JP7399448B2 - device - Google Patents

Description

The present invention relates to equipment for indoor use.

There are various types of equipment used indoors. For example, Patent Document 1 discloses a developing device (equipment) as a semiconductor manufacturing device used in a clean room (indoor). The developing device used in this clean room has a structure in which a developing unit, a heating unit, etc. are housed in a housing. A fan filter unit is provided on the top surface of the casing, and clean air from the clean room is taken into the casing by the fan filter unit. The casing is connected to exhaust equipment (exhaust path) installed in the clean room, and the air inside the casing in which the developing unit and heating unit operate is exhausted to the exhaust equipment. As a result, in a developing device installed in a clean room, operating parts such as a developing unit and a heating unit are operated to perform a developing process on a semiconductor substrate (wafer) within a casing that is a clean space.

Japanese Patent Application Publication No. 2002-22228

The above-mentioned developing device (equipment) can only be used in a clean room with exhaust equipment (exhaust path). Furthermore, since the air supplied from the clean room is exhausted from the casing to the outside of the clean room through exhaust equipment, clean air must be supplied into the clean room to compensate for the exhaust air.

As described above, the above-mentioned developing device (equipment) cannot be used in a clean room that is not equipped with exhaust equipment and equipment for supplying air commensurate with the exhaust. Therefore, such equipment is not easy to use in a clean room, and is not necessarily suitable for use in a clean room.

The present invention has been made in view of these circumstances, and aims to provide a device that is more suitable for indoor use.

A device according to the present invention is a device that takes in air containing fine particles from an input port and sends out clean air from an output port, the first wall having an intake port and the second wall having an exhaust port. a housing surrounded by a plurality of walls including two walls; an input filter provided within the housing for purifying the air from the input port; and an input filter provided within the housing that generates heat. a blower machine that operates to take in and send out air that passes through the input filter; an output filter that is provided within the housing and takes in air sent out from the blower machine, purifies it, and supplies it to the output port; The configuration includes a filter provided on the second wall so as to cover the exhaust port, and an exhaust fan that exhausts air inside the housing from the exhaust port through the filter.

With this configuration, when the exhaust fan operates while the device is installed indoors, the air inside the case is exhausted from the exhaust port through the filter and outside the case, and the air inside the case is exhausted from the intake port into the room. air is drawn in. Air is drawn in through the intake port and air is discharged through the exhaust port to create an airflow within the housing, and the blower , which operates with heat, is exposed to the airflow and cooled (air-cooled). Furthermore, since the air inside the housing is exhausted to the outside through the filter at the exhaust port, particulates such as dust are captured by the filter and are prevented from diffusing into the room from the housing.

Furthermore, when fine particles such as dust that exist indoors are drawn into the housing along with the air from the intake port, they are captured by the filter provided at the exhaust port and are prevented from dispersing from the exhaust port. As a result, the air near the device indoors can be purified.

In the device according to the present invention, the first wall portion and the second wall portion may be arranged to face each other across the blower machine in the housing.

This configuration ensures that the air drawn in from the intake port on the first wall passes through the blower and is discharged from the exhaust port on the second wall, so that the airflow flowing from the intake port toward the exhaust port is reduced. This allows the blower to be reliably cooled, and allows fine particles such as dust generated by the operation of the blower to be captured by the filter without remaining in the housing for a long time.

In the device according to the present invention, the filter and the exhaust fan may be integrated as a fan filter unit.

With this configuration, the filter and exhaust fan can be easily attached to the exhaust port formed in the second wall of the housing.

The device according to the present invention includes: a state detection means for detecting a physical quantity representing a state inside the casing; and a fan control means for controlling the operation of the exhaust fan based on the physical quantity detected by the state detection means. It is possible to have a configuration having the following.

With such a configuration, the operation of the exhaust fan is controlled according to the state inside the housing. As a result, the air cooling of the blower in the equipment, the prevention of the dispersion of fine particles that may be generated by the operation of the blower inside the housing to the outside, and the purification of the air near the equipment in the room are performed according to the conditions inside the housing. It can be carried out.

