JP7380369B2 - Manufacturing method of RTB sintered magnet and alloy for diffusion - Google Patents

Manufacturing method of RTB sintered magnet and alloy for diffusion Download PDF

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JP7380369B2
JP7380369B2 JP2020053408A JP2020053408A JP7380369B2 JP 7380369 B2 JP7380369 B2 JP 7380369B2 JP 2020053408 A JP2020053408 A JP 2020053408A JP 2020053408 A JP2020053408 A JP 2020053408A JP 7380369 B2 JP7380369 B2 JP 7380369B2
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大介 古澤
武司 西内
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Proterial Ltd
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本発明はR-T-B系焼結磁石の製造方法及び拡散用合金に関する。 The present invention relates to a method for manufacturing an RTB sintered magnet and a diffusion alloy.

R-T-B系焼結磁石(Rは希土類元素のうち少なくとも一種であり、NdおよびPrの少なくとも一方を必ず含む。TはFe又はFeとCoであり、Bは硼素である)は永久磁石の中で最も高性能な磁石として知られており、ハードディスクドライブのボイスコイルモータ(VCM)、電気自動車用(EV、HV、PHVなど)モータ、産業機器用モータなどの各種モータや家電製品などに使用されている。 RTB system sintered magnet (R is at least one rare earth element and always contains at least one of Nd and Pr; T is Fe or Fe and Co; B is boron) is a permanent magnet It is known as the highest performance magnet in the world, and is used in various motors such as voice coil motors (VCM) for hard disk drives, motors for electric vehicles (EV, HV, PHV, etc.), motors for industrial equipment, and home appliances. It is used.

R-T-B系焼結磁石は、主としてR14B化合物からなる主相と、この主相の粒界部分に位置する粒界相とから構成されている。主相であるR14B化合物は高い飽和磁化と異方性磁界を持つ強磁性材料であり、R-T-B系焼結磁石の特性の根幹をなしている。 The RTB-based sintered magnet is composed of a main phase mainly composed of an R 2 T 14 B compound and a grain boundary phase located at the grain boundaries of this main phase. The R 2 T 14 B compound, which is the main phase, is a ferromagnetic material with high saturation magnetization and anisotropic magnetic field, and is the basis of the characteristics of RTB-based sintered magnets.

R-T-B系焼結磁石は、高温で保磁力HcJ(以下、単に「保磁力」又は「HcJ」という場合がある)が低下するため不可逆熱減磁が起こるという問題がある。そのため、特に電気自動車用モータに使用されるR-T-B系焼結磁石では、高温下でも高いHcJを有する、すなわち室温においてより高いHcJを有することが要求されている。 RTB-based sintered magnets have a problem in that irreversible thermal demagnetization occurs because the coercive force H cJ (hereinafter sometimes simply referred to as "coercive force" or "H cJ ") decreases at high temperatures. Therefore, RTB-based sintered magnets used particularly in electric vehicle motors are required to have high H cJ even at high temperatures, that is, to have higher H cJ at room temperature.

国際公開第2007/102391号International Publication No. 2007/102391 国際公開第2016/133071号International Publication No. 2016/133071 国際公開第2018/143230号International Publication No. 2018/143230 特開2019-169695号JP2019-169695

14B型化合物相中の軽希土類元素RLであるNdを重希土類元素(主にDy、Tb)で置換すると、HcJが向上することが知られている。しかし、R-T-B系焼結磁石において、軽希土類元素(主にNd、Pr)を重希土類元素で置換すると、HcJが向上する一方、R14B型化合物相の飽和磁化が低下するために残留磁束密度B(以下、単に「残留磁束密度」又は「B」という場合がある)が低下してしまうという問題がある。 It is known that when Nd, which is a light rare earth element RL in the R 2 T 14 B-type compound phase, is replaced with a heavy rare earth element (mainly Dy and Tb), H cJ is improved. However, in RTB-based sintered magnets, when light rare earth elements (mainly Nd and Pr) are replaced with heavy rare earth elements, H cJ improves, but the saturation magnetization of the R 2 T 14 B-type compound phase decreases. Therefore, there is a problem in that the residual magnetic flux density B r (hereinafter sometimes simply referred to as "residual magnetic flux density" or "B r ") decreases.

特許文献1には、R-T-B系合金の焼結磁石の表面にDy等の重希土類元素を供給しつつ、重希土類元素を焼結磁石の内部に拡散させることが記載されている。特許文献1に記載の方法は、R-T-B系焼結磁石の表面から内部にDyを拡散させてHcJ向上に効果的な主相結晶粒の外殻部にのみDyを濃化させることにより、Bの低下を抑制しつつ、高いHcJを得ることができる。
しかし、特にDyなどの重希土類元素は、資源存在量が少ないうえ、産出地が限定されているなどの理由から、供給が安定しておらず、価格が大きく変動するなどの問題を有している。そのため、近年、重希土類元素をできるだけ使用することなく、HcJを向上させることが求められている。
Patent Document 1 describes that a heavy rare earth element such as Dy is supplied to the surface of a sintered magnet made of an RTB alloy, and the heavy rare earth element is diffused into the inside of the sintered magnet. The method described in Patent Document 1 diffuses Dy from the surface of the RTB-based sintered magnet into the interior, and concentrates Dy only in the outer shell of the main phase crystal grains, which is effective for improving H cJ . By doing so, high H cJ can be obtained while suppressing a decrease in B r .
However, heavy rare earth elements such as Dy in particular have problems such as unstable supply and large fluctuations in price due to the limited amount of resources and limited production areas. There is. Therefore, in recent years, it has been desired to improve H cJ without using heavy rare earth elements as much as possible.

例えば、特許文献2には、通常よりもB量が低い(R14B化合物の化学量論比を下回る)R-T-B系焼結体の表面に特定組成のR-Ga-Cu合金を接触させて450℃以上600℃以下の温度で熱処理を行うことにより、R-T-B系焼結磁石中の粒界相の組成および厚さを制御してHcJを向上させることが記載されている。 For example, in Patent Document 2, R-Ga-Cu of a specific composition is coated on the surface of an R-T-B based sintered body with a lower amount of B than usual (below the stoichiometric ratio of the R 2 T 14 B compound). By bringing the alloys into contact and performing heat treatment at a temperature of 450°C or higher and 600°C or lower, H cJ can be improved by controlling the composition and thickness of the grain boundary phase in the RTB sintered magnet. Are listed.

また、例えば、特許文献3には、特定組成のR1-T-B系焼結磁石素材(R1は希土類元素のうち少なくとも一種であり、Nd及びPrの少なくとも一方を必ず含む)、とR2-Ga合金(R2は、希土類元素のうち少なくとも二種であり、Tb及びDyの少なくとも一方、並びに、Pr及びNdの少なくとも一方を必ず含む)を準備し、焼結磁石素材表面の少なくとも一部にR2-Ga合金の少なくとも一部を接触させ、特定の温度で第一の熱処理を実施する拡散工程と、特定の温度で、第二の熱処理を実施する工程を適用することにより、重希土類元素の使用量を低減しつつ、更に高いBと高いHcJを有するR-T-B系焼結磁石を提供できることが示されている。また、特許文献4には、拡散プロセスにおける焼結体表面への金属溜り抑制のために、拡散合金の表面にR―OH相を形成する提案がなされている。 Further, for example, Patent Document 3 describes an R1-T-B sintered magnet material with a specific composition (R1 is at least one kind of rare earth element, and always includes at least one of Nd and Pr), and R2-Ga. An alloy (R2 is at least two rare earth elements, and always includes at least one of Tb and Dy, and at least one of Pr and Nd) is prepared, and at least a portion of the surface of the sintered magnet material is coated with R2- By applying a diffusion step of bringing at least a portion of the Ga alloy into contact and performing a first heat treatment at a specific temperature, and a step of performing a second heat treatment at a specific temperature, the amount of heavy rare earth elements used can be reduced. It has been shown that it is possible to provide an RTB based sintered magnet having higher B r and higher H cJ while reducing the . Further, Patent Document 4 proposes forming an R--OH phase on the surface of a diffusion alloy in order to suppress metal accumulation on the surface of a sintered body during the diffusion process.

しかし、特許文献3に記載の拡散源用合金(R2-Ga合金)を用いた場合、拡散用合金が酸化や水酸化し、実効的な(焼結磁石素材に導入可能な)重希土類元素量が低下する場合があった。さらに特許文献4に記載の拡散合金を用いた場合も拡散合金の水酸化により実効的な重希土類元素量が低下する場合があった。また、近年、特に電気自動車用モータなどにおいて更に重希土類元素を出来るだけ使用することなく高いBと高いHcJを得ることが求められている。 However, when the diffusion source alloy (R2-Ga alloy) described in Patent Document 3 is used, the diffusion alloy is oxidized or hydroxylated, resulting in an effective amount of heavy rare earth elements (that can be introduced into the sintered magnet material). There were cases where the value decreased. Furthermore, even when the diffusion alloy described in Patent Document 4 is used, the effective amount of heavy rare earth elements sometimes decreases due to hydroxylation of the diffusion alloy. In addition, in recent years, there has been a demand for obtaining high B r and high H cJ without using heavy rare earth elements as much as possible, especially in motors for electric vehicles.

本開示の実施形態は、拡散用合金の酸化や水酸化にともなう実効的な(焼結磁石素材に導入可能な)重希土類元素の損失を抑制し、高いB及び高いHcJを有するR-T-B系焼結磁石の製造方法及び拡散用合金を提供する。 Embodiments of the present disclosure suppress the effective loss of heavy rare earth elements (which can be introduced into the sintered magnet material) due to oxidation and hydration of the diffusion alloy, and R- A method for manufacturing a TB-based sintered magnet and a diffusion alloy are provided.

