JP7372882B2 - Slurry supply device, slurry supply method, and slurry generation method - Google Patents

Description

The present disclosure relates to a slurry supply device, a slurry supply method, and a slurry production method.

Devices for supplying slurry are known (for example, Patent Documents 1 and 2). A slurry is, for example, a dispersion system in which solid dispersoids (particles) are dispersed in a liquid dispersion medium, and is also called a suspension (suspension in English). Slurries are used for various purposes in various technical fields. For example, the slurry is used as a grinding fluid or a polishing fluid.

Patent Document 1 discloses various substances contained in a slurry used as a polishing liquid. Patent Document 2 discloses an apparatus for supplying slurry used as a polishing liquid. This slurry supply device includes a stirring pump that sucks the slurry stock solution from the tank and discharges it into the tank, in order to prevent the solid content of the slurry from settling in the tank containing the slurry stock solution. There is.

Japanese Patent Application Publication No. 2000-063806 Japanese Patent Application Publication No. 9-029637

In the technique of Patent Document 2, the flow from the pump does not reach the corners of the tank, and the slurry may stagnate, causing solid matter to precipitate. If solids settle in the tank, the concentration of the slurry supplied from the tank will be lower than desired. Another aspect is that the concentration of the slurry within the tank becomes non-uniform. As a result, the expected effect of the slurry is reduced. Therefore, it is desired to provide a slurry supply device, a slurry supply method, and a slurry production method that can maintain the concentration of the slurry and/or make the concentration of the slurry uniform.

A slurry supply device according to an aspect of the present disclosure includes a tank having a space around a rotation axis that intersects in the vertical direction, an inflow portion that flows slurry into the space, and an outflow portion that flows slurry from the space. and a support part that rotatably supports the tank around the rotation axis.

A slurry supply method according to an aspect of the present disclosure includes an inflow step of flowing slurry into the space of a tank having a space around a rotation axis that intersects in the vertical direction, and a step of flowing the slurry into the space of the tank containing the slurry. It has a rotation step of rotating around the rotation axis, and an outflow step of flowing out the slurry from the space and supplying the slurry.

A slurry generation method according to an aspect of the present disclosure includes a step of arranging a dispersion medium and a dispersoid in a space of a tank having a space around a rotation axis that intersects in a vertical direction; and a rotation step of rotating the tank containing the dispersoid around the rotation axis.

According to the above configuration or procedure, the concentration of the slurry can be maintained and/or the concentration of the slurry can be made uniform.

FIG. 1 is a schematic side view showing the configuration of a slurry supply device according to an embodiment. A sectional view taken along the line II-II in FIG. 1. FIG. 2 is a perspective view showing a tank of the slurry supply device of FIG. 1; A sectional view taken along the line IV-IV in FIG. 3.

(Overall configuration of slurry supply device)
FIG. 1 is a schematic side view showing the configuration of a slurry supply device 1 (hereinafter sometimes simply referred to as "supply device 1") according to an embodiment.

In FIG. 1, a rectangular coordinate system D1-D2-D3 is used for convenience. The D1 direction is a direction intersecting the vertical direction. In the following, an example will be taken in which the D1 direction is the horizontal direction. The D2 direction and the D3 direction may be appropriate directions with respect to the vertical direction. In the following description, an example will be taken in which the +D3 side is vertically upward.

The supply device 1 is configured, for example, as a device that supplies slurry 101 as a grinding fluid or a polishing fluid. In FIG. 1, not only the supply device 1 but also a part of a machine tool 151 as an example of a device to which the slurry 101 is supplied is illustrated.

The supply device 1 includes, for example, a storage device 3 that stores slurry 101, a supply system 5 for supplying the slurry 101 held by the storage device 3 to the outside (here, the machine tool 151), and a supply system. It has a branch path 7 branching from 5 and leading to the storage device 3, and a recovery system 9 that recovers the slurry 101 supplied to the outside and returns it to the storage device 3. Note that only the storage device 3 may be regarded as a slurry supply device. Furthermore, the storage device 3 may be distributed or used separately from the supply system 5, the branch path 7, and/or the collection system 9.

(Summary of storage device)
The storage device 3 includes a tank 11 that stores slurry 101 and a support section 13 that supports the tank 11. In FIG. 1, the tank 11 is shown with its upper part cut away. The tank 11 is supported by the support portion 13 so as to be rotatable around a rotation axis RA parallel to the D1 direction. The rotation of the tank 11 reduces sedimentation of solids in the slurry 101, as will be described in detail later, and thus maintains the concentration of the slurry 101 supplied to the machine tool 151. Note that the rotation axis RA refers to a virtual straight line that is the center of rotation of the tank 11, and does not refer to a shaft-shaped member that supports the tank 11.

(supply system)
The supply system 5 has, for example, a supply path 15 leading into the tank 11. Further, the supply system 5 includes, for example, a pump 17, a valve 19, and a nozzle 21 in this order from the tank 11 side to the machine tool 151 side along the supply path 15. Note that these may be considered as part of the supply path 15. A portion of the supply path 15 on the downstream side of the pump 17 is sometimes referred to as a pressure feeding path 15a.

The supply path 15 may be configured as appropriate. For example, the supply path 15 may include a rigid pipe, a flexible hose, and/or a block through which a flow path passes. Its specific shape and dimensions may be set as appropriate depending on the manner in which the supply device 1 is used. The description of the supply path 15 in this paragraph may be applied to the branch path 7 and the reflux path 25 described below.

The pump 17 sucks the slurry 101 in the tank 11 and sends it to the pressure passage 15a. Pump 17 may have any suitable configuration. For example, the pump 17 may be a rotary pump that applies pressure to the slurry 101 by rotating a rotor, or a plunger pump that applies pressure to the slurry 101 by reciprocating a plunger. Further, the pump 17 may be a fixed capacity pump with a constant discharge amount per rotation (one reciprocation), or may be a variable capacity pump that can change the discharge amount per rotation. . The electric motor (not shown) that drives the pump 17 may be subjected to open loop control or feedback control with a control device (not shown) and/or a driver (not shown). Further, the electric motor (pump 17) may be controlled to maintain a constant rotation speed, or may be controlled to change the rotation speed.

An appropriate number of valves 19 may be provided at appropriate positions as required, and only one valve 19 is shown in FIG. 1 for convenience. Unlike the illustration, for example, a valve 19 located upstream of the pump 17 may be provided. One or more valves 19, for example, control flow and/or pressure from pump 17. The configuration of the flow control valve that controls the flow rate may be appropriately selected. For example, the flow control valve may be a throttle valve that simply changes the opening area, or may be a pressure-compensated flow control valve that maintains a constant pressure difference between the inlet and the outlet. The pressure control valve that controls the pressure may be, for example, a pressure reducing valve that keeps the pressure on the outlet side constant. The valve body of the valve 19 may have an appropriate shape such as a spool, needle, ball, or disk. The valve 19 may be driven by any suitable method such as a spring, a solenoid, or a combination thereof. One or more valves 19 may be controlled to maintain a constant flow rate and/or pressure, or may be controlled to vary the flow rate and/or pressure.

The nozzle 21 supplies the slurry 101 sent out from the pump 17 toward a region being processed in the machine tool 151. The nozzle 21 may have any suitable configuration. For example, the nozzle 21 may be a simple pipe, or may be a dedicated component with a special shape and/or structure. The nozzle 21 may have an inner diameter that is constant in the length direction, or may have an inner diameter that decreases and/or expands depending on the position in the length direction. The nozzle 21 may have a constant opening area or may have a variable opening area. The nozzle 21 may have only one outlet for the slurry 101, or may have a plurality of outlets. Examples of the latter include showerheads and pipes with a plurality of outlets along the length of the pipe.

The slurry 101 sent out by the pump 17 is ejected from the nozzle 21, for example. However, depending on the field of use of the supply device 1, the slurry 101 may only flow out at a pressure that cannot be said to be ejected.

The configuration of the supply system 5 described above is just an example, and may be modified as appropriate. For example, the valve 19 and nozzle 21 may be omitted. Then, the start and stop of supply of the slurry 101 and the supply amount may be controlled only by the pump 17. For example, depending on the field of use, the slurry 101 may be supplied by flowing out the slurry 101 from the supply device 1 by gravity without providing the pump 17.

(branch road)
The branch path 7 branches from the supply path 15 (pressure feed path 15a) of the supply system 5 downstream of the pump 17 and reaches the tank 11 of the storage device 3. That is, the branch path 7 returns a portion of the slurry 101 sent out from the pump 17 to the tank 11. Thereby, for example, it is possible to use a pump 17 with a large capacity compared to the amount of slurry 101 supplied to the machine tool 151, and the degree of freedom in designing the pump 17 is improved.

