JP7361378B2 - Dust collection mechanism of groove machining head and groove machining device - Google Patents

Description

The present invention relates to a dust collection mechanism of a groove processing head for collecting dust generated when grooves are formed on a thin film substrate during the manufacturing process of thin film solar cells, etc. Regarding technology.

Generally, dust is generated when, for example, a patterning line of a thin film solar cell substrate (brittle material substrate) is scribed using a tool of a groove processing head. At this time, if dust adheres to the thin film solar cell substrate, it is difficult to remove it. If an attempt is made to remove the dust, there is a risk of damaging the surface of the substrate.
Therefore, conventionally, a groove machining head has been provided with a dust collection mechanism that sucks the dust generated during scribing. The dust collection mechanism of the groove machining head consists of a groove machining head equipped with a tool holder that holds tools, a dust collection hood provided at the bottom of the groove machining head that sucks in dust, and a dust collection mechanism that collects air from the dust collection hood through a duct. It has a dust collector that sucks out the dust.

As a technique related to a dust collection mechanism (dust collection hood) of a groove machining head, there is one disclosed in Patent Document 1, for example.
Patent Document 1 aims at making it possible to suction dust generated when grooving using a grooving head without adhering it to a substrate. Specifically, a dust collection hood having a suction port is provided near the bottom plate of the groove machining head from which the tool protrudes. The dust collection hood is a casing with an open top surface, and has a frame shape that extends upward from the opening so as to be spaced a certain distance between the opening through which the tool of the grooving head protrudes and the tool holder. The tool has a partition portion and is attached so that the tip of the tool projects downward from the opening. When grooving a board using a grooving head, the air in the dust collection hood is sucked in by a blower through a duct, and the dust generated by the grooving is sucked into the suction port of the dust collection hood before it attaches to the board. It is said that it can be inhaled.

Japanese Patent Application Publication No. 2016-006844

The dust collection mechanism disclosed in Patent Document 1 is capable of removing dust before it adheres to the surface of a substrate by suctioning air.
However, in recent years, there has been a demand for more effective removal of dust before it adheres to the surface of the substrate. The reason for this is that there are variations in the suction of dust.
For example, the air suction speed near the duct is different from the air suction speed far from the duct. That is, the air flow velocity is high near the duct. On the other hand, the air flow velocity is low in areas far from the duct. As a result, dust suction may vary depending on the air suction location, and there is a possibility that dust may be left behind on the surface of the substrate.

In other words, in the dust collection hood of the dust collection mechanism, it is required to improve the flow velocity of suctioned air and to suppress variations in air when suctioned.
Therefore, in view of the above-mentioned problems, the present invention has a structure of the dust collection hood that improves the flow rate of suction air to more effectively prevent the dust generated during the scribing process from adhering to the surface of the substrate. It is an object of the present invention to provide a dust collection mechanism for a groove machining head and a groove machining device that can remove dust.

In order to achieve the above object, the following technical measures were taken in the present invention.
A dust collection mechanism for a groove machining head according to the present invention includes a groove machining head including a tool holder that holds a plurality of tools with cutting edges facing downward side by side in the left and right direction, and a groove machining head provided at a lower part of the groove machining head to hold the tools. a dust collecting hood that sucks together the dust generated when scribing a substrate using the dust collecting hood, a duct through which the air from the dust collecting hood passes, and a dust collecting hood that sucks the air that has passed through the duct to remove the dust. a dust collector for collecting dust, a base plate to which the dust collection hood is attached is provided on the lower surface of the groove processing head, and the dust collection hood is configured by laminating a plurality of plates through which the air flows. It is characterized by being something.

Here , the base plate is a plate material that is long in the left-right direction, and has a communication port that penetrates in the vertical direction and communicates with the duct, and a long hole that penetrates in the vertical direction and through which the tool holder passes. , the communication ports are provided in a pair on the left and right ends of the base plate, and the duct is attached to the communication ports.
Furthermore , at least one of the plurality of plates constituting the dust collection hood is a first plate that is provided on the lower surface side of the base plate and passes the sucked air to the duct, and the first plate is a plate material that is long in the left and right direction, and includes a first vent hole that penetrates in the vertical direction and through which the sucked air passes, and a first vent hole that communicates with the first vent hole and allows the sucked air to pass through the base plate. a first passageway that guides the tool holder to the mouth; and a first long hole part that communicates with the long hole part of the base plate and is sized to allow the tool holder to pass through. The first ventilation port communicates with the ventilation port, and the first ventilation port is provided at the center in the longitudinal direction of the first plate .

Preferably, at least one of the plurality of plates constituting the dust collection hood is a second plate that is provided on the lower surface side of the base plate and passes the sucked air to the duct, and the second The plate is a plate material that is long in the left-right direction, and has a second vent hole that penetrates in the vertical direction and through which the sucked air passes, and a second elongated hole portion that is sized to allow the tool holder to pass through. The second vent hole is a through hole that is long in the left-right direction, and the long surface of the second vent hole in the left-right direction is an inclined surface that is inclined outward with respect to the vertical axis. good.

Preferably, at least one of the plurality of plates constituting the dust collection hood is a third plate that is provided on the lower surface side of the base plate and that passes the sucked air to the duct, and the third The plate is a plate material that is long in the left-right direction, and has a third vent hole that penetrates in the vertical direction and through which the sucked air passes, and a third hole that is large enough to allow the tool to pass through, A plurality of the third holes may be provided in parallel in the left-right direction so as to correspond to a plurality of the tools arranged in the left-right direction.