本開示のR-T-B系焼結磁石の製造方法は、例示的な実施形態において、R1:27.5質量%以上35.0質量%以下(R1は希土類元素のうち少なくとも一種であり、Nd及びPrの少なくとも一方を必ず含む)、 B:0.80質量%以上0.99質量%以下、 Ga:0質量%以上0.8質量%以下、 M1:0質量%以上2.0質量%以下、(M1はCu、Al、Nb、Zrの少なくとも一種)、 T:60質量%以上(TはFe又はFeとCoであり、T全体に対するFeの含有量が85質量%以上である)、を含有するR1-T-B系焼結磁石素材を準備する工程と、R2-Y(イットリウム)―M2拡散用合金(R2は希土類元素(ただしYを除く)のうち少なくとも二種であり、Tb及びDyの少なくとも一方、並びに、Pr及びNdの少なくとも一方を必ず含み、M2は、Cu及びGaの少なくとも一方を必ず含む)を準備する工程と、前記R1-T-B系焼結磁石素材表面の少なくとも一部に、前記R2-Y―M2拡散用合金の少なくとも一部を接触させ、真空又は不活性ガス雰囲気中、700℃以上950℃以下の温度で熱処理を実施する拡散工程と、を含み、前記R2-Y-M2拡散用合金中のR2が75質量%以上98質量%以下であり、M2が1質量%以上25質量%以下であり、O(酸素:不可避不純物を含む)が0.2質量%以上1.0質量%以下であり、Yが0.4質量%以上0.6質量%以下である。 In an exemplary embodiment, the method for manufacturing an RTB-based sintered magnet of the present disclosure includes R1: 27.5% by mass or more and 35.0% by mass or less (R1 is at least one kind of rare earth element, B: 0.80% by mass or more and 0.99% by mass or less, Ga: 0% by mass or more and 0.8% by mass or less, M1: 0% by mass or more and 2.0% by mass Hereinafter, (M1 is at least one of Cu, Al, Nb, and Zr), T: 60% by mass or more (T is Fe or Fe and Co, and the content of Fe with respect to the entire T is 85% by mass or more), a step of preparing an R1-TB-based sintered magnet material containing R2-Y (yttrium)-M2 diffusion alloy (R2 is at least two rare earth elements (excluding Y), Tb and Dy, and at least one of Pr and Nd, and M2 always includes at least one of Cu and Ga); a diffusion step of contacting at least a portion of the R2-Y-M2 diffusion alloy and performing heat treatment at a temperature of 700° C. or higher and 950° C. or lower in a vacuum or an inert gas atmosphere; R2 in the R2-Y-M2 diffusion alloy is 75% by mass or more and 98% by mass or less, M2 is 1% by mass or more and 25% by mass or less, and O (oxygen: including inevitable impurities) is 0.2%. It is 1.0 mass% or less by mass%, and Y is 0.4 mass% or more and 0.6 mass% or less.

ある実施形態において、前記拡散工程後に、450℃以上750℃以下の温度、かつ拡散工程の熱処理温度よりも低い温度で熱処理を実施する低温熱処理工程を含む。 In one embodiment, after the diffusion step, a low-temperature heat treatment step is included in which heat treatment is performed at a temperature of 450° C. or higher and 750° C. or lower and lower than the heat treatment temperature of the diffusion step.

ある実施形態において、前記拡散工程後のR-T-B系焼結磁石表面を研削加工し、研削加工後のR-T-B系焼結磁石に対して、450℃以上750℃以下の温度、かつ拡散工程の熱処理温度よりも低い温度で熱処理を実施する低温熱処理工程を実施する。 In one embodiment, the surface of the RTB-based sintered magnet after the diffusion step is ground, and the RTB-based sintered magnet after the grinding is heated at a temperature of 450°C or more and 750°C or less. , and a low-temperature heat treatment step in which the heat treatment is performed at a temperature lower than the heat treatment temperature of the diffusion step.

ある実施形態において、前記R1-T-B系焼結磁石素材は下記式(1)を満足する、[T]/55.85>14×[B]/10.8 (1)
([T]は質量%で示すTの含有量であり、[B]は質量%で示すBの含有量である。
In one embodiment, the R1-TB-based sintered magnet material satisfies the following formula (1), [T]/55.85>14×[B]/10.8 (1)
([T] is the content of T expressed in % by mass, and [B] is the content of B expressed in % by mass.

ある実施形態において、前記R2-Y―M2拡散用合金のR2はPrを必ず含み、Prの含有量は、R2全体の50質量%以上である。 In one embodiment, R2 of the R2-Y-M2 diffusion alloy always contains Pr, and the content of Pr is 50% by mass or more of the entire R2.

ある実施形態において、前記R2-Y-M2拡散用合金におけるTb及びDyの少なくとも一方の含有量は、合計でR2全体の1質量%以上20質量%以下である。 In one embodiment, the total content of at least one of Tb and Dy in the R2-Y-M2 diffusion alloy is 1% by mass or more and 20% by mass or less of the entire R2.

ある実施形態において、前記R2-Y-M2系拡散用合金のM2はCu及びGaの両方を含む。 In one embodiment, M2 of the R2-Y-M2 diffusion alloy contains both Cu and Ga.

本開示のR2-Y-M2拡散用合金は、例示的な実施形態において、R2(希土類元素のうち少なくとも二種であり、Tb及びDyの少なくとも一方、並びに、Pr及びNdの少なくとも一方を必ず含む)、Y、M2(Cu及びGaの少なくとも一方を必ず含む)およびO(酸素)を必ず含み、R2が75質量%以上98質量%以下であり、M2量が1質量%以上25質量%以下であり、Yが0.4質量%以上0.6質量%以下であり、O(酸素:不可避不純物を含む)が0.2質量%以上1.0質量%以下であり、平均粒度が10μm以上500μm以下の粉末である。 In an exemplary embodiment, the R2-Y-M2 diffusion alloy of the present disclosure includes R2 (which is at least two rare earth elements, and necessarily includes at least one of Tb and Dy, and at least one of Pr and Nd). ), Y, M2 (always including at least one of Cu and Ga) and O (oxygen), R2 is 75% by mass or more and 98% by mass or less, and the amount of M2 is 1% by mass or more and 25% by mass or less. Yes, Y is 0.4% by mass or more and 0.6% by mass or less, O (oxygen: including inevitable impurities) is 0.2% by mass or more and 1.0% by mass or less, and the average particle size is 10 μm or more and 500 μm. The powder is as follows.

ある実施形態において、前記R2は、Prと、Tb及びDyの少なくとも一方とからなる。 In one embodiment, R2 consists of Pr and at least one of Tb and Dy.

本開示の実施形態によると、特定量のYを含むR2-Y―M2拡散用合金をR1-T-B系焼結磁石素材に接触させて特定の温度で熱処理することで、拡散用合金の酸化や水酸化にともなう実効的な重希土類元素(DyやTb)の損失を抑制し、高いB及び高いHcJを有するR-T-B系焼結磁石を得ることができる。 According to an embodiment of the present disclosure, by bringing an R2-Y-M2 diffusion alloy containing a specific amount of Y into contact with an R1-T-B sintered magnet material and heat-treating it at a specific temperature, the diffusion alloy It is possible to effectively suppress the loss of heavy rare earth elements (Dy and Tb) due to oxidation and hydroxidation, and obtain an RTB based sintered magnet having high B r and high H cJ .

R-T-B系焼結磁石の一部を拡大して模式的に示す断面図である。FIG. 2 is an enlarged cross-sectional view schematically showing a part of an RTB-based sintered magnet. 図2Aの破線矩形領域内を更に拡大して模式的に示す断面図である。FIG. 2B is a further enlarged cross-sectional view schematically showing the inside of the broken line rectangular area in FIG. 2A. 本開示によるR-T-B系焼結磁石の製造方法における工程の例を示すフローチャートである。1 is a flowchart illustrating an example of steps in a method for manufacturing an RTB-based sintered magnet according to the present disclosure.

まず、本開示によるR-T-B系焼結磁石の基本構造について説明をする。R-T-B系焼結磁石は、原料合金の粉末粒子が焼結によって結合した構造を有しており、主としてR14B化合物からなる主相と、この主相の粒界部分に位置する粒界相とから構成されている。 First, the basic structure of the RTB-based sintered magnet according to the present disclosure will be explained. RTB-based sintered magnets have a structure in which powder particles of a raw material alloy are bonded together by sintering, with a main phase mainly consisting of R 2 T 14 B compounds and grain boundaries of this main phase. It is composed of a grain boundary phase.

図1Aは、R-T-B系焼結磁石の一部を拡大して模式的に示す断面図であり、図1Bは図1Aの破線矩形領域内を更に拡大して模式的に示す断面図である。図1Aには、一例として長さ5μmの矢印が大きさを示す基準の長さとして参考のために記載されている。図1A及び図1Bに示されるように、R-T-B系焼結磁石は、主としてR14B化合物からなる主相12と、主相12の粒界部分に位置する粒界相14とから構成されている。また、粒界相14は、図1Bに示されるように、2つのR14B化合物粒子(グレイン)が隣接する二粒子粒界相14aと、3つのR14B化合物粒子が隣接する粒界三重点14bとを含む。典型的な主相結晶粒径は磁石断面の円相当径の平均値で2μm以上10μm以下である。主相12であるR14B化合物は高い飽和磁化と異方性磁界を持つ強磁性材料である。
したがって、R-T-B系焼結磁石では、主相12であるR14B化合物の存在比率を高めることによってBを向上させることができる。R14B化合物の存在比率を高めるためには、原料合金中のR量、T量、B量を、R14B化合物の化学量論比(R量:T量:B量=2:14:1)に近づければよい。
FIG. 1A is an enlarged schematic cross-sectional view of a part of the RTB-based sintered magnet, and FIG. 1B is a further enlarged schematic cross-sectional view of the rectangular area indicated by the broken line in FIG. 1A. It is. In FIG. 1A, as an example, an arrow having a length of 5 μm is shown as a standard length indicating the size for reference. As shown in FIGS. 1A and 1B, the RTB-based sintered magnet has a main phase 12 mainly composed of R 2 T 14 B compounds, and a grain boundary phase 14 located at the grain boundary portion of the main phase 12. It is composed of. Further, as shown in FIG. 1B, the grain boundary phase 14 includes a two-grain grain boundary phase 14a in which two R 2 T 14 B compound particles (grains) are adjacent to each other, and a two-grain boundary phase 14a in which three R 2 T 14 B compound particles are adjacent to each other. grain boundary triple point 14b. A typical main phase crystal grain size is 2 μm or more and 10 μm or less as an average value of the equivalent circle diameter of the magnet cross section. The R 2 T 14 B compound, which is the main phase 12, is a ferromagnetic material with high saturation magnetization and an anisotropic magnetic field.
Therefore, in the RTB-based sintered magnet, B r can be improved by increasing the abundance ratio of the R 2 T 14 B compound, which is the main phase 12. In order to increase the abundance ratio of the R 2 T 14 B compound, the amount of R, the amount of T, and the amount of B in the raw material alloy are adjusted to the stoichiometric ratio of the R 2 T 14 B compound (R amount: T amount: B amount = 2:14:1).