The branching point of the branching path 7 from the supply path 15 may be located at an appropriate position on the downstream side of the pump 17. In the illustrated example, it is located upstream of one or more valves 19 as flow control valves and/or pressure control valves. In this case, for example, the slurry 101 whose downstream flow is restricted by the valve 19 flows into the branch path 7 . Unlike the illustrated example, for example, the valve 19 may not be provided, or the branch path 7 may branch from the downstream side of the valve 19. In this case, for example, the slurry 101 whose outflow is restricted by the nozzle 21 flows into the branch path 7 . Furthermore, unlike the illustrated example, the valve 19 and nozzle 21 may not be provided, for example. In this case, for example, the slurry 101 whose downstream flow is restricted because the cross-sectional area of the supply path 15 is narrower than the discharge amount of the pump 17 flows into the branch path 7 .

The branch path 7 may not be provided. That is, all of the slurry 101 sent out by the pump 17 may be supplied to the machine tool 151.

(Collection system)
The recovery system 9 includes, for example, a recovery container 23 for recovering the slurry 101 supplied to the machine tool 151, and a reflux path 25 extending from the recovery container 23 to the tank 11 of the storage device 3. Further, the recovery system 9 includes, for example, a filter 27 and a replenishment container 29 in order from the recovery container 23 side to the tank 11 side along the reflux path 25. Note that these may be considered as part of the reflux path 25. A portion of the reflux path 25 on the downstream side of the replenishment container 29 is sometimes referred to as a replenishment path 31 .

The collection container 23 is, for example, a container with an open top, and collects the slurry 101 by catching the slurry 101 that has fallen after being supplied to the machine tool 151 . The shape, various dimensions, etc. of the collection container 23 may be set as appropriate depending on the configuration of the machine tool 151 (from another perspective, the usage mode of the supply device 1). For example, in FIG. 1, the collection container 23 is schematically depicted as if the entirety is located below the illustrated portion (described later) of the machine tool 151. The collection container 23 may actually have such a configuration. Furthermore, unlike the illustrated example, the recovery container 23 may be relatively large and have side surfaces surrounding the illustrated portion of the machine tool 151. Furthermore, the recovery container 23 may have a shape that also covers the illustrated portion of the machine tool 151 from above (a shape that is not open from above).

The reflux path 25 may have an appropriate configuration, and may be connected to an appropriate position of the recovery container 23 by an appropriate method. In the illustrated example, the reflux path 25 is connected to an opening (not shown) formed in the bottom surface of the recovery container 23. In this case, all of the slurry 101 in the recovery container 23 can flow into the reflux path 25 . Further, unlike the illustrated example, the reflux path 25 may be connected to the recovery container 23 by, for example, having a pipe or a hose inserted from above the recovery container 23 toward the bottom surface of the recovery container 23. . Although not particularly illustrated, a pump may be provided in the reflux path 25 between the collection container 23 and the replenishment container 29 (or the filter 27) for delivering the slurry 101 in the collection container 23 to the replenishment container 29. Thereby, the slurry 101 in the recovery container 23 can be supplied to the replenishment container 29 regardless of the relative positions of the recovery container 23 and the replenishment container 29 in the vertical direction.

Filter 27 filters impurities contained in slurry 101. In the illustrated example, impurities include chips and/or chips generated by grinding and/or polishing of the machine tool 151. The filter 27 is, for example, a member having a plurality of holes. The diameters of the plurality of pores are larger than the diameter of the solid content (dispersoids) that the slurry 101 should originally contain, and smaller than the diameter of impurities. The specific configuration of the filter 27 may be determined as appropriate. For example, the filter 27 may have a plate-like shape or a column-like shape. The material of the filter 27 may be paper, glass fiber, porous resin, or porous sintered body. The filter 27 may be positioned closer to the recovery container 23 or closer to the replenishment container 29.

The replenishment container 29 temporarily stores the collected slurry 101. Thereby, for example, the amount of slurry 101 held by the tank 11 of the storage device 3 is maintained at an appropriate amount. The refill container 29 is, for example, a container that is open to the atmosphere. As will be described in detail later, the tank 11 is also opened to the atmosphere. Therefore, as shown by the dotted line, the liquid level in the tank 11 is at the same height as the liquid level in the replenishment container 29. Utilizing this, the amount of slurry 101 in tank 11 can be grasped and/or adjusted. The shape and various dimensions of the refill container 29 may be set as appropriate. For example, in FIG. 1, the replenishment container 29 is schematically depicted as having an open top. The replenishment container 29 may actually have such a shape. Further, unlike the illustrated example, the replenishment container 29 may have a shape having an upper surface.

Note that depending on the field of use of the supply device 1, the atmosphere around the tank 11 and the replenishment container 29 may not be atmospheric air. That is, both the tank 11 and the replenishment container 29 may be open to an atmosphere other than the atmosphere. As the atmosphere other than the air, for example, an inert gas (for example, nitrogen) can be mentioned.

Although not particularly illustrated, the replenishment container 29 may be provided with a sensor for detecting the liquid level of the slurry 101. The sensor may be one that detects whether the liquid level has reached the height of the sensor, or may be one that detects the height of the liquid level in multiple stages or continuously. . In the former case, multiple sensors may be provided at different heights. The detection results of the sensor may be used in an unillustrated notification device (for example, a display device or an audio device) that notifies an operator, or in an unillustrated device that supplies slurry 101 to the replenishment container 29. good.

The replenishment path 31 may be configured as appropriate and may be connected to an appropriate position of the replenishment container 29 in an appropriate manner. In the illustrated example, the replenishment path 31 is connected to an opening (not shown) formed in the bottom surface of the replenishment container 29. As a result, all of the slurry 101 in the replenishment container 29 can flow into the replenishment path 31. Further, unlike the illustrated example, the reflux path 25 may be connected to the replenishment container 29 by, for example, having a pipe or a hose inserted from above the replenishment container 29 toward the bottom surface of the replenishment container 29. . As can be understood from the above explanation of the liquid level, the replenishment path 31 is not provided with a pump for delivering the slurry 101 in the replenishment container 29 to the tank 11. Slurry 101 in refill container 29 flows into tank 11 by gravity.

The configuration of the recovery system 9 described above is just an example, and may be modified as appropriate. For example, instead of or in addition to filter 27, a filter may be provided between replenishment container 29 and tank 11. Further, impurities may be removed by a method other than a filter. For example, impurities may be removed by sedimentation or may be removed using a centrifuge. Depending on the field of application of the supply device 1, a mechanism for removing impurities may not be necessary.

The recovery system 9 may not be provided. For example, used slurry 101 may be discarded. The replenishment container 29 and the replenishment path 31 may be provided without the collection system 9 being configured. In this case, for example, the replenishment container 29 and the replenishment path 31 may be provided as a structure for supplying the newly generated slurry 101 to the tank 11.

(Machine Tools)
The machine tool 151 may be, for example, one that rotates a workpiece (for example, a lathe), one that rotates a tool (for example, a milling machine or a machining center), or a multifunction machine that can do both. Good too. Further, the machine tool 151 may be one that is numerically controlled by a computer (NC control), or a part of the operation may be performed by an operator's real-time operation on a control device or by human power. Good too. The tool attached to the machine tool 151 when the slurry 101 is supplied may be, for example, a tool that performs cutting, a tool that performs grinding, or a tool that performs polishing. However, other processing may be performed.

In the example shown in FIG. 1, the machine tool 151 has a workpiece spindle 153 that holds the workpiece 103 and a tool spindle 155 that holds the tool 105. Slurry 101 may be supplied toward workpiece 103, toward tool 105, or toward a contact position between the two. Note that it may be expressed that the slurry 101 is supplied to the workpiece 103, inclusive of such various supply modes.

(slurry)
As described above, the slurry 101 is, for example, a dispersion system in which solid dispersoids (particles) are dispersed in a liquid dispersion medium, and is also called a suspension (suspension in English). In this embodiment, the slurry 101 is used as a grinding liquid and/or a polishing liquid. The composition of the dispersion medium, the composition of the dispersoid, the mass % (concentration) of the dispersoid, etc. may be appropriately set depending on the material of the workpiece 103 and the type of processing performed by the tool 105.