Preferably, at least one of the plurality of plates constituting the dust collection hood is a fourth plate that is provided on the lower surface side of the base plate and passes the sucked air to the duct, and the fourth The plate is a plate material that is long in the left-right direction, and includes a fourth vent that penetrates in the vertical direction and sucks in the external air, and a fourth passage that communicates with the fourth vent and guides the sucked air. The fourth vent hole may be a hole through which the tool can move.

Further, the dust collection mechanism of the groove machining head according to the present invention includes a groove machining head including a tool holder that holds a plurality of tools with cutting edges facing downward side by side in the left and right direction, and a groove machining head provided at a lower part of the groove machining head, a dust collection hood that sucks dust generated when a substrate is scribed using a tool together with air; a duct through which the air from the dust collection hood passes; and a duct that sucks the air that has passed through the duct and a dust collector for collecting dust; a base plate to which the dust collection hood is attached is provided on the lower surface of the groove processing head; It has a communication port that communicates with the duct, and a long hole that penetrates in the vertical direction and allows the tool holder to pass through, and the communication ports are arranged in pairs on the left and right ends of the base plate. a first plate, the dust collection hood is installed to be stacked on the lower surface of the base plate, and the first plate is provided with the duct, and the dust collection hood is attached to be stacked on the lower surface of the base plate, and the first plate conveys the sucked air to the duct; a second plate that is attached to be stacked on the lower surface of the first plate and that transmits the sucked air to the first plate; and a second plate that is attached to be stacked on the lower surface of the second plate; a third plate that transmits the suctioned air to the second plate; and a third plate that is attached to be stacked on the lower surface of the third plate and that transmits the suctioned air to the third plate. a fourth plate, the first plate is a plate material that is long in the left-right direction, and communicates with the first vent through which the sucked air passes in the vertical direction; a first passage that guides the sucked air to the communication port of the base plate; a first elongated hole communicating with the elongated hole of the base plate and having a size through which the tool holder passes; The first passage communicates with the pair of left and right ventilation ports, the first ventilation port is provided at the center in the longitudinal direction of the first plate, and the second plate has a , a second vent hole which is long in the left-right direction and is attached to be stacked on the lower surface side of the first plate, and which penetrates in the vertical direction and through which the sucked air passes; a second elongated hole communicating with the hole and having a size through which the tool holder passes; the second vent is a through hole that is long in the left-right direction; The third plate is long in the left-right direction and is attached to be stacked on the lower surface side of the second plate. A third vent hole that penetrates in the vertical direction and through which the sucked air passes, and a third hole that communicates with the second elongated hole and has a size that allows the tool to pass through. The third vent is in communication with the second vent and has the same size as the second vent, and the third hole corresponds to a plurality of tools arranged in the left and right direction. The fourth plate is a plate material that is long in the left-right direction and is attached to be stacked on the lower surface side of the third plate, and the fourth plate is a plate material that is long in the left-right direction and is attached to the lower surface side of the third plate in a stacked manner. It has a fourth vent that penetrates and sucks in the external air, and a fourth passage that communicates with the fourth vent and guides the sucked air, and the fourth vent is connected to the third vent. The fourth passage is provided below the vent, and guides the air passing therethrough to the third vent.

The groove machining apparatus of the present invention includes a table on which a substrate is placed, the groove machining head on which a tool holder having a tool for groove machining is mounted, the dust collection mechanism of the groove machining head, and the table. A moving means for relatively moving the groove machining head within a horizontal plane is provided, and the groove machining head is moved parallel to the upper surface of the substrate to form a groove on the substrate.

According to the present invention, the dust collection hood is configured to improve the flow rate of sucked air, and it is possible to more effectively remove dust generated during scribing before it adheres to the surface of the substrate. .

1 is a diagram schematically showing an outline of a dust collection mechanism of a groove machining head and a groove machining device according to the present invention. FIG. 2 is an exploded view in the vertical direction (z-axis direction) of the dust collection hood that constitutes the dust collection mechanism of the groove machining head of the present invention. It is a right view of the dust collection hood of this invention. It is a left sectional view of the dust collection hood of the present invention (AA cross section). FIG. 2 is a plan view and a BB sectional view of a bottom plate (base plate) constituting the dust collection hood of the present invention. FIG. 2 is a plan view and a cross-sectional view taken along the line CC of a first plate constituting the dust collection hood of the present invention. FIG. 2 is a plan view and a DD sectional view of a second plate constituting the dust collection hood of the present invention. FIG. 2 is a plan view and a sectional view taken along line EE of a third plate constituting the dust collection hood of the present invention. FIG. 2 is a plan view and a FF sectional view of a fourth plate constituting the dust collection hood of the present invention.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the dust collection mechanism 19 of the groove machining head 16 and the groove machining device 1 according to the present invention will be described with reference to the drawings.
Note that the embodiment described below is an example of embodying the present invention, and the configuration of the present invention is not limited to the specific example. Furthermore, in order to make the drawings easier to read, some components are omitted or drawn using virtual lines.

Further, the x-axis direction, y-axis direction, z-axis direction, etc. in the dust collection hood 20 constituting the dust collection mechanism 19 of the present invention are as shown in the drawings. However, the + (plus) direction of the x-axis is sometimes called the right direction, and the - (minus) direction of the x-axis is sometimes called the left direction. Further, the + (plus) direction of the y-axis is sometimes called the front direction, and the - (minus) direction of the y-axis is sometimes called the rear direction. Further, the + (plus) direction of the z-axis is sometimes called the upward direction, and the - (minus) direction of the z-axis is sometimes called the downward direction.

FIG. 1 schematically shows the overall configuration of a dust collection mechanism 19 of a groove machining head 16 and a groove machining device 1 according to the present invention.
As shown in FIG. 1, the groove processing apparatus 1 is equipped with a table 2 on which a substrate W to be processed (for example, a thin film solar cell substrate) is placed. The table 2 is movable in the y-axis direction within a horizontal plane (xy plane). Further, the table 2 can be rotated to any angle within a horizontal plane.