本発明者らは、検討の結果、特許文献3に記載されているR2-Ga合金のような希土類系の合金を用いる場合、希土類元素が活性であることから、合金作製時や焼結磁石素材塗布後の熱処理時に、合金が雰囲気中のO(酸素)と不可避的に反応し、希土類元素の一部が酸化物や水酸化物となる。そして、このとき形成される希土類酸化物や水酸化物は、DyやTbなどの重希土類がNdやPrなどの軽希土類よりも優先的に取り込まれてしまい、その結果、R1-T-B焼結磁石素材内部に拡散導入する実効的な重希土類量が低下してしまう場合があることがわかった。また、特許文献4も同様に、拡散源の表面に形成されるR-OH層により、R1-T-B焼結磁石素材内部に拡散導入する実効的な重希土類量が低下してしまう場合があることがわかった。
本発明者らはさらに検討の結果、拡散合金にYを特定の狭い範囲で含有させることにより、形成される希土類酸化物や水酸化物にDyやTbなどの重希土類よりもYを優先的に取り込ませることができ、更に、R-T-B系焼結磁石へYが導入されることによる磁気特性の低下を抑制できることを見出した。これにより拡散用合金の酸化や水酸化にともなう実効的な重希土類元素の損失を抑制することができ、高いB及び高いHcJを有するR-T-B系焼結磁石の製造方法及び拡散用合金を提供することができる。
As a result of study, the present inventors found that when using a rare earth alloy such as the R2-Ga alloy described in Patent Document 3, since rare earth elements are active, it is necessary to During heat treatment after coating, the alloy inevitably reacts with O (oxygen) in the atmosphere, and some of the rare earth elements become oxides or hydroxides. In the rare earth oxides and hydroxides formed at this time, heavy rare earths such as Dy and Tb are taken in preferentially over light rare earths such as Nd and Pr, and as a result, R1-T-B sintering occurs. It has been found that the effective amount of heavy rare earths that can be diffused and introduced into the solid magnet material may be reduced. Similarly, Patent Document 4 also shows that the R-OH layer formed on the surface of the diffusion source may reduce the effective amount of heavy rare earths that can be diffused and introduced into the R1-TB sintered magnet material. I found out something.
As a result of further studies, the present inventors found that by containing Y in a specific narrow range in the diffusion alloy, Y is preferentially contained in the formed rare earth oxides and hydroxides over heavy rare earths such as Dy and Tb. It has been found that it is possible to incorporate Y into the RTB sintered magnet, and furthermore, it is possible to suppress the deterioration of the magnetic properties due to the introduction of Y into the RTB sintered magnet. This makes it possible to effectively suppress the loss of heavy rare earth elements due to oxidation and hydroxidation of the diffusion alloy, and the method for producing and diffusing RTB-based sintered magnets having high Br and high H cJ . can provide alloys for

本開示によるR-T-B系焼結磁石の製造方法は、図2に示すように、R1-T-B系焼結磁石素材を準備する工程S10とR2-Y-M2拡散用合金を準備する工程S20とを含む。R1-T-B系焼結磁石素材を準備する工程S10とR2-Y-M2拡散用合金を準備する工程S20との順序は任意である。 As shown in FIG. 2, the method for manufacturing an RTB-based sintered magnet according to the present disclosure includes a step S10 of preparing an R1-T-B-based sintered magnet material, and a step S10 of preparing an R2-Y-M2 diffusion alloy. Step S20 of doing so. The order of the step S10 of preparing the R1-TB-based sintered magnet material and the step S20 of preparing the R2-Y-M2 diffusion alloy is arbitrary.

本開示によるR-T-B系焼結磁石の製造方法は、図2に示すように、更に、R1-T-B系焼結磁石素材表面の少なくとも一部に前記R2-Y―M2拡散用合金の少なくとも一部を接触させ、真空又は不活性ガス雰囲気中、700℃以上950℃以下の温度で熱処理を実施する拡散工程S30を含む。また、好ましくは、前記拡散工程後に、450℃以上750℃以下の温度、かつ拡散工程の熱処理温度よりも低い温度で熱処理を実施する低温熱処理工程S40を含む。また、更に好ましくは、拡散工程S30と、低温熱処理工程S40との間に、R-T-B系焼結磁石表面を加工する研削工程を含む。すなわち、前記拡散工程後のR-T-B系焼結磁石表面を研削加工し、研削加工後のR-T-B系焼結磁石に対して前記低温熱処理工程を実施する。 As shown in FIG. 2, the method for manufacturing an RTB-based sintered magnet according to the present disclosure further includes at least a portion of the surface of the R1-T-B-based sintered magnet material for the R2-Y-M2 diffusion. The method includes a diffusion step S30 of bringing at least a portion of the alloy into contact with each other and performing heat treatment at a temperature of 700° C. or more and 950° C. or less in a vacuum or an inert gas atmosphere. Preferably, after the diffusion step, a low-temperature heat treatment step S40 is included in which heat treatment is performed at a temperature of 450° C. or higher and 750° C. or lower and lower than the heat treatment temperature of the diffusion step. Furthermore, more preferably, a grinding step for processing the surface of the RTB-based sintered magnet is included between the diffusion step S30 and the low-temperature heat treatment step S40. That is, the surface of the RTB-based sintered magnet after the diffusion step is ground, and the low-temperature heat treatment step is performed on the RTB-based sintered magnet after the grinding.

(R1-T-B系焼結磁石素材とR-T-B系焼結磁石)
本開示において、拡散工程前及び拡散工程中のR-T-B系焼結磁石を「R1-T-B系焼結磁石素材」と称し、拡散工程後のR-T-B系焼結磁石を単に「R-T-B系焼結磁石」と称する。
(R-T-Ga相)
R-T-Ga相とは、R、T及びGaを含む化合物であり、その典型例は、R13Ga化合物である。また、R13Ga化合物は、LaCo11Ga型結晶構造を有する。R13Ga化合物は、R13-δGa1+δ化合物の状態にある場合があり得る。R-T-B系焼結磁石中にCu、Al及びSiが含有される場合、R-T-Ga相はR13-δ(Ga1-x-y-zCuAlSi1+δであり得る。
(R1-T-B series sintered magnet material and RTB series sintered magnet)
In the present disclosure, the RTB-based sintered magnet before and during the diffusion process is referred to as "R1-T-B-based sintered magnet material," and the RTB-based sintered magnet after the diffusion process is referred to as "R1-T-B-based sintered magnet material." is simply referred to as "RTB-based sintered magnet."
(RT-Ga phase)
The RT-Ga phase is a compound containing R, T, and Ga, and a typical example thereof is an R 6 T 13 Ga compound. Further, the R 6 T 13 Ga compound has a La 6 Co 11 Ga 3 type crystal structure. The R 6 T 13 Ga compound may be in the form of an R 6 T 13-δ Ga 1+δ compound. When Cu, Al, and Si are contained in the RTB-based sintered magnet, the RT-Ga phase is R 6 T 13-δ (Ga 1-xy-z Cu x Al y Si z ) can be 1+δ .