As an example, slurry 101 may include cerium oxide. When such a slurry 101 is used, for example, the processing accuracy of an aspherical glass lens manufactured by an ultra-precision processing machine serving as the machine tool 151 can be improved. Further, the effect of maintaining the concentration of the slurry 101 by the supply device 1 is effectively exhibited. Specifically, it is as follows.

The ultra-precision processing machine can perform processing with precision on the order of nanometers or sub-nanometers, for example. In other words, the processing accuracy is less than 10 nm or less than 1 nm. The ultra-precision processing machine adjusts the shape of the aspherical glass lens by, for example, grinding using a diamond grindstone. At this time, cracks (microcracks) of micrometer order (in other words, 1 μm or more) occur. Microcracks are removed, for example, by polishing. However, when the microcracks are deep, the amount removed by polishing increases. As a result, the time required for polishing increases, and the shape accuracy obtained by grinding with an ultra-precision processing machine is impaired. Therefore, a grinding fluid (slurry 101) containing cerium oxide is supplied and grinding is performed using an ultra-precision processing machine. Then, due to the chemical action of cerium oxide, grinding and polishing can be performed simultaneously. As a result, a machined surface with few microcracks and high shape accuracy can be obtained.

On the other hand, cerium oxide has a relatively high mixing ratio and a relatively high density (7.2 g/cm ³ ). Therefore, cerium oxide tends to precipitate, and as a result, it is difficult to maintain the concentration of slurry 101 containing cerium oxide constant over a long period of time. By using the supply device 1 to supply such slurry 101, the concentration of slurry 101 can be easily maintained. In turn, it is possible to reduce the probability that a decrease in the concentration of the slurry 101 will affect processing accuracy.

(Support part)
FIG. 2 is a sectional view taken along line II-II in FIG. 1.

The support part 13 illustrated in FIGS. 1 and 2 includes, for example, a base 33, a first mechanism 35 that supports the tank 11 on the base 33 by a member located on the rotation axis RA, and an outer periphery of the tank 11 on the base 33. It has a second mechanism 37 that supports the surface.

Note that the base 33 may be regarded as part of the first mechanism 35 and/or the second mechanism 37. The first mechanism 35 and the second mechanism 37 may be directly installed on the floor of a factory or the like without providing the base 33. The support portion 13 may include only one of the first mechanism 35 and the second mechanism 37.

The base 33 is, for example, a member installed on the floor of a factory or the like. Its shape, dimensions, etc. may be set as appropriate. In the illustrated example, the base 33 is, for example, a generally plate-shaped member.

(First mechanism)
The first mechanism 35 includes a shaft member 39 inserted into the tank 11 and a pair of fixing members 41 supporting the shaft member 39. The tank 11 and the shaft member 39 are capable of relative rotation around the axis of the shaft member 39. Thereby, the tank 11 is supported by the shaft member 39 so as to be rotatable around the axis (rotation axis RA) of the shaft member 39. The fixing member 41 is fixed to the base 33. Furthermore, the fixed member 41 supports the shaft member 39 so as not to be rotatable around its axis.

The shape, dimensions, etc. of the shaft member 39 may be set as appropriate. In the illustrated example, the shaft member 39 has a length extending from one end surface (a surface intersecting the rotation axis RA) of the tank 11 to the other end surface. Unlike the illustrated example, two shaft members 39 may be provided in total, one at each end surface. In the illustrated example, the shaft member 39 is approximately shaft-shaped (elongated) having a constant diameter (see FIGS. 3 and 4 described later). Its cross-sectional shape is circular at least in the portion that pivotally supports the end face portion of the tank 11, and in this embodiment, it is circular over approximately the entire length. However, the shaft member 39 may have an enlarged diameter portion or a reduced diameter portion at an appropriate position in the length direction, or may have a portion whose cross-sectional shape is not circular.

The shape, dimensions, etc. of the fixing member 41 may be set as appropriate. In the illustrated example, the fixing member 41 is in the form of a pier erected on the base 33. More specifically, the fixing member 41 is made of a long sheet metal whose longitudinal direction is the vertical direction. One lower end of the elongated sheet metal is bent, and is fixed to the base 33 by inserting a screw (not shown) (see FIG. 3). However, the fixing member 41 is not limited to such a configuration. For example, the fixing member 41 may have a configuration in which it has plate-shaped portions facing each other across the tank 11 in the D1 direction. Further, the fixing member 41 may have a configuration in which the portions that sandwich the tank 11 in the D1 direction are integrally connected to each other without intervening the base 33 (or may be conceptually counted as one portion). ). Moreover, the fixing member 41 may not be constructed as a whole, but may be constructed by a combination of two or more members.

The shaft member 39 and the fixed member 41 may be connected in any suitable manner. For example, as shown in FIG. 3, which will be described later, the shaft member 39 has a portion outside the tank 11 that has a non-circular cross-sectional shape. The fixing member 41 has a hole or notch into which the non-circular portion fits. Thereby, the shaft member 39 is supported by the fixed member 41 in a non-rotatable manner. The non-circular shape may be any suitable shape, but in FIG. 3, an ellipse (a shape in which the short sides of a rectangle are arcuate) is illustrated. In such an embodiment, the shaft member 39 may simply be fitted into the fixing member 41, or in addition to fitting, the shaft member 39 may be fastened by welding, adhesion, or screws. The mode of connection is not limited to the above. For example, the shaft member 39 and the fixing member 41 may be fixed by welding, adhesion, or screws, with a portion of the shaft member 39 having a circular cross section inserted through the fixing member 41, or without even being inserted through the fixing member 41.

(Second mechanism)
The second mechanism 37 includes, for example, a shaft support member 43 fixed to the base 33 and a roller 45 rotatably supported by the shaft support member 43. Tank 11 is supported by rollers 45. Since the rollers 45 are rotatable around a rotation axis parallel to the rotation axis RA, rotation of the tank 11 around the rotation axis RA is allowed.

More specifically, for example, as shown in FIG. 2, one shaft support member 43 supports two rollers 45 at different positions in the D2 direction. The two rollers 45 are located on both sides of the outer circumferential surface of the tank 11 with the lowest part thereof interposed therebetween. Thereby, the movement of the tank 11 in the D2 direction is restricted, while the tank 11 is allowed to rotate around the rotation axis RA. Moreover, as shown in FIG. 1, two combinations of one shaft support member 43 and two rollers 45 are provided at mutually different positions in the D1 direction. This restricts the inclination of the tank 11 in the D1 direction.

The shape, dimensions, etc. of the shaft support member 43 may be set as appropriate. In the illustrated example, the shaft support member 43 has a generally plate shape facing the D1 direction. Its lower end is bent and fixed to the base 33 with screws (not shown). As shown in FIG. 2, the upper end of the shaft support member 43 is formed with a recess (not shown) located between the two rollers 45, and is capable of accommodating the lower end of the tank 11. Thereby, the tank 11 can be supported by the rollers 45 whose diameter is relatively smaller than that of the tank 11. However, the shaft support member 43 is not limited to such a configuration. For example, the shaft support member 43 may have a columnar shape provided for each roller 45. Furthermore, the parts that support the rollers 45 at different positions in the D1 direction may be integrally connected to each other without intervening the base 33 (the shaft support member 43 is conceptually counted as one). ). Moreover, the shaft support member 43 may not be constructed as a whole, but may be constructed by a combination of two or more members.

The shape, dimensions, etc. of the rollers 45 may be set as appropriate. In the illustrated example, the axial length is shorter than the diameter. Contrary to the illustrated example, the axial length may be longer than the diameter. In this case, the length of the rollers 45 in the axial direction may be increased to the extent that the two rollers 45 disposed at different positions in the D1 direction are configured as one roller. The entire roller 45 may be made of the same material, or the outer peripheral surface may be made of a different material (for example, an elastic material) from other parts.

The specific structure for pivotally supporting the roller 45 by the shaft supporting member 43 may also be made as appropriate. For example, a shaft member (not shown) inserted through the shaft support member 43 and the rollers 45 may be provided, and the shaft member may be rotatable relative to at least one of the shaft support member 43 and the rollers 45 . The shaft member may be supported by a sliding bearing or by a rolling bearing.

(Drive mechanism and control device)
In FIG. 2, a drive mechanism 47 that rotates the tank 11 and a control device 49 that controls the drive mechanism 47 are illustrated.

The configuration of the drive mechanism 47 may be any suitable configuration. In the illustrated example, the drive mechanism 47 includes an electric motor 51 and a transmission mechanism 53 that transmits rotation of the electric motor 51 to the tank 11.

