JP7398254B2 - Sample surface cutting method, test section preparation method, and sample surface cutting device - Google Patents

Description

The present invention relates to a sample surface cutting technique for producing a test section by cutting the surface of a sample.

As a method for testing various samples, a method is known in which the surface of the sample is cut to prepare a thin test section, and the test section is inspected and observed (for example, Patent Document 1). In preparing such a test section, it is required to precisely cut the intended cutting target range with high precision. Therefore, conventional test section preparation was often left to manual work by skilled workers using specialized cutting equipment.

Japanese Patent Application Publication No. 2006-334703

However, in recent years, with the decrease in the number of skilled workers, automation of test section preparation has been desired.

In view of the above, the present invention provides a sample surface cutting method that enables automation of test section preparation, a test section preparation method using the sample surface cutting method, and a sample surface cutting apparatus that can carry out the sample surface cutting method. The purpose is to provide

In order to achieve the above object, the sample surface cutting method according to the present invention involves cutting the surface of a flat sample in the vertical direction using a sample surface cutting device, and also cutting the surface of a flat sample in the vertical direction with the previous cutting line and the subsequent cutting line. A sample surface cutting method for removing a test section from a sample by cutting multiple times in a horizontal direction perpendicular to The cutting blade and the sample table are provided with a drive means for relatively moving the cutting blade and the sample stage, and a control means for controlling the driving of the drive means, and the cutting blade and the sample stage are moved vertically, horizontally, and with respect to the surface of the sample. The cutting blade is relatively movable in each of the vertical height directions, and the cutting blade is moved relative to the sample stage forward in the longitudinal direction and downward in the height direction using a control means. a step (D) of cutting the surface of the sample by using the control means, a step (E) of moving the cutting blade relatively upward in the height direction with respect to the sample stage using the control means; The method includes a step (G) of moving the cutting blade relatively to the sample stage from above the previous cutting line to above the subsequent cutting line.

According to the sample surface cutting method according to the present invention, the control means of the sample surface cutting device is used to move the cutting blade with respect to the sample stage forward (cutting direction) in the vertical direction (the direction in which the cutting line extends); Step (D) of "moving the cutting blade relatively downward in the height direction to cut the surface of the sample" and "moving the cutting blade relatively upward in the height direction with respect to the sample stage" step (D) E) and step (G) of "moving the cutting blade relative to the sample stage from above the previous cutting line to above the subsequent cutting line" are performed. Therefore, it is possible to obtain a test section by cutting the surface of the sample in the vertical direction and automatically cutting the sample so that the previous cutting line and the subsequent cutting line are lined up in the horizontal direction. Therefore, since no operation by the operator is required during cutting of the sample surface, the sample surface can be easily cut.

In the sample surface cutting method according to the present invention, in step (G), the cutting blade is moved laterally relative to the sample stage from above the previous cutting line to above the subsequent cutting line, and using a control means. further comprising a step (F) of moving the cutting blade relatively backward in the longitudinal direction with respect to the sample stage, in the order of step (D), step (E), step (F), and step (G). Alternatively, the cutting operation may be repeated in the order of step (D), step (E), step (G), and step (F). In this way, the surface of the sample is always cut in a single direction, ``forward in the longitudinal direction,'' which eliminates the need for a structure that changes the direction of the cutting edge during cutting, which can reduce costs. . Furthermore, since the movement of the cutting blade is simplified, cutting accuracy can be improved compared to the case where a complicated movement of the cutting blade is required.

In the sample surface cutting method according to the present invention, the driving means includes a first driving means for moving the cutting blade in the vertical direction, a second driving means for moving the cutting blade in the height direction, and a second driving means for moving the sample stage in the horizontal direction. In step (D), the cutting blade moves forward and downward, in step (E), the cutting blade moves upward, and in step (G), the sample stage moves horizontally. You may move in the direction. In this way, the movement of the cutting blade is limited to only the two axes necessary for cutting, the vertical direction and the height direction, making it easier to move the cutting blade than in the case of moving the cutting blade in three axes. Since the control mechanism can be simplified, costs can be reduced.

In the sample surface cutting method according to the present invention, the sample surface cutting device further includes a slope measuring means for measuring the slope of the surface of the sample, and a slope adjusting means for adjusting the slope of the surface of the sample, step (D), Before step (E) and step (G), a step (A) of fixing the sample on the sample stage, a step (B) of measuring the inclination of the surface of the sample, and a step of adjusting the inclination of the surface of the sample. (C) may further be included. In this way, automatic cutting can be performed after adjusting the inclination of the surface of the sample, so that cutting accuracy can be improved.

The method for producing a test section according to the present invention includes the step of collecting the test section after cutting the surface of the sample using the above-described sample surface cutting method according to the present invention.

According to the method for producing a test section according to the present invention, since the surface of the sample is cut using the method for cutting the surface of a sample according to the present invention, test section production can be automated. Furthermore, according to the method for preparing a test section according to the present invention, it is possible to collect a large amount of test sections with a certain thickness from the sample surface. Analysis becomes easier.

