JP7372819B2 - gas piping - Google Patents

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JP7372819B2
JP7372819B2 JP2019209689A JP2019209689A JP7372819B2 JP 7372819 B2 JP7372819 B2 JP 7372819B2 JP 2019209689 A JP2019209689 A JP 2019209689A JP 2019209689 A JP2019209689 A JP 2019209689A JP 7372819 B2 JP7372819 B2 JP 7372819B2
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tube
gas
gas piping
inner tube
pipe
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JP2021081012A (en
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祐樹 杉浦
翔 出口
健一郎 稲葉
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Taiyo Nippon Sanso Corp
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Description

本発明は、ガス配管に関する。 The present invention relates to gas piping.

半導体製造用の原料ガスを用いる半導体製造装置や、冷媒ガスを用いる空気調和装置では、ガスの漏洩を検知するために検査用ガスを用いた点検を行うことがある。例えば、特許文献１には、あらかじめ検査用ガス配管が設けられた空気調和装置が開示されている。 BACKGROUND ART In semiconductor manufacturing equipment that uses raw material gas for semiconductor manufacturing and air conditioners that use refrigerant gas, inspections are sometimes performed using inspection gas to detect gas leaks. For example, Patent Document 1 discloses an air conditioner in which test gas piping is provided in advance.

しかしながら、あらかじめ検査用ガス配管が設けられていない装置では、仮設用のガス配管を用いて漏洩等の点検が行われる。また、仮設用のガス配管として、ステンレスや銅等の金属製の、比較的小径の配管が用いられるのが一般的である。 However, in devices that are not equipped with inspection gas piping in advance, inspections for leaks and the like are performed using temporary gas piping. Further, as temporary gas piping, piping made of metal such as stainless steel or copper and having a relatively small diameter is generally used.

特開２０１９－１５８１９８号公報JP 2019-158198 Publication

ところで、仮設用のガス配管は、検査対象となる装置の設置状況に応じて、曲げ伸ばしされて検査用ガスの流路が構成される。また、点検が完了すると、仮設用のガス配管は、丸められた状態で運搬される。しかしながら、金属製のガス配管は、繰り返し曲げ伸ばしがなされると曲げぐせ（図４を参照）がつきやすく、次第に固くなって使いづらくなるという課題がある。 Incidentally, the temporary gas piping is bent and stretched to form a flow path for the test gas, depending on the installation status of the device to be tested. Furthermore, once the inspection is complete, the temporary gas piping will be transported in a rolled up state. However, when metal gas piping is repeatedly bent and stretched, it tends to become bent (see FIG. 4), and it gradually becomes hard and difficult to use.

本発明は、上記事情に鑑みてなされたものであって、曲げ伸ばしが容易であり、曲げ伸ばしを繰り返しても曲げぐせがつきにくいガス配管を提供することを課題とする。 The present invention has been made in view of the above-mentioned circumstances, and an object of the present invention is to provide a gas pipe that is easy to bend and straighten, and is resistant to curling even after repeated bending and straightening.

