JP7400409B2 - inertial measurement device - Google Patents

Description

The present invention relates to an inertial measurement device and the like.

In recent years, manufacturing equipment and measuring equipment have become more precise, and the importance of vibration measurement to improve production process efficiency and yield has increased. desired. For example, in Patent Document 1, a vibration detection unit detects vibration using a vibration sensor, wirelessly transmits the vibration data obtained by the detection, and a vibration monitor receives the transmitted vibration data and displays it. A vibration monitoring device is disclosed. According to this vibration monitoring device, the vibration of the device and the environment can be detected by the vibration detection unit, and the detected vibration data can be displayed on the display of the vibration monitor, which is installed separately from the vibration detection unit. Become.

JP2016-205868A

By using an inertial measurement device having an inertial sensor such as an acceleration sensor or an angular velocity sensor, it is possible to monitor the state of the device and the environment as described above. However, inertial measurement devices have a problem in that if the detection accuracy of the inertial sensor deteriorates, highly accurate measurement cannot be achieved. On the other hand, the content of the processing performed on the detection information of the inertial sensor and the content of the display information displayed based on the detection information vary depending on the user using the inertial measurement device, and the scalability of the inertial measurement device There is a demand for

One aspect of the present disclosure includes a sensor unit having at least one inertial sensor, and a substrate provided with at least one of a processing section that performs processing based on information detected by the inertial sensor, and a display section that performs display based on the detected information. , and at least one fixing member that detachably fixes the sensor unit and the substrate.

FIG. 1 is a perspective view showing a configuration example of an inertial measurement device according to the present embodiment. FIG. 7 is a perspective view showing another example of the configuration of the inertial measurement device according to the present embodiment. FIG. 3 is an exploded perspective view of the inertial measurement device. A side view of the inertial measurement device. A bottom view of the inertial measurement device. A plan view of a protection plate. A plan view of a protection plate. FIG. 3 is a plan view of the display section. An explanatory diagram of a mode changeover switch, a reset switch, and a measurement start switch. An explanatory diagram of switching display modes. An explanatory diagram of switching display modes. An explanatory diagram of a wireless communication section and an antenna section. An explanatory diagram of the connection between the sensor side connector and the board side connector. The state transition diagram explaining the operation of the inertial measurement device. FIG. 3 is an exploded perspective view of a first configuration example of the sensor unit. FIG. 3 is a cross-sectional view of a first configuration example of the sensor unit. FIG. 3 is a perspective view of an acceleration sensor element. FIG. 2 is a front view of an acceleration detector using an acceleration sensor element. FIG. 6 is an exploded perspective view of a second configuration example of the sensor unit. FIG. 7 is a plan view of a sensor substrate according to a second configuration example.

This embodiment will be described below. Note that this embodiment described below does not unduly limit the contents described in the claims. Furthermore, not all of the configurations described in this embodiment are essential configuration requirements.

1. Inertial Measurement Device FIG. 1 is a perspective view showing a configuration example of an inertial measurement device 10 according to the present embodiment. The inertial measurement device 10, which is an IMU (Inertial Measurement Unit), includes a sensor unit 20. Furthermore, the inertial measurement device 10 can include fixing members 11 , 12 , 13 , a substrate 40 , a base 150 , and a protection plate 160 . In FIG. 1, the direction from the inertial measurement device 10 toward the mounting surface 2 of the inertial measurement device 10 is a direction DR1, and the direction perpendicular to DR1 is a direction DR2. Direction DR1 is a direction perpendicular to the mounting surface 2, for example, a direction perpendicular to the main surface of the sensor unit 20. The main surface is the top surface or bottom surface of the sensor unit 20, and is, for example, a surface perpendicular to the side surface. Direction DR3 is a direction perpendicular to direction DR1 and direction DR2, and directions DR4, DR5, and DR6 are opposite directions to directions DR1, DR2, and DR3, respectively. Directions DR1, DR2, DR3, DR4, DR5, and DR6 are a first direction, a second direction, a third direction, a fourth direction, a fifth direction, and a sixth direction, respectively.

Sensor unit 20 includes at least one inertial sensor. An inertial sensor is a physical quantity sensor that detects physical quantity information. Specifically, as described later with reference to FIGS. 15 to 20, the sensor unit 20 includes at least one acceleration sensor as at least one inertial sensor. Alternatively, the sensor unit 20 includes at least one acceleration sensor and at least one angular velocity sensor as at least one inertial sensor. The angular velocity sensor is, for example, a gyro sensor. Note that the inertial sensor is not limited to an acceleration sensor or an angular velocity sensor, and may be any sensor that can detect information related to inertia using some detection method, and may be a physical quantity sensor that can detect a physical quantity equivalent to acceleration or angular velocity. For example, it may be a physical quantity sensor that can detect physical quantities such as velocity and angular acceleration. The sensor unit 20 also includes a case 24. For example, the sensor unit 20 includes a sensor board 210 provided with at least one inertial sensor, and a case 24 that houses the sensor board 210, as shown in FIGS. 15 to 20 described later. The case 24 is made of a conductive member such as metal, and a sensor board 210 is provided in a housing space inside the case 24 .

The substrate 40 is provided with at least one of a processing section 50 and a display section 60. In FIG. 1, both the processing section 50 and the display section 60 are provided on the substrate 40. Note that, for example, only the processing section 50 may be provided on the substrate 40, or only the display section 60 may be provided on the substrate 40. The board 40 is a circuit board, for example, a printed board on which metal wiring is formed. The substrate 40 is, for example, a rigid substrate.

The processing unit 50 performs processing based on information detected by the inertial sensor of the sensor unit 20. The processing unit 50 is a processing circuit, and can be realized by, for example, a processor such as an MPU or a CPU. Alternatively, the processing unit 50 may be realized by an ASIC (Application Specific Integrated Circuit) with automatic placement and wiring such as a gate array. For example, the processing section 50 is electrically connected to the inertial sensor of the sensor unit 20 via a connector or the like as described later, and the detection information of the inertial sensor is input to the processing section 50 via the connector or the like. The detection information is, for example, acceleration information, angular velocity information, or information based on these information. The processing unit 50 then performs various processes based on the detection information of the inertial sensor. For example, the processing unit 50 processes the detected information. For example, the processing unit 50 processes the detected information so that it becomes appropriate information for display on the display unit 60 or the display unit 70 in FIG. 2, which will be described later. The processing unit 50 also performs analysis processing of the detected information. For example, the processing unit 50 performs analysis processing of the vibration, tilt, posture, etc. of the measurement target based on the detection information from the inertial sensor. For example, the processing unit 50 performs FFT analysis (Fast Fourier Transform Analysis) as analysis processing to analyze frequency components such as vibration information.

The display section 60 in FIG. 1 and the display section 70 in FIG. 2 perform display based on information detected by the inertial sensor of the sensor unit 20. For example, when the inertial measurement device 10 has a processing section 50 and display sections 60 and 70, the processing section 50 performs processing based on the detection information of the inertial sensor, and the display sections 60 and 70 display the processing results of the processing section 50. Display based on. For example, display information based on the processing result of the detected information by the processing unit 50 is displayed on the display units 60 and 70. For example, when the processing unit 50 processes the detected information, the display units 60 and 70 display display information corresponding to the processed detected information. Further, when the processing unit 50 performs analysis processing of the detected information, the display units 60 and 70 display display information corresponding to the analysis result. For example, in FIG. 1, a display unit 60 that is a display includes light emitting element groups 62 and 64. The light emitting elements of the light emitting element groups 62 and 64 are elements that convert electrical signals into optical signals, and can be realized by semiconductor elements such as light emitting diodes (LEDs), for example. Alternatively, the light emitting element may be realized by an element other than a semiconductor element. Further, in FIG. 2, the display section 70, which is a display module, has a display panel 72. The display panel 72 is, for example, an organic EL panel or a liquid crystal panel.

Further, the board 40 is provided with a mode changeover switch 80, a reset switch 82, and a measurement start switch 84. Further, the substrate 40 is provided with a wireless communication section 90 and an antenna section 92. Details of these switches, the wireless communication section 90, etc. will be described later.

Further, the substrate 40 is provided with an interface section 100. The interface unit 100 communicates with the outside via wire. For example, the interface unit 100 realizes a communication interface such as a UART (Universal Asynchronous Receiver/Transmitter), a GPIO (General-Purpose Input/Output), or an SPI (Serial Peripheral Interface). UART is an asynchronous serial communication interface. GPIO is a general purpose communication interface whose operation can be controlled by the user at runtime. SPI is an interface that communicates using three or four signal lines such as a serial clock signal line and a serial data signal line. The board 40 is also provided with an interface section 101 that implements a communication interface such as J-TAG.

Further, the substrate 40 is provided with memories 102, 103, and 104. The memory 102 is, for example, a nonvolatile memory, such as an EEPROM (Electrically Erasable Programmable Read-Only Memory) in which data can be electrically erased, or an OTP (One Time Programmable Memory) using FAMOS (Floating gate Avalanche injection MOS). ) memory, etc. The memories 103 and 104 are, for example, SRAMs that temporarily store data. Further, the board 40 is provided with a power supply interface 106 , and external power is supplied to the inertial measurement device 10 via the power supply interface 106 .

Inertial measurement device 10 also includes a base 150 . The base 150 is a member for attaching the inertial measurement device 10 to the mounting surface 2. For example, the sensor unit 20 is provided between the base 150 and the substrate 40, and the base 150 is fixed to the sensor unit 20 by fixing members 11, 12, and 13, which are at least one fixing member. For example, the base 150 is provided between the sensor unit 20 and the mounting surface 2, and the mounting surface 2 is, for example, a surface of a device such as a manufacturing device or a measuring device, or a floor surface on which the device is installed. The base 150 has a recess 154 on the bottom surface, which is the surface on the attachment surface 2 side. By providing such a recessed portion 154, when the inertial measurement device 10 is attached to the mounting surface 2 with a double-sided tape, the work of peeling off the double-sided tape can be facilitated. The sensor unit 20 is provided in contact with the upper surface of the base 150.

The protection plate 160 is a member for protecting the substrate 40. The board 40 is provided between the sensor unit 20 and the protection plate 160, so that the parts mounted on the board 40, such as the processing section 50, display section 60, and wireless communication section 90, can be mounted on the protection board 160. can be used and protected. The protection plate 160, which is the first protection plate, is, for example, a transparent or semi-transparent plate-like member, and can be realized by, for example, a resin plate such as acrylic. Note that the protection plate 160 may be made of a material other than acrylic, for example, a resin plate made of ABS or PET, or may be made of a material other than resin.

The inertial measurement device 10 also includes at least a fixing member that detachably fixes the sensor unit 20 and the substrate 40. Specifically, in FIG. 1, the inertial measurement device 10 includes fixing members 11, 12, and 13 as at least one fixing member. Although three fixing members 11, 12, and 13 are provided in FIG. 1, the number of fixing members may be two or less, or four or more. In FIG. 1, columnar members are provided as the fixing members 11, 12, and 13. That is, the fixing members 11, 12, and 13 are columnar members whose long sides extend in the direction DR1, and as described later, the columnar members are provided so as to pass through holes in the sensor unit 20, the substrate 40, and the like.

FIG. 2 shows another example of the configuration of the inertial measurement device 10. In FIG. 2, in addition to the configuration of FIG. 1, a substrate 48 is further provided. A display section 70 having a display panel 72 is provided on the substrate 48. The display panel 72, which is an organic EL panel or a liquid crystal panel, performs display based on information detected by the sensor unit 20. For example, a processing unit 50 provided on the substrate 40, which is the first substrate, performs analysis processing of vibrations of a measurement target such as an apparatus or a floor surface, based on information detected by an inertial sensor of the sensor unit 20. A display section 70 provided on the substrate 48, which is the second substrate, displays the result information of the analysis process. For example, the display unit 70 displays information on the results of analysis, such as FFT, of vibrations to be measured. For example, information about the peak frequency and peak value of vibration is displayed.

Moreover, in FIG. 2, in addition to the protection plate 160, a protection plate 170 is further provided. The protection plate 170 is, for example, a protection member for the substrate 48. For example, the substrate 48 is provided between the protection plate 160 and the protection plate 170, so that the display section 70 and the like mounted on the substrate 48 can be protected using the protection plate 170. The protection plate 170, which is the second protection plate, is, for example, a transparent or semi-transparent plate-like member, and can be realized by, for example, a resin plate such as acrylic. Note that the protection plate 170, which is the second protection plate, may be made of a material other than acrylic, or may be made of a material other than resin, similarly to the protection plate 160, which is the first protection plate. In this way, in FIG. 2, the substrate 48 is provided between the protection plate 160 and the protection plate 170, and the substrate 40 is provided between the sensor unit 20 and the protection plate 160.

Further, the protection plate 170 is provided with a window portion 174, and the display portion 70 mounted on the substrate 48 is disposed at the position of the window portion 174. This allows the user to view the information displayed on the display section 70 via the window section 174.