The electric motor 51 is, for example, a rotary type, and has a stator, which is one of the field and the armature, and a rotor, which is the other of the field and the armature, and rotates with respect to the stator, although not particularly shown. are doing. The electric motor 51 may be, for example, a DC motor, an AC motor, an induction motor, or a synchronous motor. The electric motor 51 may be provided at an appropriate position and in an appropriate orientation relative to the tank 11. In the illustrated example, the electric motor 51 is arranged so that the rotation axis of the electric motor 51 is parallel to the D1 direction.

The transmission mechanism 53 may simply transmit the rotation of the electric motor 51 in order to improve the degree of freedom in the arrangement of the electric motor 51, or may play the role of slowing down or accelerating the rotation of the electric motor 51. In the illustrated example, the transmission mechanism 53 decelerates the rotation of the electric motor 51 and transmits it to the tank 11. Thereby, for example, the tank 11 can be rotated by the electric motor 51 with relatively low output. The rate of deceleration or speed increase may be set as appropriate.

The configuration of the transmission mechanism 53 may be appropriately selected. In the illustrated example, the transmission mechanism 53 is constituted by a pulley-belt mechanism. More specifically, for example, the transmission mechanism 53 connects a first pulley 55 fixed to the output shaft 51a of the electric motor 51, a second pulley 57 fixed to the tank 11, and a first pulley 55 and a second pulley 57. It has a belt 59 that is stretched around it. The diameter of the second pulley 57 is made larger than the diameter of the first pulley 55, thereby achieving deceleration as described above.

Note that in FIG. 1, a side surface of the second pulley 57 is schematically shown, and a cross section of the belt 59 is also shown. As shown in FIG. 2 , a shaft member 39 that rotatably supports the tank 11 is inserted through the second pulley 57 so as to be rotatable with respect to the second pulley 57 . The second pulley 57 may be a member attached to the end surface of the tank 11, or may be a member integrally formed with the end surface.

The transmission mechanism 53 may have an appropriate configuration other than the above. For example, the transmission mechanism 53 may be configured by a winding transmission mechanism (for example, a sprocket chain mechanism) other than a pulley belt mechanism. Furthermore, the transmission mechanism 53 may include a gear mechanism instead of or in addition to the winding transmission mechanism. Instead of providing the transmission mechanism 53, a member may be provided for fixing the output shaft 51a of the electric motor 51 and the tank 11 so that they are coaxially located.

The control device 49 includes, for example, a CPU (central processing unit), a ROM (read only memory), a RAM (random access memory), and an external storage device, although not particularly shown. In other words, the control device 49 includes, for example, a computer. Various functional units that perform control etc. are constructed by the CPU executing programs stored in the ROM and/or external storage device. Furthermore, the control device 49 may include a logic circuit that performs only certain operations, or may include a driver that supplies power to various elements.

For example, the control device 49 outputs a control command to the electric motor 51 via a driver (not shown). The control by the control device 49 is, for example, speed control to set the rotational speed of the electric motor 51 to a desired value. The control by the control device 49 may be open loop control. Feedback control may also be used. Further, the control of the electric motor 51 by a driver (not shown) may also be open loop control or feedback control. The control by the control device 49 may be such that the speed of the electric motor 51 is maintained constant, or may be such that the speed of the electric motor 51 is varied in a predetermined pattern. Further, the control device 49 may always rotate the electric motor 51 while the supply device 1 is in operation (from another point of view, while the slurry 101 is being supplied to the workpiece 103), or may rotate the electric motor 51 as necessary (for example, when the operator The electric motor 51 may be rotated when a predetermined operation is performed.

Note that the drive mechanism 47 may be regarded as a part of the storage device 3. Further, the drive mechanism 47 may not be provided and the tank 11 may be rotated manually.

(tank)
The shape, dimensions, etc. of the tank 11 may be set as appropriate. In the illustrated example, the tank 11 has a generally cylindrical shape. In other words, the inner peripheral surface of the tank 11 is approximately at the same distance from the rotation axis RA at any position. The same applies to the outer peripheral surface of the tank 11. Further, the end surfaces (the surfaces on both sides in the D1 direction) of the tank 11 are, for example, approximately planar orthogonal to the rotation axis RA. In the tank 11, either the axial length or the diameter may be longer, and in the illustrated example, the former is longer. Further, the ratio between the two may be set as appropriate.

Tank 11 has a space 11a that accommodates slurry 101. Note that in the embodiment where the shaft member 39 is located inside the tank 11, for convenience of expression, the space 11a includes the portion of the inside of the tank 11 that is occupied by the shaft member 39. Make it not exist. As will be described later, in addition to the shaft member 39, a predetermined portion or member (for example, a stirring member 63, which will be described later) may be located inside the tank 11. Strictly speaking, the area occupied by such parts or members inside the tank 11 is not a space. However, for convenience, these parts or members may be expressed as being located within the space 11a.

The space 11a can be considered to be located around the rotation axis RA. Further, in this embodiment, the space 11a is connected around the rotation axis RA. Note that the expression that the space 11a is located around the rotational axis RA or that the space 11a is connected around the rotational axis RA means that, for example, the first mechanism 35 is not provided, It also includes a mode in which the member 39 is not located at the rotation axis RA. As can be understood from the description of the shapes of the tank 11 and the shaft member 39, the shapes of the outer circumferential surface and the inner circumferential surface of the space 11a are approximately cylindrical (cylindrical) in the illustrated example.

FIG. 3 is a partially perspective view of the tank 11. FIG. 4 is a sectional view taken along the line IV--IV in FIG. 3. Note that FIGS. 3 and 4 differ in the position of the tank 11 around the rotation axis RA. More specifically, FIG. 3 depicts the tank 11 in a rotational position in which eight stirring members 63 (some of which are not shown), which will be described later, are tilted vertically and horizontally. In FIG. 4, the tank 11 is depicted in a rotational position in which the stirring member 63 is parallel to the vertical or horizontal direction.

The tank 11 includes, for example, a tank body 61 and one or more stirring members 63. The tank body 61 is a part that constitutes the majority of the tank 11. From another perspective, the tank body 61 is a portion that has the space 11a and is supported by the support portion 13 so as to be rotatable around the rotation axis RA. The stirring member 63 is located within the space 11a, for example, and contributes to stirring the slurry 101.

Regarding the shape, dimensions, etc. of the tank body 61, the above description regarding the shape, dimensions, etc. of the tank 11 may be used unless there is a contradiction. The tank body 61 may be constructed of an appropriate number of members having an appropriate shape. In the example shown in FIG. 4, although no particular reference numerals are given, the tank body 61 mainly consists of a pair of roughly disc-shaped end faces (surfaces intersecting the rotation axis RA) of the tank body 61. a pair of annular members fixed to the edges of opposing surfaces of the pair of disc-shaped members; and a pair of annular members fixed to the recesses extending along the pair of annular members. and a cylindrical member constituting the outer circumferential surface of the tank body 61 around the rotation axis RA. In the example shown in FIG. 4, the second pulley 57 described above is integrally formed with the tank body 61 as a part of a disc-shaped member that constitutes the end face.

The tank body 61 and the shaft member 39 may be connected as appropriate. In the example shown in FIG. 4, a rolling bearing 65 and an annular packing 67 are interposed between the tank body 61 and the shaft member 39. However, instead of the rolling bearing 65, a sliding bearing may be used. Depending on the aspect of the bearing, the packing may be omitted.

(stirring member)
The stirring member 63 is fixed to the tank body 61 and moves around the rotation axis RA as the tank body 61 rotates. This makes it possible to stir the slurry 101, which tends to stay in place due to inertial force.

In the illustrated example, the stirring member 63 is made of a member different from the member that makes up the tank body 61. However, the stirring member 63 may be configured integrally with the members that constitute the tank body 61. In such a case, the stirring member 63 and the portion that is not the stirring member (the portion exposed within the space 11a of the tank body 61) may be distinguished from the viewpoint of whether or not it has a stirring function. . From the viewpoint of shape, a portion (a portion having a surface that intersects in the tangential direction) facing a direction (for example, tangential direction) around the rotation axis RA within the space 11a may be considered to be a part of the stirring member. Alternatively, for example, assuming a cylindrical shape whose radius is the maximum distance (maximum radius) from the rotation axis RA to the inner surface of the tank 11, a portion having a shape that deviates significantly from this cylindrical shape may be specified as the stirring member 63. .

The shape, size, position, number, etc. of the stirring member 63 may be set as appropriate. In the illustrated example, the stirring member 63 is constituted by a generally flat plate-like (feather-like) member, and is provided at four locations around the rotation axis RA and two locations on both sides of the rotation axis RA (8 locations in total). ing. More details are as follows.