上記課題を解決するため、本発明は以下の構成を備える。
［１］ 金属製の内管と、樹脂製の外管と、を備え、
前記内管の外周と前記外管の内周との間に間隙を有するように、前記外管の内側に前記内管が位置する、ガス配管。
［２］ 前記内管の外径が、φ２．０ｍｍである、前記［１］に記載のガス配管。
［３］ 前記外管の内径が、φ４．０ｍｍ以上である、前記［２］に記載のガス配管。
［４］ 前記内管の外径が、φ３．１８ｍｍである、前記［１］に記載のガス配管。
［５］ 前記外管の内径が、φ５．０ｍｍ以上である、前記［４］に記載のガス配管。
［６］ 前記内管が、ステンレス製又は銅製である、前記［１］乃至［５］のいずれかに記載のガス配管。
［７］ 前記内管の両方の端部が、前記外管から露出する、前記［１］乃至［６］のいずれかに記載のガス配管。
［８］ 前記内管の両方の端部に、継手が位置する、前記［７］に記載のガス配管。
［９］ 前記外管の端部が、前記内管の外周との間で封止される、前記［７］又は［８］に記載のガス配管。
［１０］ 仮設用のガス配管である、前記［１］乃至［９］のいずれかに記載のガス配管。 In order to solve the above problems, the present invention includes the following configuration.
[1] Comprising a metal inner tube and a resin outer tube,
Gas piping, wherein the inner tube is located inside the outer tube such that there is a gap between the outer circumference of the inner tube and the inner circumference of the outer tube.
[2] The gas piping according to [1] above, wherein the inner tube has an outer diameter of 2.0 mm.
[3] The gas piping according to [2] above, wherein the outer tube has an inner diameter of φ4.0 mm or more.
[4] The gas piping according to [1] above, wherein the inner tube has an outer diameter of φ3.18 mm.
[5] The gas piping according to [4] above, wherein the outer tube has an inner diameter of φ5.0 mm or more.
[6] The gas piping according to any one of [1] to [5], wherein the inner tube is made of stainless steel or copper.
[7] The gas piping according to any one of [1] to [6], wherein both ends of the inner tube are exposed from the outer tube.
[8] The gas piping according to [7] above, wherein joints are located at both ends of the inner pipe.
[9] The gas piping according to [7] or [8], wherein the end of the outer tube is sealed with the outer periphery of the inner tube.
[10] The gas pipe according to any one of [1] to [9] above, which is a temporary gas pipe.

本発明のガス配管は、曲げ伸ばしが容易であり、曲げ伸ばしを繰り返しても曲げぐせがつきにくい。 The gas piping of the present invention is easy to bend and straighten, and is unlikely to become bent even if it is repeatedly bent and straightened.

本発明の一実施形態であるガス配管の構成の一例を示す模式図である。FIG. 1 is a schematic diagram showing an example of the configuration of a gas pipe according to an embodiment of the present invention. 本実施形態のガス配管の拡大断面図である。FIG. 3 is an enlarged cross-sectional view of the gas piping according to the present embodiment. 本実施形態のガス配管を曲げた状態を示す拡大断面図である。FIG. 2 is an enlarged sectional view showing a bent state of the gas pipe of the present embodiment. 従来の仮設用のガス配管の構成の一例を示す模式図である。FIG. 1 is a schematic diagram showing an example of the configuration of a conventional temporary gas pipe.

以下、本発明を適用した一実施形態であるガス配管の構成について、その使用の態様と併せて、図面を用いて詳細に説明する。なお、以下の説明で用いる図面は、特徴をわかりやすくするために、便宜上特徴となる部分を拡大して示している場合があり、各構成要素の寸法比率などが実際と同じであるとは限らない。 EMBODIMENT OF THE INVENTION Hereinafter, the structure of the gas piping which is one Embodiment to which this invention is applied is demonstrated in detail using the drawing together with the aspect of its use. Note that the drawings used in the following explanations may show characteristic parts enlarged for convenience in order to make the characteristics easier to understand, and the dimensional ratio of each component may not be the same as the actual one. do not have.

先ず、本発明の一実施形態であるガス配管の構成について説明する。
図１は、本発明の一実施形態であるガス配管１の構成の一例を示す断面図である。また、図２は、本実施形態のガス配管１の拡大断面図である。図１及び図２に示すように、本実施形態のガス配管１は、金属製の内管２と樹脂製の外管３とを備えるガス配管である。 First, the configuration of a gas pipe that is an embodiment of the present invention will be described.
FIG. 1 is a sectional view showing an example of the configuration of a gas pipe 1 according to an embodiment of the present invention. Moreover, FIG. 2 is an enlarged sectional view of the gas piping 1 of this embodiment. As shown in FIGS. 1 and 2, the gas pipe 1 of this embodiment is a gas pipe including an inner pipe 2 made of metal and an outer pipe 3 made of resin.