[R1-T-B系焼結磁石素材を準備する工程]
R1-T-B系焼結磁石素材の組成
(R1)
R1の含有量は27.5質量%以上35.0質量%以下である。R1は希土類元素のうち少なくとも一種であり、Nd及びPrの少なくとも一方を必ず含む。R1が27.5質量%未満では焼結過程で液相が十分に生成せず、焼結体を充分に緻密化することが困難になる。一方、Rが35.0質量%を超えると焼結時に粒成長が起こりHcJが低下する。R1は28質量%以上33質量%以下であることが好ましく、29質量%以上33質量%以下であることがさらに好ましい。
(B)
Bの含有量は、0.80質量%以上0.99質量%以下である。Bの含有量が0.80質量%未満であるとBが低下する可能性があり、0.99質量%を超えるとHcJが低下する可能性がある。また、Bの一部はCで置換できる。
(Ga)
R1-T-B系焼結磁石素材におけるGaの含有量は、0質量%以上0.8質量%以下である。Gaの含有量が0.8質量%を超えると、主相中にGaが含有することで主相の磁化が低下し、高いBを得ることができない可能性がある。好ましくはGaの含有量は、0.5質量%以下である。より高いBを得ることができる。
(M1)
M1の含有量は、0質量%以上2.0質量%以下である。M1はCu、Al、Nb、Zrの少なくとも一種であり、0質量%であっても本開示の効果を奏することができるが、Cu、Al、Nb、Zrの合計で2.0質量%以下含有することができる。Cu、Alを含有することによりHcJを向上させることができる。Cu、Alは積極的に添加してもよいし、使用原料や合金粉末の製造過程において不可避的に導入されるものを活用してもよい(不純物としてCu、Alを含有する原料を使用してもよい)。また、Nb、Zrを含有することにより焼結時における結晶粒の異常粒成長を抑制することができる。M1は好ましくは、Cuを必ず含み、Cuを0.05質量%以上0.30質量%以下含有する。Cuを0.05質量%以上0.30質量%以下含有することにより、よりHcJを向上させることができるからである。
(T)
Tの含有量は、60質量%以上である。Tの含有量が60質量%未満であると大幅にB及びHcJが低下する可能性がある。TはFe又はFeとCoであり、T全体に対するFeの含有量が85質量%以上である。Feの含有量が85質量%未満であると、BおよびHcJが低下する可能性がある。ここで、「T全体に対するFeの含有量が85質量%以上」とは、例えばR1-T-B系焼結磁石素材におけるTの含有量が75質量%である場合、R1-T-B系焼結磁石素材の63.7質量%以上がFeであることを言う。好ましくはT全体に対するFeの含有量は90質量%以上である。より高いBと高いHcJを得ることができるからである。また、Feの一部をCoで置換することができる。但し、Coの置換量が、質量比でT全体の10%を超えるとBが低下するため好ましくない。さらに、本開示のR1-T-B系焼結磁石素材は、上記元素の他にAg、Zn、In、Sn、Ti、Ni、Hf、Ta、W、Ge、Mo、V、Y、La、Ce、Sm、Ca、Mg、Cr、H、F、P、S、Cl、O、N、C等を含有してもよい。含有量は、Ni、Ag、Zn、In、Sn、およびTiはそれぞれ0.5mass%以下、Hf、Ta、W、Ge、Mo、V、Y、La、Ce、Sm、Ca、Mg、Crはそれぞれ0.2mass%以下、H、F、P、S、Clは500ppm以下、Oは6000ppm以下、Nは1000ppm以下、Cは1500ppm以下が好ましい。これらの元素の合計の含有量は、R1-T-B系焼結磁石素材全体の5質量%以下が好ましい。これらの元素の合計の含有量がR1-T-B系焼結素材全体の5質量%を超えると高いBと高いHcJを得ることができない可能性がある。
[Process of preparing R1-T-B sintered magnet material]
Composition of R1-T-B sintered magnet material (R1)
The content of R1 is 27.5% by mass or more and 35.0% by mass or less. R1 is at least one kind of rare earth element and always includes at least one of Nd and Pr. If R1 is less than 27.5% by mass, a sufficient liquid phase will not be generated during the sintering process, making it difficult to sufficiently densify the sintered body. On the other hand, when R exceeds 35.0% by mass, grain growth occurs during sintering and H cJ decreases. R1 is preferably 28% by mass or more and 33% by mass or less, more preferably 29% by mass or more and 33% by mass or less.
(B)
The content of B is 0.80% by mass or more and 0.99% by mass or less. If the B content is less than 0.80% by mass, B r may decrease, and if it exceeds 0.99% by mass, H cJ may decrease. Further, a part of B can be replaced with C.
(Ga)
The Ga content in the R1-T-B series sintered magnet material is 0% by mass or more and 0.8% by mass or less. When the Ga content exceeds 0.8% by mass, the magnetization of the main phase decreases due to the presence of Ga in the main phase, and there is a possibility that high Br cannot be obtained. Preferably, the Ga content is 0.5% by mass or less. Higher B r can be obtained.
(M1)
The content of M1 is 0% by mass or more and 2.0% by mass or less. M1 is at least one of Cu, Al, Nb, and Zr, and even if it is 0% by mass, the effects of the present disclosure can be achieved, but the total content of Cu, Al, Nb, and Zr is 2.0% by mass or less. can do. By containing Cu and Al, H cJ can be improved. Cu and Al may be actively added, or they may be introduced unavoidably in the raw materials used or in the manufacturing process of alloy powder (using raw materials containing Cu and Al as impurities). good). Further, by containing Nb and Zr, abnormal grain growth of crystal grains during sintering can be suppressed. Preferably, M1 always includes Cu, and contains Cu of 0.05% by mass or more and 0.30% by mass or less. This is because by containing Cu from 0.05% by mass to 0.30% by mass, H cJ can be further improved.
(T)
The content of T is 60% by mass or more. If the T content is less than 60% by mass, B r and H cJ may decrease significantly. T is Fe or Fe and Co, and the content of Fe with respect to the entire T is 85% by mass or more. If the Fe content is less than 85% by mass, B r and H cJ may decrease. Here, "the content of Fe with respect to the entire T is 85% by mass or more" means, for example, when the content of T in the R1-TB series sintered magnet material is 75% by mass, the R1-TB series This means that 63.7% by mass or more of the sintered magnet material is Fe. Preferably, the Fe content based on the entire T is 90% by mass or more. This is because higher B r and higher H cJ can be obtained. Further, a part of Fe can be replaced with Co. However, if the amount of Co substitution exceeds 10% of the total T in terms of mass ratio, it is not preferable because Br decreases. Furthermore, in addition to the above-mentioned elements, the R1-TB-based sintered magnet material of the present disclosure also contains Ag, Zn, In, Sn, Ti, Ni, Hf, Ta, W, Ge, Mo, V, Y, La, It may contain Ce, Sm, Ca, Mg, Cr, H, F, P, S, Cl, O, N, C, etc. The content is 0.5 mass% or less for each of Ni, Ag, Zn, In, Sn, and Ti, and 0.5 mass% or less for Hf, Ta, W, Ge, Mo, V, Y, La, Ce, Sm, Ca, Mg, and Cr. It is preferable that each of them is 0.2 mass% or less, H, F, P, S, and Cl are 500 ppm or less, O is 6000 ppm or less, N is 1000 ppm or less, and C is 1500 ppm or less. The total content of these elements is preferably 5% by mass or less of the entire R1-TB sintered magnet material. If the total content of these elements exceeds 5% by mass of the entire R1-T-B sintered material, it may not be possible to obtain high B r and high H cJ .

(式(1))
[T]/55.85>14×[B]/10.8 (1)
ここで、[T]はTの含有量(質量%)、[B]はBの含有量(質量%)である。
好ましくは、R1-T-B系焼結磁石素材の組成が式(1)を満足する。式(1)を満足することにより、最終的に得られるR-T-B系焼結磁石の粒界にR-T-Ga相が生成されて高いHcJを得ることができる。式(1)を満足することで、Bの含有量が一般的なR-T-B系焼結磁石よりも少なくなる。一般的なR-T-B系焼結磁石は、主相であるR14B相以外にFe相やR17相が生成しないよう[T]/55.85(Feの原子量)が14×[B]/10.8(Bの原子量)よりも少ない組成となっている([T]は質量%で示すTの含有量であり、[B]は質量%で示すBの含有量である)。本開示の好ましい実施形態におけるR1-T-B系焼結磁石素材は、一般的なR-T-B系焼結磁石と異なり、[T]/55.85(Feの原子量)が14×[B]/10.8(Bの原子量)よりも多くなるように不等式(1)で規定する。なお、本開示のR1-T-B系焼結磁石素材におけるTはFeが主成分であるためFeの原子量を用いた。
(Formula (1))
[T]/55.85>14×[B]/10.8 (1)
Here, [T] is the content of T (% by mass), and [B] is the content of B (% by mass).
Preferably, the composition of the R1-TB-based sintered magnet material satisfies formula (1). By satisfying formula (1), an RT-Ga phase is generated at the grain boundaries of the finally obtained RTB-based sintered magnet, and a high H cJ can be obtained. By satisfying formula (1), the B content is lower than that of a general RTB-based sintered magnet. Typical RTB system sintered magnets are manufactured using [T]/55.85 (atomic weight of Fe) to prevent the formation of Fe phase or R 2 T 17 phase other than the main phase R 2 T 14 B phase. is less than 14×[B]/10.8 (atomic weight of B) ([T] is the content of T expressed in mass%, [B] is the content of B expressed in mass% amount). The R1-T-B based sintered magnet material in a preferred embodiment of the present disclosure differs from a general RTB based sintered magnet in that [T]/55.85 (atomic weight of Fe) is 14×[ B]/10.8 (atomic weight of B) is defined by inequality (1). Note that since Fe is the main component of T in the R1-T-B series sintered magnet material of the present disclosure, the atomic weight of Fe was used.

R1-T-B系焼結磁石素材は、Nd-Fe-B系焼結磁石に代表される一般的なR-T-B系焼結磁石の製造方法を用いて準備することができる。一例を挙げると、ストリップキャスト法等で作製された原料合金を、ジェットミルなどを用い2μm以上10μm以下に粉砕した後、磁界中で成形し、900℃以上1100℃以下の温度で焼結することにより準備することができる。
原料合金の粉砕粒径(気流分散式レーザー回折法による測定で得られる体積中心値=D50)が2μm未満では粉砕粉を作製するのが非常に困難であり、生産効率が大幅に低下するため好ましくない。一方、粉砕粒径が10μmを超えると最終的に得られるR-T-B系焼結磁石の結晶粒径が大きくなり過ぎ、高いHcJを得ることが困難となるため好ましくない。R1-T-B系焼結磁石素材は、前記の各条件を満たしていれば、一種類の原料合金(単一原料合金)から作製してもよいし、二種類以上の原料合金を用いてそれらを混合する方法(ブレンド法)によって作製してもよい。
The R1-T-B sintered magnet material can be prepared using a common method for manufacturing R-T-B sintered magnets, typified by Nd-Fe-B sintered magnets. For example, a raw material alloy produced by a strip casting method or the like is pulverized to 2 μm or more and 10 μm or less using a jet mill, etc., then molded in a magnetic field, and sintered at a temperature of 900° C. or more and 1100° C. or less. It can be prepared by
If the pulverized particle size of the raw material alloy (volume center value obtained by measurement using air dispersion laser diffraction method = D 50 ) is less than 2 μm, it is extremely difficult to produce pulverized powder, and production efficiency will decrease significantly. Undesirable. On the other hand, if the pulverized particle size exceeds 10 μm, the crystal grain size of the finally obtained RTB sintered magnet becomes too large, making it difficult to obtain a high H cJ , which is not preferable. R1-T-B series sintered magnet material may be produced from one type of raw material alloy (single raw material alloy), as long as it satisfies each of the above conditions, or it may be produced using two or more types of raw material alloy. It may also be produced by a method of mixing them (blending method).