FIG. 3 is an exploded perspective view of the inertial measurement device 10. As shown in FIG. 3, the sensor unit 20 is provided with a plurality of holes 21, 22, and 23, and the substrate 40 is also provided with a plurality of holes 41, 42, and 43. The fixing members 11, 12, 13, which are columnar members, fit into the plurality of holes 41, 42, 43 provided in the substrate 40 and the plurality of holes 21, 22, 23 provided in the sensor unit 20. Thus, the sensor unit 20 and the substrate 40 are removably fixed. Specifically, the fixing members 11 , 12 , 13 are provided so as to penetrate through the holes 41 , 42 , 43 of the substrate 40 and the holes 21 , 22 , 23 of the sensor unit 20 . The base 150 is also provided with holes 151, 152, 153, and the fixing members 11, 12, 13, which are columnar members, fit into the holes 151, 152, 153 provided in the base 150. By doing so, it is fixed to the sensor unit 20. Further, the protection plate 160 is also provided with a plurality of holes 161, 162, and 163, and the protection plate 170 is also provided with a plurality of holes 171, 172, and 173. By fitting the fixing members 11, 12, 13 into the holes 161, 162, 163 and the holes 171, 172, 173, the protection plates 160, 170 are removably fixed.

For example, the fixing members 11, 12, and 13, which are columnar members, are screw members. That is, the fixing members 11, 12, and 13 are male threads with threads cut on the outer periphery. The inner peripheries of the holes 151, 152, and 153 of the base 150 are also threaded, making them female threads. As a result, the tips of the fixing members 11, 12, 13, which are screw members, can be screwed into the holes 151, 152, 153 of the base 150, and the sensor unit 20, substrate 40, protection plate 160, and 170 etc. can be fixed. Although the inner peripheries of the holes 21, 22, 23 of the sensor unit 20, the holes 161, 162, 163 of the protection plate 160, and the holes 171, 172, 173 of the protection plate 170 are not threaded, It is also possible to implement a modification in which these holes are also threaded.

Further, as shown in FIG. 3, spacers 14, 15, 16 are provided at positions corresponding to the holes 41, 42, 43 of the substrate 40. Furthermore, spacers 17, 18, and 19 are provided at positions corresponding to the holes 161, 162, and 163 of the protection plate 160. When fixed, the fixing members 11, 12, 13 pass through the holes of these spacers 14, 15, 16, 17, 18, 19. By providing such spacers 14, 15, 16, 17, 18, and 19, it becomes possible to provide a gap between the substrate 40 and the protection plate 160 or between the protection plate 160 and the protection plate 170. .

Note that it is also possible to implement a modification in which threads are cut on the inner peripheries of the holes of the spacers 14, 15, 16, 17, 18, and 19 to form female threads. Further, as shown in FIG. 3, the substrate 48 is supported by the substrate 40 using the support portion 44 so that it can be attached. The protection plate 160 is provided with a slit hole 164, and the support portion 44 is attached so as to pass through the slit hole 164, so that the protection plate 160 is disposed between the substrate 40 and the substrate 48.

FIG. 4 is a side view of the inertial measurement device 10, and FIG. 5 is a bottom view. As shown in FIG. 4, the sensor unit 20 is provided between the base 150 and the substrate 40. Further, a substrate 40 is provided between the sensor unit 20 and the protection plate 160, and a substrate 48 is provided between the protection plate 160 and the protection plate 170. As explained in FIG. 3, the columnar members are fitted into holes provided in each of the base 150, sensor unit 20, substrate 40, protection plate 160, substrate 48, and protection plate 170. By providing the fixing members 11, 12, and 13, these members can be detachably fixed.

Further, as shown in FIGS. 4 and 5, the base 150 has fixing parts 156 and 157 on the bottom surface, which is the mounting surface 2 side. The fixed parts 156 and 157 are magnets. That is, it is a magnetic material. The fixing parts 156 and 157 are attached to the bottom surface of the base 150 with screws, for example. This allows the fixing parts 156 and 157 to be detachably attached to the base 150. The fixing parts 156 and 157 have, for example, a cubic shape, and the bottom surfaces of the fixing parts 156 and 157 are grounded on the mounting surface 2. By providing the fixed parts 156 and 157, which are such magnets, on the bottom surface of the base 150, it becomes possible to easily attach the inertial measurement device 10 to, for example, a metal surface of the device using the magnetic force of the magnets.

FIG. 6 is a plan view of the protection plate 160. As shown in FIG. 6, the protection plate 160 is provided with holes 161, 162, 163 through which the fixing members 11, 12, 13, which are columnar members, pass. Further, a slit hole 164 is provided through which the support portion 44 for supporting the substrate 48 passes. In FIG. 6, the protection plate 160 is a transparent plate-like member.

FIG. 7 is a plan view of the protection plate 170. As shown in FIG. 7, the protection plate 170 is provided with holes 171, 172, and 173 through which the fixing members 11, 12, and 13 pass. As shown in FIG. 3, the screw heads of the fixing members 11, 12, 13, which are screw members, are located above these holes 171, 172, 173. Further, the protection plate 170 is provided with a window 174 so that the user can see the display section 70 below. Further, the protection plate 170 is provided with windows 175 and 176 so that the user can see the light emitting element groups 62 and 64 of the display section 60 below. In FIG. 7, the protection plate 170 is a translucent plate-shaped member colored in a predetermined color, such as blue, for example. Further, on the protection plate 170, characters are drawn to explain the functions of the switches, which will be described later, and to notify the contents of display information of the light emitting element groups 62 and 64.

FIG. 8 is a plan view of the display section 70. The display section 70 has a display panel 72. A signal line for transmitting a drive signal for the display panel 72 is electrically connected from the lower substrate 40 to the connection terminal of the display section 70 via the support section 44 and the substrate 48. This connection terminal is provided, for example, on the right side of the display panel 72 in the paper of FIG.

As described above, the inertial measurement device 10 of the present embodiment includes the sensor unit 20 having at least one inertial sensor, the processing section 50 that performs processing based on the detection information of the inertial sensor, and the display section 60 that performs display based on the detection information. The sensor unit 20 includes a substrate 40 on which at least one of the sensor unit 20 and the substrate 40 are provided, and at least one fixing member 11, 12, 13 that detachably fixes the sensor unit 20 and the substrate 40.

According to the inertial measurement device 10 of this embodiment, the processing unit 50 provided on the substrate 40 executes processing based on the detection state of the inertial sensor of the sensor unit 20, or the display based on the detected information. can be performed using the display section 60 provided on the substrate 40. In FIG. 1, the display section 60 having the light emitting element groups 62 and 64 is provided on the substrate 40, but the display section 70 having the display panel 72 may be provided on the substrate 40 as shown in FIG.

In this embodiment, the sensor unit 20 and the substrate 40 are removably fixed using fixing members 11, 12, and 13, as shown in FIG. For example, the sensor unit 20 and the substrate 40 are detachably fixed. Thereby, for example, the type of sensor unit 20 and the type of substrate 40 to be incorporated into the inertial measurement device 10 can be freely changed. For example, it becomes possible to incorporate the sensor unit 20 having an acceleration sensor into the inertial measurement device 10, or to incorporate the sensor unit 20 having both an acceleration sensor and an angular velocity sensor into the inertial measurement device 10. Alternatively, the substrate 40 provided with only the processing section 50 may be incorporated into the inertial measurement device 10, the substrate 40 provided with only the display section 60 may be incorporated, or the substrate 40 provided with both the processing section 50 and the display section 60 may be incorporated. It becomes possible to incorporate . This makes it possible to meet the needs of various users of the inertial measurement device 10 and improve the expandability of the inertial measurement device 10. Furthermore, the inertial measurement device 10 can be attached to the mounting surface 2 with the sensor unit 20 and the substrate 40 firmly fixed by the fixing members 11, 12, and 13. Therefore, it is possible to suppress a situation in which undesirable vibrations caused by resonance or the like are transmitted to the inertial measurement device 10 and adversely affect measurements by the inertial measurement device 10. As a result, it is possible to provide the inertial measurement device 10 that can improve expandability while suppressing deterioration in measurement accuracy.

For example, until now, the sensor unit 20 itself has been used as the inertial measurement device 10, and the detection information of the inertial sensor of the sensor unit 20 has been output from the connector 26 shown in FIGS. 15 to 20, which will be described later. For example, acceleration information and angular velocity information detected by an inertial sensor were output directly as detection information. However, the information detected by the inertial sensor is difficult to handle and requires specialized knowledge, resulting in a lack of convenience for users. In this case, it is also possible to connect a PC (personal computer) to the connector 26 of the sensor unit 20 and use the PC to perform various processes such as analysis of detected information, and to display the analysis results on the display. . However, in this method, since it is necessary to connect a PC to the sensor unit 20 and perform various tasks, there are problems in that the tasks become complicated and the measurement system becomes large-scale.

On the other hand, in this embodiment, the inertial measurement device 10 is configured by fixing the sensor unit 20 and the substrate 40 by fixing members 11, 12, and 13. Therefore, the processing section 50 provided on the substrate 40 is used to perform processing such as analysis of the detection information of the inertial sensor of the sensor unit 20, and the display section 60 provided on the substrate 40 is used to perform processing such as analysis of the detection information of the inertial sensor of the sensor unit 20. It becomes possible to perform display based on For example, it is no longer necessary to connect a PC to the inertial measurement device 10 to perform processing based on detected information or to display information based on detected information, thereby improving convenience for the user. That is, by simply attaching the inertial measurement device 10 to a measurement target, it becomes possible to perform processing based on detected information and display based on detected information. For example, when the object to be measured is a device such as a manufacturing device or a measuring device, or a floor surface on which the device is installed, the inertial measurement device 10 is attached to the mounting surface 2, which is the surface of the device or the floor surface. Then, the processing unit 50 executes processing to analyze the vibrations of the equipment and the floor surface, outputs the processing result information to the outside via the wireless communication unit 90 and the interface unit 100, and displays the analysis results on the display unit 60. It becomes possible to do so. Therefore, it becomes possible to monitor the state of the measurement target with a small-scale system that is highly portable and inexpensive.

For example, for a user who only needs acceleration information, the sensor unit 20 provided with an acceleration sensor as an inertial sensor and the board 40 may be connected to the inertial measurement device 10 fixed by the fixing members 11, 12, and 13. provide. Furthermore, for users who require both acceleration information and angular velocity information, the sensor unit 20 provided with an acceleration sensor and an angular velocity sensor as inertial sensors, and the board 40 are fixed by fixing members 11, 12, and 13. An inertial measurement device 10 is provided. Furthermore, for users who desire a display unit 70 having a display panel 72, as shown in FIG. , 13 provides an inertial measurement device 10 fixed by. In this way, it is possible to provide the inertial measurement device 10 that meets various user needs, and the expandability of the inertial measurement device 10 can be increased. Furthermore, since it is possible to provide the inertial measurement device 10 in which the sensor unit 20 and the substrate 40 are firmly fixed by the fixing members 11, 12, and 13, the measurement results of the inertial measurement device 10 can be prevented due to undesirable vibrations such as resonance. This has the advantage that it is possible to suppress a situation where accuracy deteriorates.

Note that in FIGS. 1 and 2, both the processing section 50 and the display section 60 are provided on the substrate 40, but the substrate 40 only needs to be provided with at least one of the processing section 50 and the display section 60. For example, when the processing section 50 is not provided on the substrate 40, processing based on the detected information may be performed using a processing section 212, which will be described later, provided on the sensor unit 20, for example. Alternatively, the processing section 50 may be provided on the substrate 48 above the substrate 40. Further, the display section 60 may be provided on the substrate 48 without providing the display section 60 on the substrate 40. Alternatively, the display section 60 using a light emitting element may not be provided as the display section of the inertial measurement device 10. Further, the display section 70 having the display panel 72 may be provided on the substrate 40.

Further, in this embodiment, as shown in FIG. 3, the inertial measurement device 10 includes a plurality of columnar members as the fixing members 11, 12, and 13. The fixing members 11, 12, 13, which are a plurality of columnar members, are fitted into the plurality of holes 41, 42, 43 provided in the substrate 40 and the plurality of holes 21, 22, 23 provided in the sensor unit 20. By doing so, the sensor unit 20 and the substrate 40 are removably fixed. In this way, various combinations of the sensor unit 20 and the substrate 40 can be freely attached and detached, and the sensor unit 20 and the substrate 40 can be fixed in a detachable manner. For example, the type of sensor unit 20 can be changed by replacing the sensor unit 20 with a different type of sensor unit and inserting the fixing members 11, 12, 13 into the holes 21, 22, 23. Further, by replacing the board 40 with a different type of board and inserting the fixing members 11, 12, 13 into the holes 41, 42, 43, the type of the board 40 can be replaced. Therefore, various types of sensor units 20 and substrates 40 can be provided to users as optional parts, and the expandability of the inertial measurement device 10 can be greatly improved.

Further, the plurality of fixed members 11, 12, and 13, which are columnar members, are screw members, for example. For example, it is a male thread with a thread cut on the outer periphery. If screw members are used as the fixing members 11, 12, and 13 in this way, it becomes possible to fix the sensor unit 20, the substrate 40, etc. firmly and stably because the screw members can be used for fixation. Thereby, it is possible to further suppress a situation in which the accuracy of the measurement results of the inertial measurement device 10 deteriorates due to undesirable vibrations due to resonance or the like. Further, the work of attaching the sensor unit 20, the board 40, etc. becomes easier, and work efficiency can be improved.