The sample surface cutting device according to the present invention cuts the surface of a flat sample in the vertical direction and cuts the surface multiple times so that the previous cutting line and the subsequent cutting line are lined up in the horizontal direction perpendicular to the vertical direction. A sample surface cutting device for taking out a test section from a sample, comprising a cutting blade, a sample stage for fixing the sample, a driving means for relatively moving the cutting blade and the specimen stage, and a driving means for driving the driving means. The cutting blade and the sample stage are movable relative to each other in the vertical direction, the horizontal direction, and the height direction perpendicular to the surface of the sample. , a first command to move the cutting blade relative to the sample stage by a first distance forward in the longitudinal direction and downward in the height direction; a second command to move a second distance upward relative to the sample table; and a second command to move the cutting blade a third distance relative to the sample stage from above the previous cutting line to above the subsequent cutting line. A third command is programmed.

According to the sample surface cutting device according to the present invention, similarly to the sample surface cutting method according to the present invention, the surface of the sample is cut in the vertical direction, and the previous cutting line and the subsequent cutting line are aligned in the horizontal direction. It becomes possible to automatically cut and obtain test sections. Therefore, since the operator does not need to perform any operations while cutting the sample surface, the sample surface can be easily cut.

According to the present invention, there is provided a sample surface cutting method that enables automation of test section preparation, a test section preparation method using the sample surface cutting method, and a sample surface cutting apparatus that can carry out the sample surface cutting method. be able to.

FIG. 1 is a cross-sectional configuration diagram of a sample surface cutting device according to an embodiment. FIG. 1 is a perspective view of a part of a sample surface cutting device according to an embodiment. It is a figure explaining the inclination measurement of the sample surface in the sample surface cutting method based on embodiment. It is a figure explaining the inclination measurement of the sample surface in the sample surface cutting method based on embodiment. FIG. 2 is a perspective view of an example of an indenter used for measuring the inclination of the sample surface in the sample surface cutting method according to the embodiment. It is a figure explaining the relative moving direction of the cutting blade with respect to the sample stage in the sample surface cutting method based on embodiment. FIG. 3 is a diagram showing an example of a relative movement locus of a cutting blade with respect to a sample stage in a sample surface cutting method according to an embodiment. FIG. 3 is a diagram showing an example of a relative movement locus of a cutting blade with respect to a sample stage in a sample surface cutting method according to an embodiment. FIG. 7 is a diagram showing a relative movement locus of the cutting blade with respect to the sample stage in the sample surface cutting method according to Modification 1. FIG. 7 is a diagram showing a relative movement locus of a cutting blade with respect to a sample stage in a sample surface cutting method according to a second modification. FIG. 7 is a diagram showing a relative movement locus of a cutting blade with respect to a sample stage in a sample surface cutting method according to modification example 3;

(Embodiment)
Hereinafter, a sample surface cutting method according to an embodiment, a method for preparing a test section using the sample surface cutting method, and a sample surface cutting apparatus capable of carrying out the sample surface cutting method will be described with reference to the drawings.

<Sample surface cutting device>
FIG. 1 is a cross-sectional configuration diagram of a sample surface cutting device of this embodiment, and FIG. 2 is a perspective view of a part of the sample surface cutting device of this embodiment.

As shown in FIGS. 1 and 2, the sample surface cutting device 1 of the present embodiment includes a cutting blade 2, a sample stage 4 for fixing a sample 3, and a relatively movable state between the cutting blade 2 and the sample stage 4. It includes driving means 12, 18, and 31, and a control means 40 that controls driving of the driving means 12, 18, and 31.

The cutting blade 2 is supported by a cutting blade support part 11 held by the main body part 10. The cutting blade 2 is moved in the vertical direction (direction in which the cutting line extends) together with the main body 10 and the cutting blade support 11 by a driving means (back-and-forth moving motor) 12 provided on the opposite side of the cutting blade 2 with the main body 10 in between. It is possible to move to The back-and-forth movement motor 12 is provided on the main body support part 30 via the support stand 14 . The main body part 10 is provided on a vertical guide shaft 17 on the main body support part 30 with a vertical sliding member 16 in between so that the main body part 10 can move vertically on the main body support part 30 . The back-and-forth movement motor 12 moves the main body 10 in the vertical direction together with the vertical sliding member 16 through the vertical threaded rod 13 . A vertical displacement meter 15 is provided on the vertical guide shaft 17 to measure the vertical displacement (vertical movement distance) of the cutting blade 2 . As the longitudinal displacement meter 15, for example, a laser displacement meter, a micrometer, or the like is used.