[R2-Y(イットリウム)―M2拡散用合金を準備する工程]
R2-Y-M2拡散用合金の組成
R2-Y-M2拡散用合金におけるR2は希土類元素(但しYを除く)のうち少なくとも二種であり、Tb及びDyの少なくとも一方、並びに、Pr及びNdの少なくとも一方を必ず含む。R2は、R2-Y-M2拡散用合金全体の75~98質量%である。R2の含有量が75質量%未満であると、R2の含有量が少なすぎて、最終的に得られたR-T-B系焼結磁石のHcJが低下する可能性があり、98質量%を超えると、Y及びM2の含有量が低下して、最終的に得られたR-T-B系焼結磁石のHcJが低下する可能性がある。より高いBと高いHcJを得るために、好ましくは、前記R2-Y―M2拡散用合金のR2はPrを必ず含み、Prの含有量は、R2全体の50質量%以上であり、R2-Y-M2拡散用合金におけるTb及びDyの少なくとも一方の含有量は、合計でR2全体の1質量%以上20質量%以下である。また、好ましくは、R2は、Prと、Tb及びDyの少なくとも一方とからなる。
本開示におけるもっとも特徴的な点の一つとして、拡散用合金にY(イットリウム)を0.4質量%以上0.6質量%以下含有する。Yを特定の狭い範囲で含有させることにより、拡散用合金が酸化することで形成される希土類酸化物や水酸化物にDyやTbなどの重希土類よりもYを優先的に取り込ませることができ、更に、R-T-B系焼結磁石へYが導入されることによる磁気特性の低下を抑制できる。これにより、拡散用合金の酸化や水酸化にともなう実効的な重希土類元素(DyやTb)の損失を抑制し、高いB及び高いHcJを有するR-T-B系焼結磁石を得ることができる。Yの含有量が0.4質量%未満であると、拡散用合金の酸化や水酸化にともなう実効的な重希土類元素(DyやTb)の損失を抑制することができず、HcJが低下する可能性があり、0.6質量%を超えると、R-T-B系焼結磁石に含有するYによりBやHcJが低下する可能性がある。
R2-Y-M2拡散用合金におけるM2はCu及びGaの少なくとも一方を必ず含む。M2は、R2-Y-M2拡散用合金全体の1質量%~25質量%である。M2の含有量が1質量%未満であると、HcJが低下する可能性があり、25質量%を超えるとBが低下する可能性がある。より高いHcJを得るために、好ましくは、前記R2-Y-M2系拡散用合金のM2はCu及びGaの両方を含む。
R2-Y-M2拡散用合金は、O(酸素:不可避不純物を含む)を含有し、Oの含有量は0.2質量%以上1.0質量%以下である。Oの含有量が0.2質量%未満であると、YとOとの酸化物や水酸化物が形成されにくくなり、R-T-B系焼結磁石におけるYの含有量が増加してHcJが低下する可能性があり、1.0質量%超では、R1-T-B系焼結磁石におけるOの含有量が増加してB及びHcJが低下する可能性がある。
[Process of preparing R2-Y (yttrium)-M2 diffusion alloy]
Composition of R2-Y-M2 diffusion alloy R2 in the R2-Y-M2 diffusion alloy is at least two rare earth elements (excluding Y), at least one of Tb and Dy, and Pr and Nd. Must include at least one. R2 is 75 to 98% by mass of the entire R2-Y-M2 diffusion alloy. If the R2 content is less than 75% by mass, the R2 content may be too small and the H cJ of the finally obtained RTB-based sintered magnet may decrease, and the R2 content may be lower than 98% by mass. %, the contents of Y and M2 may decrease, and the H cJ of the finally obtained RTB-based sintered magnet may decrease. In order to obtain higher B r and higher H cJ , preferably, R2 of the R2-Y-M2 diffusion alloy always contains Pr, and the content of Pr is 50% by mass or more of the entire R2, and R2 The total content of at least one of Tb and Dy in the -Y-M2 diffusion alloy is 1% by mass or more and 20% by mass or less of the entire R2. Preferably, R2 consists of Pr and at least one of Tb and Dy.
One of the most characteristic features of the present disclosure is that the diffusion alloy contains 0.4% by mass or more and 0.6% by mass or less of Y (yttrium). By containing Y in a specific narrow range, Y can be preferentially incorporated into rare earth oxides and hydroxides formed by oxidation of the diffusion alloy over heavy rare earths such as Dy and Tb. Furthermore, it is possible to suppress the deterioration of magnetic properties due to the introduction of Y into the RTB sintered magnet. As a result, effective loss of heavy rare earth elements (Dy and Tb) due to oxidation and hydration of the diffusion alloy is suppressed, and an RTB-based sintered magnet with high B r and high H cJ is obtained. be able to. If the Y content is less than 0.4% by mass, it will not be possible to effectively suppress the loss of heavy rare earth elements (Dy and Tb) due to oxidation and hydration of the diffusion alloy, resulting in a decrease in H cJ . If it exceeds 0.6% by mass, Y contained in the RTB sintered magnet may lower B r and H cJ .
M2 in the R2-Y-M2 diffusion alloy always contains at least one of Cu and Ga. M2 is 1% to 25% by mass of the entire R2-Y-M2 diffusion alloy. If the M2 content is less than 1% by mass, H cJ may decrease, and if it exceeds 25% by mass, B r may decrease. In order to obtain higher H cJ , M2 of the R2-Y-M2 diffusion alloy preferably contains both Cu and Ga.
The R2-Y-M2 diffusion alloy contains O (oxygen: including inevitable impurities), and the content of O is 0.2% by mass or more and 1.0% by mass or less. When the content of O is less than 0.2% by mass, oxides and hydroxides of Y and O are difficult to form, and the content of Y in the RTB sintered magnet increases. H cJ may decrease, and if it exceeds 1.0 mass %, the content of O in the R1-T-B sintered magnet may increase and B r and H cJ may decrease.

R2-Y-M2拡散用合金は、平均粒径が10μm以上500μm以下の粉末である。平均粒径が10μm未満であると、拡散用合金の酸化や水酸化が進行しすぎて、B及びHcJが低下する可能性があり、500μmを超えるとR1-T-B系焼結磁石素材への拡散が不十分となり、高いHcJが得られない可能性がある。好ましくは、R2-Y-M2拡散用合金の平均粒径は100μm以上300μm以下である。
本開示における平均粒度はJIS Z 8801の標準ふるいによって分級することによって調整すればよい。また、本開示における平均粒度は、JISZ8801に記載の標準ふるいによる分級の他、その粒度に応じて、例えば顕微鏡観察、市販の粒度分布測定装置(例えば、マイクロトラック・ベル社製レーザー回折・散乱式 粒子径分布測定装置等)等によって測定することができる。
The R2-Y-M2 diffusion alloy is a powder with an average particle size of 10 μm or more and 500 μm or less. If the average particle size is less than 10 μm, the oxidation and hydroxylation of the diffusion alloy may progress too much, resulting in a decrease in B r and H cJ , and if it exceeds 500 μm, the R1-T-B sintered magnet Diffusion into the material may become insufficient and high H cJ may not be obtained. Preferably, the average particle size of the R2-Y-M2 diffusion alloy is 100 μm or more and 300 μm or less.
The average particle size in the present disclosure may be adjusted by classification using a standard sieve according to JIS Z 8801. In addition to classification using a standard sieve as described in JIS Z8801, the average particle size in the present disclosure may be determined by, for example, microscopic observation, a commercially available particle size distribution measuring device (for example, Microtrac Bell's laser diffraction/scattering type It can be measured using a particle size distribution measuring device, etc.).

R2-Y-M2拡散用合金は、一般的なR-T-B系焼結磁石の製造方法において採用されている原料合金の作製方法、例えば、金型鋳造法やストリップキャスト法や単ロール超急冷法(メルトスピニング法)やアトマイズ法などを用いて準備することができる。また、R2-Y-M2拡散用合金は、前記によって得られた合金をピンミルなどの公知の粉砕手段によって粉砕されたものであってもよい。 The R2-Y-M2 diffusion alloy is manufactured using the raw material alloy manufacturing methods that are used in general RTB sintered magnet manufacturing methods, such as die casting, strip casting, and single-roll casting. It can be prepared using a rapid cooling method (melt spinning method), an atomization method, or the like. Further, the R2-Y-M2 diffusion alloy may be obtained by pulverizing the alloy obtained above using a known pulverizing means such as a pin mill.

特許文献4に記載されているように、R2-T-M2拡散用合金の粉末粒子表面に平均厚さが0.5μm以上3μm以下のR-OH層を形成させてもよい。R-OH層を形成させることにより、拡散後にR-T-B系焼結磁石表面に金属溜りが発生することを抑えることができる。また粉末を燃えにくくして取り扱いを容易にすることが可能となる。R-OH層は、たとえば、R2-T-M2拡散用合金を温度20℃以上150℃以下、相対湿度60%以上100%以下の雰囲気にさらすことにより形成させることができる。 As described in Patent Document 4, an R-OH layer having an average thickness of 0.5 μm or more and 3 μm or less may be formed on the surface of the powder particles of the R2-T-M2 diffusion alloy. By forming the R-OH layer, it is possible to suppress the occurrence of metal accumulation on the surface of the RTB-based sintered magnet after diffusion. It also becomes possible to make the powder less flammable and easier to handle. The R-OH layer can be formed, for example, by exposing the R2-T-M2 diffusion alloy to an atmosphere with a temperature of 20° C. or more and 150° C. or less and a relative humidity of 60% or more and 100% or less.