内管２は、内側の空間に気体（ガス）を流通させる、金属製の配管である。
内管２の材質は、曲げ伸ばしが可能な金属であれば、特に限定されない。このような金属としては、例えば、ステンレス、銅等が挙げられる。すなわち、曲げ伸ばしの観点から、内管２は、ステンレス製又は銅製の配管であることが好ましい。 The inner tube 2 is a metal pipe that allows gas to flow through the inner space.
The material of the inner tube 2 is not particularly limited as long as it is a metal that can be bent and stretched. Examples of such metals include stainless steel and copper. That is, from the viewpoint of bending and stretching, the inner tube 2 is preferably made of stainless steel or copper.

内管２の長さは、特に限定されないが、搬送する際の取り扱いの観点から、１～３０ｍが好ましく、３～１０ｍがより好ましい。 The length of the inner tube 2 is not particularly limited, but from the viewpoint of handling during transportation, it is preferably 1 to 30 m, more preferably 3 to 10 m.

内管２の内径は、気体（ガス）を流通させることが可能であれば、特に限定されない。内管２の内径としては、１．０～４．３５ｍｍの範囲が好ましく、１．０～２．１８ｍｍの範囲がより好ましい。 The inner diameter of the inner tube 2 is not particularly limited as long as it allows gas to flow therethrough. The inner diameter of the inner tube 2 is preferably in the range of 1.0 to 4.35 mm, more preferably in the range of 1.0 to 2.18 mm.

内管２の外径（換言すると、内管２の肉厚）は、曲げ伸ばしが可能であれば、特に限定されない。内管２の外径としては、１．５９～６．３５ｍｍの範囲が好ましく、２．０～３．１８ｍｍの範囲がより好ましい。換言すると、内管２の肉厚としては、０．２～１．０ｍｍの範囲が好ましく、０．５～１．０ｍｍの範囲がより好ましい。 The outer diameter of the inner tube 2 (in other words, the wall thickness of the inner tube 2) is not particularly limited as long as it can be bent and stretched. The outer diameter of the inner tube 2 is preferably in the range of 1.59 to 6.35 mm, more preferably in the range of 2.0 to 3.18 mm. In other words, the wall thickness of the inner tube 2 is preferably in the range of 0.2 to 1.0 mm, more preferably in the range of 0.5 to 1.0 mm.

本実施形態のガス配管１では、内管２の外径がφ3.18ｍｍ、又はφ6.35ｍｍのものを用いることが、入手の容易性の観点から好ましい。 In the gas pipe 1 of this embodiment, it is preferable to use an inner pipe 2 having an outer diameter of φ3.18 mm or φ6.35 mm from the viewpoint of easy availability.

外管３は、内管２の曲げを許容し、内管２の曲げすぎを規制する、樹脂製の配管である。
外管２の材質は、上述したように内管２の曲げを許容し、内管２の曲げすぎを規制可能な樹脂であれば、特に限定されない。このような樹脂としては、例えば、ポリウレタン、ポリ塩化ビニール、フッ素樹脂、フッ素ゴム、ナイロン等が挙げられる。 The outer tube 3 is a resin piping that allows the inner tube 2 to bend and prevents the inner tube 2 from being bent too much.
The material of the outer tube 2 is not particularly limited as long as it is a resin that allows the inner tube 2 to bend as described above and can prevent the inner tube 2 from being bent too much. Examples of such resins include polyurethane, polyvinyl chloride, fluororesin, fluororubber, and nylon.

なお、外管３の材質は、本実施形態のガス配管１に付加したい効果に応じて適宜選択してもよい。例えば、帯電防止（静電気対策、防塵対策）の観点では、ポリウレタン等を用いることが好ましい。また、感電防止の観点では、ポリ塩化ビニール等を用いることが好ましい。また、周囲の環境の保護（傷つけ防止）の観点では、フッ素樹脂等を用いることが好ましい。 Note that the material of the outer tube 3 may be selected as appropriate depending on the effect desired to be added to the gas pipe 1 of this embodiment. For example, from the viewpoint of preventing static electricity (static electricity countermeasures, dustproof countermeasures), it is preferable to use polyurethane or the like. Furthermore, from the viewpoint of preventing electric shock, it is preferable to use polyvinyl chloride or the like. Further, from the viewpoint of protecting the surrounding environment (preventing damage), it is preferable to use a fluororesin or the like.