The cutting blade 2 can be moved in the height direction (direction perpendicular to the surface of the sample 3) together with the cutting blade support 11 by a driving means (vertical movement motor) 18 provided above the cutting blade support 11. It is. The vertical movement motor 18 is supported by the main body 10 via a connecting portion 19 . The vertical movement motor 18 moves a nut 21 provided on the side surface of the main body 10 in the height direction through the height direction threaded rod 20, and the nut 21 raises the cutting blade 2 together with the cutting blade support 11. move it in the opposite direction. The main body portion 10 is provided with a vertical displacement meter 22 for measuring the heightwise displacement of the nut 21, that is, the heightwise displacement (heightwise movement distance) of the cutting blade 2. As the vertical displacement meter 22, for example, a contact type displacement meter such as a scale type, a micrometer, etc. are used. The nut 21 is provided on a vertical guide shaft 23 on a side surface of the main body part 10 with a vertical sliding member 24 in between so that the nut 21 can move on the side surface of the main body part 10 in the height direction. The cutting blade support section 11 is provided with a vertical pressure detector 25 for measuring the pressure (vertical pressure) applied from the cutting blade 2 to the sample 3 in the height direction.

The sample stage 4 includes, in order from the top, a sliding member 26 for longitudinal pressure detection, a guide shaft 35 for longitudinal pressure detection, a longitudinal inclination adjustment means 36, a lateral inclination adjustment means 37, a longitudinal and lateral position adjustment member 38, and a lateral direction position adjustment member 38. It is provided on the main body support part 30 with the sliding member 27 and the lateral guide shaft 28 in between. Here, the "horizontal direction" is a direction perpendicular to the "vertical direction" and the "height direction". Further, the vertical pressure detection sliding member 26 is a member for transmitting the load applied from the cutting blade 2 during cutting to the vertical pressure detector 29, and is a member for transmitting the load applied from the cutting blade 2 to the vertical pressure detector 29. It slides along the guide shaft 35 for longitudinal pressure detection. The vertical inclination adjustment means 36 is a member that vertically rotates the sample fixing surface of the sample stage 4 (the axis of rotation runs along the horizontal direction), and specifically, a micrometer can be used. The lateral inclination adjusting means 37 is a member that rotates the sample fixing surface of the sample stage 4 in the lateral direction (the axis of rotation is along the vertical direction), and specifically, a micrometer can be used. The vertical and horizontal position adjustment member 38 is a member for manually moving the sample stage 4 and setting it at the cutting start position before starting automatic cutting. The sample stage 4 includes a sliding member 26 for longitudinal pressure detection, a guide shaft 35 for longitudinal pressure detection, a longitudinal inclination adjustment means 36, a lateral inclination adjustment means 37, and a longitudinal and lateral position adjustment member 38, as well as a main body support section 30. A lateral sliding member 27 is provided on the lateral guide shaft 28 on the main body support portion 30 so as to be able to move in the lateral direction. The longitudinal pressure detection guide shaft 35 is provided with a longitudinal pressure detector 29 for measuring the pressure applied longitudinally from the cutting blade 2 to the sample 3 (vertical pressure).

The sample stage 4 can be moved in the lateral direction by a drive means (left-right movement motor) 31 arranged on the lateral side of the lateral sliding member 27 . The left-right movement motor 31 moves the sample stage 4 in the lateral direction together with the lateral sliding member 27 through the lateral threaded rod 32 .

In the sample surface cutting device 1 of the present embodiment, the driving of the longitudinal movement motor 12, the vertical movement motor 18, and the left and right movement motor 31 is automatically controlled by a control means 40 equipped with a computer such as a personal computer. The control means 40 reads information detected by the vertical displacement meter 15, the vertical pressure detector 29, the vertical displacement meter 22, and the vertical pressure detector 25 through the input interface 41, and based on the information, outputs the first output. The driving of the longitudinal movement motor 12 and the vertical movement motor 18 is controlled through the interface 42, and the driving of the left and right movement motor 31 is controlled through the second output interface 43.

For the lateral displacement (lateral movement distance) of the cutting blade 2, the control means 40 may use the movement distance of the drive command to the left-right movement motor 31, or may use a separate movement distance for measuring the lateral movement distance. A lateral displacement meter may be provided and information detected by the displacement meter may be used. Further, the control means 40 uses the movement distance of the drive command to the longitudinal movement motor 12 instead of the information detected by the longitudinal displacement meter 15 regarding the longitudinal displacement (vertical movement distance) of the cutting blade 2. Alternatively, regarding the height direction displacement (height direction movement distance) of the cutting blade 2, the movement distance of the drive command to the vertical movement motor 18 may be used instead of the information detected by the vertical displacement meter 22. . However, when cutting sample 3, there is a possibility that the moving distance may fluctuate due to the reaction force that the cutting blade 2 receives from sample 3, so in order to cut sample 3 with high precision, it is necessary to Regarding the distance traveled in the horizontal direction, it is better to perform cutting while precisely monitoring the actual distance traveled using a displacement meter.