The stirring member 63 is formed into a generally plate shape as described above. In other words, the stirring member 63 has a plate-like portion 63a. The plate-shaped portion 63a is a portion facing in the direction around the rotation axis RA within the space 11a, and directly plays a stirring function. Note that in this embodiment, the plate-like portion 63a occupies most of the stirring member 63. In the description of this embodiment, the terms ``stirring member 63'' and ``plate-shaped portion 63a'' may be replaced with each other unless a contradiction occurs. The stirring member 63 having such a plate-like portion 63a may be made of, for example, a sheet metal.

The orientation of the plate-like portion 63a may be set as appropriate. In the illustrated example, the plate-like portion 63a is arranged in such a direction that the normal line of the plate-like portion 63a is parallel to the direction (tangential direction) around the rotation axis RA. From another perspective, the plate-like portion 63a is arranged such that the rotation axis RA is located within a virtual plane that is an extension of the plate-like portion 63a. In other words, when viewed parallel to the rotation axis RA, the plate-like portion 63a extends in the radial direction centered on the rotation axis RA, and when viewed in the radial direction centered on the rotation axis RA, , the plate-like portion 63a extends parallel to the rotation axis RA. However, the plate-like portion 63a may be arranged such that the normal line of the plate-like portion 63a is inclined with respect to the direction (tangential direction) around the rotation axis RA. For example, when viewed parallel to the rotation axis RA, the plate-like portion 63a may be inclined with respect to the radial direction centered on the rotation axis RA. And/or when viewed in the radial direction centered on the rotation axis RA, the plate-like portion 63a may be inclined with respect to the rotation axis RA.

The shape of the plate-like portion 63a may be set as appropriate. In the illustrated example, the plate-like portion 63a is flat (planar) as described above. Further, the planar shape of the plate-like portion 63a is approximately a rectangle having long sides parallel to the D1 direction. However, the plate-shaped portion 63a may be partially or entirely curved. Further, the planar shape of the plate-like portion 63a may be a shape other than the above. For example, the planar shape of the plate-like portion 63a may be a polygon other than a rectangle, a rectangle with short sides parallel to the D1 direction, or a shape with curved or uneven edges. There may be. The thickness of the plate-shaped portion 63a may be set as appropriate, but it is thin enough that the plate shape can be conceptualized. For example, the thickness of the plate-like portion 63a is determined relative to the length of the long side (for example, the maximum diameter if it is not rectangular) and/or the length of the short side (for example, the minimum diameter if it is not rectangular) of the plate-like portion 63a. , 1/5 or less, 1/10 or less, 1/20 or 1/40 or less.

For example, the plate-like portion 63a has a length L2 (Fig. 4). The length L2 may be set as appropriate. For example, the length L2 may be less than 1/2 or 1/4 of the length L1, or may be 1/2 or more or 3/4 or more. In the illustrated example, the length L2 occupies 1/3 or more and 2/3 or less of the length L1, more specifically, 2/5 or more and 3/5 or less, and more specifically, approximately It accounts for 1/2. In addition, when the length L2 of the plate-like part 63a is not constant in the D1 direction, the average value of the length L2 may satisfy the above requirements, for example. Similarly, average values may be referred to for other lengths.

As mentioned above, the fact that the length L2 of the plate-like part 63a is a part of the length L1 of the space 11a in the radial direction centering on the rotation axis RA means that from another point of view, the plate-like part 63a is , the length L1. At this time, the plate-shaped portion 63a may be located closer to the outer periphery in the radial direction centering on the rotation axis RA (as shown in the figure), or may be located closer to the rotation axis RA, or both. It may be located in a position where there is no.

Note that being located closer to the outer periphery refers to, for example, a direction around the rotation axis RA in which the projected area of the plate-like portion 63a is maximized (in the illustrated example, a direction perpendicular to the plate-like portion 63a). When viewed in the first direction (hereinafter referred to as the first direction), the center of gravity of the plate-shaped portion 63a is located on the outer circumferential side of the center of the length L1 of the space 11a from the rotation axis RA side to the outer circumferential side. good. Note that the above-mentioned concept based on the view in the first direction is applicable to other explanations regarding the position, dimensions, etc. of the plate-like portion 63a in the radial direction centered on the rotation axis RA, unless there is a contradiction. may also be used.

In the illustrated example, the plate-like portion 63a is located closer to the outer circumferential side. More specifically, the plate-like portion 63a has a length that is 2/3 or less or 3/5 or less of the length L1 on the outer peripheral side. When it is said that the length is within 2/3 or 3/5 of the outer circumferential side, the plate-like portion 63a may occupy part of 2/3 or 3/5 of the length, It may take up all of it. In the illustrated example, it occupies most (for example, 80% or more) of the outer circumferential 3/5 of the length L1.

The above position examples and length examples may be combined as appropriate. For example, when the length of the plate-shaped portion 63a is within 2/3 or less of the outer peripheral side of the length L1, the length of the plate-like portion 63a is 1/3 or more and 2/3 or less of the length L1, or It may have a length of 2/5 or more and 3/5 or less, and when it is within 3/5 or less of the outer circumference, it may have a length of 1/3 or more and 2/3 of the length L1, as long as it does not contradict this. It may have a length of 3 or less, or 2/5 or more and 3/5 or less.

As described above, in the illustrated example, the plate-like portion 63a occupies only a part of the length L1 of the space 11a from the rotation axis RA side to the outer peripheral side. From another point of view, this is due to the difference between the plate portion 63a and the shaft member 39 (or the rotation axis RA if the shaft member 39 is not provided), and between the plate portion 63a and the inner circumferential surface of the tank body 61. This means that there is a gap on at least one side between them. In other words, the space 11a is connected around the rotation axis RA without being interrupted by the plate-shaped portion 63a on at least one of the rotation axis RA side and the outer peripheral side. In the illustrated example, there are gaps on both the rotation axis RA side and the outer peripheral side.

As can be understood from the explanation of the position and length L2 of the plate-like portion 63a in the radial direction centering on the rotation axis RA mentioned above, the length of the above-mentioned gap (L3 and L4 shown in FIG. 4) can be adjusted as appropriate. May be set. For example, either length L3 or L4 may be longer, and in the illustrated example, the former is longer than the latter. Further, the length L3 may be, for example, 1/3 or more or 2/5 or more. In the illustrated example, the length L4 is shorter than the lengths L2 and L3, for example, 1/5 or less, 1/10 or less, or 1/20 or less of the lengths L2 and/or L3. . Note that the length L4 may be 0 (the gap on the outer circumferential side may be eliminated).

In the direction parallel to the rotation axis RA (direction D1), the length L5 (FIG. 4; maximum value or average value) of the plate-like portion 63a may be set as appropriate. In the illustrated example, the length L5 is set shorter than the length of the space 11a in the D1 direction so that the plate-like portion 63a does not come into contact with a tube 69 (described later) when it moves around the rotation axis RA. More specifically, in the illustrated example, the tube 69 is located at the center of the space 11a in the D1 direction, and the length L5 is less than half the length of the space 11a in the D1 direction. ing. The length L5 may be made as long as possible, for example, as long as contact with the tube 69 can be avoided. For example, the distance (shortest distance) between the tube 69 and the plate-like portion 63a in the D1 direction may be twice or less the diameter of the tube 69. In addition, from another viewpoint, the length L5 may be 2/3 or more, 3/4 or more, or 4/5 or more of half the length of the space 11a in the D1 direction.

Although not particularly illustrated, in an embodiment in which the tube 69 is disposed biased to one side in the D1 direction with respect to the space 11a, the length L5 of the plate-shaped portion 63a disposed on the other side in the D1 direction is may also be made longer. Further, even in an embodiment in which the tube 69 is not provided, the length L5 may be made longer than the above. For example, the length L5 may be 1/2 or more of the length of the space 11a in the D1 direction, or may be equal to the length of the space 11a in the D1 direction. Further, even in an embodiment in which the length L2 of the plate-like portion 63a is relatively short and the position of the upper end of the tube 69 is relatively low, so that the plate-like portion 63a can pass above the tube 69, the above-mentioned tube 69 is provided. The length L5 may be increased as in the case where the length L5 is not set.