外管３の長さは、内管２の両端が露出するように、内管２よりも短い長さであれば特に限定されない。外管３の長さとしては、０．９６～２９．９６ｍが好ましく、２．２６～９．９６ｍがより好ましい。 The length of the outer tube 3 is not particularly limited as long as it is shorter than the inner tube 2 so that both ends of the inner tube 2 are exposed. The length of the outer tube 3 is preferably 0.96 to 29.96 m, more preferably 2.26 to 9.96 m.

外管３の内径は、内管２を挿通させることが可能であれば、特に限定されない。外管３の内径としては、３．０～８．０ｍｍの範囲が好ましく、４．０～５．０ｍｍの範囲がより好ましい。 The inner diameter of the outer tube 3 is not particularly limited as long as the inner tube 2 can be inserted therethrough. The inner diameter of the outer tube 3 is preferably in the range of 3.0 to 8.0 mm, more preferably in the range of 4.0 to 5.0 mm.

外管３の外径（換言すると、外管３の肉厚）は、内管２を挿通した状態で曲げ伸ばしが可能であれば、特に限定されない。外管３の外径としては、４．０～１０．０ｍｍの範囲が好ましく、６．０～７．０ｍｍの範囲がより好ましい。換言すると、外管３の肉厚としては、０．５～１．５ｍｍの範囲が好ましく、０．５～１．０ｍｍの範囲がより好ましい。 The outer diameter of the outer tube 3 (in other words, the wall thickness of the outer tube 3) is not particularly limited as long as it can be bent and stretched with the inner tube 2 inserted therethrough. The outer diameter of the outer tube 3 is preferably in the range of 4.0 to 10.0 mm, more preferably in the range of 6.0 to 7.0 mm. In other words, the wall thickness of the outer tube 3 is preferably in the range of 0.5 to 1.5 mm, more preferably in the range of 0.5 to 1.0 mm.

図２に示すように、本実施形態のガス配管１は、内管２の外周と外管３の内周との間に間隙４を有するように、外管３の内側に内管２が位置する。換言すると、本実施形態のガス配管１は、外管３と内管２とが互いに固定されない状態で、外管３の内側に内管２が挿通されている。本実施形態のガス配管１では、内管２の外周の一部と外管３の内周の一部とが接触していてもよいし、非接触であってもよい。なお、内管２の外周と外管３の内周とが間隙４を有することなく密着あるいは接着されているものは、本実施形態のガス配管１とは異なる。 As shown in FIG. 2, in the gas pipe 1 of this embodiment, the inner pipe 2 is positioned inside the outer pipe 3 so that there is a gap 4 between the outer periphery of the inner pipe 2 and the inner periphery of the outer pipe 3. do. In other words, in the gas piping 1 of this embodiment, the inner tube 2 is inserted inside the outer tube 3 with the outer tube 3 and the inner tube 2 not being fixed to each other. In the gas pipe 1 of this embodiment, a part of the outer periphery of the inner pipe 2 and a part of the inner periphery of the outer pipe 3 may be in contact with each other or may be in non-contact. Note that the gas pipe 1 in which the outer circumference of the inner pipe 2 and the inner circumference of the outer pipe 3 are closely attached or bonded without a gap 4 is different from the gas pipe 1 of this embodiment.