In the control means 40, each function is implemented by a computer executing a program. Specifically, the control means 40 has a first command to "move the cutting blade 2 by a first distance relative to the sample stage 4 forward in the longitudinal direction and downward in the height direction". A second command to "move the cutting blade 2 relative to the sample stage 4 by a second distance upward in the height direction" and a second command "to move the cutting blade 2 relative to the sample stage 4 by a second distance" At least a third command is programmed to move the cutting line a third distance from a previous cutting line to a subsequent cutting line. Here, the third command is a command to "move the cutting blade 2 relative to the sample stage 4 by a third distance in the lateral direction from above the previous cutting line to above the subsequent cutting line". In this case, the control means 40 may be programmed with a fourth command to "move the cutting blade 2 backward in the longitudinal direction by a fourth distance relative to the sample stage 4." Here, "on the previous (later) cutting line" includes not only the area above the actual cutting trajectory but also the area above the extension line of that trajectory.

Note that a computer mainly includes a processor that operates according to a program, a memory that stores data necessary for executing the program, and the like as its main hardware configuration. A processor is of any type as long as it can realize a function by executing a program, but it may be composed of one or more electronic circuits including, for example, a semiconductor integrated circuit (IC) or a large scale integration (LSI). You can leave it there. Programs and data are recorded on computer-readable non-transitory recording media such as ROM, optical disks, and hard disk drives. The program and data may be stored in advance on a recording medium, or may be supplied to the recording medium via a wide area communication network including the Internet.

<Sample surface cutting method>
Hereinafter, a sample surface cutting method of this embodiment using the sample surface cutting apparatus 1 shown in FIGS. 1 and 2 will be described.

In the sample surface cutting method of this embodiment, first, a step (A) of fixing the sample 3 on the sample stage 4 is performed. For example, the sample stage 4 is a box-shaped body having a sample suction part (suction hole) on the upper surface on which the sample 3 is placed, and a suction tube (not shown) is connected to the side of the box-shaped body. The suction pipe may be connected to a vacuum pump (not shown). Thereby, by operating the vacuum pump, the sample 3 is sucked downward on the sample stage 4, and the sample 3 can be fixed on the sample stage 4. Instead of such a fixing method, the sample 3 may be fixed on the sample stage 4 by a chemical fixing method using an adhesive, hot melt, or the like, or a physical fixing method using a bolt or the like. However, in terms of fixation accuracy and ease of operation, the above-mentioned suction fixation is preferable.

Next, a step (B) of measuring the slope of the surface of the sample 3 is performed. Step (B) can be carried out using, for example, an indenter brought into contact with the surface of the sample 3, and the vertical displacement meter 22 and the vertical pressure sensor 25 in the sample surface cutting device 1 as the inclination measuring means. Specifically, an indenter is attached to the cutting blade support 11 instead of the cutting blade 2, and while the indenter is in contact with the sample 3, the indenter is moved while applying a constant load using the vertical pressure detector 25. The vertical displacement meter 22 is used to continuously detect the displacement of the indenter. As a result, the height information of the surface of the sample 3 can be acquired, so that the inclination of the surface of the sample 3 can be measured. In addition, at multiple locations on the surface of the sample 3, the indenter is pressed against the surface of the sample 3 to a certain height position using the vertical displacement meter 22, and the load received by the indenter at that time is measured using the vertical pressure detector 25. May be detected. This allows the load received at a constant height position to be compared at multiple points, so the inclination of the surface of the sample 3 can be measured.

As shown in FIG. 3, when measuring the inclination, it is preferable to move the indenter in at least two directions, the vertical direction (a) and the horizontal direction (b), to further improve the inclination measurement accuracy. As shown in FIG. 4, it is more preferable to measure the inclination by moving the indenter in three directions: vertical direction (a), horizontal direction (b), and diagonal direction (c).

The tip of the indenter used for inclination measurement preferably has a curved surface so as not to damage the sample 3 when brought into contact with the indenter. It is more preferable that the tip shape is spherical. FIG. 5 is a perspective view of an example of an indenter used for inclination measurement. The tip 50a of the indenter 50 shown in FIG. 5 has a spherical shape.

Next, a step (C) of adjusting the slope of the surface of the sample 3 is performed. For example, a micrometer (that is, vertical tilt adjustment means 36) that rotates the sample fixing surface of the sample stage 4 in the vertical direction (the rotation axis is along the horizontal direction) and a micrometer (that is, the vertical tilt adjustment means 36) that rotates the sample fixing surface of the sample stage 4 in the horizontal direction. The angle of the sample 3 can be adjusted using a micrometer (ie, the horizontal tilt adjustment means 37) (the axis of rotation is along the vertical direction). Alternatively, a tilt adjustment means such as an actuator may be used instead of the micrometer. After carrying out step (C), the inclination measurement in step (B) may be performed again to confirm that the surface of sample 3 has become close to horizontal.