A support stand 4 is erected from a main body 3 provided with a table 2. The support base 4 includes a pair of leg members 5 and a mounting base 6 provided in the x-axis direction (left-right direction) so as to span between the leg members 5. Two pedestals 7 are provided on the mounting table 6 of the support table 4.
A camera 8 is attached to each of the two pedestals 7. Each pedestal 7 is movable along a guide 9 provided on the support 4 and extending in the x-axis direction. The two cameras 8 are movable in the vertical direction. Images captured by each camera 8 are displayed on the corresponding monitor 10.

A bridge 11 is erected from a main body 3 provided with a table 2. The bridge 11 includes a pair of support columns 12, a guide bar 13 provided in the x-axis direction so as to span between these support columns 12, a guide 14 formed on the guide bar 13, and a guide 14 formed on the guide bar 13. It has a driving motor 15.
The bridge 11 holds a groove processing head 16 that processes a substrate W placed on the table 2. The groove machining head 16 is movable in the x-axis direction along the guide 14 in a horizontal plane. The guide 14 and motor 15 serve as moving means for relatively moving the table 2 and the groove machining head 16 in the x-axis direction within a horizontal plane. The groove processing device 1 moves the groove processing head 16 parallel to the upper surface of the substrate W to form a groove on the substrate W.

As shown in FIGS. 2 to 4, the groove processing head 16 performs scribing processing on the substrate W using a tool 17. As shown in FIGS. The groove machining head 16 is equipped with a tool holder 18 that holds a tool 17. The tool holders 18 hold the tools 17 with their cutting edges facing downward, and a plurality of tool holders 18 are arranged in parallel in the left-right direction (x-axis direction) at regular intervals. The groove machining head 16 is provided with a dust collection mechanism 19 that removes dust before it adheres to the surface of the substrate W by sucking air when scribing the substrate W.

FIG. 2 shows a diagram in which the dust collection hood 20 constituting the dust collection mechanism 19 according to the present invention is disassembled in the vertical direction (z-axis direction). FIG. 3 shows a right side view of the dust collection hood 20 of the present invention. FIG. 4 shows a sectional view taken along line AA of the dust collection hood 20 of the present invention.
The dust collection mechanism 19 according to the present invention is provided at the lower part of the groove processing head 16, and includes a dust collection hood 20 that sucks together dust generated when the substrate W is scribed using the tool 17, and a dust collection hood 20. It has a duct 21 through which the air containing dust from the duct 20 passes, and a dust collector (not shown) that sucks the air that has passed through the duct 21 and collects the dust.

FIG. 5 shows a plan view and a BB sectional view of the base plate 22 to which the dust collection hood 20 of the present invention is attached.
As shown in FIGS. 2 to 5, a base plate 22 (bottom plate) is attached to the lower surface of the groove processing head 16 via fasteners or the like. On the bottom surface of this base plate 22,
A dust collection hood 20 is attached.

The base plate 22 is formed of a flat plate material that is long in the left-right direction (x-axis direction) with respect to the front-back direction (y-axis direction). The base plate 22 is a flat plate material having a predetermined thickness and width. The base plate 22 is made of a hard material such as steel or aluminum. The base plate 22 has a communication port 23 that penetrates in the vertical direction and communicates with the duct 21, and a long hole 24 that penetrates in the vertical direction and through which the tool holder 18 passes.

A pair of left and right passage ports 23 are provided at both left and right ends of the base plate 22 at a constant interval. That is, a pair of communication ports 23 are provided on the left and right outer sides of the elongated hole portion 24 of the base plate 22. These two communication ports 23 are circular through holes in a plan view, and have an inner diameter that is approximately the same as the inner diameter of the duct 21 . The left duct 21 is attached to the left inlet 23a in an inclined manner. The right side duct 21 is attached to the right side communication port 23b in an inclined manner. That is, the communication port 23 and the duct 21 are in communication with each other, and the sucked air can pass therethrough.

Although not shown, a blower of a dust collector is connected to this duct 21. The dust collector sucks air from the duct 21. Note that a dust collector may be used, or a blower alone may be used.
The elongated hole portion 24 is a hole that penetrates in the vertical direction and is long in the longitudinal direction at the center of the base plate 22 (inside the pair of left and right communication ports 23). That is, the elongated hole portion 24 is a through hole that is long in the left-right direction and has a rectangular shape in plan view. This elongated hole portion 24 is sufficiently wider than a plurality of tool holders 18 arranged in parallel in the left-right direction. Thereby, the tool holder 18 can move in the vertical direction in the elongated hole portion 24.

Now, the present invention is characterized by the "dust collection hood 20" that removes dust before it adheres to the surface of the substrate W. The dust collection hood 20 is constructed by laminating a plurality of plates through which air circulates.
In other words, the dust collection hood 20 of the present invention has a structure in which four plates 25, 30, 34, 37 are stacked, and the structure of the suction air passage formed in each plate 25, 30, 34, 37 is It has characteristics. The suction air passage formed in the dust collection hood 20 makes it possible to more effectively remove dust before it adheres to the surface of the substrate W.

FIG. 6 shows a plan view and a sectional view taken along the line CC of the first plate 25 constituting the dust collection hood 20 of the present invention.
As shown in FIGS. 2 to 4, 6, etc., at least one of the plurality of plates constituting the dust collection hood 20 is provided on the lower surface of the base plate 22, and the sucked air is passed through the air supply port 23 of the base plate 22. The first plate 25 is connected to the duct 21 through the first plate 25 .