In the device according to the present invention, the state detection means includes a temperature detection means for detecting a temperature value inside the casing as a physical quantity representing the state inside the casing, and the fan control means detects the temperature value detected by the temperature detection means. The exhaust fan may be configured to include temperature-dependent fan control means for controlling the operation of the exhaust fan based on the temperature value.

With this configuration, the air cooling of the blower in the equipment, the prevention of the diffusion of fine particles that may be generated by the operation of the blower inside the housing to the outside, and the purification of the air near the equipment in the room can be achieved by controlling the temperature inside the housing. This can be done depending on the situation.

In the device according to the present invention, the temperature-dependent fan control means controls the operation of the exhaust fan in a first temperature mode when the detected temperature value is larger than a first predetermined value, and temperature mode variable control means for controlling the operation of the exhaust fan in a second temperature mode, which operates weaker than the operation in the first temperature mode, when the value is smaller than a second predetermined value that is equal to or less than the first predetermined value; , can be configured.

With this configuration, when the detected temperature value inside the housing is larger than the first predetermined value and the temperature inside the housing is relatively high, the exhaust fan is operated in the first temperature mode to remove fine particles inside the housing. In addition to diffusing the air to the outside and purifying the air near the device indoors, the blower can actively cool the air. On the other hand, if the detected temperature value inside the housing is smaller than the second predetermined value and the temperature inside the housing is relatively low, the exhaust fan operates in a second temperature mode, which is weaker than the first temperature mode. When the blower is operated, the air cooling of the blower can be performed relatively weakly while the diffusion of fine particles inside the housing to the outside and the cleaning of the air near the device in the room are relatively weakly performed.

The operation control of the exhaust fan in the second temperature mode is not particularly limited as long as it is weaker than the operation of the exhaust fan in the first temperature mode, and includes control to stop the exhaust fan (stop operation). obtain.

In the device according to the present invention, the state detection means includes an air cleanliness detection means for detecting the cleanliness of the air inside the housing as a physical quantity representing the state inside the housing, and the fan control means includes a The configuration includes air cleanliness dependent fan control means for controlling the exhaust fan based on the air cleanliness detected by the air cleanliness detection means.

This configuration allows air cooling of the blower in the equipment, improves the cleanliness of the air inside the housing while preventing the diffusion of fine particles that may be generated by the operation of the blower inside the housing to the outside, and improves the cleanliness of the air inside the housing. The air in the vicinity can be cleaned according to the cleanliness of the air inside the housing.

In the device according to the present invention, the air cleanliness dependent fan control means controls the operation of the exhaust fan in a first cleanliness mode when the detected cleanliness is lower than a first predetermined cleanliness; When the detected cleanliness is higher than a second predetermined cleanliness that is equal to or higher than the first predetermined cleanliness, the operation of the exhaust fan is controlled in a second cleanliness mode that is weaker than the operation in the first cleanliness mode. The configuration may include mode variable control means.

According to such a configuration, when the detected cleanliness of the air inside the housing is lower than the first predetermined cleanliness and the cleanliness of the air inside the housing is relatively low, the exhaust fan is activated in the first cleanliness mode. In addition to cooling the air of the blower , it also improves the cleanliness of the air inside the housing while preventing the dispersion of fine particles that may be generated by the operation of the blower to the outside, and improves the cleanliness of the air near the equipment indoors. Cleaning can be actively carried out. On the other hand, if the detected cleanliness of the air inside the housing is higher than the second cleanliness and the cleanliness of the air inside the housing is relatively high, the exhaust fan operates weaker than in the first cleanliness mode. Operated in the second cleanliness mode, the blower cools the air relatively weakly, improves the cleanliness of the air inside the housing and prevents fine particles inside the housing from dispersing to the outside, and improves the cleanliness of the air inside the housing. Cleaning of the nearby air can be relatively weak.