[拡散工程]
前記R1-T-B系焼結磁石素材表面の少なくとも一部に、前記R2-Y―M2拡散用合金の少なくとも一部を接触させ、真空又は不活性ガス雰囲気中、700℃以上950℃以下の温度で熱処理を実施する。これにより、R2-Y-M2拡散用合金からR2、Y及びM2を含む液相が生成し、その液相がR1-T-B系焼結磁石素材中の粒界を経由して焼結素材表面から内部に拡散導入される。熱処理温度が700℃未満であると、R2、Y及びM2を含む液相量が少なすぎて高いHcJを得ることが出来ない可能性があり、950℃を超えるとHcJが低下する可能性がある。また、好ましくは、拡散工程は、700℃以上950℃以下の温度で熱処理が実施されたR1-T-B系焼結磁石素材を前記熱処理を実施した温度から5℃/分以上の冷却速度で300℃まで冷却する工程を含む。より高いHcJを得ることができる。さらに好ましくは、300℃までの冷却速度は15℃/分以上である。
[Diffusion process]
At least a part of the R2-Y-M2 diffusion alloy is brought into contact with at least a part of the surface of the R1-T-B sintered magnet material, and the temperature is set at 700°C or more and 950°C or less in a vacuum or an inert gas atmosphere. Heat treatment is carried out at temperature. As a result, a liquid phase containing R2, Y, and M2 is generated from the R2-Y-M2 diffusion alloy, and the liquid phase passes through the grain boundaries in the R1-T-B sintered magnet material to the sintered material. It is diffused into the interior from the surface. If the heat treatment temperature is less than 700°C, the amount of liquid phase containing R2, Y and M2 may be too small to obtain high H cJ , and if it exceeds 950°C, H cJ may decrease. There is. Preferably, in the diffusion step, the R1-T-B sintered magnet material, which has been heat-treated at a temperature of 700°C or more and 950°C or less, is cooled at a cooling rate of 5°C/min or more from the temperature at which the heat treatment was performed. It includes a step of cooling to 300°C. Higher H cJ can be obtained. More preferably, the cooling rate to 300°C is 15°C/min or more.

拡散工程は、R1-T-B系焼結磁石素材表面に、R2-Y-M2拡散用合金を配置し、公知の熱処理装置を用いて行うことができる。例えば、R1-T-B系焼結磁石素材表面をR2-Y-M2拡散用合金の粉末層で覆い熱処理を行うことができる。例えば、R2-Y-M2拡散用合金を分散媒中に分散させたスラリーをR1-T-B系焼結磁石素材表面に塗布した後、分散媒を蒸発させR2-Y-M2拡散用合金とR1-T-B系焼結磁石素材とを接触させてもよい。なお、分散媒として、アルコール(エタノール等)、アルデヒド及びケトンを例示できる。また、RHは、R2-Y-M2拡散用合金からだけでなく、R2-Y-M2拡散用合金と共にRHのフッ化物、酸化物、酸フッ化物等をR1-T-B系焼結磁石表面に配置することにより重希土類元素を導入してもよい。すなわち、R2(Dy及びTbの少なくとも一方、並びに、Nd及びPrの少なくとも一方)とYとM2を同時に拡散させることができればその方法は特に問わない。重希土類元素のフッ化物、酸化物、酸フッ化物としては、例えば、TbF、DyF、Tb、Dy、TbOF、DyOFが挙げられる。
またR2-Y-M2拡散用合金は、R2-Y-M2拡散用合金の少なくとも一部がR1-T-B系焼結磁石素材の少なくとも一部に接触していれば、その配置位置は特に問わない。
[低温熱処理工程]
好ましくは、前記拡散工程後に、450℃以上750℃以下の温度、かつ拡散工程の熱処理温度よりも低い温度で熱処理を実施する低温熱処理工程を行う。これにより、さらに高いHcJを得ることが出来る。450℃未満及び750℃を超える場合は、高いHcJを得ることができない可能性がある。また、さらに好ましくは、拡散工程後のR-T-B系焼結磁石表面を研削加工し、研削加工後のR-T-B系焼結磁石に対して低温熱処理工程を実施する。これは、拡散工程と低温熱処理工程との間に、R-T-B系焼結磁石表面を加工する研削工程を行うことによって実施し得る。拡散工程後のR-T-B系焼結磁石の磁石表面には、Yを含む酸化物及び水酸化物が存在している。磁石表面を研削することにより、Yを含む酸化物及び水酸化物を磁石から取り除くことができ、より確実にR-T-B系焼結磁石へYが導入されることによる磁気特性の低下を抑制できる。
The diffusion step can be performed by placing an R2-Y-M2 diffusion alloy on the surface of the R1-TB sintered magnet material and using a known heat treatment device. For example, the surface of the R1-TB sintered magnet material can be covered with a powder layer of an R2-Y-M2 diffusion alloy and subjected to heat treatment. For example, after applying a slurry in which the R2-Y-M2 diffusion alloy is dispersed in a dispersion medium to the surface of the R1-T-B sintered magnet material, the dispersion medium is evaporated to form the R2-Y-M2 diffusion alloy. It may also be brought into contact with an R1-T-B series sintered magnet material. In addition, alcohol (ethanol etc.), an aldehyde, and a ketone can be illustrated as a dispersion medium. In addition, RH is not only obtained from the R2-Y-M2 diffusion alloy, but also fluorides, oxides, oxyfluorides, etc. of RH are added to the surface of the R1-T-B sintered magnet together with the R2-Y-M2 diffusion alloy. A heavy rare earth element may be introduced by placing it in That is, as long as R2 (at least one of Dy and Tb and at least one of Nd and Pr), Y and M2 can be diffused at the same time, the method is not particularly limited. Examples of fluorides, oxides, and oxyfluorides of heavy rare earth elements include TbF 3 , DyF 3 , Tb 2 O 3 , Dy 2 O 3 , Tb 4 OF, and Dy 4 OF.
In addition, as long as at least a part of the R2-Y-M2 diffusion alloy is in contact with at least a part of the R1-T-B sintered magnet material, the placement position of the R2-Y-M2 diffusion alloy is particularly limited. No question.
[Low temperature heat treatment process]
Preferably, after the diffusion step, a low-temperature heat treatment step is performed in which heat treatment is performed at a temperature of 450° C. or higher and 750° C. or lower and lower than the heat treatment temperature of the diffusion step. Thereby, even higher H cJ can be obtained. If the temperature is lower than 450°C or higher than 750°C, it may not be possible to obtain high H cJ . More preferably, the surface of the RTB sintered magnet after the diffusion process is ground, and the ground RTB sintered magnet is subjected to a low temperature heat treatment process. This can be carried out by performing a grinding process to process the surface of the RTB based sintered magnet between the diffusion process and the low temperature heat treatment process. Y-containing oxides and hydroxides are present on the magnet surface of the RTB-based sintered magnet after the diffusion process. By grinding the magnet surface, oxides and hydroxides containing Y can be removed from the magnet, which more reliably prevents the deterioration of magnetic properties due to the introduction of Y into the RTB sintered magnet. It can be suppressed.

本開示の実施形態を実施例によりさらに詳細に説明するが、実施例に限定されるものではない。 Embodiments of the present disclosure will be described in more detail with reference to examples, but the present disclosure is not limited to the examples.

表1に示すねらい組成となるようにR1-T-B系焼結磁石素材を作製した。各元素を秤量してストリップキャスト法により鋳造し、厚み0.2~0.4mmのフレーク状の合金を得た。得られたフレーク状の合金を水素粉砕した後、550℃まで真空中で加熱後冷却する脱水素処理を施して粗粉砕粉を得た。次に、得られた粗粉砕粉に、潤滑剤としてステアリン酸亜鉛を粗粉砕粉100mass%に対して0.04mass%添加、混合した後、気流式粉砕機(ジェットミル装置)を用いて、窒素気流中で乾式粉砕し、合金微粉末を得た。得られた微粉末の粒径を気流分散法によるレーザー回折法で測定した結果、D50(体積基準メジアン径)は4.6μmであった。得られた合金微粉末を有機系分散媒および離型剤と混合しスラリーを作製した。作製したスラリーを磁界中で成形して成形体を得た、成形時の磁界は1.3MA/mで、加圧力は5MPaとした。なお、成形装置には、磁界印加方向と加圧方向とが直交する、いわゆる直角磁界成形装置(横磁界成形装置)を用いた。得られた成形体を、200Paに制御した減圧アルゴン中で、1040℃×4時間の条件で焼結し、R1-T-B系焼結磁石素材を得た。得られたR1-T-B系焼結磁石素材の一部を乳鉢で粉砕し、425μmメッシュおよび75μmメッシュを用いて分級した。粒径75~425μmの粉砕粉を用いて、ICP発光分光分析法にてNd、Fe、Pr、B、Al、Cu、Ga、Tb、Mn、Siの成分分析を、燃焼・赤外線吸収法にて炭素量の分析をおこなった。また、粒径425μm以上の粉砕粉を用いて、不活性ガス溶融・熱伝導法にて酸素量・窒素量の分析をおこなった。R1-T-B系焼結磁石素材の組成を表1に示す。 An R1-T-B sintered magnet material was produced to have the target composition shown in Table 1. Each element was weighed and cast by a strip casting method to obtain a flaky alloy with a thickness of 0.2 to 0.4 mm. The resulting flaky alloy was hydrogen-pulverized and then subjected to a dehydrogenation treatment in which it was heated to 550° C. in vacuum and then cooled to obtain coarsely pulverized powder. Next, 0.04 mass% of zinc stearate was added as a lubricant to the obtained coarsely pulverized powder based on 100 mass% of the coarsely pulverized powder, and the mixture was mixed. Dry pulverization was performed in an air stream to obtain a fine alloy powder. The particle size of the obtained fine powder was measured by a laser diffraction method using an air flow dispersion method, and as a result, the D 50 (volume-based median diameter) was 4.6 μm. The obtained alloy fine powder was mixed with an organic dispersion medium and a mold release agent to prepare a slurry. The produced slurry was molded in a magnetic field to obtain a molded body. The magnetic field during molding was 1.3 MA/m, and the pressing force was 5 MPa. The forming apparatus used was a so-called right-angle magnetic field forming apparatus (transverse magnetic field forming apparatus) in which the magnetic field application direction and the pressing direction were perpendicular to each other. The obtained molded body was sintered at 1040° C. for 4 hours in a reduced pressure of argon controlled at 200 Pa to obtain an R1-TB series sintered magnet material. A part of the obtained R1-T-B type sintered magnet material was crushed in a mortar and classified using a 425 μm mesh and a 75 μm mesh. Using pulverized powder with a particle size of 75 to 425 μm, component analysis of Nd, Fe, Pr, B, Al, Cu, Ga, Tb, Mn, and Si was performed using ICP emission spectrometry and combustion/infrared absorption method. The carbon content was analyzed. Furthermore, using pulverized powder with a particle size of 425 μm or more, the amount of oxygen and nitrogen was analyzed using an inert gas melting/thermal conduction method. Table 1 shows the composition of the R1-TB series sintered magnet material.