After performing the above steps (A), (B), and (C), the cutting operation by the cutting blade 2 of the sample surface cutting device 1 is started. FIG. 6 is a diagram illustrating the direction of movement of the cutting blade 2 relative to the sample stage 4. In this embodiment, the cutting blade 2 is aligned with respect to the sample stage 4 along the three axial directions shown in FIG. It is relatively movable along each of the direction in which the line and the subsequent cutting line are lined up) and the height direction (direction perpendicular to the surface of the sample 3). Note that the cutting direction in the longitudinal direction is referred to as "forward", and the opposite direction is referred to as "backward".

When starting a cutting operation, the operator first sets the number of cuttings, the cutting distance in the vertical direction, the cutting depth in the height direction, and the moving distance in the lateral direction to the control means 40. The horizontal movement distance is set according to the blade width of the cutting blade 2, but if the horizontal movement distance is set to be equal to or less than the blade width of the cutting blade 2, the previous cutting line and the subsequent cutting line will be different. Since the test sections partially overlap or are arranged in parallel without any gaps, the test section can be taken out from the surface of the sample 3 without waste.

Next, the control means 40 drives the longitudinal movement motor 12 and the vertical movement motor 18 to move the cutting blade 2 forward in the longitudinal direction and downward in the height direction, thereby automatically cutting the surface of the sample 3. Perform the cutting step (D). Specifically, when the sample stage 4 on which the sample 3 is fixed is set at the cutting start position, the cutting blade 2 and the sample 3 are spaced apart in the height direction. The moving motor 18 is driven to move the cutting blade 2 downward in the height direction to bring the cutting blade 2 into contact with a cutting start position on the surface of the sample 3. This contact operation may be performed manually, for example by providing a mechanism for arbitrarily moving the cutting blade 2 in the vertical direction. In addition, contact between the sample 3 and the cutting blade 2 can be confirmed by, for example, using a vertical pressure detector 25, or by checking the contact between the sample 3 and the cutting blade 2 using a video camera, etc. The operator may visually check the distance between the sample 3 and the cutting blade 2 by photographing the sample and displaying it on a computer or the like in an enlarged manner. Subsequently, the control means 40 drives the longitudinal movement motor 12 and the vertical movement motor 18 to move the cutting blade 2 forward in the longitudinal direction and at the height until the cutting blade 2 reaches the position of the set cutting depth. Move downward in the direction. Subsequently, when the cutting blade 2 reaches the position of the set depth of cut, the control means 40 drives only the back-and-forth movement motor 12 to achieve the set cutting depth without displacing the cutting blade 2 in the height direction. The cutting operation is performed while displacing the cutting blade 2 only in the vertical direction up to a distance.

In step (D), the longitudinal pressure and vertical pressure of the cutting blade 2 may be detected using the longitudinal pressure detector 29 and the vertical pressure detector 25. In this way, since the cutting situation can be monitored, it is possible to know whether or not the cut depth varies with respect to the set value due to the influence of the hardness of the sample 3 or the like. If a non-negligible variation in the depth of cut occurs, step (D) may be interrupted and steps (B) and (C) may be performed again.

Next, the control means 40 drives the vertical movement motor 18 to perform a step (E) of moving the cutting blade 2 upward in the height direction. At this time, when the control means 40 drives the longitudinal movement motor 12 together with the vertical movement motor 18 to move the cutting blade 2 upward in the height direction and forward in the longitudinal direction at the same time, the test section is removed from the sample 3. Since it can be separated, the test section can be easily collected. Further, after the cutting blade 2 has moved to the height of the surface of the sample 3, the control means 40 drives the vertical movement motor 18 to further move the cutting blade 2 upward, thereby separating the cutting blade 2 and the sample 3. They may be spaced apart in the height direction.

Next, a step (F) is performed in which the control means 40 drives the back-and-forth movement motor 12 to move the cutting blade 2 backward in the vertical direction until the cutting blade 2 returns to the above-mentioned cutting start position. Here, in order to shorten the sample cutting time, the operating speed (return movement speed) of the cutting blade 2 in step (F) is faster than the operating speed (cutting operation speed) of the cutting blade 2 in step (D). may be made larger. Further, when returning the cutting blade 2 to the above-mentioned cutting start position, the return movement speed may be reduced immediately before the cutting start position, that is, immediately before the stop position of the cutting blade 2. In this way, it is possible to prevent the positional shift of the cutting blade 2 that occurs when the cutting blade 2 is abruptly stopped at the cutting start position from a high return movement speed.

Next, the control means 40 drives the left-right movement motor 31 to perform a step (G) of moving the sample stage 4 laterally so that the cutting blade 2 is positioned on the next cutting line. That is, in step (G), the cutting blade 2 moves horizontally relative to the sample stage 4 from above the previous (previous) cutting line to above the next (next) cutting line.

In the sample surface cutting method of this embodiment, the cutting operations of steps (D), (E), (F), and (G) are repeatedly and automatically performed until a preset number of cuttings is reached. Thereafter, the operator collects the plurality of test sections remaining on the sample 3 using, for example, tweezers, thereby completing the preparation of the test sections. Collection of test sections may be performed automatically.