According to the device according to the present invention, fine particles such as dust are discharged from the casing into the room by the device alone, without being connected to an exhaust facility installed indoors, along with the air cooling of the blower inside the casing. Since it is possible to purify the indoor air while preventing air pollution, it can be made more suitable for indoor use.

FIG. 1 is a side view schematically showing a device according to a first embodiment of the present invention. FIG. 2 is a side view schematically showing a device according to a second embodiment of the invention. FIG. 3 is a timing chart showing the operation of the device shown in FIG. FIG. 4 is a timing chart showing the operation of a modified example of the device shown in FIG.

Embodiments of the present invention will be described below based on the drawings.

The device according to the first embodiment of the present invention is a blower device used in the manufacturing process of semiconductors, display panels, battery materials, etc. in a clean room (indoors), and is configured as shown in FIG. Ru.

In FIG. 1, a blower device 100 is installed inside a clean room 200 (indoor). This blower device 100 sends clean air (air) to a cleaning head (not shown; see, for example, Japanese Unexamined Patent Publication No. 2014-30806) for removing dust from the panel surface, and removes dust from the substrate surface by the cleaning head. This is a device that collects air containing fine particles such as dust.

This blower device 100 (equipment) has a box-shaped housing 10 surrounded by a plurality of walls including two opposing walls 11a and 11b. This housing 10 houses a blower machine 20 (including an electric motor) as an operating part that operates with heat generation. Further, within the housing 10, an output filter 21 (HEPA filter) and an input filter 22 (prefilter) are provided. An air supply pipe 23 extends from the blower machine 20, and this air supply pipe 23 is connected to the output filter 21. Further, an introduction pipe 24 extending from an input filter 22 is connected to the blower machine 20 . Output filter 21 is connected to a cleaning head (not shown) via output port 12, and input filter 22 is connected to the cleaning head via input port 13.

In the blower device 100 having such a structure, the air pressure-fed from the blower machine 20 is purified from the air supply pipe 23 through the output filter 21, and the purified air is sent from the output port 12 to the cleaning head (not shown). ). Further, air containing fine particles such as dust from the cleaning head is taken into the input filter 22 from the input port 13 and cleaned, and the purified air is returned to the blower machine 20 through the introduction pipe 24. . In this way, air is circulated between the blower device 100 (blower machine 20) and the cleaning head while the air is purified by the output filter 21 and the input filter 22.

Furthermore, among the walls 11a and 11b arranged oppositely with the blower machine 20 in between in the housing 10, an intake port 14a is formed in one wall 11a, and an exhaust port 14b is formed in the other wall 11b. is formed. A fan filter unit (FFU) 25, which is a combination of a filter and an exhaust fan, is provided at the exhaust port 14b so as to cover the exhaust port 14b.

In the blower device 100 having the above-described structure, when the exhaust fan of the fan filter unit (FFU) 25 operates while the blower machine 20 is operating, the air inside the housing 10 passes through the filter of the fan filter unit 25. Air inside the clean room 200 (indoor room) is exhausted from the exhaust port 14b to the outside of the casing 10, and is drawn into the casing 10 from the intake port 14a. As a result of this intake of air through the intake port 14a and exhaust of air through the exhaust port 14b, an airflow AF (see thick broken line arrow in FIG. 1) is generated within the housing 10 passing through the blower machine 20, which is an operating section. The blower machine 20, which operates with heat generation, is exposed to the airflow AF and is cooled (air-cooled). Furthermore, even if dust is generated due to the operation of the blower 20, the air inside the housing 10 is exhausted outside through the fan filter unit 25 (filter) of the exhaust port 14b, so fine particles such as dust are removed from the fan filter. It is prevented from being captured by the unit 25 (filter) and spreading from the housing 10 into the clean room 200. Note that even if the exhaust fan of the fan filter unit 25 itself generates dust, the fine particles will be captured by the filter of the fan filter unit 25 and will not diffuse into the clean room 200 from the casing 10.