Inertial measurement device 10 also includes a base 150 for attaching inertial measurement device 10 to mounting surface 2 . The sensor unit 20 is provided between the base 150 and the substrate 40, and the base 150 is fixed to the sensor unit 20 by at least one fixing member 11, 12, 13. For example, the base 150 is a member that serves as a base for attachment to the attachment surface 2, and the inertial measurement device 10 is attached to the attachment surface 2 by the bottom surface of the base 150 being grounded to the attachment surface 2. The mounting surface 2 is, for example, a surface of a device such as a manufacturing device or a measuring device, or a floor surface on which these devices are installed, and is a surface to be measured. The sensor unit 20 is fixed by the fixing members 11, 12, and 13 so as to be sandwiched between the substrate 40 and the base 150. Such fixing can prevent the detection accuracy of the inertial sensor of the sensor unit 20 from deteriorating due to vibrations due to resonance or the like. Further, for example, even if the bottom surface of the sensor unit 20 has a shape that is not suitable for mounting on the mounting surface 2, the bottom surface of the base 150 can be mounted on the mounting surface 2 instead of the bottom surface of the sensor unit 20. 10 stable installation is possible. For example, stable attachment is possible regardless of the shape or type of the sensor unit 20, and erroneous detection due to looseness in attachment can be prevented.

Further, as shown in FIGS. 4 and 5, the base 150 has fixing parts 156 and 157, which are magnets, on the surface on the attachment surface 2 side. That is, fixing parts 156 and 157 for fixing the inertial measurement device 10 to the mounting surface 2 are provided on the bottom surface of the base 150, and these fixing parts 156 and 157 are magnets. For example, the fixed parts 156 and 157 are cube-shaped magnets. In this way, the bottom surfaces of the fixing parts 156 and 157 will be attracted to the metal surface of the device, which is the mounting surface 2, by the magnetic force of the magnet. Therefore, simply by bringing the bottom surfaces of the fixing parts 156 and 157 into contact with the mounting surface 2, the inertial measurement device 10 is fixed and installed on the mounting surface 2 by the magnet, which facilitates the installation work of the user. Can improve efficiency.

Although FIGS. 4 and 5 show an example in which the number of fixing parts 156 and 157 is two, the number of fixing parts is not limited to this, and may be three or more, for example. Further, the base 150 itself or a part of the base 150 may be made of a magnet.

Further, as shown in FIGS. 4 and 5, the base 150 has a recessed portion 154 on the surface on the mounting surface 2 side. That is, the bottom surface of the base 150, which is the surface on the mounting surface 2 side, has a recessed portion 154 recessed toward the direction DR4, which is the opposite direction to the direction DR1. By providing such a recessed portion 154, when the inertial measurement device 10 is attached to the mounting surface 2 with a double-sided tape, the work of peeling off the double-sided tape can be facilitated. That is, in this embodiment, the inertial measurement device 10 can be installed on the mounting surface 2 using double-sided tape without using the fixing parts 156 and 157. Specifically, one side of the double-sided tape is adhered to the bottom surface of the base 150, and the other side of the double-sided tape is adhered to the mounting surface 2. By doing so, the inertial measurement device 10 can be installed on the mounting surface 2 with a simple operation, and can be installed even when the mounting surface 2 is not a metal surface, for example. In this case, after the measurement is completed and the inertial measurement device 10 is removed from the mounting surface 2, it is necessary to peel off the double-sided tape from the bottom surface of the base 150. In this regard, if a recess 154 is provided on the bottom of the base 150, the user can easily peel off the double-sided tape from the bottom of the base 150 by inserting a finger or the like into the recess 154. Become. Note that the inertial measurement device 10 can be attached not only with magnets or double-sided tape, but also with screws.

Further, as shown in FIGS. 1 and 2, the substrate 40 is provided with a wireless communication section 90 that wirelessly transmits information based on information detected by the inertial sensor. For example, a wireless communication IC, which is a wireless communication section 90, is provided on the board 40. Then, information based on the detection information of the inertial sensor is transmitted to the outside by the wireless communication unit 90. For example, when the processing section 50 performs processing such as analysis processing based on the detection information of the inertial sensor, information on the processing result is transmitted to the outside by the wireless communication section 90. Alternatively, the detection information of the inertial sensor itself may be transmitted to the outside by the wireless communication unit 90. In this way, for example, information based on the detection information of the inertial sensor can be wirelessly transmitted to the external device without connecting the inertial measurement device 10 and the external device by wire. For example, while the inertial measurement device 10 remains attached to the mounting surface 2, information based on the detection information detected by the inertial sensor can be transmitted to an external device using the wireless communication section 90, which increases convenience. You can improve your skills, etc.

Further, the board 40 is provided with an interface section 100 for communicating with the outside by wire. For example, the interface unit 100 communicates with the outside using a communication interface format such as UART, GPIO, or SPI. For example, the interface unit 100 transmits information based on information detected by an inertial sensor to an external device. Providing such an interface section 100 makes it possible to meet various user requests regarding communication interfaces. For example, you can convert UART to RS232C and connect the inertial measurement device 10 to various devices, convert UART to Ethernet (registered trademark), or use SPI to connect to an SD (registered trademark) card slot device. This makes it possible to improve user convenience.

The board 40 also includes a mode changeover switch 80 for switching modes of the inertial measurement device 10, a reset switch 82 for resetting the inertial measurement device 10, and a measurement start switch 82 for starting measurement of the inertial measurement device 10. At least one switch 84 is provided. Although all of these switches are provided in FIGS. 1 and 2, in this embodiment, it is sufficient that at least one of these switches is provided. If such various switches are provided, the inertial measurement device 10 will be able to perform various operations when the user operates these switches, making it possible to simplify and improve the efficiency of measurement work. . For example, when the user operates the mode changeover switch 80, various modes of the inertial measurement device 10 are changed, and specifically, the display modes of the display units 60 and 70 are changed. Further, when the user operates the reset switch 82, the inertial measurement device 10 is reset. Furthermore, when the user operates the measurement start switch 84, the measurement by the inertial measurement device 10 is started. Note that the measurement start switch 84 also functions as a measurement end switch. For example, if the user presses the measurement start switch 84 before starting measurement, the mode shifts to the state monitoring mode and measurement starts, and if the user presses the measurement start switch 84 again, Status monitoring mode ends. Further, as described later, the measurement start switch 84 also functions as a teach switch.

The inertial measurement device 10 also includes a protection plate 160, and the substrate 40 is provided between the sensor unit 20 and the protection plate 160. For example, the protection plate 160 is arranged above the substrate 40 on the DR4 side through the gap space formed by the spacers 14, 15, and 16. In this way, the dustproof function of the protection plate 160 can be realized. Further, the protection plate 160 serves as a protection member, and can prevent undesirable impacts from being applied to components such as the processing section 50, display section 60, and wireless communication section 90 on the substrate 40. Further, for example, in FIG. 1, the user can attach the inertial measurement device 10 to the mounting surface 2 by holding the inertial measurement device 10 in his hand so that his palm is in contact with the upper surface of the protection plate 160. By providing the protection plate 160 in this manner, the inertial measurement device 10 can be easily held by the user's hands, and the installation work can be made easier and more efficient.

Further, as shown in FIG. 2, the inertial measurement device 10 includes a substrate 40, which is a first substrate, and a substrate 48, which is a second substrate. A processing section 50 is provided on the substrate 40 that is the first substrate, and a display section 70 having a display panel 72 is provided on the substrate 48 that is the second substrate. In this way, for example, processing based on the detection information of the inertial sensor of the sensor unit 20 is executed by the processing section 50 provided on the substrate 40, and information on the processing results is displayed on the display section 70 provided on the substrate 48. can be displayed on the display panel 72 of. That is, information based on the detected information can be displayed on the display panel 72. Since the display panel 72 is realized by an organic EL panel or a liquid crystal panel, it is possible to display more detailed and sophisticated information than when using light emitting elements. For example, it will be possible to display numbers and characters related to measured values, and to achieve more precise and sophisticated switching processing for display modes, improving user convenience. Note that a modification in which the display section 70 having the display panel 72 is provided on the substrate 40 is also possible.

The inertial measurement device 10 also includes a protection plate 160 that is a first protection plate and a protection plate 170 that is a second protection plate. The substrate 40 is provided between the sensor unit 20 and the protection plate 160, and the substrate 48 is provided between the protection plate 160 and the protection plate 170. For example, as shown in FIG. 3, the protection plate 170 is moved in the direction DR4 of the protection plate 160 through the gap spaces formed by the spacers 17, 18, and 19 provided in the holes 161, 162, and 163 of the protection plate 160. The substrate 48 is placed in the gap space. In this way, the parts provided on the board 40 can be protected by the protection plate 160. For example, components such as the processing section 50, the wireless communication section 90, and the display section 60 provided on the substrate 40 can be protected. Furthermore, the protection plate 170 allows components provided on the board 48 to be protected. For example, components such as the display section 70 provided on the substrate 48 can be protected. This makes it possible to effectively prevent the parts of the inertial measurement device 10 from being damaged due to, for example, being touched by a user.

Further, the substrate 40 is provided with a display section 60 having light emitting element groups 62 and 64. That is, a display section 60 realized by a group of light emitting elements 62 and 64 such as LEDs is provided. In this way, information based on the detection information of the inertial sensor of the sensor unit 20 can be displayed by the display operation using light emission from the light emitting elements of the light emitting element groups 62 and 64. For example, information such as whether a measurement result satisfies a determination criterion can be sufficiently transmitted by light emission from a light emitting element. Since the light emitting element is less expensive than the display panel 72, the cost of the inertial measurement device 10 can be reduced.

2. Switch In this embodiment, the user holds the inertial measurement device 10 so that its bottom surface contacts the mounting surface 2, attaches it using double-sided tape, magnets, screws, etc., and performs measurement using the inertial measurement device 10. . In this case, it is desirable that the user can easily perform operations such as setting the mode of the inertial measuring device 10 and instructing the start of measurement when the inertial measuring device 10 performs measurements. Therefore, in this embodiment, as shown in FIG. 9, the inertial measurement device 10 is provided with various switches such as a mode changeover switch 80, a reset switch 82, and a measurement start switch 84. The mode changeover switch 80 is a switch for changing the mode of the inertial measurement device 10, and specifically, a switch for changing the display mode of the display unit 70. For example, it is a switch for switching the mode of display information. The reset switch 82 is a switch for resetting the inertial measurement device 10. When the reset switch 82 is pressed, the inertial measurement device 10 is initialized. The measurement start switch 84 is a switch for starting measurement by the inertial measurement device 10. The measurement start switch 84 also functions as a switch for terminating the measurement of the inertial measurement device 10. The measurement start switch 84 also functions as a teach switch for issuing an instruction to store measurement reference information for inertial measurement in the memory, for example, by holding it down for a long time. The mode changeover switch 80 also functions as a switch for saving measurement log data by pressing and holding it for a long time. Note that the slide switch 86 is a switch for selecting wireless communication or a communication interface.

The display section 70 displays information based on the information detected by the inertial sensor of the sensor unit 20. For example, in FIG. 9, the display unit 70 displays that the measured vibration satisfies VC-B in VC (Vibration Criteria), which is an environmental vibration standard. Information on the measured vibration displacement is also displayed. In this embodiment, the display mode of the display section 70 is switched by the mode changeover switch 80. For example, in FIG. 10, the display unit 70 displays the determination result based on the VC standard. For example, a determination result that the measured vibration satisfies VC-B is displayed. That is, in the first display mode of FIG. 10, the determination result based on the first determination criterion is displayed. On the other hand, in FIG. 11, the display unit 70 displays the measurement results based on the criteria set by the user. For example, a determination result indicating what percentage of the measured vibration is relative to the threshold value set by the user is displayed. That is, in the second display mode of FIG. 11, the determination result based on the second determination criterion is displayed. For example, by pressing the mode changeover switch 80, the first display mode shown in FIG. 10 or the second display mode shown in FIG. 11 is entered.

Furthermore, the mode changeover switch 80 switches the unit of information displayed based on the detection information of the inertial sensor. That is, the mode changeover switch 80 changes the display mode for the unit. For example, in FIG. 10, the vibration displacement is expressed in μm, which is the unit of vibration displacement. Specifically, the peak frequency of vibration displacement and the vibration displacement at that peak frequency are displayed. By pressing the mode changeover switch 80, the display changes to mm/s, which is the unit of vibration velocity, or to Gal, which shows vibration acceleration. Specifically, by pressing the mode changeover switch 80, the peak frequency of vibration speed and the vibration speed at that peak frequency are displayed, or the peak frequency of vibration acceleration and the vibration acceleration at that peak frequency are displayed. . For example, at first, the judgment result of VC is displayed, and each time the mode changeover switch 80 is pressed, the vibration acceleration and its peak frequency are displayed, the vibration velocity and its peak frequency are displayed, and the vibration displacement and its peak frequency are displayed. The display mode changes sequentially, such as display and display of the measured value as a percentage of the threshold set by the user.