The first plate 25 is a plate material attached to the lower surface of the base plate 22 so as to be stacked thereon. The first plate 25 transmits the sucked air to the duct 21 through the passage port 23 of the base plate 22 .
The first plate 25 is formed of a flat plate material that is long in the left-right direction (x-axis direction) with respect to the front-back direction (y-axis direction). Further, the first plate 25 is a flat plate material having a predetermined thickness and width. The first plate 25 is made of a hard material such as steel or aluminum.

The first plate 25 communicates with a first vent hole 26 that penetrates in the vertical direction and through which the sucked air passes, and which guides the sucked air to the passage port 23 of the base plate 22. It has a first passage 27 and a first elongated hole 28 communicating with the elongated hole 24 of the base plate 22 and having a size through which the tool holder 18 passes.
The first ventilation port 26 is provided outside the first elongated hole portion 28 and at the center in the longitudinal direction of the first plate 25 in plan view. That is, the first ventilation port 26 is provided at the center of the first passage 27 that is long in the left-right direction.

In this embodiment, four first vent holes 26 are provided at regular intervals. Specifically, two first ventilation holes 26 are provided on the front side of the front side wall 29a surrounding the first elongated hole portion 28, and are spaced at regular intervals in the left-right direction. Further, two first vent holes 26 are provided on the rear side of the rear side wall 29b surrounding the first elongated hole portion 28, and are provided at regular intervals in the left-right direction.
That is, the first vent hole 26a on the front side and the first vent hole 26b on the rear side are provided front and back (in the y-axis direction) with the first elongated hole portion 28 in between. The first vent holes 26a on the front side and the first vent holes 26b on the rear side are provided at the same interval in the left-right direction. These four first ventilation holes 26a and 26b are circular through holes when viewed from above, and have approximately the same size.

By providing the first ventilation port 26 at the center in the longitudinal direction of the first plate 25, variations in wind speed within the first plate 25 are suppressed.
The first passage 27 communicates with a pair of left and right communication ports 23a and 23b. The first passage 27 is a groove carved into the first plate 25 and opened upward (in the + direction of the z-axis). This first passage 27 is provided so as to be in communication with the first vent 26 (see the CC sectional view of FIG. 6). The first passage 27 is a long groove extending in the left-right direction (x-axis direction) from the lower side of the left side passage port 23a to the lower side of the right side passage port 23b.

In this embodiment, the first passage 27 is a passage that goes around the outer periphery of the first elongated hole portion 28 surrounded by the side wall 29 . Further, the first passage 27 is separated from the first elongated hole portion 28 by a side wall 29 surrounding the first elongated hole portion 28 .
The first passage 27 connects the front passage 27a that communicates with the first vent 26a on the front side, the rear passage 27b that communicates with the first vent 26b on the rear side, and the front passage 27a and the rear passage 27b. It has a connecting passage 27c for sending air to the port 23.

The front passage 27a is a passage long in the left-right direction. The length of the front passage 27a in the front-rear direction is the same as the diameter of the first vent 26a. The front passage 27a and the first vent 26a are provided in communication with each other.
The rear passage 27b is a passage long in the left-right direction. The length of the rear passage 27b in the front-rear direction is the same as the diameter of the first ventilation port 26b. The rear passage 27b and the first vent 26b are provided in communication with each other.

The connecting passage 27c is provided at both left and right ends of the front passage 27a and the rear passage 27b. The left connecting passage 27c connects the left end of the front passage 27a and the left end of the rear passage 27b so that they communicate with each other. The left end of the left connecting passage 27c is provided in communication with the left feeding port 23a.
Further, the right connecting passage 27c connects the right end of the front passage 27a and the right end of the rear passage 27b so that they communicate with each other. The right end portion of the right connecting passage 27c is provided in communication with the right feeding port 23b.

That is, the air flowing in from the first ventilation port 26 passes through the first passage 27 and flows out from the upper ventilation port 23 to the duct 21 .
The first elongated hole portion 28 is provided at the center of the first plate 25, and is a hole that penetrates in the vertical direction and is long in the longitudinal direction. That is, the first elongated hole portion 28 is a rectangular through hole that is long in the left-right direction when viewed from above. The opening size of the first elongated hole portion 28 is the same as the opening size of the elongated hole portion 24 of the base plate 22.

That is, the first elongated hole portion 28 is sufficiently wider than the plurality of tool holders 18 arranged in parallel in the left-right direction. The first elongated hole portion 28 is disposed in abutment with the elongated hole portion 24, and is in a state in which they communicate with each other. Thereby, the tool holder 18 can move in the vertical direction in the first elongated hole portion 28.
Further, the first elongated hole portion 28 is surrounded by a side wall 29 that stands upright (in the + direction of the z-axis). That is, the inner surface of the side wall 29 of the first elongated hole section 28 and the inner wall surface of the elongated hole section 24 are flush with each other. That is, the first elongated hole portion 28 is disposed in abutment with the elongated hole portion 24 and communicates with the elongated hole portion 24 .

That is, the first vent 26 is provided in the first plate 25 at the longitudinal center of the first passage 27 (in this embodiment, the circular first vent 26 is provided at the longitudinal center of the first passage 27). The negative pressure from the duct 21 (hose) is transmitted to the center of the first passage 27 in the longitudinal direction, and the distance from the communication port 23 of the base plate 22 is reduced. It is possible to suppress variations in wind speed (wind speed at the exit) in the vicinity of each tool 17 due to differences.