Furthermore, even if fine particles such as dust exist in the clean room 200, when the fine particles are drawn into the housing 10 along with the air from the intake port 14a, the fine particles are removed from the fan filter unit 25 (filter) provided at the exhaust port 14b. ) from being captured and returned to the clean room 200. As a result, the air near the blower device 100 (casing 10) in the clean room 200 can be purified.

According to the blower device 100 (equipment) as described above, the blower device 100 alone can cool the blower machine 20 inside the housing 10 without being coupled to exhaust equipment provided in the clean room 200 (indoors). While preventing the diffusion of fine particles into the clean room 200 due to dust generated by the operation of the blower 20, it is also possible to purify the air in the vicinity of the device 100 in the clean room 200. Further, since the blower device 100 is not connected to the exhaust equipment of the clean room 200 to exhaust air, there is no need to supply clean air to the clean room 200 to compensate for the exhaust air.

Further, in the housing 10, a wall portion 11a in which an intake port 14a is formed and a wall portion 11b in which an exhaust port 14b is formed are arranged to face each other with the blower machine 20, which is an operating portion, in between. Therefore, the blower machine 20 is efficiently cooled by the airflow AF flowing from the intake port 14a toward the exhaust port 14b generated by the operation of the fan filter unit 25 provided at the exhaust port 14b, and the blower machine 20 is efficiently cooled by the operation of the blower machine 20. The generated fine particles such as dust can be captured by the filter of the fan filter unit 25 without staying in the housing 10 for a long time.

Therefore, the blower device 100 (equipment) described above becomes more suitable for use within the clean room 200 (indoors).

Note that the intake port 14a and the exhaust port 14b are formed on the opposing walls 11a and 11b of the casing 10, but are not limited thereto, and may be formed on other walls constituting the casing 10. You can.

Further, the exhaust port 14b is provided with a fan filter unit 25 in which an exhaust fan and a filter are integrated; however, the present invention is not limited to this, and separate exhaust fans and filters may be provided in the exhaust port 14b. Good too. However, the fan filter unit 25 is preferable because the exhaust fan and filter can be easily attached to the exhaust port 14b.

Next, a second embodiment of the present invention will be described.

The device according to the second embodiment of the present invention is a blower device, and is configured as shown in FIG. 2, as in the case of the first embodiment described above. This blower device differs from the above-described blower device in that the fan filter unit 25 is controlled according to the state inside the casing 10, specifically, according to the temperature inside the casing 10. Note that everything other than the differences is the same as that of the first embodiment described above, and the following description will focus on the differences, and the common points will be omitted as appropriate. Moreover, in FIG. 2, the same names and the same symbols are used for elements common to the first embodiment (see FIG. 1).

In FIG. 2, a temperature sensor 26 (temperature detection means: state detection means) that outputs a temperature detection signal according to the temperature value inside the case 10 is provided inside the case 10. The blower device 100 includes a control section 30 (temperature-dependent fan control means) that controls the operation of the fan filter unit 25 (exhaust fan) based on a temperature detection signal from the temperature sensor 26.

This blower device 100 operates as shown in the timing chart of FIG. 3, for example.

When the blower machine 20 starts operating at time t0, air is purified between the blower machine 20 (blower device 100) and the cleaning head (not shown) in the clean room 200, as described above. That air circulates. The control unit 30 maintains the state in which the fan filter unit 25 (exhaust fan) does not operate (second temperature mode described later) even after the blower machine 20 starts operating (time t0). Then, the blower machine 20 operates while generating heat, and the detected temperature value represented by the temperature detection signal from the temperature sensor 26 gradually increases and exceeds the first temperature threshold Th1 (first predetermined value) at time t1. Then, the control unit 30 operates the fan filter unit 25 (exhaust fan) at a predetermined intensity (first temperature mode). The blower machine 20 is cooled (air-cooled) by the airflow AF generated within the housing 10 by the operation of the fan filter unit 25 (exhaust fan). In addition, at this time, the fan filter unit 25 (filter) prevents fine particles caused by dust generation from the blower machine 20 from diffusing into the clean room 200, and The air will be purified.