Note that VC, which is an environmental vibration standard, defines VC-A, VC-B, VC-C, VC-D, VC-E, etc. By indicating which of these is satisfied, users can It becomes possible to easily understand what kind of vibration level the vibration etc. is. Further, the threshold value set by the user is stored, for example, in the memory 102 of FIG. 1, which is a non-volatile memory, according to the setting by the user. Alternatively, the threshold value may be set using a teach switch, which will be described later.

Further, as shown in FIG. 9, the mode changeover switch 80 has a movable part 81. This movable part 81 is realized by, for example, a push button. It is assumed that the direction from the inertial measurement device 10 toward the mounting surface 2 is DR1, and the direction orthogonal to direction DR1 is DR2. Direction DR1 is a first direction, and direction DR2 is a second direction. The direction DR2 is a direction along, for example, the main surface that is the top surface of the sensor unit 20 or the main surface that is the top surface of the substrate 40, and is a direction of, for example, the short side of the sensor unit 20 or the substrate 40. In this case, the movable part 81 moves in the direction DR2. That is, the push button, which is the movable part 81, can be moved along the direction indicated by A1 in FIG. 9 and can be pressed. Then, by moving the movable part 81 of the mode changeover switch 80, switching of the display mode of the display part 70 is instructed. That is, by pressing the push button that is the movable part 81, the display mode described in FIGS. 10 and 11 is switched.

Moreover, the movable part 81 of the mode changeover switch 80 protrudes from the side of the sensor unit 20 when viewed from above in the direction DR1 in the non-pressed state. For example, in FIG. 9, side SD1 is the first short side of the substrate 40, and side SD2 is the second short side opposite to side SD1. Further, the side SD3 is the first long side of the substrate 40, and the side SD4 is the second long side opposite to the side SD3. The mode changeover switch 80 is arranged on the long side SD3 of the substrate 40. The reset switch 82 and the measurement start switch 84 are also arranged on the side SD3. That is, the mode changeover switch 80, the reset switch 82, and the measurement start switch 84 are arranged side by side along the side SD3. In the non-pressed state, the movable portion 81 of the mode changeover switch 80 protrudes from the side SD3 of the substrate 40 in plan view, and also protrudes from the side of the sensor unit 20 corresponding to the side SD3 of the substrate 40. That is, the push button, which is the movable part 81, protrudes from the side SD3 in an unpressed state. In this way, for example, when the user holds the inertial measurement device 10 so that the upper surface thereof is in contact with the palm of the hand, the user can press the movable portion 81 using, for example, the fingers of the hand. Therefore, the user can press the push button, which is the movable part 81 of the mode changeover switch 80, with a finger while holding the inertial measurement device 10, and can easily change the display mode of the display unit 70. It becomes like this. For example, the user can attach the lower surface of the inertial measurement device 10 to the mounting surface 2 and operate the mode changeover switch 80 with the fingers of his or her hand, thereby improving user convenience.

Note that the reset switch 82 also has a movable part 83, which can be pushed along the direction indicated by A2 in FIG. Also, it does not protrude from the side of the sensor unit 20 or the side of the protection plate 160 corresponding to the side SD3. That is, when the movable part 83 of the reset switch 82 is pressed, the inertial measurement device 10 is reset and initialized, so the movable part 83 is made not to protrude from the side SD3. By doing this, it becomes possible to prevent the user from performing an erroneous reset operation.

The measurement start switch 84 also has a movable part 85 that moves in the direction DR2, and movement of the movable part 85 of the measurement start switch 84 instructs the inertial measurement device 10 to start measurement. That is, the push button, which is the movable part 85, can be moved and pressed in the direction indicated by A3 in FIG. Then, by pressing the push button which is the movable part 85, measurement by the inertial measurement device 10 is started. After the start of measurement, when the push button, which is the movable part 85, is pressed again, the measurement ends. That is, the measurement start switch 84 also functions as a measurement end switch.

Furthermore, the movable portion 85 of the measurement start switch 84 also protrudes from the side SD3 of the substrate 40 in the non-pressed state, and protrudes from the side of the sensor unit 20 corresponding to the side SD3 in plan view. That is, the push button, which is the movable part 85, protrudes from the side SD3 in an unpressed state. In this way, for example, when the user holds the inertial measurement device 10 so that the upper surface of the device is in contact with the palm of the user's hand, the user can press the movable portion 85 using, for example, a finger of the hand. Therefore, the user can press the push button, which is the movable part 85 of the measurement start switch 84, with a finger while holding the inertial measurement device 10, and the user can easily perform the operation to start measurement. can improve the convenience of

In this embodiment, the measurement start switch 84 also functions as a teach switch, which is a switch for instructing the memory 102 to store measurement reference information for inertial measurement. That is, the measurement start switch 84 functions as a teach switch that causes the inertial measurement device 10 to learn measurement reference information. Specifically, for example, when the user presses and holds the measurement start switch 84, the measurement start switch 84 comes to function as a teach switch. When the measurement start switch 84 functions as a teach switch, this teach switch has a movable part 85 that moves in the direction DR2, and the movement of the movable part 85 of the teach switch causes the measurement reference information to be stored in the memory 102. be instructed. Specifically, when the measurement start switch 84 is pressed for a long time, the inertial measurement device 10 shifts to a learning mode, which is a teach mode. During a predetermined learning period, the inertial measurement device 10 performs learning measurements, and a threshold value serving as measurement reference information is determined based on the average value of the measurement values measured during this learning period. This threshold value is then stored as measurement reference information in the memory 102, which is a nonvolatile memory. During actual measurement by the inertial measurement device 10, a determination process is performed using this threshold value as measurement reference information, and the determination result is displayed on the display unit 70. As an example, a display as shown in FIG. 11 is performed.

As described above, the inertial measurement device 10 of the present embodiment includes the sensor unit 20 having at least one inertial sensor, the display unit 70 that performs display based on information detected by the inertial sensor, and the mode changeover switch 80. Then, the display mode of the display unit 70 is switched by the mode changeover switch 80. For example, the display mode is switched as described with reference to FIGS. 10 and 11. For example, the mode of display information on the display section 70 is switched.

According to the inertial measurement device 10 having such a configuration, the display section 70 included in the inertial measurement device 10 can display information based on the detection information of the inertial sensor of the sensor unit. For example, simply by attaching the inertial measurement device 10 to a measurement target, information based on the detected information can be displayed on the display unit 70. Therefore, for example, it is not necessary to connect a PC to the inertial measurement device 10 and use the display section of the PC to display information based on the detected information, which simplifies the work of checking measurement results and allows the user to Convenience can be improved. When the user operates a mode changeover switch 80 provided on the inertial measurement device 10, the display mode of the display unit 70 is changed over. Specifically, as explained in FIGS. 10 and 11, when the user operates the mode changeover switch 80, for example, the determination results of measurements based on different criteria are displayed on the display section 70, or The display mode will now be switched, such as the unit of information being displayed. Therefore, the display mode of the display section 70 can be changed to various modes with a simple operation of operating the mode changeover switch 80, and it is possible to meet various demands regarding the display mode of measurement results, thereby improving user convenience. can be further improved.

Note that in the inertial measurement device 10 having the configuration described in FIG. 9, the mode changeover switch 80 does not necessarily need to be provided on the substrate 40, and the mode changeover switch 80 may be provided on a substrate other than the substrate 40, for example. For example, the mode changeover switch 80 may be provided on the substrate 48 on which the display section 70 is provided, instead of on the substrate 40 on which the processing section 50 and the like are provided. Alternatively, various modifications are possible, such as installing the mode changeover switch 80 on the top surface of the sensor unit 20.

Further, as shown in FIG. 9, the mode changeover switch 80 includes a movable portion 81 that is movable in a direction DR2 orthogonal to a direction DR1 from the inertial measurement device 10 toward the mounting surface 2. Then, by moving the movable part 81 of the mode changeover switch 80, switching of the display mode of the display part 70 is instructed. In this way, the user can, for example, hold the inertial measurement device 10 so that the upper surface thereof is in contact with the palm of the hand, and move the movable portion 81 in the direction DR2 that is parallel to the upper surface of the inertial measurement device 10. It becomes possible to instruct switching of the display mode of the display unit 70. Therefore, the user can instruct the switching of the display mode with a simple operation and display information based on the detection information of the inertial sensor on the display unit 70 in the display mode desired by the user.

Moreover, the movable part 81 of the mode changeover switch 80 protrudes from the side of the sensor unit 20 when viewed from above in the direction DR1 in the non-pressed state. In this way, when the user grips the inertial measurement device 10 so that the upper surface thereof is in contact with the palm of the user's hand, the movable portion 81 of the mode changeover switch 80 is in a protruding state in a non-pressed state. Therefore, when the user presses the protruding movable portion 81 with, for example, a finger while holding the inertial measurement device 10, the display mode of the display portion 70 can be switched. Therefore, the display mode of the display section 70 can be changed by simply pressing the movable section 81 protruding in a direction parallel to the top surface of the sensor unit 20 in the non-pressed state, improving user convenience. .

The inertial measurement device 10 also includes a measurement start switch 84 for starting measurement by the inertial measurement device 10. If such a measurement start switch 84 is provided, processing such as issuing a measurement start command using a PC or the like becomes unnecessary. When the user desires to start measurement, the measurement of the inertial measurement device 10 can be started by a simple operation of pressing the measurement start switch 84.

Furthermore, the measurement start switch 84 has a movable portion 85 that is movable in a direction DR2 orthogonal to the direction DR1 toward the mounting surface 2. Then, by moving the movable portion 85 of the measurement start switch 84, the inertial measurement device 10 is instructed to start measurement. In this way, the user can grasp the inertial measurement device 10 with the palm of the hand touching the top surface, and move the movable portion 85 in the direction DR2 parallel to the top surface, thereby controlling the inertial measurement device 10. It becomes possible to instruct the start of measurement. Therefore, the user can instruct the inertial measurement device 10 to start measurement at a timing desired by the user with a simple operation.

The inertial measurement device 10 also includes a memory 102 and a teach switch for instructing the memory 102 to store measurement reference information for inertial measurement. In FIG. 9, for example, the measurement start switch 84 is also used as a teach switch, and when the measurement start switch 84 is pressed for a long time, the learning mode is entered and the threshold value, which is measurement reference information for inertial measurement, is stored in the memory 102. Then, for example, the processing unit 50 performs a measurement determination process using this threshold as a determination criterion, or the display unit 70 displays a determination result of measurement using this threshold as a determination criterion. . In this way, the inertial measurement device 10 can be made to learn measurement standard information according to the situation of the device to be measured and the environmental situation, and measurement can be realized using the measurement standard information.

The teach switch that also serves as the measurement start switch 84 has a movable part 85 that moves in the direction DR2. Then, by moving the movable portion 85 of the teach switch, an instruction is given to store the measurement reference information in the memory 102. In this way, the user can, for example, hold the inertial measurement device 10 so that the upper surface of the device is in contact with the palm of the hand, and move the movable portion 85 in the direction DR2 that is parallel to the upper surface, thereby storing the measurement reference information. It becomes possible to instruct storage to 102. Therefore, the user can make the inertial measurement device 10 learn the judgment criterion information during the period that the user wants the inertial measurement device 10 to learn.

The inertial measurement device 10 also includes a substrate 40 on which a mode changeover switch 80 is provided. For example, a mode changeover switch 80 is provided on the substrate 40 on which the processing section 50 or the display section 60 is provided. For example, a mode changeover switch 80 is mounted on the substrate 40 arranged parallel to the upper surface of the sensor unit 20. This makes it possible to mount the mode changeover switch 80 in the inertial measurement device 10 in a compact manner. In particular, by setting the movable direction of the movable portion 81 of the mode changeover switch 80 in a direction parallel to the surface of the substrate 40, compact mounting of the mode changeover switch 80 can be realized.

As described in FIGS. 1, 2, etc., the inertial measurement device 10 includes at least one fixing member 11, 12, and 13 that detachably fixes the sensor unit 20 and the substrate 40. That is, the sensor unit 20 having the inertial sensor and the substrate 40 provided with the mode changeover switch 80 are detachably fixed by the fixing members 11, 12, and 13. In this way, the type of sensor unit 20 and the type of substrate 40 to be incorporated into the inertial measurement device 10 can be freely changed, and the expandability of the inertial measurement device 10 can be improved. In addition, since the inertial measurement device 10 can be attached to the mounting surface 2 with the sensor unit 20 and the substrate 40 fixed by the fixing members 11, 12, and 13, undesirable vibrations caused by resonance etc. It is also possible to suppress situations that may be transmitted to the device 10 and have an adverse effect on measurements.

Further, the inertial measurement device 10 includes a substrate 40 that is a first substrate and a substrate 48 that is a second substrate, the mode changeover switch 80 is provided on the substrate 40, and the display section 70 is provided on the substrate 48. The substrate 40 is then provided between the sensor unit 20 and the substrate 48. In this way, when the mode changeover switch 80 provided on the board 40 is operated, the display mode of the display section 70 provided on the board 48 is switched. Since the mode changeover switch 80 is provided on the substrate 40 provided between the sensor unit 20 and the substrate 48, the mode changeover switch 80 may be arranged near the center in the height direction of the inertial measurement device 10, for example. Therefore, the operability of the mode changeover switch 80 can be improved. On the other hand, since the display section 70 is provided on the substrate 48 disposed above the substrate 40 in the direction DR4, the display section 70 can be disposed at a position where the user can easily see it.