間隙４は、内管２の外径と外管３の内径との差として表すことができる。間隙４としては、０．４１～２．０ｍｍの範囲が好ましく、１．０～２．０ｍｍの範囲がより好ましい。間隙４が２．０ｍｍ以上であると、外管３の内側に内管２を挿通しやすい。間隙４が１．０ｍｍ以下であると、外管３と内管２との間にゴミ等が入りにくい。間隙４が上述の好ましい範囲内であると、外管３とともに内管２の曲げを許容し、内管２の曲げすぎを規制することができる。 The gap 4 can be expressed as the difference between the outer diameter of the inner tube 2 and the inner diameter of the outer tube 3. The gap 4 is preferably in the range of 0.41 to 2.0 mm, more preferably in the range of 1.0 to 2.0 mm. When the gap 4 is 2.0 mm or more, it is easy to insert the inner tube 2 inside the outer tube 3. When the gap 4 is 1.0 mm or less, it is difficult for dust etc. to enter between the outer tube 3 and the inner tube 2. When the gap 4 is within the above-mentioned preferable range, bending of the inner tube 2 together with the outer tube 3 is allowed, and excessive bending of the inner tube 2 can be prevented.

内管２と外管３との組合せは、間隙４が上述した好ましい範囲となるものであれば、特に限定されない。
例えば、外径がφ３．１８ｍｍの内管２を用いる場合、内径がφ５．０ｍｍ、外径がφ７．０ｍｍ（すなわち、肉厚が１．０ｍｍ）の外管３と組み合わせて用いることが好ましい。この場合、間隙４は、１．８２ｍｍとなる。
また、外径がφ６．３５ｍｍの内管２を用いる場合、内径がφ８．０ｍｍ、外径がφ１０．０ｍｍ（すなわち、肉厚が１．０ｍｍ）の外管３と組み合わせて用いることが好ましい。この場合、間隙４は、１．６５ｍｍとなる。 The combination of the inner tube 2 and the outer tube 3 is not particularly limited as long as the gap 4 is within the above-mentioned preferable range.
For example, when using the inner tube 2 with an outer diameter of φ3.18 mm, it is preferable to use it in combination with the outer tube 3 with an inner diameter of φ5.0 mm and an outer diameter of φ7.0 mm (that is, a wall thickness of 1.0 mm). In this case, the gap 4 is 1.82 mm.
Further, when using the inner tube 2 having an outer diameter of 6.35 mm, it is preferable to use it in combination with an outer tube 3 having an inner diameter of 8.0 mm and an outer diameter of 10.0 mm (that is, a wall thickness of 1.0 mm). In this case, the gap 4 is 1.65 mm.

図１に示すように、ガス配管１の端部では、内管２の両方の端部が外管３から露出する。また、内管３の両方の端部には、それぞれ継手５が位置する。このように、ガス配管１の両端に継手５がそれぞれ設けられているため、既設のガス配管や、装置のガス導入口及び排気口等に接続できる。 As shown in FIG. 1, at the end of the gas pipe 1, both ends of the inner tube 2 are exposed from the outer tube 3. Furthermore, joints 5 are located at both ends of the inner tube 3, respectively. In this way, since the joints 5 are provided at both ends of the gas pipe 1, it can be connected to existing gas pipes, the gas inlet and exhaust port of the device, and the like.

本実施形態のガス配管１の用途は、特に限定されない。本実施形態のガス配管１は、例えば、仮設用のガス配管、分析用の配管等の用途に適用できる。 The use of the gas pipe 1 of this embodiment is not particularly limited. The gas piping 1 of this embodiment can be applied, for example, to temporary gas piping, analysis piping, and the like.

ところで、半導体の製造現場等のクリーンな環境では、微小なゴミ（パーティクル）の持ち込みも許されない。このような環境において、本実施形態のガス配管１を仮設用のガス配管として用いる場合、パーティクルの持ち込みを防止する観点から、外管３の両方の端部が、内管２の外周との間で封止（シール）されることが好ましい。 By the way, in a clean environment such as a semiconductor manufacturing site, even minute dust (particles) are not allowed to be brought into the environment. In such an environment, when the gas piping 1 of this embodiment is used as a temporary gas piping, both ends of the outer tube 3 are connected to the outer periphery of the inner tube 2 in order to prevent particles from being introduced. It is preferable that it be sealed.