As described above, in addition to cooling the blower device 20, it is also possible to prevent the diffusion of fine particles that may be generated by the operation of the blower device 20 inside the housing 10 to the outside, and to purify the air near the blower device 100 in the clean room 200. The blower machine 20 continues to operate while the temperature is maintained (first temperature mode). Then, the detected temperature value (corresponding to the temperature detection signal) that had been rising turns to fall due to the air cooling, and thereafter, the detected temperature value, that is, the temperature value inside the casing 100 becomes lower than the first temperature threshold Th1. maintained.

Then, when the operation of the blower machine 20 is stopped at time t2 with the completion of the operation of the cleaning head (not shown) in the clean room 200, the heat generation of the blower machine 20 is stopped, while the fan filter unit 25 (exhaust gas) is stopped. air cooling is maintained by a fan). Therefore, the detected temperature value further decreases. Then, when the detected temperature value falls below a second temperature threshold Th2 (second predetermined value) that is smaller than the first temperature threshold Th1 at time t3, the control unit 30 stops the fan filter unit 25 (exhaust fan). and maintain the stopped state of the fan filter unit 25 (exhaust fan) (second temperature mode).

Thereafter, similarly, in a situation where the blower machine 20 repeatedly operates and stops within the housing 10, the control unit 30 controls the operation of the fan filter unit 25 (exhaust fan) according to the detected temperature value inside the housing 10. The operation in the first temperature mode and the operation (stopping operation) in the second temperature mode are repeated (temperature mode variable control means).

According to the blower device 100 as described above, when the detected temperature value (detected temperature value) inside the housing 10 is larger than the first temperature threshold Th1 and the temperature inside the housing 10 is relatively high (see FIG. 3 between t1 and t3), that is, when it can be assumed that the amount of heat generated by the operation of the blower 20 is relatively large (including the afterglow after the blower is stopped), the exhaust fan of the fan filter unit 25 reaches the first temperature. operated in mode. This prevents the fine particles inside the casing 10 from diffusing to the outside, cleans the air near the blower device 100 in the clean room 200, and actively cools the blower device 20. On the other hand, if the detected temperature value inside the casing 10 (detected temperature value) is smaller than the second temperature threshold Th2 (<Th1) and the temperature inside the casing 10 is relatively low (time t3 in FIG. (and before time t1), that is, when it is assumed that the amount of heat generated by the operation of the blower machine 20 is relatively small (or absent), the exhaust fan of the fan filter unit 25 is stopped. As a result, the capture of fine particles in the casing 10 by the fan filter unit 25 (filter) and the purification of the air near the blower device 100 in the clean room 200 are stopped, and the air cooling of the blower device 20 is stopped.

As a result, the blower device 100 (equipment) described above is more suitable for use within the clean room 200, as in the case of the first embodiment described above, and in particular, the temperature inside the housing 10 is reduced. In a situation where the air pressure is relatively low, the exhaust fan of the fan filter unit 25 is stopped, so it is possible to prevent wasted power consumption.

Note that in the blower device 100 described above, the first temperature mode operates the exhaust fan of the fan filter unit 25 according to the detected temperature value using the first temperature threshold Th1 and the second temperature threshold Th2, and the first temperature mode operates the exhaust fan of the fan filter unit 25 and the exhaust Although control is performed in the second temperature mode in which the fan is not operated, the present invention is not limited thereto. Depending on the detected temperature value, the exhaust fan of the fan filter unit 25 may be controlled in other ways, such as two-step control of strong and weak without stopping, or operation intensity control in two or more steps. good. In addition, the two-step operation intensity control of the exhaust fan of the fan filter unit 25 is performed using a single temperature threshold Th, instead of using two thresholds, the first temperature threshold Th1 and the second temperature threshold Th2, as described above. It can also be done using

Next, a modification of the device according to the second embodiment of the present invention described above will be described.