7 and 8 show an example of a relative movement trajectory of the cutting blade 2 with respect to the sample stage 4 in the sample surface cutting method of this embodiment, and FIG. 7 shows a trajectory of the sample 3 viewed from above. 8 shows the trajectory of sample 3 viewed from the side. In addition, in FIGS. 7 and 8, the same components as those of the sample surface cutting apparatus 1 shown in FIGS. 1 and 2 are given the same reference numerals. Moreover, in FIGS. 7 and 8, the relative movement locus of the cutting blade 2 is shown by arrows (solid lines or broken lines), and the corresponding process (D, E, F, G) is appended to each arrow.

<Effects of embodiment>
As explained above, according to the sample surface cutting method of the present embodiment, the control means 40 of the sample surface cutting device 1 is used to control the cutting blade 2 in the forward direction (cutting direction) in the vertical direction (the direction in which the cutting line extends). step (D) of "cutting the surface of the sample 3 by relatively moving the cutting blade 2 downward in the height direction" and step (E) of "moving the cutting blade 2 upward in the height direction" and step (G) of "moving the sample stage 4 in the lateral direction so that the cutting blade 2 moves relatively from above the previous cutting line to above the subsequent cutting line". Therefore, it is possible to obtain a test section by cutting the surface of the sample 3 in the vertical direction and automatically cutting the sample 3 so that the previous cutting line and the subsequent cutting line are lined up in the horizontal direction. Therefore, since the operator does not need to perform any operations while cutting the surface of the sample 3, the sample surface can be easily cut.

The sample surface cutting method of the present embodiment further includes a step (F) of relatively moving the cutting blade 2 backward in the longitudinal direction using the control means 40, and step (D) and step (E). , step (F), and step (G), the surface of the sample 3 is always cut in a single direction "forward in the longitudinal direction". Therefore, there is no need for a configuration for changing the direction of the cutting blade 2 during cutting, so costs can be suppressed. Furthermore, since the movement of the cutting blade 2 is simplified, cutting accuracy can be improved compared to a case where a complicated movement of the cutting blade is required.

In the sample surface cutting method of this embodiment, the sample surface cutting device 1 also includes a back-and-forth movement motor 12 that moves the cutting blade 2 in the vertical direction as a driving means for relatively moving the cutting blade 2 and the sample stage 4. , a vertical movement motor 18 that moves the cutting blade 2 in the height direction, and a left-right movement motor 31 that moves the sample stage 4 in the horizontal direction, and in step (D), the cutting blade 2 is moved forward and downward. In step (E), the cutting blade moves upward, and in step (G), when the sample stage 4 moves laterally, the movement of the cutting blade 2 moves vertically and in height necessary for cutting. It is limited to only two axial directions. Therefore, compared to the case where the cutting blade is moved in three axial directions, the control mechanism of the sample surface cutting device 1 can be simplified, and costs can be suppressed.

Further, in the sample surface cutting method of the present embodiment, the sample surface cutting device 1 includes a slope measuring means for measuring the slope of the surface of the sample 3, and a slope adjusting means for adjusting the slope of the surface of the sample 3 (specifically, The step (A) of fixing the sample 3 to the sample stage 4 is further provided with a vertical inclination adjusting means 36 and a horizontal inclination adjusting means 37). ), a step (B) of measuring the slope of the surface of the sample 3, and a step (C) of adjusting the slope of the surface of the sample 3, the automatic cutting is performed after adjusting the slope of the surface of the sample 3. Since this can be done, cutting accuracy can be improved.

According to the test section preparation method that includes the step of collecting the test section after cutting the surface of the sample 3 using the sample surface cutting method of the present embodiment described above, test section preparation can be automated. In addition, according to this test section preparation method, it is possible to collect a large amount of test sections of a certain thickness from the surface of the sample 3, so the range from the surface of the sample 3 to a certain thickness is targeted. Sample analysis becomes easier.

According to the sample surface cutting device 1 of this embodiment, as described in the sample surface cutting method of this embodiment, the surface of the sample 3 is cut in the vertical direction, and the previous cutting line and the subsequent cutting line are cut in the horizontal direction. It becomes possible to obtain test sections by automatically cutting them so that they line up. Therefore, since the operator does not need to operate while cutting the surface of the sample 3, the sample surface can be easily cut.

(Modification 1)
FIG. 9 is a diagram showing a relative movement locus of the cutting blade 2 with respect to the sample stage 4 in the sample surface cutting method according to the first modification. Note that FIG. 9 shows the locus of the sample 3 viewed from above, and the same components as in the embodiment shown in FIG. 7 are given the same reference numerals.

In the above embodiment, the cutting operation was repeated in the order of step (D), step (E), step (G), and step (F) as shown in FIG. In the cutting method, as shown in FIG. 9, cutting operations are repeated in the order of step (D), step (E), step (G), and step (F). That is, in the embodiment described above, the return movement in step (F) is performed on the previous cutting line, but in this modification, the return movement in step (F) is performed on the subsequent cutting line.