In addition, the display unit 70 displays the determination result based on the first determination criterion in the first display mode, and displays the determination result based on the second determination criterion in the second display mode, as the determination result of the determination process based on the detection information. . For example, in the first display mode, the display section 70 displays the determination result as shown in FIG. 10, and in the second display mode, the display section 70 displays the determination result as shown in FIG. 11. In this way, it is possible to switch between the first display mode in which the determination result based on the first determination criterion is displayed and the second display mode in which the determination result based on the second determination criterion is displayed using the mode changeover switch 80. become. Therefore, when the user operates the mode changeover switch 80, the results of measurements based on different criteria are displayed on the display unit 70, and the results of measurements based on various criteria can be presented to the user. Become.

In this case, the first criterion is a VC (Vibration Criteria) criterion, and the second criterion is a criterion set by the user. For example, in the first display mode, as shown in FIG. 10, the determination result based on the VC determination criterion, which is the first determination criterion, is displayed. For example, it is displayed whether the vibration measured by the inertial measurement device 10 satisfies the environmental vibration standard index such as VC-A, VC-B, VC-C, VC-D, or VC-E. On the other hand, in the second display mode, as shown in FIG. 11, the determination results based on the determination criteria set by the user are displayed. For example, the extent to which the measurement results of the inertial measurement device 10 compare to the criteria set by the user is displayed. For example, if the criterion set by the user is a threshold, the percentage of the measured value relative to the threshold is displayed. In this way, the mode changeover switch 80 can be used to switch between the first display mode in which the judgment results based on the VC judgment criteria are displayed and the second display mode in which the judgment results based on the judgment criteria set by the user are displayed. becomes possible. Note that when using the display unit 60 composed of the light emitting element groups 62 and 64, as is clear from FIG. D, VC-E, etc. are met. Further, using the light emitting element group 64, for example, whether the peak value is L (low), M (middle), or H (high) is displayed. That is, by emitting light from the light emitting elements corresponding to the L, M, and H positions, it is displayed whether the peak value is a low level, an intermediate level, or a high level. Note that "A" in Figure 7 indicates an alarm state, and by the light emitting element corresponding to the "A" position emitting light, the user is notified that an alarm state has occurred, such as when the measured value exceeds a threshold. Ru.

Furthermore, the unit of information to be displayed is switched by the mode changeover switch 80 based on the detected information. For example, in the case of vibration measurement, as shown in FIG. The unit of the displayed measurement value changes. In this way, measurement values in various units can be displayed to the user by operating the mode changeover switch 80, and user convenience can be improved.

The inertial measurement device 10 also includes a processing section 50 that performs processing based on detected information. The processing unit 50 then performs analysis processing of the vibration information to be detected, and the display unit 70 displays information as a result of the analysis processing. Note that the display unit 60 similarly displays the result information of the analysis process. For example, the processing unit 50 performs analysis processing such as FFT analysis of vibration information based on the detection information from the inertial sensor of the sensor unit 20. The display unit 70 displays, for example, the peak frequency of vibration, the vibration displacement at the peak frequency, the vibration velocity, or the vibration acceleration as result information of the analysis process. In this way, even when the detection information of the inertial sensor is information that is difficult for the user to handle, the processing section 50 performs analysis processing of this detection information, and the display section 70 displays the result information of the analysis processing. This allows the user to easily understand the state of vibration of the object to be detected.

3. Wireless Communication Section, Antenna Section The inertial measurement device 10 of the present embodiment includes a wireless communication section 90 and an antenna connected to the wireless communication section 90 in order to wirelessly transmit information based on detection information of the inertial sensor of the sensor unit 20 to the outside. An antenna section 92 is provided. The wireless communication unit 90 is a device that performs close proximity wireless communication such as Bluetooth (registered trademark, hereinafter simply referred to as BT), and is realized by, for example, a wireless communication IC that is an integrated circuit device. Note that the wireless communication performed by the wireless communication unit 90 is not limited to BT, and may be close proximity wireless communication such as ZigBee or Wisan, or wireless communication of Wi-Fi (registered trademark). On the other hand, as will be described later with reference to FIGS. 15 to 20, the sensor unit 20 includes a sensor board 210 on which an inertial sensor is provided, and a conductive case 24 that houses the sensor board 210. The case 24 includes, for example, a container 220 and a lid 222, and the sensor substrate 210 is accommodated in a housing space formed by the container 220 and the lid 222. In FIG. 15, the sensor board 210 is provided with acceleration sensors 30X, 30Y, and 30Z as inertial sensors. The acceleration sensors 30X, 30Y, and 30Z detect acceleration information in the X-axis, Y-axis, and Z-axis directions, respectively, as detection information. In FIGS. 19 and 20, the sensor board 210 is provided with an acceleration sensor 32 and angular velocity sensors 34X, 34Y, and 34Z as inertial sensors. The acceleration sensor 32 detects information on acceleration in the X-axis, Y-axis, and Z-axis directions as detection information. The angular velocity sensors 34X, 34Y, and 34Z detect information about angular velocity around the X axis, the Y axis, and the Z axis, respectively, as detection information.

In FIGS. 15 to 20, the case 24 is made of a conductive material such as metal. As the metal, aluminum, zinc, stainless steel, etc. can be used. In this way, by housing the sensor substrate 210 on which the inertial sensor is mounted in the conductive case 24, the adverse effects of external electromagnetic waves and the like on the inertial sensor can be reduced. For example, if the conductive case 24 is not provided, there will be problems such as drift in the detection information of the inertial sensor due to electromagnetic waves from the outside. This can prevent such problems from occurring.

However, it has been found that if the conductive case 24 is located near the antenna section 92, a problem arises in that the sensitivity of the antenna section 92 is reduced. For example, the antenna section 92 is realized by an inductor made of metal wiring formed on a substrate. For example, if the inductor of the metal wiring of the antenna section 92 is located directly above the conductive case 24, the sensitivity of the antenna section 92 will be significantly reduced. It will drop.

Therefore, in the present embodiment, as shown in FIG. 12, when the direction from the inertial measurement device 10 toward the mounting surface 2 is DR1, the sensor unit 20 is arranged to protrude from the side of the case 24 in a plan view in the direction DR1. An antenna section 92 is provided in the antenna section 92. For example, in FIG. 12, the substrate 40 has opposing short sides SD1 and SD2, and opposing long sides SD3 and SD4. The direction from side SD1 to side SD2 is DR3, and the direction opposite to DR3 is DR6. The direction from side SD3 to side SD4 is DR2, and the direction opposite to DR2 is DR5. The antenna section 92 protrudes from the short side SD1 of the substrate 40, and also protrudes from the side of the sensor unit 20 corresponding to the side SD1. Specifically, the antenna portion 92 is provided so as to protrude from the side SD1 in the direction DR6.

In this way, the antenna section 92 will not be located directly above the conductive case 24 of the sensor unit 20, for example. Specifically, the inductor of the metal wiring of the antenna section 92 is not located directly above the conductive case 24. Therefore, it is possible to suppress a decrease in sensitivity of the antenna section 92 caused by the conductive case 24. That is, if the antenna section 92 is provided on the side SD1 in the direction DR3 in FIG. 12, the sensitivity of the antenna section 92 will be reduced due to the presence of the conductive case 24 directly below the antenna section 92. On the other hand, by providing the antenna part 92 on the side SD1 in the direction DR6 as shown in FIG. You can improve.

As described above, the inertial measurement device 10 of this embodiment includes the sensor unit 20 having at least one inertial sensor, the wireless communication section 90 that wirelessly transmits information based on the detection information of the inertial sensor, and the wireless communication section 90. It includes an antenna section 92 to be connected. By providing the wireless communication section 90 and the antenna section 92 in this manner, it becomes possible to wirelessly transmit information based on the detection information of the inertial sensor to the outside. This makes it possible to transmit information based on the detection information to the external device without, for example, connecting the inertial measurement device 10 to the external device by wire, thereby improving convenience for the user.

Here, the sensor unit 20 includes an inertial sensor, a sensor board 210 on which the inertial sensor is provided, and a conductive case 24 that houses the sensor board 210. That is, in FIG. 15, a sensor board 210 on which acceleration sensors 30X, 30Y, and 30Z are provided as inertial sensors is housed in a case 24. In FIGS. 19 and 20, a sensor board 210 is housed in a case 24, on which an acceleration sensor 32 and angular velocity sensors 34X, 34Y, and 34Z are provided as inertial sensors. In this way, the inertial sensor is housed in the conductive case 24, and it is possible to prevent the accuracy of information detected by the inertial sensor from deteriorating due to external electromagnetic waves or the like.

As shown in FIG. 12, in the inertial measurement device 10 of this embodiment, the antenna section 92 is provided so as to protrude from the side of the case 24 when viewed in plan in the direction DR1 toward the mounting surface 2. That is, the antenna portion 92 protrudes from the side SD1 of the substrate 40, and also protrudes from the side of the lower case 24 corresponding to this side SD1. In this way, it is possible to suppress a decrease in the sensitivity of the antenna section 92 caused by the conductive case 24. Therefore, by housing the inertial sensor in the conductive case 24, it is possible to suppress deterioration in detection accuracy of the inertial sensor and to improve the sensitivity of the antenna section 92.

Note that in the inertial measurement device 10 having the configuration described in FIG. It may be provided. For example, the wireless communication section 90 and the antenna section 92 may be provided on the substrate 48 on which the display section 70 is provided, instead of on the substrate 40 on which the processing section 50 and the like are provided. Alternatively, various modifications such as installing the wireless communication section 90 and the antenna section 92 on the top surface of the sensor unit 20 are possible.

The inertial measurement device 10 also includes a substrate 40 on which a wireless communication section 90 is provided and a protection plate 160. As explained in FIGS. 1 and 2, the substrate 40 is provided between the sensor unit 20 and the protection plate 160, and as shown in FIG. 12, in a plan view in the direction DR1, the antenna section 92 is It does not protrude from the protection plate 160. That is, the antenna section 92 protrudes from the side SD1 of the substrate 40 and the corresponding side of the sensor unit 20 in the direction DR6, but does not protrude from the corresponding side of the protection plate 160 in the direction DR6. For example, the conductive case 24 of the sensor unit 20 is not present below the antenna section 92, but a protection plate 160 is provided above the antenna section 92 so as to cover the antenna section 92. In this way, if the antenna part 92 is made not to protrude from the protection plate 160 in plan view and the protection plate 160 is provided to cover the antenna part 92, the protection plate 160 becomes a protection member and protects the antenna part 92. Situations such as undesirable impact can be prevented. For example, it is possible to suppress the occurrence of a situation where the user's finger or the like accidentally touches the antenna section 92 and the antenna section 92 is damaged. Therefore, by making the antenna part 92 protrude from the conductive case 24 in plan view, communication sensitivity is improved, and by making it not protrude from the protection plate 160 in plan view, the antenna part 92 can be protected from external impact. It becomes possible to protect.

The inertial measurement device 10 also includes a substrate 40 on which a wireless communication section 90 is provided, and an antenna section 92 is provided so as to protrude from the short side SD1 of the substrate 40. Specifically, a communication board 94 is mounted on the board 40 on which the processing section 50 and the like are provided, and the wireless communication section 90 and the antenna section 92 are provided on this communication board 94. That is, a wireless communication IC, which is the wireless communication section 90, is mounted on the communication board 94, and an inductor using metal wiring is formed on a portion of the communication board 94 that protrudes from the side SD1 of the board 40. , the antenna section 92 is realized. Note that the substrate portion on which the wireless communication unit 90 is mounted and the substrate portion on which the antenna portion 92 is formed may be realized by an integrated substrate or may be realized by separate substrates. By providing the antenna section 92 so as to protrude from the side SD1 of the substrate 40 in this manner, the risk of undesirable impact being applied to the antenna section 92 can be reduced. For example, when a user grips the two long sides of the inertial measurement device 10 with the palm of the hand touching the top surface, the user's fingers or the like may touch the antenna section 92 and an undesirable impact may be applied to the antenna section 92. It will be possible to prevent such situations from occurring.

Further, as shown in FIG. 12, the wireless communication section 90 is provided on the short side SD1 of the substrate 40. Specifically, the wireless communication unit 90 is arranged along the side SD1 on the DR3 side of the side SD1. An antenna section 92 connected to this wireless communication section 90 is provided so as to protrude from the side SD1 in the direction DR6. In this way, the antenna section 92 is electrically connected to the wireless communication section 90 disposed on the side SD1 of the board 40 through a short path, and the antenna section 92 is made to protrude from the side SD1. 92 sensitivity can be improved. This makes it possible to improve the sensitivity of the antenna section 92 while mounting the wireless communication section 90 and the antenna section 92 on the board 40 in a compact packaging form.

