide and 0.7 mm thick using a spin coater so that the dry film thickness was 0.20 μm, and dried at 100° C. for 20 minutes. . Next, the obtained film was exposed to 2000 mJ/cm 2 using an ultra-high pressure mercury lamp with an i-line illuminance of 30 mW/cm 2 through a photomask in which a 400 μm square mask pattern was arranged. After developing the unexposed areas of the pattern-exposed film using 2.38% TMAH, the film was washed with pure water. Thereafter, the water droplets were blown off with high-pressure air, the substrate was naturally dried, and a post-bake treatment was performed on a hot plate at 100° C. for 20 minutes to form a cured film pattern on the glass substrate. The film thickness of the patterned portion of the glass substrate was measured. The thickness of the coating film was measured using Dektak3030 (manufactured by Nihon Shinku Gijutsu Co., Ltd.). Thereafter, the film was immersed in 2.38% TMAH for 10 minutes, the film thickness was measured again, and the film thickness change was evaluated. The evaluation ranks are as follows.
◎: Film thickness change is less than 0.5% 〇: Film thickness change is 0.5% or more and less than 1.0% △: Film thickness change is 1.0% or more and less than 5.0% ×: Film thickness change is 5.0% or more
(基板密着性)
硬化性樹脂組成物を縦100mm×横100mm・0.7mm厚のガラス基板上に、スピンコーターを用いて乾燥膜厚が0.20μmとなるように回転塗工し、120℃で20分乾燥した。次に、乾燥後の塗膜に対して、6μmの正方パターンマスクパターンを配列したフォトマスクを介してi線の照度30mW/cm2の超高圧水銀灯にて2000mJ/cm2の露光を行った。 パターン露光された塗膜は、TMAH2.38%を用いて、未露光部を現像した後、純水にて水洗を行なった。その後、水滴を高圧のエアーで飛ばし、基板を自然乾燥させ、ガラス基板上に硬化膜のパターンを形成した。光学顕微鏡を用いて観察し、密着性を評価した。評価基準は次の通りである。次に、乾燥温度を100℃、および70℃に変えた以外は上記同様に試験を行い同様に評価した。
◎:パターンの剥がれがない
〇:1~5%のパターンが剥がれた
△:6~15%のパターンが剥がれた
×:16%以上のパターンが剥がれた
(Substrate adhesion)
The curable resin composition was spin-coated onto a glass substrate measuring 100 mm long x 100 mm wide and 0.7 mm thick using a spin coater so that the dry film thickness was 0.20 μm, and dried at 120° C. for 20 minutes. . Next, the dried coating film was exposed to 2000 mJ/cm 2 using an ultra-high pressure mercury lamp with an i-line illuminance of 30 mW/cm 2 through a photomask having a 6 μm square mask pattern arranged thereon. The unexposed areas of the pattern-exposed coating film were developed using 2.38% TMAH, and then washed with pure water. Thereafter, the water droplets were blown away with high-pressure air, and the substrate was air-dried to form a cured film pattern on the glass substrate. Adhesion was evaluated by observing using an optical microscope. The evaluation criteria are as follows. Next, a test was carried out in the same manner as above, except that the drying temperature was changed to 100°C and 70°C, and evaluation was made in the same manner.
◎: No pattern peeling ○: 1-5% of the pattern peeled off △: 6-15% of the pattern peeled off ×: 16% or more of the pattern peeled off
(貯蔵安定性)
硬化性樹脂組成物を調製した翌日の初期粘度と、40℃で1週間、経時促進させた経時粘度を測定した。得られた初期粘度及び経時粘度の値から、下記式で経時粘度変化率を算出し、貯蔵安定性を下記基準で評価した。
[経時粘度変化率]=|([初期粘度]-[経時粘度])/[初期粘度]|×100
測定条件は、E型粘度計(東機産業社製「TV-25型粘度計」)を用いて、25℃、ロータNo.1、測定時間3分、回転数20rpmで測定した。
◎:変化率3%未満
〇:変化率3%以上5%未満
△:変化率5%以上10%未満
×:変化率10%以上
(Storage stability)
The initial viscosity on the next day after preparing the curable resin composition and the viscosity over time after accelerated aging at 40° C. for one week were measured. From the obtained initial viscosity and aging viscosity values, the rate of change in viscosity over time was calculated using the following formula, and the storage stability was evaluated using the following criteria.
[Viscosity change rate over time] = | ([Initial viscosity] - [Viscosity over time]) / [Initial viscosity] | × 100
The measurement conditions were: 25°C, rotor No. 1. The measurement time was 3 minutes and the rotation speed was 20 rpm.
◎: Rate of change less than 3%〇: Rate of change 3% or more and less than 5% △: Rate of change 5% or more and less than 10% ×: Rate of change 10% or more
Claims (5)
該塩基性樹脂(A)が3級アミノ基を有し、かつ、 アミン価が50~170mgKOH/gであり、
カラーフィルタの上層または下層に形成する被膜形成に使用する、硬化性樹脂組成物。 A basic resin (A) (except when it is an alkali-soluble resin (B)) , an alkali-soluble resin (B), a photopolymerizable monomer (C), and a photopolymerization initiator (D). Contains no organic pigments or carbon black,
The basic resin (A) has a tertiary amino group and has an amine value of 50 to 170 mgKOH/g,
A curable resin composition used to form a film on the upper or lower layer of a color filter .
A cured film formed from the curable resin composition according to any one of claims 1 to 4 .
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WO2006082776A1 (en) | 2005-02-01 | 2006-08-10 | Nippon Kayaku Kabushiki Kaisha | Reactive polyurethane compound, method for producing same, resin composition and cured product thereof |
JP2009102484A (en) | 2007-10-22 | 2009-05-14 | Sekisui Chem Co Ltd | Photocurable resin composition, column spacer and liquid crystal display device |
JP2010085553A (en) | 2008-09-30 | 2010-04-15 | Fujifilm Corp | Negative-type dye-containing curable composition, color filter and method for production thereof both utilizing the composition, and solid imaging element |
JP2011002694A (en) | 2009-06-19 | 2011-01-06 | Nippon Shokubai Co Ltd | Photosensitive resin composition |
JP2016006475A (en) | 2013-10-11 | 2016-01-14 | 富士フイルム株式会社 | Photosensitive composition, dispersion composition, method of manufacturing color filter using the same, color filter, and solid-state image sensor |
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WO2006082776A1 (en) | 2005-02-01 | 2006-08-10 | Nippon Kayaku Kabushiki Kaisha | Reactive polyurethane compound, method for producing same, resin composition and cured product thereof |
JP2009102484A (en) | 2007-10-22 | 2009-05-14 | Sekisui Chem Co Ltd | Photocurable resin composition, column spacer and liquid crystal display device |
JP2010085553A (en) | 2008-09-30 | 2010-04-15 | Fujifilm Corp | Negative-type dye-containing curable composition, color filter and method for production thereof both utilizing the composition, and solid imaging element |
JP2011002694A (en) | 2009-06-19 | 2011-01-06 | Nippon Shokubai Co Ltd | Photosensitive resin composition |
JP2016006475A (en) | 2013-10-11 | 2016-01-14 | 富士フイルム株式会社 | Photosensitive composition, dispersion composition, method of manufacturing color filter using the same, color filter, and solid-state image sensor |
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