In this modification, in the blower device 100 shown in FIG. A particle sensor sensor 27 (air cleanliness detection means: state detection means) is provided which outputs a cleanliness detection signal in accordance with the following: If there are many fine particles, the cleanliness is low, and if there are few fine particles, the cleanliness is high. Then, the control unit 30 controls the operation of the fan filter unit 25 (exhaust fan) based on the cleanliness detection signal from the particle sensor 27 (air cleanliness dependent fan control means).

Note that everything other than the above-mentioned particle sensor 27 and the control by the control unit 30 based on the detected cleanliness signal (differences) is the same as that of the above-mentioned second embodiment (first embodiment). The explanation will focus on the differences, and the common points will be omitted as appropriate. Moreover, in FIG. 2, the same names and the same symbols are used for elements common to the first embodiment (see FIG. 1).

This blower device 100 operates as shown in the timing chart of FIG. 4, for example.

When the blower machine 20 starts operating at time t0, air is purified between the blower machine 20 (blower device 100) and the cleaning head (not shown) in the clean room 200, as described above. That air circulates. The control unit 30 maintains the state in which the fan filter unit 25 (exhaust fan) does not operate even after the blower machine 20 starts operating (time t0). For example, due to dust generated due to the operation of the blower 20, the detected air cleanliness represented by the cleanliness detection signal from the particle sensor 27 gradually decreases (the air becomes contaminated), and at time t1, the cleanliness level is reduced. When the level becomes lower than the first threshold Th1 (first predetermined cleanliness), the control unit 30 operates the fan filter unit 25 (exhaust fan) at a predetermined intensity (first cleanliness mode). Due to the operation of the fan filter unit 25 (exhaust fan), the blower machine 20 is actively air-cooled (blower machine air-cooled strongly), and fine particles such as dust in the housing 10 are actively removed from the fan filter unit 25. The cleanliness of the air inside the casing 10 is improved while preventing fine particles from spreading outside the casing 10, and furthermore, the air near the blower device 100 is actively purified. (Strong cleaning)

As described above, the cleanliness of the air within the housing 10 is gradually improved, and the detected air cleanliness represented by the cleanliness detection signal from the particle sensor 27 is greater than the first cleanliness threshold Th1 at time t2. When the cleanliness becomes higher than the second cleanliness threshold Th2, the control unit 30 operates the fan filter unit 25 (exhaust fan) in the second cleanliness mode, which is weaker than the first cleanliness mode. By operating the fan filter unit 25 (exhaust fan) in this second cleanliness mode, the air cooling of the blower machine 20 is performed relatively weakly (blower machine air cooling is weak), and the fine particles in the casing 10 are diffused to the outside. The cleanliness of the air inside the housing 10 is improved and the area around the blower device 100 in the clean room 200 (indoor) is relatively weakly cleaned (weak cleaning) while preventing this.

Then, by the operation of the fan filter unit 25 (exhaust fan) as described above, a relatively high state of air cleanliness is maintained where the detected air cleanliness within the housing 10 is higher than the second cleanliness threshold Th2. In this situation, when the blower machine 20 is stopped at time t3, the fan filter unit 25 (exhaust fan) is stopped at time t4, which is a predetermined time after the time t3. Thereafter, every time the blower machine 20 operates, the control unit 30 switches the mode to the first cleanliness mode or the second cleanliness mode as described above based on the cleanliness detection signal (detected air cleanliness) from the particle sensor 27. to control the operation of the fan filter unit 25 (exhaust fan) (cleanliness mode variable control means).