The inertial measurement device 10 also includes a substrate 40 on which a wireless communication section 90 is provided, and a processing section 50 that is provided on the substrate 40 and performs processing based on information detected by the inertial sensor of the sensor unit 20. The wireless communication unit 90 then transmits the information processed by the processing unit 50. For example, when the processing unit 50 processes the detection information of the inertial sensor, the wireless communication unit 90 transmits the processed detection information to the outside by wireless, for example. Further, when the processing unit 50 performs analysis processing of the information detected by the inertial sensor, the wireless communication unit 90 transmits the result information of the analysis processing to the outside, for example. In this way, the wireless communication unit 90 can wirelessly transmit to the outside the information obtained by the processing unit 50 performing predetermined processing on the detection information, rather than the detection information itself of the inertial sensor. become. Therefore, the external device of the inertial measurement device 10 does not need to perform the processing performed by the processing unit 50 of the inertial measurement device 10, reducing the processing load and cost of the measurement system including the inertial measurement device 10. You will be able to aim for

Furthermore, the information detected by the inertial sensor is difficult to handle and requires specialized knowledge, so there is a problem that it lacks convenience for the user. By transmitting information, it becomes possible to transmit information that is easy for the user to handle, thereby improving convenience for the user.

Further, as shown in FIG. 12, in the inertial measurement device 10 of this embodiment, an antenna section 92 is provided so as to protrude from the side SD1 of the substrate, and the processing section 50 is connected to the wireless communication section 90 and the side opposite to the side SD1. It is provided between SD2. Side SD1 is the first short side, and side SD2 is the second short side. For example, when the direction from side SD1 to side SD2 of the board 40 is DR3, and the direction opposite to direction DR3 is DR6, the antenna section 92 is directed toward the wireless communication section 90 so as to protrude from the side SD1 of the board 40. Provided on the DR6 side. The wireless communication section 90 is provided on the DR3 side of the antenna section 92, and the processing section 50 is provided on the DR3 side of the wireless communication section 90. In this way, the antenna section 92, the wireless communication section 90, and the processing section 50 can be efficiently arranged along the direction from the short side SD1 of the substrate 40 to the opposite side SD2. . For example, the antenna section 92, the wireless communication section 90, and the processing section 50 can be arranged in this order along the sides SD3 and SD4, which are the long sides of the board 40, thereby increasing the mounting efficiency of circuit components on the board 40. can be improved.

The inertial measurement device 10 also includes an interface section 100 for communicating data with the outside by wire. The interface section 100 is arranged on the second short side SD2 of the substrate. Specifically, the interface section 100 is arranged along the side SD2 on the DR6 side of the side SD2. The interface unit 100 is a circuit that implements a communication interface such as UART, GPI, or SPI. If such an interface unit 100 is provided, information based on the detection information of the inertial sensor can be sent to an external device, and commands from an external device can be sent using a widely used wired communication interface such as UART, GPI, or SPI. It becomes possible to accept the following. By providing the interface section 100 on the side SD2 of the substrate 40, the antenna section 92, the wireless communication section 90, the processing section 50, and the interface section 100 can be efficiently arranged along the long side direction of the substrate 40. Therefore, the mounting efficiency of circuit components on the board 40 can be improved.

As shown in FIG. 12, at least one of a mode changeover switch 80, a reset switch 82, and a measurement start switch 84 is provided on the long side SD3 of the substrate 40. By doing so, the wireless communication section 90, the processing section 50, and the interface section 100 are arranged using the area between the short side SD1 and the side SD2 of the inertial measurement device 10, and the long side of the board 40 The mode changeover switch 80, reset switch 82, and measurement start switch 84 can be placed using the area along the side SD3, which makes it possible to realize an efficient mounting layout. The inertial measurement device 10 also includes at least one fixing member 11, 12, and 13 that detachably fixes the sensor unit 20 and the substrate 40 on which the wireless communication section 90 and the like are provided. In this way, as described above, the expandability of the inertial measurement device 10 can be improved, and the situation where undesirable vibrations caused by resonance etc. are transmitted to the inertial measurement device 10 and adversely affects the measurement can be avoided. be able to suppress it.

Further, as shown in FIG. 13, in the inertial measurement device 10 of this embodiment, the sensor unit 20 has a sensor-side connector 26 on the surface facing the substrate 40. That is, the sensor unit 20 has a connector 26 on the top surface. Further, the board 40 has a board-side connector 46 connected to the sensor-side connector 26 on the surface facing the sensor unit 20. That is, a connector 46 is provided on the lower surface of the substrate 40, and the connector 46 of the substrate 40 is electrically connected to the connector 26 of the sensor unit 20. Specifically, as shown in FIGS. 1 and 2, when the sensor unit 20 and the board 40 are fixed by the fixing members 11, 12, and 13, the connector 26 of the sensor unit 20 and the connector 46 of the board 40 are connected. electrically connected. This allows the detection information of the inertial sensor of the sensor unit 20 to be transmitted to the substrate 40 via these connectors 26 and 46. The processing section 50 provided on the substrate 40 can perform processing based on the information detected by the inertial sensor, and the display section 60 provided on the substrate 40 can perform display based on the information detected by the inertial sensor. The connector 26 is, for example, a male connector realized by a plurality of pin terminals, and the connector 46 is, for example, a female connector to which a male connector can be connected.

FIG. 14 is a state transition diagram explaining the operation of the inertial measurement device 10 of this embodiment. When the inertial measurement device 10 is powered on and started, it first shifts to an initialization processing state. When the validity of BT (Bluetooth (registered trademark)) is detected through selection by the slide switch 86, BT settings are performed, and when the settings are completed, the process returns to the initialization processing state. When BT is enabled, wired communication is disabled. On the other hand, when a shift in the light display operation is detected through selection by the slide switch 86, the mode shifts to the light display mode. In the light display mode, the interface section 100 enters the GPIO output mode, and light display by Patlite (registered trademark) or the like using the inertial measurement device 10 becomes possible.

If enablement of BT or transition to light display mode is not selected by the slide switch 86, transition to standby operation is detected and transition to standby mode is performed. In the standby mode, when a learning request is made by, for example, pressing and holding the measurement start switch 84 or by issuing a command, the learning mode is entered and learning processing is performed. In the learning mode, for example, a predetermined light emitting element on the display section 60 blinks, or the words "LEARING" are displayed on the display section 70, to notify the user that learning is in progress. Measurement is then performed during the learning period of the learning mode, and a measurement threshold, which is measurement reference information for inertial measurement, is determined based on the measurement results during the learning period. The determined threshold value is then stored in the memory 102, which is a nonvolatile memory. When the learning process is completed, it returns to standby mode. In the standby mode, when a setting request is made, for example, by issuing a command from an external device, various setting processes for the inertial measurement device 10 are performed, and when the settings are completed, the device returns to the standby mode.

Further, in the standby mode, when the measurement start switch 84 is pressed and a request to start status monitoring is made, the mode shifts to the status monitoring mode. In the state monitoring mode, measurement results are displayed on the display section 60 and the display section 70. Further, if the mode changeover switch 80 is pressed at this time, the display mode is changed over. Further, in the state monitoring mode, for example, when a measured value exceeds a threshold value, the state shifts to an alarm state, and, for example, the alarm light emitting element of the display section 60 blinks. When the alarm state is entered, log data is also saved. In the state monitoring mode or alarm state, when a request to stop state monitoring is made, for example by pressing the measurement start switch 84 again, the system returns to the standby mode.

In the above-described inertial measurement device 10 of this embodiment, the user first attaches the inertial measurement device 10 to the device or the floor and presses the measurement start switch 84. For example, the user holds the inertial measuring device 10 so that the top surface of the inertial measuring device 10 contacts the palm of the hand, and presses the measurement start switch 84 using a finger or the like. Note that in order to cause the inertial measurement device 10 to learn the threshold value, the user presses and holds the measurement start switch 84 to learn the measurement threshold value, and then presses the measurement start switch 84. After pressing the measurement start switch 84, the controller waits for a given measurement time. For example, the length of the measurement time is 5 to 10 seconds, and the length of the measurement time can be set. When the measurement time ends, the user is informed of the measurement result by displaying on the LED, which is a light emitting element of the display section 60, or on the display panel 72 of the display section 70. At this time, the user can switch to various display modes by pressing the mode changeover switch 80. By pressing the measurement start switch 84 again, the user can stop the state monitoring mode and shift to the standby mode. As described above, according to the inertial measurement device 10 of this embodiment, the user can perform measurements with simple operations. Since information based on the detection information of the inertial sensors is displayed on the display sections 60 and 70, the measurement results can be confirmed through easy-to-understand information display, and convenience can be improved. Furthermore, by operating the mode changeover switch 80, measurement results in various display modes can be confirmed. Further, since the wireless communication section 90 and the antenna section 92 are provided, information based on the detection information of the inertial sensor can be transmitted to an external device by wireless communication. In this case, since the antenna section 92 is provided so as to protrude from the main surface of the case 24 of the sensor unit 20, wireless communication with high antenna sensitivity is possible.

4. First Configuration Example of Sensor Unit FIG. 15 shows a first configuration example of the sensor unit 20. FIG. 15 is an exploded perspective view of the sensor unit 20. The sensor unit 20 in FIG. 15 includes a sensor board 210 provided with at least one acceleration sensor as at least one inertial sensor, and a case 24 that houses the sensor board 210. In FIG. 15, acceleration sensors 30X, 30Y, and 30Z that detect acceleration in the X-axis, Y-axis, and Z-axis directions are provided on the sensor board 210 as at least one acceleration sensor. Acceleration sensors 30X, 30Y, and 30Z are mounted on sensor substrate 210 so that their main surfaces are perpendicular to the X, Y, and Z axes, respectively. The acceleration sensors 30X, 30Y, and 30Z are acceleration sensors using, for example, crystal oscillators, and can detect acceleration with higher precision than MEMS (Micro Electro Mechanical Systems) acceleration sensors. This makes it possible to detect vibrations in the equipment and the floor with high precision. In FIG. 15, three acceleration sensors 30X, 30Y, and 30Z are provided on the sensor board 210 for three-axis acceleration detection, but one acceleration sensor for one-axis acceleration detection may be provided on the sensor board 210. Various modifications are possible, such as providing two acceleration sensors for biaxial acceleration detection on the sensor board 210.

Further, the sensor board 210 is provided with a processing section 212 realized by an ASIC, a microcomputer, or the like. For example, part or all of the processing performed by the processing section 50 of the inertial measurement device 10 may be performed by the processing section 212 of the sensor unit 20. Further, a connector 26 constituted by a plurality of connector terminals is provided on the second surface, which is the back surface of the first surface, which is the main surface, of the sensor board 210 on which the acceleration sensors 30X, 30Y, and 30Z are provided. As described in FIG. 13, the connector 26 of this sensor unit 20 is connected to the connector 46 on the back surface of the substrate 40 of the inertial measurement device 10.

The case 24 is made of a conductive material such as metal, and includes a container 220 and a lid 222. Further, the inside of the container 220 is a space surrounded by a bottom wall 232 and a side wall 231. Then, the sensor substrate 210 is accommodated in the accommodation space formed by the container 220 and the lid 222, and the container 220 and the lid 222 are fixed and sealed with a fixing member such as a screw. The sensor substrate 210 and the side wall 231 may be perpendicular to each other. Note that a sealing member 224 serving as a cushioning material is provided between the lid portion 222 and the sensor substrate 210.

FIG. 16 is a sectional view showing an outline of a first configuration example of the sensor unit 20. Acceleration sensors 30X, 30Y, and 30Z each have a lid 330. The lid portion 330 of the acceleration sensor 30X is arranged to face the side wall 231 of the container 220. Further, the lid portion 330 of the acceleration sensor 30Y is also arranged to face the side wall 231 on the back side of the container 220 in the drawing. As a result, noise from the side wall 231 is absorbed by the lid 330, so that noise propagation to the acceleration sensors 30X and 30Y is reduced. Details regarding this point will be described later.

5. Acceleration Sensor Here, the configuration of the acceleration sensors 30X, 30Y, and 30Z will be described with reference to FIGS. 17 and 18. FIG. 17 is a perspective view of the acceleration sensor element 400. FIG. 18 is a front view and a cross-sectional view of an acceleration detector 300 using the acceleration sensor element 400.

In FIG. 17, the x-axis, y'-axis, and z'-axis are illustrated as three mutually orthogonal axes. For example, assume an orthogonal coordinate system consisting of an x-axis as an electric axis, a y-axis as a mechanical axis, and a z-axis as an optical axis of crystal, which is a piezoelectric material used as a base material of the acceleration sensors 30X, 30Y, and 30Z. In this orthogonal coordinate system, the x-axis is the rotation axis, and the z'-axis is an axis tilted by a rotation angle φ so that the +z side rotates in the −y direction of the y-axis. The rotation angle φ is preferably −5°≦φ≦15°. Further, the y' axis is an axis obtained by tilting the y axis by a rotation angle φ such that the +y side rotates in the +z direction of the z axis. In this case, a crystal z plate is cut out and processed into a flat plate along a plane defined by the x-axis and y'-axis, and has a predetermined thickness t in the z'-axis direction perpendicular to the plane, An example of use as a base material will be explained. Note that the z' axis is an axis along the direction in which gravity acts in the acceleration detector 300. Also, the quartz z plate is technically a quartz z' plate, but it is written as a quartz z plate.