Specifically, the air flow velocity near the tool 17 at a position close to the duct 21 (the left and right ends of the tool holder 18) becomes high, and the air flow velocity near the tool 17 at a position far from the duct 21 (the center of the tool holder 18) becomes low. This makes it possible to suppress problems that may occur.
That is, by providing the first vent 26 at the center in the longitudinal direction of the first passage 27 (first plate 25), air can flow through the first vent 26 provided at a position where the difference in distance from each tool 17 is small. By suctioning the air, it is possible to suppress variations in wind speed near each tool 17 when air is suctioned.

FIG. 7 shows a plan view and a DD sectional view of the second plate 30 constituting the dust collection hood 20 of the present invention.
As shown in FIGS. 2 to 4, FIG. 7, etc., at least one of the plurality of plates constituting the dust collection hood 20 is provided on the lower surface side of the base plate 22, and directs the sucked air to the first plate 25. This is the second plate 30 that is conveyed.

The second plate 30 is a plate material attached to the lower surface of the first plate 25 so as to be stacked thereon. The second plate 30 has a second ventilation port 31 that penetrates in the vertical direction and through which the sucked air passes, and a second elongated hole 32 that communicates with the first elongated hole 28 and is sized to allow the tool holder 18 to pass through. It has .
The second vent 31 is provided at the center of the second plate 30 in the longitudinal direction. This second vent 31 is a hole that penetrates in the vertical direction and is long in the longitudinal direction. That is, the second vent 31 is a rectangular through hole that is long in the left-right direction when viewed from above. The second ventilation port 31 is provided on the front side and the rear side of the second elongated hole portion 32, which is long in the left-right direction. That is, the second ventilation holes 31 are provided as a pair in front and back (in the y-axis direction) with the second elongated hole portion 32 in between when viewed from above.

The length of the second vent hole 31 in the front-rear direction is the same as the diameter of the first vent hole 26. The second ventilation port 31 is disposed in abutment with the first ventilation port 26, and is in a state in which they communicate with each other. That is, the second vent hole 31a on the front side is disposed in abutment with the first vent hole 26a on the front side, and are in a state of communication with each other. Further, the second vent hole 31b on the rear side is arranged in abutment with the first vent hole 26b on the rear side, so that they are in communication with each other.

By the way, the second vent hole 31 is not a hole that penetrates straight upward (+ direction of the z-axis), but a hole that penetrates diagonally upward.
Specifically, in the second front vent 31a, a pair of front wall surfaces 33a and rear wall surfaces 33b that are long in the left-right direction and face each other are sloped surfaces that are inclined toward the front and outside with respect to the vertical axis. Further, in the rear second vent 31b, a pair of front wall surfaces 33c and rear wall surfaces 33d that are long and face each other in the left-right direction are inclined surfaces 33 that are inclined posterolaterally with respect to the vertical axis. . The inclined surface 33 is preferably a surface inclined outward at 45 degrees with respect to the vertical axis.

For example, as shown in the DD cross-sectional view of FIG. direction). Further, the rear wall surface 33b of the second vent 31a is provided at the same angle as the front wall surface, and is inclined forward from the lower end toward the upper end. That is, the front wall surface 33a and the rear wall surface 33b of the second vent 31a are inclined forward at the same angle and are provided in parallel.

On the other hand, the front wall surface 33c of the second vent 31b provided on the rear side of the second plate 30 is provided so as to be inclined rearward (in the negative direction of the y-axis) from the lower end toward the upper end. Further, the rear wall surface 33d of the second vent 31b is provided at the same angle as the front wall surface, and is inclined rearward from the lower end toward the upper end. That is, the front wall surface 33c and the rear wall surface 33d of the second vent 31b are inclined rearward at the same angle and are provided in parallel.

The second vent hole 31a on the front side and the second vent hole 31b on the rear side are provided so as to widen upward in a side cross-sectional view. The upper end of the second vent 31 is provided at a position corresponding to the first vent 26 . On the other hand, the lower end of the second vent 31 is provided at a position corresponding to a third vent 35, which will be described later.
The second elongated hole portion 32 is provided at the center of the second plate 30. The second elongated hole portion 32 is a hole that penetrates in the vertical direction and is long in the longitudinal direction. That is, the second elongated hole portion 32 is a rectangular through hole that is long in the left-right direction when viewed from above. The second elongated hole portion 32 is disposed in abutment with the first elongated hole portion 28 and communicates with the first elongated hole portion 28 .

Specifically, in the left-right direction (x-axis direction) of the second elongated hole portion 32, the upper end opening and the lower end opening have the same length. Further, the upper opening of the second elongated hole portion 32 has the same size as the lower opening of the first elongated hole portion 28 . That is, the upper end opening of the second elongated hole portion 32 is sufficiently wider than the plurality of tool holders 18 arranged in parallel in the left-right direction.
On the other hand, in the front-rear direction (y-axis direction) of the second elongated hole portion 32, the lower end opening is narrower than the upper end opening. That is, the upper end opening and the lower end opening of the second elongated hole portion 32 have different sizes. The lower end opening of the second elongated hole portion 32 is large enough to allow only the tool 17 attached to the tip (lower end) of the tool holder 18 to move.

That is, the front wall surface of the second elongated hole portion 32 is provided so as to be inclined forward (in the + direction of the y-axis) from the lower end toward the upper end. On the other hand, the rear wall surface of the second elongated hole portion 32 is provided so as to be inclined rearward (in the − direction of the y-axis) from the lower end toward the upper end. The front wall surface and the rear wall surface of the second elongated hole section 32 are provided so as to widen upward in a side cross-sectional view.
The tool holder 18 can be moved to the second elongated hole portion 32 because the second elongated hole portion 32 is narrowed downward. On the other hand, the tool 17 can move in the vertical direction in the second elongated hole portion 32.