外管３の端部における、外管３と内管２の外周との間を封止する方法は、特に限定されない。例えば、樹脂等の封止剤を用いて、外管３の端部と内管２の外周とを封止してもよい。また、外管３の材質によっては、外管３の端部を溶融して内管２の外周と融着させて封止してもよい。 The method of sealing between the outer circumference of the outer tube 3 and the inner tube 2 at the end of the outer tube 3 is not particularly limited. For example, the end of the outer tube 3 and the outer periphery of the inner tube 2 may be sealed using a sealant such as resin. Further, depending on the material of the outer tube 3, the end of the outer tube 3 may be melted and fused to the outer periphery of the inner tube 2 for sealing.

次に、本実施形態のガス配管１の曲げ伸ばしについて、説明する。
先ず、図１に示すように、本実施形態のガス配管１は、通常、両方の端部間の配管部分が丸められた状態で保管、運搬される。そして、既設のガス配管以外にガス配管が必要な場所において、本実施形態のガス配管１の両方の端部に設けた継手５をそれぞれ接続する。その際、両端の継手５の間の配管部分は、経路に沿って曲げ伸ばされる。 Next, the bending and stretching of the gas pipe 1 of this embodiment will be explained.
First, as shown in FIG. 1, the gas piping 1 of this embodiment is normally stored and transported with the piping portion between both ends rolled up. Then, the joints 5 provided at both ends of the gas piping 1 of this embodiment are connected at locations where gas piping is required in addition to the existing gas piping. At this time, the piping portion between the joints 5 at both ends is bent and stretched along the route.

ここで、図３は、本実施形態のガス配管を曲げた状態を示す拡大断面図である。図３に示すように、本実施形態のガス配管１を所要の位置で曲げると、曲げた箇所では間隙４がなくなり、曲げに対して内側及び外側において、内管２の外周面と外管３の内周面とが接触する。この際、曲げに対して内側では、外管３を圧縮する方向に応力がかかる。一方、曲げに対して外側では、外管３を引っ張る方向に応力がかかる。ここで、樹脂によって構成された外管３が、内管２にかかる圧縮応力及び引張応力を緩和し、内管２が過剰に小さな曲げ半径Ｒとなることを規制する。すなわち、本実施形態のガス配管１は、内管２に曲げぐせがつきほどの曲げ半径Ｒとなりにくい（鋭角に曲がらない）。 Here, FIG. 3 is an enlarged sectional view showing a bent state of the gas pipe of this embodiment. As shown in FIG. 3, when the gas pipe 1 of this embodiment is bent at a required position, the gap 4 disappears at the bent part, and the outer circumferential surface of the inner pipe 2 and the outer pipe 3 are formed on the inside and outside of the bend. makes contact with the inner circumferential surface of the At this time, stress is applied to the inner side of the bending in a direction that compresses the outer tube 3. On the other hand, on the outside of the bend, stress is applied in the direction of pulling the outer tube 3. Here, the outer tube 3 made of resin relieves the compressive stress and tensile stress applied to the inner tube 2, and prevents the inner tube 2 from having an excessively small bending radius R. That is, the gas pipe 1 of the present embodiment is unlikely to have a bending radius R that is so large that the inner pipe 2 is bent (does not bend at an acute angle).

以上説明したように、本実施形態のガス配管１によれば、曲げ伸ばしが容易であり、曲げ伸ばしを繰り返しても曲げぐせがつきにくい。特に、内管２の外径が小さい場合に、本実施形態のガス配管１の効果が得られやすい。 As explained above, according to the gas pipe 1 of the present embodiment, it is easy to bend and straighten, and even if the pipe is repeatedly bent and straightened, bending is difficult to occur. Particularly, when the outer diameter of the inner tube 2 is small, the effects of the gas piping 1 of this embodiment are likely to be obtained.