First, the configuration of acceleration sensor element 400 will be described with reference to FIG. 17. The acceleration sensor element 400 includes a substrate structure 401 including a base 410 and the like, an acceleration detection element 470 connected to the substrate structure 401 to detect a physical quantity, and mass parts 480 and 482.

The substrate structure 401 of the acceleration sensor element 400 includes a base portion 410 , a movable portion 414 connected to the base portion 410 via a joint portion 412 , a connecting portion 440 , and a first portion connected to the base portion 410 . It includes a support part 420, a second support part 430, a third support part 450, and a fourth support part 460. Here, the third support part 450 and the fourth support part 460 are connected on the side where the connection part 440 is arranged.

The substrate structure 401 uses a quartz substrate of a quartz Z plate cut out at a predetermined angle from a piezoelectric material such as raw quartz as described above. By patterning the crystal substrate, these are integrally formed as a substrate structure 401. For patterning, for example, photolithography technology and wet etching technology can be used.

The base 410 is connected to the movable part 414 via a joint part 412 and supports the movable part 414. The base portion 410 includes a movable portion 414, a connecting portion 440 located on the side opposite to the side where the joint portion 412 of the movable portion 414 is located, a first support portion 420, a second support portion 430, and a connecting portion 440 side. The third support part 450 and the fourth support part 460 are connected to each other.

The joint portion 412 is provided between the base portion 410 and the movable portion 414 and is connected to the base portion 410 and the movable portion 414. The thickness of the joint part 412, which is the length of the joint part 412 in the z'-axis direction, is thinner than the thickness of the base part 410 and the thickness of the movable part 414. It is formed in the shape of The joint portion 412 can be provided, for example, by forming a thin portion by so-called half-etching the substrate structure 401 including the joint portion 412 . The joint portion 412 functions as a fulcrum, which is an intermediate hinge, and as a rotation axis along the x-axis direction when the movable portion 414 is displaced relative to the base portion 410, that is, when it rotates.

The movable part 414 is connected to the base part 410 via the joint part 412. The movable part 414 has a plate-like shape and has main surfaces 414a and 414b that face each other along the z'-axis direction and have a front-back relationship. The movable part 414 moves in the z'-axis direction with the joint part 412 as a fulcrum, that is, with the joint part 412 as a rotation axis, in response to acceleration, which is a physical quantity, applied in the z'-axis direction, which is a direction that intersects the main surfaces 414a and 414b. can be displaced to

The connecting portion 440 extends from the base portion 410 on the +x direction side where the third support portion 450 is provided so as to surround the movable portion 414 along the x-axis direction, and is provided with the fourth support portion 460. - It is connected to the base 410 on the x direction side.

The first support section 420 and the second support section 430 are provided in a symmetrical configuration with the acceleration detection element 470 as the center. Similarly, the third support section 450 and the fourth support section 460 are provided in a symmetrical configuration with the acceleration detection element 470 as the center. The substrate structure 401 is supported by the fixed parts in the first support part 420, the second support part 430, the third support part 450, and the fourth support part 460. The fixed part is a package 310 of an acceleration detector 300, which will be described later with reference to FIG.

The acceleration detection element 470 is provided connected to the base 410 of the substrate structure 401 and the movable part 414. In other words, the acceleration detection element 470 is provided so as to straddle the base 410 of the substrate structure 401 and the movable part 414. The acceleration detection element 470 has vibrating beam parts 471a and 471b as vibrating parts, a first base part 472a, and a second base part 472b. The acceleration detection element 470, in which the first base 472a and the second base 472b are connected to the base 410, vibrates when, for example, the movable part 414 is displaced in accordance with a physical quantity, stress is generated in the vibrating beam parts 471a and 471b. The physical quantity detection information generated in the beam portions 471a and 471b changes. In other words, the resonance frequency, which is the vibration frequency of the vibrating beam portions 471a and 471b, changes. In this embodiment, the acceleration detection element 470 is a twin tuning fork vibrating element having two vibrating beam parts 471a and 471b, a first base part 472a and a second base part 472b. Note that the vibrating beam portions 471a and 471b as vibrating portions may also be referred to as vibrating arms, vibrating beams, or columnar beams.

The acceleration detection element 470 uses a quartz substrate of a quartz Z plate cut out at a predetermined angle from a piezoelectric material such as raw quartz crystal, similar to the substrate structure 401 described above. The acceleration detection element 470 is formed by patterning the crystal substrate using photolithography and etching techniques. Thereby, the vibrating beam parts 471a, 471b, the first base part 472a, and the second base part 472b can be integrally formed.

Note that the material of the acceleration detection element 470 is not limited to the above-mentioned crystal substrate. For example, lithium tantalate (LiTaO ₃ ), lithium tetraborate (Li ₂ B ₄ O ₇ ), lithium niobate (LiNbO ₃ ), lead zirconate titanate (PZT), zinc oxide (ZnO), aluminum nitride (AlN ) etc. can be used. Further, a semiconductor material such as silicon having a piezoelectric film such as zinc oxide (ZnO) or aluminum nitride (AlN) can be used. However, it is preferable to use the same material as the substrate structure 401. The acceleration detection element 470 is provided with, for example, an extraction electrode and an excitation electrode (not shown), but a description thereof will be omitted.

The mass parts 480 and 482 are each provided on a main surface 414a of the movable part 414, and a main surface 414b that is a back surface in a front-to-back relationship with the main surface 414a. More specifically, the mass parts 480 and 482 are provided on the main surface 414a and the main surface 414b via a mass bonding material (not shown). Examples of the material for the mass parts 480 and 482 include metals such as copper (Cu) and gold (Au).

In addition, in this embodiment, the acceleration detection element 470 is configured using a twin tuning fork vibrator in which the vibrating section is constituted by two columnar beams, vibrating beam sections 471a and 471b. It can also be configured with a single beam.

6. Acceleration Detector Next, with reference to FIG. 18, the configuration of an acceleration detector 300 using the above-mentioned acceleration sensor element 400 will be described. Note that the acceleration detector 300 described here can be used as the acceleration sensors 30X, 30Y, and 30Z of the sensor unit 20 described above.

An acceleration sensor element 400 is housed in a package 310. More specifically, the acceleration sensor element 400 is housed in a space 311 formed by connecting the package base 320 and the lid 330.

The package base 320 has a recess 321, and the acceleration sensor element 400 is provided in the recess 321. The shape of the package base 320 is not particularly limited as long as the acceleration sensor element 400 can be provided within the recess 321. In this embodiment, the package base 320 is made of, for example, ceramics. However, materials such as crystal, glass, and silicon can be used without being limited thereto.

The package base 320 has a stepped portion 323 that protrudes toward the lid portion 330 from an inner bottom surface 322 that is the inner bottom surface of the recessed portion 321 of the package base 320 . The stepped portion 323 is provided along the inner wall of the recessed portion 321, for example. The stepped portion 323 is provided with a plurality of internal terminals 340b.

The internal terminal 340b faces the fixed part connection terminal 79b provided on each fixed part of the first support part 420, the second support part 430, the third support part 450, and the fourth support part 460 of the acceleration sensor element 400. It is provided at a position that overlaps the fixed part connecting terminal 79b in plan view. The internal terminal 340b is electrically connected to the fixed part connecting terminal 79b using, for example, a silicone resin-based conductive adhesive 343 containing a conductive substance such as a metal filler. In this way, acceleration sensor element 400 is mounted on package base 320 and housed within package 310.

On the outer bottom surface 324 of the package base 320, which is the surface opposite to the inner bottom surface 322, an external terminal 344 and a ground terminal 345, which are used when mounting on an external member, are provided. The external terminal 344 is electrically connected to the internal terminal 340b via internal wiring (not shown). The ground terminal 345 is electrically connected to the lid portion 330 via internal wiring (not shown).

The internal terminal 340b, the external terminal 344, and the ground terminal 345 are made of a metal film in which a film of nickel (Ni), gold (Au), or the like is laminated on a metallized layer of tungsten (W) or the like by a method such as plating. ing.

A sealing portion 350 for sealing a cavity inside the package 310 is provided at the bottom of the recess 321 in the package base 320 . The sealing part 350 is provided in a through hole 325 formed in the package base 320. The through hole 325 penetrates from the outer bottom surface 324 to the inner bottom surface 322. In the example shown in FIG. 18, the through hole 325 has a stepped shape in which the hole diameter on the outer bottom surface 324 side is larger than the hole diameter on the inner bottom surface 322 side. The sealing portion 350 is provided by placing a sealing material made of, for example, gold (Au) and germanium (Ge) alloy, solder, or the like in the through hole 325, heating and melting the material, and then solidifying the material. The sealing portion 350 is provided to airtightly seal the inside of the package 310.

The lid 330 is provided to cover the recess 321 of the package base 320. The shape of the lid portion 330 is, for example, a plate shape. The lid portion 330 is preferably made of a conductive material, and metals such as an alloy of iron (Fe) and nickel (Ni) and stainless steel can be used.

The lid portion 330 is electrically connected to a ground terminal 345 by wiring (not shown). Therefore, the lid part 330 is grounded and can absorb noise. As described above, the lid portions 330 of the acceleration sensors 30X and 30Y are arranged to face the side wall 231 of the container 220. As a result, noise from the side wall 231 is absorbed by the lid portion 330, so that noise propagation to the acceleration sensors 30X and 30Y is reduced. It is desirable that the lid portions 330 of the acceleration sensors 30X, 30Y are disposed so as to face the side wall 231 on the side having a smaller distance from the acceleration sensors 30X, 30Y. The lid 330 is joined to the package base 320 via a lid joining member 332. As the lid part joining member 332, for example, a seam ring, low melting point glass, inorganic adhesive, etc. can be used.

After the lid part 330 is joined to the package base 320, a sealing material is placed in the through hole 325 while the inside of the package 310 is under reduced pressure, for example, in a high degree of vacuum, and is heated and melted, then solidified and sealed. By providing the sealing portion 350, the inside of the package 310 can be hermetically sealed. The inside of the package 310 may be filled with an inert gas such as nitrogen, helium, or argon.

In the acceleration detector 300, when a drive signal is applied to the excitation electrode of the acceleration sensor element 400 via the external terminal 344, the internal terminal 340b, the fixed part connection terminal 79b, etc., the vibration beam part 471a of the acceleration sensor element 400, 471b vibrates at a predetermined frequency. In other words, it resonates. The acceleration detector 300 can output the resonant frequency of the acceleration sensor element 400, which changes depending on the applied acceleration, as an output signal.

7. Second Configuration Example of Sensor Unit FIGS. 19 and 20 show a second configuration example of the sensor unit 20. FIG. 19 is an exploded perspective view of the sensor unit 20, and FIG. 20 is a plan view of the sensor board 210. The sensor unit 20 in FIGS. 19 and 20 includes a sensor board 210 provided with at least one acceleration sensor and at least one angular velocity sensor as at least one inertial sensor, and a case 24 that houses the sensor board 210. 19 and 20, an acceleration sensor 32 that detects acceleration in the X-axis, Y-axis, and Z-axis directions is provided on the sensor substrate 210 as at least one acceleration sensor. Inside the acceleration sensor 32, a sensor element that detects acceleration in the X-axis direction and the Y-axis direction, and a sensor element that detects acceleration in the Z-axis direction are provided. These sensor elements are, for example, MEMS sensor elements. Note that the sensor board 210 may be provided with individual acceleration sensors for each of the X, Y, and Z axes, or may be provided with acceleration sensors for two axes, the X, Y, and Z axes, or for one axis. It is possible to implement a modification of In addition, in FIGS. 19 and 20, angular velocity sensors 34X, 34Y, and 34Z that detect angular velocity around the X axis, Y axis, and Z axis are provided as at least one angular velocity sensor. The angular velocity sensors 34X, 34Y, and 34Z are mounted on the sensor substrate 210 so that their main surfaces are perpendicular to the X, Y, and Z axes, respectively. The angular velocity sensors 34X, 34Y, and 34Z are gyro sensors that detect angular velocity using, for example, crystal oscillators. By providing not only the acceleration sensor but also the angular velocity sensor on the sensor board 210 in this way, it becomes possible to detect not only vibrations but also the inclination and posture change of the object. In FIGS. 19 and 20, three angular velocity sensors 34X, 34Y, and 34Z are provided on the sensor board 210 for three-axis angular velocity detection, but one angular velocity sensor for one-axis angular velocity detection is provided on the sensor board 210. Various modifications are possible, such as providing two angular velocity sensors for biaxial angular velocity detection on the sensor substrate 210.

Further, as shown in FIG. 20, a connector 26 constituted by a plurality of connector terminals is provided on the first surface, which is the main surface, of the sensor substrate 210 on which the acceleration sensor 32 and the like are provided. As described in FIG. 13, the connector 26 of this sensor unit 20 is connected to the connector 46 on the back surface of the substrate 40 of the inertial measurement device 10. Further, on the second surface, which is the back surface of the sensor substrate 210, a processing section (not shown) implemented by an ASIC, a microcomputer, or the like is provided. For example, part or all of the processing performed by the processing section 50 of the inertial measurement device 10 may be performed by the processing section of the sensor unit 20.