Figure 0007380369000001
Figure 0007380369000001

表2に示すNo.A1~A4を作製した。純度が99%以上のPr、Tb、Y、Ga、Cuの原料を、溶解時の希土類元素の蒸発を加味し、試料No.A1~A4の合金組成がねらい値になるように秤量した。その後、液体超急冷装置(メルトスピニング装置)の石英出湯管内で十分に溶解して合金の溶湯を形成した後、20m/sのロール周速度で回転するCu製のロール上に溶湯を出湯した。このようにして作製したリボン状の合金を窒素流気チャンバー中で粉砕した。粉砕して得られた合金粉末を300μmメッシュおよび106μmメッシュを用いて分級した。得られた粒径106~300μmの合金粉末を試料A1~A4とした(すなわち、試料A1~A4の平均粒度は本開示の範囲内(10μm以上500μm以下)である)。試料A1~A4をICP(誘導結合プラズマ)発光分光分析法にてNd、Pr、Dy、Al、Cu、Ga、Tb、Y、Siの成分分析をおこなった。試料A1~A4の組成を表2に示す。 No. shown in Table 2. A1 to A4 were produced. Using Pr, Tb, Y, Ga, and Cu raw materials with a purity of 99% or more, taking into account the evaporation of rare earth elements during melting, Sample No. The alloys A1 to A4 were weighed so that the alloy compositions were at the target values. Thereafter, the molten metal was sufficiently melted in a quartz tapping pipe of a liquid super-quenching device (melt spinning device) to form a molten alloy, and then the molten metal was tapped onto a Cu roll rotating at a roll circumferential speed of 20 m/s. The ribbon-shaped alloy thus produced was ground in a nitrogen flow chamber. The alloy powder obtained by pulverization was classified using a 300 μm mesh and a 106 μm mesh. The obtained alloy powders with a particle size of 106 to 300 μm were designated as samples A1 to A4 (that is, the average particle size of samples A1 to A4 was within the range of the present disclosure (10 μm or more and 500 μm or less)). Samples A1 to A4 were analyzed for Nd, Pr, Dy, Al, Cu, Ga, Tb, Y, and Si using ICP (inductively coupled plasma) emission spectroscopy. Table 2 shows the compositions of samples A1 to A4.

Figure 0007380369000002
Figure 0007380369000002

作製した試料A1~A4を温度80℃、湿度90%の雰囲気にさらすことにより、R2-T-M2拡散用合金の粉末粒子表面にR-OH層を形成させる処理(特許文献4に記載の処理)をおこない、拡散用合金B1~B4を得た。拡散用合金B1~B4の一部を用いて、燃焼・赤外線吸収法にて炭素量の分析および不活性ガス溶融・熱伝導法にて酸素量・窒素量の分析をおこなった。拡散用合金の酸素量、窒素量、炭素量を表3に示す。 A process of forming an R-OH layer on the surface of the powder particles of the R2-T-M2 diffusion alloy by exposing the prepared samples A1 to A4 to an atmosphere with a temperature of 80° C. and a humidity of 90% (the process described in Patent Document 4) ) to obtain diffusion alloys B1 to B4. Using some of the diffusion alloys B1 to B4, the amount of carbon was analyzed by combustion and infrared absorption method, and the amount of oxygen and nitrogen was analyzed by inert gas melting and heat conduction method. Table 3 shows the oxygen content, nitrogen content, and carbon content of the diffusion alloy.

Figure 0007380369000003
Figure 0007380369000003

R1-T-B系焼結磁石素材を切断、切削加工し、4.4mm×10mm×11mmの直方体とした。成形時の磁界印加方向の長さが4.4mm、成形時の圧力印加方向の長さが10mmとなるように切削加工した。切削加工後の焼結磁石素材の10mm×11mmの面(2面)に粘着剤として5%PVA(ポリビニルアルコール)水溶液を塗布したのち、焼結磁石素材100mass%に対して1面につき1mass%(2面で計2mass%)の拡散用合金B1~B4をそれぞれ付着させた。そして、真空熱処理炉を用いて200Paに制御した減圧アルゴン中で、900℃×10時間の熱処理をおこなった。熱処理後の試料の拡散用合金が付着している2面を研削して4mm×10mm×11mmの直方体に加工したのち、それぞれ切断加工して4mm×4mm×4mmの立方体試料No.1~4をそれぞれ2個ずつ作製した。これら4mm角試料のうちそれぞれ1個はB-HトレーサによってB、HcJおよびH(J(磁化の強さ)-H(磁界の強さ)曲線の第2象限において、Jが0.9Bの値になる位置のH軸の読み値)の測定をおこなった。また、それぞれ残りの1個はICP発光分光分析法にてFe、Nd、Pr、B、Al、Cu、Ga、Tb、Y、Mn、Si、の成分を、試料を全量溶解することで分析した。また、この成分分析結果と拡散用合金の塗布量をもとに、拡散用合金に含まれる各元素の導入率を計算した。Tbの導入率(%)が高いほど、拡散用合金の実効的な重希土類元素の損失が抑制されていることを示している。表4に、用いた拡散用合金、4mm角試料のICP分析結果、導入率、磁気特性(B、HcJ、H)の結果を示す。 The R1-T-B series sintered magnet material was cut and machined into a rectangular parallelepiped of 4.4 mm x 10 mm x 11 mm. Cutting was performed so that the length in the magnetic field application direction during molding was 4.4 mm, and the length in the pressure application direction during molding was 10 mm. After applying a 5% PVA (polyvinyl alcohol) aqueous solution as an adhesive to the 10 mm x 11 mm surfaces (two sides) of the sintered magnet material after cutting, 1 mass% (1 mass%) per surface was applied to 100 mass% of the sintered magnet material. Diffusion alloys B1 to B4 (2 mass % in total) were deposited on each of the two sides. Then, heat treatment was performed at 900° C. for 10 hours in a reduced pressure argon atmosphere controlled at 200 Pa using a vacuum heat treatment furnace. After the heat treatment, the two sides of the sample to which the diffusion alloy was attached were ground and processed into a 4 mm x 10 mm x 11 mm rectangular parallelepiped, and then each was cut to form a 4 mm x 4 mm x 4 mm cubic sample No. Two pieces of each of Nos. 1 to 4 were made. Each of these 4 mm square samples has B r , H cJ and H k (J (magnetization strength) - H (magnetic field strength) curve) with J of 0. The H-axis reading value at the position where the value of 9B r was obtained) was measured. In addition, the components of Fe, Nd, Pr, B, Al, Cu, Ga, Tb, Y, Mn, and Si were analyzed for each remaining one by ICP emission spectrometry by dissolving the entire sample. . Furthermore, based on the results of this component analysis and the amount of the diffusion alloy applied, the introduction rate of each element contained in the diffusion alloy was calculated. This indicates that the higher the Tb introduction rate (%), the more effectively the loss of heavy rare earth elements in the diffusion alloy is suppressed. Table 4 shows the diffusion alloy used, the ICP analysis results of the 4 mm square sample, the introduction rate, and the magnetic properties (B r , H cJ , H k ).

Figure 0007380369000004
Figure 0007380369000004

拡散用合金中のY量が比較的少ないNo.1や2に比べて、拡散用合金中のY量が比較的多いNo.3や4の方が4mm角試料中のTb量が高く、Tbの導入率が高い結果となった。また、No.4の試料のみ4mm角試料中に検出下限以上のYが検出された。HcJやHは拡散源No.B3を用いたNo.3の試料が最も高い結果となった。拡散用合金中のY量が多くなると、拡散用合金中の酸化物相に分配されるTb量が減少し、焼結磁石素材に拡散するTb量が増加すると考えられる。ただ、拡散用合金中のY量が多すぎるとYが焼結磁石素材に拡散し過ぎてしまい、主相の磁気物性を低下させる。No.3の試料はこの両者がうまくバランスした結果、高いHcJやHが得られたと考えられる。 No. 2 with a relatively small amount of Y in the diffusion alloy. Compared to No. 1 and No. 2, the amount of Y in the diffusion alloy is relatively large. Samples 3 and 4 had a higher amount of Tb in the 4 mm square sample, resulting in a higher Tb introduction rate. Also, No. Only in sample No. 4, Y above the lower detection limit was detected in the 4 mm square sample. H cJ and H k are diffusion source No. No. using B3. Sample No. 3 had the highest result. It is thought that when the amount of Y in the diffusion alloy increases, the amount of Tb distributed to the oxide phase in the diffusion alloy decreases, and the amount of Tb diffused into the sintered magnet material increases. However, if the amount of Y in the diffusion alloy is too large, Y will diffuse too much into the sintered magnet material, reducing the magnetic properties of the main phase. No. It is considered that sample No. 3 achieved high H cJ and H k as a result of a good balance between the two.

磁気特性測定後の4mm角試料No.1~4を熱処理した。4mm角試料をNb箔で包んだのち、真空熱処理炉を用いて200Paに制御した減圧アルゴン中で、500℃×3時間の熱処理をおこなうことで、No.5~8の試料を得た。そして、B-Hトレーサを用いて試料No.5~8のBおよびHcJの測定をおこなった。表5に熱処理前の試料No.1~4の磁気特性(B、HcJ、H)の結果を示す。 4mm square sample No. after measuring magnetic properties. Samples 1 to 4 were heat treated. After wrapping a 4 mm square sample in Nb foil, it was heat treated at 500°C for 3 hours in a vacuum heat treatment furnace controlled at 200 Pa in argon. 5-8 samples were obtained. Then, using the BH tracer, sample No. Measurements of B r and H cJ of 5 to 8 were performed. Table 5 shows sample No. before heat treatment. The results of the magnetic properties (B r , H cJ , H k ) of Nos. 1 to 4 are shown below.