なお、本実施形態のガス配管１であっても、繰り返して曲げ伸ばしを行うことにより、曲げぐせがついて配管が固くなる場合がある。その場合、両端の継手５を取り外し、新しい内管２を外管３の内側に挿通した後、再び両端に継手５を取り付けることが好ましい。すなわち、本実施形態のガス配管１は、内管２の交換頻度を少なくできる。 Note that even in the gas piping 1 of this embodiment, repeated bending and stretching may cause the piping to become stiff due to bending. In that case, it is preferable to remove the joints 5 at both ends, insert a new inner tube 2 inside the outer tube 3, and then attach the joints 5 to both ends again. That is, in the gas pipe 1 of this embodiment, the frequency of replacing the inner pipe 2 can be reduced.

本実施形態のガス配管１は、使用する環境に応じて外管３を付け替えて用いてもよい。また、本実施形態のガス配管１は、外管３が汚れた場合は新しいものに交換して用いてもよい。これにより、本実施形態のガス配管１は、繰り返し使用することができる。 The gas pipe 1 of this embodiment may be used by replacing the outer pipe 3 depending on the environment in which it is used. Further, in the gas pipe 1 of this embodiment, when the outer pipe 3 becomes dirty, it may be used by replacing it with a new one. Thereby, the gas pipe 1 of this embodiment can be used repeatedly.

なお、本発明の技術範囲は上記実施の形態に限定されるものではなく、本発明の趣旨を逸脱しない範囲において種々の変更を加えることが可能である。 Note that the technical scope of the present invention is not limited to the above-described embodiments, and various changes can be made without departing from the spirit of the present invention.

本発明のガス配管は、検査用ガスを用いて点検を行う際の、仮設用のガス配管等として利用可能性を有する。 The gas piping of the present invention can be used as temporary gas piping, etc. when performing inspection using inspection gas.

１・・・ガス配管
２・・・内管
３・・・外管
４・・・間隙
５・・・継手 1...Gas piping 2...Inner pipe 3...Outer pipe 4...Gap 5...Joint

Claims (9)

金属製の内管と、樹脂製の外管と、を備え、
前記内管の外周と前記外管の内周との間に間隙を有するように、前記外管の内側に前記内管が位置する、ガス配管であって、
曲げ伸ばし可能とされ、ガス漏洩検査の用途で使用される、ガス配管。 Comprising a metal inner tube and a resin outer tube,
A gas pipe in which the inner tube is located inside the outer tube such that there is a gap between the outer circumference of the inner tube and the inner circumference of the outer tube,
Gas piping that can be bent and stretched and used for gas leak inspection . 前記内管の外径が、φ２．０ｍｍである、請求項１に記載のガス配管。 The gas piping according to claim 1, wherein the inner tube has an outer diameter of 2.0 mm. 前記外管の内径が、φ４．０ｍｍ以上である、請求項２に記載のガス配管。 The gas piping according to claim 2, wherein the outer tube has an inner diameter of 4.0 mm or more. 前記内管の外径が、φ３．１８ｍｍである、請求項１に記載のガス配管。 The gas piping according to claim 1, wherein the inner tube has an outer diameter of 3.18 mm. 前記外管の内径が、φ５．０ｍｍ以上である、請求項４に記載のガス配管。 The gas piping according to claim 4, wherein the outer tube has an inner diameter of φ5.0 mm or more. 前記内管が、ステンレス製又は銅製である、請求項１乃至５のいずれか一項に記載のガス配管。 The gas piping according to any one of claims 1 to 5, wherein the inner pipe is made of stainless steel or copper. 前記内管の両方の端部が、前記外管から露出する、請求項１乃至６のいずれか一項に記載のガス配管。 The gas piping according to any one of claims 1 to 6, wherein both ends of the inner tube are exposed from the outer tube. 前記内管の両方の端部に、継手が位置する、請求項７に記載のガス配管。 Gas piping according to claim 7, wherein joints are located at both ends of the inner tube. 前記外管の端部が、前記内管の外周との間で封止される、請求項７又は８に記載のガス配管。 The gas piping according to claim 7 or 8, wherein an end of the outer tube is sealed with an outer periphery of the inner tube.
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