The case 24 is made of a conductive material such as metal, and includes a container 220 and a lid 222. The sensor substrate 210 is then accommodated in the accommodation space formed by the container 220 and the lid 222, and the container 220 and the lid 222 are fixed and sealed with a fixing member such as a screw. Note that a sealing member 224 serving as a cushioning material is provided between the lid portion 222 and the sensor substrate 210.

As described above, the inertial measurement device of the present embodiment includes a sensor unit having at least one inertial sensor, and at least one of a processing section that performs processing based on detection information of the inertial sensor, and a display section that performs display based on the detection information. The sensor unit includes a substrate provided thereon, and at least one fixing member that detachably fixes the sensor unit and the substrate.

According to this embodiment, processing based on the detection state of the inertial sensor of the sensor unit is executed by the processing section provided on the board, or a display based on the detection information is performed by the display section provided on the board. becomes possible. Since the sensor unit and the board are removably fixed by at least one fixing member, it is possible to change the sensor unit and the board to be incorporated into the inertial measurement device, and the expandability of the inertial measurement device can be improved. Furthermore, since the sensor unit and the substrate are fixed by at least one fixing member, deterioration in measurement accuracy can also be suppressed. Therefore, it is possible to provide an inertial measurement device that can improve expandability while suppressing deterioration in measurement accuracy.

Further, in this embodiment, at least one fixing member includes a plurality of columnar members, and the plurality of columnar members fit into the plurality of holes provided in the substrate and the plurality of holes provided in the sensor unit. The sensor unit and the substrate may be removably fixed.

In this way, various combinations of the sensor unit and the board can be freely attached and removed, and the sensor unit and the board can be fixed in a removable manner.

Further, in this embodiment, the plurality of columnar members may be screw members.

In this way, it becomes possible to fix the sensor unit and the board with a screw using a screw member, so that the sensor unit and the board can be stably fixed.

Further, the present embodiment may include a base for attaching the inertial measurement device to the mounting surface, the sensor unit may be provided between the base and the substrate, and the base may be fixed to the sensor unit by at least one fixing member. good.

In this way, since the sensor unit is fixed by the fixing member so as to be sandwiched between the substrate and the base, a situation such as deterioration of detection accuracy of the inertial sensor can be suppressed.

Further, in this embodiment, the base may have a fixing part that is a magnet on the surface on the attachment surface side.

In this way, the fixing part is attracted to the mounting surface by the magnetic force of the magnet, so the user's mounting work becomes easier and work efficiency can be improved.

Further, in this embodiment, the base may have a recessed portion on the surface on the attachment surface side.

In this way, for example, when the inertial measurement device is attached to a mounting surface with double-sided tape, the work of peeling off the double-sided tape can be facilitated.

Further, in this embodiment, the substrate may be provided with a wireless communication section that wirelessly transmits information based on information detected by the inertial sensor.

In this way, information based on the detection information of the inertial sensor can be wirelessly transmitted to the outside, so that convenience can be improved.

Further, in this embodiment, the board may be provided with an interface section for communicating with the outside by wire.

In this way, it becomes possible to communicate with the outside through the interface section, and it becomes possible to meet various requests from users regarding the communication interface.

In addition, in this embodiment, the board includes a mode changeover switch for switching modes of the inertial measurement device, a reset switch for resetting the inertial measurement device, and a measurement start switch for starting measurement of the inertial measurement device. At least one of these may be provided.

If such various switches are provided, the inertial measurement device will be able to perform various operations when the user operates these switches, making it possible to simplify and improve the efficiency of measurement work.

Further, in this embodiment, a protection plate may be included, and the substrate may be provided between the sensor unit and the protection plate.

In this way, it is possible to realize the dustproof function of the protection plate, or to prevent undesirable impact from being applied to components on the board.

Further, in this embodiment, the substrates may include a first substrate and a second substrate, and the first substrate may be provided with a processing section, and the second substrate may be provided with a display section having a display panel.

In this way, for example, the processing based on the detection information of the inertial sensor of the sensor unit is executed by the processing section provided on the first substrate, and the information of the processing result is displayed on the display section provided on the second substrate. It can now be displayed on the display panel.

Further, the present embodiment includes a first protection plate and a second protection plate, the first substrate is provided between the sensor unit and the first protection plate, and the second substrate is provided between the first protection plate and the second protection plate. It may be provided between the second protection plate and the second protection plate.

In this way, the first protection plate can protect the components provided on the first substrate, and the second protection plate can protect the components provided on the second substrate.

Further, in this embodiment, the first substrate may be provided with a display section having a group of light emitting elements.

In this way, information based on the detection information of the inertial sensor of the sensor unit can be displayed by the display operation using light emission from the light emitting elements of the light emitting element group.

Further, in this embodiment, the sensor unit has a sensor-side connector on the surface facing the board, the board has a board-side connector on the surface facing the sensor unit, and the sensor unit and the board are connected to the fixing member. In the fixed state, the connector on the sensor side and the connector on the board side may be electrically connected.

In this way, in a state where the sensor unit and the board are fixed by the fixing member, the connector on the sensor side and the connector on the board are connected, and the detection information of the inertial sensor of the sensor unit is transferred to the connector on the sensor side and the connector on the board side. It becomes possible to transmit the information to the board via the connector on the board side.

Further, in the present embodiment, the sensor unit may include a sensor board provided with at least one acceleration sensor as the at least one inertial sensor, and a case housing the sensor board.

In this way, the sensor unit including the sensor board on which the acceleration sensor is provided and the case, and the board on which at least one of the processing section and the display section is provided can be removably fixed using the fixing member.

Further, in this embodiment, the sensor unit may include a sensor board on which at least one acceleration sensor and at least one angular velocity sensor are provided as at least one inertial sensor, and a case that accommodates the sensor board.

In this way, the sensor unit having the sensor board and the case on which the acceleration sensor and the angular velocity sensor are provided, and the board on which at least one of the processing section and the display section is provided can be removably fixed using the fixing member. become.

Further, in this embodiment, the case has a side wall, the acceleration sensor includes an acceleration sensor element, a base part and a lid part, and a package that houses the acceleration sensor element, and the lid part is made of a conductive material. and may be grounded, and may be arranged such that the lid portion and the side wall face each other.

In this way, noise from the side wall is absorbed by the lid, so that noise propagation to the acceleration sensor is reduced.

Although the present embodiment has been described in detail as above, those skilled in the art will easily understand that many modifications can be made without substantively departing from the novelty and effects of the present disclosure. Therefore, all such modifications are intended to be included within the scope of the present disclosure. For example, a term that appears at least once in the specification or drawings together with a different term with a broader or synonymous meaning may be replaced by that different term anywhere in the specification or drawings. Furthermore, all combinations of this embodiment and modifications are also included within the scope of the present disclosure. Further, the configuration, operation, etc. of the inertial measurement device are not limited to those described in this embodiment, and various modifications are possible.

2... Mounting surface, 10... Inertial measurement device, 11, 12, 13... Fixing member,
14, 15, 16, 17, 18, 19...Spacer, 20...Sensor unit,
21, 22, 23...hole, 24...case, 26...connector,
30X, 30Y, 30Z...acceleration sensor, 32...acceleration sensor,
34X, 34Y, 34Z... Angular velocity sensor, 40... Board,
41, 42, 43... Hole part, 44... Support part, 46... Connector, 48... Board,
50... Processing section, 60... Display section, 62, 64... Light emitting element group, 70... Display section,
72... Display panel, 80... Mode changeover switch, 82... Reset switch,
84...Measurement start switch, 81, 83, 85...Movable part, 86...Slide switch,
90... Wireless communication section, 92... Antenna section, 94... Communication board,
100, 101...interface unit, 102, 103, 104...memory,
106...Power supply interface, 150...Base, 151, 152, 153...Hole part,
154... recessed part, 156, 157... fixed part, 160... protective plate,
161, 162, 163... Hole portion, 164... Slit hole, 170... Protective plate,
171, 172, 173...hole part, 174, 175, 176...window part,
210... Sensor board, 212... Processing section, 220... Container, 222... Lid section,
224... Seal member, 231... Side wall 232... Bottom wall, 300... Acceleration detector,
310... Package, 311... Space, 320... Package base, 321... Recessed part,
322... Inner bottom surface, 323... Step part, 324... Outer bottom surface, 325... Through hole, 330... Lid part,
332... Lid part joining member, 340b... Internal terminal, 343... Conductive adhesive,
344...External terminal, 345...Ground terminal, 350...Sealing part,
400... Acceleration sensor element, 401... Substrate structure, 410... Base, 412... Joint part,
414...Movable part, 414a, 414b...Main surface, 420...First support part,
430... second support part, 440... connection part, 450... third support part, 460... fourth support part,
470... Acceleration detection element, 471a, 471b... Vibration beam part, 472a... First base,
472b...second base, 480, 482...mass parts DR1, DR2, DR3, DR4, DR5, DR6...direction,
SD1, SD2, SD3, SD4...side

Claims (16)

a sensor unit having at least one inertial sensor;
a substrate provided with at least one of a processing section that performs processing based on information detected by the inertial sensor and a display section that performs display based on the detected information;
at least one fixing member that detachably fixes the sensor unit and the substrate;
including;
The board is provided with at least one of a mode changeover switch for switching modes of the inertial measurement device, a reset switch for resetting the inertial measurement device, and a measurement start switch for starting measurement of the inertial measurement device. An inertial measurement device characterized by : a sensor unit having at least one inertial sensor;
a substrate provided with at least one of a processing section that performs processing based on information detected by the inertial sensor and a display section that performs display based on the detected information;
at least one fixing member that detachably fixes the sensor unit and the substrate;
a protection plate,
including;
The inertial measurement device is characterized in that the substrate is provided between the sensor unit and the protection plate . a sensor unit having at least one inertial sensor;
a substrate provided with at least one of a processing section that performs processing based on information detected by the inertial sensor and a display section that performs display based on the detected information;
at least one fixing member that detachably fixes the sensor unit and the substrate;
including;
The substrate includes a first substrate and a second substrate,
The first substrate is provided with the processing section,
An inertial measurement device characterized in that the second substrate is provided with the display section having a display panel . The inertial measurement device according to claim 3 ,
a first protection plate;
a second protection plate;
including;
the first substrate is provided between the sensor unit and the first protection plate,
The inertial measurement device is characterized in that the second substrate is provided between the first protection plate and the second protection plate. The inertial measurement device according to claim 3 or 4 ,
An inertial measurement device characterized in that the first substrate is provided with the display section having a group of light emitting elements. The inertial measurement device according to any one of claims 1 to 5 ,
At least one of the fixing members includes a plurality of columnar members,
The sensor unit and the substrate are removably fixed by fitting the plurality of columnar members into the plurality of holes provided in the substrate and the plurality of holes provided in the sensor unit. An inertial measurement device featuring: The inertial measurement device according to claim 6 ,
An inertial measurement device characterized in that the plurality of columnar members are screw members. The inertial measurement device according to any one of claims 1 to 7 ,
includes a base for attaching the inertial measurement device to the mounting surface;
The sensor unit is provided between the base and the substrate,
The inertial measurement device, wherein the base is fixed to the sensor unit by at least one of the fixing members. The inertial measurement device according to claim 8 ,
The inertial measurement device is characterized in that the base has a fixed part that is a magnet on a surface on the mounting surface side. The inertial measurement device according to claim 8 or 9 ,
The inertial measurement device is characterized in that the base has a recessed portion on a surface on the mounting surface side. The inertial measurement device according to any one of claims 1 to 10 ,
The inertial measurement device is characterized in that the substrate is provided with a wireless communication unit that wirelessly transmits information based on the detection information of the inertial sensor. The inertial measurement device according to any one of claims 1 to 11 ,
An inertial measurement device characterized in that the substrate is provided with an interface section for communicating with the outside by wire. The inertial measurement device according to any one of claims 1 to 12 ,
The sensor unit has a sensor-side connector on a surface facing the substrate,
The board has a board-side connector on a surface facing the sensor unit,
An inertial measurement device characterized in that, in a state where the sensor unit and the substrate are fixed by the fixing member, the connector on the sensor side and the connector on the substrate side are electrically connected. The inertial measurement device according to any one of claims 1 to 13 ,
The sensor unit is
a sensor substrate provided with at least one acceleration sensor as the at least one inertial sensor;
a case that accommodates the sensor board;
An inertial measurement device comprising: The inertial measurement device according to any one of claims 1 to 13 ,
The sensor unit is
a sensor substrate provided with at least one acceleration sensor and at least one angular velocity sensor as the at least one inertial sensor;
a case that accommodates the sensor board;
An inertial measurement device comprising: The inertial measurement device according to claim 14 or 15 ,
The case has a side wall,
The acceleration sensor is
an acceleration sensor element,
A package having a base part and a lid part and accommodating the acceleration sensor element;
including;
The lid part is made of a conductive material and is grounded,
An inertial measurement device characterized in that the lid portion and the side wall are arranged to face each other.

Images