Figure 0007380369000005
Figure 0007380369000005

500℃×3時間の熱処理をおこなっていないときと同様に、拡散用合金No.B3を用いた試料No.7が最もHcJやHが高い結果となった。HcJやHは900℃×10時間処理後の試料No.1~4よりも500℃×3時間の熱処理をおこなった試料No.5~8の方が全体的に高い。これは、500℃×3時間の熱処理により、主相粒の二粒子粒界の拡張や二粒子粒界相の低磁化化などで、主相粒間の磁気的分断が進んだことによると考えらえる。ただ、500℃×3時間の熱処理の有無ではHcJやHの大小関係が変わらないのは、ベースとなる主相の異方性磁界の大小関係によるものと考えられる。そして、主相のTb置換による異方性向上とY置換による異方性低下の兼ね合いで、拡散源No.B3を用いたときに最も主相の異方性磁界が高くなったと考えられる。 As in the case where the heat treatment at 500°C for 3 hours was not performed, diffusion alloy No. Sample No. using B3. 7 had the highest H cJ and H k . H cJ and H k are for sample No. after treatment at 900°C for 10 hours. Sample No. 1 was heat-treated at 500°C for 3 hours more than samples 1 to 4. Scores 5 to 8 are higher overall. This is thought to be due to the heat treatment at 500°C for 3 hours, which resulted in the expansion of the two-grain boundaries of the main phase grains and the lowering of the magnetization of the two-grain boundary phase, resulting in progress in magnetic separation between the main phase grains. I can see it. However, the reason why the magnitude relationship of H cJ and H k does not change with or without heat treatment at 500° C. for 3 hours is considered to be due to the magnitude relationship of the anisotropic magnetic field of the main phase that is the base. By balancing the improvement in anisotropy due to Tb substitution in the main phase and the decrease in anisotropy due to Y substitution, diffusion source No. It is considered that the anisotropic magnetic field of the main phase became the highest when B3 was used.

Claims (10)

R1:27.5質量%以上35.0質量%以下(R1は希土類元素のうち少なくとも一種であり、Nd及びPrの少なくとも一方を必ず含む)、
B:0.80質量%以上0.99質量%以下、
Ga:0質量%以上0.8質量%以下、
M1:0質量%以上2.0質量%以下、(M1はCu、Al、Nb、Zrの少なくとも一種)、
T:60質量%以上(TはFe又はFeとCoであり、T全体に対するFeの含有量が85質量%以上である)、
を含有するR1-T-B系焼結磁石素材を準備する工程と、
R2-Y(イットリウム)―M2拡散用合金(R2は希土類元素(ただしYを除く)のうち少なくとも二種であり、Tb及びDyの少なくとも一方、並びに、Pr及びNdの少なくとも一方を必ず含み、M2は、Cu及びGaの少なくとも一方を必ず含む)を準備する工程と、
前記R1-T-B系焼結磁石素材表面の少なくとも一部に、前記R2-Y―M2拡散用合金の少なくとも一部を接触させ、真空又は不活性ガス雰囲気中、700℃以上950℃以下の温度で熱処理を実施する拡散工程と、を含み、
前記R2-Y-M2拡散用合金中のR2が75質量%以上98質量%以下であり、M2が1質量%以上25質量%以下であり、O(酸素:不可避不純物を含む)が0.2質量%以上1.0質量%以下であり、Yが0.4質量%以上0.6質量%以下である、R-T-B系焼結磁石の製造方法。
R1: 27.5% by mass or more and 35.0% by mass or less (R1 is at least one type of rare earth element and always includes at least one of Nd and Pr),
B: 0.80% by mass or more and 0.99% by mass or less,
Ga: 0% by mass or more and 0.8% by mass or less,
M1: 0% by mass or more and 2.0% by mass or less, (M1 is at least one of Cu, Al, Nb, and Zr),
T: 60% by mass or more (T is Fe or Fe and Co, and the content of Fe with respect to the entire T is 85% by mass or more),
A step of preparing an R1-TB-based sintered magnet material containing
R2-Y (yttrium)-M2 diffusion alloy (R2 is at least two rare earth elements (excluding Y), always includes at least one of Tb and Dy, and at least one of Pr and Nd, M2 (always includes at least one of Cu and Ga);
At least a part of the R2-Y-M2 diffusion alloy is brought into contact with at least a part of the surface of the R1-T-B sintered magnet material, and the temperature is set at 700°C or more and 950°C or less in a vacuum or an inert gas atmosphere. a diffusion step of carrying out a heat treatment at a temperature;
R2 in the R2-Y-M2 diffusion alloy is 75% by mass or more and 98% by mass or less, M2 is 1% by mass or more and 25% by mass or less, and O (oxygen: including inevitable impurities) is 0.2%. A method for producing an RTB-based sintered magnet, wherein Y is from 0.4% by mass to 0.6% by mass, and Y is from 0.4% by mass to 0.6% by mass.
前記拡散工程後に、450℃以上750℃以下の温度、かつ拡散工程の熱処理温度よりも低い温度で熱処理を実施する低温熱処理工程を含む、請求項1に記載のR-T-B系焼結磁石の製造方法。 The RTB-based sintered magnet according to claim 1, further comprising a low-temperature heat treatment step in which, after the diffusion step, heat treatment is performed at a temperature of 450° C. or higher and 750° C. or lower and lower than the heat treatment temperature of the diffusion step. manufacturing method. 前記拡散工程後のR-T-B系焼結磁石表面を研削加工し、研削加工後のR-T-B系焼結磁石に対して、450℃以上750℃以下の温度、かつ拡散工程の熱処理温度よりも低い温度で熱処理を実施する低温熱処理工程を実施する、請求項1又は2に記載のR-T-B系焼結磁石の製造方法。 The surface of the RTB-based sintered magnet after the diffusion process is ground, and the RTB-based sintered magnet after the grinding process is heated to a temperature of 450°C or more and 750°C or less, and during the diffusion process. The method for manufacturing an RTB based sintered magnet according to claim 1 or 2, wherein a low temperature heat treatment step is performed in which the heat treatment is performed at a temperature lower than the heat treatment temperature. 前記R1-T-B系焼結磁石素材は下記式(1)を満足する、
[T]/55.85>14×[B]/10.8 (1)
([T]は質量%で示すTの含有量であり、[B]は質量%で示すBの含有量である)、請求項1から3のいずれかに記載のR-T-B系焼結磁石の製造方法。
The R1-TB-based sintered magnet material satisfies the following formula (1),
[T]/55.85>14×[B]/10.8 (1)
([T] is the content of T expressed in mass %, [B] is the content of B expressed in mass %), Method of manufacturing a condensed magnet.
前記R2-Y―M2拡散用合金のR2はPrを必ず含み、Prの含有量は、R2全体の50質量%以上である、請求項1から4のいずれかに記載のR-T-B系焼結磁石の製造方法。 The R-T-B system according to any one of claims 1 to 4, wherein R2 of the R2-Y-M2 diffusion alloy always contains Pr, and the content of Pr is 50% by mass or more of the entire R2. Method of manufacturing sintered magnets. 前記R2-Y-M2拡散用合金におけるTb及びDyの少なくとも一方の含有量は、合計でR2全体の1質量%以上20質量%以下である、請求項1から5のいずれかに記載のR-T-B系焼結磁石の製造方法。 R- according to any one of claims 1 to 5, wherein the content of at least one of Tb and Dy in the R2-Y-M2 diffusion alloy is 1% by mass or more and 20% by mass or less of the entire R2. A method for manufacturing a TB-based sintered magnet. 前記R2-Y-M2系拡散用合金のM2はCu及びGaの両方を含む、請求項1から6のいずれかに記載のR-T-B系焼結磁石の製造方法。 The method for manufacturing an RTB based sintered magnet according to any one of claims 1 to 6, wherein M2 of the R2-Y-M2 based diffusion alloy contains both Cu and Ga. R2(希土類元素のうち少なくとも二種であり、Tb及びDyの少なくとも一方、並びに、Pr及びNdの少なくとも一方を必ず含む)、Y、M2(Cu及びGaの少なくとも一方を必ず含む)およびO(酸素)を必ず含み、R2が75質量%以上98質量%以下であり、M2量が1質量%以上25質量%以下であり、Yが0.4質量%以上0.6質量%以下であり、O(酸素:不可避不純物を含む)が0.2質量%以上1.0質量%以下であり、平均粒度が10μm以上500μm以下の粉末である、R2-Y-M2拡散用合金。 R2 (at least two of the rare earth elements, always containing at least one of Tb and Dy, and at least one of Pr and Nd), Y, M2 (necessarily containing at least one of Cu and Ga), and O (oxygen ), R2 is 75% by mass or more and 98% by mass or less, M2 amount is 1% by mass or more and 25% by mass or less, Y is 0.4% by mass or more and 0.6% by mass or less, O (Oxygen: including unavoidable impurities) is 0.2% by mass or more and 1.0% by mass or less, and the average particle size is 10 μm or more and 500 μm or less. 前記R2は、Prと、Tb及びDyの少なくとも一方とからなる、請求項7に記載のR2-Y-M2拡散用合金。 The R2-Y-M2 diffusion alloy according to claim 7, wherein the R2 comprises Pr and at least one of Tb and Dy. Tb及びDyの少なくとも一方の含有量は、合計でR2全体の1質量%以上20質量%以下である、請求項7または8に記載のR2-Y-M2拡散用合金。


The R2-Y-M2 diffusion alloy according to claim 7 or 8, wherein the total content of at least one of Tb and Dy is 1% by mass or more and 20% by mass or less of the entire R2.


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