That is, the second plate 30 is provided with a pair of second vents 31 on the front and back through which the sucked air passes, and the second vent 31a on the front side is formed with inclined surfaces 33a and 33b that are inclined toward the front side (+ direction of the y-axis). Slanted surfaces 33c and 33d are formed on the second ventilation port 31b on the rear side, and the sloped surfaces 33a to 33d are inclined at a predetermined angle (preferably 45 degrees) to allow air to flow through the air. By providing the flow path with a tapered shape in a side cross-sectional view, it is possible to widen the air flow path to the vicinity of the outlet of the second vent 31, thereby guiding the air and improving the rectification effect, thereby improving the suction. It is possible to suppress the stalling of air caused by air. That is, it is possible to increase the overall flow rate of the air sucked (to improve the overall suction force).

FIG. 8 shows a plan view and a sectional view taken along line EE of the third plate 34 constituting the dust collection hood 20 of the present invention.
As shown in FIGS. 2 to 4, FIG. 8, etc., at least one of the plurality of plates constituting the dust collection hood 20 is attached to the lower surface side of the base plate 22, and directs the sucked air to the second plate 30. This is the third plate 34 that is conveyed.

The third plate 34 is a plate member that is long in the left-right direction and is attached to the lower surface of the second plate 30 so as to be stacked thereon. The third plate 34 communicates with a third vent hole 35 that penetrates in the vertical direction and through which the sucked air passes, and the second elongated hole portion 32, and has a third vent hole 35 that is sized to allow only the tool 17 to move. 3 holes 36.
The third vent 35 communicates with the second vent 31 and has the same size as the lower end opening of the second vent 31 .

The third vent hole 35 is provided at the center of the third plate 34 in the longitudinal direction. This third ventilation port 35 is a hole that penetrates in the vertical direction and is long in the longitudinal direction. That is, the third ventilation port 35 is a rectangular through hole that is long in the left-right direction when viewed from above. The third ventilation holes 35 are provided on the front and rear sides of a plurality of third holes 36 provided in the left-right direction. That is, a pair of third ventilation holes 35 are provided in front and back (in the y-axis direction) with the plurality of third holes 36 in between.

The opening size of the third ventilation port 35 is the same as the opening size of the second ventilation port 31. That is, the third vent hole 35 is a long hole corresponding to the inclined second vent hole 31 provided in the second plate 30.
The third ventilation port 35 is disposed in abutment with the second ventilation port 31, and is in a state in which they communicate with each other. That is, the third ventilation port 35a on the front side is arranged in abutment with the second ventilation port 31a on the front side, and is in a state of communication with each other. Moreover, the third vent hole 35b on the rear side is disposed in abutment with the second vent hole 31b on the rear side, so that they are in communication with each other.

A plurality of third holes 36 are provided in parallel in the left-right direction so as to correspond to a plurality of tools 17 arranged in the left-right direction. Specifically, the third hole 36 is a tool hole with a small inner diameter in which only the tool 17 can move. The tool hole portion 36 is a circular through hole in a plan view, and preferably has a diameter slightly larger than the diameter of the tool 17. This tool hole 36 has a small diameter in order to prevent the air around the tool 17 from being sucked. A plurality of tool holes 36 are provided in the longitudinal direction, corresponding to the number of tools 17.

That is, by providing the third plate 34 with a small-diameter tool hole 36 through which only the tool 17 can move, and a third vent 35 that communicates with the second vent 31, the tool holder 18 and the tool 17 main body side are provided. It is possible to suppress the flow rate of air from the elongated hole portion 24, the first elongated hole portion 28, and the second elongated hole portion 32 that accommodate the tool 17, and to guide the air to the third vent 35 side. The air flow velocity near the tip can be increased. Note that the elongated hole portion 24, the first elongated hole portion 28, and the second elongated hole portion 32 that house the tool holder 18 and the tool 17 main body side are open to the atmosphere or maintained under positive pressure, and the tool 17 Since air flows into the fourth passage 39 (described later) through the gap between the main body of the tool 17 and the tool hole 36, air containing dust from the tip side of the tool 17 is prevented from flowing into the tool holder 18 side. There is.

FIG. 9 shows a plan view and a FF sectional view of the fourth plate 37 that constitutes the dust collection hood 20 of the present invention.
As shown in FIGS. 2 to 4, FIG. 9, etc., at least one of the plurality of plates constituting the dust collection hood 20 is attached to the lower surface of the base plate 22, and sends the sucked air to the third plate 34. This is the fourth plate 37 through which it passes.

The fourth plate 37 is a plate material that is long in the left-right direction and is attached to be stacked on the lower surface side of the third plate 34. The fourth plate 37 communicates with a fourth ventilation port 38 (suction port) that penetrates in the vertical direction and sucks air around the substrate W to be scribed, and guides the sucked air. It has a fourth passage 39.
The suction port 38 is provided at the center of the fourth plate 37. The suction port 38 is a hole that penetrates in the vertical direction and is long in the longitudinal direction. That is, the suction port 38 is a rectangular through hole that is long in the left-right direction when viewed from above. The suction port 38 is provided below the third ventilation port 35.

The length of the suction port 38 in the front-rear direction (y-axis direction) is slightly larger than the diameter of the tool hole 36 (tool 17). The length of the suction port 38 in the left-right direction (x-axis direction) is larger than the plurality of tool holes 36 arranged in the left-right direction.
That is, as the tool 17 moves from the tool hole 36, air around the substrate W to be scribed by the tool 17 is sucked into the suction port 38. Note that the size of the suction port 38 can be changed as appropriate.