In the D1 direction, the number of positions where the plate-like portions 63a are provided may be set as appropriate. In the illustrated example, the plate-like portions 63a are arranged on both sides in the D1 direction, as described above. That is, in the D1 direction, there are two positions where the plate-like portions 63a are provided. However, the plate-like portion 63a may be arranged only on one side in the D1 direction. In other words, the plate-like portion 63a may be provided at only one location in the D1 direction. Further, as can be understood from the above description of the length in the D1 direction, in a mode in which the tube 69 is not provided or in a mode in which the plate-like portion 63a can pass above the tube 69, the D1 direction of the space 11a is The plate-like portion 63a may be provided over most (for example, 80% or more) or all of the length in the direction (it may be provided in such a manner that one side and the other side in the D1 direction cannot be conceptualized). Furthermore, the plate-like portions 63a may be provided at three or more locations in the D1 direction.

Around the rotation axis RA, the number of plate-like portions 63a may be set as appropriate, and the angular interval between the plate-like portions 63a may also be set as appropriate. In the illustrated example, four plate portions 63a are equally provided around the rotation axis RA on each of both sides in the D1 direction. That is, the angular interval between the plate portions 63a is 90 degrees. However, unlike the illustrated example, the plate portions 63a may be provided in one or more, three or less, or five or more pieces around the rotation axis RA. Furthermore, the intervals between the plate-like portions 63a around the rotation axis RA may be unequal.

In an embodiment in which the plate-like portions 63a are provided at a plurality of positions in the D1 direction, the number of plate-like portions 63a may be the same (as illustrated) or may be different at different positions in the D1 direction. good. Further, the relative positions of the plate-shaped portions 63a at different positions in the D1 direction around the rotation axis RA may be set as appropriate. In the illustrated example, the number of plate-like portions 63a is the same on one side in the D1 direction and the other side in the D1 direction, and the positions of the plate-like portions 63a around the rotation axis RA are the same. However, the position of the plate-shaped portion 63a around the rotation axis RA may be different between one side in the D1 direction and the other side in the D1 direction. For example, the number of plate-like parts 63a is the same on one side in the D1 direction and the other side in the D1 direction, and the positions of the plate-like parts 63a are shifted by half the angular interval (45° in the illustrated example). You can leave it there.

The stirring member 63 may be fixed to an appropriate portion of the tank body 61 by an appropriate method. For example, the stirring member 63 may be fixed to the end surface of the tank body 61 (the surface intersecting the rotation axis RA) (as shown in the figure), or the stirring member 63 may be fixed to the inner peripheral surface of the tank body 61 (the surface around the rotation axis RA). (a surface constituting the outer peripheral surface of the space 11a). Further, unlike the illustrated example, in an embodiment in which the tank body 61 has a cylindrical portion that surrounds the shaft member 39 and constitutes the inner peripheral surface of the space 11a, the outer peripheral surface of the cylindrical portion (the outer peripheral surface of the space 11a) The stirring member 63 may be fixed to the inner peripheral surface. Further, the fixing may be performed by an appropriate method such as screws, welding, and/or adhesive. Fixing may include fixing by integrally forming part or all of the stirring member 63 with a member that constitutes part or all of the tank body 61.

In the illustrated example, the stirring member 63 is made of a sheet metal, and its ends are bent. Then, a screw is inserted through the bent portion and fixed to the end surface of the tank body 61.

(Inflow path, outflow path and ventilation path)
As shown in FIG. 4, the storage device 3 has an inflow path 71 for allowing the slurry 101 to flow into the space 11a of the tank 11, and an outflow path 73 for causing the slurry 101 to flow out from the space 11a. The storage device 3 also has a ventilation path 75 for opening a portion of the space 11a above the liquid level of the slurry 101 to the surrounding atmosphere (for example, the atmosphere). These channels are formed, for example, to penetrate the shaft member 39. That is, unlike the tank 11, these channels are configured not to rotate. As a result, for example, it has become easier to connect external equipment. Specifically, for example, it is as follows.

The shaft member 39 is inserted into the tank 11 and has an inner part 39a located inside the tank 11 and an outer part 39b exposed to the outside of the tank 11. In the illustrated example, the shaft member 39 has two outer portions 39b at both ends. Further, the outer portion 39b projects outside the tank 11. However, as is clear from the fact that the first mechanism 35 may be omitted and the tank 11 may be supported by the second mechanism 37, it is also possible to have only one outer portion 39b, and the end surface of the shaft member 39 It is also possible to expose (not protrude) only the tank 11. The flow paths (71, 73, and 75) communicate the space 11a with the outside of the tank 11 by passing through the shaft member 39 from the outer part 39b to the inner part 39a.

The inflow path 71 is configured by, for example, a flow path passing through the shaft member 39 and a flow path passing through a connecting member 77 fixed to the shaft member 39. Note that the connecting member 77 may not be provided. The inflow path 71 has, for example, the following first to third portions (numerals omitted). The first portion extends along the axis of the shaft member 39 from the outer portion 39b to the inner portion 39a. One or more (two in the illustrated example) second portions extend in the radial direction of the shaft member 39 from the end of the first portion on the inner side 39a side and open into the space 11a. One or more (two in the illustrated example) third portions extend in the radial direction of the shaft member 39 from the end of the first portion on the outside portion 39b side and open to the outside. In this embodiment, a flow path 71a connected to the replenishment path 31 and a flow path 71b connected to the branch path 7 are provided as the third portion.

The outflow path 73 is configured by, for example, a flow path passing through the shaft member 39 and a tube 79 fixed to the shaft member 39. Note that the pipe 79 may not be provided. The outflow path 73 has, for example, the following first part and second part (numerals omitted). The first portion extends along the axis of the shaft member 39 from the outer portion 39b to the inner portion 39a. The end of the first portion on the outside portion 39b side opens at the end surface of the shaft member 39 and communicates with the outside of the tank 11. A supply path 15 is connected to this end. The third portion extends in the radial direction of the shaft member 39 from the end of the first portion on the inner side 39a side and opens into the space 11a. A tube 79 is inserted through the third portion. Thereby, the flow path in the shaft member 39 and the flow path in the pipe 79 are connected. Note that this connecting portion may be considered as a part of the flow path within the shaft member 39 or may be considered as a part of the flow path within the pipe 79.

The above-mentioned outflow passage 73 not only extends through the shaft member 39 but also is extended by a pipe 79 extending from the shaft member 39 . Thereby, the slurry 101 can be sucked at any position in the radial direction centering on the rotation axis RA. The pipe 79 is, for example, linear and extends in the radial direction of the rotation axis RA (shaft member 39 from another perspective). However, the tube 79 may extend in a direction inclined to the D3 direction, or may be partially or entirely bent.

The ventilation passage 75 includes, for example, a first passage 75a that passes through the shaft member 39 from the outer part 39b to the inner part 39a, and a second passage 75b in the pipe 69 that extends upward from the shaft member 39. ing. More specifically, the first flow path 75a includes, for example, the following first to third portions (numerals omitted). The first portion extends along the axis of the shaft member 39 from the outer portion 39b to the inner portion 39a. The second portion extends in the radial direction of the shaft member 39 from the end of the first portion on the outside portion 39b side and opens to the outside of the tank 11. The third portion extends in the radial direction of the shaft member 39 from the end of the first portion on the inner side 39a side and opens into the space 11a. A tube 69 is inserted through the third portion, and the first flow path 75a and the second flow path 75b are connected. Note that this connecting portion may be considered as a part of the first flow path 75a or a part of the second flow path 75b. For example, the pipe 69 extends vertically upward in a straight line. However, the pipe 69 may be inclined with respect to the vertical direction, or partially or entirely bent.

The tank 11 is opened to the atmosphere outside the tank 11 (for example, the atmosphere) until the slurry 101 reaches the upper end of the pipe 69 (second flow path 75b). In other words, the tank 11 may store the slurry 101 to a height below the upper end of the pipe 69. As mentioned above, the liquid level in the tank 11 may be managed, for example, by detecting the liquid level of the slurry 101 in the replenishment container 29. However, the liquid level of the slurry 101 may be managed by, for example, providing a sensor for detecting the liquid level in the pipe 69 (the refill container 29 is not an essential requirement). Note that regarding the sensor that detects the liquid level, the explanation given in the explanation of the replenishment container 29 may be used.

Note that the above-described inflow path 71, outflow path 73, and ventilation path 75 are merely examples, and may be modified as appropriate. For example, like the outflow path 73, the inflow path 71 may open to the outside from the end surface of the shaft member 39, the pipe 79 may be provided, or the inflow path 71 may not be branched. The outflow path 73, like the inflow path 71, may branch at the inner part 39a and/or the outer part 39b. The ventilation path 75 may be opened to the outside from the end surface of the shaft member 39, or may be branched at the outer portion 39b. The direction in which the flow path branches is not limited to vertical direction, and may be, for example, horizontal direction. The number of branches may be three or more.