According to the blower device 100 as described above, when the blower machine 20 is operating, the detected cleanliness of the air in the housing 10 (detected air cleanliness) is lower than the first cleanliness threshold Th1, When the cleanliness inside the housing 10 is relatively low (the degree of air pollution is high) (between times t1 and t2 in FIG. 4), the amount of dust generated by the operation of the blower 20 is relatively large. If envisaged, the exhaust fan of the fan filter unit 25 is operated in the first cleaning mode. As a result, the blower 20 is actively cooled, and the cleanliness of the air inside the housing 10 is improved while preventing fine particles inside the housing 10 from diffusing to the outside, and the blower inside the clean room 200 is The air near the device 100 is actively purified.

On the other hand, if the detected cleanliness of the air inside the housing 10 is larger than the second cleanliness threshold Th2 (>Th1) and the cleanliness of the air inside the housing 10 is relatively high (time t2 in FIG. to time t4), that is, the effect of the fan filter unit 25 (exhaust fan, filter) operating in the first cleanliness mode is evident, and the amount of dust generated by the operation of the blower 20 is reduced. If the cleanliness is assumed to be improved, etc., the exhaust fan of the fan filter unit 25 is operated in the second cleanliness mode. As a result, air cooling of the blower device 20 is performed relatively weakly, and the cleanliness of the air inside the housing 10 is improved while preventing fine particles inside the housing 10 from diffusing to the outside, and the blower device 100 in the clean room 200 is Cleaning of the nearby air is relatively weak and continuous.

Although it was assumed that the cleanliness inside the casing 10 would decrease due to dust generated due to the operation of the blower 20, it is assumed that the cleanliness of the air inside the clean room 200 (outside the casing 10) would decrease. It is also assumed that the cleanliness of the air drawn in from the intake port 14a decreases. Even in such a case, as described above, if the detected air cleanliness represented by the cleanliness detection signal from the particle sensor 27 is lower than the first cleanliness threshold Th1, the first cleanliness mode (cleanliness On the other hand, if the detected air cleanliness is higher than the second cleanliness threshold Th2, the fan filter unit is set to the second cleanliness mode (weak cleaning, weak blower cooling). The operation of the exhaust fan 25 is controlled.

As described above, the blower device 100 (equipment) described above is more suitable for use in the clean room 200, as in the case of the first embodiment described above, and in particular, the cleanliness inside the housing 10 is improved. In a situation where the air flow rate is high, the exhaust fan of the fan filter unit 25 is operated relatively weakly, so while cooling the blower unit 20, the cleanliness of the air inside the housing 10 and the air near the blower unit 100 in the clean room 200 are reduced. The cleanliness can be further improved without wasting any waste.

In the blower device 100 (equipment) described above, the operation of the exhaust fan of the fan filter unit 25 is set to the first cleanliness mode according to the detected air cleanliness using the first cleanliness threshold Th1 and the second cleanliness threshold Th2. Although the control is performed in two modes, ie, the cleanliness mode and the second cleanliness mode, the present invention is not limited thereto. In the second cleanliness mode in which the cleanliness of the air inside the casing 10 is improved, the exhaust fan of the fan filter unit 25 may be stopped, and the exhaust fan of the fan filter unit 25 may be stopped in two or more stages. It may also be control of the operating intensity of the exhaust fan. In addition, the two-step operation intensity control of the exhaust fan of the fan filter unit 25 is performed using a single cleanliness threshold, instead of using two thresholds, the first cleanliness threshold Th1 and the second cleanliness threshold Th2, as described above. This can also be done using the degree threshold Th.

Note that in the second embodiment and its modifications described above, the operation of the exhaust fan of the fan filter unit 25 is controlled based on the detected temperature value inside the housing 10, and the detected air inside the housing 10 is controlled. Although the operation of the exhaust fan of the fan filter unit 25 is controlled based on the cleanliness level, the present invention is not limited thereto. It is also possible to control the operation of the exhaust fan of the fan filter unit 25 based on both the detected temperature value within the housing 10 and the detected air cleanliness. Furthermore, in the case of a variable output blower machine 20, depending on other conditions inside the housing 10, for example, depending on the operating sound pressure of the blower machine 20, depending on whether the blower machine 20 is in operation or not, When a plurality of devices are housed in the housing 10, the operation of the exhaust fan of the fan filter unit 25 can be controlled according to the number of devices operating in accordance with the setting output.