Also in this modification described above, the same effects as in the embodiment described above can be obtained.

(Modification 2)
FIG. 10 is a diagram showing a relative movement locus of the cutting blade 2 with respect to the sample stage 4 in the sample surface cutting method according to the second modification. Note that FIG. 10 shows a locus of the sample 3 viewed from above, and the same components as in the embodiment shown in FIG. 7 are given the same reference numerals.

This modification differs from the above embodiment in that a mechanism is provided to rotate the cutting blade 2 or the sample stage 4 by 180 degrees, or the cutting blade 2 cuts the specimen 3 both in the forward and backward directions in the vertical direction. This means that it is possible. Thereby, as shown in FIG. 10, the cutting operation can be repeated without performing the return movement in step (F).

In this modification described above, the same effects as in the embodiment described above can be obtained, but the structure of the sample surface cutting device 1 and the structure of the cutting blade 2 are complicated, so the cost is lower than in the embodiment described above. It may increase.

(Modification 3)
FIG. 11 is a diagram showing a relative movement locus of the cutting blade 2 with respect to the sample stage 4 in the sample surface cutting method according to the third modification. Note that FIG. 11 shows the locus of the sample 3 viewed from above, and the same components as in the embodiment shown in FIG. 7 are given the same reference numerals.

This modification differs from the above embodiment in that, as shown in FIG. ''In step (G), the return movement of step (F) is carried out simultaneously.

In this modification described above, the same effects as in the embodiment can be obtained, but the cutting blade 2 is moved in a direction other than the three axes (vertical direction, horizontal direction, height direction) with respect to the sample stage 4. Since the cutter is moved relative to the cutter, the cutting accuracy may be lower than that in the embodiment described above.

(Other embodiments)
In the embodiment described above, the sample surface cutting device 1 includes, as driving means for relatively moving the cutting blade 2 and the sample stage 4, a back-and-forth movement motor 12 that moves the cutting blade 2 in the vertical direction, and a back-and-forth movement motor 12 that moves the cutting blade 2 in the vertical direction. It had a vertical movement motor 18 that moves the sample stage 4 in the horizontal direction, and a left-right movement motor 31 that moves the sample stage 4 in the horizontal direction. However, in the present invention, if the cutting blade 2 and the sample stage 4 are relatively movable at least in the three axial directions of the vertical direction, the horizontal direction, and the height direction, either the cutting blade 2 or the sample stage 4 can be moved. You may move.

That is, in the sample surface cutting method according to the present invention, the surface of a flat sample is cut in the vertical direction by a sample surface cutting device, and the previous cutting line and the subsequent cutting line are aligned in the horizontal direction perpendicular to the vertical direction. This is a sample surface cutting method for taking out a test section from a sample by cutting it multiple times as shown in FIG. It is equipped with a drive means for moving the drive means relatively, and a control means for controlling the drive of the drive means, and the cutting blade and the sample stage are movable relative to each other in the vertical direction, the lateral direction, and the height direction. a step (D) of cutting the surface of the sample by moving the cutting blade relative to the sample stage forward in the longitudinal direction and downward in the height direction using a control means; a step (E) of moving the cutting blade relative to the sample stand upward in the height direction using a means; and a step (E) of moving the cutting blade relative to the sample stand using a control means from above the previous cutting line. and a step (G) of relatively moving it to a later cutting line.

In the sample surface cutting method according to the present invention, in the step (G), the cutting blade is moved laterally relative to the sample stage from above the previous cutting line to above the subsequent cutting line, and the control means It further includes a step (F) of moving the cutting blade relatively backward in the longitudinal direction with respect to the sample stage using a The cutting operation may be repeated in order or in the order of step (D), step (E), step (G), and step (F).

In addition, the sample surface cutting device according to the present invention cuts the surface of a flat sample in the vertical direction and cuts the surface multiple times so that the previous cutting line and the subsequent cutting line are aligned in the horizontal direction perpendicular to the vertical direction. A sample surface cutting device for taking out a test section from a sample, comprising a cutting blade, a sample stage for fixing the sample, a driving means for relatively moving the cutting blade and the specimen stage, and a driving means. The cutting blade and the sample table are movable relative to each other in the vertical direction, the horizontal direction, and the height direction, and the control means is provided with a control means for controlling the drive of the sample table. a first command to move the cutting blade a first distance relative to the front in the longitudinal direction and downward in the height direction; and a first command to move the cutting blade relative to the sample stage upward in the height direction. a second command to move the cutting blade a second distance relative to the sample stage, and a third command to move the cutting blade a third distance relative to the sample stage from above the previous cutting line to above the subsequent cutting line. is programmed.