As described above, the slurry supply device 1 according to the present embodiment includes the tank 11. The tank 11 has a space 11a around a rotation axis RA that intersects in the vertical direction. Further, the supply device 1 includes an inflow portion (inflow path 71) that allows the slurry 101 to flow into the space 11a, an outflow portion (outflow path 73) that allows the slurry 101 to flow out from the space 11a, and rotates the tank 11 around the rotation axis RA. It has a support part 13 that is capable of supporting it.

From another perspective, the slurry supply method according to the present embodiment includes an inflow step of flowing the slurry 101 into the space 11a of the tank 11 having a space 11a around the rotation axis RA that intersects in the vertical direction; The tank 11 containing the tank 11 is rotated around the rotation axis RA, and the slurry 101 is supplied by flowing out the slurry 101 from the space 11a.

Therefore, it is facilitated to maintain the concentration of the slurry 101 supplied from the outflow path 73. Specifically, it is as follows. As described above, the solid content contained in the slurry 101 may precipitate. As a result, the concentration of solids in slurry 101 decreases. In the tank 11, solid content precipitates on a portion of the inner peripheral surface around the rotation axis RA that is located below the rotation axis RA. However, when the tank 11 is rotated around the rotation axis RA, the precipitated solids are transported upward and then fall. As a result, the precipitated solid content will be dispersed in the dispersion medium. As a result, the concentration of solids in slurry 101 is maintained.

The tank 11 may include a tank body 61 and a stirring member 63. The tank body 61 may have a space 11a, and may be supported by the support portion 13 so as to be rotatable around the rotation axis RA. The stirring member 63 may have a portion facing in the direction around the rotation axis RA within the space 11a, and may be fixed to the tank body 61.

In this case, for example, the effect of maintaining the concentration of the slurry 101 described above is improved. Specifically, for example, it is as follows. An embodiment in which the inner circumferential surface of the tank body 61 (the outer circumferential surface of the space 11a) is cylindrical around the rotation axis RA, and the stirring member 63 is not provided (this embodiment may also be included in the technology according to the present disclosure). In this case, even if the tank body 61 rotates, the dispersion medium (liquid) of the slurry 101 remains in place due to inertial force and does not flow much. However, as the stirring member 63 moves around the rotation axis RA as the tank body 61 rotates, the flow of the dispersion medium is promoted. As a result, for example, the amount of precipitated solids transported upward can be increased, and the falling solids can be evenly dispersed in the dispersion medium. As a result, the concentration of solids in slurry 101 is maintained.

The stirring member 63 may have a plate-shaped portion 63a facing in a direction around the rotation axis RA. The plate-shaped portion 63a may be located only in a part of the length L1 of the space 11a from the rotation axis RA side to the outer peripheral side. The space 11a may be connected around the rotation axis RA on at least one of the rotation axis RA side and the outer peripheral side of the plate-shaped portion 63a.

In this case, for example, since the plate-shaped portion 63a has a small volume compared to the area contributing to stirring, it can suppress the reduction in volume of the space 11a due to the provision of the stirring member 63 while suppressing the stirring action. Obtainable. Further, for example, by positioning the plate-like portion 63a in a part of the length L1, it is possible to suppress a decrease in the volume of the space 11a. Furthermore, the fact that the plate-shaped portion 63a is located in a part of the length L1 means that a gap is created in which the slurry 101 can exist on at least one of the rotation axis RA side or the outer peripheral side of the plate-shaped portion 63a. It is expected that the slurry 101 will be microscopically stirred by the generation of eddies in this gap.

The plate-shaped portion 63a may extend over ⅓ or more and ⅔ or less of the length of the space 11a from the rotation axis RA side to the outer circumferential side, and may be located closer to the outer circumference. The space 11a may be connected around the rotation axis RA on the rotation axis RA side of the plate-shaped portion 63a.

In this case, for example, since the plate-like portion 63a has a sufficient length in the radial direction centered on the rotation axis RA, a sufficient stirring effect can be obtained. On the other hand, for example, since the space 11a is connected on the rotation axis RA side, the probability that the solid matter that is transported upward and falls is received by the plate-like portion 63a is reduced. In other words, a distance is ensured in which the solid content can fall. As a result, the probability that the effect of dispersing the solids is reduced due to falling of the solids is reduced.

The plate-like portion 63a may protrude into the space 11a from an end surface of the tank body 61 that intersects with the rotation axis RA. The space 11a may be connected around the rotation axis RA on the outer peripheral side of the plate-shaped portion 63a.

In this case, for example, since the plate-like portion 63a is fixed to the end surface of the tank body 61, it may be fixed to the inner peripheral surface of the tank body 61 (this aspect may also be included in the technology according to the present disclosure). ), it is possible to create a gap on the rotation axis RA side and also create a gap on the outer circumferential side. The gap on the outer circumferential side allows, for example, generation of vortex flow due to movement of the plate-like portion 63a. As a result, the precipitated solids tend to fly up, promoting the dispersion of the solids. Further, for example, in the tank body 61, the end surface is planar and the inner circumferential surface is curved, so the structure for fixing the stirring member 63 to the tank body 61 is simplified.

The support portion 13 may include a shaft member 39 and a fixing member 41. The shaft member 39 may be inserted through the tank 11 so that the rotation axis RA is located at the axis, and may be able to rotate relative to the tank 11 around the rotation axis RA. The fixed member 41 may support the shaft member 39 in a non-rotatable manner around its axis. The shaft member 39 may have an inner part 39a located inside the tank 11 and an outer part 39b exposed outside the tank 11. The inflow path 71 may communicate between the outside of the tank 11 and the space 11a by passing through the shaft member 39 from the outer part 39b to the inner part 39a. The outflow path 73 may communicate the space 11a with the outside of the tank 11 by passing through the shaft member 39 from the inner part 39a to the outer part 39b.

In this case, the inflow path 71 and the outflow path 73 do not move even if the tank 11 rotates. Therefore, for example, compared to an embodiment in which the tank 11 (from another perspective, a member that rotates together with the tank 11) is provided with the inflow channel 71 or the outflow channel 73 (this embodiment may also be included in the technology according to the present disclosure), The degree of freedom in designing the outside of the tank 11 is improved. For example, there is no need to provide a flexible hose that deforms as the tank 11 rotates, or to provide a special mechanism that maintains communication of the flow path without rotational movement.

The supply device 1 may have a ventilation path 75 that opens a portion of the space 11a of the tank 11 above the liquid level of the slurry 101 to the atmosphere outside the tank 11. The ventilation path 75 may have a first flow path 75a and a second flow path 75b. The first flow path 75a may pass through the shaft member 39 from the outer part 39b to the inner part 39a. The second flow path 75b may be constituted by a tube 69 extending upward from the shaft member 39, and may be connected to the first flow path 75a.

In this case, for example, since the inside of the tank 11 is opened to the atmosphere outside the tank 11, the pressure inside the tank 11 can be kept constant even if the slurry 101 increases or decreases. As a result, for example, the amount of slurry 101 supplied by pump 17 can be stabilized. Further, by providing the ventilation path 75 in the shaft member 39, the configuration for ventilation can be simplified. By providing the pipe 69, for example, the opening position of the ventilation passage 75 into the tank 11 can be raised, which in turn increases the liquid level of the slurry 101 and increases the amount of the slurry 101 that can be stored by the tank 11. be able to.

The supply device 1 may have a ventilation channel 75 and a replenishment container 29 . The replenishment container 29 may be connected to the space 11a via the inflow path 71, and by being open to the atmosphere in which the ventilation path 75 is open, the replenishment container 29 may have a liquid level at the same height as the liquid level in the space 11a. Slurry 101 may be stored.

In this case, for example, the liquid level in the tank 11 can be controlled by the liquid level in the replenishment container 29. As a result, for example, there is no need to provide a sensor for detecting the liquid level in the tank 11, and the storage device 3 can be simplified. Further, for example, by supplying the slurry 101 to the replenishment container 29 while checking the liquid level of the replenishment container 29, the slurry 101 can be refilled into the tank 11 to a desired liquid level height, so the replenishment work of the slurry 101 can be performed. (Including the work of supplying slurry 101 into empty tank 11) is facilitated.

The supply device 1 may include a collection container 23 that collects the slurry 101 supplied from the tank 11 to the workpiece 103 via the outflow path 73, and a reflux path 25 that extends from the collection container 23 to the inflow path 71.