Further, in each of the above-mentioned examples, the blower device 100 installed in the clean room 200 was described, but the device is not limited to this, and the device may be installed in a room other than the clean room 200, and the device includes: It may be a device other than the blower device 100.

Although the embodiment of the present invention and its modifications have been described above, the embodiments and modifications of each part are presented as examples, and are not intended to limit the scope of the invention. These novel embodiments described above can be implemented in various other forms, and various omissions, substitutions, and changes can be made without departing from the gist of the invention. These embodiments and their modifications are included within the scope and gist of the invention, and are also included in the invention described in the claims.

The device according to the present invention has the effect of being more suitable for indoor use, and is useful as a device to be used indoors.

10 Housing 11a, 11b Wall 12 Output port 13 Input port 14a Inlet port 14b Exhaust port 20 Blower machine 21 Output filter 22 Input filter 23 Air supply pipe 24 Introductory pipe 25 Fan filter unit (FFU)
26 Temperature sensor 27 Particle sensor 30 Control unit 100 Blower device (equipment)
200 Clean room

Claims (8)

A device that takes in air containing fine particles from an input port and sends out clean air from an output port,
a casing surrounded by a plurality of walls including a first wall having an intake port and a second wall having an exhaust port;
an input filter provided within the housing and purifying air from the input port;
a blower machine that is provided in the housing, operates with heat generation, and takes in and sends out air that passes through the input filter;
an output filter that is provided within the housing and takes in air sent out from the blower machine, purifies it, and provides it to the output port;
a filter provided on the second wall so as to cover the exhaust port;
A device comprising: an exhaust fan that exhausts air inside the housing from the exhaust port through the filter. The device according to claim 1, wherein the first wall portion and the second wall portion are disposed to face each other in the housing with the blower machine in between. 3. The device according to claim 1, wherein the filter and the exhaust fan are integrated as a fan filter unit. a state detection means for detecting a physical quantity representing a state within the housing;
4. The apparatus according to claim 1, further comprising fan control means for controlling operation of said exhaust fan based on a physical quantity detected by said state detection means. The state detection means includes temperature detection means for detecting a temperature value inside the housing as a physical quantity representing the state inside the housing,
5. The device according to claim 4, wherein said fan control means includes temperature-dependent fan control means for controlling operation of said exhaust fan based on the temperature value detected by said temperature detection means. The temperature dependent fan control means controls the operation of the exhaust fan in a first temperature mode when the detected temperature value is greater than the first predetermined value, and the temperature dependent fan control means controls the operation of the exhaust fan in a first temperature mode when the detected temperature value is greater than the first predetermined value. The apparatus according to claim 5, further comprising temperature mode variable control means for controlling the operation of the exhaust fan in a second temperature mode, which operates weaker than the operation in the first temperature mode, when the temperature is smaller than a second predetermined value as follows: . The state detection means includes air cleanliness detection means for detecting the cleanliness of the air inside the casing as a physical quantity representing the state inside the casing,
7. The fan control means according to claim 4, wherein the fan control means includes an air cleanliness dependent fan control means for controlling the exhaust fan based on the air cleanliness detected by the air cleanliness detection means. device. The air cleanliness dependent fan control means controls the operation of the exhaust fan in a first cleanliness mode when the detected cleanliness is lower than a first predetermined cleanliness; a cleanliness mode variable control means for controlling the operation of the exhaust fan in a second cleanliness mode that is weaker than the operation in the first cleanliness mode when the cleanliness is higher than a second predetermined cleanliness that is higher than a first predetermined cleanliness; The device according to claim 7.

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