Although the embodiments and modifications have been described above, it will be understood that various changes in form and details can be made without departing from the spirit and scope of the claims. Furthermore, the above embodiments and modifications may be combined or replaced as appropriate, as long as the functionality of the object of the present disclosure is not impaired. Furthermore, the descriptions such as "first", "second", etc. mentioned above are used to distinguish the words to which these descriptions are given, and they also limit the number and order of the words. isn't it.

1 Sample surface cutting device 2 Cutting blade 3 Sample 4 Sample stage 10 Main body 11 Cutting blade support 12 Drive means (back and forth movement motor)
13 Vertical threaded rod 14 Support stand 15 Vertical displacement meter 16 Vertical sliding member 17 Vertical guide shaft 18 Drive means (vertical movement motor)
19 Connecting portion 20 Height threaded rod 21 Nut 22 Vertical displacement meter 23 Vertical guide shaft 24 Vertical sliding member 25 Vertical pressure detector 26 Vertical pressure detection sliding member 27 Lateral sliding member 28 Lateral direction Guide shaft 29 Vertical pressure detector 30 Main body support portion 31 Drive means (left and right moving motor)
32 Horizontal threaded rod 35 Guide shaft for longitudinal pressure detection 36 Vertical inclination adjustment means 37 Lateral inclination adjustment means 38 Vertical and horizontal position adjustment member 40 Control means 41 Input interface 42 First output interface 43 Second output interface 50 Indenter

Claims (6)

By cutting the surface of a flat sample in the vertical direction with a sample surface cutting device and cutting it multiple times so that the previous cutting line and the subsequent cutting line are aligned in the horizontal direction perpendicular to the vertical direction, the sample is A sample surface cutting method for taking out a test section from
The sample surface cutting device includes:
A cutting blade and
a sample stage for fixing the sample;
a driving means for relatively moving the cutting blade and the sample stage;
and a control means for controlling the drive of the drive means,
The cutting blade and the sample stage are relatively movable in each of the vertical direction, the horizontal direction, and the height direction perpendicular to the surface of the sample,
cutting the surface of the sample by relatively moving the cutting blade forward in the longitudinal direction and downward in the height direction with respect to the sample stage using the control means ( D) and
(E) relatively moving the cutting blade upward in the height direction with respect to the sample stage using the control means;
a step (G) of relatively moving the cutting blade with respect to the sample stage from above the previous cutting line to above the subsequent cutting line using the control means ,
A method for cutting a sample surface, comprising repeating the cutting operation in the order of the step (D), the step (E), and the step (G) while the cutting blade is attached to the sample surface cutting device . In the step (G), the cutting blade is moved in the lateral direction relative to the sample stage from above the previous cutting line to above the subsequent cutting line,
further comprising a step (F) of relatively moving the cutting blade backward in the longitudinal direction with respect to the sample stage using the control means,
Said step (D), said step (E), said step (F), said step (G) in order, or said step (D), said step (E), said step (G), said step ( The sample surface cutting method according to claim 1, wherein the cutting operation is repeated in the order of F). The driving means includes a first driving means for moving the cutting blade in the vertical direction, a second driving means for moving the cutting blade in the height direction, and a third driving means for moving the sample stage in the horizontal direction. and a driving means;
In the step (D), the cutting blade moves in the forward direction and the downward direction,
In the step (E), the cutting blade moves upward,
The sample surface cutting method according to claim 1 or 2, wherein in the step (G), the sample stage moves in the lateral direction. The sample surface cutting device includes:
inclination measuring means for measuring the inclination of the surface of the sample;
further comprising a slope adjustment means for adjusting the slope of the surface of the sample,
Before the step (D), the step (E) and the step (G),
(A) fixing the sample on the sample stage;
(B) measuring the slope of the surface of the sample;
The sample surface cutting method according to any one of claims 1 to 3, further comprising a step (C) of adjusting an inclination of the surface of the sample. A method for producing a test section, comprising the step of collecting the test section after cutting the surface of the sample using the sample surface cutting method according to any one of claims 1 to 4. A test section is taken out from the sample by cutting the surface of a flat sample in the vertical direction and cutting it multiple times so that the previous cutting line and the subsequent cutting line are aligned in the horizontal direction perpendicular to the vertical direction. A sample surface cutting device for
A cutting blade and
a sample stage for fixing the sample;
a driving means for relatively moving the cutting blade and the sample stage;
and a control means for controlling the drive of the drive means,
The cutting blade and the sample stage are relatively movable in each of the vertical direction, the horizontal direction, and the height direction perpendicular to the surface of the sample,
The control means includes:
a first command to move the cutting blade a first distance relative to the sample stage forward in the longitudinal direction and downward in the height direction;
a second command to move the cutting blade upward in the height direction by a second distance relative to the sample stage;
A third command for moving the cutting blade a third distance relative to the sample stage from above the previous cutting line to above the subsequent cutting line is programmed,
The control means repeats control of the cutting operation in the order of the first command, the second command, and the third command while the cutting blade is attached to the specimen surface cutting device. Device.

Images