In this case, for example, reduction of the slurry 101 in the tank 11 can be suppressed. As a result, the slurry 101 can be supplied from the tank 11 for a long time. When the slurry 101 is held in the tank 11 for a long time, solid matter tends to precipitate, but by the various means described above, the solid matter precipitate is suppressed and the concentration of the slurry 101 is maintained. Ru.

The supply device 1 includes a pump 17 that sends out the slurry 101 from the outflow path 73, a pressure feed path 15a that feeds the slurry 101 from the pump 17 to the workpiece 103, and a branch path that branches from the pressure feed path 15a and leads to the inflow path 71. 7.

In this case, for example, as described above, the degree of freedom in designing the pump 17 is improved. Further, for example, when the slurry 101 flows into the tank 11 from the branch path 7, some flow of the slurry 101 occurs in the tank 11. As a result, stirring of the slurry 101 is promoted, and the effect of keeping the concentration constant is also expected.

The supply device 1 may include an electric motor 51 that drives the tank 11 around the rotation axis RA, and a control device 49 that controls the electric motor 51.

In this case, for example, the tank 11 can be rotated more stably than in a mode in which the tank 11 is manually rotated (this mode may also be included in the technology according to the present disclosure).

In addition, in the above embodiment, the inflow path 71 is an example of an inflow part. The outflow path 73 is an example of an outflow section.

The technology according to the present disclosure is not limited to the above embodiments, and may be implemented in various ways.

For example, the slurry supply device 1 according to the embodiment can be used in a slurry generation device and a slurry generation method. The slurry generation method includes, for example, a placement step of placing a dispersion medium and a dispersoid in a space 11a of a tank 11 having a space 11a around a rotation axis RA that intersects in the vertical direction; and a step of accommodating a dispersion medium and a dispersoid. The rotation step may include a rotation step of rotating the tank 11 that is currently in operation around the rotation axis RA.

In this production method, the step of placing the dispersion medium and dispersoid in the tank may be, for example, supplying the dispersion medium and dispersoid separately to the tank, or diluting the slurry with the slurry stock solution. It may also be one that supplies a dispersion medium. The dispersion medium and the dispersoid may be placed in the tank, for example, by one or more inlets, as in the embodiment, or by other dedicated openable and closable supply ports.

In embodiments, the operation of dispersing precipitated solids by rotating the tank 11 may be considered as generating a slurry. In this case, the step of flowing the slurry into the tank 11 from the inflow portion (inflow path 71) may be regarded as the step of arranging the dispersion medium and dispersoid in the tank in the production method.

Moreover, the slurry is not limited to a grinding liquid or a polishing liquid. For example, slurry may be used for cleaning, it may be a drug administered to the human body, or it may be a molding material that becomes a molded product by being supplied into a mold and removing the liquid. It may be.

In another aspect, the target to which the slurry is supplied is not limited to a workpiece processed by a machine tool. The object to which the slurry is supplied may be an object to be cleaned, a container holding a drug, or a mold.

The equipment that processes the workpiece is not limited to a machine tool, and may be, for example, a semiconductor manufacturing device. The processing on the workpiece is not limited to grinding and/or polishing, and may be, for example, cutting.

As mentioned in the description of the embodiment, the supply system, the collection system, and/or the branch path may not be provided. The inflow portion and the outflow path may not have a length that can be called a flow path (inflow port and outflow port), and may not be provided in the shaft member. For example, an inlet may be provided at an appropriate position on the tank body, and a lid may be provided to open and close the inlet. Then, the slurry may be supplied into the tank by opening the lid while the tank is stopped.

The stirring member is not limited to a plate-shaped member, nor is it limited to a member located only in a part of the length from the rotation axis side to the outer peripheral side of the space. For example, the stirring member may be rod-shaped, a partition wall that partitions the inside of a tank, a spiral shape centered on a rotating shaft like a screw, a punched metal shape, or a mesh shape. Alternatively, the dimension around the rotation axis may be larger than other dimensions (having a thickness that cannot be said to be plate-like). In extreme terms, it is sufficient that the agitating member occupies a portion of the space within the tank, thereby breaking the circular shape around the rotation axis in the remaining space. However, fine structures that cannot contribute to stirring are not included in the stirring member.

DESCRIPTION OF SYMBOLS 1... Slurry supply device, 3... Storage device, 11... Tank, 13... Support part, 73... Inflow path (inflow part), 75... Outflow part (outflow path), 101... Slurry, RA... Rotation shaft.

Claims (12)

A tank having a space around a rotation axis that intersects in the vertical direction,
an inflow section that allows slurry to flow into the space;
an outflow portion that flows out the slurry from the space;
a support part that rotatably supports the tank around the rotation axis;
It has
The support part is
a shaft member that is inserted through the tank so that the rotational shaft is located at the axis, and that is rotatable relative to the tank around the rotational axis;
a fixed member that supports the shaft member so as not to rotate about the shaft,
The shaft member is
an inner portion located within the tank;
an outer portion exposed outside the tank;
The inflow part is a flow path that communicates the outside of the tank with the space by passing through the shaft member from the outer part to the inner part,
The outflow portion is a flow path that communicates the space with the outside of the tank by passing through the shaft member from the inside portion to the outside portion.
Slurry supply equipment. A tank having a space around a rotation axis that intersects in the vertical direction,
an inflow section that allows slurry to flow into the space;
an outflow portion that flows out the slurry from the space;
a ventilation path that opens a portion of the space above the liquid level of the slurry to the atmosphere outside the tank;
a support part that rotatably supports the tank around the rotation axis;
It has
The support part is
a shaft member that is inserted through the tank so that the rotational shaft is located at the axis, and that is rotatable relative to the tank around the rotational axis;
a fixed member that supports the shaft member so as not to rotate about the shaft,
The shaft member is
an inner portion located within the tank;
an outer portion exposed outside the tank;
The ventilation path is
a first flow path passing through the shaft member from the outer part to the inner part;
a second flow path configured by a tube extending upward from the shaft member and connected to the first flow path;
Slurry supply equipment. The tank is
a tank body having the space and being rotatably supported around the rotation axis by the support portion;
The slurry supply device according to claim 1 or 2 , further comprising: a stirring member that has a portion facing in a direction around the rotation axis in the space and is fixed to the tank main body. The stirring member has a plate-shaped portion facing in a direction around the rotation axis,
The plate-shaped portion is located only in a part of the length of the space from the rotating shaft side to the outer circumferential side, and the plate-shaped portion is located in at least one of the rotating shaft side and the outer circumferential side of the space. The slurry supply device according to claim 3 , wherein are connected around the rotation axis. The plate-shaped portion extends over 1/3 or more and 2/3 or less of the length of the space from the rotating shaft side to the outer circumferential side, and is located closer to the outer circumference, and is located closer to the outer circumference. The slurry supply device according to claim 4 , wherein the space is connected around the rotation axis on the rotation axis side of the plate-shaped portion. The plate-shaped portion protrudes into the space from an end surface of the tank body that intersects with the rotation axis, and the space is connected around the rotation axis on the outer peripheral side of the plate-shaped portion . The slurry supply device described in . a ventilation path that opens a portion of the space of the tank above the liquid level of the slurry to the atmosphere outside the tank;
a replenishment container connected to the space via the inflow part and open to the atmosphere to store slurry at a liquid level that is the same as the liquid level in the space;
The slurry supply device according to any one of claims 1 to 6 , comprising: a collection container that collects the slurry supplied from the tank to the workpiece;
a reflux path leading from the collection container to the inflow section;
The slurry supply device according to any one of claims 1 to 7 , comprising: a pump for pumping slurry from the outlet;
a pressure feed path for supplying slurry from the pump to the workpiece;
a branch path branching from the pressure feeding path and leading to the inflow section;
The slurry supply device according to any one of claims 1 to 8 , comprising: an electric motor that drives the tank around the rotation axis;
a control device that controls the electric motor;
The slurry supply device according to claim 9 , comprising: A method for supplying slurry by the slurry supply device according to any one of claims 1 to 10,
an inflow step of flowing slurry into the space from the inflow part ;
a rotating step of rotating the tank containing slurry around the rotation axis;
an outflow step of flowing out the slurry in the space from the outflow part to supply the slurry;
A slurry supply method having. A method of producing a slurry using the slurry supply device according to any one of claims 1 to 10, comprising:
arranging a dispersion medium and a dispersoid in the space;
a rotating step of rotating the tank containing the dispersion medium and the dispersoid around the rotation axis;
A slurry generation method having

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