The fourth passage 39 is a groove carved into the fourth plate 37 and open upward (in the + direction of the z-axis). This fourth passage 39 is provided in communication with the suction port 38 (see the FF sectional view in FIG. 9).
The fourth passage 39 is a groove extending to a width corresponding to the third ventilation port 35a on the front side and the third ventilation port 35b on the rear side. That is, the fourth passage 39 communicates with the third ventilation port 35a on the front side and the third ventilation port 35b on the rear side. Further, the fourth passage 39 is a passage that surrounds the outer periphery of the suction port 38 in plan view.

The fourth passage 39 communicates with the third vent 35a on the front side and the third vent 35b on the rear side. The fourth passage 39 guides the air sucked from the suction port 38 to a pair of front and rear third ventilation ports 35a and 35b.
Note that it is preferable to prepare a plurality of fourth plates 37 having suction ports 38 of different sizes. Simply by replacing the fourth plate 37, the air suction force can be changed.

Here, the flow of air passing through the first plate 25 to fourth plate 37 of the dust collection hood 20 will be explained.
As shown in FIGS. 2 and 4, the dust collection hood 20 is attached to the lower surface of the base plate 22, the third plate 34 is stacked on the fourth plate 37, and the second plate 30 is stacked on the third plate 34. are stacked, and the first plate 25 is stacked on the second plate 30.

The thick arrows shown in FIGS. 2 and 4 represent the flow of air that is sucked from the periphery of the substrate W to be scribed by the tool 17 and passes through the first plate 25 to fourth plate 37 of the dust collection hood 20.
First, air containing dust is sucked into the interior through the suction port 38 of the fourth plate 37 and then heads toward the fourth passage 39 . The air containing dust passes through the fourth passage 39 and heads toward the upper third plate 34. The air heads toward either of the front and rear pair of third ventilation ports 35a, 35b. Further, the air in the elongated hole portion 24 , the first elongated hole portion 28 , and the second elongated hole portion 32 is also sucked into the fourth passage 39 through the gap between the main body of the tool 17 and the tool hole portion 36 .

The air directed to the third vent 35a on the front side is provided in the second plate 30 on the upper side and flows toward the second vent 31a on the front side, which is tilted forward. On the other hand, the air directed to the rear third vent 35b is provided in the upper second plate 30, and the air heads toward the rear tilted second vent 31b.
The air directed to the second vent hole 31a on the front side is directed to the first vent hole 26a on the front side provided in the first plate 25 on the upper side. On the other hand, the air heading towards the second rear vent 31b heads towards the first rear vent 26b provided in the first plate 25 on the upper side.

The air that has passed through the first vent 26a on the front side flows through the front passage 27a and heads toward the connecting passage 27c. On the other hand, the air that has passed through the first ventilation port 26b on the rear side flows through the rear passage 27b and heads toward the connection passage 27c. In other words, the air that has passed through the first vent 26 heads toward the first passage 27 .
The air that has passed through the first passage 27 heads toward either one of the pair of left and right ventilation ports 23a and 23b provided in the base plate 22. The air that has passed through the communication ports 23a and 23b passes through the duct 21 and is stored in the dust collector together with dust.

In this way, when performing the scribing process on the substrate W, the structure is such that air containing dust passes through the first plate 25 to the fourth plate 37 described in detail above, so that the air is sucked. At this time, the wind speed near the tip of the tool 17 increases (the suction force improves), and the dust can be removed more effectively before it adheres to the surface of the substrate W.
As described above, according to the dust collection mechanism 19 of the groove machining head 16 and the groove machining apparatus 1 of the present invention, the dust collection hood 20 is configured to improve the flow velocity of suction air, and the dust generated during scribing process is removed from the substrate W. It is possible to more effectively remove dust before it adheres to the surface.

It should be noted that the embodiments disclosed herein are illustrative in all respects and should not be considered restrictive.
In particular, in the embodiments disclosed herein, matters not explicitly stated, such as operating conditions, operating conditions, dimensions and weights of components, etc., do not deviate from the scope of those skilled in the art and are within the ordinary skill of those skilled in the art. We have adopted matters that can be easily assumed by a business operator.

1 Grooving device 2 Table 3 Frame 4 Support stand 5 Leg member 6 Mounting base 7 Pedestal 8 Camera 9 Guide 10 Monitor 11 Bridge 12 Support column 13 Guide bar 14 Guide 15 Motor 16 Grooving head 17 Tool 18 Tool holder 19 Dust collection mechanism 20 Dust collection hood 21 Duct 22 Base plate 23 Conveyance port 23a Conveyance port (left side)
23b Delivery port (right side)
24 Long hole portion 25 First plate 26 First vent 26a First vent (front side)
26b 1st vent (rear side)
27 First passage 27a Front passage 27b Rear passage 27c Connection passage 28 First elongated hole 29 Side wall 29a Front wall 29b Rear wall 30 Second plate 31 Second vent 31a Second vent (front)
31b 2nd vent (rear side)
32 Second elongated hole portion 33 Inclined surface 33a Front wall surface (front second vent)
33b Rear wall surface (second vent on the front side)
33c Front wall (second vent on the rear side)
33d Rear wall surface (second vent on the rear side)
34 Third plate 35 Third vent 35a Third vent (front side)
35b 3rd vent (rear side)
36 Third hole (tool hole)
37 4th plate 38 4th vent (suction port)
39 4th passage W board

Claims (6)

a grooving head equipped with a tool holder that holds a plurality of tools with the cutting edges facing downward, side by side in the left and right direction;
a dust collection hood that is provided at a lower part of the groove machining head and sucks dust generated when scribing the substrate with the tool together with air;
a duct through which the air from the dust collection hood passes;
a dust collector that sucks the air that has passed through the duct and collects the dust;
A base plate to which the dust collection hood is attached is provided on the lower surface of the groove processing head,
The dust collection hood is configured by laminating a plurality of plates through which the air flows,
The base plate is a plate material that is long in the left-right direction, and has a communication port that penetrates in the vertical direction and communicates with the duct, and a long hole that penetrates in the vertical direction and through which the tool holder passes,
The communication ports are provided in a pair on the left and right ends of the base plate, and the duct is attached to the communication ports,
At least one of the plurality of plates constituting the dust collection hood is a first plate that is provided on the lower surface side of the base plate and transmits the sucked air to the duct,
The first plate is a plate material that is long in the left-right direction, and includes a first vent that passes through the base plate in the vertical direction and through which the sucked air passes, and a first vent that communicates with the first vent and allows the sucked air to pass through the base plate. and a first elongated hole communicating with the elongated hole of the base plate and having a size through which the tool holder passes;
The first passage communicates with the pair of left and right passage ports,
The first vent hole is provided in the longitudinal center of the first plate.
A dust collection mechanism for a groove machining head characterized by the following. At least one of the plurality of plates constituting the dust collection hood is a second plate provided on the lower surface side of the base plate and transmits the sucked air to the duct,
The second plate is a plate material that is long in the left-right direction, and includes a second vent hole that penetrates in the vertical direction and through which the sucked air passes, and a second elongated hole portion that is sized to allow the tool holder to pass through. , has
The second ventilation port is a through hole that is long in the left-right direction, and the long surface of the second ventilation port in the left-right direction is an inclined surface that is inclined outward with respect to the vertical axis. The dust collection mechanism for a groove machining head according to claim 1 . At least one of the plurality of plates constituting the dust collection hood is a third plate provided on the lower surface side of the base plate and transmits the sucked air to the duct,
The third plate is a plate material that is long in the left-right direction, and includes a third vent hole that penetrates in the vertical direction and through which the sucked air passes, and a third hole that is large enough to allow the tool to pass through. have,
The dust collection mechanism of the groove machining head according to claim 1 , wherein a plurality of the third holes are provided in parallel in the left-right direction so as to correspond to the plurality of tools arranged in the left-right direction. . At least one of the plurality of plates constituting the dust collection hood is a fourth plate that is provided on the lower surface side of the base plate and transmits the sucked air to the duct,
The fourth plate is a plate material long in the left-right direction, and includes a fourth vent that penetrates in the vertical direction and sucks in the external air, and a fourth vent that communicates with the fourth vent and guides the sucked air. has a passage;
The dust collection mechanism for a groove machining head according to claim 1 , wherein the fourth vent is a hole through which the tool can move. a grooving head equipped with a tool holder that holds a plurality of tools with the cutting edges facing downward, side by side in the left and right direction;
a dust collection hood that is provided at a lower part of the groove machining head and sucks dust generated when scribing the substrate with the tool together with air;
a duct through which the air from the dust collection hood passes;
a dust collector that sucks the air that has passed through the duct and collects the dust;
A base plate to which the dust collection hood is attached is provided on the lower surface of the groove processing head,
The base plate is a plate material that is long in the left-right direction, and has a communication port that penetrates in the vertical direction and communicates with the duct, and a long hole that penetrates in the vertical direction and through which the tool holder passes,
The communication ports are provided in a pair on the left and right ends of the base plate, and the duct is attached to the communication ports,
The dust collection hood is
a first plate that is attached to be stacked on the lower surface of the base plate and that transmits the sucked air to the duct;
a second plate that is attached to be stacked on the lower surface of the first plate and that transmits the sucked air to the first plate;
a third plate that is attached to be stacked on the lower surface of the second plate and transmits the sucked air to the second plate;
a fourth plate that is attached to be stacked on the lower surface of the third plate and transmits the sucked air to the third plate;
The first plate is a plate material that is long in the left-right direction, and includes a first vent that passes through the base plate in the vertical direction and through which the sucked air passes, and a first vent that communicates with the first vent and allows the sucked air to pass through the base plate. and a first elongated hole communicating with the elongated hole of the base plate and having a size through which the tool holder passes;
The first passage communicates with the pair of left and right passage ports,
The first vent is provided at the center of the first plate in the longitudinal direction,
The second plate is a plate member that is long in the left-right direction and is attached to be stacked on the lower surface side of the first plate, and has a second vent hole that penetrates in the vertical direction and through which the sucked air passes. , a second elongated hole communicating with the first elongated hole and having a size through which the tool holder passes;
The second vent hole is a through hole that is long in the left-right direction, and the long surface of the second vent hole in the left-right direction is an inclined surface that is inclined outward with respect to the axis in the vertical direction,
The third plate is a plate member that is long in the left-right direction and is attached to be stacked on the lower surface side of the second plate, and has a third vent hole that penetrates in the vertical direction and through which the sucked air passes. , a third hole communicating with the second elongated hole and having a size through which the tool can pass;
The third vent port communicates with the second vent port and has the same size as the second vent port,
A plurality of the third holes are provided in parallel in the left-right direction so as to correspond to the plurality of tools arranged in the left-right direction,
The fourth plate is a plate member that is long in the left-right direction and is attached to be stacked on the lower surface side of the third plate, and includes a fourth vent that penetrates in the vertical direction and sucks in the external air; a fourth passage that communicates with a fourth vent and guides the sucked air;
The fourth vent is provided below the third vent,
A dust collection mechanism for a groove machining head, wherein the fourth passage guides the air passing therethrough to the third ventilation port. a table on which the board is placed;
the groove machining head to which a tool holder having a tool for groove machining is attached;
A dust collection mechanism for a groove machining head according to any one of claims 1 to 5 ;
A moving means for relatively moving the table and the groove processing head in a horizontal plane, the groove processing head being moved parallel to the upper surface of the substrate to form a groove on the substrate. Groove machining equipment.

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